JP2005106472A - Observation technology by coherent wave - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology for reducing affection of a wave affecting an observation object by applying a wave at the time of observation. <P>SOLUTION: A plurality of coherent waves are generated for reducing the intensity of wave activating on the observation object at the position of the observation object to ≤1/2 of average intensity by making the plurality of waves interfere. Then, at least one wave from among the plurality of waves mutually reacted with the observation object is observed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a technique for observing an observation object by applying a coherent wave to the observation object.

  When a sample is observed with an optical microscope, an electron microscope, or the like, the sample is observed by irradiating the sample with a light beam, an electron beam, or the like, and observing the light beam, the electron beam, or the like that interacts with the sample.

  However, the sample to be observed is damaged by the interaction with the irradiated light beam or electron beam. In particular, when a biological sample such as a mesoporous material such as zeolite or a pathogen or a virus is observed with an electron microscope, the sample may be damaged and the sample may be destroyed during the observation (for example, see Non-Patent Document 1). .)

  Therefore, in order to reduce the damage of the sample under observation, a method of reducing the degree of damage by cooling the sample to a low temperature is performed. In addition, a method called a Rhodose method or a minimum dose method (for example, see Non-Patent Document 2) that suppresses damage to a sample by irradiating only a minimum electron beam necessary for taking a photograph has been developed.

  FIG. 1 is a configuration diagram of a conventional transmission electron microscope. This transmission electron microscope includes an electron beam irradiation apparatus 100 that irradiates an electron beam onto a sample SPC1 that is an observation target, and an observation unit 200 that acquires an image of the sample SPC1 from an electron beam that interacts with the sample SPC1. The electron beam irradiation device 100 includes an electron source 110 and a focusing lens 120, and the observation unit 200 includes an objective lens 210 and an imaging device 220. Note that the actual imaging unit of the transmission electron microscope is composed of a plurality of electronic lenses such as an objective lens, an intermediate lens, and a projection lens, but is simply depicted as one objective lens 210 in FIG. .

  The electron beam accelerated by a predetermined acceleration voltage and emitted from the electron source 110 becomes an almost parallel electron beam by the focusing lens 120. Due to the interaction between the electron beam and the sample SPC1 disposed on the sample surface, the amplitude and phase as a wave of the electron beam change. The electron beam interacting with the sample SPC1 is enlarged and formed by the objective lens 210 to form an image IMG1 of the sample SPC1 on the observation surface. Then, the image IMG1 formed on the observation surface is acquired by the imaging device 220.

  By using a charge-coupled device (CCD) having higher sensitivity than the film as the imaging device 220 and minimizing the electron beam intensity to obtain the image IMG1, the electron dose applied to the sample SPC1 is usually a film. It becomes smaller than the electron microscope observation. Thus, if a highly sensitive imaging apparatus is used, the electron dose irradiated to sample SPC1 can be reduced and the damage given to a sample can be made small.

  FIG. 2 is a diagram showing an observation image of a sample using a conventional transmission electron microscope. The sample to be observed is gold fine particles having a diameter of 15 nm attached on a carbon film that is thin enough to transmit an electron beam. As shown in FIG. 2, the morphology of the gold fine particles can be clearly observed by electron microscope observation.

  However, with such conventional observation techniques, it is necessary to irradiate a certain amount of light rays, electron beams, or the like. For this reason, the effects of irradiation damage may not be negligible even with these methods in samples with severe irradiation damage.

L.A. Bursill, E.A. Lodge and J.M.Thomas, Nature, Volume 286 (1980) p.111-113 M. Pan, Micron, Volume 27, No.3-4 (1996) p.219-238

  The present invention has been made to solve the above-described conventional problems, and an object thereof is to provide a technique for reducing the influence of waves acting on an observation target.

  In order to achieve at least a part of the above object, an observation apparatus according to the present invention is an observation apparatus that observes an observation object by applying a wave to an object or a field that is an observation object. Generating a wave, and at this time, the plurality of waves are controlled so that the intensity of the wave acting on the observation target due to the interference of the plurality of waves is less than or equal to half of the average intensity of the wave at the position of the observation target. And an observation unit that acquires an observation result of the observation object by observing at least one of the plurality of waves interacting with the observation object.

