JP2005129611A - Electronic component package - Google Patents

Electronic component package Download PDF

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Publication number
JP2005129611A
JP2005129611A JP2003361573A JP2003361573A JP2005129611A JP 2005129611 A JP2005129611 A JP 2005129611A JP 2003361573 A JP2003361573 A JP 2003361573A JP 2003361573 A JP2003361573 A JP 2003361573A JP 2005129611 A JP2005129611 A JP 2005129611A
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Prior art keywords
electronic component
sealing member
seam welding
ceramic container
component package
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JP2003361573A
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Japanese (ja)
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Yoji Nagano
洋二 永野
Tadayoshi Adachi
忠善 安達
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Toyo Communication Equipment Co Ltd
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Toyo Communication Equipment Co Ltd
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Priority to JP2003361573A priority Critical patent/JP2005129611A/en
Publication of JP2005129611A publication Critical patent/JP2005129611A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component package adapted to miniaturization and the reduction of cost. <P>SOLUTION: In the electronic component package, a lid member is overlapped with a ceramic vessel so that a sealing member arranged at a peripheral edge on one face of a metallic lid member and a plane shape having a recessed part on an upper face are brought into contact with a metallized part formed on the upper face of an outer peripheral frame of the rectangular ceramic vessel, and the electronic component stored in the recessed part of the ceramic vessel is hermetically sealed by fixing the sealing member and the metallized part. The length of the side of the ceramic vessel is 3.2 mm or less, the thickness is 1.0mm or less, and the thickness of the outer peripheral frame is 0.3 to 0.5 mm. An electrode for seam welding is made to abut only on one side of the ceramic vessel and seam welding is performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、小型化および低コスト化に対応するための電子部品用パッケージに関する。   The present invention relates to an electronic component package for coping with downsizing and cost reduction.

携帯電話機等の移動体通信機器の普及に伴う低価格化および小型化の急激な進展により、これらの通信機器に使用される圧電振動子やSAWフィルタ等の圧電部品を含む電子デバイスも小型化および低価格化への要求が高くなっている。電子デバイスに用いられる電子部品用パッケージは、例えば圧電部品の周波数安定度を高安定に保つ為、その内部を高真空状態若しくは不活性ガスを封入した状態にて封止するのが一般的である。このようにパッケージ容器内を高真空または不活性ガス封入状態に保つ為の前記封止は通常シーム溶接方法を用いて金属蓋と容器とを接合していた。   Electronic devices including piezoelectric vibrators and SAW filters and other electronic devices used in these communication devices have been downsized and reduced due to rapid progress in cost reduction and downsizing with the spread of mobile communication devices such as mobile phones. The demand for lower prices is increasing. For example, in order to keep the frequency stability of a piezoelectric component highly stable, an electronic component package used for an electronic device is generally sealed in a high vacuum state or an inert gas sealed state. . As described above, in order to keep the inside of the package container in a high vacuum or in an inert gas sealed state, the metal lid and the container are usually joined using a seam welding method.

以下、従来の電子部品用パッケージについて説明する。
従来の電子部品用パッケージには、例えば特開2000−3973号公報で提案されたようなものがあり、図3は従来の電子部品用パッケージの構成とその封止方法を示す縦断面図である。
同図に示すように、上面に凹部を備えるセラミック容器101と、前記凹部の開口を閉止する金属製の蓋部材202と、を備えている。蓋部材202は鉄−ニッケル−コバルト系合金の金属板203の少なくとも片面全体には液相線温度が957℃の銀系合金、若しくはその他の金属系合金をクラッド化した金属ろう材204の層が設けられている。またセラミック容器101の凹部内には電子部品104が収容されており、更に該セラミック容器101の外周枠102上には例えばニッケルメッキや金メッキ等が施されたタングステンまたはモリブデン等のメタライズ部201が設けられている。このメタライズ部201と金属ろう材204とを重ね合わせ、前記蓋部材202の対向する辺部に沿って、一対のローラ電極103を当接しながら加圧、通電することによりメタライズ部201と金属ろう材204とを連続的にスポット溶接(シーム溶接)し、これによりパッケージ内部は気密保持される。
Hereinafter, a conventional electronic component package will be described.
Conventional electronic component packages include those proposed in, for example, Japanese Patent Laid-Open No. 2000-3973. FIG. 3 is a longitudinal sectional view showing the configuration of a conventional electronic component package and its sealing method. .
As shown in the figure, a ceramic container 101 having a recess on the upper surface and a metal lid member 202 for closing the opening of the recess are provided. The lid member 202 has a layer of a silver-based alloy having a liquidus temperature of 957 ° C. or a metal brazing material 204 clad with another metal-based alloy on at least one surface of the metal plate 203 of an iron-nickel-cobalt-based alloy. Is provided. An electronic component 104 is accommodated in the recess of the ceramic container 101, and a metallized portion 201 such as tungsten or molybdenum plated with nickel or gold is provided on the outer peripheral frame 102 of the ceramic container 101. It has been. The metallized portion 201 and the metal brazing material 204 are overlapped, and the metallized portion 201 and the metal brazing material are energized while pressing and energizing the pair of roller electrodes 103 along the opposing sides of the lid member 202. 204 is continuously spot-welded (seam welded), whereby the inside of the package is kept airtight.

