JP2005172313A - Air conditioning equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide air conditioning equipment capable of controlling a temperature of a local area where the conditioned air hardly flows, such as a measuring space of a laser interferometer, with high accuracy. <P>SOLUTION: A measuring device 50 such as the laser interferometer is mounted inside of an environmental chamber 12 of this air conditioning equipment 10. The measuring device 50 has the measuring space 58 in a recessed part of a base 52. A local blowout unit 60 is mounted on the measuring space 58, and communicated with a second heater 34 through a branch duct 42. Whereby the conditioned air passed through the second heater 34 is blown out toward the measuring space 58 from the local blowout unit 60. The conditioned air blown out from the local blowout unit 60 is controlled to have an air speed higher than that of the conditioned air blown out from a blowout panel 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an air conditioning facility, and more particularly to an air conditioning facility that controls the temperature of an environmental chamber in which precision measuring equipment such as a laser interferometer is installed.

  In recent years, a precision environment chamber room of a clean room for semiconductor manufacturing is required to strictly control the temperature of the room with the integration of semiconductors on a large scale. In particular, in a space in which inspection analysis work is actually performed, it is required to suppress room temperature fluctuations to ± 1/1000 degrees or less in order to increase inspection analysis accuracy. For this reason, highly accurate temperature management is implemented in the air-conditioning equipment for precision environmental chambers.

Patent Document 1 describes an air conditioning facility in which an FFU is disposed on a ceiling surface of a clean room, and a cooling coil is built in an FFU facing a local area in the clean room. According to this air conditioning equipment, the temperature of the local region can be controlled to the set temperature by adjusting the flow rate of the cold water flowing through the cooling coil.
JP-A-11-337115

  However, even if a precision measuring device, for example, a laser interferometer, is installed in the local region of Patent Document 1, there is a problem that the analysis accuracy cannot be improved.

  The reason for this is that the base of the laser interferometer has a complicated shape, for example, a concave shape. Therefore, even if the air-conditioning air is downflowed from the ceiling surface of the chamber, the measurement space (local region) formed in the concave portion of the base However, the air-conditioning air does not flow smoothly, and the temperature of the measurement space cannot be accurately controlled. Therefore, Cited Document 1 cannot accurately control the temperature of the local space where the air-conditioning air hardly flows.

  Further, since the temperature of the cited document 1 is adjusted by the cooling coil, there is a problem that the quick response of the temperature control is poor and strict temperature management cannot be performed.

  This invention is made | formed in view of such a situation, and it aims at providing the air-conditioning installation which can control the temperature of the local area | region where air-conditioning air does not flow easily.

  In order to achieve the above object, an air conditioning system for controlling the temperature of a local region formed in a chamber, and a temperature control device for controlling the temperature of air supplied to the chamber, An air outlet provided in the local area, and a duct for supplying air-conditioned air, the temperature of which is controlled by the temperature control device, to the air outlet, and the pressure in the local area is The air-conditioning air is blown out from the outlet so as to be larger than the pressure in the peripheral portion.

  According to the air conditioning equipment of the first aspect, the air-conditioning air whose temperature is controlled by the temperature control device is supplied to the chamber to control the temperature in the entire chamber, and the air-conditioning air is moved from the outlet to the local region. Direct blowing to control the temperature of the local area. Therefore, the temperature of the local region can be reliably controlled. In addition, since the temperature inside the chamber is controlled, even if heat is generated around the local area, the heat can be immediately removed from the chamber, and the local area can be adversely affected. Can be prevented.

  According to the invention of claim 1, since the conditioned air is directly blown out to the local area, the air flow of the conditioned air is stably formed in the local area, thereby preventing pressure fluctuation in the local area. can do.

  Furthermore, according to the first aspect of the invention, since the local region is controlled to have a higher pressure than the peripheral portion, it is possible to prevent the air in the peripheral portion from flowing into the local region. Therefore, it is possible to prevent the heat in the peripheral portion from being transmitted to the local region, and to prevent temperature fluctuations in the local region. Moreover, since the air in the peripheral portion does not flow into the local area, it is possible to prevent the airflow of the conditioned air in the local area from being disturbed, and to prevent pressure fluctuations in the local area.

  According to a second aspect of the present invention, in the first aspect of the present invention, an air suction port is provided at a position facing the air outlet with the local region interposed therebetween, and the air inlet is formed of air-conditioned air blown from the air outlet. It is characterized by inhaling air with an air volume smaller than the air volume.

