JP4519449B2 - Shape measuring instruments - Google Patents

Description

  The present invention relates to a shape measuring machine having a contact probe.

  2. Description of the Related Art Conventionally, a measuring instrument for measuring the size, shape, etc. of a workpiece has a drive unit having an operating shaft and a bearing, and a probe provided at the tip of the operating shaft is brought into contact with the surface of the workpiece. There are contact-type shape measuring machines that measure the size, shape, etc. In this type of measuring machine, as shown in FIG. 4, a probe head main body 104 having a through hole 104a as a measurement unit main body, a bearing 103 provided inside the through hole 104a, and a columnar shape are formed. An apparatus including an operating shaft 101 that passes through a through hole 104a and a bearing 103 and a probe 102 attached to the tip of the operating shaft 101 is known (for example, see Patent Document 1). A length measuring reference mirror 106 such as a reflecting mirror is attached to the working shaft 101 at an end opposite to the end to which the probe 102 is attached, and the length measuring reference mirror 106 intersects the axis Q direction of the working shaft 101. By attaching the leaf spring 105 extending in the direction to be moved, the operating shaft 101 is supported while being suspended from the length measuring reference mirror 106.

  A non-contact type displacement sensor 111 such as a laser focus type displacement meter is provided in the vicinity of the length measuring reference mirror 106. Further, an autocollimator optical system 121 is provided on the axis Q above the length measuring reference mirror 106 in the probe head main body 104. The autocollimator optical system 121 includes a laser light source 121a that irradiates a laser toward the length measuring reference mirror 106, a lens 21c that forms an image of reflected light from the length measuring reference mirror 106 at a predetermined position, A beam splitter 121b that changes the optical path and a two-dimensional PSD 121d that detects the spot position of the reflected light emitted from the beam splitter 121b are provided.

Under such a configuration, when laser light is irradiated from the laser light source 121a toward the length measuring reference mirror 106, the laser light passes through the beam splitter 121b and the lens 121c and reaches the length measuring reference mirror 106. Reflected by the length measuring reference mirror 106. The reflected light passes through the lens 121c again, the optical path is changed by the beam splitter 121b, reaches the two-dimensional PSD 121d, and forms an image. When the two-dimensional PSD 121d detects this imaging position, the inclination of the length measurement reference mirror 106 is calculated.
According to this shape measuring machine, when measuring the shape of a steep slope formed on a workpiece, even if the operating shaft 101 tilts due to insufficient rigidity of the operating shaft 101, the bearing 103, etc., the tilt direction and tilt angle are two-dimensional. Calculated by the PSD 121d, the measurement result information is corrected based on these calculation results.
JP 2000-304529 A

However, in the configuration as described above, although the non-contact type displacement sensor 111 is provided in the vicinity of the length measurement reference mirror 106, the optical path of the laser light emitted from the autocollimator optical system 121 is set on the axis Q. Therefore, since a measuring device or the like cannot be mounted on the operating shaft, the Abbe error becomes relatively large, and accurate measurement cannot be performed.
Further, since the autocollimator optical system 121 is installed inside the probe head main body 104, the probe head main body 104 becomes large. Particularly, when trying to measure a large concave workpiece, the probe head main body 104 is moved to the surface of the workpiece. It was difficult to measure. In this case, it is conceivable to lengthen the operating shaft 101 to avoid contact between the probe head main body 104 and the workpiece surface. However, if the operating shaft 101 is lengthened, the rigidity with the bearing 103 is reduced, and high-precision measurement is performed. Will not be able to.

Further, since the operating shaft 101 is supported by the plate spring 105, when the operating shaft 101 is moved in the axial direction, the stroke can be made only within the allowable range of displacement of the plate spring 105. It was difficult to measure. Further, when the stroke of the leaf spring 105 is lengthened in order to ensure the stroke, there is a problem that the rigidity of the operating shaft 101 is lowered and the measurement error is increased.
Moreover, since the contact force when the probe 102 contacts the workpiece surface uses the biasing force of the leaf spring 105, there is a limit to minimizing the contact force. If the contact force is large, the frictional force when the probe 102 moves relative to the workpiece surface also increases, so that it is difficult to move the probe 102 smoothly on the workpiece surface, and accurate measurement is difficult. It was.

