JP2005140259A - Purge unit and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a purge unit that is capable of controlling a water volume below a reference value, and its manufacturing method. <P>SOLUTION: The purge unit 1A keeps a manual valve 3, a regulator 4, a pressure meter 5, an opening and closing valve 6, a mass flow controller 7, and a filter 8 connected with one another and supplies a working gas from an input port 15 to an output port 16 via the above-mentioned devices. In the purge unit 1A, the water volumes inside fluid control devices including the manual valve 3 and the regulator 4 are set below the reference value and further the input port 15 and the output port 16 are sealed by a sealing member 17, 17. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a purge unit to which a plurality of fluid control devices are connected, and supplies a working gas from an input port to an output port via the plurality of fluid control devices, and a method for manufacturing the same.

2. Description of the Related Art Conventionally, in a semiconductor manufacturing apparatus, a gas supply unit is used to supply a working gas with a flow rate adjusted with high accuracy. The gas supply unit is, for example, one in which a fluid control device such as a manual open / close valve, a regulator, a pressure gauge, a flow meter, and a mass flow controller is attached to the mounting plate from the upstream side. In order to prevent moisture from being mixed into the working gas and changing the gas component, such a gas supply unit performs a work of removing moisture adhering to the flow path by flowing a purge gas when installed in the semiconductor manufacturing apparatus. . For this reason, as the fluid control device of the gas supply unit, a semiconductor specification with polished stainless steel is used to make it easy to remove moisture adhering to the flow path. According to the gas supply unit using the stainless steel fluid control device, as shown in FIG. 6, if the purge gas is allowed to flow for 5 hours, the water content can be reduced to 2000 ppb.
In addition, since this technique is a publicly known / public technique, prior art document information is not disclosed here.

  However, the fluid control device made of stainless steel has a problem that it is not only expensive but also large, heavy and difficult to handle. On the other hand, the inventors thought that if a general-purpose pneumatic device made of aluminum is used instead of a fluid control device made of stainless steel, cost reduction, size reduction, and weight reduction can be achieved.

  In general-purpose pneumatic equipment made of aluminum, sulfuric acid alumite treatment is applied to the surface of the flow path to prevent scratches in the flow path. Occur. For this reason, a general-purpose pneumatic device made of aluminum takes time to purge to reduce the amount of moisture. Specifically, as shown in FIG. 7, even if the purge gas continues to flow for 14 hours, the water content is reduced only to 7500 ppb.

  Therefore, the inventors have come up with the idea that an aluminum general-purpose pneumatic device that is not subjected to sulfuric acid alumite treatment is used as a fluid control device of the gas supply unit. According to this, since the moisture generation source is eliminated, it is possible to greatly reduce the time for removing the moisture amount as compared with a general-purpose pneumatic device made of aluminum that has been subjected to sulfuric acid alumite treatment. Specifically, as shown in FIG. 8, when the purge gas continues to flow for 14 hours, the water content decreases to about 2500 ppb, and when the purge gas continues to flow for 20 hours, the water content can be decreased to 2000 ppb. However, the purge time (20 hours) for reducing the amount of water to 2000 ppb is about four times the purge time (5 hours) when using a stainless steel fluid control device, and there is a contrivance to further shorten the purge time. is necessary.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a purge unit capable of controlling the amount of water to a reference value or less and a method for manufacturing the same.

The present invention has the following configuration.
(1) In a purge unit in which a plurality of fluid control devices are connected and purged by flowing purge gas from the input port to the output port via the plurality of fluid control devices, the water content in the fluid control device is set to a reference value or less. The input port and the output port are sealed with a sealing member.

(2) The invention described in (1) is characterized in that the purge gas is sealed under pressure.

(3) In the invention described in (2), the sealing member that seals the input port is a pressurization sealing jig in which a pressure gauge and a manual valve are connected in series.
(4) In the invention described in (3), the pressurization sealing jig is characterized in that the input port of the manual valve is sealed with a sealing member.