  According to the second aspect of the present invention, the suction port is provided at a position opposite to the blower outlet across the local area so as to suck in the air. Air is sucked from the suction port. Therefore, the air current of the air-conditioning air flowing from the air outlet to the air inlet is stably formed in the local region. Thereby, temperature fluctuation and pressure fluctuation in the local region can be prevented.

  According to the invention of claim 2, since the blown air volume from the air outlet is larger than the intake air volume from the air inlet, it is possible to prevent the air around the local area from flowing into the local area. Therefore, it is possible to prevent the heat of the peripheral portion from being transmitted to the local region, and to more reliably prevent temperature fluctuations in the local region. Furthermore, since the disturbance of the airflow in the local area can be prevented, the pressure fluctuation in the local area can be more reliably prevented.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the air outlet is connected to a branch duct branched from a duct for supplying air-conditioned air from the temperature control device to the chamber. It is a feature.

  According to the third aspect of the present invention, since the conditioned air whose temperature is controlled by the temperature control device is supplied to both the chamber and the local region, the chamber and the local region can be controlled to the same temperature. In addition, since the temperature control characteristics are the same in the chamber and the local region, the difference in temperature variation between the chamber and the local region is reduced. Therefore, the local region is less affected by the temperature of the peripheral portion, and thus temperature fluctuations in the local region can be more reliably suppressed.

  The invention according to claim 4 is the invention according to claim 3, characterized in that the branch duct is provided with a local temperature control device for adjusting the temperature of the air-conditioning air flowing through the branch duct.

  According to the invention described in claim 4, since the temperature of the air flowing through the branch duct is further controlled by the local temperature control device provided in the branch duct, the temperature of the local region can be controlled with higher accuracy. . Moreover, since the air flowing through the branch duct has a small air volume, the temperature control responsiveness can be improved by controlling the temperature with the local temperature control device.

  According to the air conditioning equipment according to the present invention, not only the air-conditioning air is supplied into the chamber to control the temperature of the entire chamber, but also the air-conditioning air is supplied to the local region, and the local region has a higher pressure than the peripheral portion Therefore, the temperature in the local area can be controlled with high accuracy, and temperature fluctuation and pressure fluctuation in the local area can be suppressed.

  Hereinafter, preferred embodiments of an air conditioning facility according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a plan sectional view schematically showing the configuration of the air conditioning equipment 10 of the first embodiment.

  As shown in FIG. 1, the air conditioning equipment 10 includes an environmental chamber 12, and a blow-out panel 14 and a suction panel 16 are provided on opposite sides of the environmental chamber 12.

  The suction panel 16 communicates with the outside through an exhaust duct 18, and a part of the air in the environmental chamber 12 is exhausted through the exhaust duct 18. The suction panel 16 communicates with the suction port 22 </ b> A of the air conditioner 22 through the suction duct 20. A fan 24 is provided inside the air conditioner 22, and the air in the chamber 12 is sucked into the air conditioner 22 through the suction duct 20 by driving the fan 24. In addition, an outside air intake duct 30 is connected to the suction port 22 </ b> A of the air conditioner 22, and outside air is taken into the air conditioner 22 through the outside air intake duct 30. Note that the air volume of the outside air taken into the air conditioner 22 is adjusted according to the air volume of the air exhausted from the exhaust duct 18.

  A cooling coil 26 is provided inside the air conditioner 22. The cooling coil 26 circulates cold water supplied from a cold water supply source (not shown). Therefore, the air sucked into the air conditioner 22 is cooled by the cooling coil 26 to a predetermined temperature (specifically, a temperature slightly lower than the target temperature).

  An outlet duct 28 is connected to the outlet 22 </ b> B of the air conditioner 22. A first heater 32 and a second heater 34 are arranged in this blow duct 28 in order, and the tip of the blow duct 28 is connected to the blow panel 14.

  As the first heater 32, for example, an electric heater that performs heating by energizing an electric heating wire is used. A first temperature sensor 36 is provided downstream of the first heater 32, and the temperature of the air heated by the first heater 32 is measured by the first temperature sensor 36. The first temperature sensor 36 is connected to the thyristor 40 via the instruction regulator 38, and the voltage of the power supplied to the first heater 32 is controlled by the thyristor 40. Thereby, the first heater 32 is feedback-controlled based on the measured value of the first temperature sensor 36, and the air passing through the first heater 32 is controlled to a predetermined temperature.

