JP2005083415A - Fluid spring unit and vibration-free device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid spring unit capable of being in a simple structure with fewer components, being simple for assembling, and preventing leakage of fluid from a connecting portion. <P>SOLUTION: The fluid spring unit has an approximately disk-shaped body 10, and a pair of sandwiching plates 40 and 50 being opposite each other so as to sandwich the fluid spring body. A sealing structure of a connecting portion between base plate portions 41 and 51 and a side trunk 13 is improved on the fluid spring unit. The fluid spring unit comprises ring-shaped metal rings 25 and 35 substantially buried into elastic bases 21 and 31, and ring-shaped elastic seal members 27 and 37 extending toward an inward direction. The fluid spring body and the pair of the sandwiching plates are integrated only by being fitted to the center opening part of the fluid spring body. The side fitted to a fitting and projection part is urged by the ring-shaped elastic seal member of the fixing base part. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a fluid spring unit mainly used for vibration isolation and a vibration isolation device incorporating the fluid spring unit.

Japanese Patent Laid-Open No. 10-205578 JP-A-10-220529 Japanese Patent Laid-Open No. 50-64654

  2. Description of the Related Art Conventionally, for example, when a memory or an IC is manufactured in a semiconductor manufacturing apparatus, a stepper including a printing apparatus that applies a photographic technique to a circuit on a wafer substrate is used. In actual use of the stepper, it is necessary to move the wafer substrate and the baking apparatus to a predetermined position quickly and accurately in order to increase the production efficiency. However, the more agile moving and stopping is, the more inevitably the stepper has the problem of vibration. In particular, in today's specifications where high integration of ICs is required, even if micro-vibration is not completely removed, circuit lines may be doubled or shorted (circuit doubles). ) Occurs. In order to solve such problems, various proposals have been made for a vibration isolation table device that removes fine vibrations of a stepper.

  Conventionally, various air spring units (air springs) have been used in the vibration isolation table device in order to exhibit a vibration isolation function.

  An example of a conventional air spring for vibration isolation is an air spring unit 100 as shown in FIG. In this figure, an air spring unit 100 includes a substantially disc-shaped fluid spring body 110 (usually composed of a rubber material with a base fabric) that functions when air is stored therein, and a fluid spring body in the drawing. 110, a set of a base plate 140 and a fixing plate 160 for fixing the upper side of 110, and a set of a base plate 150 and a fixing plate 170 for fixing the lower side of the fluid spring body 110. ing.

  That is, the fluid spring main body 110 includes openings at the upper and lower centers thereof, and includes a fixing flange 111 at the inner peripheral edge of the opening. The flange 111 is locked and part of the seal mechanism. As a result, the air spring unit 100 is sandwiched and integrated by the combination of the base plate 140 and the fixed plate 160 and the combination of the base plate 150 and the fixed plate 170 so as to sandwich the opening of the air spring unit 100.

  In such clamping and integration, tightening and integration with bolts 191 and 195 is performed as shown in the figure. In addition, when sandwiching and integrating the combination of the base plate 150 and the fixing plate 170 located on the lower side of the drawing, a specific tightening state with bolts is not drawn, but the fluid spring body 110 communicates. Since there is the fluid passage 210, for example, the bolts are arranged at the positions indicated by the symbols (A) and (B).

  However, the conventionally proposed air spring has a large number of parts, resulting in a high cost, and there is a problem that much time is required for assembly for the same reason.

  Also, due to the large number of parts, there may be a problem of fluid leakage when the dimensional accuracy of some parts is not achieved, or depending on the skill level of assembly (for example, the bolt tightening of members). There is. A large number of parts means that there are many leakable parts, and an extra O-ring arrangement is required. Furthermore, it is difficult to guarantee a long-term leak-free condition with bolt tightening (for example, the symbol in FIG. 6). The tightening at the position (a) is far from the position of the flange 111, and the sealing function by the tightening works in a disadvantageous direction).

  In particular, the occurrence of leakage causes the vibration isolation capability of the vibration isolation table device and distortion of the horizontal plane, which is fatal for precision instruments. For this reason, once leakage occurs, the stepper device on the vibration isolation table device, etc., is lowered to replace the vibration isolation spring inside the vibration isolation table device, or to reposition the stepper on the vibration isolation table device after assembly. Necessary. 2. Description of the Related Art In recent years, semiconductor stepper devices (drawing devices) have become larger as the size of a wafer increases, and the loading and unloading of such devices has become an extremely large work, and the loss as a maintenance cost has become extremely large.

