JP2005164475A - Measuring apparatus for perpendicularity - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring apparatus for perpendicularity which can measure stably perpendicularity of the horizontal direction against the vertical plane of measured object. <P>SOLUTION: The measuring apparatus for perpendicularity is equipped with a sliding block 4 with a contact shoe 41 in contact with the measured plane 31, which is settled movably along an extended direction of the measured plane 31 of a straightedge 3, a reflecting mirror 5 installed on the sliding block 4 aiming a reflecting surface at the moving direction of the sliding block 4, an autocollimator measuring perpendicularity of the measured plane 31 based on reflected light from the reflecting mirror 5 that is emitted from moving direction of the sliding block 4 into the reflecting mirror 5, an energizing unit 7 energizing the sliding block 4 so as to force the contact shoe 41 of the sliding block 4 to come into contact with the measured plane 31 at a constant pressure, and a supporting unit 8 supporting the sliding block 4 to be movable along the extended direction of the measured plane 31, keeping the contact condition between the contact shoe 41 of the sliding block 41 and the measured plane 31. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

    The present invention relates to a straightness measuring apparatus.

The straight ruler is used in two orientations, horizontal and vertical, to check the finishing accuracy of machined workpieces and the accuracy of geometric motion of machine tools, etc., as a straightness standard in horizontal and vertical planes. It is used.
At that time, since the straightness of the measurement surface differs depending on whether the measurement surface of the straight ruler is in a horizontal posture or a vertical posture, the straightness value must be set for each posture in order to use it as a strict reference with higher accuracy. It is necessary to attach.

Conventionally, when the measurement surface is in a horizontal posture, the straightness is measured by the measurement method shown in FIG. A straight ruler 93 is placed on a surface plate 91 via a spacer 92, and a slider 96 having two contactors 95 that come into contact with a measurement surface (that is, a surface to be measured 94) on the upper surface side of the straight ruler 93 is provided. It is provided so as to be movable in a direction perpendicular to the paper surface of FIG. Detection light is emitted to the reflecting mirror 97 from an autocollimator (not shown) arranged at a position facing the reflecting mirror 97 mounted on the slider 96, and the surface to be measured is based on the reflected light from the reflecting mirror 97. The straightness of 94 is measured.
In the case of this measuring method, since the slider 96 is movably mounted on the surface to be measured 94, the contact 95 is pressed against the surface to be measured 94 with a constant pressure by the weight of the slider 96, so that stable measurement is possible. It can be performed.

When the measurement surface is in a vertical posture, the straightness is measured by the measurement method shown in FIG. The contact 95 of the slider 96 is brought into contact with the vertical measurement surface (that is, the surface to be measured 94) of the straight ruler 93, and the slider 96 is moved along the surface to be measured 94 in this state. The straightness of the measurement surface 94 is measured.
In the case of this measuring method, since the measurement must be performed while pressing the slider 96 against the surface to be measured 94 of the straight ruler 93, the contact pressure between the surface to be measured 94 and the contact 95 tends to fluctuate due to the pressing force, and is in an unmanaged state. Therefore, it was difficult to perform stable measurement.

By the way, a vertical straightness measurement device has been proposed as a device for measuring the straightness of a measurement hole provided in the vertical direction (for example, Patent Document 1).
In the apparatus described in Patent Document 1, a measuring piece with a mirror suspended from above by a wire has a cylindrical shape slightly smaller in diameter than a quill hole, and a portion into which the measuring piece with a mirror is inserted is not substantially U-shaped. Is inserted into the quill hole together with the guide bar, and the detection light from the autocollimator is emitted from above to the measurement piece with the mirror, and the measurement piece with the mirror is measured in the quill hole while detecting the reflected light from the mirror Raise and lower the surface to measure straightness. At this time, in order to bring the measuring piece with a mirror into close contact with the surface to be measured, the pressing tool provided on the guide bar is pressed against the inner wall of the quill hole opposite to the measuring surface, thereby the guide bar and the measuring piece with the mirror are Is taken to bias the surface to the surface to be measured.

Japanese Utility Model Publication No. 5-66512

  However, in Patent Document 1, the straightness in the vertical direction of the measured object can be measured with respect to the measured object having the measured surface in the vertical direction with respect to the surface plate, but the direction orthogonal to the vertical direction. It is impossible to measure the straightness.

  An object of the present invention is to provide a straightness measuring device that can stably measure the straightness in the horizontal direction with respect to the vertical plane of the object to be measured.

