JP2005107022A - Movable mirror device and dispersion compensator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a movable mirror device and a dispersion compensator in which the movable range of a mirror is increased while the width is reduced. <P>SOLUTION: The movable mirror device 1 has: a movable electrode terminal 6 which is connected to an end part in the width direction of a mirror 2 on the front face 2a of the mirror 2; a movable electrode terminal 7 which is connected to the other end part in the width direction of the mirror 2 on the back face 2b of the mirror 2; fixed electrode terminals 8A and 8B fixed on a substrate 4 so as to face the movable electrode terminal 6; and fixed electrode terminals 9A and 9B fixed on the substrate 4 so as to face the movable electrode terminal 7. A voltage source is connected to the fixed electrode terminals 8A and 8B for moving the movable electrode terminal 6 by generating electrostatic force between the movable electrode terminal 6 and the fixed electrode terminals 8A and 8B, and a voltage source is connected to the fixed electrode terminals 9A and 9B for moving the movable electrode terminal 7 by generating electrostatic force between the movable electrode terminal 7 and the fixed electrode terminals 9A and 9B. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a movable mirror device and a dispersion compensator used in wavelength multiplexing optical communication or the like.

As a conventional movable mirror device, for example, a device described in Patent Document 1 is known. The movable mirror device described in Patent Literature 1 is provided in a tunable dispersion compensator. For example, the curved shape of the reflecting surface of the movable reflecting mirror is set so that the light reflecting position of the movable reflecting mirror is a desired position. Deform.
JP 2002-303805 A

  In the variable dispersion compensator as in the above prior art, it is necessary to reduce the width dimension of the movable mirror device in order to narrow the arrangement pitch of the reflecting mirrors. In order to provide a large amount of dispersion compensation, it is necessary to increase the movable range of the reflecting mirror.

  An object of the present invention is to provide a movable mirror device and a dispersion compensator that can increase the movable range of a mirror while reducing the width dimension.

  The movable mirror device of the present invention faces a deformable mirror, a first movable electrode terminal coupled to the front surface of the mirror, a second movable electrode terminal coupled to the rear surface of the mirror, and the first movable electrode terminal. An electrostatic force is generated between the first fixed electrode terminal arranged in this way, the second fixed electrode terminal arranged so as to face the second movable electrode terminal, and the first movable electrode terminal and the first fixed electrode terminal. First driving means for generating and moving the first movable electrode terminal; and second driving means for moving the second movable electrode terminal by generating an electrostatic force between the second movable electrode terminal and the second fixed electrode terminal. Are provided.

  In such a movable mirror device, for example, a flat mirror without bending can be deformed into a curved shape by operating at least one of the first drive means and the second drive means. At this time, since the first movable electrode terminal and the second movable electrode terminal for deforming the mirror are respectively provided on the front side and the rear side of the mirror, the first movable electrode terminal and the first fixed electrode terminal are provided between them. Even when a desired interval is ensured and a desired interval is ensured between the second movable electrode terminal and the second fixed electrode terminal, a sufficiently large space is not taken in the width direction of the mirror. Thereby, the width dimension of the movable mirror device can be reduced. Further, when a desired interval is secured between the first movable electrode terminal and the first fixed electrode terminal and between the second movable electrode terminal and the second fixed electrode terminal, the first movable electrode terminal and the second movable electrode terminal Since the movable range of the electrode terminal can be increased, as a result, the movable range of the mirror can be increased.

  Preferably, the first movable electrode terminal is coupled to one side portion of the mirror in the width direction on the front surface of the mirror and extends in front of the mirror, and the second movable electrode terminal is disposed on the rear surface of the mirror. It is coupled to the other side of the mirror in the width direction and extends to the rear of the mirror. In this case, by operating both the first drive means and the second drive means, for example, a flat mirror without bending can be easily and reliably deformed into a curved shape.

  In this case, preferably, there are at least two first fixed electrode terminals and two second fixed electrode terminals, respectively, and the two first fixed electrode terminals are first movable so as to face each other across the first movable electrode terminal. The two second fixed electrode terminals are disposed on both sides of the second movable electrode terminal so as to face each other with the second movable electrode terminal interposed therebetween. In such a configuration, an electrostatic force is generated between the first movable electrode terminal and the first fixed electrode terminal on one side, and static electricity is generated between the second movable electrode terminal and the second fixed electrode terminal on one side. By generating the force, the mirror can be deformed into a concave shape. In addition, an electrostatic force is generated between the first movable electrode terminal and the first fixed electrode terminal on the other side, and an electrostatic force is generated between the second movable electrode terminal and the second fixed electrode terminal on the other side. Thus, the mirror can be deformed into a convex shape. Therefore, when the movable mirror device of the present invention is applied to a dispersion compensator, for example, both positive dispersion and negative dispersion can be compensated.

  At this time, it is preferable that the first movable electrode terminal and the second movable electrode terminal have a portion extending toward the center in the width direction of the mirror. Thereby, the width dimension of the movable mirror device can be further reduced.

  Preferably, the first fixed electrode terminal is arranged on one side of the first movable electrode terminal, and the second fixed electrode terminal is one side of the second movable electrode terminal and the same side as the first fixed electrode terminal. Is arranged. In such a configuration, the mirror can be sufficiently deformed into a concave shape or a convex shape. Therefore, when the movable mirror device of the present invention is applied to, for example, a dispersion compensator, large positive dispersion or large negative dispersion can be compensated.

  In this case, preferably, the first movable electrode terminal has a portion extending toward the other side of the mirror, and the first fixed electrode terminal and the second fixed electrode terminal are the first movable electrode terminal and the second movable electrode terminal. On the other hand, it is arranged on one side part side of the mirror. Thereby, for example, a flat mirror without bending can be deformed into a convex shape while reducing the width dimension of the movable mirror device.

  For example, in this case, the mirror is preferably formed in a concave shape with respect to the front surface of the mirror in advance. Thereby, even when the fixed electrode terminal is provided only on one side of the movable electrode terminal, the mirror can be deformed into a concave shape and a convex shape.

  Further, the second movable electrode terminal has a portion extending to the one side portion side of the mirror, and the first fixed electrode terminal and the second fixed electrode terminal are in relation to the first movable electrode terminal and the second movable electrode terminal. The structure arrange | positioned at the other side part side of a mirror may be sufficient. Accordingly, for example, a flat mirror without bending can be deformed into a concave shape while reducing the width dimension of the movable mirror device.