(5) In the invention according to any one of (1) to (4), the fluid control device is a general-purpose pneumatic device made of aluminum that is not subjected to alumite treatment.

(6) In a method for manufacturing a purge unit in which a plurality of fluid control devices are connected, a plurality of fluid control devices are connected, and a purge gas is supplied from the input port of the purge unit to the output port, thereby determining the moisture content in the purge unit. The purge gas is reduced to below the value, and a sealing member is attached to the output port while supplying the purge gas to the input port, and the flow path is closed by one of a plurality of fluid control devices while supplying the purge gas to the input port. Is sealed in the purge unit, and a sealing member is attached to the input port.

  According to the invention having the configuration of (1) above, since the input port and the output port are sealed with the sealing member in a state where the moisture amount is set to a reference value or less, outside air is discharged from the input port or the output port. Do not enter and generate moisture. Therefore, according to the present invention, it is possible to control the amount of water to a reference value or less even during transportation or storage. As a result, at the shipping destination or the like, the purge unit whose water content has been reduced in advance is purged, and the purge time can be shortened.

  According to the invention having the configuration of (2) above, in addition to the operational effects of the invention described in (1), the internal pressure is higher than the external pressure, so the gap between the input port and the sealing member, the output port and the sealing member, It is difficult for outside air to enter through the gaps.

According to the invention having the configuration of (3) above, in addition to the function and effect of the invention described in (2), a pressure sealing jig is attached to the input port, and purge gas is supplied to the input port via the pressure sealing jig. Supply. When the output port is sealed with the sealing member, the internal pressure of the purge gas unit is improved, and the pressure indicated by the pressure gauge of the pressurization sealing jig is improved. When the pressure gauge of the pressurization enclosure jig indicates a predetermined pressure, the purge valve is pressurized and enclosed by closing the manual valve of the pressurization enclosure jig while supplying the purge gas. Thereby, outside air can be prevented from entering from the input port when the input port is sealed, and the internal pressure can be set to a predetermined pressure.
According to the invention having the configuration of (4) above, in addition to the operational effects of the invention described in (3), the input port is sealed with the manual valve and the sealing member, so that outside air enters from the input port. It can prevent more reliably.

  According to the invention having the configuration of (5), in addition to the function and effect of the invention described in any one of (1) to (4), the cost is lower than that of a stainless steel fluid control device. In addition, the size and weight can be reduced. Further, since no alumite treatment is performed, moisture is not generated during purging, and moisture is easily removed.

  According to the invention having the configuration of (6) above, a plurality of fluid control devices are connected, and the input port and the output port are communicated. Then, purge gas is supplied from the input port of the purge unit to the output port, and moisture adhering to the inner wall of the flow path is discharged from the output port together with the purge gas. When the moisture content of the purge unit decreases to a reference value or less, the sealing member is attached to the output port while the purge gas is supplied. Furthermore, if the purge gas is continuously supplied, the purge unit is gradually pressurized. When the internal pressure of the purge unit reaches a predetermined value, the flow path is closed with one of the fluid control devices. Thus, the purge gas is pressurized and sealed between the fluid control device and the output port. A sealing member is attached to the input port so that outside air does not enter the purge unit. In such a purge unit, the input port and the output port are sealed with a sealing member, and the internal pressure is higher than the external pressure, so outside air enters from the input port and the output port until the sealing member is removed. It is difficult to increase the amount of moisture. Therefore, according to the present invention, the purge unit can be transported in a state in which the amount of water is controlled below the reference value. As a result, at the shipping destination and the like, purging of the purge unit whose water content has been reduced in advance is performed, so the purge time can be shortened.