  The straightness measuring apparatus of the present invention has a surface to be measured that is a vertical surface substantially orthogonal to the upper surface of the surface plate and extends substantially parallel to the upper surface of the surface plate in a state of being placed on the surface plate. A straightness measuring apparatus for measuring the straightness of a measurement object, the slider having a contactor provided so as to be movable along the measurement surface extension direction of the measurement object and contacting the measurement surface; A reflecting mirror attached to the slider with the reflecting surface facing the moving direction of the slider, and light emitted from the moving direction of the slider toward the reflecting mirror, and the measured object based on the reflected light from the reflecting mirror An autocollimator for measuring the straightness of the surface; biasing means for biasing the slider so that the contact of the slider contacts the surface to be measured at a constant pressure; and the contact of the slider is the surface to be measured While maintaining the state of touching The serial slider, characterized in that a support means for movably supported along the measurement surface extending direction.

In such a configuration, the slider is moved along the surface to be measured of the object to be measured, that is, moved in the horizontal direction with respect to the surface plate. At each moving position, when the detection light is emitted from the autocollimator toward the reflecting mirror, the light is reflected by the reflecting mirror and received by the autocollimator, so that the measured surface of the object to be measured is based on the reflected light. Can be measured.
In the present invention, since the slider is urged by the urging means so that the contact of the slider contacts the surface to be measured at a constant pressure, the contact between the slider contact and the surface to be measured always has a constant pressure. The slider can be moved along the surface to be measured of the object to be measured in a state of being applied. Therefore, even if the surface to be measured is a vertical surface that is substantially perpendicular to the upper surface of the surface plate, measurement can be performed with a constant pressure applied to the contact point between the slider contact and the surface to be measured. The straightness of the surface in the horizontal direction can be measured stably and with high accuracy.
In addition, since the slider is supported by the support means so as to be movable along the measurement surface extension direction while the slider contact is held in contact with the measurement surface, the urging force by the urging means is provided. It is not necessary to increase the size. In other words, the contact pressure between the slider contact and the surface to be measured need not be increased in order to keep the slider contact with the desired position of the surface to be measured. The straightness in the horizontal direction of the measurement surface can be measured stably and with high accuracy.

In the straightness measuring apparatus of the present invention, a pair of side pieces along both side surfaces of the object to be measured and an upper piece along the upper surface of the object to be measured and connecting between the pair of side parts are formed. Preferably, the contact is formed on the one side piece, and the urging means is provided at a position of the other side piece facing the contact.
According to the present invention, since the contact and the urging means are arranged at opposite positions with the object to be measured interposed therebetween, a force that causes the slider to rotate with respect to the object to be measured is not generated. Therefore, the slider does not tilt during the measurement operation, and the measurement can be performed stably.

In the straightness measuring apparatus of the present invention, it is preferable that the urging means is constituted by air blowing means for blowing air to the side surface of the object to be measured opposite to the surface to be measured.
According to the present invention, since the air blowing means is used as the urging means, the urging means and the object to be measured are not in contact with each other. It is also possible to prevent damage to the member due to.

In the straightness measuring apparatus of the present invention, the support means is provided between the lower end portion of the slider and the surface plate so that the slider is held at a predetermined height position with respect to the upper surface of the surface plate. Preferably it is.
According to this invention, by providing the support means between the lower end of the slider and the surface plate, the weight of the slider can be prevented from being applied to the object to be measured, and a load is applied to the object to be measured. Therefore, it is possible to eliminate factors that lower the measurement accuracy such as deformation and damage.

In the straightness measuring apparatus of the present invention, it is preferable that the supporting means is constituted by air blowing means for blowing air to the upper surface of the surface plate.
According to this invention, since the support means is constituted by the air blowing means, the surface plate and the support means are not in contact with each other via the air film, and the friction between the surface plate and the support means is caused when the slider is moved. Measurement accuracy can be improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 3 show a straightness measuring device for measuring the straightness of a straight ruler 3 which is an object to be measured.
The straight ruler 3 is formed in a hollow column shape having a rectangular frame shape and extending substantially parallel to the upper surface of the surface plate 1 in a state where the straight ruler 3 is placed on the surface plate 1 via the spacer 2. A surface to be measured 31 is provided on one outer surface of the frame shape. The measured surface 31 is a vertical surface that is substantially orthogonal to the surface plate 1 and extends substantially parallel to the upper surface of the surface plate 1.

  The straightness measuring device includes a slider 4 having a contact 41 provided so as to be movable along the extending direction of the measured surface 31 of the straight ruler 3, and a reflecting surface facing the moving direction of the slider 4. The reflecting mirror 5 attached to the slider 4 and an auto that emits light from the moving direction of the slider 4 toward the reflecting mirror 5 and measures the straightness of the measurement surface 31 based on the reflected light from the reflecting mirror 5. The collimator 6, a biasing means 7 that biases the slider 4 so that the contact 41 of the slider 4 is in contact with the surface to be measured 31 with a constant pressure, and a state in which the contact 41 of the slider 4 is in contact with the surface to be measured 31. And supporting means 8 that supports the slider 4 so as to be movable along the extending direction of the surface to be measured 31.