  For example, in this case, the mirror is preferably formed in a convex shape with respect to the front surface of the mirror in advance. Thereby, even when the fixed electrode terminal is provided only on one side of the movable electrode terminal, the mirror can be deformed into a concave shape and a convex shape.

  Further, preferably, the first movable electrode terminal and the second movable electrode terminal are coupled to the center portion in the height direction of the mirror and have a portion extending in the height direction of the mirror. Thereby, for example, even when the first movable electrode terminal and the second movable electrode terminal have a portion extending toward the center in the width direction of the mirror, the effective area to be used as the light reflection region on the front surface of the mirror The mirror is deformed symmetrically at both side portions in the width direction of the mirror.

  Preferably, the first movable electrode terminal is coupled to both sides of the mirror in the width direction on the front surface of the mirror, and the second movable electrode terminal is coupled to both sides of the mirror in the width direction on the rear surface of the mirror. The first fixed electrode terminal faces the mirror across the first movable electrode terminal, and the second fixed electrode terminal faces the mirror across the second movable electrode terminal. In this case, by operating the first driving means, for example, a flat mirror without bending can be easily and reliably deformed into a concave shape with respect to the front surface of the mirror, and the second driving means is operated. Thus, for example, a flat mirror without bending can be easily and reliably deformed into a convex shape with respect to the front surface of the mirror.

  The first movable electrode terminal is coupled to the center portion in the width direction of the mirror on the front surface of the mirror, and the second movable electrode terminal is coupled to the center portion in the width direction of the mirror on the rear surface of the mirror, The first fixed electrode terminal may be configured to face the mirror with the first movable electrode terminal interposed therebetween, and the second fixed electrode terminal may be configured to face the mirror with the second movable electrode terminal interposed therebetween. In this case, by operating the first driving means, for example, a flat mirror without bending can be easily and reliably deformed into a convex shape with respect to the front surface of the mirror, and the second driving means is operated. Thus, for example, a flat mirror without bending can be easily and reliably deformed into a concave shape with respect to the front surface of the mirror.

  The present invention also provides a dispersion compensator that applies phase shift to signal light to compensate for dispersion of the signal light. The dispersion compensator demultiplexes the signal light for each wavelength, and the optical demultiplexing means demultiplexes the signal light. And a plurality of the movable mirror devices for inputting the received signal light respectively.

  Thus, by providing the movable mirror device having the small width dimension as described above, the mirrors of the movable mirror devices can be arranged at a narrow pitch. In addition, since the movable range of each mirror is widened as described above, the amount of dispersion compensation can be increased. Thereby, highly accurate dispersion compensation can be performed.

  According to the present invention, the first movable electrode terminal is coupled to the front surface of the mirror, the second movable electrode terminal is coupled to the rear surface of the mirror, and the first fixed electrode terminal is disposed so as to face the first movable electrode terminal. Since the second fixed electrode terminal is arranged so as to face the second movable electrode terminal, the movable range of the mirror can be increased while reducing the width dimension.

  Preferred embodiments of a movable mirror device and a dispersion compensator according to the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view showing a first embodiment of a movable mirror device according to the present invention. In the figure, the movable mirror device 1 of the present embodiment is a structure manufactured using, for example, MEMS (Micro-Electro-Mechanical-System) technology.

  The movable mirror device 1 includes a rectangular plate-like mirror 2 that reflects signal light, and a drive unit 3 that deforms the mirror 2 into a curved shape. An anchor portion 5 fixed to the upper surface of the substrate 4 and extending in the height direction of the mirror 2 is coupled to the center portion in the width direction of the mirror 2 on the rear surface (the surface opposite to the light reflecting surface 2a) 2b of the mirror 2. Yes. As a result, the mirror 2 is freely deformable in a curved shape with the central portion G as the rotation axis (see FIG. 2). The height direction of the mirror 2 indicates a direction perpendicular to the upper surface of the substrate 4, and the width direction of the mirror 2 indicates a direction perpendicular to the height direction and the thickness direction of the mirror 2.

  The drive unit 3 includes a movable electrode terminal 6 coupled to one side in the width direction of the mirror 2 on the front surface (light reflecting surface) 2a of the mirror 2 (hereinafter referred to as the left end of the mirror 2 when viewed from the front surface 2a side). The movable electrode terminal 7 coupled to the other side in the width direction of the mirror 2 on the rear surface 2b of the mirror 2 (hereinafter referred to as the right end of the mirror 2 when viewed from the front surface 2a side) and movable on the front surface 2a side of the mirror 2 A pair of fixed electrode terminals 8A and 8B fixed on the upper surface of the substrate 4 so as to face the electrode terminal 6, and a movable electrode terminal 7 on the rear surface 2b side of the mirror 2 are fixed on the upper surface of the substrate 4. And a pair of fixed electrode terminals 9A and 9B. These movable electrode terminals 6 and 7 and fixed electrode terminals 8A to 9B all have a plate shape.

  The movable electrode terminal 6 is coupled to the front surface 2 a of the mirror 2, and is coupled to the coupling portion 10 having a structure bent toward the center portion in the width direction of the mirror 2. And an electrode portion 11 extending to the surface. The movable electrode terminal 7 is coupled to the rear surface 2 b of the mirror 2, and is coupled to the coupling portion 12 having a structure bent toward the center in the width direction of the mirror 2. And an electrode portion 13 extending in the direction. The coupling portions 10 and 12 are coupled to lower portions of the front surface 2a and the rear surface 2b of the mirror 2, respectively. Thereby, the upper part of the front surface 2a of the mirror 2 is a light reflection region. Moreover, the electrode parts 11 and 13 are comprised so that it may extend on a straight line substantially.

  The coupling portions 10 and 12 are not limited to the bent structure as described above, but extend obliquely with respect to the front surface 2a and the rear surface 2b of the mirror 2 so as to go to the center portion in the width direction of the mirror 2. There may be.