  The present invention has been devised under such circumstances, and its purpose is that the number of parts is small, the structure is simple, the combination is simple (it is only necessary to fit), and the fluid from the joint is used. An object of the present invention is to provide a fluid spring unit that does not have a risk of leakage. Furthermore, it is providing the fluid spring unit which can make the height of the whole apparatus low when it is integrated in a vibration isolator.

  In order to solve the above-described problems, the present invention provides a substantially disc-shaped fluid spring body that functions when fluid is stored therein, and a pair of sandwiching plates that are disposed so as to sandwich the fluid spring body. Each of the pair of clamping plates includes a base plate portion and a fitting protrusion protruding from the base plate portion, and the fluid spring main body can be combined and integrated. The fluid spring body is arranged so as to be opposed to each other and connects a ring-shaped upper surface portion and a lower surface portion having an opening in the center and outer peripheral ends of the upper surface portion and the lower surface portion. And a ring-shaped fixing base formed so as to protrude to the opposite sides at the inner peripheral ends of the upper surface portion and the lower surface portion, and The fixing base includes an elastic pedestal and this base. A ring-shaped metal ring substantially embedded in the metal ring, and a ring-shaped elastic seal member that is substantially bonded to the metal ring and protrudes in the opposite direction and inward during molding. The spring body and the pair of clamping plates are integrated only by fitting the fitting protrusions of the pair of clamping plates into the central opening of the fluid spring body, and the fitting protrusions are fitted. The side surface is configured to be biased by the ring-shaped elastic seal member of the fixing base.

  Further, as a preferred embodiment of the present invention, the inner side surface of the metal ring of the fixing base and the inner side surface of the elastic pedestal are configured to form a substantially integrated same surface, and from this same surface, Also, the ring-shaped elastic seal member is formed so as to protrude inward.

  Further, as a preferred aspect of the present invention, in the dimension before assembling the fluid spring unit, the outer diameter of the fitting protrusion of the clamping plate is φA, the inner diameter of the inner surface of the elastic base of the fixing base is φB, When the innermost diameter of the elastic seal member of the fixing base is φC, φB> φA> φC.

  Moreover, as a preferable aspect of the present invention, the elastic pedestal, the metal ring, and the ring-shaped elastic seal member in the fixing base are configured to be integrally formed in the same mold. .

  As a preferred aspect of the present invention, one of the pair of sandwiching plates has an openable / closable operation port for assisting the fitting operation with the fluid spring body from the diameter of the fitting protrusion. Is configured to have a small diameter.

  As a preferred aspect of the present invention, at least one of the pair of clamping plates is configured to have a fluid passage communicating with the fluid spring body.

  Moreover, the fluid spring unit of this invention is used as a preferable aspect for the anti-vibration stand apparatus which is directly or indirectly laid in the anti-vibration target object, and performs anti-vibration of the anti-vibration object.

  Further, the present invention is a vibration isolation table apparatus that is directly or indirectly laid on a vibration isolation object and performs vibration isolation of the vibration isolation object, wherein the vibration isolation table apparatus is directly or directly on the vibration isolation object. A ceiling plate that is indirectly contacted, a hanging plate that hangs from the periphery of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate, between the inner surface of the ceiling plate and the base portion The fluid spring unit is interposed between the inner side surface of the hanging plate and the base portion.

  Incidentally, in a fluid pressure responsive device composed of a cylinder and a piston, a fluid pressure responsive device having a self-sealing property has been proposed in order to eliminate unstable operation due to fluid leakage (Patent Document 3). What is different from the fluid spring unit is its structure and application, and is not used, for example, in a device for vibration isolation.

  In the fluid spring unit of the present invention, the fluid spring body and the pair of sandwiching plates are integrated only by fitting the fitting protrusions of the pair of sandwiching plates into the central opening of the fluid spring body, The side surface to which the fitting protrusion is fitted is configured to be urged by a ring-shaped elastic seal member of the fixing base.

  Therefore, the fluid spring unit of the invention has a small number of parts and a simple structure, so that the assembly is simple (simply fit). Further, since the fluid spring body has a self-sealing property, there is no risk of fluid leakage from the joint.

  Furthermore, when incorporated in a vibration isolation device, the overall height of the device can be reduced.

  From these overall effects, production costs, maintenance costs, etc. can be reduced, and the long-term reliability can be greatly improved.

