JP2005166382A - Gas discharge lamp - Google Patents

Gas discharge lamp Download PDF

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JP2005166382A
JP2005166382A JP2003402347A JP2003402347A JP2005166382A JP 2005166382 A JP2005166382 A JP 2005166382A JP 2003402347 A JP2003402347 A JP 2003402347A JP 2003402347 A JP2003402347 A JP 2003402347A JP 2005166382 A JP2005166382 A JP 2005166382A
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cathode
tip
discharge lamp
discharge
gas
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Kazuya Nakatsuka
和也 中塚
Tsutomu Akasabi
勉 赤錆
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HIMEJI RIKA KK
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HIMEJI RIKA KK
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<P>PROBLEM TO BE SOLVED: To improve stability of a light output, in an extra-high pressure discharge lamp of a type made to light after transferring from glow discharge to arc discharge. <P>SOLUTION: A cathode is constituted by coupling a cathode main body made of porous high-melting point metal material made to contain an easily electron emitting matter with a base body made of a high-melting point metal material so as its tip to protrude further than the base body. A tip part of the cathode is formed into a cusp shape with a solid angle of 50° or more, and a glow discharge coil is fitted to a body of the cathode from outside. Pressure of rare gas for glow discharge start-up in discharge gas is preferred to be 101×10<SP>3</SP>Pa(760 torr) or less and a solid angle of the tip of the cathode is preferred to be 50° or more. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明はガス放電灯に関し、特に光出力の安定性を向上させるようにしたガス放電灯に関する。   The present invention relates to a gas discharge lamp, and more particularly to a gas discharge lamp that improves the stability of light output.

例えば、各種の検査機器、投影機器、光化学反応機器等の光源にはガス放電灯がよく採用されている。このガス放電灯は陰極と陽極とを対向させて放電ガス中に封入し、陰極と陽極との間にアーク放電を行わせることにより点灯させるようになっている。   For example, gas discharge lamps are often used as light sources for various inspection devices, projection devices, photochemical reaction devices, and the like. In this gas discharge lamp, a cathode and an anode are opposed to each other and sealed in a discharge gas, and an arc discharge is performed between the cathode and the anode so that the lamp is turned on.

この種のガス放電灯にはグロー放電からアーク放電に移行させて点灯を行う超高圧放電灯、例えば超高圧水銀ランプがある(特許文献1、特許文献2、等参照)。この種の超高圧放電灯の陰極はトリウムを2%程度ドープした高融点金属材料、例えばタングステンやモリブデンを用い、先端部分を鋭利にした尖頭状に製作され、陰極に例えばタングステン製のグロー放電用コイルを外嵌した構造となっている。
特開平02−61957号公報 特開平11−354077号公報
As this type of gas discharge lamp, there is an ultra-high pressure discharge lamp, for example, an ultra-high pressure mercury lamp that is switched on from a glow discharge to an arc discharge (see Patent Document 1, Patent Document 2, etc.). The cathode of this type of ultra-high pressure discharge lamp is made of a refractory metal material doped with about 2% thorium, such as tungsten or molybdenum, and has a pointed shape with a sharp tip and a glow discharge made of tungsten, for example. It has a structure in which a coil is externally fitted.
Japanese Patent Laid-Open No. 02-61957 Japanese Patent Laid-Open No. 11-354077

上述のトリウムドープ陰極は融点が高いことから、ランプ始動時に陰極先端がグロー放電による高温に曝されても電極消耗が少ないという利点を有し、産業用ランプの陰極としてよく使用されてきた。   Since the above thorium-doped cathode has a high melting point, it has an advantage that the electrode consumption is small even when the tip of the cathode is exposed to a high temperature by glow discharge at the time of starting the lamp, and has been often used as a cathode for industrial lamps.

しかし、従来の超高圧放電灯ではトリウムドープ陰極を用いているので、陰極の電子放出能力が低く、光出力が変動し、その安定性があまりよくないという問題があった。   However, since the conventional ultra-high pressure discharge lamp uses a thorium-doped cathode, there is a problem that the cathode has a low electron emission capability, the light output fluctuates, and its stability is not so good.

