JP2005092927A - Multilayer optical disk - Google Patents

Multilayer optical disk Download PDF

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JP2005092927A
JP2005092927A JP2003321847A JP2003321847A JP2005092927A JP 2005092927 A JP2005092927 A JP 2005092927A JP 2003321847 A JP2003321847 A JP 2003321847A JP 2003321847 A JP2003321847 A JP 2003321847A JP 2005092927 A JP2005092927 A JP 2005092927A
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information recording
film
recording layer
intermediate layer
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Satoshi Yamashita
智 山下
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Victor Company of Japan Ltd
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Victor Company of Japan Ltd
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<P>PROBLEM TO BE SOLVED: To provide a multilayer optical disk where each information recording layer is stably initialized. <P>SOLUTION: In the multilayer optical disk, on a reflection layer 2 provided on the surface of a substrate 1 having a groove part 1a, information recording layers 3 with phase transition material as recording material and an intermediate layer are formed in this order so that the information recording layers may not be less than two layers. On the information recording layer of the top layer, the intermediate layer is not provided. A laser beam L is made incident on a surface opposite to the surface of the substrate. Between the intermediate layer and the information recording layer positioned adjacent to the intermediate layer at a surface side on which the laser beam is made incident, a wavelength selection reflection layer 5 obtained by laminating a plurality of dielectric thin films having different refractive indexes for reflecting 10 % or more initialization laser beams having a wavelength longer than that of recording laser beams is interposed. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、相変化材料を記録材料とする複数の情報記録層を有する多層光ディスクに関するものである。   The present invention relates to a multilayer optical disc having a plurality of information recording layers using a phase change material as a recording material.

多量に情報を記録することが出来てアクセス時間も短い記録媒体として光ディスクが知られている。今日の情報社会の発達に伴って、更なる高密度記録が望まれており、例えば2002年に提案された相変化記録を用いた青色レーザ光用のBlu−ray Disc−Rewritable( 以下「BD」とも称する) においては、従来DVD−RW/RAM等で使用されていた記録再生用のレーザ光の波長が650nmから405nmに短波長化され、また対物レンズの開口率(NA)も0.6から0.85へと高NA化されると共に、新たに情報記録層を2層化する手法が追加されている。   An optical disc is known as a recording medium that can record a large amount of information and has a short access time. With the development of today's information society, higher density recording is desired. For example, Blu-ray Disc-Rewriteable (hereinafter “BD”) for blue laser light using phase change recording proposed in 2002 is desired. In other words, the wavelength of the recording / reproducing laser light conventionally used in DVD-RW / RAM is shortened from 650 nm to 405 nm, and the numerical aperture (NA) of the objective lens is 0.6. In addition to an increase in NA to 0.85, a method for newly forming two information recording layers has been added.

相変化記録を行うBDを代表とした光ディスクでは、製造工程においてスパッタ装置を用いて相変化記録膜等を積層して成膜していくが、通常、相変化記録膜は非晶質状態であり、情報を記録する際にこれを結晶化するための初期化工程を必要とする(例えば特許文献1)。
ここで情報記録層が2層以上積層されている場合には、通常は先に成膜された相変化記録膜を初期化して、引き続き後から成膜された相変化記録膜を初期化する方法がとられていた。
初期化装置には光ディスクの記録再生装置と同様にフォーカスをかけるシステムが用いられるが、初期化に用いるレーザ光は効率をあげるため、1W以上のパワーが容易に得られる800nm付近の波長のレーザ光を出力するレーザ素子が用いられる。
特開2001−250265号公報
In an optical disk typified by BD that performs phase change recording, a phase change recording film or the like is formed by laminating a film using a sputtering apparatus in the manufacturing process, but the phase change recording film is usually in an amorphous state. When recording information, an initialization process for crystallizing the information is required (for example, Patent Document 1).
Here, when two or more information recording layers are laminated, a method of usually initializing a phase change recording film formed first and subsequently initializing a phase change recording film formed later Was taken.
The initialization apparatus uses a focusing system similar to the optical disk recording / reproducing apparatus. However, in order to increase the efficiency of the laser beam used for initialization, a laser beam having a wavelength of about 800 nm can easily obtain a power of 1 W or more. Is used.
JP 2001-250265 A

ところで、上記した従来の光ディスクにあっては、初期化用レーザ光の波長が800nm近傍であるにも関わらず、400nm近傍の波長のレーザ光で記録再生するようになっていることから、波長が400nm近傍のレーザ光の透過率及び反射率が最適になるように設計がなされている。このため、半透明である第2情報記録層(レーザ光の入射側に位置する情報記録層)の初期化波長帯域の反射率が不足する場合が生じて初期化時にフォーカスが外れてしまい、初期化が安定的に出来ない、といった問題があった。   By the way, in the conventional optical disc described above, the wavelength of the laser beam for initialization is recorded / reproduced with a laser beam having a wavelength near 400 nm, even though the wavelength of the laser beam for initialization is near 800 nm. It is designed so that the transmittance and reflectance of laser light in the vicinity of 400 nm are optimized. For this reason, the reflectance in the initialization wavelength band of the semi-transparent second information recording layer (information recording layer located on the laser beam incident side) may be insufficient, and the focus may be lost during initialization. There was a problem that it could not be stabilized.