シーム溶接は、短時間での封止が可能であることと電子部品用パッケージの(予備)加熱時間が不要であることから、生産性に優れ電子デバイスの低コスト化を達成し得る。また封止部分のみが加熱されるため、前記電子部品104への熱衝撃が無く前記セラミック容器101はその構造材であるセラミック材が十分な厚みを備えていれば封止時に発生する熱歪みにより破損することがないことから、電気的特性の長期安定性に優れた電子デバイスが得られる。
特開2000−3973号公報
Seam welding is capable of sealing in a short time and does not require (pre) heating time of the electronic component package, so that the productivity is excellent and the cost of the electronic device can be reduced. In addition, since only the sealing portion is heated, there is no thermal shock to the electronic component 104, and the ceramic container 101 has a sufficient thickness of the ceramic material that is a structural material thereof. Since it is not damaged, an electronic device excellent in long-term stability of electrical characteristics can be obtained.
JP 2000-3973 A

しかしながら、電子デバイスの小型化への要求、例えば表面実装型水晶振動子では平面寸法3.2×2.5×厚さ1.0mmで前記外周枠102の厚さ0.5mm以下の電子部品用パッケージを用いた場合、該電子部品用パッケージではシーム溶接の熱衝撃若しくは前記金属板203と前記セラミック容器101との熱膨張収縮率の差、特に収縮応力により外周枠102にクラック(ヒビ)が発生、即ち気密封止することができない場合があった。封止が完成したとしても封止における高温加熱によってセラミック容器101内に収容した前記電子部品104が熱的ダメージを負ってしまい該電子部品(を用いた電子デバイス)の電気的特性の長期安定性が十分に得られないという問題が生じるおそれがあった。
またシーム溶接の原理上、前記セラミック容器101と前記金属板203との重ね合わせ部分の全周にシーム溶接を施さなければならないことから、製造タクトタイムの短縮、即ち低コスト化に限界が生じていた。
However, there is a demand for downsizing of electronic devices, for example, for electronic parts having a surface dimension of 3.2 × 2.5 × thickness 1.0 mm and a thickness of the outer peripheral frame 102 of 0.5 mm or less in a surface-mount crystal resonator. When a package is used, cracks (cracks) occur in the outer peripheral frame 102 due to the thermal shock of seam welding or the difference in thermal expansion / shrinkage between the metal plate 203 and the ceramic container 101, particularly the shrinkage stress. That is, there was a case where hermetic sealing could not be performed. Even if the sealing is completed, the electronic component 104 accommodated in the ceramic container 101 is thermally damaged by the high temperature heating in the sealing, and the electrical characteristics of the electronic component (electronic device using the electronic component) are long-term stable. There is a possibility that the problem that the sufficient amount cannot be obtained.
In addition, due to the principle of seam welding, since seam welding must be performed on the entire circumference of the overlapping portion of the ceramic container 101 and the metal plate 203, there is a limit to shortening manufacturing tact time, that is, cost reduction. It was.

つまり解決しようとする問題点は、小型化、低コスト化に対応する電子部品用パッケージを提供することができない点である。   That is, the problem to be solved is that it is impossible to provide an electronic component package that can be reduced in size and cost.