Next, an embodiment of a purge unit and a manufacturing method thereof according to the present invention will be described with reference to the drawings. FIG. 1 is a plan view of the gas supply unit 1A. FIG. 2 is a side view of the gas supply unit 1A.
The purge unit of the present embodiment is, for example, a gas supply unit 1A that is attached to a semiconductor manufacturing apparatus and adjusts the flow rate of the working gas supplied to the chamber, and a plurality of fluid control devices are attached to the attachment plate 2. . In the present embodiment, a manual valve 3, a regulator 4, a pressure gauge 5, an on-off valve 6, a mass flow controller 7, and a filter 8 are arranged in parallel on the mounting plate 2 as fluid control devices from the upstream side, and include a connecting pipe, a joint, and the like. The input port 15 is connected to the output port 16 by being connected to each other through the piping means 9, 10, 11, 12, 13, and 14. Various fluid control devices such as regulator 4 and pressure gauge 5 use aluminum general-purpose pneumatic devices for cost reduction, size reduction, and weight reduction, and the inner wall of the flow path is anodized with sulfuric acid. Absent. This is because the portion subjected to the alumite treatment generates moisture during the purge because the alumite contains moisture, thereby extending the purge time.

  When the gas supply unit 1 </ b> A opens the manual valve 3, the working gas supplied to the input port 15 is adjusted to a constant pressure by the regulator 4 based on the detection result of the pressure gauge 5, and the flow rate is adjusted by the mass flow controller 7. Impurities are removed by the filter 8 and output from the output port 16.

  Such a gas supply unit 1A is assembled in a semiconductor manufacturing apparatus at a shipping destination and then purged before the operation of the semiconductor manufacturing apparatus to reduce the water content to a target value. This is because moisture is not mixed in the working gas and the gas component is not changed. In the present embodiment, the target value of the amount of water at the shipping destination is 1000 ppb.

  In this case, since the gas supply unit 1A uses a general-purpose pneumatic device made of aluminum, moisture is less likely to be removed from the inner wall of the flow path than a fluid control device made of a stainless steel polished product. Therefore, if the gas supply unit 1A is simply shipped with the aluminum fluid control device attached to the mounting plate 2, the purge time at the shipping destination is longer than that of the stainless steel fluid control device. Therefore, in the gas supply unit 1A, the input port 15 and the output port 16 are sealed with the sealing members 17 and 17 in a state where the moisture amount is set to a reference value or less, and the purge gas is pressurized and sealed.

FIG. 3 is a view showing a mounting structure of the sealing member 17.
The sealing member 17 is screwed to the male nut 20 attached to the open end of the input port 15 or the output port 16. As shown in FIG. 3A, the sealing members 17 and 17 have a blind gland 22 held by a female nut 21 having a hollow hole. The blind gland 22 has a substantially cylindrical shape and has a step on the outer peripheral surface thereof. The blind gland 22 is loaded in the hollow hole of the female nut 21 so that the step is abutted against the female nut 21. The blind gland 22 has an E-ring 23 attached to the tip protruding from the female nut 21 to prevent the blind gland 22 from falling off. As shown in FIG. 3B, the sealing member 17 has a gasket 24 interposed between a male nut 20 and a female nut 21, and the female nut 21 is fixed while the male nut 20 is fixed with a fixing member such as a spanner. Are attached to the input port 15 or the output port 16. As shown in FIG. 3C, the gasket 24 is crushed between the end face of the blind gland 22 and the end face of the male nut 20 by the driving force of the screw to seal the opening of the input port 15 or the output port 16. To do.

Such a gas supply unit 1A is manufactured as follows.
First, fluid control devices such as a manual valve 3 and a regulator 4 are attached to the mounting plate 2, and these fluid control devices are connected by piping means 9, 10, 11, 12, 13, 14, and input ports 15 and output ports 16. To communicate. At this time, the input port 15 and the output port 16 are not attached with the sealing member 17 and are open.