  The second heater 34 is composed of, for example, a light bulb heater using a halogen lamp or the like, and heats the air passing through the second heater 34 by lighting. The second heater 34 is feedback-controlled based on a measurement value of a second temperature sensor 44 disposed in a branch duct 42 described later. In other words, the second temperature sensor 44 is connected to the thyristor 48 via the instruction regulator 46, and the voltage of the power supplied to the second heater 34 is adjusted by the thyristor 48. Thereby, the second heater 34 is feedback-controlled based on the measured value of the second temperature sensor 44, and the air passing through the second heater 34 is controlled to a predetermined temperature.

  In addition, the kind and structure of the 1st heater 32 and the 2nd heater 34 are not limited to the example mentioned above. However, it is preferable that the second heater 34 is capable of finer temperature control than the first heater 32. In addition, it is preferable to use a second temperature sensor 44 having better measurement accuracy than the first temperature sensor 36. Furthermore, the second temperature sensor 44 is preferably arranged in the vicinity of the local blowing unit 60 described later, and more preferably installed inside the local blowing unit 60.

  As described above, the temperature of the air can be controlled with higher accuracy by performing the temperature control in two stages by the first heater 32 and the second heater 34.

  The air-conditioning air heated and controlled by the first heater 32 and the second heater 34 is sent to the blowing panel 14 through the blowing duct 28 and blown out from the blowing panel 14 into the environmental chamber 12. Inside the blowout panel 14, rectifying means (not shown) such as a punching plate is provided so that air-conditioned air is blown out uniformly from the entire surface of the blowout panel 14. On the other hand, rectifying means (not shown) such as a punching plate is also provided inside the suction panel 16 so that air is uniformly sucked from the entire surface of the suction panel 14. Therefore, a laminar flow state in which the air-conditioning air flows horizontally from the blow-out panel 14 toward the suction panel 16 is formed inside the environmental chamber 12. Thereby, the temperature inside the environment chamber 12 is controlled with high accuracy.

  A measuring device 50 is provided inside the environmental chamber 12. The measuring device 50 includes a base 52 formed in a gate shape in FIG. 1, and a measuring unit 54 is supported on a side surface 52 </ b> A of the base 52. The measuring unit 54 includes, for example, a laser interferometer and the like, and accurately measures the dimensions and the like of the measurement object 56 by irradiating a laser or the like toward the side surface 52B facing the side surface 52A. Hereinafter, a space formed between the side surface 52A and the side surface 52B of the base 52 is referred to as a measurement space 58 (corresponding to a local region). Note that the base 52 has a surface that faces the side surface 52C across the measurement space 58, and the measurement space 58 is in communication with the periphery through this surface.

  A local blowing unit 60 is provided on the side surface 52 </ b> C of the base 52. As shown in FIG. 2, the local blowing unit 60 has a hollow casing 62, and the surface of the casing 62 on the measurement space 58 side is constituted by a punching plate 64. The punching plate 64 has holes (corresponding to the air outlets) 64A, 64A. The casing 62 is attached to the base 52 with a slight gap so that heat transfer from the base 52 can be suppressed as much as possible. Instead of providing a slight gap between the casing 62 and the base 52, heat conduction from the base 52 may be prevented by surrounding the casing 62 with a heat insulating member.

  The tip of the branch duct 42 described above is connected to the casing 62. As shown in FIG. 1, the base end of the branch duct 42 is connected to the downstream side of the second heater 34 of the blowout duct 28. Therefore, the conditioned air that has passed through the second heater 34 is diverted to the branch duct 42 and is sent to the local blowing unit 60. The conditioned air sent to the local blowing unit 60 is rectified by the punching plate 64 of FIG. 2 and blown out in the horizontal direction. Thereby, a laminar flow state of the conditioned air is formed inside the measurement space 58.

  The conditioned air blown from the local blowing unit 60 is controlled such that the wind speed is slightly higher than the wind speed of the conditioned air blown from the blowing panel 14. For example, this control is performed by adjusting the ratio of the cross-sectional area of the blowout duct 28 and the cross-sectional area of the branch duct 42, or by adjusting the air volume of each duct by providing an air volume adjusting means such as a damper in the blow-out duct 28 or the branch duct 42. It is done by doing.