Next, the configuration form of the fluid spring unit of the present invention will be described in detail.
FIG. 1 is a cross-sectional view of each member before assembling the fluid spring unit of the present invention, and FIG. 2 is a schematic perspective view of each member in the separated state of FIG. 1 for easier understanding of the state of FIG. is there. FIG. 3 is a sectional view of the fluid spring unit 1 of the present invention after assembly.

  As shown in FIG. 3, the fluid spring unit 1 of the present invention is disposed so as to oppose a substantially disc-shaped fluid spring body 10 that functions when fluid is stored therein, and sandwiches the fluid spring body 10. And a pair of sandwiching plates 40, 50.

  Each of the pair of sandwiching plates 40 and 50 includes disk-shaped base plate portions 41 and 51, and disk-shaped fitting protrusions 45 and 55 protruding from the base plate portions 41 and 51, respectively. The spring body 10 can be combined and integrated.

  The fluid spring main body 10 according to the present invention has a substantially disk shape (approximate floating ring shape if viewed differently) as shown in FIG. Such a fluid spring main body 10 is arranged so as to face each other, and has a ring-shaped upper surface portion 11 and a lower surface portion 15 having circular openings 3 and 4 at the center, and these upper surface portion 11 and lower surface. The side body part 13 formed so that the outer peripheral edge part with the part 15 may be connected is comprised. In addition, although the side trunk | drum 13, the upper surface part 11, and the lower surface part 15 are normally formed as an integrated object, in this application, for convenience of explanation, it is divided and demonstrated like another member.

  Furthermore, the fluid spring main body 10 according to the present invention is a ring formed so as to protrude on the opposite side (the central space S direction side shown in FIG. 1) at the inner peripheral ends of the upper surface portion 11 and the lower surface portion 15. The fixing bases 20 and 30 each have a shape.

  As shown in FIG. 1, the fixing bases 20 and 30 according to the present invention include elastic bases 21 and 31, ring-shaped metal rings 25 and 35 substantially embedded in the bases 21 and 31, and the metal A ring-shaped elastic seal member 27 that is substantially joined to the rings 25 and 35 and protrudes in the opposite direction (the central space S direction side shown in FIG. 1) and the inner side (the center line direction in FIG. 1) during molding. , 37. Here, “substantially embedded in the pedestals 21, 31” means that the ring-shaped metal rings 25, 35 also include an aspect in which the ring-shaped metal rings 25, 35 protrude from the pedestals 21, 31 as long as the effects of the present invention are achieved. To do. Further, “substantially joined to the metal rings 25, 35” means that the metal rings 25, 35 are indirectly ringed via an adhesive rubber material or the like, as will be understood from the description of the manufacturing method described later. It is meant to include a mode of joining with the elastic seal members 27 and 37 having a shape.

  As shown in FIG. 1, the inner surfaces of the metal rings 25 and 35 and the inner surfaces of the elastic pedestals 21 and 31 in the fixing bases 20 and 30 according to the present invention are substantially the same surface (FIG. 1). The ring-shaped elastic seal members 27 and 37 are formed so as to protrude inward from the same surface. Here, “substantially integrated same surface” refers to the present application after assembly even if some surface displacement occurs with the metal rings 25 and 35 in consideration of the elasticity of the elastic bases 21 and 31. This means that it is allowed within the range where the effects of the invention are exerted.

  In the dimensions before assembly of the fluid spring unit 1 of the present invention, as shown in FIG. 1, the outer diameters of the fitting protrusions 45 and 55 of the holding plates 40 and 50 are φA, and the elastic bases of the fixing bases 20 and 30 When the inner diameter of the inner side surfaces 21 and 31 is φB and the innermost diameter of the elastic seal members 27 and 37 of the fixing bases 20 and 30 is φC, the relationship φB> φA> φC is established. The relationship between φB and φA may be a slight fitting tolerance, but the φC dimension for φB and φA is set to a dimension that can ensure the self-sealing property (self-sealing property) described later. For example, φB−φC = about 1.0 to 3.0 mm.

  The elastic pedestals 21 and 31, the metal rings 25 and 35, and the ring-shaped elastic seal members 27 and 37 in the fixing bases 20 and 30 are formed by integrally molding in the same mold. For example, metal rings 25 and 35 having a rubber adhesive applied to the outer surface may be inserted into a mold, a base cloth may be laid in the mold, and a rubber material may be injected and molded. In such integral molding, the side body portion 13, the upper surface portion 11, and the lower surface portion 15 are also integrally formed. The rubber material used for integral molding including the ring-shaped elastic seal members 27 and 37 is usually the same material. The rubber material may be selected in consideration of the usage environment (temperature, fluid cleanliness, etc.). For example, rubber materials such as nitrile rubber, fluorine rubber, silicon rubber, and ethylene propylene rubber are preferably used.