また情報記録層を多数積層する場合には、各情報記録層の反射率が低くなり、従来の初期化装置ではよりフォーカスが不安定になってしまう、という問題もあった。
本発明は、以上のような問題点に着目し、これを有効に解決すべく創案されたものである。本発明の目的は、中間層と情報記録層との間に波長選択反射層を介在させることにより、各情報記録層の初期化を安定的に行うことが可能な多層光ディスクを提供することにある。
Further, when a large number of information recording layers are stacked, the reflectance of each information recording layer is lowered, and there is a problem that the focus becomes more unstable in the conventional initialization apparatus.
The present invention has been devised to pay attention to the above problems and to effectively solve them. An object of the present invention is to provide a multilayer optical disc in which initialization of each information recording layer can be performed stably by interposing a wavelength selective reflection layer between the intermediate layer and the information recording layer. .

本発明は、グルーブ部を有する基板の表面に設けた反射層上に、相変化材料を記録材料とする情報記録層と、中間層とをこの順序で前記情報記録層が少なくとも2層以上となるように形成してなると共に最上層の情報記録層に対しては中間層を設けないようにし、前記基板の表面とは反対側の面よりレーザ光を入射するように構成した多層光ディスクにおいて、前記中間層と、該中間層に対して前記レーザ光が入射する面側に隣り合って位置する情報記録層との間に、記録用レーザ光よりも波長が長い初期化用レーザ光を少なくとも10%以上反射するために、屈折率が異なる誘電体の薄膜を複数積層してなる波長選択反射層を介在させるように構成したことを特徴とする多層光ディスクである。   According to the present invention, an information recording layer using a phase change material as a recording material and an intermediate layer are arranged in this order on the reflective layer provided on the surface of the substrate having a groove portion, so that the information recording layer is at least two layers or more. In the multilayer optical disc that is formed in such a manner that an intermediate layer is not provided for the uppermost information recording layer, and a laser beam is incident from a surface opposite to the surface of the substrate. At least 10% of initialization laser light having a wavelength longer than that of the recording laser light is present between the intermediate layer and the information recording layer positioned adjacent to the surface on which the laser light is incident on the intermediate layer. In order to reflect the above, a multilayer optical disc characterized by comprising a wavelength selective reflection layer formed by laminating a plurality of dielectric thin films having different refractive indexes.

本発明の多層光ディスクによれば、中間層と、この中間層に対してレーザ光の入射側に位置する情報記録層との間に波長選択反射層を設けるようにして初期化用のレーザ光に対する反射率を高くしたので、各情報記録層の初期化を安定して行うことができる。   According to the multilayer optical disk of the present invention, the wavelength selective reflection layer is provided between the intermediate layer and the information recording layer located on the laser beam incident side with respect to the intermediate layer, and the initialization laser beam is protected. Since the reflectance is increased, each information recording layer can be stably initialized.

以下に、本発明に係る多層光ディスクの一実施例を添付図面に基づいて詳述する。
図1は本発明の多層光ディスクの第1実施例を示す部分拡大断面図、図2は本発明の多層光ディスクの第2実施例を示す部分拡大断面図である。
図示するように、本発明に係る多層光ディスクD1は、その表面にトラッキングを行うための溝状のグルーブ部1aが形成された基板1を有している。そして、この基板1のグルーブ部1aが形成されている面の全表面に例えば金属膜よりなる反射層2が形成されている。
Hereinafter, an embodiment of a multilayer optical disc according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a partially enlarged sectional view showing a first embodiment of the multilayer optical disc of the present invention, and FIG. 2 is a partially enlarged sectional view showing a second embodiment of the multilayer optical disc of the present invention.
As shown in the drawing, a multilayer optical disc D1 according to the present invention has a substrate 1 on which a groove-like groove portion 1a for tracking is formed. A reflective layer 2 made of, for example, a metal film is formed on the entire surface of the substrate 1 on which the groove portion 1a is formed.