上記課題を解決するために本発明に係わる請求項1記載の発明は、金属製の蓋部材の少なくとも片面の周縁部に配設した封止部材と上面に凹部を備える平面形状が矩形のセラミック容器の外周枠の上面に形成したメタライズ部とが接触するように前記蓋部材と前記セラミック容器とを重ね合わせ、前記封止部材と前記メタライズ部とを固着することにより前記セラミック容器の凹部に収容した電子部品を気密封止する電子部品用パッケージであって、前記セラミック容器の辺部の長さが3.2mm以下で且つ厚さが1.0mm以下である共に前記外周枠の厚さが0.3乃至0.5mmであり、該セラミック容器の対向する一組の辺部のみにシーム溶接用電極を当接しシーム溶接が施されていることを特徴とする。   In order to solve the above-mentioned problem, the invention according to claim 1 according to the present invention is a ceramic container having a rectangular planar shape including a sealing member disposed on a peripheral portion of at least one surface of a metal lid member and a concave portion on the upper surface. The lid member and the ceramic container are overlapped so that the metallized part formed on the upper surface of the outer peripheral frame is in contact with each other, and the sealing member and the metallized part are fixed and accommodated in the concave part of the ceramic container. An electronic component package for hermetically sealing an electronic component, wherein a side length of the ceramic container is 3.2 mm or less and a thickness is 1.0 mm or less, and a thickness of the outer peripheral frame is 0. It is 3 to 0.5 mm, and the seam welding electrode is brought into contact with only a pair of opposing sides of the ceramic container to perform seam welding.

本発明に係わる請求項2記載の発明は、請求項1において、前記セラミック容器の長辺側のみにシーム溶接用電極を当接しシーム溶接が施されていることを特徴とする。   According to a second aspect of the present invention related to the present invention, in the first aspect, the seam welding electrode is brought into contact with only the long side of the ceramic container to perform seam welding.

本発明に係わる請求項3記載の発明は、請求項1又2において、前記封止部材が400℃以下の融点を呈する材料であることを特徴とする。   A third aspect of the invention according to the present invention is characterized in that, in the first or second aspect, the sealing member is a material exhibiting a melting point of 400 ° C. or lower.

本発明に係わる請求項4記載の発明は、請求項1乃至3のいずれかにおいて、前記封止部材が金系合金であることを特徴とする。   According to a fourth aspect of the present invention related to the present invention, in any one of the first to third aspects, the sealing member is a gold-based alloy.

本発明の電子部品用パッケージは、一方の辺部のみの且つ短時間での封止が可能であるため封止作業時間の短縮に伴う生産性及びパッケージ容器への熱的ダメージの抑止に伴う歩留りが向上し、電子デバイスの低価格化を達成し得るという効果を奏する。また本発明に基づく電子部品用パッケージを用いれば、最小限の加熱(量)で封止が可能であるため(該電子部品用パッケージに収容した)電子部品への熱衝撃が無く、これにより電気的特性の長期安定性に優れた電子デバイスが得られるという効果を有する。   Since the electronic component package of the present invention can be sealed only in one side and in a short time, the productivity associated with shortening the sealing work time and the yield associated with suppressing thermal damage to the package container. As a result, the electronic device can be reduced in price. In addition, when the electronic component package according to the present invention is used, sealing can be performed with a minimum amount of heat (amount), so that there is no thermal shock to the electronic component (contained in the electronic component package). It has the effect that the electronic device excellent in the long-term stability of the mechanical characteristics is obtained.