  The present invention has been made to solve such a problem, and an object thereof is to provide a shape measuring machine capable of measuring the shape of a workpiece with higher accuracy regardless of the size and shape of the workpiece. Yes.

In order to solve the above problems, the present invention provides the following means.
The invention according to claim 1 is a contact-type probe that is brought into contact with the workpiece in order to measure the shape of the workpiece, an operation shaft that includes the contact-type probe at a tip, and the operation shaft that is movable in the axial direction And a probe displacement amount measuring means for measuring a displacement amount of the contact probe during the movement when the two are relatively moved so as to sequentially move the contact points of the workpiece and the contact probe. The contact probe is urged toward the tip in the axial direction by the axial component of the weight of the member including the contact probe, and the probe displacement measuring means has a measurement point. adjustably mounted on said operation shaft that passes through, and can be placed intermediate base of the bearing and the probe displacement measuring means, a base capable placed overall-base intermediate, the intermediate base and A serial entire base, about an axis extending in both of the mounting direction, characterized in that it comprises a rotating mechanism for rotating each other, the.

According to the shape measuring machine according to the present invention, the mounting position and angle of the probe displacement measuring means are adjusted in advance so that the scale deviation caused by the mounting error of the probe displacement measuring means to the operating shaft is minimized. Keep it. Then, with the contact probe urged toward the tip in the axial direction by the axial component of the weight of the member including the contact probe in contact with the workpiece, the two are relatively moved so that the contact points are sequentially moved. Let At this time, the contact-type probe is moved in the operation axis direction in accordance with the uneven shape of the workpiece surface. The displacement amount of the contact probe in the operation axis direction is measured by a probe displacement amount measuring means attached at an appropriate position and angle on the operation axis.
Further, according to the shape measuring machine according to the present invention, when the angle between the measurement scanning axis that is the moving direction at the time of measurement of the contact probe and the operating axis is deviated from a right angle, the bearing and the probe displacement amount measurement The intermediate base on which the means is placed and the entire base on which the intermediate base is placed are rotated by a rotation mechanism so that the angle formed by the measurement scanning axis and the operating axis becomes a right angle. Is done.

As a result, the probe displacement amount measuring means has an appropriate position and angle and is mounted on the operating shaft, so that measurement with extremely small measurement error and high accuracy is possible. In addition, since the contact probe can be brought into contact with the workpiece with a small contact force due to the axial component of its own weight, the load fluctuation of the contact probe when contacting the workpiece and when not contacting the workpiece is reduced. It is possible to suppress warping of the operating shaft. For this reason, it is not necessary to correct the tilt of the operating axis by an autocollimator optical system or the like, so that the measuring machine itself can be reduced in size and a large concave workpiece can be measured. Furthermore, since the plate spring is not used as a means for applying the urging force, but its own weight is used, the restriction that the displacement of the plate spring is within the range is released, and the stroke of the operating shaft can be lengthened. Can be easily measured. Further, even if the contact type probe is moved relative to the workpiece in contact with the workpiece, the contact force is very small, so that generation of frictional force can be suppressed.
Further, the squareness error between the measurement scanning axis and the operating axis can be reduced, and the measurement accuracy can be improved.

The invention according to claim 2 is the shape measuring machine according to claim 1, wherein the probe displacement measuring means is an optical scale.
According to the shape measuring machine according to the present invention, the displacement amount of the contact probe in the operation axis direction is measured by the optical scale.
As a result, it is possible to prevent an Abbe error from occurring in the traveling direction of the operating shaft.