そして、この基板1の反射層2上に、第1情報記録層3、第1中間層4、第1波長選択反射層5、第2情報記録層6及び記録再生用のレーザ光Lを透過する透明カバー層7からなり、この順に順次積層して形成されている。レーザ光Lは、上記透明カバー層7側から照射して入射される。上記第1情報記録層3は上記基板1側から第1下部保護膜3a、第1相変化記録膜3b、第1上部保護膜3cからなる。また第2情報記録層6は第2下部保護膜6a、第2相変化記録膜6b、第2上部保護膜6cからなっている。また図2に示す第2実施例のように第1中間層4と上記第2情報記録層6との間に熱伝導度が高いヒートシンク層8を設けても良い。   Then, the first information recording layer 3, the first intermediate layer 4, the first wavelength selective reflection layer 5, the second information recording layer 6, and the recording / reproducing laser beam L are transmitted through the reflective layer 2 of the substrate 1. It consists of a transparent cover layer 7 and is formed by sequentially laminating in this order. The laser beam L is irradiated and incident from the transparent cover layer 7 side. The first information recording layer 3 includes a first lower protective film 3a, a first phase change recording film 3b, and a first upper protective film 3c from the substrate 1 side. The second information recording layer 6 includes a second lower protective film 6a, a second phase change recording film 6b, and a second upper protective film 6c. Further, a heat sink layer 8 having a high thermal conductivity may be provided between the first intermediate layer 4 and the second information recording layer 6 as in the second embodiment shown in FIG.

上記基板1は、コスト的に有利なポリカーボネイト樹脂、アクリル樹脂、ポリフェニレンエーテル樹脂、ポリブチレンテレフタレート樹脂、ポリオレフイン樹脂等で射出成形もしくは射出圧縮成形で形成される方が望ましい。中でも光ディスクで実績が高いポリカーボネイト樹脂を用いることが望ましい。またこの基板1は、ガラス板上に紫外線硬化樹脂で形成したグルーブ部1aを設けるようにしてもよい。
上記反射層2は、例えばAg、Al系合金からなる金属反射膜により形成できる。また上記第1情報記録層3は、例えばGe−Sb−Te、Ag−In−Sb−Te等のSbを含んだ第1相変化記録膜3bの上下にZnS−SiO 、SiN、AlN、AlO等の誘電体からなる第1下部保護膜3a及び第1上部保護膜3cから構成される。
The substrate 1 is preferably formed by injection molding or injection compression molding using a polycarbonate resin, an acrylic resin, a polyphenylene ether resin, a polybutylene terephthalate resin, a polyolefin resin, or the like, which is advantageous in terms of cost. In particular, it is desirable to use polycarbonate resin, which has a proven record in optical disks. Further, the substrate 1 may be provided with a groove portion 1a formed of an ultraviolet curable resin on a glass plate.
The reflection layer 2 can be formed of a metal reflection film made of, for example, Ag or an Al alloy. The first information recording layer 3 has ZnS—SiO 2 , SiN, AlN, AlO on and under the first phase change recording film 3 b containing Sb such as Ge—Sb—Te, Ag—In—Sb—Te, for example. The first lower protective film 3a and the first upper protective film 3c made of a dielectric material such as

上記第1情報記録層3の初期化は、第1中間層4が形成される以前のこの段階か、第1中間層4が形成された後のどちらで初期化しても構わない。
上記第1中間層4は、第1情報記録層3の記録再生用のレーザ光の波長λ1を望ましくは80%以上透過する紫外線硬化樹脂により形成する。具体的には、この樹脂をスピンコートで塗布し、透明もしくは半透明の石英等のスタンパにて、第2情報記録層6の案内溝となるグルーブ部1bを2P法で形成し、スタンパ越しに紫外線を照射し、第1中間層4を硬化させて形成した後に、スタンパを剥離する。
The initialization of the first information recording layer 3 may be performed at this stage before the first intermediate layer 4 is formed or after the first intermediate layer 4 is formed.
The first intermediate layer 4 is formed of an ultraviolet curable resin that preferably transmits 80% or more of the wavelength λ1 of the recording / reproducing laser beam of the first information recording layer 3. Specifically, this resin is applied by spin coating, and a groove portion 1b serving as a guide groove of the second information recording layer 6 is formed by a 2P method with a stamper such as transparent or translucent quartz. After forming the first intermediate layer 4 by irradiating with ultraviolet rays, the stamper is peeled off.