  The fixed electrode terminals 8A and 8B are arranged on both sides of the electrode part 11 so as to face each other with the electrode part 11 in between. The fixed electrode terminals 9A and 9B are arranged on both sides of the electrode portion 13 so as to face each other with the electrode portion 13 interposed therebetween. The fixed electrode terminals 8A and 9A are configured to extend substantially on a straight line, and the fixed electrode terminals 8B and 9B are configured to extend substantially on a straight line.

  Comb teeth 14 are provided on both side surfaces of the electrode portion 11, and comb teeth 15 are provided on both side surfaces of the electrode portion 13. Comb teeth 16 are provided on the side surfaces of the fixed electrode terminals 8A and 8B facing the electrode portion 11, and comb teeth 17 are provided on the side surfaces of the fixed electrode terminals 9A and 9B facing the electrode portion 13. Yes.

  Such a movable mirror device 1 is manufactured, for example, by performing anisotropic etching or the like on a silicon substrate or the like. The surface of the mirror 2 is coated with gold or the like in order to increase the light reflectance.

  Further, as shown in FIG. 2A, the movable electrode terminals 6 and 7 are grounded via the mirror 2 and the anchor portion 5. The fixed electrode terminals 8A and 8B are connected to variable voltage sources 18A and 18B for generating an electrostatic force between the movable electrode terminal 6 and the fixed electrode terminals 8A and 8B. The fixed electrode terminals 9A and 9B include Variable voltage sources 19A and 19B for generating electrostatic force are connected between the movable electrode terminal 7 and the fixed electrode terminals 9A and 9B. In an initial state where the applied voltages of the variable voltage sources 18A to 19B are zero, the mirror 2 is in a flat state without bending as shown in FIG.

  When a voltage is applied to the fixed electrode terminal 8B by the variable voltage source 18B and a voltage is applied to the fixed electrode terminal 9B by the variable voltage source 19B, as shown in FIG. 2B, the movable electrode terminal 6 and the fixed electrode terminal 8B. The movable electrode terminal 6 is attracted to the fixed electrode terminal 8B side by the electrostatic force generated between the movable electrode terminal 7B and the movable electrode terminal 7 is moved to the fixed electrode terminal 9B side by the electrostatic force generated between the movable electrode terminal 7 and the fixed electrode terminal 9B. Be drawn to. Thereby, the mirror 2 comes to bend concavely with respect to the front surface 2a. At this time, the deflection amount of the mirror 2 changes by changing the applied voltage of the variable voltage sources 18B and 19B.

  On the other hand, when a voltage is applied to the fixed electrode terminal 8A by the variable voltage source 18A and a voltage is applied to the fixed electrode terminal 9A by the variable voltage source 19A, as shown in FIG. The movable electrode terminal 6 is attracted to the fixed electrode terminal 8A side by electrostatic force generated between the terminal 8A and the movable electrode terminal 7 is fixed electrode terminal by electrostatic force generated between the movable electrode terminal 7 and the fixed electrode terminal 9A. It is drawn to the 9A side. Thereby, the mirror 2 comes to bend in a convex shape with respect to the front surface 2a. At this time, the deflection amount of the mirror 2 changes by changing the applied voltage of the variable voltage sources 18A and 19A.

  As described above, in the present embodiment, since the movable electrode terminals 6 and 7 are coupled to the front surface 2a and the rear surface 2b of the mirror 2, respectively, the movable electrode terminals 6 and 7 are movable in order to increase the movable range. 6 and the fixed electrode terminals 8A and 8B, and between the movable electrode terminal 7 and the fixed electrode terminals 9A and 9B, a sufficiently large space can be taken in the width direction of the mirror 2 even if a desired distance is secured. There is no. Accordingly, the mirror 2 can be deformed in a wide range from the flat state to the convex and concave directions while reducing the width dimension W (see FIG. 2) of the movable mirror device 1 (drive unit 3). At this time, since a part of the movable electrode terminals 6 and 7 is bent toward the center in the width direction of the mirror 2, the width dimension W of the movable mirror device 1 can be further reduced, and the movable electrode terminal 6 , 7 can be moved efficiently.

  In addition, since the shape of the mirror 2 is flat in the initial state, the stress generated when the mirror 2 is driven to be deformed can be reduced, and the mirror 2 can be easily manufactured.

  Furthermore, since the movable electrode terminals 6 and 7 and the fixed electrode terminals 8A to 9B all have a comb-like structure, the electrostatic force generated between the movable electrode terminal 6 and the fixed electrode terminals 8A and 8B, the movable electrode The electrostatic force generated between the terminal 7 and the fixed electrode terminals 9A and 9B increases. Accordingly, since the movable electrode terminals 6 and 7 can be driven at a low voltage by that amount, it is possible to save power.

  FIG. 3 is a perspective view showing a movable mirror device array to which the movable mirror device 1 is applied. In the figure, members that are the same as or equivalent to those of the movable mirror device 1 are given the same reference numerals, and descriptions thereof are omitted.

In the figure, the movable mirror device array 20 has a plurality of sets of mirrors 2 and driving units 3 arranged one-dimensionally on a single substrate 21. Here, in order to narrow the arrangement intervals of the mirror 2, the width W ₁ of the drive unit 3 is preferably equal to or less than 1.5 times the width W ₂ of the mirror 2, in particular the dispersion compensator or the like which will be described later when applied to the respective mirror 2 so as to sequence nearly without clearance in accordance with the wavelength interval of light, a width W ₁ of the drive unit 3 is more preferable to be smaller than the width W ₂ of the mirror 2.

  FIG. 4 is a configuration diagram illustrating a dispersion compensator including the movable mirror device array described above. In the figure, a dispersion compensator 22 is an optical communication device that compensates for dispersion of signal light by applying a phase shift to the signal light.

  The dispersion compensator 22 includes a diffraction grating 23, the movable mirror device array 20 described above, and a lens 24 disposed between the diffraction grating 23 and the movable mirror device array 20. The diffraction grating 23 demultiplexes (splits) the signal light from the dispersion compensating optical transmission line 25 for each wavelength. Each mirror 2 of the movable mirror device array 20 reflects the signal light demultiplexed for each wavelength by the diffraction grating 23. The dispersion compensating optical transmission line 25 is connected to an input optical transmission line 27 and an output optical transmission line 28 via an optical circulator 26.