The invention according to claim 3 is the shape measuring machine according to claim 1 or 2 , wherein the rotation mechanism prevents the intermediate base and the entire base from rotating relative to each other in order to prevent relative rotation between the intermediate base and the entire base. And a fixing mechanism for fixing the two to each other.
According to the shape measuring machine according to the present invention, after the angle formed by the measurement scanning axis and the operating axis is set to be a right angle, the fixing mechanism prevents the relative rotation between the intermediate base and the entire base.
As a result, the perpendicularity between the measurement scanning axis and the operation axis can be maintained, and accurate measurement is possible even if the measurement speed is increased.

  According to the present invention, it is possible to perform highly accurate measurement with extremely small measurement error regardless of the size of the workpiece.

Example 1
Hereinafter, a shape measuring machine according to a first embodiment of the present invention will be described with reference to the drawings.
1 and 2 show a shape measuring machine as a first embodiment of the present invention.
In FIG. 1, reference numeral 1 denotes a shape measuring machine, reference numeral 2 denotes a processing machine, and FIG. 1 illustrates a state in which the shape measuring machine 1 is installed on the processing machine 2.
Initially, the processing machine 2 in which the shape measuring machine 1 which concerns on this invention is installed is demonstrated.
The processing machine 2 includes a processing machine main body 2b as a main body, a substantially rectangular processing machine substrate 2a, and a work holder 2c that holds the work W.

The processing machine main body 2b is installed at one end in the length direction of the upper surface of the processing machine substrate 2a, and is disposed on the front surface 2d of the processing machine main body 2b arranged facing the other end. A work holder 2c directed to the other end is provided. The work holder 2c is configured to detachably hold a spherical work W that is an object to be measured. When the work W is attached to the work holder 2c, the work W is held in a state of protruding to the other end side. It is like that.
A substantially rectangular measuring machine base 6 is installed on the other end side of the upper surface of the processing machine substrate 2a. The measuring machine base 6 is movable in the direction of the axis L and the direction orthogonal to the axis L shown in FIG.

Next, the configuration of the shape measuring machine 1 according to the present embodiment will be described.
The shape measuring machine 1 includes a measurement unit 3 that actually measures the workpiece W, an intermediate base 4 on which the measurement unit 3 is installed, and an overall base 5 on which the intermediate base 4 is placed. The upper surface 4d of the intermediate base 4 forms a slope inclined toward the processing machine main body 2b. The measuring unit 3 is installed on the measuring machine base 6 via the intermediate base 4 and the entire base 5, and is arranged at a position substantially opposite to the processing machine main body 2b.

The measurement unit 3 includes a columnar air slide shaft (operating shaft) 7 and an air slide 9 having an air slide bearing (bearing) 8 installed on the intermediate base 4, and a probe (contact probe) that contacts the workpiece W during measurement. ) 10 and a position detector (probe displacement measuring means) 20 for measuring the displacement of the probe 10.
The air slide shaft 7 is passed through a hollow portion (not shown) along the axial direction of the cylindrical air slide bearing 8. A plurality of blow holes (not shown) are formed in the inner wall surface in the hollow portion of the air slide bearing 8, and the compressed clean supplied from the air tube 13 is provided between the air slide shaft 7 and the inner wall surface. A fine gap of several μm is generated by blowing dry compressed air from the blowout hole. That is, the air slide shaft 7 is not in contact with the inner wall surface of the air slide bearing 8 and is in a floating state due to the ejection of air. Thereby, the air slide shaft 7 is supported so as to be able to reciprocate in the direction approaching and separating from the processing machine main body 2b, that is, in the direction of the axis L.
In such a configuration, when the measuring unit 3 is installed on the measuring machine base 6, the intermediate base 4 is inclined toward the processing machine main body 2 b, so that the air slide 9 is also inclined and the air slide shaft 7 is tilted. Is moved toward the tip in the axial direction only by the axial component of its own weight of the member including the air slide shaft 7. At this time, the probe 10 is urged toward the tip in the axial direction only by the axial component of its own weight.