Then, a pressure sealing jig is attached to the input port 15 of the gas supply unit 1A. The pressurizing enclosure jig is a manual valve and a pressure gauge connected in series. The manual valve is connected to the purge port, and the pressure gauge is connected to the input port 15 of the gas supply unit 1A. Therefore, the pressurization sealing jig can control the opening and closing of the manual valve by confirming the internal pressure of the gas supply unit 1A with a pressure gauge. Then, a purge gas such as N ₂ , He, Ar, etc. is supplied to the input port 15 at a constant flow rate via the pressurized enclosure jig. In this embodiment, N ₂ purge gas is supplied to the input port 15 at a rate of 8 liters per minute. The purge gas blows away the water adhering to the inner wall of the flow path such as the regulator 4 or the pressure gauge 5 by the fluid pressure, and is output from the output port 16 together with the water. Since the alumite treatment is not performed on the inner wall of each fluid control device, moisture is not generated from the inner wall of the flow path during the purge.

  During the purge, the moisture content of the gas supply unit 1A is inspected with a moisture detector or the like. When it is confirmed that the moisture amount has been dried down to a reference value or less, the sealing member 17 is screwed and attached to the output port 16 while supplying the purge gas. Here, it is desirable to set the reference value of the moisture amount to a target value or less when purging at the shipping destination. This is because when the sealing members 17 and 17 are removed from the input port 15 and the output port 16 at the shipping destination, outside air enters the gas supply unit 1A and increases the amount of moisture. In this embodiment, since the target value when purging at the shipping destination is 1000 ppb, the reference value is set to 250 ppb, and when 8 liters of purge gas per minute continues to flow through the gas supply device 1A for about 120 minutes, The water content can be reduced to 250 ppb or less.

  Further, the purge gas continues to flow, and the internal pressure of the gas supply unit 1A is set higher than the external pressure. For example, when the pressure gauge of the pressurizing and sealing jig indicates 0.5 MPa, the manual valve 3 is closed and the purge gas is pressurized and sealed, the jig is removed, and the sealing member 17 is screwed into the input port 15 and attached. .

The manufactured gas supply unit 1A is transported to the shipping destination. At this time, since the input port 15 and the output port 16 are respectively closed by the sealing members 17 and 17, it is difficult for outside air to enter the gas supply unit 1A from the input port 15 or the output port 16 and generate moisture. Therefore, according to the gas supply unit 1A, it is possible to control the amount of water at the time of transportation or storage to a reference value or less.
Moreover, since the purge gas is pressurized and sealed in the gas supply unit 1A and the internal pressure is higher than the external pressure, the gap between the input port 15 and the sealing members 17, 17 and the output port 16 and the sealing members 17, 17 Outside air is difficult to enter through the gap.

  The gas supply unit 1A transported to the shipping destination is detached from the input port 15 and the output port 16 from the sealing members 17 and 17 and assembled into the semiconductor manufacturing apparatus. At this time, outside air enters the gas supply unit 1A, and the amount of water increases. However, in the gas supply unit 1A, since the moisture amount is controlled to be equal to or less than the reference value at the time of transportation, the moisture amount at the completion of the assembly only increases to the target value of the moisture amount at the shipping destination. Specifically, after the gas supply unit 1A is manufactured so as to control the water content to 250 ppb or less, the water content increases to 800 ppb when the gas supply unit 1A is left in the semiconductor manufacturing apparatus after being left for three days. Since the shipping destination is purged so that the amount of water becomes 1000 ppb, the amount of water at the time of assembly (800 ppb) is smaller than the target amount of water at the shipping destination (1000 ppb).

  Therefore, for example, the gas supply unit 1A is manufactured three days before the date and time when the gas supply unit 1A is assembled to the semiconductor manufacturing apparatus at the shipping destination, and the gas supply unit 1A is attached to the semiconductor manufacturing apparatus at a predetermined date and time. For example, at the shipping destination, the gas supply unit 1A whose water content has been reduced below the target value is purged in advance, and the purge time is shorter than that of the stainless steel fluid control device.