  According to this configuration, since the intensity of the wave acting on the observation target can be reduced to half or less of the average intensity of the wave at the position of the observation target, the influence of the wave acting on the observation target can be reduced.

  The observation unit may include an imaging unit that forms an image from a wave interacting with the observation target.

  According to this configuration, since the observation target can be observed as an image, the observation result can be easily interpreted.

  The plurality of waves may have different traveling directions, and the imaging unit may form an image from at least one of the plurality of waves.

  According to this configuration, since a clear image is formed, observation of the observation object is facilitated.

  The wave source includes an electron source that generates one coherent electron beam, and an electron beam prism that is installed in a path of the electron beam and divides the electron beam into a plurality of electron beams having different traveling directions, The observation unit may include an objective lens that forms an image of an electron beam that has passed through the observation target, and a beam stopper that blocks a part of the plurality of electron beams on the exit side of the objective lens.

  According to this configuration, the irradiation amount of the electron beam can be reduced in the observation with the electron microscope, so that the irradiation damage of the sample by the electron beam can be suppressed.

  The wave source includes a laser that generates one coherent light beam, and a light beam splitting unit that is installed in a path of the light beam and divides the light beam into a plurality of light beams that travel toward the observation target along different traveling directions. The observation unit may include an objective lens that forms an image of a light beam that has passed through the observation target, and a beam stopper that blocks a part of the plurality of light beams on the exit side of the objective lens.

  According to this configuration, it is possible to reduce the irradiation amount of the light beam in the observation with the optical microscope, and therefore it is possible to suppress the irradiation damage of the sample due to the light beam.

  The wave source includes a laser that generates a coherent beam, a beam splitter that is installed in a path of the beam and splits the beam into two beams having different traveling directions, and the observation of the split beam It is good also as a thing provided with the light beam conversion part which makes the advancing direction of the two said divided | segmented light rays mutually opposite directions while reflecting in the direction of object.

  According to this configuration, the observation target image does not have asymmetry, so that the observation result can be easily interpreted.

  The observation unit may measure a combined wave of a plurality of waves that interact with the observation target.

  According to this configuration, the observation object can be observed without detecting the wave applied to the observation object.

  The wave source includes a first wave source that generates a first wave, and a second wave that generates a second wave having a phase difference and an amplitude ratio set to predetermined values with respect to the first wave. It may be provided with a wave source.

  According to this configuration, an observation target can be observed without detecting a wave applied to the observation target with respect to the observation target at an arbitrary position.

  The present invention can be realized in various modes. For example, an observation method and an observation apparatus, a computer program for realizing the function of the apparatus or method, a recording medium on which the computer program is recorded, etc. It is realizable with the aspect of.

Next, the best mode for carrying out the present invention will be described in the following order based on examples.
A. First embodiment:
B. Second embodiment:
C. Third embodiment:
D. Fourth embodiment:
E. Example 5:
F. Example 6:
G. Variation:

A. First embodiment:
FIG. 3 is a block diagram of a transmission electron microscope as a first embodiment of the present invention. Similar to the conventional transmission electron microscope (FIG. 1), this transmission electron microscope is an image of the sample SPC2 from the electron beam irradiation apparatus 102 for irradiating the sample SPC2 to be observed with an electron beam and the electron beam interacting with the sample SPC2. And an observation unit 202 that obtains. The electron beam irradiation device 102 includes an electron source 110 and a focusing lens 120, and the observation unit 202 includes an objective lens 210 and an imaging device 220.