  As a base fabric to be used, for example, a fabric formed of polyester or the like can be cited as a preferable example, and it is desirable that this fabric is a fabric pre-formed into a predetermined shape. Alternatively, a technique may be adopted in which the base fabric is pre-formed, pressed and embedded in a rubber-shaped surface that has been molded in advance, and then vulcanized. Since the fluid spring unit 1 according to the present invention is pressurized by the fluid from the inside, the base fabric is embedded so as to be located outside in the thickness of the rubber material. This is because the rubber material maintains airtightness and the base fabric maintains the strength of the elastic body.

  As shown in FIG. 1, the fluid spring body 10 preferably has a so-called one-stage bellows structure. However, when a special use or special specification is required, a two- to three-step bellows structure may be used.

  The thickness of the portion acting as a spring film of the fluid spring main body 10 having the bellows structure is preferably about 0.15 to 1.8 mm. When this value exceeds 1.8 mm, the rigidity of the film increases and hysteresis increases. And the internal stress of the film | membrane which generate | occur | produces by repeated bending becomes large, and the problem that durability falls arises. If this value is less than 0.15 mm, the base fabric to be used becomes thin, so that (1) pressure resistance is lost, (2) the ratio of the base fabric thickness to the membrane pressure increases, and the sealing performance as a membrane (3) When it comes into contact with the projection, it is liable to break and has a problem of poor durability.

  As shown in FIG. 3, the fluid spring body 10 and the pair of sandwiching plates 40 and 50 are configured such that the fitting protrusions 45 and 55 of the pair of sandwiching plates 40 and 50 are the central openings of the fluid spring body 10 respectively. It is integrated only by being fitted to. Then, the side surfaces 45a and 55a to which the fitting projections 45 and 55 of the sandwiching plate are fitted are ring-shaped elastic seal members 27 and 37 of the fixing bases 20 and 30 (bent and compressed in FIG. 3). ).

  That is, the protruding form portions of the elastic seal members 27 and 37 of the fixing base portions 20 and 30 are deformed by fitting during the assembly of the fluid spring unit 1 and are urged to the side surfaces 45a and 55a of the fitting protruding portions 45 and 55. Then, the assembled and integrated state as shown in FIG. 3 is obtained. The self-sealing property (self-sealing property) is imparted by the pressure of a fluid such as air sealed in the internal space of the fluid spring body 10. That is, for example, when used in a vibration isolation device, the greater the load applied to the pair of clamping plates 40, 50, the greater the pressure applied to the fluid such as air enclosed in the fluid spring body 10, Further, the self-sealing property (self-sealing property) by the elastic seal members 27 and 37 acts to be enhanced.

  Further, in order to supply and enclose a fluid such as air in the internal space of the fluid spring body 10, a fluid passage 57 communicating with the internal space of the fluid spring body 10 is formed in one clamping plate 50. In order to form a compact structure, it is desirable that the fluid passage 57 is configured to project outward along the thickness direction of the sandwiching body.

  Further, in the present invention, in order to assist the fitting operation (assembly operation) between the pair of clamping plates 40, 50 and the fluid spring body 10, the fitting is performed on one of the pair of clamping plates 40, 50. An openable / closable operation port having a diameter smaller than the diameter of the protrusions 45 and 55 may be formed.

  Next, a preferred example when the above-described fluid spring unit 1 is incorporated in a vibration isolator will be described.

  4 is a schematic plan view (top view) of the vibration isolator when the fluid spring unit 1 of the present invention is incorporated in the vibration isolator, and FIG. 5 is a view in the direction of arrows AA in FIG.

  In the vibration isolator 60 shown in FIGS. 4 and 5, the fluid spring unit 1 is represented as a simple block body indicated by dots (grains) due to restrictions on the size of the paper surface. For example, please imagine that it is similar to the form as shown in FIG.

  A vibration isolation device 60 shown in FIGS. 4 and 5 is a device that is laid directly or indirectly on a vibration isolation object and performs vibration isolation of the vibration isolation object.

  As shown in the figure, such a vibration isolation table device 60 includes a ceiling plate 70 that directly or indirectly contacts a vibration isolation object, a hanging plate 80 that hangs down from the periphery of the ceiling plate, and these ceiling plates 70 and the hanging plate. And a base portion 90 that covers the plate 80. As a preferred embodiment of the present invention, the fluid spring unit 1 is provided between the inner side surface 71 of the ceiling plate 70 and the base portion 90 and between the inner side surface 81 of the hanging plate 80 and the base portion 90. Are intervened.