ここで2層以上の情報記録層を持つ従来の多層光ディスクの場合には、次に第2情報記録層6を形成するが、本発明では第2情報記録層6を形成する前に第1波長選択反射層5を形成する。この波長選択反射層5は、屈折率が異なる誘電体の薄膜を複数層積層して形成される。具体的には、波長選択反射層5は、消衰係数が0.1より小さく且つ屈折率nが相対的に大きい第1の誘電体よりなる薄膜5aと、消衰係数が0.1より小さく且つ屈折率nが上記第1の誘電体より小さい第2の誘電体よりなる薄膜5bとを所定の厚みで積層することで得ることが出来る。具体的な代表例として、TiO、ZnS−SiO 、SiN、SiO、AlN、MgF等を用い、反射率を大きくしたい波長λxの屈折率をnxとして、 膜厚はλx/(4×nx)の関係で求めて、全体で2層以上繰り返し形成するこ とで実現可能である。すなわち、上記誘電体の薄膜が3層以上積層して形成される場合もある。図示例では代表として2層の場合を記載している。
尚、ここで上記膜厚(λx/(4×nx))に関しては、図3のように示され るフォーカス時のS字カーブ特性において第1及び第2情報記録層3、6の区別ができるようにするために各膜厚の誤差範囲は±20%、好ましくは±10%以内がよい。
Here, in the case of a conventional multilayer optical disc having two or more information recording layers, the second information recording layer 6 is formed next. In the present invention, the first wavelength is formed before the second information recording layer 6 is formed. The selective reflection layer 5 is formed. The wavelength selective reflection layer 5 is formed by laminating a plurality of dielectric thin films having different refractive indexes. Specifically, the wavelength selective reflection layer 5 includes a thin film 5a made of a first dielectric having an extinction coefficient smaller than 0.1 and a relatively high refractive index n, and an extinction coefficient smaller than 0.1. In addition, it can be obtained by laminating a thin film 5b made of a second dielectric having a refractive index n smaller than the first dielectric with a predetermined thickness. As a specific representative example, TiO, ZnS—SiO 2 , SiN, SiO, AlN, MgF, etc. are used, and the refractive index of the wavelength λx to increase the reflectance is nx, and the film thickness is λx / (4 × nx). It can be realized by repeatedly forming two or more layers as a whole by obtaining the relationship. That is, the dielectric thin film may be formed by stacking three or more layers. In the illustrated example, the case of two layers is described as a representative.
Here, regarding the film thickness (λx / (4 × nx)), the first and second information recording layers 3 and 6 can be distinguished in the S-curve characteristic at the time of focusing as shown in FIG. Therefore, the error range of each film thickness is within ± 20%, preferably within ± 10%.

第2情報記録層6は、ZnS−SiO 、SiN、AlN、AlO等の誘電体からなる第2下部保護膜6a、Ge−Sb−Te、Ag−In−Sb−Te等のSbを含んだ第2相変化記録膜6b、ZnS−SiO 、SiN、AlN、AlO等の誘電体からなる第2上部保護層6cからなり、第1情報記録層3の記録再生のために記録再生用のレーザ光の波長λ1を40%以上透過する必要があるた め、消衰係数が1以上の第2相変化記録膜6bの厚さは10nm以下が望ましい。
また記録時の熱を拡散する目的でAg、Al系合金からなる金属製のヒートシンク層8(図2参照) を、透過率40%以上を確保する範囲の厚さ、すなわち1 0nm以下で形成するようにしてもよい。
The second information recording layer 6 includes a second lower protective film 6a made of a dielectric material such as ZnS—SiO 2 , SiN, AlN, AlO, or Sb such as Ge—Sb—Te, Ag—In—Sb—Te, or the like. the second phase change recording film 6b, ZnS-SiO 2, SiN , AlN, consists second upper protective layer 6c made of a dielectric material such as AlO, laser for recording and reproduction for the recording and reproduction of the first information recording layer 3 Since it is necessary to transmit the light wavelength λ1 by 40% or more, the thickness of the second phase change recording film 6b having an extinction coefficient of 1 or more is desirably 10 nm or less.
Further, for the purpose of diffusing heat at the time of recording, a metal heat sink layer 8 (see FIG. 2) made of an Ag or Al alloy is formed with a thickness within a range that ensures a transmittance of 40% or more, that is, 10 nm or less. You may do it.

第2情報記録層6の初期化は透明カバー層7が形成される以前のこの段階か、透明カバー層7が形成された後のどちらで初期化しても構わない。透明カバー層7は、紫外線硬化樹脂をスピンコートで塗布し、この上に所定の厚さの透明ポリカーボネイトシートを貼り付け、その後、紫外線光を照射して硬化させることにより形成しても良いし、紫外線硬化樹脂を所定の厚さで塗布して紫外線光を照射して硬化させることにより形成しても良い。   The initialization of the second information recording layer 6 may be performed at this stage before the transparent cover layer 7 is formed or after the transparent cover layer 7 is formed. The transparent cover layer 7 may be formed by applying an ultraviolet curable resin by spin coating, attaching a transparent polycarbonate sheet having a predetermined thickness thereon, and then irradiating and curing with ultraviolet light. You may form by apply | coating an ultraviolet curable resin by predetermined thickness and irradiating an ultraviolet light and making it harden | cure.

半透明で第1情報記録層3の記録再生用のレーザ光(波長λ1)を例えば40%以上透過する第2情報記録層6と、第1中間層4との間に屈折率が異なる誘電体膜を積層してなる第1波長選択反射層5を形成することで、情報の記録再生に用いる波長が例えば400nm近傍のレーザ光に対しては低反射で透過率が高く、初期化に用いる波長が例えば800nm近傍のレーザ光に対しては反射率を高くすることができ、従って、トラッキング等を安定して行うことができるので、各情報記録層3、6を安定的に初期化することができる。この場合、上記した情報記録層が3層以上になっても、中間層と情報記録層との間に上記したような波長選択反射層をそれぞれ設けることにより、各情報記録層の初期化を安定的に行うことができる。   A dielectric having a different refractive index between the first intermediate layer 4 and the second information recording layer 6 that is translucent and transmits, for example, 40% or more of the recording / reproducing laser beam (wavelength λ1) of the first information recording layer 3 By forming the first wavelength selective reflection layer 5 formed by laminating the films, the wavelength used for information recording / reproduction is low reflection and high transmittance for laser light having a wavelength of, for example, around 400 nm, and the wavelength used for initialization. However, for example, the reflectivity can be increased for laser light in the vicinity of 800 nm, and thus tracking and the like can be performed stably, so that the information recording layers 3 and 6 can be initialized stably. it can. In this case, even if there are three or more information recording layers, the initialization of each information recording layer can be stabilized by providing the wavelength selective reflection layer as described above between the intermediate layer and the information recording layer. Can be done automatically.