A frustoconical connecting portion 11 is attached to one end of the air slide shaft 7 in the length direction with the tip of the cone facing away from the air slide shaft 7. The probe 10 is provided. The probe 10 is made of, for example, a precision ruby and is formed in a spherical shape.
On the other hand, a step portion 19 is formed at the other end of the air slide shaft 7, and a position detection unit 20 is attached via the step portion 19.
The position detection unit 20 includes a glass scale 16 made of a plate-like member and a glass scale head 17. The glass scale 16 is attached in the direction of the axis L by screwing one end of the glass scale 16 to the step portion 19 with a screw 15 so that the scale deviation caused by the attachment error is minimized. A glass scale 16 is inserted into the glass scale head 17 so as to be reciprocally movable, and the movement of the glass scale 16 is sequentially detected. The glass scale 16 and the glass scale head 17 constitute an optical scale.

Further, in the vicinity of the step portion 19 of the air slide shaft 7, a rod-shaped stopper honey 14 is fixed along a direction orthogonal to the axis L. As shown in FIG. 2, the stopper honey 14 is formed so that its length dimension is longer than the width dimension of the air slide shaft 7. When the stopper honey 14 is fixed to the air slide shaft 7, both ends of the stopper honey 14 are air slide shafts. 7 protrudes along the width direction.
A U-shaped stopper 12 shown in FIG. 1 is disposed adjacent to the air slide shaft 7 in the vicinity of the stopper hood 14. As shown in FIG. 2, the stopper 12 has a U-shaped bottom surface portion which is parallel to the axis L, and between the inner side walls 12a of the U-shaped stopper 12, It is attached to the upper surface 4d of the intermediate base 4 so that one end is located. Therefore, as the air slide shaft 7 is reciprocated, the stopper spring 14 is reciprocated between the both inner walls 12a of the stopper 12, and the air slide shaft 7 is likely to move across the inner walls 12a. Then, the stopper hood 14 comes into contact with one inner wall 12a, thereby restricting the movement of the air slide shaft 7 in the axis L direction. Further, the movement of the air slide shaft 7 is restricted, so that the air slide shaft 7 is prevented from coming out of the air slide bearing 8.

  The whole base 5 is formed in a substantially rectangular shape, and is installed and fixed on the upper surface of the measuring machine base 6 as shown in FIG. Concave portions 5b and 5c are formed on the upper surface 5a of the entire base 5 in the vicinity of both ends in the length direction. The recess 5c is formed with a screw hole to be screwed with a fixing screw 31 described later. Further, the intermediate base 4 is formed in a substantially rectangular shape that is slightly smaller than the overall base 5 and is installed on the upper surface 5 a of the overall base 5. On the lower surface 4 a of the intermediate base 4, a recess 4 b is directed near the end on the processing machine 2 side of both ends in the length direction, and in the thickness direction of the intermediate base 4 near the opposite end. A through hole 4c is formed. The through-hole 4c is a long hole that is long in the direction orthogonal to the axis L so as to allow the rotation of the intermediate base 4. The pin 30 is passed through the recesses 4b and 5b in a state where the entire base 5 and the intermediate base 4 are arranged so that the positions of the recesses 4b and 5b, and the positions of the through holes 4c and the recesses 5c coincide with each other. Thus, the intermediate base 4 can be rotated about the pin axis O in the direction of arrow A shown in FIG. On the other hand, a fixing screw 31 is inserted into the through-hole 4c and the recess 5c. By fixing the fixing screw 31 from the upper surface 4d of the intermediate base 4 to the through-hole 4c and the recess 5c, an intermediate The rotation of the base 4 is prevented. That is, the pin 30, the recessed part 4b, and the recessed part 5b comprise a rotation mechanism, and the fixing screw 31, the through-hole 4c, and the recessed part 5c comprise a fixing mechanism.