  The electron beam irradiation apparatus 102 of the transmission electron microscope according to the first embodiment has an electron beam prism 130 provided between the focusing lens 120 and the sample surface, so that the electron beam of the conventional transmission electron microscope shown in FIG. Different from source 100. Here, the electron beam prism is a device composed of a pair of grounded parallel plates installed in the electron beam path and thin conductive wires provided between the parallel plates. Regarding the electron beam prism of this embodiment (generally called “electron beam biprism”), Tsukasa Hirayama, “Direct viewing of electric and magnetic fields by electron wave interference and application to materials science” (Materia, Japan Association) The Japan Institute of Metals, 1998, Vol. 37, p.454-460).

  When a positive voltage is applied to the wire of the electron beam prism 130, an electron wave having a negative charge is attracted to the wire, so that the electron beam is divided into two electron beams having different traveling directions. If the electron beam generated in the electron source 110 is coherent, the two electron beams divided by the electron beam prism 130 become coherent. Note that a field emission electron gun or the like can be used as a coherent electron source.

  Due to the interference of two coherent electron beams, the electron beam intensity (the square of the amplitude of the electron wave) on the sample surface changes in a sine curve shape in the bending direction of the electron beam. As described above, the electron beam intensity distribution has a sine curve shape, so that electron interference fringes are formed on the sample surface. The dark part of the interference fringes formed on the sample surface corresponds to the bottom of this sine curve. Therefore, when the sample SPC2 to be observed is placed in the dark part of the interference fringes, the electron beam intensity irradiated to the sample SPC2 is less than or equal to half the average intensity of the electron beam on the sample surface (hereinafter referred to as “substantially zero”). Therefore, damage to the sample SPC2 due to electron beam irradiation can be suppressed.

  In order to reduce the intensity of the electron beam irradiated to the sample SPC2 to substantially zero and suppress the irradiation damage of the sample SPC2, the interval between the interference fringes on the sample surface may be set to three times or more the size of the sample SPC2. More preferably, the maximum intensity of the electron beam irradiated on the sample SPC2 is set to 1/10 or less of the average intensity of the electron beam on the sample surface. This observation condition can be realized by setting the interval between the interference fringes on the sample surface to 7 times or more the size of the sample SPC2. More preferably, the maximum intensity of the electron beam irradiated on the sample SPC2 is set to be 1/20 or less of the average intensity of the electron beam on the sample surface. The irradiation electron beam intensity of 1/20 or less of the average intensity is realized by setting the interval between the interference fringes on the sample surface to 10 times or more the size of the sample.

  The interval between the interference fringes formed on the sample surface is determined by the traveling direction of the two electron beams divided by the electron beam prism 130 and the wavelength of the electron beam. Therefore, the interval between the interference fringes can be set to a desired value by appropriately adjusting the voltage applied to the wire of the electron beam prism 130 and the acceleration voltage of the electron beam.

  Further, the observation unit 202 of the transmission electron microscope according to the first embodiment is the observation unit of the conventional transmission electron microscope shown in FIG. 1 in that a beam stopper 230 is provided between the objective lens 210 and the imaging device 220. It is different from 200.

  The two electron beams transmitted through the sample surface form two spots on the back focal plane of the objective lens 210 by the objective lens 210. One of the two spots is shielded by using a beam stopper 230 provided between the objective lens 214 and the imaging device 220. Then, the electron beam not shielded by the beam stopper 230 forms an image IMG2 of the sample SPC2 on the observation surface.

  The position of the beam stopper 230 is preferably the position of the back focal plane where the electron beam becomes two spots, but the beam of the two electron beams is separated on the exit side of the objective lens 210 and the beam stopper 230 is used. Any position where only one electron beam can be shielded is acceptable.

  FIG. 4 is a diagram showing an image formed on the observation surface by two electron beams transmitted through the sample surface by the transmission electron microscope of the first embodiment. The sample to be observed is the same sample as the conventional electron microscope observation of FIG. By applying an appropriate voltage to the wire of the electron beam prism 130, the electron beam from the electron source 110 is divided and the sample is irradiated with two electron beams. By adjusting the voltage applied to the wire, the interval between the interference fringes on the sample surface is about 150 nm. The observation conditions such as the irradiation electron beam intensity are the same as those in FIG.