図1は本発明の実施の形態としての電子部品用パッケージとその封止方法の説明図である。
同図に示すように本発明実施形態の電子部品用パッケージは、上面に凹部を備える平面形状が略四角形のセラミック容器1と、前記凹部の開口を閉止する金属製の蓋部材12と、を備えている。前記セラミック容器1の凹部底面には電子部品4が搭載されており、更にセラミック容器1の凹部を囲繞するように立設する外周枠2の上面には例えばニッケルメッキや金メッキ等が施されたタングステンまたはモリブデン等のメタライズ部11が設けられている。前記蓋部材12は鉄−ニッケル−コバルト系合金の金属板13の少なくとも片面全体には金を主材料とする金系合金、例えば融点が270℃〜290℃の範囲であるAu(金)−Sn(錫)合金の封止部材14が設けられている。この封止部材14を金属板13に予備形成する方法として、箔状の封止部材14を金属板13に冷間圧延等で貼り付ける、所定形状に打ち抜きした箔状の封止部材を金属板13にリフロー加熱して付着する、ペースト状の封止部材を金属板13の周縁部に印刷しリフロー加熱して付着する、または金属板13の下面(前記凹部に対向配置する面)にAu及びSnをメッキ手法により析出させこれを熱処理することでAu−Sn合金層(封止部材)を形成する等の方法がある。
FIG. 1 is an explanatory diagram of an electronic component package and its sealing method according to an embodiment of the present invention.
As shown in the figure, an electronic component package according to an embodiment of the present invention includes a ceramic container 1 having a substantially rectangular planar shape with a recess on the upper surface, and a metal lid member 12 that closes the opening of the recess. ing. An electronic component 4 is mounted on the bottom surface of the concave portion of the ceramic container 1, and the top surface of the outer peripheral frame 2 standing so as to surround the concave portion of the ceramic container 1 is, for example, tungsten plated with nickel or gold. Alternatively, a metallized portion 11 such as molybdenum is provided. The lid member 12 is a gold-based alloy mainly composed of gold on at least one side of a metal plate 13 of an iron-nickel-cobalt-based alloy. For example, Au (gold) -Sn having a melting point in the range of 270 ° C. to 290 ° C. A (tin) alloy sealing member 14 is provided. As a method of preforming the sealing member 14 on the metal plate 13, the foil-like sealing member 14 is pasted into a predetermined shape by sticking the foil-like sealing member 14 to the metal plate 13 by cold rolling or the like. A paste-like sealing member is attached to the peripheral portion of the metal plate 13 by reflow heating and attached by reflow heating, or Au and a lower surface of the metal plate 13 (surface opposed to the recess) are attached. There is a method of forming an Au—Sn alloy layer (sealing member) by depositing Sn by a plating method and heat-treating it.

本発明に係る封止方法は、前記メタライズ部11と前記封止部材14とを重ね合わせ、一対のローラ電極3をもって、前記蓋部材12の長辺側若しくは短辺側のみの対向する一組の辺部に沿って加圧、通電することにより、メタライズ部11と封止部材14とを連続的にスポット溶接(シーム溶接)する。このように、ローラ電極3から供給される電流によって発生するジュール熱として封止部材14(Au−Sn合金)の融点である290℃以上であって前記セラミック容器1に熱的ダメージを与えることがない温度、例えば300℃から400℃の範囲で前記蓋部材12の一方の辺部を加熱する(即ちシーム溶接を実施する)と、封止部材14は熱容量が小さいことにより前記ジュール熱が該封止部材14全体に容易に伝搬し、その結果、ローラ電極3が接触していない他方の辺部に形成した封止部材をも溶融させることができる。このように、いずれか一方の対向する1対の辺部のみをシーム溶接することで、前記セラミック容器1に熱的ダメージを与えることなくパッケージ内部(前記凹部に収容する電子部品4)を気密封止することができる。なおセラミック容器1の平面形状が正方形でない場合は、長辺側にシーム溶接を施した方が望ましい。短辺側をシーム溶接した場合に比べて、他方の辺部における封止部材14の溶け残りや溶けムラによる不良の発生を防ぐ上で有効である。   In the sealing method according to the present invention, the metallized portion 11 and the sealing member 14 are overlapped, and a pair of roller electrodes 3 are provided to face each other only on the long side or the short side of the lid member 12. The metallized portion 11 and the sealing member 14 are continuously spot welded (seam welded) by applying pressure and energization along the side. As described above, the Joule heat generated by the current supplied from the roller electrode 3 is 290 ° C. or higher which is the melting point of the sealing member 14 (Au—Sn alloy), and the ceramic container 1 is thermally damaged. When one side portion of the lid member 12 is heated at a non-temperature, for example, in the range of 300 ° C. to 400 ° C. (that is, seam welding is performed), the sealing member 14 has a small heat capacity, so that the Joule heat is sealed. As a result, the sealing member formed on the other side where the roller electrode 3 is not in contact can be melted. In this way, by seam welding only one pair of opposing sides, the inside of the package (the electronic component 4 accommodated in the recess) is hermetically sealed without causing thermal damage to the ceramic container 1. Can be stopped. In addition, when the planar shape of the ceramic container 1 is not square, it is desirable to perform seam welding on the long side. Compared with the case where seam welding is performed on the short side, it is more effective in preventing the occurrence of defects due to unmelted or uneven melting of the sealing member 14 on the other side.