次に上記したような多層光ディスクの実施例を実際に作製して評価を行ったので、その評価結果について説明する。尚、併せて比較例についても説明する。   Next, an example of the multilayer optical disc as described above was actually produced and evaluated, and the evaluation result will be described. A comparative example will also be described.

<実施例1:2層情報記録層構造>
ピッチが0.32μmで深さが23nmのグルーブを有する厚さ1.1mmのポリカーボネイト製の基板1上に反射層2及び第1情報記録層3の各薄膜3a、3b、3cをスパッタにて成膜した。ここで第1下部保護膜3a、第1上部保護膜3cはそれぞれZnS−SiO を用い、反射層2にはAg系合金を用い、第1相変化記録膜3bにはGeSbTeを用い、波長400nmでの反射率が初期化後において約20%になるように各層の膜厚を決定した。具体的には、反射層2が150nm、第1下部保護膜3aが10nm、第1相変化記録膜3bが15nm、第1上部保護膜3cが40nmである。
<Example 1: Two-layer information recording layer structure>
The thin films 3a, 3b, and 3c of the reflective layer 2 and the first information recording layer 3 are formed by sputtering on a 1.1 mm thick polycarbonate substrate 1 having a pitch of 0.32 μm and a depth of 23 nm. Filmed. Here, the first lower protective film 3a and the first upper protective film 3c are each made of ZnS—SiO 2 , the reflective layer 2 is made of an Ag-based alloy, the first phase change recording film 3b is made of GeSbTe, and has a wavelength of 400 nm. The film thickness of each layer was determined so that the reflectivity at 10 was about 20% after initialization. Specifically, the reflective layer 2 is 150 nm, the first lower protective film 3a is 10 nm, the first phase change recording film 3b is 15 nm, and the first upper protective film 3c is 40 nm.

第1情報記録層3は第1中間層4を形成する前に810nmの波長のレーザ光を用いてシバソク製LK201(商品名)で初期化を行った。この時のレーザパワーは400mW、線速は4m/secである。
その後、第1中間層4を形成するために、紫外線硬化樹脂(大日本インキ(株)製EX8210(商品名))をスピンコートにて塗布し、第2情報記録層6のトラック案内溝であるグルーブ部が形成された石英スタンパを厚みが20μmで均一になるように所定の圧力で押し当て、石英スタンパ側より紫外線光を照射して硬化させた。これにより、第1中間層4を形成した。
Before forming the first intermediate layer 4, the first information recording layer 3 was initialized with LK201 (trade name) manufactured by Shiba-Soku using a laser beam having a wavelength of 810 nm. The laser power at this time is 400 mW, and the linear velocity is 4 m / sec.
Thereafter, in order to form the first intermediate layer 4, an ultraviolet curable resin (EX8210 (trade name) manufactured by Dainippon Ink Co., Ltd.) is applied by spin coating, and the track guide groove of the second information recording layer 6 is formed. The quartz stamper on which the groove portion was formed was pressed at a predetermined pressure so as to be uniform with a thickness of 20 μm, and cured by irradiating ultraviolet light from the quartz stamper side. Thereby, the first intermediate layer 4 was formed.

引き続きスパッタ装置にて第1波長選択反射層5と第2情報記録層6を順次成膜した。この第1波長選択反射層5は、初期化に用いるレーザ光の波長λi=8 10nmで屈折率n1が2.1、消衰係数k1が0.0005のZnS−SiO 膜と、初期化に用いるレーザ光の波長810nmで屈折率n2が1.6、消衰係数k2が0.0005のSiN膜とを用い、ZnS−SiO 膜の膜厚をλi /(4×n1)=96nm、SiN膜の膜厚を同様に126nm(λi/(4× n2))として、ZnS−SiO 膜、SiN膜、ZnS−SiO 膜の順に3層構造で第1波長選択反射層5を形成した。 Subsequently, the first wavelength selective reflection layer 5 and the second information recording layer 6 were sequentially formed by a sputtering apparatus. The first wavelength selective reflection layer 5 includes a ZnS-SiO 2 film having a wavelength λi = 810 nm of a laser beam used for initialization, a refractive index n1 of 2.1, and an extinction coefficient k1 of 0.0005. A SiN film having a refractive index n2 of 1.6 and an extinction coefficient k2 of 0.0005 is used, and the film thickness of the ZnS-SiO 2 film is λi / (4 × n1) = 96 nm, SiN. Similarly, the film thickness was 126 nm (λi / (4 × n2)), and the first wavelength selective reflection layer 5 was formed in a three-layer structure in the order of ZnS—SiO 2 film, SiN film, and ZnS—SiO 2 film.