  In such a dispersion compensator 22, the signal light input to the input optical transmission path 27 is emitted from the dispersion compensation optical transmission path 25 through the optical circulator 26, and is demultiplexed for each wavelength by the diffraction grating 23. The Then, the demultiplexed signal light is propagated to the movable mirror device array 20 through the lens 24 and reflected by each mirror 2. At this time, the deflection amount of each mirror 2 is controlled so as to compensate for dispersion by giving a desired phase difference to the signal light demultiplexed for each wavelength. The signal light reflected by each mirror 2 is propagated again to the diffraction grating 23 through the lens 24 and is multiplexed in the diffraction grating 23. The combined signal light is output through the dispersion compensating optical transmission line 25, the optical circulator 26, and the output optical transmission line 28.

  Here, since the mirror 2 can be deformed into a convex shape or a concave shape as described above, both positive dispersion and negative dispersion can be reliably compensated. Therefore, the controllability of dispersion compensation for each wavelength is improved, and dispersion compensation can be performed with high accuracy.

  FIG. 5 is a perspective view showing a second embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the movable mirror device 30 of this embodiment includes a drive unit 31 that deforms the mirror 2 into a curved shape. The driving unit 31 includes a movable electrode terminal 32 coupled to the left end portion of the mirror 2 when viewed from the front surface 2a side of the mirror 2 and a right end portion of the mirror 2 when viewed from the front surface 2a side of the rear surface 2b of the mirror 2. The coupled movable electrode terminal 33, a pair of fixed electrode terminals 34A and 34B fixed on the upper surface of the substrate 4 so as to face the movable electrode terminal 32 on the front surface 2a side of the mirror 2, and the rear surface 2b side of the mirror 2 1 has a pair of fixed electrode terminals 35A and 35B fixed to the upper surface of the substrate 4 so as to face the movable electrode terminal 33. The movable electrode terminals 32 and 33 and the fixed electrode terminals 34A to 35B all have a bar shape with a rectangular cross section.

  The movable electrode terminal 32 includes a coupling portion 36 coupled to the front surface 2 a of the mirror 2 and an electrode portion 37 that is integrated with the coupling portion 36 and extends in front of the mirror 2. The coupling portion 36 is coupled to the center portion in the height direction of the mirror 2 at the left end portion of the mirror 2 when viewed from the front surface 2a side on the front surface 2a of the mirror 2, and bends downward toward the substrate 4, The mirror 2 has a structure bent toward the center in the width direction. The movable electrode terminal 33 includes a coupling portion 38 coupled to the rear surface 2 b of the mirror 2 and an electrode portion 39 that is integrated with the coupling portion 38 and extends to the rear of the mirror 2. The coupling portion 38 is coupled to the center portion in the height direction of the mirror 2 at the right end of the mirror 2 when viewed from the front surface 2a side on the rear surface 2b of the mirror 2, and is bent downward toward the substrate 4, The mirror 2 has a structure bent toward the center in the width direction.

  The fixed electrode terminals 34 </ b> A and 34 </ b> B are arranged on both sides of the electrode part 37 so as to face each other with the electrode part 37 interposed therebetween. The fixed electrode terminals 35 </ b> A and 35 </ b> B are arranged on both sides of the electrode part 39 so as to face each other with the electrode part 39 interposed therebetween.

  Comb teeth 40 are provided on both side surfaces of the electrode portion 37, and comb teeth 41 are provided on both side surfaces of the electrode portion 39. Comb teeth 42 are provided on the side surfaces of the fixed electrode terminals 34A and 34B facing the electrode portion 37, and comb teeth 43 are provided on the side surfaces of the fixed electrode terminals 35A and 35B facing the electrode portion 39. Yes.

  In the present embodiment, since the movable electrode terminals 32 and 33 are rod-shaped and the movable electrode terminals 32 and 33 are bent as described above, the effective area of the mirror 2 is increased, and the front surface 2a of the mirror 2 is increased. Most can be used as a light reflecting area. Further, since the movable electrode terminals 32 and 33 are coupled to the center portion in the height direction of the mirror 2, the mirror 2 can be deformed symmetrically about the center portion in the width direction of the mirror 2 as a rotation axis.

  FIG. 6 is a perspective view showing a third embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the second embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the movable mirror device 50 of this embodiment includes a drive unit 51 that deforms the mirror 2 into a curved shape. As shown in FIGS. 6 and 7, an anchor portion 53 fixed to the upper surface of the substrate 52 is provided below the mirror 2. The substrate 52 is formed in a step shape so that the upper surface height position on the rear surface 2b side of the mirror 2 is higher than the upper surface height position on the front surface 2a side of the mirror 2.

  The drive unit 51 has movable electrode terminals 54 and 55 instead of the movable electrode terminals 32 and 33 in the second embodiment. The movable electrode terminal 54 includes a coupling portion 56 coupled to the lower left end of the mirror 2 when viewed from the front surface 2 a side of the front surface 2 a of the mirror 2, and an electrode portion 37 integrated with the coupling portion 56. . The movable electrode terminal 55 has a coupling portion 57 coupled to the upper right end of the mirror 2 when viewed from the front surface 2 a side on the rear surface 2 b of the mirror 2, and an electrode portion 39 integrated with the coupling portion 57. . Other configurations are the same as those of the drive unit 31 in the second embodiment.

  Also in this embodiment, the effective area of the mirror 2 becomes large, and most of the front surface 2a of the mirror 2 can be used as a light reflection region. In addition, since there is only one bent portion in the coupling portions 56 and 57 of the movable electrode terminals 54 and 55, the manufacturing process of the movable mirror device using the MEMS technology can be simplified.

  FIG. 8 is a perspective view showing a modification of the third embodiment of the movable mirror device according to the present invention. In the movable mirror device 50A, the movable electrode terminals 55 are coupled to the lower right end of the mirror 2 when viewed from the front surface 2a side of the rear surface 2b of the mirror 2 so that the height positions of the movable electrode terminals 54 and 55 are the same. It is. Further, as shown in FIG. 9, the mirror 2 is fixed to the upper surface of the flat substrate 4 via an anchor portion 53.