Next, the operation of the shape measuring machine 1 in the present embodiment configured as described above will be described.
Before processing the workpiece W, the shape measuring machine 1 is installed in a predetermined position on the measuring machine base 6 in advance so as to face the processing machine main body 2b. If the work W has a rotation axis, the measurement scan axis, which is the moving direction of the probe 10 (in the direction of arrow B shown in FIG. 2), and the rotation axis of the work W are adjusted in advance to make a right angle. deep. Then, the glass scale 16 is screwed to the step portion 19 so as to be at a predetermined position and angle so that the scale deviation caused by the mounting error is minimized, and the glass scale head 17 is installed. At this time, when the angle formed between the measurement scanning axis in the direction of arrow B and the axis L is deviated from a right angle, the intermediate base 4 is rotated around the pin axis O and adjusted so that the angle formed becomes a right angle. . Then, with the corners aligned at a right angle, the fixing screw 31 previously inserted from the upper surface 4d of the intermediate base 4 into the through hole 4c is fitted to a predetermined position extending through the through hole 4c and the recess 5c. Let Thereby, the rotation of the intermediate base 4 is prevented, and the angle formed is maintained at a right angle. In this state, the workpiece W is attached to the workpiece holder 2c, and predetermined processing is performed by a cutting tool / grinding, a grinding wheel, or the like. And after completion | finish of a process, the surface shape of the workpiece | work W is measured as follows.

  Since the shape measuring instrument 1 is previously inclined with respect to the horizontal plane, the air slide shaft 7 is inclined so that one end on the probe 10 side is inclined downward and the other end on the stepped portion 19 side is inclined upward. . Therefore, the air slide shaft 7 is moved to the probe 10 side along the axis L, and at the same time, the stopper honey 14 is also moved between the inner walls 12 a of the stopper 12. In the initial state, the probe 10 passes from the vertical plane (hereinafter referred to as a reference plane) passing through the center of the workpiece W and including the axis L to the side in the horizontal direction (the direction of arrow B shown in FIG. And the measuring machine base 6 is arrange | positioned so that it may be located apart from the reference plane by predetermined distance. When the stopper honey 14 comes into contact with the inner wall 12a on the probe 10 side, the movement of the air slide shaft 7 is stopped. From this state, the measuring machine base 6 is advanced to the processing machine main body 2b side and stopped at a predetermined position. This position is a point where the probe 10 is separated from the contact point where it first contacts the surface of the workpiece W in the horizontal direction.

  In this state, that is, from the side of the workpiece W, the measuring machine base 6 starts to move horizontally toward the reference surface in a direction orthogonal to the reference surface. The measuring machine base 6 moves at a high speed over a certain distance, is switched from a predetermined point to a low speed movement, and further continues to move horizontally so that the reference plane side, that is, the probe 10 is directed toward the contact point. As a result, the probe 10 contacts the contact point of the workpiece W at a certain timing. After the contact, the probe 10 is moved along the smooth projecting surface of the workpiece W. When the probe 10 reaches a predetermined point, the position detector 20 starts measurement. Further, the probe 10 passes through the most projecting portion of the workpiece W and is moved horizontally toward the terminal direction of measurement. During these movements, the probe 10 is moved along the projecting surface of the workpiece W, so that the air slide shaft 7 is also moved linearly in the direction of the axis L accordingly.

In the present embodiment, for example, the probe 10 is horizontally moved from the side of the workpiece W at a rapid feed speed until the relative distance from the reference surface becomes 10 mm with respect to the convex workpiece W having a diameter of 20 mm. When that point is reached, it is switched to a slower approach speed of 2.5 mm per minute. Then, the probe 10 contacts the workpiece W at a point 9 mm away from the reference plane. The contact force at this time is generated only by the weight of the member including the probe 10. That is, since the total weight of the air slide shaft 7, the connection part 11, the stopper honey 14, the probe 10, the glass scale 16, and the glass scale head 17 is 52 gf and the inclination angle is 2 minutes,
52 (gf) × sin (2/60) = 0.03 (gf)
That is, the contact force is about 30 mgf. Further, the probe 10 continues to move relative to the workpiece W, and measurement by the position detection unit 20 is started at a point where the air slide shaft 7 is pushed back by 2 mm due to the convex shape of the workpiece W. At this time, since the air slide shaft 7 is pushed back, the stopper honey 14 is in a state of being separated from both the inner side walls 12a. Thereafter, the probe 10 continues to move relative to the workpiece W in the opposite direction across the reference plane while contacting the workpiece W only by its own axial component, and leaves the workpiece W at a predetermined point on the opposite side. Meanwhile, the position detector 20 continues to detect the position of the air slide shaft 7 and plots the position, whereby the shape of the workpiece W is accurately measured.