  When the electron beam is not shielded by the beam stopper 230, an interference fringe image formed on the sample surface is formed on the observation surface as shown in FIG. And the gold | metal fine particle in the area | region shown with the white dotted line in FIG. 4 is not observed since it exists in the dark part of the interference fringe with weak electron beam intensity | strength. Thus, since the electron dose irradiated to the sample arrange | positioned in the dark part of an interference fringe becomes smaller than the case of the conventional electron microscope observation, the damage of the sample by irradiation of an electron beam can be suppressed.

  FIG. 5 is a diagram showing an observation image of the sample by the transmission electron microscope of the first embodiment. The image in FIG. 5 is obtained by shielding one of the electron beams by the beam stopper 230 under the same observation conditions as in FIG. 4 and forming one of the two electron beams transmitted through the sample surface to form an observation surface. Formed on top. As shown in FIG. 5, the morphology of the gold fine particles can be clearly observed as in the observation result by the conventional method (FIG. 2). In FIG. 5, since one of the electron beams is shielded on the back focal plane of the objective lens 214, the observed image is asymmetrical.

  In the transmission electron microscope (FIG. 3) of the first embodiment, a clear image of an object (gold fine particles) can be acquired as shown in the observation example of FIG. 5, but the observation object interacts with an electron beam. Anything to do. For example, by forming an image of a part of an electron beam interacting with an electric field or a magnetic field, it is possible to form and observe an image of an electric field and a magnetic field that are observation targets.

B. Second embodiment:
FIG. 6 is a configuration diagram of an electron beam prism in the second embodiment. In the second embodiment, instead of the electron beam prism 130 (FIG. 3) that divides the incident electron beam into two, the electron beam prism 130a that divides the incident electron beam into three is used. Different from the example. Since other configurations and operations are substantially the same as those of the first embodiment, the description thereof is omitted here.

  In the electron beam prism 130 a in the second embodiment, two conductive wires 134 and 136 are provided between the external electrodes 132. The same positive voltage is applied to the two wires 134 and 136, respectively. At this time, since the voltage applied to the wire 134 and the wire 136 is the same, the wire 134 and the wire 136 have the same potential.

The electron beam incident between the wires 134 and 136 and the external electrode 132 from above in FIG. 6 is bent toward the center of the electron beam prism 130a. On the other hand, since the wires 134 and 136 are at the same potential, the electron beam incident between them travels straight toward the sample surface. Thus, the electron beam incident on the electron beam prism 130a having the two wires 134 and 136 is divided into three electron beams Ψ ₁ , Ψ ₀ , and Ψ ₋₁ .

Due to the interference of the electron beams Ψ ₁ , Ψ ₀ , and Ψ ₋₁ divided into three, the electron beam intensity on the sample surface changes along the bending direction of the electron beam. As the electron beam intensity changes in this way, interference fringes are formed on the sample surface. When the sample SPC2a to be observed is placed in the dark part of the interference fringes, the intensity of the electron beam is lowered at the position of the sample SPC2a, so that the intensity of the electron beam irradiated on the sample SPC2a becomes almost zero.

Three electron beams Ψ ₁ , Ψ ₀ , and Ψ ₋₁ transmitted through the sample surface form three spots by an objective lens (not shown). By shielding at least one of the three spots with a beam stopper (not shown), at least one of the three electron beams Ψ ₁ , Ψ ₀ , Ψ ₋₁ is shielded. Then, an image of the sample SPC2a is formed on the imaging plane by an unshielded electron beam among the three electron beams Ψ ₁ , Ψ ₀ , Ψ ₋₁ .

  The same effect as that of the transmission electron microscope (FIG. 3) of the first embodiment can also be obtained by the transmission electron microscope of the second embodiment.

