JP2005164021A - Connection device of passage block - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connection device of a passage block which allows easy positioning of a bolt insertion hole of an upper step passage block and a tapped hole of a lower step passage block when attaching the upper passage block to the lower step passage block and capable of decreasing the number of bolts. <P>SOLUTION: The connection device of the passage block consists of the bolt through hole 13 and the pin insertion hole 14 formed at the upper step passage block 3, the tapped hole 15 and a non-tapped hole 16 formed at the lower step passage block 4, a bolt 11 inserted into the bolt insertion hole 13 and screwed to the tapped hole 15 and a positioning pin 12, with its lower end part fit into the non-tapped hole 16, inserted into the pin insertion hole 14. A notch part 17 is formed near a lower end of the positioning pin 12 and a protrusion part 18 to be fit with the notch part 17 is formed at an opening part of the non-tapped hole 16. The passage blocks 3, 4 connect with each other as even clamping is achieved when clamping force of the bolt 11 and the force of the lower end part of the positioning pin 12 pushing upward the protrusion part 18 of the non-tapped hole 16 are balanced. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a coupling device for a passage block suitable for coupling a mass flow controller used in a fluid control device and a block joint member abutted against the mass flow controller.

In a fluid control device used in a semiconductor manufacturing apparatus or the like, various fluid control devices are arranged in a plurality of rows, and the flow paths of fluid control devices in adjacent rows are connected to each other at a predetermined location by device connection means. In recent years, in this type of fluid control device, integration of connecting a mass flow controller, an on-off valve, and the like without using a tube has been advanced. In such a fluid control device, a passage block (upper passage block) is provided on both side surfaces of the mass flow controller, and this is connected to a block-like joint member (lower passage block) by two bolts from above. (For example, patent document 1).
JP-A-8-326943

  In the above fluid control device, there are many man-hours for attaching the upper passage block to the lower passage block, and the bolt tightening work efficiency is improved. In particular, the positioning of the bolt passage hole of the upper passage block and the screw hole of the lower passage block and the bolt Reduction of the number is an important issue.

  The object of the present invention is to easily position the bolt passage hole of the upper passage block and the screw hole of the lower passage block when attaching the upper passage block to the lower passage block, and to reduce the number of bolts. It is to provide a coupling device for a passage block.

  According to a first aspect of the present invention, there is provided a coupling device for a passage block, wherein the upper passage block having a downward opening and the lower passage block having an upward opening are joined to each other by a bolt and joined by a bolt, and the opening is formed in the upper passage block. Bolt insertion hole and pin insertion hole formed so as to sandwich, screw hole and non-screw hole formed in the lower passage block so as to correspond to the bolt insertion hole and pin insertion hole of the upper passage block, and the upper passage block, respectively A bolt inserted into the screw passage hole of the lower passage block and screwed into the screw hole of the lower passage block, and a positioning pin inserted into the pin insertion hole of the upper passage block and fitted to the non-screw hole of the lower passage block. A notch is formed near the lower end of the positioning pin, and the diameter of the non-screw hole is A protrusion that is larger than the diameter of the lower end and fits into the notch of the positioning pin is formed in the non-screw hole, and the notch of the positioning pin and the protrusion of the non-screw hole are fitted together first. Then, the bolt is tightened, and at this time, the bolt tightening force and the force at which the lower end portion of the positioning pin pushes the protruding portion of the non-threaded hole upward is balanced, so that the uniform tightening is achieved and the passage blocks are connected to each other. It is characterized by being combined.

  According to a second aspect of the present invention, there is provided a coupling device for a passage block, wherein the upper passage block having a downward opening and the lower passage block having an upward opening are joined to each other by a bolt and joined by a bolt, and the opening is formed in the upper passage block. A bolt insertion hole and a pin insertion hole formed so as to be sandwiched, a screw hole formed in the lower passage block so as to correspond to a bolt insertion hole of the upper passage block, and an upper protrusion formed on the upper surface of the lower passage block Corresponds to the positioning pin that is inserted into the pin passage hole of the upper passage block and the upper end protrudes above the upper surface of the block, the notch portion fitted to the upper end portion of the positioning pin, and the bolt insertion hole of the upper passage block A tightening auxiliary member that has a bolt insertion hole to be stacked above the upper passage block, and an upper end portion of the positioning pin. And a retaining portion for preventing the upward movement of the tightening auxiliary member after the notched portion of the tightening auxiliary member is fitted to the upper end of the positioning pin, and the bolts of the tightening auxiliary member and the upper passage block are inserted. The tightening auxiliary member has a convex arc-shaped bottom surface that protrudes downwards at the exact center between the positioning pin central axis and the bolt central axis. When the bolt is tightened, the tightening force of the bolt and the force with which the retaining part pushes the tightening auxiliary member downward is balanced, so that even tightening is achieved and the passage blocks are connected. It is what.