As described above, according to the shape measuring machine 1 in the present embodiment, the position detection unit 20 is adjusted to have a predetermined position and angle of the air slide shaft 7 and is directly mounted on the air slide shaft 7. Highly accurate measurement with extremely small measurement error is possible.
Further, since the glass scale 16 and the glass scale head 17 are provided as the position detector 20, and these are mounted on the air slide shaft 7, an Abbe error is prevented from occurring in the direction of the axis L. And more accurate measurement is possible.
Further, when the angle formed between the measurement scanning axis of the probe 10 and the axis L is deviated from a right angle, the angle formed by the intermediate base 4 is made to be a right angle by rotating the intermediate base 4 around the pin axis O. The adjustment can be made, and the rotation can be prevented by the fixing screw 31 after the adjustment. Therefore, the angle formed can be set and maintained at a right angle, and the measurement accuracy can be improved.

Further, since the probe 10 can be brought into contact with the workpiece W with a minute contact force that is the axial component of its own weight of the member including the probe 10, the load when the probe 10 is brought into contact with the workpiece W and when the probe 10 is not brought into contact with the workpiece W are reduced. The fluctuation can be reduced and the air slide shaft 7 can be prevented from warping. As a result, since it is not necessary to correct the inclination of the air slide shaft 7 by an autocollimator optical system or the like, the measuring machine itself can be reduced in size, and the measurement of a large concave workpiece W can be performed.
Further, since the plate spring is not used as means for applying the urging force and the axial component of its own weight is used, the stroke of the air slide shaft 7 can be lengthened, and the large-sized workpiece W can be highly accurate. Measurement can be performed easily.
Further, even if the probe 10 is in contact with the workpiece W and both are moved relative to each other, the contact force is very small, so that the generation of frictional force can be suppressed, and more accurate measurement is possible.

  Moreover, since the shape measuring machine 1 is installed in the processing machine 2, the workpiece W after processing can be measured without removing it from the processing machine 2. Therefore, the workpiece W can be removed from the processing machine 2. While reducing the error which arises when attaching to the shape measuring machine 1, the work burden of attachment and removal can be reduced. In addition, the workpiece W after machining can be measured immediately after machining, and correction processing can be performed immediately using the measured data, so that the shape accuracy of the final workpiece W can be improved while shortening the machining time. Is possible.

(Example 2)
FIG. 3 shows a second embodiment of the present invention.
3, the same components as those shown in FIGS. 1 and 2 are denoted by the same reference numerals, and the description thereof is omitted.
The embodiment shown in this figure has a configuration different from that of the embodiment described above in particular for the processing machine 2. That is, the processing machine 2 includes a spindle shaft 40 that holds a workpiece W so as to be rotatable about an axis N shown in the drawing, a processing machine main body 41 that supports the spindle shaft 40 so as to be movable in the direction of arrow C, and a processing machine main body. 41 and a processing machine substrate 2a, and a base 42 that supports the processing machine main body 41 so as to be movable in the direction of arrow D.

  In the present embodiment, the workpiece W is subjected to predetermined processing using a cutting tool, grinding, polishing grindstone, and the like, and then the measuring machine base 6 is moved, and the processing machine 2 moves the workpiece W to the axis N, arrow Move in C and D directions. Thereby, not only the surface shape of the axisymmetric workpiece W but also the entire surface of the non-axisymmetric workpiece W can be measured and evaluated.