  FIG. 10 is a perspective view showing a fourth embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the movable mirror device 60 of the present embodiment includes a drive unit 61 that deforms the mirror 2 into a curved shape. The driving unit 61 faces the movable electrode terminal 62 coupled to the front surface 2a of the mirror 2, the movable electrode terminal 63 coupled to the rear surface 2b of the mirror 2, and the movable electrode terminal 62 on the front surface 2a side of the mirror 2. A fixed electrode terminal 64 fixed to the upper surface of the substrate 4, and a fixed electrode terminal 65 fixed to the upper surface of the substrate 4 so as to face the movable electrode terminal 63 on the rear surface 2 b side of the mirror 2.

  The movable electrode terminal 62 is coupled to the left end portion of the mirror 2 when viewed from the front surface 2 a side of the front surface 2 a of the mirror 2, and a coupling portion 66 having a structure bent toward the right end portion of the mirror 2, and the coupling portion 66. And an electrode portion 67 extending in front of the mirror 2. The movable electrode terminal 63 is coupled to the right end of the mirror 2 when viewed from the front surface 2 a side of the rear surface 2 b of the mirror 2, and extends to the rear of the mirror 2. The electrode portion 67 and the movable electrode terminal 63 of the movable electrode terminal 62 are configured to extend substantially in a straight line.

  The fixed electrode terminals 64 and 65 are arranged on the left end side of the mirror 2 when viewed from the front surface 2a side with respect to the electrode portion 67 and the movable electrode terminal 63 of the movable electrode terminal 62. The fixed electrode terminals 64 and 65 are configured to extend substantially in a straight line.

  Comb teeth 68 are provided on the side surface of the movable electrode terminal 62 facing the fixed electrode terminal 64 in the electrode portion 67, and comb teeth 69 are provided on the side surface of the movable electrode terminal 63 facing the fixed electrode terminal 65. It has been. Comb teeth 70 are provided on the side surface of the fixed electrode terminal 64 facing the electrode portion 67, and comb teeth 71 are provided on the side surface of the fixed electrode terminal 65 facing the movable electrode terminal 63.

  Further, as shown in FIG. 11A, the movable electrode terminals 62 and 63 are grounded via the mirror 2 and the anchor portion 5. The fixed electrode terminal 64 is connected to a variable voltage source 72 for generating electrostatic force between the movable electrode terminal 62 and the fixed electrode terminal 64. The fixed electrode terminal 65 is connected to the movable electrode terminal 63 and the fixed electrode terminal. A variable voltage source 73 for generating an electrostatic force is connected to 65. In an initial state in which the applied voltages of the variable voltage sources 72 and 73 are zero, the mirror 2 is in a flat state without bending as shown in FIG.

  When a voltage is applied to the fixed electrode terminal 64 by the variable voltage source 72 and a voltage is applied to the fixed electrode terminal 65 by the variable voltage source 73, the movable electrode terminal 62 and the fixed electrode terminal 64 are shown in FIG. 11B. The movable electrode terminal 62 is attracted to the fixed electrode terminal 64 side by the electrostatic force generated between the movable electrode terminal 63 and the movable electrode terminal 63 is moved to the fixed electrode terminal 65 side by the electrostatic force generated between the movable electrode terminal 63 and the fixed electrode terminal 65. Be drawn to. Thereby, the mirror 2 comes to bend in a convex shape with respect to the front surface 2a.

  As described above, in this embodiment, since the movable electrode terminals 62 and 63 are coupled to the front surface 2a and the rear surface 2b of the mirror 2, respectively, the movable electrode terminals 62 and 63 are movable in order to increase the movable range. Even if a desired distance is secured between 62 and the fixed electrode terminal 64 and between the movable electrode terminal 63 and the fixed electrode terminal 65, a sufficiently large space is not taken in the width direction of the mirror 2. Thereby, the mirror 2 can be greatly deformed from a flat state to a convex shape while reducing the width dimension W of the movable mirror device 60 (drive unit 61). Therefore, when this movable mirror device 60 is applied to a dispersion compensator as shown in FIG. 4, large positive dispersion can be compensated.

  FIG. 12 is a schematic configuration diagram showing a fifth embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the fourth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, a movable mirror device 75 of the present embodiment includes a mirror 76 instead of the mirror 2 in the fourth embodiment. As shown in FIG. 12A, the mirror 76 is configured to be bent in a concave shape in advance with respect to the front surface (light reflecting surface) 76a side. Other configurations are the same as those of the fourth embodiment.

  When a voltage is applied to the fixed electrode terminal 64 by the variable voltage source 72 and a voltage is applied to the fixed electrode terminal 65 by the variable voltage source 73, the movable electrode terminal 62 is fixed to the fixed electrode terminal 64 as shown in FIG. At the same time, the movable electrode terminal 63 is drawn toward the fixed electrode terminal 65 side, and accordingly, the mirror 76 is brought into a flat state without bending. When the applied voltage of the variable voltage sources 72 and 73 is further increased, the movable electrode terminal 62 is further drawn toward the fixed electrode terminal 64 and the movable electrode terminal 63 is further fixed to the fixed electrode terminal, as shown in FIG. At the same time, the mirror 76 is bent in a convex shape with respect to the front surface 76a side.

  Thus, in the present embodiment, the mirror 76 can be deformed into a concave shape and a convex shape even with a simple configuration in which the fixed electrode terminals 64 and 65 are arranged only on one side of the movable electrode terminals 62 and 63. In this case, since the mirror 76 only needs to be moved in one direction, control when applying a voltage to the fixed electrode terminals 64 and 65 can be easily performed.

  FIG. 13 is a perspective view showing a sixth embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the movable mirror device 80 of this embodiment includes a drive unit 81 that deforms the mirror 2 into a curved shape. The driving unit 81 faces the movable electrode terminal 82 coupled to the front surface 2a of the mirror 2, the movable electrode terminal 83 coupled to the rear surface 2b of the mirror 2, and the movable electrode terminal 82 on the front surface 2a side of the mirror 2. A fixed electrode terminal 84 fixed to the upper surface of the substrate 4, and a fixed electrode terminal 85 fixed to the upper surface of the substrate 4 so as to face the movable electrode terminal 83 on the rear surface 2 b side of the mirror 2.