  In addition, you may make it surround the blowing duct 28 and the branch duct 42 with a heat insulating member. Thereby, it can prevent that the air-conditioning air which passes the blowing duct 28 or the branch duct 42 receives the influence of the heat from the outside.

  Next, the operation of the air conditioning equipment 10 configured as described above will be described.

  When the fan 24 of the air conditioner 22 is driven, the air in the environmental chamber 12 is sucked from the suction panel 16 and cooled to a predetermined temperature by the cooling coil 26 of the air conditioner 22. The cooled air is heated by the first heater 32, and the temperature is adjusted to a predetermined accuracy, for example, a range of about 3/100 degrees with respect to the target temperature. The air-conditioning air is further heated by the second heater 34 to be controlled to a higher accuracy with respect to the target temperature, for example, in a range of about 1/1000 degrees. Most of the air-conditioning air whose temperature is strictly controlled in this way is sent to the blowing panel 14 and blown out from the blowing panel 14 into the environmental chamber 12. Then, the air is sucked in from the suction panel 16 disposed opposite to the blowout panel 14, and a horizontal laminar flow state is formed in the environmental chamber 12. Therefore, heat generated in the environmental chamber 12, for example, heat generated from the measuring device 50 is sucked from the suction panel 16 without stagnation in the environmental chamber 12. Thereby, the whole inside of the environmental chamber 12 can be controlled to a desired temperature.

  By the way, in this Embodiment, since the measurement space 58 is formed in the recessed part of the base 52, the air-conditioning air which blown off from the blowing panel 14 cannot enter into the measurement space 58 smoothly. For this reason, the temperature of the measurement space 58 cannot be accurately controlled only by the conditioned air blown from the blowout panel 14.

  Therefore, in the present embodiment, the local blowing unit 60 is provided in the measurement space 58 so that the conditioned air is blown directly into the measurement space 58. Therefore, a horizontal laminar flow state is formed inside the measurement space 58 by the conditioned air that has passed through the second heater 34 and is strictly temperature controlled. Thereby, the temperature of the measurement space 58 can be controlled with high accuracy.

  Moreover, in this Embodiment, it controls so that the wind speed of the air-conditioning air which blows off from the local blowing unit 60 becomes larger than the wind speed of the air-conditioning air which blows off from the blowing panel 14. Therefore, the measurement space 58 has a dynamic pressure larger than that of the peripheral portion thereof, and the air in the peripheral portion is prevented from flowing into the measurement space 58. Thereby, since the laminar flow state formed in the measurement space 58 is not disturbed, the pressure fluctuation in the measurement space 58 can be prevented. Further, since air in the peripheral portion does not enter the measurement space 58, heat generated in the peripheral portion can be prevented from entering the measurement space 58, and temperature fluctuations in the measurement space 58 can be prevented.

  Furthermore, according to the present embodiment, the conditioned air that has passed through the second heater 34 is divided and supplied to the environmental chamber 12 and the measurement space 58, so that the environmental chamber 12 and the measurement space 58 have the same temperature. Can be accurately controlled. Further, by using the same air conditioning system equipment (that is, the air conditioner 22, the first heater 32, and the second heater 34) in the environmental chamber 12 and the measurement space 58, both control characteristics become the same, and temperature fluctuations occur. Can be prevented from occurring. As a result, the measurement space 58 is not easily affected by the temperature of the peripheral portion thereof, so that the temperature of the measurement space 58 can be controlled with higher accuracy.

  As described above, according to the present embodiment, the temperature in the measurement space 58 can be accurately controlled, and temperature fluctuations and pressure fluctuations in the measurement space 58 can be suppressed. In 58, the dimension of the object to be measured can be accurately measured.

  In the above-described embodiment, an example in which the measuring device 50 is arranged so that the direction of the conditioned air blown from the blowing panel 14 and the direction of the conditioned air blown from the local blowing unit 60 are orthogonal to each other. Although shown, it is not limited to this. For example, FIG. 3 shows an example in which the measuring device 50 is arranged so that the direction of the conditioned air blown from the blowout panel 14 and the direction of the conditioned air blown from the local blowing unit 60 are parallel to each other. ing. In this case, since the conditioned air flows in the same direction in the measurement space 58 and its peripheral portion, the airflow is not disturbed at the boundary between the measurement space 58 and the peripheral portion. Therefore, since the laminar flow state formed in the environment chamber 12 is not disturbed, the accuracy of temperature control in the entire environment chamber 12 can be improved. As a result, the measurement space 58 can be prevented from being adversely affected by the peripheral portion, so that the accuracy of temperature control in the measurement space 58 can be improved.