  Moreover, since the gas control unit 1A is not anodized in the fluid control device, moisture is not generated from the inner wall of the flow path during the purge, and the alumite treatment fluid control device is used at the shipping destination. The purge time can be shortened.

  The gas supply unit 1A is a series type, but even if it is a multiple type that integrates a plurality of gas supply units 1A, the water content of each gas supply unit 1A is less than the reference value as described above. If the sealing members 17 and 17 are attached to the input port 15 and the output port 16 and the purge gas is pressurized and sealed, the same effect can be obtained.

  Furthermore, it is possible to control the moisture content to a reference value or less even for a gas supply unit having a plurality of output ports for one input port. FIG. 4 is a plan view of the gas supply unit 1B.

  The gas supply unit 1B is attached to a semiconductor manufacturing apparatus, for example, and is used to distribute and supply a working gas to an apparatus used in each process. Therefore, the gas supply unit 1B is configured so that the gas supply line and the flow rate adjustment line are connected in parallel to one input port 31 and the working gas is output from the first port 39, the second port 40, and the third port 46. Has been.

  That is, in the gas supply unit 1 </ b> B, a plurality of fluid control devices are attached to the attachment plate 30.

  In the gas supply line, a manual valve 33, a regulator 34, and a pressure gauge 35 are connected in series from the upstream side by piping means such as a joint and piping, and two flow meters 36 and 36 are connected to the pressure gauge 35. Connected in parallel by means. In each flow meter 36, an on-off valve 37 with a flow rate adjusting function and a filter 38 are connected in series via piping means such as a joint or piping, and communicated with a first output port 39 and a second output port 40, respectively. For this reason, when the manual supply valve 33 is opened, the gas supply line controls the working gas to a constant pressure by the regulator 34 based on the detection result of the pressure gauge 35, and branches and supplies the operation gas to the on-off valves 37, 37 with flow rate adjustment function. . The on-off valves 37, 37 with a flow rate adjusting function are controlled in valve opening based on the detection results of the flow meters 36, 36, and adjust the working gas to a constant flow rate. The working gas whose flow rate has been adjusted is output from the first output port 39 and the second output port 40 after impurities are removed by the filters 38 and 38.

On the other hand, in the flow rate adjustment line, the manual valve 41, the regulator 42, the pressure gauge 43, the flow rate controller 44, and the filter 45 are connected in series by piping means such as a joint and piping from the upstream side, and communicated with the third output port 46. ing. Therefore, when the manual valve 41 is opened, the flow rate adjustment line controls the working gas to a constant pressure by the regulator 42 based on the detection result of the pressure gauge 43, and then controls the set flow rate by the flow rate controller 44, and by the filter 45. The impurities are removed and output from the third output port 46.
Note that the fluid control devices such as the regulators 34 and 42 and the flow meters 36 and 44 are general-purpose pneumatic devices made of aluminum, and the inner wall of the flow path is not anodized.

  In such a gas supply unit 1B, the sealing member 17 is attached to the input port 31 with the water content set to a reference value or less, and the sealing members 50, 50 are attached to the first to third output ports 39, 40, 46, respectively. , 50 and a purge gas under pressure. Since the mounting structure of the sealing member 17 has been described above, the mounting structure of the sealing member 50 will be described here. FIG. 5 is a view showing a mounting structure of the sealing member 50.

  As shown in FIG. 5A, the sealing member 50 is a plug that is screwed into a female nut 51 attached to the open end portions of the first to third output ports 39, 40, 46. The female nut 51 is attached to the outer periphery of the end of the input ports 39, 40, and 46 via a bearing 53, and is held rotatably. As shown in FIG. 5B, the sealing member 50 is fixed by a fixing member such as a spanner, and the female nut 51 is tightened via the gasket 52 to the first to third output ports 39, 40, 46. It is attached. As shown in FIG. 5C, the gasket 52 is crushed between the sealing member 50 and the end faces of the first to third output ports 39, 40, and 46 by the driving force of the screws, 3. Seal the openings of the output ports 39, 40, 46.