  The movable electrode terminal 82 is coupled to the left end portion of the mirror 2 when viewed from the front surface 2 a side of the front surface 2 a of the mirror 2, and extends in front of the mirror 2. The movable electrode terminal 83 is coupled to the right end portion of the mirror 2 as viewed from the front surface 2a side on the rear surface 2b of the mirror 2, and has a coupling portion 86 having a structure bent toward the left end portion of the mirror 2, and the coupling portion 86. And an electrode portion 87 extending rearward of the mirror 2. The movable electrode terminal 82 and the electrode portion 87 of the movable electrode terminal 83 are configured to extend substantially in a straight line.

  The fixed electrode terminals 84 and 85 are arranged on the right end side of the mirror 2 when viewed from the front surface 2a side with respect to the movable electrode terminals 82 and 83. The fixed electrode terminals 84 and 85 are configured to extend substantially in a straight line.

  The comb electrode 88 is provided on the side surface of the movable electrode terminal 82 facing the fixed electrode terminal 84, and the comb tooth 89 is provided on the side surface of the electrode portion 87 of the movable electrode terminal 83 facing the fixed electrode terminal 85. It has been. Comb teeth 90 are provided on the side surface of the fixed electrode terminal 84 facing the movable electrode terminal 82, and comb teeth 91 are provided on the side surface of the fixed electrode terminal 85 facing the electrode portion 87.

  Further, as shown in FIG. 14A, the movable electrode terminals 82 and 83 are grounded via the mirror 2 and the anchor portion 5. The fixed electrode terminal 84 is connected to a variable voltage source 92 for generating an electrostatic force between the movable electrode terminal 82 and the fixed electrode terminal 84. The fixed electrode terminal 85 is connected to the movable electrode terminal 83 and the fixed electrode terminal. A variable voltage source 93 for generating an electrostatic force is connected to 85. In an initial state where the applied voltages of the variable voltage sources 92 and 93 are zero, the mirror 2 is in a flat state without bending as shown in FIG.

  When a voltage is applied to the fixed electrode terminal 84 by the variable voltage source 92 and a voltage is applied to the fixed electrode terminal 85 by the variable voltage source 93, the movable electrode terminal 82 and the fixed electrode terminal 84 are shown in FIG. The movable electrode terminal 82 is attracted to the fixed electrode terminal 84 side by the electrostatic force generated between the movable electrode terminal 83 and the movable electrode terminal 83 is moved to the fixed electrode terminal 85 side by the electrostatic force generated between the movable electrode terminal 83 and the fixed electrode terminal 85. Be drawn to. As a result, the mirror 2 bends in a concave shape with respect to the front surface (light reflecting surface) 2a.

  In this embodiment, since it comprised as mentioned above, the mirror 2 can be greatly deform | transformed from a flat state to a concave shape, reducing the width dimension W of the movable mirror device 80 (drive part 81). Therefore, when this movable mirror device 80 is applied to a dispersion compensator as shown in FIG. 4, large negative dispersion can be compensated.

  FIG. 15 is a schematic diagram showing a seventh embodiment of the movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the sixth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, a movable mirror device 95 of the present embodiment includes a mirror 96 instead of the mirror 2 in the sixth embodiment. As shown in FIG. 15A, the mirror 96 is configured to be bent in a convex shape in advance with respect to the front surface (light reflecting surface) 96a side.

  When a voltage is applied to the fixed electrode terminal 84 by the variable voltage source 92 and a voltage is applied to the fixed electrode terminal 85 by the variable voltage source 93, the movable electrode terminal 82 is fixed to the fixed electrode terminal 84 as shown in FIG. At the same time, the movable electrode terminal 83 is drawn toward the fixed electrode terminal 85 side, and the mirror 96 is brought into a flat state without bending. When the voltage applied to the variable voltage sources 92 and 93 is further increased, the movable electrode terminal 82 is further drawn toward the fixed electrode terminal 84 and the movable electrode terminal 83 is further fixed to the fixed electrode terminal as shown in FIG. The mirror 96 is pulled toward the 85 side, and accordingly, the mirror 96 bends in a concave shape with respect to the front surface 96 a side.

  Thus, in the present embodiment, the mirror 96 can be deformed into a concave shape and a convex shape even with a simple configuration in which the fixed electrode terminals 84 and 85 are arranged only on one side of the movable electrode terminals 82 and 83.

  FIG. 16 is a schematic configuration diagram showing an eighth embodiment of a movable mirror device according to the present invention. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, a movable mirror device 100 of this embodiment includes a mirror 101 and a drive unit 102 that deforms the mirror 101 into a curved shape. An anchor portion (not shown) fixed to a substrate (not shown) is provided at the center of the lower surface of the mirror 101 in the width direction of the mirror 101. As a result, the mirror 101 can be deformed into a curved shape with the central portion G in the width direction as a fixed point.

  The drive unit 102 is coupled to a U-shaped movable electrode terminal 103 coupled to the left end and right end of the mirror 101 on the front surface 101a of the mirror 101, and to the left end and right end of the mirror 101 on the rear surface 101b of the mirror 101. A U-shaped movable electrode terminal 104, a fixed electrode terminal 105 fixed to the substrate (not shown) so as to face the movable electrode terminal 103, and a substrate (not shown) so as to face the movable electrode terminal 104. ) And a fixed electrode terminal 106 fixed thereto.

  The movable electrode terminal 103 is coupled to, for example, a lower portion of the front surface 101a of the mirror 101 in order to secure a light reflection region on the front surface 101a of the mirror 101, and the movable electrode terminal 104 correspondingly corresponds to the rear surface 101b of the mirror 101. It is connected to the lower part. The fixed electrode terminal 105 faces the mirror 101 with the movable electrode terminal 103 interposed therebetween, and the fixed electrode terminal 106 faces the mirror 101 with the movable electrode terminal 104 interposed therebetween.

  Comb teeth 107 are provided on the surface of the movable electrode terminal 103 facing the fixed electrode terminal 105, and comb teeth 108 are provided on the surface of the movable electrode terminal 104 facing the fixed electrode terminal 106. Comb teeth 109 are provided on the surface of the fixed electrode terminal 105 facing the movable electrode terminal 103, and comb teeth 110 are provided on the surface of the fixed electrode terminal 106 facing the movable electrode terminal 104.