  In this specification, a passage block is a rectangular parallelepiped block provided with a penetrating passage, and is used as a joint or a block-like part or body part integrated with a fluid controller such as an on-off valve. Shall be included.

  According to the coupling device for the passage block of the first and second inventions, since the coupling can be made by one bolt, the number of bolts can be reduced, and before the bolt tightening, the lower passage block can be reduced. Since the position of the upper passage block is regulated by the positioning pin, the operation of screwing the bolt into the screw hole becomes easy.

  Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right refer to the left and right in each figure (b), and the front side of the drawing in FIG.

  1 to 3 show an embodiment of a coupling device for a passage block according to the first invention.

  The passage block coupling device (1) according to the first invention includes, for example, an upper passage block (3) having a downward opening (3a) and a lower passage block having an upward opening (4a) provided in the mass flow controller (2). 4) and the openings (3a) and (4a) are brought into contact with each other via a seal member (5) and joined by bolts (11), and are formed so that the opening (3a) is sandwiched between the upper passage block (3). The lower passage block (4) is formed so as to correspond to the bolt insertion hole (13) and the pin insertion hole (14) and the bolt insertion hole (13) and the pin insertion hole (14) of the upper passage block (3), respectively. The threaded hole (15) and the non-threaded hole (16), and the bolt passage hole (13) of the upper passage block (3) are inserted into the screw hole (15) of the lower passage block (4). The matching bolt (11) and the positioning pin (the lower end portion of which is fitted into the non-threaded hole (16) of the lower passage block (4) through the pin insertion hole (14) of the upper passage block (3). 12).

  A notch (17) is formed near the lower end of the positioning pin (12), and the notch (17) is formed at the opening of the non-screw hole (16) of the lower passage block (4). The fitting part (18) which fits is formed.

  The diameter of the non-screw hole (16) of the lower passage block (4) is larger than the diameter of the lower end portion of the positioning pin (12), and the diameter of the opening of the non-screw hole (16) is the protrusion ( By providing 18), the diameter of the positioning pin (12) is slightly smaller. The protrusion (18) is formed so as to extend rightward from the left surface of the non-screw hole (16), and the portion (4b) on the left side of the non-screw hole (16) of the lower passage block (4) It is shaved to be slightly concave than the other parts. Therefore, as shown in FIG. 2, in the state where the upper passage block (3) is inclined with respect to the lower passage block (4), the lower end portion of the positioning pin (12) is fitted into the non-screw hole (16). Thus, the notch portion (17) of the positioning pin (12) and the protruding portion (18) of the non-screw hole (16) can be fitted together, whereby the upper stage relative to the lower passage block (4). The passage block (3) is positioned. Next, as shown in FIG. 3, when the upper passage block (3) is overlapped with the lower passage block (4), the lower end of the positioning pin (12) is the protrusion (18) of the non-screw hole (16). ) Is pressed upward. Thereafter, the bolt (11) is tightened. At this time, the tightening force of the bolt (11) (the force with which the bolt (11) pulls the lower passage block (4) upward) and the lower end of the positioning pin (12) are non-threaded holes. By balancing the upward pressing force of the protruding portion (18) of (16), uniform tightening is achieved and the passage blocks (3) and (4) are joined together.

  According to the coupling device (1) of the passage block of the first invention, since it can be coupled by one bolt (11), it is possible to reduce the number of bolts, and before tightening the bolt, Since the position of the upper passage block (3) with respect to the passage block (4) is regulated by the positioning pin (12), the operation of screwing the bolt (11) into the screw hole (15) is facilitated.

  4 to 6 show an embodiment of the coupling device for the passage block of the second invention.