In the above embodiment, the probe 10 has a spherical shape. However, the present invention is not limited to this, and for example, a probe having a shape having a small radius of curvature may be used.
Moreover, although the material of the probe 10 is ruby, it is not limited to this, and may be diamond, glass, sapphire, ceramics, or the like.
In addition, although a plurality of blowout holes are formed on the inner wall surface of the air slide bearing 8, a porous material may be used instead. Furthermore, the material of the air slide uses ceramics, but is not limited to this, a low expansion material with a small linear expansion coefficient, lightweight aluminum, duralumin, iron-based materials including stainless steel, resin, etc. may be used. .

  Furthermore, although the position detection unit 20 includes the glass scale 16 and the glass scale head 17, the position detection unit 20 is not limited thereto, and may be one using a laser length measuring device. In this case, a reflection mirror is installed on the opposite side of the air slide shaft 7 to which the probe 10 is attached. The reflecting mirror is adjusted to be perpendicular to the laser beam. As a method of adjusting and fixing the reflection mirror, the rear end surface of the air slide shaft 7 is precisely machined so as to be perpendicular to the traveling direction of the air slide shaft 7, and the tilt position of the laser length measuring device is determined based on the rear end surface. There is a way to adjust. In addition, there is a method in which the reflection mirror can be adjusted with a screw, shim tape, or the like, the inclination of the reflection mirror is adjusted, and then the reflection mirror is fixed. These examples can also eliminate Abbe error.

Further, with respect to the measurement start position of the workpiece W, the measurement is started after the probe 10 reaches a predetermined position on the surface of the workpiece W. However, the measurement is not limited to this, and the measuring machine base 6 is horizontal toward the reference plane side. Measurement may be started simultaneously with the start of movement.
Further, the measurement result information of the position detection unit 20 may be fed back to the processing machine 2 by a control unit (not shown). Thereby, processing by the processing machine 2 can be performed immediately after measurement, and processing time can be shortened.

It is a figure which shows the 1st Example in this invention, Comprising: It is a schematic side view which shows the state which installed the shape measuring machine which concerns on this invention in the processing machine. It is a figure which shows the 1st Example in this invention, Comprising: It is a schematic top view which shows the state which installed the shape measuring machine which concerns on this invention in the processing machine. It is a figure which shows the 2nd Example in this invention, Comprising: It is a schematic side view which shows the state which installed the shape measuring machine which concerns on this invention in the processing machine. It is a schematic block diagram which shows the conventional shape measuring machine.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Shape measuring machine 2 Processing machine 4 Intermediate base 4b Recessed part (rotation mechanism)
4c Through hole (fixing mechanism)
5 Overall base 5b Recess (rotation mechanism)
5c recess (fixing mechanism)
7 Air slide shaft (working shaft)
8 Air slide bearing (bearing)
10 Probe (Contact probe)
16 Glass scale (optical scale)
17 Glass scale head (optical scale)
20 Position detector (probe displacement measurement means)
30 pins (rotating mechanism)
31 Fixing screw (fixing mechanism)
W Work

Claims (3)

A contact probe that contacts the workpiece to measure the shape of the workpiece;
An operating shaft having the contact probe at the tip;
A bearing for supporting the operating shaft so as to be movable in the axial direction;
A probe displacement amount measuring means for measuring a displacement amount of the contact probe during the movement when both are moved relatively so as to sequentially move the contact point between the workpiece and the contact probe;
The operation in which the contact probe is biased toward the tip in the axial direction by an axial component of its own weight including a member including the contact probe, and the probe displacement measuring means passes the measurement point. Mounted on the shaft in an adjustable manner ,
An intermediate base on which the bearing and the probe displacement measuring means can be placed;
An overall base on which the intermediate base can be placed;
A rotating mechanism for rotating the intermediate base and the whole base around each other about an axis extending in the mounting direction of both,
Profile measuring instrument, characterized in that it comprises a.   The shape measuring machine according to claim 1, wherein the probe displacement measuring means is an optical scale. The rotation mechanism, in order to prevent relative rotation between the intermediate base and the entire base, according to claim 1 or 2, characterized in that it comprises a fixing mechanism for fixing the these intermediate base and the entire base from each other Shape measuring machine.

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