  The movable electrode terminals 103 and 104 are grounded via the mirror 101 and an anchor portion (not shown). The fixed electrode terminal 105 is connected to a variable voltage source 111 for generating an electrostatic force between the movable electrode terminal 103 and the fixed electrode terminal 105. The fixed electrode terminal 106 is connected to the movable electrode terminal 104 and the fixed electrode terminal. A variable voltage source 112 for generating an electrostatic force is connected to 106.

  When a voltage is applied to the fixed electrode terminal 105 by the variable voltage source 111, the movable electrode terminal 103 is attracted to the fixed electrode terminal 105 side by an electrostatic force generated between the movable electrode terminal 103 and the fixed electrode terminal 105. Thereby, the flat mirror 101 without a deformation | transformation deform | transforms into a concave shape with respect to the front surface 101a side. On the other hand, when a voltage is applied to the fixed electrode terminal 106 by the variable voltage source 112, the movable electrode terminal 104 is attracted to the fixed electrode terminal 106 side by electrostatic force generated between the movable electrode terminal 104 and the fixed electrode terminal 106. Thereby, the flat mirror 101 without a deformation | transformation deform | transforms into convex shape with respect to the front surface 101a side.

  As described above, in this embodiment, since the movable electrode terminals 103 and 104 are coupled to the front surface 101a and the rear surface 101b of the mirror 101, respectively, the movable electrode terminals 103 and 104 are movable in order to increase the movable range. Even if a desired gap is secured between the movable electrode terminal 104 and the fixed electrode terminal 106 between the movable electrode terminal 103 and the fixed electrode terminal 105, a sufficiently large space is not taken in the width direction of the mirror 101. Accordingly, the mirror 101 can be deformed from a flat state to a concave shape and a convex shape while reducing the width dimension W of the movable mirror device 100 (drive unit 102). Therefore, when the movable mirror device 100 is applied to a dispersion compensator as shown in FIG. 4, both positive dispersion and negative dispersion can be compensated.

  FIG. 17 is a schematic diagram showing a ninth embodiment of the movable mirror device according to the present invention. In the drawing, the same or equivalent members as those in the eighth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  In the figure, the movable mirror device 120 of this embodiment includes a drive unit 121 that deforms the mirror 101. Anchor portions (not shown) fixed to a substrate (not shown) are provided at both ends in the width direction of the mirror 101 on the lower surface of the mirror 101, respectively. As a result, the mirror 101 can be deformed into a curved shape with both end portions E in the width direction being fixed points.

  The drive unit 121 includes T-shaped movable electrode terminals 122 and 123 in place of the movable electrode terminals 103 and 104 in the eighth embodiment. The movable electrode terminal 122 is coupled to the center portion in the width direction of the mirror 101 on the front surface 101a of the mirror 101, and the movable electrode terminal 123 is coupled to the center portion in the width direction of the mirror 101 on the rear surface 101b of the mirror 101. Comb teeth 124 are provided on the surface of the movable electrode terminal 122 facing the fixed electrode terminal 105, and comb teeth 125 are provided on the surface of the movable electrode terminal 123 facing the fixed electrode terminal 106. The movable electrode terminals 122 and 123 are grounded via the mirror 101 and an anchor portion (not shown).

  When a voltage is applied to the fixed electrode terminal 105 by the variable voltage source 111, the movable electrode terminal 122 is attracted toward the fixed electrode terminal 105 by an electrostatic force generated between the movable electrode terminal 122 and the fixed electrode terminal 105. Thereby, the flat mirror 101 without a deformation | transformation deform | transforms into convex shape with respect to the front surface 101a side. On the other hand, when a voltage is applied to the fixed electrode terminal 106 by the variable voltage source 112, the movable electrode terminal 123 is attracted toward the fixed electrode terminal 106 by electrostatic force generated between the movable electrode terminal 123 and the fixed electrode terminal 106. Thereby, the flat mirror 101 without a deformation | transformation deform | transforms into a concave shape with respect to the front surface 101a side.

  Also in the present embodiment, the mirror 101 can be deformed from a flat state to a concave shape and a convex shape while reducing the width dimension W of the movable mirror device 120 (driving unit 121).

  Although several preferred embodiments of the present invention have been described above, the present invention is not limited to the above embodiments. For example, the movable mirror device according to the present invention can be applied to an optical device other than the dispersion compensator.