  The slider 4 includes a pair of side pieces 42A and 42B along both side surfaces of the straight ruler 3, an upper piece 43 along the upper surface of the straight ruler and connecting the pair of side pieces 42A and 42B, and a side piece 42A. The bottom piece 44 is bent at a right angle outward from the end of the plate and parallel to the surface plate 1. Two hemispherical contacts 41 are provided on the inner surface side of the side piece 42 </ b> A at regular intervals in the extending direction of the surface to be measured 31.

  The reflecting mirror 5 includes a mirror 51 having a mirror surface portion and an attachment portion 52 for attaching the mirror 51 to the slider 4. The mirror 51 is attached to a substantially intermediate position between the two contactors 41 on the outer surface side of the side piece 42A.

  The autocollimator 6 is disposed at a position facing the mirror 51, emits detection light from the output unit (not shown) toward the mirror 51, and receives reflected light from the mirror 51 by the detection unit (not shown). The straightness of the measured surface 31 is obtained.

  The urging means 7 is attached to the adjustment screw 71 screwed to the side piece 42B, a spherical bearing 72 provided at the tip of the adjustment screw 71, and swingable to the adjustment screw 71 via the spherical bearing 72. And an urging air bearing 73. The urging air bearing 73 includes a cylinder 74 and a piston 75 slidably accommodated in the cylinder 74 via a piston ring 76. Compressed air is stored in a chamber 77 formed between the cylinder 74 and the piston 75, and an air ejection hole (not shown) is formed on the surface of the cylinder 74 facing the straight ruler 3. . Thereby, the compressed air in the chamber 77 is ejected from the air ejection hole toward the straight ruler 3, and an air film is formed between the straight ruler 3 and the compressed air.

  One supporting means 8 is provided on the surface of the side piece 42B facing the surface plate 1, and two supporting means 8 are provided on the surface of the bottom piece 44 facing the surface plate 1. These support means 8 are attached to the side piece 42B and the bottom piece 44 by an adjustment screw 81, a spherical bearing 82 provided at the tip of the adjustment screw 81, and the adjustment screw 81 via the spherical bearing 82. The supporting air bearing 83 is provided. The support air bearing 83 has a chamber (not shown) for storing compressed air therein, and an air ejection hole (not shown) on the surface facing the surface plate 1. Air is taken into the chamber from the air supply hole 84. Thereby, compressed air in the chamber is ejected from the air ejection hole toward the surface plate 1, and an air film is formed between the surface plate 1 and the air.

  In the straightness measuring apparatus having such a configuration, the autocollimator 6 emits detection light toward the mirror 51 from a position facing the mirror 51, and detects the reflected light that is reflected back to the mirror 51. In this state, the slider 4 is slid while the two contactors 41 are in contact with the surface to be measured 31 with respect to the straight ruler 3, and the straightness is measured from the inclination of the reflected light accompanying the slide.

According to this embodiment, the following effects can be achieved.
(1) Since the slider 4 is urged by the urging means 7 so that the contact 41 of the slider 4 contacts the surface to be measured 31 with a constant pressure, the contact 41 of the slider 4 and the surface to be measured 31 The slider 4 can be moved along the surface to be measured 31 of the straight ruler 3 in a state where a constant pressure is always applied to the contact points of the straight ruler 3. Therefore, even if the measured surface 31 is a vertical surface substantially orthogonal to the upper surface of the surface plate 1, measurement can be performed in a state where a constant pressure is always applied to the contact between the contact 41 of the slider 4 and the measured surface 31. Therefore, the straightness in the horizontal direction of the measurement surface 31 can be stably measured with high accuracy.

(2) The slider 4 is supported by the support means 8 so as to be movable along the direction of extension of the measured surface 31 while the contact 41 of the slider 4 is held in contact with the measured surface 31. The urging force by the urging means 7 may not be increased. In other words, in order to maintain the state where the contact 41 of the slider 4 is in contact with the desired position of the measured surface 31, the contact pressure between the contact 41 of the slider 4 and the measured surface 31 does not need to be increased. The straightness in the horizontal direction of the measurement surface 31 can be stably measured with high accuracy.

(3) Since the contact 41 and the urging means 7 are disposed at opposite positions with the straight ruler 3 interposed therebetween, a force that causes the slider 4 to rotate with respect to the straight ruler 3 is not generated. Therefore, the slider 4 does not tilt during the measurement operation, and the measurement can be performed stably.

(4) Since the urging air bearing 73 and the straight ruler 3 are not in contact with each other, it is possible to eliminate the cause of measurement errors such as friction and to prevent damage to members due to contact.