本発明の上記実施例では、シーム溶接における通電回数(溶接電流による溶接箇所の発熱回数)を減じたことでシーム溶接(ジュール熱)による熱衝撃がほぼ皆無となり、封止時の温度上昇を抑止することができる。なお、機械的強度に乏しい平面寸法3.2×2.5×厚さ1.0mm以下で前記外周枠2の厚さ0.3mmまでの電子部品用パッケージにおいても該外周枠2にクラックが発生することがないことを確認した。従って本発明を利用すれば、封止時間を短縮できるだけでなく平面寸法3.2×2.5×厚さ1.0mm以下で前記外周枠2の厚さ0.3乃至0.5mmの電子部品用パッケージであれば前記セラミック容器1に熱的ダメージを与えることなく封止することができる。   In the above embodiment of the present invention, the number of energizations in seam welding (the number of heat generation at the welded part due to the welding current) is reduced, so there is almost no thermal shock due to seam welding (Joule heat), and the temperature rise during sealing is suppressed. can do. In addition, cracks are generated in the outer peripheral frame 2 even in a package for electronic components in which the planar dimension is poor with mechanical strength of 3.2 × 2.5 × thickness of 1.0 mm or less and the outer peripheral frame 2 has a thickness of 0.3 mm. Confirmed that there is nothing to do. Therefore, if the present invention is used, not only the sealing time can be shortened, but also the electronic component having a planar dimension of 3.2 × 2.5 × thickness of 1.0 mm or less and a thickness of the outer peripheral frame 2 of 0.3 to 0.5 mm. If it is a package for use, the ceramic container 1 can be sealed without causing thermal damage.

図2は本発明の第2の実施形態としての電子部品用パッケージの構成とその封止方法を示す縦断面図である。
第2の実施形態が図1に示す実施例(第1の実施形態)と異なる点は、前記蓋部材12が前記金属板13の片面(前記凹部に対向する面)の周縁部にのみ前記封止部材14を形成するところにある。このように封止部材14を限定的に形成すれば、封止時に封止部材14が融解した際に発生する該封止部材14の屑が前記電子部品の表面に飛散し該電子部品の電気的特性不良を起こすということを防ぐことが可能となる。また、前記蓋部材12の寸法を前記セラミック容器1の外周より例えば0.1mm〜0.2mm程小さくすれば、封止後に蓋部材12の周縁に封止部材によるフィレットが形成されやすくなり、より一層の封止強度が得られることは言うまでもない。
FIG. 2 is a longitudinal sectional view showing a configuration of an electronic component package as a second embodiment of the present invention and a sealing method thereof.
The second embodiment is different from the embodiment shown in FIG. 1 (first embodiment) in that the lid member 12 is sealed only on the peripheral edge of one surface of the metal plate 13 (the surface facing the recess). The stop member 14 is formed. In this way, if the sealing member 14 is formed in a limited manner, the waste of the sealing member 14 generated when the sealing member 14 is melted at the time of sealing scatters on the surface of the electronic component, and the electric power of the electronic component It is possible to prevent the occurrence of poor mechanical characteristics. Moreover, if the dimension of the said cover member 12 is made smaller than the outer periphery of the said ceramic container 1 about 0.1 mm-0.2 mm, for example, it will become easy to form the fillet by a sealing member in the periphery of the cover member 12 after sealing, Needless to say, one layer of sealing strength can be obtained.

また第2の実施形態においても、第1の実施形態と同様に、シーム溶接(ジュール熱)による熱衝撃がほぼ皆無となり機械的強度に乏しい平面寸法3.2×2.5×厚さ1.0mm以下で前記外周枠2の厚さ0.3乃至0.5mmの電子部品用パッケージにおいても該外周枠2にクラックが発生することがない。   Also in the second embodiment, as in the first embodiment, there is almost no thermal shock due to seam welding (Joule heat), and the planar dimensions are 3.2 × 2.5 × thickness 1. Even in an electronic component package having a thickness of 0 mm or less and a thickness of 0.3 to 0.5 mm of the outer peripheral frame 2, no cracks are generated in the outer peripheral frame 2.

以上、本発明の実施例では封止部材を蓋部材の片面にのみ設けた構成を用いて説明したが本発明はこれに限るものでなく、蓋部材の両面に封止部材を設けた場合であっても、図1のパッケージ構造と同等の機能が得られ、更に封止作業時に蓋部材の表裏、即ち封止部材を配設した面の確認をすることなく封止可能である為、より作業性に優れることは言うまでもない。   As described above, the embodiment of the present invention has been described using the configuration in which the sealing member is provided only on one side of the lid member. However, the present invention is not limited to this, and the sealing member is provided on both sides of the lid member. Even if there is, the function equivalent to the package structure of FIG. 1 can be obtained, and further, it can be sealed without confirming the front and back of the lid member, that is, the surface on which the sealing member is disposed, during the sealing operation. Needless to say, it is excellent in workability.