本発明はかかる問題点に鑑み、トリウムドープ陰極の欠点である光出力の安定性を向上させることができるようにしたガス放電灯を提供することを課題とする。   In view of such problems, the present invention has an object to provide a gas discharge lamp capable of improving the stability of light output, which is a drawback of a thorium-doped cathode.

そこで、本発明に係るガス放電灯は、水銀及び希ガスを封入した放電雰囲気中に陰極と陽極を対向させ、グロー放電からアーク放電に移行させて点灯させるようにしたガス放電灯において、上記陰極は高融点金属材料製の基体に、易電子放出物質を含有させた多孔質高融点金属材料で製作された陰極本体をその先端が基体よりも突出するように結合して構成され、上記陰極の先端部分は尖頭状に形成され、上記陰極にはグロー放電用コイルが外嵌されていることを特徴とする。   Therefore, the gas discharge lamp according to the present invention is a gas discharge lamp in which the cathode and the anode are opposed to each other in a discharge atmosphere in which mercury and a rare gas are sealed, and the lamp is turned on by moving from glow discharge to arc discharge. Is composed of a base made of a refractory metal material and a cathode body made of a porous refractory metal material containing an electron-emitting substance so that its tip protrudes from the base. The tip portion is formed in a pointed shape, and a glow discharge coil is fitted on the cathode.

本発明の特徴の1つは易電子放出物質を含有させた多孔質陰極を用い、この多孔質陰極にグロー放電開始用のコイルを外嵌させるようにした点にある。これにより、陰極の電子放出能力がアップするので、ガス放電灯の光出力を安定化させることができる。   One of the features of the present invention is that a porous cathode containing an electron-emitting material is used, and a glow discharge starting coil is fitted on the porous cathode. Thereby, since the electron emission capability of the cathode is improved, the light output of the gas discharge lamp can be stabilized.

ところで、放電雰囲気中の希ガスの圧力及び陰極の立体角はこの種のガス放電灯におけるグロー放電の円滑な開始、及びグロー放電からアーク放電への円滑な移行に密接に関係する。従来のトリウムドープ陰極では陰極の先端部分を鋭利の尖頭状(例えば、100Wガス放電灯の場合には立体角30°程度である)であることから、グロー放電の最中に不安定なアーク放電が開始されてしまうことがあった。また、陰極の先端立体角が大きい場合であっても、希ガスの圧力が101×103Pa(760torr)よりも高いと、同様にグロー放電の最中に不安定なアーク放電が開始されてしまうことがあった。 By the way, the pressure of the rare gas and the solid angle of the cathode in the discharge atmosphere are closely related to the smooth start of the glow discharge and the smooth transition from the glow discharge to the arc discharge in this type of gas discharge lamp. In a conventional thorium-doped cathode, the tip of the cathode has a sharp pointed shape (for example, a solid angle of about 30 ° in the case of a 100 W gas discharge lamp), and therefore an unstable arc during glow discharge. Discharge sometimes started. Even if the solid angle of the tip of the cathode is large, if the pressure of the rare gas is higher than 101 × 10 3 Pa (760 torr), an unstable arc discharge is similarly started during the glow discharge. There was a case.

本発明では易電子放出物質を含む多孔質陰極を用いているので、陰極の電子放出能力が高く、陰極の先端立体角が大きな立体角であっても、安定したアーク放電を行わせることができる。また、放電雰囲気中の希ガスの圧力を101×103Pa(760torr)以下としているので、陰極の先端部分の立体角が50°以上の大きな立体角であっても、グロー放電からアーク放電に円滑に移行させることができる。 In the present invention, a porous cathode containing an electron-emitting substance is used, so that the cathode has a high electron emission capability, and stable arc discharge can be performed even when the solid angle of the cathode tip is large. . In addition, since the pressure of the rare gas in the discharge atmosphere is set to 101 × 10 3 Pa (760 torr) or less, even if the solid angle of the tip of the cathode is a large solid angle of 50 ° or more, the glow discharge is changed to the arc discharge. Smooth transition can be achieved.