次に、金属製のヒートシンク層8をAg系合金で厚さ7nmで形成し、次に、第2情報記録層6として、第2下部保護膜6aをZnS−SiO にて厚さ12nm、第2相変化記録膜6bをGeSbTeにて厚さ5nm、第2上部保護膜6cをZnS−SiO にて厚さ50nmそれぞれ成膜した。
最後に紫外線硬化樹脂(大日本インキ(株)製EX8210(商品名))をスピンコートにて厚さが80μmになるように塗布し、紫外線光で硬化させて透明カバー層7を形成した。
この状態で日立コンピュータ製のPOP−120SE(商品名)を用い、第2情報記録膜6の初期化を行った(レーザ光の波長:810nm)。第2情報記録膜6の初期化はフォーカスもかかり、問題なく行えることが確認できた。
Next, a metal heat sink layer 8 is formed of an Ag-based alloy with a thickness of 7 nm. Next, as the second information recording layer 6, a second lower protective film 6a is formed of ZnS—SiO 2 with a thickness of 12 nm. The two-phase change recording film 6b was formed of GeSbTe with a thickness of 5 nm, and the second upper protective film 6c was formed of ZnS—SiO 2 with a thickness of 50 nm.
Finally, an ultraviolet curable resin (Dai Nippon Ink Co., Ltd. EX8210 (trade name)) was applied by spin coating to a thickness of 80 μm and cured with ultraviolet light to form a transparent cover layer 7.
In this state, POP-120SE (trade name) manufactured by Hitachi Computer was used to initialize the second information recording film 6 (laser wavelength: 810 nm). It was confirmed that the initialization of the second information recording film 6 was focused and could be performed without any problem.

この実施例1の多層光ディスクを記録再生用のレーザ光(波長:405nm)を用いたシバソク製ディスク評価機LM330A(商品名)にて第1情報記録層3、第2情報記録層6に、線速度5.28m/sにて、それぞれ1−7変調の信号を記録した結果、それぞれ10%以下のジッタを得ることができ、良好な結果が得られた。   The multilayer optical disk of Example 1 was applied to the first information recording layer 3 and the second information recording layer 6 by using a disk evaluation machine LM330A (trade name) manufactured by Shibasoku using a laser beam for recording and reproduction (wavelength: 405 nm). As a result of recording 1-7 modulation signals at a speed of 5.28 m / s, a jitter of 10% or less was obtained, respectively, and good results were obtained.

<比較例1>
実施例1と同様な工程で、第1波長選択反射層5をZnS−SiO 膜(膜厚:90nm)のみで製作したところ、第2情報記録層6の初期化においてフォーカスが不安定になり初期化が満足に行えなかった。この点について図4を参照して説明する。図4は実施例1と比較例1のレーザ光の波長に対する透過率の関係を示すグラフである。図4(A)は比較例1のグラフを示し、図4(B)は実施例1のグラフを示す。図示するように初期化用のレーザ光の波長810nm近傍において、図4(A)に示す比較例1の場合は反射率は6%程度で非常に低いのに対して、図4(B)に示す実施例1の場合には反射率は14〜15%程度に上昇しており、良好な結果が得られることが確認できた。
<Comparative Example 1>
When the first wavelength selective reflection layer 5 is manufactured by using only a ZnS-SiO 2 film (film thickness: 90 nm) in the same process as in the first embodiment, the focus becomes unstable when the second information recording layer 6 is initialized. Initialization was not satisfactory. This point will be described with reference to FIG. FIG. 4 is a graph showing the relationship of the transmittance with respect to the wavelength of the laser light of Example 1 and Comparative Example 1. 4A shows a graph of Comparative Example 1, and FIG. 4B shows a graph of Example 1. FIG. As shown in the figure, in the vicinity of the wavelength of 810 nm of the laser beam for initialization, in the case of the comparative example 1 shown in FIG. 4A, the reflectance is about 6%, which is very low, whereas in FIG. In the case of Example 1 shown, the reflectance increased to about 14 to 15%, and it was confirmed that good results were obtained.