(5) By providing the support means 8 on the surface of the slider 4 facing the surface plate 1, the weight of the slider 4 can be prevented from being applied to the straight ruler 3, and no load is applied to the straight ruler 3. Factors that reduce measurement accuracy, such as deformation and damage, can be eliminated.
(6) By using the support air bearing 83, the surface plate 1 and the support air bearing 83 are not in contact with each other through the air film, and when the slider 4 is moved, the surface plate 1 and the support means 8 are not in contact with each other. Therefore, it is possible to improve the measurement accuracy without generating friction.

(7) By providing the adjusting screw 81 on the surface of the slider 4 that faces the surface plate 1, the height of the contact 41 and the measured surface 31 can be matched.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the present embodiment, the reflecting mirror 5 is attached to the outer peripheral portion of the side piece 42 </ b> A, but if it can reflect the detection light at a position facing the autocollimator 6, it is attached to any position of the slider 4. It doesn't matter.
Further, although the urging air bearing 73 is used as the urging means 7, it may be urged using a spring or the like instead.

Further, the urging means 7 is provided with one urging air bearing 73. However, if the urging means 41 can be urged toward the surface to be measured 31, for example, two, three, etc. The urging air bearing 73 may be provided.
In addition, although two contactors 41 are provided in two places, for example, a single bar shape may be in contact with the surface to be measured 31, or three or more may be in contact with the surface to be measured 31. It doesn't matter.

The slider 4 is substantially U-shaped according to the shape of the straight ruler 3, but may be, for example, substantially circular or substantially triangular according to the shape of the object to be measured.
Further, the support means 8 includes the support air bearing 83, but instead, the bottom piece 44 and the side piece 42B may be provided with wheels, rollers, rollers, or the like that roll on the upper surface of the surface plate 1.
Further, the supporting means 8 is provided on the surface where the surface plate 1 and the side piece 42B and the bottom piece 44 face each other, but the upper piece 43 facing the upper surface of the straight ruler 3 is not necessary, for example. You may provide an air bearing, a roller, a wheel, etc.

  The present invention can be used for a shape measuring instrument that measures straightness of a straight ruler, a gauge, a processed workpiece, or the like.

1 is an overall view showing an embodiment of the present invention. It is a side view which shows embodiment of this invention. It is the III-III sectional view taken on the line in FIG. It is a figure which shows the measuring method (measuring method of a horizontal thing) of a prior art. It is a figure which shows the measuring method (measuring method of a vertical surface) of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Surface plate 2 ... Spacer 3 ... Straight ruler 4 ... Slider 5 ... Reflector 6 ... Autocollimator 7 ... Energizing means 8 ... Support means 31 ... Measuring surface 41 ... Contact 42A ... Side piece 42B ... Side piece 43 ... Upper piece 73 ... Biasing air bearing 83 ... Supporting air bearing

Claims (5)

Measures the straightness of an object to be measured having a vertical surface substantially orthogonal to the upper surface of the surface plate and a surface to be measured extending substantially parallel to the upper surface of the surface plate while being placed on the surface plate. A straightness measuring device,
A slider having a contact provided so as to be movable along the measurement surface extension direction of the measurement object, and contacting the measurement surface;
A reflecting mirror attached to the slider with a reflecting surface facing in the moving direction of the slider;
An autocollimator that emits light from the moving direction of the slider toward the reflecting mirror and measures the straightness of the surface to be measured based on the reflected light from the reflecting mirror;
An urging means for urging the slider so that the contact of the slider contacts the surface to be measured at a constant pressure;
A straightness measuring device comprising: a support means for supporting the slider so as to be movable along the direction of extension of the surface to be measured while maintaining a state in which the contact of the slider is in contact with the surface to be measured. . The straightness measuring apparatus according to claim 1,
The slider is formed in a shape having a pair of side pieces along both side surfaces of the object to be measured and an upper piece along the upper surface of the object to be measured and connecting the pair of side parts.
The straightness measuring apparatus, wherein the contact is formed on the one side piece, and the biasing means is provided at a position facing the contact on the other side piece. . The straightness measuring apparatus according to claim 2,
The straightness measuring apparatus, wherein the biasing means is constituted by air blowing means for blowing air to a side surface of the object to be measured opposite to the surface to be measured. In the straightness measuring apparatus according to any one of claims 1 to 3,
The support means is provided between the lower end of the slider and the surface plate so that the slider is held at a predetermined height position with respect to the upper surface of the surface plate. measuring device. In the straightness measuring apparatus according to claim 4,
The straightness measuring apparatus, wherein the supporting means is constituted by air blowing means for blowing air to the upper surface of the surface plate.

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