C. Third embodiment:
FIG. 7 is a configuration diagram of an optical microscope as a third embodiment of the present invention. In the first embodiment, an electron beam is used as a wave to be applied to the observation target. In the third embodiment, a light beam is used. The light source 104 of the third embodiment includes a laser 114 that is a source of coherent parallel light and a Mach-Zehnder type interference device 140. In the observation unit 204, an optical lens is used as the objective lens 214 instead of the electronic lens in the first embodiment. Further, the beam stopper 234 and the image pickup device 224 are also suitable for observation with light rays. Note that the configuration and function of the observation unit 204 are substantially the same as those of the observation unit 202 (FIG. 3) of the first embodiment, and thus description thereof is omitted here.

  The interference device 140 includes two semi-transparent mirrors 142 and 148 and two mirrors 144 and 146. The light beam incident on the interference device 140 is divided into two light beams by the first semi-transparent mirror 142, and the optical path is switched by the second semi-transparent mirror 148 and the two mirrors 144 and 146. As described above, the light beam from the laser 114 is divided into two coherent light beams having different traveling directions by the interference device 140.

  Similar to the first embodiment, the light intensity distribution on the sample surface becomes a sine curve due to the interference of two coherent light beams, and interference fringes are formed on the sample surface. And the light quantity irradiated to sample SPC3 arrange | positioned in the dark part of the interference fringe on a sample surface becomes substantially zero, and it can suppress the influence of the light to sample SPC3. The interval between the interference fringes formed on the sample surface can be adjusted by adjusting the angle of the first semi-transparent mirror 142 or the reflecting mirror 146 provided in the interference device 140.

  In the third embodiment, the Mach-Zehnder type interference device 140 is used as the interference device. However, as the interference device, the light beam from the laser 114 is divided into two, and the optical paths of the two divided light beams are set. What is necessary is just to change to the direction of sample SPC3, respectively. In addition to the above-described semi-transparent mirror 142, a diffraction grating, a polarization beam splitter, or the like can be used as a beam splitter that divides a light beam into two.

  FIG. 8 is a diagram showing an observation image of the sample by the optical microscope of the third embodiment. The sample to be observed is a black photosensitive portion having a square shape with a side of about 100 μm formed on a developed photographic film. This black photosensitive portion is arranged in the dark portion of the interference fringes by adjusting the position of the film. The angle of the semi-transparent mirror 142 is adjusted so that the interval between the interference fringes on the sample surface is about 1 mm.

  By imaging one of the two light beams that have passed through the sample, a clear sample image as shown in FIG. 8 is obtained in the same manner as the sample image (FIG. 5) obtained in the first embodiment. Is formed. In addition, it is the same as the sample image obtained in the first example in that the observed image is asymmetrical.

D. Fourth embodiment:
FIG. 9 is a block diagram of an optical microscope as a fourth embodiment of the present invention. Similar to the third embodiment, the fourth embodiment uses a laser 116 as the light source of the optical microscope. The coherent parallel light beam L ₀ emitted from the laser 116 is divided into two light beams having different traveling directions by the interference device 150 and irradiated onto the sample SPC4. The parallel light beam L ₀ is split into _two light beams L ₁ and L ₂ having different traveling directions by the first semi-transparent mirror 152 which is a beam splitter. The light beams L ₁ and L ₂ divided by the first half mirror 152 are reflected by the two half mirrors 154 and 156 in the direction of the sample SPC4 to be observed. By changing the optical path in this way, two light beams L ₃ and L ₄ whose traveling directions are opposite to each other are generated.

The two light beams L ₃ and L ₄ whose traveling directions are opposite to each other interfere to generate a standing wave between the two semi-transparent mirrors 154 and 156. Since the light intensity is zero at the position of the node of the standing wave, the amount of light applied to the sample SPC4 can be made substantially zero by arranging the sample SPC4 at the position of this node.

The two light beams L ₃ and L _{4 that} have passed through the sample travel in opposite directions as shown in FIG. Therefore, in the fourth embodiment, it is possible to form the sample image IMG4 by one light beam without shielding one of the light beams by using the beam stopper. Specifically, an image IMG4 of the sample SPC4 is formed on the observation surface by forming an image of a light beam emitted from one of the two semi-transparent mirrors 154 and 156 using the objective lens 216.