  The passage block coupling device (20) according to the second invention includes, for example, an upper passage block (3) having a downward opening (3a) and a lower passage block having an upward opening (4a) provided in the mass flow controller (2). 4) and the openings (3a) and (4a) are brought into contact with each other via a seal member (5) and joined by bolts (21). Bolt insertion formed so as to sandwich the opening in the upper passage block (3) A hole (23), a pin insertion hole (24), a screw hole (25) formed in the lower passage block (4) so as to correspond to the bolt insertion hole (23) of the upper passage block (3), and a lower passage The upper surface of the block (4) is formed so as to protrude upward, is inserted into the pin insertion hole (24) of the upper passage block (3), and the upper end protrudes upward from the upper surface of the block (3). The fixing pin (22), the notch (31) fitted to the upper end of the positioning pin (22), and the bolt insertion hole (32) corresponding to the bolt insertion hole (23) of the upper passage block (3) The fastening auxiliary member (30) overlaid on the upper passage block (3), and the notch (31) of the fastening auxiliary member (30) provided at the upper end of the positioning pin (22) is the positioning pin. Each of the retaining portion (27) that prevents the upward movement of the tightening auxiliary member (30) after being fitted to the upper end portion of (22), the tightening auxiliary member (30), and the upper passage block (3) It consists of a bolt (21) inserted through the bolt insertion hole (32) (23) and screwed into the screw hole (25) of the lower passage block (4).

  The positioning pin (22) has a threaded portion at the lower end and is screwed into a screw hole (26) provided in the lower block (4). The portion near the upper end has a small diameter (22a), so that the upper end is a retaining portion (27).

  The tightening auxiliary member (30) has a convex arc-shaped bottom surface (33) that protrudes downward most at the center between the center axis of the positioning pin (22) and the center axis of the bolt (21).

  As shown in FIG. 4, the coupling device (20) for the passage block according to the second invention first fixes the positioning pin (22) to the lower block (4) and then the pin of the upper block (3). The positioning pin (22) is inserted into the insertion hole (24), and the upper passage block (3) and the lower passage block (4) are overlapped. Thereby, the position of the upper stage passage block (3) with respect to the lower stage passage block (4) is regulated by the positioning pin (22). Next, as shown in FIG. 5, the tightening auxiliary member (30) is fitted to the upper diameter passage block (3) by fitting its notch (31) to the small diameter portion (22a) of the positioning pin (22). To overlay. Then, the bolt (21) is inserted into the tightening auxiliary member (30) and the bolt insertion holes (32) and (23) of the upper passage block (3) and screwed into the screw holes (25) of the lower passage block (4). . By tightening the bolt (21) in this manner, the tightening force of the bolt (21) (the force by which the bolt (21) pushes the tightening auxiliary member (30) downward) and the retaining portion (27) become the tightening auxiliary member ( 30) is balanced against the downward pressing force, so that even tightening is achieved and the passage blocks (3) and (4) are joined together.

  According to the coupling device (20) of the passage block of the second invention, since it can be coupled by one bolt (21), the number of bolts can be reduced, and before the bolt (21) is tightened. Since the position of the upper passage block (3) with respect to the lower passage block (4) is regulated by the positioning pin (22), the operation of screwing the bolt (21) into the screw hole is facilitated.

  FIG. 7 is a graph comparing the tightening state of the coupling device for the passage block according to the first and second inventions with a conventional example. The graph shows the relationship between the bolt tightening torque (N · m) and the thrust (N). From this result, the invention product (passage block coupling device according to the first and second inventions) is data-like. Is the same performance as the conventional product (using two bolts), and it can be seen that the number of bolts can be halved while maintaining the same tightening force.

  The lower passage block (4) is composed of a main body (corresponding to the upper passage block) of a fluid control device (for example, an on-off valve, a filter, etc.) adjacent to the mass flow controller (2) and the same coupling device as described above or two ordinary passage devices. It couple | bonds with the coupling | bonding apparatus by a volt | bolt, and, thereby, a mass flow controller (2) and a fluid control apparatus are connected via a lower stage passage block (4). In the above-described embodiment, only the case where the upper passage block (3) provided in the mass flow controller (2) and the lower passage block (4) as a joint member for communicating with the other fluid control device are coupled is described. However, the coupling device according to the present invention is not limited to this, and can be applied to coupling between other fluid control devices or between another fluid control device and a joint member.