<実施例2:3層情報記録層構造>
第2情報記録層6の形成までは、実施例1と全く同様に作製した。そして、作製した第2情報記録層6に対して日立コンピュータ製POP−120SE(商品名)を用い、レーザパワー600mW、線速4m/sで第2情報記録層6の初期化を行った(レーザ光の波長:810nm)。
その後、第2中間層(図示せず)を形成するために紫外線硬化樹脂(大日本イ ンキ(株)製EX8210(商品名))をスピンコートにて塗布し、第3情報記録層(図示せず)のトラック案内溝であるグルーブ部が形成された石英スタンパ を厚みが20μmで均一になるように所定の圧力で押し当て、石英スタンパ側より紫外線光を照射して硬化させた。これにより第2中間層(図示せず)を形成した。
<Example 2: Three-layer information recording layer structure>
The same processes as in Example 1 were performed until the formation of the second information recording layer 6. Then, POP-120SE (trade name) manufactured by Hitachi Computer was used for the produced second information recording layer 6 to initialize the second information recording layer 6 at a laser power of 600 mW and a linear velocity of 4 m / s (laser). Light wavelength: 810 nm).
Thereafter, in order to form a second intermediate layer (not shown), an ultraviolet curable resin (EX8210 (trade name) manufactured by Dainippon Ink Co., Ltd.) is applied by spin coating, and a third information recording layer (not shown) is formed. The quartz stamper on which the groove portion, which is a track guide groove, was formed, was pressed with a predetermined pressure so as to be uniform with a thickness of 20 μm, and cured by irradiating with ultraviolet light from the quartz stamper side. As a result, a second intermediate layer (not shown) was formed.

次に、第2波長選択反射層(図示せず)を形成した。この第2波長選択反射層 は、初期化に用いるレーザ光の波長λi=810nmで屈折率n1が2.1、消 衰係数k1が0.0005のZnS−SiO 膜と、初期化に用いるレーザ光の波長810nmで屈折率n2が1.6、消衰係数k2が0.0005のSiN膜を用い、ZnS−SiO 膜の膜厚をλi/(4×n1)=96nm、SiN膜 の膜厚を同様に126nmとして、ZnS−SiO 膜、SiN膜、ZnS−SiO 膜の順に3層構造で形成した。 Next, a second wavelength selective reflection layer (not shown) was formed. This second wavelength selective reflection layer includes a ZnS—SiO 2 film having a wavelength λi = 810 nm of a laser beam used for initialization, a refractive index n1 of 2.1, an extinction coefficient k1 of 0.0005, and a laser used for initialization. A SiN film having a light wavelength of 810 nm and a refractive index n2 of 1.6 and an extinction coefficient k2 of 0.0005 is used. The film thickness of the ZnS—SiO 2 film is λi / (4 × n1) = 96 nm. Similarly, the thickness was 126 nm, and a ZnS—SiO 2 film, a SiN film, and a ZnS—SiO 2 film were formed in this order in a three-layer structure.

次に、金属製のヒートシンク層をAg系合金で厚さ7nmで形成し、その後、第3情報記録層(図示せず)を形成した。この第3情報記録層は、第3下部保護膜をZnS−SiO 膜にて厚さ12nm、第3相変化記録膜をGeSbTe膜にて厚さ5nm、第3上部保護膜をZnS−SiO 膜にて厚さ50nmでそれぞれ成膜することにより形成した。最後に紫外線硬化樹脂(大日本インキ(株)製EX8210(商品名))をスピンコートにて厚さが60μmになるように塗布し、紫外線光で硬化させて透明カバー層7を形成した。このようにして、3層の情報記録層を有する多層光ディスクを作製した。 Next, a metal heat sink layer was formed of an Ag-based alloy with a thickness of 7 nm, and then a third information recording layer (not shown) was formed. In the third information recording layer, the third lower protective film is a ZnS-SiO 2 film with a thickness of 12 nm, the third phase change recording film is a GeSbTe film with a thickness of 5 nm, and the third upper protective film is a ZnS-SiO 2 film. Each film was formed to a thickness of 50 nm. Finally, an ultraviolet curable resin (Dai Nippon Ink Co., Ltd. EX8210 (trade name)) was applied by spin coating so as to have a thickness of 60 μm, and cured with ultraviolet light to form the transparent cover layer 7. Thus, a multilayer optical disc having three information recording layers was produced.

次に、上記第2実施例の多層光ディスクに対して日立コンピュータ製POP−120SE(商品名)を用い、レーザパワー600mW、線速4m/sで第3情報記録層の初期化を行った(レーザ光の波長:810nm)。
本実施例2の多層光ディスクを記録再生用のレーザ光の波長が405nmを用いたシバソク製ディスク評価機LM330A(商品名)にて第3情報記録層(図 示せず)を、線速度5.28m/sにて、それぞれに1−7変調の信号を記録し た結果、それぞれ12%以下のジッタを得ることができた。また第1情報記録層3及び第2情報記録層6についても4MHzでのC/Nにおいて35dB以上となる良好な結果が得られることが確認できた。
Next, POP-120SE (trade name) manufactured by Hitachi Computer was used for the multilayer optical disk of the second embodiment, and the third information recording layer was initialized at a laser power of 600 mW and a linear velocity of 4 m / s (laser). Light wavelength: 810 nm).
The third information recording layer (not shown) was applied to the multi-layer optical disk of Example 2 with a disk evaluation machine LM330A (trade name) manufactured by Shibaoku Co., Ltd. using a recording / reproducing laser beam wavelength of 405 nm. As a result of recording 1-7 modulation signals at / s, jitter of 12% or less was obtained. It was also confirmed that the first information recording layer 3 and the second information recording layer 6 were able to obtain good results of 35 dB or more in C / N at 4 MHz.