  In the case of the fourth embodiment, since the light is not shielded by the beam stopper, no asymmetry occurs in the obtained image IMG4. Therefore, the fourth embodiment is preferable to the third embodiment in that the image IMG4 accurately reflects the light transmittance distribution of the sample SPC4. On the other hand, in the fourth embodiment, the wavelength of the standing wave is half that of the light beam and the area of the node that is the dark portion is narrow, whereas in the third embodiment, the dark portion is desired by adjusting the interval of the interference fringes as appropriate. More preferable in terms of size.

In the fourth embodiment, the traveling directions of the two light beams L ₃ and L ₄ are opposite to each other, but only one of the two light beams L ₃ and L ₄ can be introduced into the objective lens 216. Good. That is, the angle formed by the two light beams L ₃ and L ₄ may be an appropriate angle larger than the aperture angle of the objective lens 216.

  FIG. 10 is a view showing an observation image of the sample by the optical microscope of the fourth embodiment. The sample to be observed is a gold thin film having a thickness of about 0.1 μm and a size of about 10 μm formed on a carbon film having a thickness of about 10 nm on a copper mesh. The sample is arranged at the position of the node of the standing wave by adjusting the position of the copper mesh. Also in the fourth embodiment, the sample image can be clearly observed as shown in FIG. Further, as described above, unlike the cases of the first and third embodiments, asymmetry does not occur in the sample image.

E. Example 5:
FIG. 11 is a schematic diagram showing a state of observation by an observation apparatus using sound waves as a fifth embodiment of the present invention. The observation apparatus of the fifth embodiment includes a sound source (not shown) and a shielding plate 160 having _two slits S ₁ and S ₂ . The sound source generates a sound wave Ψ toward the shielding plate 160 from below in FIG. At this time, the sound wave that has passed through the shielding plate 160 propagates as _two sound waves Ψ ₁ and Ψ ₂ having the slits S ₁ and S ₂ as base points, respectively. Note that the solid line in FIG. 11 represents the position where the wave phase is slit S _1, S ₂ respectively in phase (0 °), a broken line in FIG. 11 waves in phase with the slits S _1, S _2, respectively The position is the opposite phase (180 °). At the intersection of the solid line and the broken line, the sound waves Ψ ₁ and Ψ ₂ having opposite phases are superimposed, so that the sound wave intensity becomes zero.

As described above, in the region above the shielding plate 160 in FIG. 11, due to the interference of the sound waves Ψ ₁ and Ψ ₂ , the part where the intensity of the sound wave is high and the part where the intensity of the sound wave becomes zero (hereinafter referred to as “node part”). ) Occurs. Specifically, at the point where the difference in distance from the slits S ₁ and S ₂ is an even multiple of the half wavelength of the sound wave as in the point P _A , the phase difference between the sound waves Ψ ₁ and Ψ ₂ is 0 °. Therefore, the intensity of the sound wave increases. On the other hand, at points where the difference in distance from the slits S ₁ and S ₂ is an odd multiple of the opposite wavelength of the sound wave, such as points P _B and P _C , the phase difference between the sound waves Ψ ₁ and Ψ ₂ is 180 °. Therefore, the intensity of the sound wave becomes zero.

When an observation target having a size enough to scatter a sound wave is placed at a point P _B on the node, the scattered sound wave is observed at another point P _C on the node. On the other hand, by making the position of the observation target a node, it is possible to prevent the observation target from detecting the sound wave used for the observation. In this way, by measuring the composite wave (Ψ ₁₊ Ψ ₂₎ of _two sound waves at the point P _C , the presence or absence of the observation object is determined without affecting the observation object at the point P _B. Can do.