  Such a gas supply unit 1B is basically manufactured in the same procedure as the gas supply unit 1A. Briefly, the input port 31 is connected to the first to third output ports 39, 40, and 46 by installing a fluid control device on the mounting plate 30 and connecting it with a connection pipe. At this time, the input port 31 and the first to third output ports 39, 40, 46 are not attached with the sealing members 17, 50, and are open. A pressure sealing jig 57 in which a manual valve 55 and a pressure gauge 56 are connected to the input port 31 is attached, and purge gas is supplied to the input port 31 at a constant flow rate, so that moisture adhering to the flow path of each fluid control device can be removed. It is blown off with the purge gas and discharged from the first to third output ports 39, 40, and 46 together with the purge gas. When it is confirmed with a moisture detector or the like that the moisture content has been dried down to a reference value or less, the first to third output ports 39, 40, 46 are sealed with sealing members 50, 50, 50, respectively. When the purge gas is further supplied and the pressure gauge 56 of the pressurizing and sealing jig 57 indicates a predetermined pressure (for example, 0.5 MPa), the manual valves 33 and 41 are closed and the purge gas is pressurized and sealed. When the pressure gauge 56 of the pressurizing and sealing jig 57 indicates a predetermined pressure (for example, 0.5 MPa) and it is confirmed that the pressure of the pipe 32 is controlled to the predetermined pressure (for example, 0.5 MPa), it is manually performed. After the valve 55 is closed, a sealing member 58 is attached to the pressure sealing jig 57 and sealed. In addition, since the sealing member 58 is attached similarly to the sealing member 50, description of a structure is abbreviate | omitted.

Such a gas supply unit 1 </ b> B is transported to a shipping destination while the pressurizing and sealing jig 57 is attached to the input port 31. At this time, in the gas supply unit 1B, the input port 31 is sealed by the manual valve 55 and the sealing member 58 of the pressurizing and sealing jig 57, and the first to third output ports 39, 40, and 46 are sealed. Since it is sealed by the member 50, the outside air is difficult to enter from the input port 31 and the first to third output ports 39, 40, and 46, and can be transported in a state where the moisture amount is controlled to a reference value or less. .
Moreover, since the purge gas is pressurized and sealed in the gas supply unit 1B, the gap between the sealing member 58 and the pressure sealing jig 57, the valve portion of the manual valve 55, and the first to third output ports 39 and 40. , 46 and the sealing member 50 are less likely to enter outside air. Therefore, when the gas supply unit 1B is assembled in the semiconductor manufacturing apparatus at the shipping destination, an increase in the amount of moisture can be suppressed. Therefore, at the shipping destination, the gas supply unit 1B having a low water content is purged in advance, and the purge time can be shortened.

In addition, in the gas supply unit 1B, the sealing member that seals the input port 31 is a pressurization sealing jig 57 in which a pressure gauge 56 and a manual valve 55 are connected in series. Since the input port 31 is sealed with the manual valve 55 of the pressurizing and sealing jig 57 while the pressure of the pipe 32 is controlled to a predetermined pressure, outside air from the input port 31 is sealed when the input port 31 is sealed. Intrusion can be prevented and the internal pressure can be set to a predetermined pressure. In particular, the gas supply unit 1B of the present embodiment has no mechanism for blocking the flow path in the pipe 32 between the input port 31 and the manual valves 33 and 41, but closes the manual valve 55 of the pressurization sealing member 57. This can prevent the pipe 32 from being exposed to the atmosphere. In addition, the gas supply unit 1B of the present embodiment has no mechanism for detecting the internal pressure in the pipe 32 between the input port 31 and the manual valves 33 and 41. Since the pressure is managed by the pressure gauge 56 of the tool 57, even after the manual valves 33 and 41 are closed, the internal pressure of the pipe 32 can be monitored and set to a predetermined pressure by the pressure gauge 56 of the pressurizing and sealing jig 57. .
Furthermore, since the input port 31 is doubly sealed by the manual valve 55 and the sealing member 58, it is possible to more reliably prevent outside air from entering from the input port 31.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various applications are possible.