つまり、希ガスの圧力は101×103Pa(760torr)以下であるのが望ましく、又陰極の先端部分は立体角が50°以上の尖頭状に形成されているのが好ましい。 That is, the pressure of the rare gas is desirably 101 × 10 3 Pa (760 torr) or less, and the tip portion of the cathode is preferably formed in a pointed shape having a solid angle of 50 ° or more.

希ガスの圧力は101×103Pa(760torr)以下であれば自由に選択できる。また、陰極の先端立体角は希ガスの圧力とも関係するが、50°以上、好ましくは65°以上、さらに好ましくは75°以上であるのが好ましい。 The pressure of the rare gas can be freely selected as long as it is 101 × 10 3 Pa (760 torr) or less. The solid angle at the tip of the cathode is also related to the pressure of the rare gas, but it is preferably 50 ° or more, preferably 65 ° or more, more preferably 75 ° or more.

グロー放電用コイルは陰極の胴部(尖頭部分に続く部分)に外嵌させるが、比較的熱に弱い多孔質陰極先端にグロー放電が入り、高温に曝されるのを抑制し軽減する上で、グロー放電用コイルの先端側の少なくとも1巻きを陰極の尖頭テーパー部分上に張り出させるのが好ましい。   The glow discharge coil is externally fitted to the body of the cathode (the part following the peak), but it suppresses and reduces exposure to high temperatures caused by glow discharge at the tip of the porous cathode, which is relatively heat-sensitive. Thus, it is preferable to project at least one turn on the tip side of the glow discharge coil on the pointed taper portion of the cathode.

陰極本体は基体に結合されていればよく、例えば基体の平坦状の先端面に陰極本体の平坦状の後端面を適切な接合材を用いて接合した構造としてもよく、又基体の先端面に嵌込み凹部を形成し、この嵌込み凹部に陰極本体を嵌入し、必要に応じて接合材で接合した構造としてもよく、又基体の凸状の先端面に陰極本体の凹状の後端面を嵌入し、必要に応じて適切な接合材で接合した構造としてもよく、さらには基体の中心に貫通穴を形成し、そこに棒状の陰極本体を挿通した構造としてもよい。   The cathode body may be bonded to the substrate. For example, the cathode body may have a structure in which the flat rear end surface of the cathode body is bonded to the substrate using a suitable bonding material. It is possible to have a structure in which a recessed portion is formed, the cathode body is inserted into the recessed portion, and if necessary, joined with a bonding material, and the concave rear end surface of the cathode body is inserted into the convex front end surface of the substrate. Further, if necessary, a structure may be formed by bonding with an appropriate bonding material, or a through hole may be formed in the center of the substrate, and a rod-shaped cathode body may be inserted therethrough.

陰極の尖頭部分の立体形状は角錐状でもよいが、アーク放電が円滑に行われるように、円錐状とするのが好ましい。角錐状の場合、陰極先端の立体角は中心線と角錐の面との間の角度から求めるようにする。   The three-dimensional shape of the tip of the cathode may be a pyramid, but it is preferably a cone so that arc discharge can be performed smoothly. In the case of a pyramid shape, the solid angle of the cathode tip is obtained from the angle between the center line and the surface of the pyramid.

陰極本体及び基体を構成する高融点金属材料にはタングステンやモリブデン等、この種のガス放電灯で使用されている高融点金属材料を用いることができる。   As the refractory metal material constituting the cathode body and the substrate, a refractory metal material used in this type of gas discharge lamp, such as tungsten or molybdenum, can be used.

また、陰極本体に含有させる易電子放出物質にはこの種のガス放電灯で使用されている物質、例えばバリウム、カルシウム、ストロンチウム等のアルカリ土類金属の酸化物を一種又は二種以上の混合物、これらに酸化アルミニウムを添加したものを用いることができる。   In addition, as an easy electron emission material to be included in the cathode body, a material used in this type of gas discharge lamp, for example, an oxide of an alkaline earth metal such as barium, calcium, strontium, or a mixture of two or more thereof, What added aluminum oxide to these can be used.