  In the above-described embodiment, it is preferable to provide an air mixture chamber (not shown) at the connecting portion between the blowout duct 28 and the branch duct 42. Thereby, the air-conditioning air which passed the 2nd heater 34 can be mixed, and air-conditioning air can be made into uniform temperature distribution. Therefore, the temperature of the environmental chamber 12 and the measurement space 58 can be controlled more strictly.

  FIG. 4 is a schematic diagram showing the configuration of the air conditioning equipment of the second embodiment.

  In the air conditioning equipment of the second embodiment, the second heater 34 is disposed in the branch duct 42, and the base end of the branch duct 42 is connected to the downstream side of the first temperature sensor 36 of the blowout duct 28. . Therefore, a part of the air-conditioning air whose temperature is roughly controlled by the first heater 32 is diverted to the branch duct 42 and finely temperature-controlled by the second heater 34. Then, the air is supplied to the local blowing unit 60 through the branch duct 42 and is blown out from the local blowing unit 60 to the measurement space 58.

  According to the second embodiment configured as described above, the temperature of the air with a small amount of air flowing through the branch duct 42 is controlled by the second heater 34, so that temperature control with good responsiveness can be performed. Thereby, the responsiveness of the temperature control of the measurement space 58 can be improved.

  In the case of the second embodiment as well, an air mixture chamber may be provided at the connection portion between the blowout duct 28 and the branch duct 42, or the measuring device 50 may be arranged as shown in FIG.

  Further, in the second embodiment, partially different air conditioning systems are used in the environmental chamber 12 and the measurement space 58, but the temperature may be controlled by completely different air conditioning systems.

  FIG. 5A is a plan sectional view schematically showing the configuration of the air conditioning equipment of the third embodiment, and FIG. 5B is a longitudinal sectional view thereof.

  As shown in FIG. 5A, in the air conditioning equipment of the third embodiment, the local blowing unit 60 is attached to the side surface 52 </ b> A of the base 52. A local suction unit 66 is attached to the side surface 52B facing the side surface 52A. The local suction unit 66 is configured in the same manner as the local blowing unit 60 shown in FIG. That is, the local suction unit 66 includes a casing (not shown) attached to the base 52 with a slight gap, and a punching plate (not shown) provided on the surface of the casing on the measurement space 58 side. The duct 68 is connected to the casing. The duct 68 is connected to the suction duct 20, and is connected to the air conditioner 22 (see FIG. 1) via the suction duct 20. Therefore, by driving the fan 24 of the air conditioner 22, the air in the measurement space 58 is sucked into the local suction unit 66 and is sent to the air conditioner 22 through the duct 68 and the suction duct 20. At that time, since the local suction unit 66 is provided with the punching plate, air can be evenly sucked from the entire surface of the local suction unit 66.

  Further, the amount of air sucked into the local suction unit 66 is controlled to be smaller than the amount of air-conditioned air blown from the local blowing unit 60. For example, the ratio of the cross-sectional area of the branch duct 42 and the cross-sectional area of the duct 68 that satisfies this relationship is obtained in advance by a test or the like, or the air volume is adjusted by providing an air volume adjusting means such as a damper in the duct 68. Done.

  As shown in FIG. 5B, the measurement unit 54 is attached to the upper part of the base 52. The measuring unit 54 is configured to measure the dimension of the measurement object 58 by irradiating a laser or the like toward the measurement object 58 fixed below.

  According to the third embodiment configured as described above, since the local suction unit 66 is provided at a position facing the local blowing unit 60 across the measurement space 58, the conditioned air blown from the local blowing unit 60 is It is sucked into the local suction unit 66. Therefore, since the laminar flow state of the conditioned air is more stably formed in the measurement space 58, the measurement in the measurement space 58 can be performed more accurately and stably.

  Further, according to the third embodiment, since the air volume of the air sucked from the local suction unit 66 is controlled to be slightly smaller than the air volume of the air-conditioning air blown from the local blowing unit 60, Air can be prevented from entering the measurement space 58. Therefore, temperature fluctuations and pressure fluctuations in the measurement space 58 can be prevented.