(1) In the above embodiment, each fluid control device is connected by the piping means 9 to 13, but each fluid control device may be connected by a flow channel block to shorten the flow channel. If the flow path is shortened, the purge time can be further shortened.

(2) In the above embodiment, the gas supply unit has been described. However, the present invention is not limited to this, and can be applied to any system that requires purging in a system in which a plurality of fluid control devices are connected. .

(3) In the above embodiment, one input port has one or a plurality of output ports, but a plurality of input ports have one output port. Also good.

(4) The purge gas for producing the gas supply units 1A and 1B may be at normal temperature or at a high temperature. If a high temperature purge gas is used, the purge time can be shortened.

(5) In the above embodiment, the input port 31 of the gas supply unit 1B is doubly sealed by the manual valve 55 and the sealing member 58, but even if the input port 31 is sealed only by the manual valve 55, Good.

FIG. 4 is a side view of the gas supply unit according to the embodiment of the present invention. Similarly, it is a top view of a gas supply unit. Similarly, it is a figure which shows the attachment structure of a sealing member. It is a top view which shows the example of a change of a gas supply unit. Similarly, it is a figure which shows the attachment structure of a sealing member. It is a figure which shows the relationship between the moisture content (ppb) at the time of purging the gas supply unit using a stainless steel fluid control apparatus, and elapsed time (hr). It is a figure which shows the relationship between the moisture content (ppb) at the time of purging the gas supply unit using the aluminum fluid control apparatus which performed the alumite process, and elapsed time (hr). It is a figure which shows the relationship between the moisture content (ppb) at the time of purging the gas supply unit using the aluminum fluid control apparatus which does not perform an alumite process, and elapsed time (hr).

Explanation of symbols

1A Gas supply unit 1B Gas supply unit 3 Manual valve 4 Regulator 5 Pressure gauge 6 On-off valve 7 Mass flow controller 8 Filters 9 to 14 Piping means 15 Input port 16 Output port 17 Sealing member 33 Manual valve 34 Regulator 35 Pressure gauge 36 Flow meter 37 On-off valve with flow rate adjusting function 38 Filter 39 First output port 40 Second output port 41 Manual valve 42 Regulator 43 Pressure gauge 44 Flow controller 45 Filter 46 Third output port

Claims (6)

In a purge unit to which a plurality of fluid control devices are connected and purged by flowing a purge gas from an input port to an output port via the plurality of fluid control devices,
A purge unit, wherein the amount of water in the fluid control device is set to a reference value or less, and the input port and the output port are sealed with a sealing member. The purge unit according to claim 1, wherein
A purge unit, wherein the purge gas is sealed under pressure. The purge unit according to claim 2,
The purge unit, wherein the sealing member for sealing the input port is a pressurizing and sealing jig in which a pressure gauge and a manual valve are connected in series. The purge unit according to claim 3, wherein
The purge unit, wherein the pressurizing and sealing jig seals the input port of the manual valve with a sealing member. In the purge unit according to any one of claims 1 to 4,
2. The purge unit according to claim 1, wherein the fluid control device is a general-purpose pneumatic device made of aluminum that has not been subjected to alumite treatment. In the manufacturing method of the purge unit in which a plurality of fluid control devices are connected,
Connecting the plurality of fluid control devices;
Reducing the amount of water in the purge unit below a reference value by supplying purge gas from the input port of the purge unit to the output port;
While supplying purge gas to the input port, a sealing member is attached to the output port,
After the purge gas is pressurized and sealed in the purge unit by closing the flow path with one of the plurality of fluid control devices while supplying the purge gas to the input port,
A method for manufacturing a purge unit, wherein a sealing member is attached to the input port.

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