JP2005153141A5 - - Google Patents

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Publication number
JP2005153141A5
JP2005153141A5 JP2005015113A JP2005015113A JP2005153141A5 JP 2005153141 A5 JP2005153141 A5 JP 2005153141A5 JP 2005015113 A JP2005015113 A JP 2005015113A JP 2005015113 A JP2005015113 A JP 2005015113A JP 2005153141 A5 JP2005153141 A5 JP 2005153141A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005015113A
Other languages
Japanese (ja)
Other versions
JP2005153141A (ja
JP4079151B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005015113A priority Critical patent/JP4079151B2/ja
Priority claimed from JP2005015113A external-priority patent/JP4079151B2/ja
Publication of JP2005153141A publication Critical patent/JP2005153141A/ja
Publication of JP2005153141A5 publication Critical patent/JP2005153141A5/ja
Application granted granted Critical
Publication of JP4079151B2 publication Critical patent/JP4079151B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005015113A 2005-01-24 2005-01-24 研磨方法 Expired - Fee Related JP4079151B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005015113A JP4079151B2 (ja) 2005-01-24 2005-01-24 研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005015113A JP4079151B2 (ja) 2005-01-24 2005-01-24 研磨方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9054096A Division JP3697775B2 (ja) 1996-03-19 1996-03-19 研磨装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007318981A Division JP4803167B2 (ja) 2007-12-10 2007-12-10 研磨装置

Publications (3)

Publication Number Publication Date
JP2005153141A JP2005153141A (ja) 2005-06-16
JP2005153141A5 true JP2005153141A5 (de) 2005-09-08
JP4079151B2 JP4079151B2 (ja) 2008-04-23

Family

ID=34737565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005015113A Expired - Fee Related JP4079151B2 (ja) 2005-01-24 2005-01-24 研磨方法

Country Status (1)

Country Link
JP (1) JP4079151B2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248282A (ja) * 2008-04-10 2009-10-29 Showa Denko Kk 研磨装置及び研磨補助装置、ならびに、研磨方法
US9238293B2 (en) * 2008-10-16 2016-01-19 Applied Materials, Inc. Polishing pad edge extension
CN106737129A (zh) * 2016-12-16 2017-05-31 中国科学院长春光学精密机械与物理研究所 可调转速比的平面研磨装置
CN110549242B (zh) * 2018-05-31 2020-10-23 许栋梁 全向整合式调节装置
JP2024085517A (ja) * 2022-12-15 2024-06-27 株式会社荏原製作所 研磨装置

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