さらに、陰極本体は易電子放出物質を含有させた多孔質高融点金属材料で構成され、先端部分が尖頭状に形成されていればその製造方法は特に限定されない。例えば、この陰極本体は高融点金属材料の粉体と易電子放出物質の粉体とを混合して焼結してもよく、高融点金属材料の粉体を焼結し、焼結体に易電子放出物質を含浸させるようにしてもよい。特許請求の範囲において「易電子放出物質を含有させた多孔質高融点金属材料で製作され」とはこのことを意味している。   Further, the manufacturing method of the cathode body is not particularly limited as long as the cathode body is made of a porous refractory metal material containing an electron-emitting substance and the tip portion is formed in a pointed shape. For example, the cathode body may be mixed and sintered with a powder of a refractory metal material and a powder of an electron-emitting material. You may make it impregnate an electron emission substance. In the claims, “made of a porous refractory metal material containing an electron-emitting substance” means this.

以下、本発明を図面に示す具体例に基づいて詳細に説明する。図1ないし図3は本発明に係るガス放電灯の好ましい実施形態を示し、これは100W高圧水銀ランプに適用した例である。ガス放電灯では例えば透明石英ガラス製のバルブ10の両端に陰極口金11及び陽極口金12が設けられ、又バルブ10の中間にはガス封入部17が形成され、ガス封入部17内には例えば水銀20mgとグロー放電始動用の希ガスであるアルゴンガス266×102Pa(200torr)とが封入されている。 Hereinafter, the present invention will be described in detail based on specific examples shown in the drawings. 1 to 3 show a preferred embodiment of a gas discharge lamp according to the present invention, which is an example applied to a 100 W high pressure mercury lamp. In the gas discharge lamp, for example, a cathode cap 11 and an anode cap 12 are provided at both ends of a bulb 10 made of transparent quartz glass, and a gas filling portion 17 is formed in the middle of the bulb 10. 20 mg and argon gas 266 × 10 2 Pa (200 torr) which is a rare gas for starting glow discharge are enclosed.

バルブ10のガス封入部17には陰極14と陽極13とが相互に対向して配設されてバルブ10に支持され、陰極14及び陽極13は接続金属導体、例えばモリブデン箔16、15によって口金11、12の外部端子に接続されており、外部端子間に電圧を印加することによって陰極14と陽極13との間にグロー放電が起こり、水銀が蒸発した時にグロー放電からアーク放電に移行し、アーク放電が維持されるようになっている。   A cathode 14 and an anode 13 are disposed opposite to each other in the gas sealing part 17 of the bulb 10 and are supported by the bulb 10. The cathode 14 and the anode 13 are connected to the base 11 by connecting metal conductors such as molybdenum foils 16 and 15. , 12 is connected to the external terminal, and by applying a voltage between the external terminals, a glow discharge occurs between the cathode 14 and the anode 13, and when mercury evaporates, the glow discharge is changed to an arc discharge, Discharge is maintained.

陽極は例えばタングステンを用いて断面ほぼ円形の棒状に製作されている。また、陰極14は陰極本体140と基体141とから構成され、基体141は高融点金属材料、例えばモリブデンを用いて製作されている。この基体141は全体が例えば1.8mm径の断面ほぼ円形の棒状をなし、先端部は円錐台状にテーパー加工され、その先端面には嵌込み凹部141Aが凹設されている。   The anode is made of a rod having a substantially circular cross section using, for example, tungsten. The cathode 14 is composed of a cathode main body 140 and a base body 141, and the base body 141 is manufactured using a refractory metal material such as molybdenum. The base 141 has a rod shape with a substantially circular cross section having a diameter of, for example, 1.8 mm, the tip is tapered into a truncated cone shape, and a fitting recess 141A is formed in the tip surface.