また、融点が400℃以下の前記封止部材14としてAu−Sn合金を用いて説明したが本発明はこれに限るものでなく、はんだ等の融点が400℃以下の金属材料であれば構わない。   Further, the Au-Sn alloy has been described as the sealing member 14 having a melting point of 400 ° C. or lower, but the present invention is not limited to this, and any metal material having a melting point of 400 ° C. or lower such as solder may be used. .

このように構成することにより、小型化、低コスト化に対応する電子部品用パッケージが得られる。   With this configuration, it is possible to obtain an electronic component package corresponding to downsizing and cost reduction.

本発明の実施の形態としての電子部品用パッケージとその封止方法の説明図である。 (a)縦断面図。 (b)平面図It is explanatory drawing of the package for electronic components as embodiment of this invention, and its sealing method. (A) Longitudinal sectional view. (B) Plan view 本発明の実施のその他の形態としての電子部品用パッケージの構成とその封止方法を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the package for electronic components as other form of implementation of this invention, and its sealing method. 従来の電子部品用パッケージの構成とその封止方法を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the conventional package for electronic components, and its sealing method.

符号の説明Explanation of symbols

1、101・・セラミック容器 2、102・・外周枠
3、103・・ローラ電極 4、104・・電子部品
11、201・・メタライズ部 12、202・・蓋
13、203・・金属板 14・・封止部材 204・・金属ろう材
DESCRIPTION OF SYMBOLS 1,101 .. Ceramic container 2, 102 ... Peripheral frame 3, 103 ... Roller electrode 4, 104 ... Electronic component 11, 201 ... Metallized part 12, 202 ... Lid 13, 203 ... Metal plate 14 -Sealing member 204-Metal brazing material

Claims (4)

金属製の蓋部材の少なくとも片面の周縁部に配設した封止部材と上面に凹部を備える平面形状が矩形のセラミック容器の外周枠の上面に形成したメタライズ部とが接触するように前記蓋部材と前記セラミック容器とを重ね合わせ、前記封止部材と前記メタライズ部とを固着することにより前記セラミック容器の凹部に収容した電子部品を気密封止する電子部品用パッケージであって、
前記セラミック容器の辺部の長さが3.2mm以下で且つ厚さが1.0mm以下である共に前記外周枠の厚さが0.3乃至0.5mmであり、該セラミック容器の対向する一組の辺部のみにシーム溶接用電極を当接しシーム溶接が施されていることを特徴とする電子部品用パッケージ。
The lid member is arranged such that the sealing member disposed on the peripheral edge of at least one surface of the metal lid member and the metallized portion formed on the upper surface of the outer peripheral frame of the ceramic container having a concave shape on the upper surface are in contact with each other. And an electronic component package that hermetically seals the electronic component accommodated in the concave portion of the ceramic container by overlapping the ceramic container and fixing the sealing member and the metallized portion,
The length of the side of the ceramic container is 3.2 mm or less and the thickness is 1.0 mm or less, and the thickness of the outer peripheral frame is 0.3 to 0.5 mm. A package for electronic parts, wherein a seam welding electrode is brought into contact with only a side portion of the set to perform seam welding.
前記セラミック容器の長辺側のみにシーム溶接用電極を当接しシーム溶接が施されていることを特徴とする請求項1に記載の電子部品用パッケージ。 2. The electronic component package according to claim 1, wherein a seam welding electrode is brought into contact with only the long side of the ceramic container to perform seam welding. 前記封止部材が400℃以下の融点を呈する材料であることを特徴とする請求項1又2に記載の電子部品用パッケージ。 The electronic component package according to claim 1, wherein the sealing member is a material exhibiting a melting point of 400 ° C. or less. 前記封止部材が金系合金であることを特徴とする請求項1乃至3のいずれかに記載の電子部品用パッケージ。

The electronic component package according to claim 1, wherein the sealing member is a gold alloy.

JP2003361573A 2003-10-22 2003-10-22 Electronic component package Pending JP2005129611A (en)

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