F. Example 6:
FIG. 12 is a schematic diagram showing a state of observation by an observation apparatus using radio waves as a sixth embodiment of the present invention. In the sixth embodiment, radio waves are applied to the observation target instead of the sound wave of the fifth embodiment. The observation apparatus of the sixth embodiment includes antennas A ₁ and A ₂ that generate _two radio waves Ψ ₁ and Ψ ₂ having an appropriate phase difference at the same frequency. Further, the intensity ratio between the radio waves Ψ ₁ and Ψ ₂ generated by the _two antennas A ₁ and A ₂ is appropriately adjusted so that the intensities of the radio waves Ψ ₁ and Ψ ₂ are substantially equal at the position to be observed. FIG. 12 shows an observation state when the phase difference between the radio waves Ψ ₁ and Ψ ₂ generated by the _two antennas A ₁ and A ₂ is 180 °.

If the phases of the radio waves Ψ ₁ and Ψ ₂ of the _two antennas A ₁ and A ₂ are the same as in the fifth embodiment, the position where the node is generated is determined by the spatial arrangement of the antennas A ₁ and A _2. . On the other hand, in the sixth embodiment, the point P _B becomes a node by appropriately adjusting the phase difference between the radio waves Ψ ₁ and Ψ ₂ even when the observation target is at an arbitrary position P _B. Can do. The Telecommunications [psi _1, [psi by measuring the _second composite wave at another point P _C on the node portion, to be an observation target of observation without detection radio wave to an observation target in the point P _B it can.

G. Variation:
The present invention is not limited to the above-described examples and embodiments, and can be implemented in various modes without departing from the gist thereof. For example, the following modifications are possible.

G1. Modification 1:
In each of the embodiments described above, two or three waves are applied to the observation target. However, the number of waves to be applied to the observation target can be any number greater than or equal to two. Even if it does in this way, since the intensity | strength of the wave which acts on an observation object can be set to 1/2 or less of the average intensity of the wave in the position of an observation object by interference of several waves, the influence of the wave which acts on an observation object is reduced. Can be reduced.

G2. Modification 2:
In each of the above embodiments, an electron beam, a light beam, a sound wave, and a radio wave are used as a wave to be applied to an observation target. However, if the wave has coherence, either a classical mechanical wave or a quantum mechanical wave can be used. Can also be applied to the observation apparatus and observation method of the present invention. For example, a water surface wave, an atomic wave, a neutron wave, or the like can be used. Moreover, although light rays and radio waves are used as electromagnetic waves in each of the above embodiments, the present invention can be applied to the observation apparatus and observation method of the present invention regardless of the wavelength. For example, any of γ rays, X rays, ultraviolet rays, visible rays, infrared rays, and radio waves can be used for the observation apparatus and observation method of the present invention.

The block diagram of the conventional transmission electron microscope. The figure which shows the observation image of the sample using the conventional transmission electron microscope. The block diagram of the transmission electron microscope as 1st Example of this invention. The figure which shows the image formed on an observation surface by two electron beams which permeate | transmitted the sample surface with the transmission electron microscope of 1st Example. The figure which shows the observation image of the sample by the transmission electron microscope of 1st Example. The block diagram of the electron beam prism in a 2nd Example. The block diagram of the optical microscope as 3rd Example of this invention. The figure which shows the observation image of the sample by the optical microscope of 3rd Example. The block diagram of the optical microscope as 4th Example of this invention. The figure which shows the observation image of the sample by the optical microscope of 4th Example. The schematic diagram which shows the mode of observation by the observation apparatus by the sound wave as 5th Example of this invention. The schematic diagram which shows the mode of observation by the observation apparatus by the electromagnetic wave as 6th Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100,102 ... Electron beam irradiation apparatus 104 ... Light source 110 ... Electron source 114, 116 ... Laser 120 ... Condensing lens 130, 130a ... Electron beam prism 132 ... External electrode 134, 136 ... Conductive wire 140, 150 ... Interference device 142 148: Semi-transparent mirror 144, 146 ... Mirror 152, 154, 156 ... Semi-transparent mirror 160 ... Shielding plate 200, 202, 204, 206 ... Observation section 210, 214, 216 ... Objective lens 220, 224, 226 ... Imaging device 230, 234 ... Beam stopper S ₁ , S ₂ ... Slit A ₁ , A ₂ ... Antenna