1 is a perspective view showing a first embodiment of a movable mirror device according to the present invention. It is a figure which shows operation | movement of the movable mirror device shown in FIG. It is a perspective view which shows the movable mirror device array which applied the movable mirror device shown in FIG. It is a block diagram which shows the dispersion compensator provided with the movable mirror device array shown in FIG. It is a perspective view which shows 2nd Embodiment of the movable mirror device concerning this invention. It is a perspective view which shows 3rd Embodiment of the movable mirror device concerning this invention. FIG. 7 is a side view of the movable mirror device shown in FIG. 6. It is a perspective view which shows the modification of 3rd Embodiment of the movable mirror device concerning this invention. It is a side view of the movable mirror device shown in FIG. It is a perspective view which shows 4th Embodiment of the movable mirror device concerning this invention. It is a figure which shows operation | movement of the movable mirror device shown in FIG. It is a figure which shows the schematic structure and operation | movement which show 5th Embodiment of the movable mirror device concerning this invention. It is a perspective view which shows 6th Embodiment of the movable mirror device concerning this invention. It is a figure which shows operation | movement of the movable mirror device shown in FIG. It is a figure which shows schematic structure and its operation | movement which show 7th Embodiment of the movable mirror device concerning this invention. It is a schematic block diagram which shows 8th Embodiment of the movable mirror device concerning this invention. It is a schematic block diagram which shows 9th Embodiment of the movable mirror device concerning this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Movable mirror device, 2 ... Mirror, 2a ... Front surface, 2b ... Rear surface, 6 ... Movable electrode terminal (first movable electrode terminal), 7 ... Movable electrode terminal (second movable electrode terminal), 8A, 8B ... Fixed electrode Terminal (first fixed electrode terminal), 9A, 9B ... Fixed electrode terminal (second fixed electrode terminal), 10 ... Coupling part, 11 ... Electrode part, 12 ... Coupling part, 13 ... Electrode part, 18A, 18B ... Variable voltage Source (first driving means), 19A, 19B ... variable voltage source (second driving means), 20 ... movable mirror device array, 22 ... dispersion compensator, 23 ... diffraction grating (optical multiplexing means), 30 ... movable mirror device 32 ... movable electrode terminal (first movable electrode terminal), 33 ... movable electrode terminal (second movable electrode terminal), 34A, 34B ... fixed electrode terminal (first fixed electrode terminal), 35A, 35B ... fixed electrode terminal ( Second fixed electrode terminal), 36 ... connection , 37 ... Electrode part, 38 ... Coupling part, 39 ... Electrode part, 50 ... Movable mirror device, 54 ... Movable electrode terminal (first movable electrode terminal), 55 ... Movable electrode terminal (second movable electrode terminal), 56 ... coupling part, 57 ... coupling part, 50A ... movable mirror device, 60 ... movable mirror device, 62 ... movable electrode terminal (first movable electrode terminal), 63 ... movable electrode terminal (second movable electrode terminal), 64 ... fixed Electrode terminal (first fixed electrode terminal), 65 ... Fixed electrode terminal (second fixed electrode terminal), 66 ... Coupling part, 67 ... Electrode part, 72 ... Variable voltage source (first driving means), 73 ... Variable voltage source (Second driving means), 75 ... movable mirror device, 76 ... mirror, 76a ... front surface, 76b ... rear surface, 80 ... movable mirror device, 82 ... movable electrode terminal (first movable electrode terminal), 83 ... movable electrode terminal ( Second movable electrode terminal), DESCRIPTION OF SYMBOLS 4 ... Fixed electrode terminal (1st fixed electrode terminal), 85 ... Fixed electrode terminal (2nd fixed electrode terminal), 86 ... Connection part, 87 ... Electrode part, 92 ... Variable voltage source (1st drive means), 93 ... Variable voltage source (second drive means), 95 ... movable mirror device, 96 ... mirror, 96a ... front surface, 96b ... rear surface, 100 ... movable mirror device, 101 ... mirror, 101a ... front surface, 101b ... rear surface, 103 ... movable electrode Terminal (first movable electrode terminal), 104 ... movable electrode terminal (second movable electrode terminal), 105 ... fixed electrode terminal (first fixed electrode terminal), 106 ... fixed electrode terminal (second fixed electrode terminal), 111 ... Variable voltage source (first driving means) 112 112 Variable voltage source (second driving means) 120 Movable mirror device 122 Movable electrode terminal (first movable electrode terminal) 123 Movable electrode terminal (second movable electrode) Electrode terminal ).

Claims (13)

A deformable mirror,
A first movable electrode terminal coupled to the front surface of the mirror;
A second movable electrode terminal coupled to the rear surface of the mirror;
A first fixed electrode terminal disposed to face the first movable electrode terminal;
A second fixed electrode terminal disposed to face the second movable electrode terminal;
First driving means for moving the first movable electrode terminal by generating an electrostatic force between the first movable electrode terminal and the first fixed electrode terminal;
A movable mirror device comprising: second driving means for moving the second movable electrode terminal by generating an electrostatic force between the second movable electrode terminal and the second fixed electrode terminal. The first movable electrode terminal is coupled to one side portion of the mirror in the width direction on the front surface of the mirror and extends in front of the mirror;
2. The movable device according to claim 1, wherein the second movable electrode terminal is coupled to the other side portion of the rear surface of the mirror in the width direction of the mirror and extends rearward of the mirror. Mirror device. Each of the first fixed electrode terminal and the second fixed electrode terminal has at least two,
The two first fixed electrode terminals are arranged on both sides of the first movable electrode terminal so as to face each other with the first movable electrode terminal interposed therebetween,
3. The movable mirror device according to claim 2, wherein the two second fixed electrode terminals are arranged on both sides of the second movable electrode terminal so as to face each other with the second movable electrode terminal interposed therebetween. .   4. The movable mirror device according to claim 3, wherein the first movable electrode terminal and the second movable electrode terminal have a portion extending toward the center of the mirror. The first fixed electrode terminal is disposed on one side of the first movable electrode terminal,
The movable mirror device according to claim 2, wherein the second fixed electrode terminal is disposed on one side of the second movable electrode terminal and on the same side as the first fixed electrode terminal. The first movable electrode terminal has a portion extending toward the other side portion of the mirror,
The first fixed electrode terminal and the second fixed electrode terminal are disposed on the one side portion side of the mirror with respect to the first movable electrode terminal and the second movable electrode terminal. The movable mirror device according to claim 5.   The movable mirror device according to claim 5 or 6, wherein the mirror is formed in a concave shape with respect to the front surface of the mirror in advance. The second movable electrode terminal has a portion extending toward the one side portion of the mirror,
The first fixed electrode terminal and the second fixed electrode terminal are arranged on the other side portion side of the mirror with respect to the first movable electrode terminal and the second movable electrode terminal. The movable mirror device according to claim 5.   9. The movable mirror device according to claim 5, wherein the mirror is formed in a convex shape with respect to the front surface of the mirror in advance.   The first movable electrode terminal and the second movable electrode terminal are coupled to a center portion in the height direction of the mirror and have a portion extending in the height direction of the mirror. The movable mirror device according to any one of claims 2 to 9. The first movable electrode terminal is coupled to both sides of the mirror in the width direction on the front surface of the mirror,
The second movable electrode terminal is coupled to both side portions of the rear surface of the mirror in the width direction of the mirror,
The first fixed electrode terminal is opposed to the mirror across the first movable electrode terminal,
The movable mirror device according to claim 1, wherein the second fixed electrode terminal faces the mirror across the second movable electrode terminal. The first movable electrode terminal is coupled to a central portion of the mirror in the width direction on the front surface of the mirror,
The second movable electrode terminal is coupled to a central portion of the mirror in the width direction on the rear surface of the mirror;
The first fixed electrode terminal is opposed to the mirror across the first movable electrode terminal,
The movable mirror device according to claim 1, wherein the second fixed electrode terminal faces the mirror across the second movable electrode terminal. A dispersion compensator for applying phase shift to signal light to compensate for dispersion of the signal light,
Optical demultiplexing means for demultiplexing the signal light for each wavelength;
A dispersion compensator comprising a plurality of movable mirror devices according to any one of claims 1 to 12, which respectively receive the signal light demultiplexed by the light demultiplexing means.

Images