1A and 1B show an embodiment of a connecting device for passage blocks according to the first invention, wherein FIG. 1A is a perspective view and FIG. 1B is a front sectional view showing the first step of the connecting process. ing. 2A and 2B show an embodiment of a coupling device for passage blocks according to the first invention, wherein FIG. 2A is a perspective view and FIG. 2B is a front sectional view showing an intermediate process of the coupling processes. ing. FIGS. 3A and 3B show an embodiment of a coupling device for passage blocks according to the first invention, wherein FIG. 3A is a perspective view and FIG. 3B is a front sectional view showing a coupling completion state. 4A and 4B show an embodiment of a connecting device for passage blocks according to the second invention, wherein FIG. 4A is a perspective view and FIG. 4B is a front sectional view showing the first step of the connecting process. ing. FIGS. 5A and 5B show an embodiment of a connecting device for a passage block according to the second invention, wherein FIG. 5A is a perspective view and FIG. 5B is a front sectional view showing an intermediate process among the connecting processes. ing. 6A and 6B show an embodiment of a coupling device for passage blocks according to the first invention, wherein FIG. 6A is a perspective view and FIG. 6B is a front sectional view showing a coupling completion state. FIG. 7 is a graph comparing the tightening state of the coupling device of the passage block according to the first and second inventions with a conventional example.

Explanation of symbols

(1) Passage block coupling device (3) Upper passage block (3a) Downward opening (4) Lower passage block (4a) Upward opening (11) Bolt (12) Positioning pin (13) Bolt insertion hole (14) Pin insertion Hole (15) Screw hole (16) Non-screw hole (17) Notch (18) Projection (20) Passage block coupling device (21) Bolt (22) Positioning pin (23) Bolt insertion hole (24) Pin Insertion hole (25) Screw hole (27) Retaining part (30) Tightening auxiliary member (31) Notch part (32) Bolt insertion hole (33) Convex arc-shaped bottom

Claims (2)

  A coupling device that joins an upper passage block having a downward opening and a lower passage block having an upward opening by abutting each other with a bolt, and a bolt insertion hole and a pin insertion formed so as to sandwich the opening in the upper passage block A hole, a screw hole and a non-screw hole formed in the lower passage block so as to correspond to the bolt insertion hole and the pin insertion hole of the upper passage block, and the bolt passage hole of the upper passage block, respectively. A bolt that is screwed into the screw hole and a positioning pin that is inserted into the pin insertion hole of the upper passage block and the lower end portion is fitted into the non-screw hole of the lower passage block. And the diameter of the non-screw hole is made larger than the diameter of the lower end portion of the positioning pin. A protrusion that fits into the notch is formed in the non-threaded hole, and the notch of the positioning pin and the protrusion of the non-threaded hole are first fitted, and then the bolt is tightened. Passage block coupling characterized in that equal tightening is achieved and the passage blocks are joined together by balancing the tightening force of the positioning pin and the force with which the lower end of the positioning pin pushes the protrusion of the non-screw hole upward apparatus.   A coupling device that joins an upper passage block having a downward opening and a lower passage block having an upward opening by abutting each other with a bolt, and a bolt insertion hole and a pin insertion formed so as to sandwich the opening in the upper passage block A hole, a screw hole formed in the lower passage block so as to correspond to a bolt insertion hole of the upper passage block, and an upper protrusion formed on the upper surface of the lower passage block so as to protrude upward and into the pin insertion hole of the upper passage block A positioning pin that protrudes upward from the upper surface of the block, a notch portion fitted to the upper end of the positioning pin, and a bolt insertion hole corresponding to the bolt insertion hole of the upper passage block, above the upper passage block The tightening auxiliary member placed on top of the positioning pin and the notch of the tightening auxiliary member provided at the upper end of the positioning pin are positioned. A retaining portion that prevents the upward movement of the tightening auxiliary member after being fitted to the upper end of the pin, and a bolt insertion hole of the tightening auxiliary member and the upper passage block to be inserted into the screw hole of the lower passage block. The tightening auxiliary member has a convex arc-shaped bottom surface that protrudes downwardly at the exact center between the positioning pin central axis and the bolt central axis. When the bolt is tightened, A passage block coupling device characterized in that equal tightening is achieved and the passage blocks are joined together by balancing the force and the force with which the retaining portion pushes the tightening auxiliary member downward.

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