陰極本体140は例えば易電子放出物質、例えばバリウムを含有する多孔質高融点金属材料、例えば多孔質タングステンを用いてほぼ円柱状に製作され、先端部分は円錐尖頭状にテーパー形成されている。この陰極本体140は基体141の嵌込み凹部141A内に嵌め込まれて固定され、こうして陰極14の先端部分は円錐尖頭状に形成されている。   The cathode body 140 is manufactured in a substantially columnar shape using, for example, a porous material having a high melting point, for example, a barium-containing porous refractory metal material such as porous tungsten, and the tip portion is tapered in a conical shape. The cathode main body 140 is fitted and fixed in the fitting recess 141A of the base body 141, and thus the tip portion of the cathode 14 is formed in a conical point shape.

また、基体141の胴部(円柱状部分)の先端部位にはグロー放電用コイル142が外嵌されて固定され、この放熱コイル142はタングステンを用いてほぼ1.8mm径に製作され、放熱コイル142の先端側の1巻きは陰極14の尖頭状の部分に張り出されている。   Further, a glow discharge coil 142 is externally fitted and fixed to the distal end portion of the body portion (columnar portion) of the base body 141. The heat radiating coil 142 is manufactured to have a diameter of approximately 1.8 mm using tungsten. One turn on the tip side of 142 protrudes from the pointed portion of the cathode 14.

本例の陰極の製造方法の1例について説明する。本例の陰極を製造する場合、例えば平均粒径3μmのタングステンの粉末とエミッターである酸化バリウムと酸化アルミニウムの混合粉末とを体積比で4:1で混合し、モリブデンにプレス型を製作して混合粉末を埋め込み、プレスする。   An example of the cathode manufacturing method of this example will be described. When manufacturing the cathode of this example, for example, a tungsten powder having an average particle diameter of 3 μm and a mixed powder of barium oxide and aluminum oxide as an emitter are mixed at a volume ratio of 4: 1, and a press mold is manufactured on molybdenum. Embed the mixed powder and press.

その後、混合粉末とモリブデンとを所定の陰極形状に切削加工し、この陰極素形材の先端部位に放熱コイル142を取付ける。これを水素雰囲気の電気炉にて1750°Cに昇温し、酸化バリウムと酸化アルミニウムを還元活性すると、本例の陰極が得られる。その後は通常の製造方法と同様にしてガス放電灯を製作する。   Thereafter, the mixed powder and molybdenum are cut into a predetermined cathode shape, and the heat radiating coil 142 is attached to the tip portion of the cathode base material. When this is heated to 1750 ° C. in an electric furnace in a hydrogen atmosphere and barium oxide and aluminum oxide are reduced and activated, the cathode of this example is obtained. Thereafter, a gas discharge lamp is manufactured in the same manner as in a normal manufacturing method.

本例の陰極(図4の(a))及びトリウムドープ陰極(図4の(b))を用いたガス放電灯の光出力の安定性を測定した。本例の陰極は1050°Cで動作させることができるので、図4の(a)に示されるように、陰極の円錐尖頭状部分の立体角は80°Cとされている。これに対し、トリウムドープ陰極では1700°Cで動作させるので、図4の(b)に示されるように、陰極の円錐尖頭状部分の立体角は30°となっている。測定は大塚電子社製の瞬間マルチ測光システム(MCPD−3000)を用いて行った。その結果、トリウムドープ陰極では光出力の変動が2.0%程度であるのに対し、本例の陰極では光出力の変動は1.0%未満であり、光出力の安定性が改善されていることが確認された。   The stability of the light output of the gas discharge lamp using the cathode of this example (FIG. 4A) and the thorium-doped cathode (FIG. 4B) was measured. Since the cathode of this example can be operated at 1050 ° C., as shown in FIG. 4A, the solid angle of the conical pointed portion of the cathode is 80 ° C. On the other hand, since the thorium-doped cathode is operated at 1700 ° C., as shown in FIG. 4B, the solid angle of the conical pointed portion of the cathode is 30 °. The measurement was performed using an instantaneous multi-photometry system (MCPD-3000) manufactured by Otsuka Electronics. As a result, the variation in light output is about 2.0% in the thorium-doped cathode, whereas the variation in light output is less than 1.0% in the cathode of this example, and the stability of the light output is improved. It was confirmed that