このように、本発明の多層光ディスクの構造が層数にとらわれず何層でも実現可能であることを示している。
尚、上記各層、或いは各薄膜の材質は、単に一例を示したに過ぎず、これに限定されないのは勿論である。
Thus, it is shown that the structure of the multilayer optical disc of the present invention can be realized with any number of layers regardless of the number of layers.
In addition, the material of each said layer or each thin film is only an example, and of course is not limited to this.

本発明の多層光ディスクの第1実施例を示す部分拡大断面図である。It is a partial expanded sectional view which shows 1st Example of the multilayer optical disk of this invention. 本発明の多層光ディスクの第2実施例を示す部分拡大断面図である。It is a partial expanded sectional view which shows 2nd Example of the multilayer optical disk of this invention. フォーカス時のS字カーブ特性の一例を示すグラフである。It is a graph which shows an example of the S-shaped curve characteristic at the time of a focus. 実施例1と比較例1のレーザ光の波長に対する透過率の関係を示すグラフである。It is a graph which shows the relationship of the transmittance | permeability with respect to the wavelength of the laser beam of Example 1 and Comparative Example 1.

符号の説明Explanation of symbols

1…基板、1a…グルーブ部、2…反射層、3…第1情報記録層、4…第1中間層、5…第1波長選択反射層、6…第2情報記録層、7…透明カバー層、8…ヒートシンク層、D1…多層光ディスク、L…レーザ光。

DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 1a ... Groove part, 2 ... Reflection layer, 3 ... 1st information recording layer, 4 ... 1st intermediate | middle layer, 5 ... 1st wavelength selective reflection layer, 6 ... 2nd information recording layer, 7 ... Transparent cover Layer 8 heat sink layer D1 multilayer optical disk L laser light

Claims (1)

グルーブ部を有する基板の表面に設けた反射層上に、相変化材料を記録材料とする情報記録層と、中間層とをこの順序で前記情報記録層が少なくとも2層以上となるように形成してなると共に最上層の情報記録層に対しては中間層を設けないようにし、前記基板の表面とは反対側の面よりレーザ光を入射するように構成した多層光ディスクにおいて、
前記中間層と、該中間層に対して前記レーザ光が入射する面側に隣り合って位置する情報記録層との間に、記録用レーザ光よりも波長が長い初期化用レーザ光を少なくとも10%以上反射するために、屈折率が異なる誘電体の薄膜を複数積層してなる波長選択反射層を介在させるように構成したことを特徴とする多層光ディスク。

An information recording layer using a phase change material as a recording material and an intermediate layer are formed in this order on the reflective layer provided on the surface of the substrate having a groove portion so that the information recording layer is at least two layers or more. In the multilayer optical disc constructed so that the intermediate layer is not provided for the uppermost information recording layer and the laser beam is incident from the surface opposite to the surface of the substrate,
At least 10 initialization laser light having a wavelength longer than that of the recording laser light is provided between the intermediate layer and the information recording layer positioned adjacent to the surface on which the laser light is incident on the intermediate layer. A multilayer optical disk comprising a wavelength selective reflection layer formed by laminating a plurality of dielectric thin films having different refractive indexes so as to reflect at least%.

JP2003321847A 2003-09-12 2003-09-12 Multilayer optical disk Pending JP2005092927A (en)

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JP2007004918A (en) * 2005-06-24 2007-01-11 Sony Corp Optical recording medium and its initialization method
WO2010026744A1 (en) * 2008-09-05 2010-03-11 パナソニック株式会社 Information recording medium initialization method, information recording medium initialization device, and information recording medium
JP2010218646A (en) * 2009-03-18 2010-09-30 Nec Corp Optical information recording medium and method of manufacturing the same

Cited By (7)

* Cited by examiner, † Cited by third party
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JP2007004918A (en) * 2005-06-24 2007-01-11 Sony Corp Optical recording medium and its initialization method
JP4517954B2 (en) * 2005-06-24 2010-08-04 ソニー株式会社 Initializing method of optical recording medium
WO2010026744A1 (en) * 2008-09-05 2010-03-11 パナソニック株式会社 Information recording medium initialization method, information recording medium initialization device, and information recording medium
CN102067217A (en) * 2008-09-05 2011-05-18 松下电器产业株式会社 Information recording medium initialization method, information recording medium initialization device, and information recording medium
US8040765B2 (en) 2008-09-05 2011-10-18 Panasonic Corporation Initialization method for information recording medium, initialization apparatus for information recording medium, and information recording medium
CN102067217B (en) * 2008-09-05 2013-09-25 松下电器产业株式会社 Information recording medium initialization method, information recording medium initialization device, and information recording medium
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