  Note that the configuration of the measuring device 50 is not limited to the above-described embodiment. For example, in the measurement apparatus shown in FIG. 6, measurement units 54 and 54 are arranged in the upper and lower portions of the measurement space 58. Then, a configuration is such that one measurement unit 54 irradiates a laser or the like toward the other measurement unit 54 and the other measurement unit 54 receives the light to measure the dimension of the measurement object 56. Has been. The base 52 of this measuring device has a pair of openings 52D and 52D for taking the measured object 56 into and out of the measurement space 58, and the pair of openings 52D and 52D is on the opposite side across the measurement space 58. Is formed.

  The local blowing unit 60 is disposed outside the opening 52D and at a position close to the measurement space 58. When air-conditioning air is blown out from the local blowing unit 60, the air-conditioning air passes through the measurement space 58 and is then sent to the peripheral portion through the other opening 52D. Thereby, the laminar flow state of the conditioned air can be formed in the measurement space 58, and the temperature of the measurement space 58 can be controlled with high accuracy.

  In the above-described embodiment, the present invention is applied as the air conditioning equipment for controlling the temperature of the measurement space 58 formed in the measurement device 50 such as a laser interferometer. However, the application of the present invention is not limited to this. Absent. The present invention can be applied to air-conditioning equipment that accurately controls the temperature in a local region where it is difficult to form a laminar flow state using only the air-conditioned air blown from the blow-out panel 14. Therefore, the measuring device 50 is not limited to the laser interferometer, and other devices may be installed. In addition, when a device that is less affected by pressure fluctuations in the measurement space 58 is installed, the air flows into the measurement space 58 from the peripheral portion by adjusting the air volume of the air-conditioning air blown from the local blowing unit 60 or the blowing panel 14. This may be surely prevented. In other words, it is always sensed whether or not there is air intrusion into the measurement space 58, and based on this, the air volume of the air-conditioning air blown from the local blowing unit 60 or the blowing panel 14 is adjusted, and the measurement space 58 is Make sure that no air enters from the parts. Thereby, it is possible to reliably prevent the air in the peripheral portion from entering the measurement space 58 and to prevent temperature fluctuations in the measurement space 58.

Plan sectional drawing which shows typically composition of air-conditioning equipment of a 1st embodiment. Plan sectional drawing which shows composition of a local blowing unit Plane cross-sectional view showing another installation example of measuring device Plan sectional drawing which shows typically the composition of the air-conditioning equipment of a 2nd embodiment. Explanatory drawing which shows typically the structure of the air-conditioning equipment of 3rd Embodiment. Longitudinal sectional view showing another configuration example of measuring device

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Air conditioning equipment, 12 ... Environmental chamber, 14 ... Outlet panel, 16 ... Suction panel, 18 ... Exhaust duct, 20 ... Suction duct, 22 ... Air conditioner, 24 ... Fan, 26 ... Cooling coil, 28 ... Outlet duct, 30 ... outside air intake duct, 32 ... first heater, 34 ... second heater, 36 ... first temperature sensor, 38 ... indicator regulator, 40 ... thyristor, 42 ... branch duct, 44 ... second temperature sensor, 46 ... indicator adjustment 48 ... Thyristor, 50 ... Measuring device, 52 ... Base, 54 ... Measuring unit, 56 ... Object to be measured, 58 ... Measurement space, 60 ... Local blowout unit

Claims (4)

In the air conditioning equipment that controls the temperature of the local region formed in the chamber,
A temperature control device for controlling the temperature of air supplied to the chamber;
An air outlet provided in the local area;
A duct for sending air-conditioned air whose temperature is controlled by the temperature control device to the outlet,
Air-conditioning equipment that blows out air-conditioned air from the air outlet so that the pressure in the local region is greater than the pressure in the peripheral portion of the local region.   An air suction port is provided at a position facing the air outlet with the local region in between, and the air inlet sucks air with an air volume smaller than an air volume of air-conditioned air blown out from the air outlet. Item 2. The air conditioning equipment according to Item 1.   The air conditioning equipment according to claim 1 or 2, wherein a branch duct branched from a duct for sending air conditioning air from the temperature control device to the chamber is connected to the air outlet.   The air conditioning equipment according to claim 3, wherein the branch duct is provided with a local temperature control device for adjusting a temperature of the air-conditioning air flowing through the branch duct.

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