本発明に係るガス放電灯の好ましい実施形態を示す図である。It is a figure which shows preferable embodiment of the gas discharge lamp which concerns on this invention. 上記実施形態における陰極を示す全体図である。It is a general view which shows the cathode in the said embodiment. 上記実施形態における陰極を示す断面拡大図である。It is a cross-sectional enlarged view which shows the cathode in the said embodiment. 光出力安定性の測定に用いた上記実施形態の陰極と従来の陰極を示す図である。It is a figure which shows the cathode of the said embodiment used for the measurement of optical output stability, and the conventional cathode.

符号の説明Explanation of symbols

13 陽極
14 陰極
140 陰極本体
141 基体
142 グロー放電用コイル
13 Anode 14 Cathode 140 Cathode body 141 Base 142 Glow discharge coil

Claims (4)

水銀及び希ガスを封入した放電雰囲気中に陰極と陽極を対向させ、グロー放電からアーク放電に移行させて点灯させるようにしたガス放電灯において、
上記陰極は高融点金属材料製の基体に、易電子放出物質を含有させた多孔質高融点金属材料で製作された陰極本体をその先端が基体よりも突出するように結合して構成され、上記陰極の先端部分は尖頭状に形成され、上記陰極にはグロー放電用コイルが外嵌されていることを特徴とするガス放電灯。
In a gas discharge lamp in which a cathode and an anode are opposed to each other in a discharge atmosphere in which mercury and a rare gas are sealed, and is switched on from a glow discharge to an arc discharge.
The cathode is composed of a base made of a refractory metal material and a cathode body made of a porous refractory metal material containing an electron-emitting substance so that the tip protrudes from the base. A gas discharge lamp characterized in that a tip portion of a cathode is formed in a pointed shape, and a glow discharge coil is fitted on the cathode.
上記グロー放電用コイルはその先端側の少なくとも一巻きが上記陰極の尖頭状部分上に張り出されている請求項1記載のガス放電灯。   2. The gas discharge lamp according to claim 1, wherein at least one turn of the glow discharge coil is projected on a pointed portion of the cathode. 上記希ガスの圧力が101×103Pa(760torr)以下である請求項1記載のガス放電灯。 The gas discharge lamp according to claim 1, wherein the pressure of the rare gas is 101 × 10 3 Pa (760 torr) or less. 上記陰極の先端部分は立体角が50°以上の尖頭状に形成されている請求項1記載のガス放電灯。
The gas discharge lamp according to claim 1, wherein the tip of the cathode is formed in a pointed shape with a solid angle of 50 ° or more.
JP2003402347A 2003-12-02 2003-12-02 Gas discharge lamp Pending JP2005166382A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273175A (en) * 2006-03-30 2007-10-18 Matsushita Electric Ind Co Ltd High-pressure discharge lamp lighting device, high-pressure discharge lamp device, projection type image display device, and high-pressure discharge lamp lighting method
JP2012022780A (en) * 2010-07-12 2012-02-02 Ushio Inc High-voltage discharge lamp
JP2014044811A (en) * 2012-08-24 2014-03-13 Kahoku Lighting Solutions Corp Cathode for discharge lamp
CN104124132A (en) * 2013-04-24 2014-10-29 优志旺电机株式会社 Short arc discharge lamp

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273175A (en) * 2006-03-30 2007-10-18 Matsushita Electric Ind Co Ltd High-pressure discharge lamp lighting device, high-pressure discharge lamp device, projection type image display device, and high-pressure discharge lamp lighting method
JP2012022780A (en) * 2010-07-12 2012-02-02 Ushio Inc High-voltage discharge lamp
JP2014044811A (en) * 2012-08-24 2014-03-13 Kahoku Lighting Solutions Corp Cathode for discharge lamp
CN104124132A (en) * 2013-04-24 2014-10-29 优志旺电机株式会社 Short arc discharge lamp

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