Claims (16)

An observation apparatus for observing the observation object by applying a wave to an object or field to be observed,
A plurality of waves having coherence are generated, and at this time, the intensity of the wave acting on the observation object due to the interference of the plurality of waves is set to be less than or equal to half of the average intensity of the wave at the position of the observation object. A wave source for generating the plurality of waves,
An observation unit for obtaining an observation result of the observation object by observing at least one of the plurality of waves interacting with the observation object;
An observation apparatus comprising: The observation device according to claim 1,
The observation unit includes an imaging unit that forms an image from waves that interact with the observation target. The observation device according to claim 2,
The plurality of waves have different traveling directions,
The imaging device forms an image from at least one of the plurality of waves. The observation device according to claim 3,
The wave source includes an electron source that generates one coherent electron beam, and an electron beam prism that is installed in a path of the electron beam and divides the electron beam into a plurality of electron beams having different traveling directions,
The observation unit includes an objective lens that forms an image of an electron beam that has passed through an observation target, and a beam stopper that blocks a part of the plurality of electron beams on an emission side of the objective lens. The observation device according to claim 3,
The wave source includes a laser that generates one coherent light beam, and a light beam splitting unit that is installed in a path of the light beam and divides the light beam into a plurality of light beams that travel toward the observation target along different traveling directions. Prepared,
The observation unit includes an objective lens that forms an image of a light beam that has passed through an observation target, and a beam stopper that blocks a part of the plurality of light beams on the exit side of the objective lens. The observation device according to claim 3,
The wave source includes a laser that generates a coherent beam, a beam splitter that is installed in a path of the beam and splits the beam into two beams having different traveling directions, and the observation of the split beam An observation apparatus comprising: a light beam conversion unit that reflects in a target direction and sets the traveling directions of the two divided light beams to opposite directions. The observation device according to claim 1,
The observation unit is an observation apparatus that measures a composite wave of a plurality of waves that interact with the observation target. The observation device according to claim 7,
The wave source includes a first wave source that generates a first wave, and a second wave that generates a second wave having a phase difference and an amplitude ratio set to predetermined values with respect to the first wave. An observation device comprising a wave source. An observation method for observing the observation object by applying a wave to an object or field to be observed,
(A) generating a plurality of coherent waves, causing the plurality of waves to interfere with each other and reducing the intensity of the wave acting on the observation target to be less than or equal to half the average intensity of the wave at the position of the observation target And a process of
(B) observing the observation object by observing at least one of the plurality of waves interacting with the observation object;
An observation method comprising: The observation method according to claim 9, wherein
The step (b) includes an imaging step of forming an image from a wave interacting with the observation target. The observation method according to claim 10,
The step (a) includes a step of generating a plurality of waves each having a different traveling direction as the plurality of waves.
The imaging method is an observation method in which an image is formed from at least one of the plurality of waves. The observation method according to claim 11,
The step (a) includes a step of preparing a coherent electron beam, and a step of dividing the electron beam into a plurality of electron beams having different traveling directions,
The imaging method is an observation method in which one of the plurality of electron beams transmitted through the observation target is shielded and a part of the plurality of electron beams is imaged. The observation method according to claim 11,
The step (a) includes a step of preparing a coherent parallel light beam, and a step of dividing the light beam into a plurality of light beams directed toward the observation target along different traveling directions,
The image forming step is an observation method in which a part of the plurality of light beams transmitted through the observation target is shielded and a part of the plurality of light beams is imaged. The observation method according to claim 11,
The step (a) includes preparing a coherent parallel light beam, dividing the light beam into two light beams having different traveling directions, and reflecting the divided light beam in the direction of the observation target. And a step of making the traveling directions of the two divided light beams opposite to each other. The observation method according to claim 9, wherein
The said process (b) is an observation method provided with the process of measuring the synthetic wave of the several wave which interacted with the said observation object. The observation method according to claim 15,
The step (a) is an observation method comprising a step of generating two waves whose phase difference and amplitude ratio are set to predetermined values.