  In the side arrangement of such a structure, one clamping plate of the fluid spring unit 1 is fixed to the inner side surface 81 of the drooping plate 80, and the other clamping plate of the fluid spring unit 1 is the side surface of the base portion 90. It is fixed to. By the side arrangement of the fluid spring unit 1, a horizontal vibration isolation effect can be produced mainly.

  Similarly, in the upper surface arrangement, one clamping plate of the fluid spring unit 1 is fixed to the inner surface 71 of the ceiling plate 70, and the other clamping plate of the fluid spring unit 1 is fixed to the upper surface of the base portion 90. ing. By the arrangement of the upper surface of the fluid spring unit 1, a vibration isolation effect in the vertical direction can be exhibited mainly.

  The internal space of the fluid spring main body 10 positioned between the pair of clamping plates fixed as described above includes an air chamber (not shown) (for example, an air chamber formed in the main body of the base portion 90, or a complete space). It is possible to communicate with an air chamber arranged outside the apparatus, and to adjust fluid pressure (air pressure).

  For example, three to eight such vibration isolation table devices 60 are used so as to support one large plate member, and these are distributed in a predetermined place to support a load.

  The fluid spring unit of the present invention can be used in a vibration isolation device that performs vibration isolation while supporting a load.

FIG. 1 is a cross-sectional view in which the members before assembly of the fluid spring unit of the present invention are separated. FIG. 2 is a schematic perspective view of each member in the separated state of FIG. 1 in order to make the state of FIG. 1 easier to understand. FIG. 3 is a sectional view of the fluid spring unit 1 of the present invention after assembly. FIG. 4 is a schematic plan view (top view) of the vibration isolator when the fluid spring unit of the present invention is incorporated in the vibration isolator. FIG. 5 is a view in the direction of arrows AA in FIG. It is sectional drawing which shows an example of the conventional air spring for vibration isolation.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Fluid spring unit 10 ... Fluid spring main body 11 ... Ring-shaped upper surface part 13 ... Side body part 15 ... Ring-shaped lower surface part 20, 30 ... Base for fixation 21, 31 ... Elastic base 25, 35 ... Metal ring 27, 37 ... elastic seal member 40, 50 ... clamping plate 41, 51 ... base plate portion 45, 55 ... fitting protrusion

Claims (8)

A fluid spring unit comprising: a substantially disc-shaped fluid spring body that functions when fluid is stored therein; and a pair of sandwiching plates that are disposed so as to sandwich the fluid spring body. ,
Each of the pair of sandwiching plates includes a base plate portion and a fitting protrusion protruding from the base plate portion, and can be combined and integrated with the fluid spring body.
The fluid spring body is
A ring-shaped upper surface portion and a lower surface portion that are arranged to face each other and have an opening in the center;
A side body portion formed so as to connect outer peripheral ends of the upper surface portion and the lower surface portion;
A ring-shaped fixing base formed so as to protrude to the opposite sides at the inner peripheral ends of the upper surface portion and the lower surface portion,
The fixing base includes an elastic pedestal, a ring-shaped metal ring substantially embedded in the pedestal, and a ring shape that is substantially joined to the metal ring and protrudes in the opposite direction and inward during molding. And an elastic seal member,
The fluid spring body and the pair of sandwiching plates are integrated only by fitting the fitting protrusions of the pair of sandwiching plates into the central opening of the fluid spring body. The fluid spring unit is characterized in that the side surface is biased by a ring-shaped elastic seal member of the fixing base.   The inner side surface of the metal ring of the fixing base and the inner side surface of the elastic pedestal are configured to form a substantially integrated same surface, and the ring protrudes inward from the same surface. The fluid spring unit according to claim 1, wherein a shaped elastic seal member is formed.   In the dimensions before assembling the fluid spring unit, the outer diameter of the fitting protrusion of the clamping plate is φA, the inner diameter of the inner surface of the elastic base of the fixing base is φB, and the outermost diameter of the elastic seal member of the fixing base is The fluid spring unit according to claim 2, wherein when the inner diameter is φC, φB> φA> φC.   The fluid according to any one of claims 1 to 3, wherein the elastic base, the metal ring, and the ring-shaped elastic seal member in the fixing base are formed by integrally molding in the same mold. Spring unit.   One of the pair of clamping plates has an opening and closing operation port for assisting the fitting operation with the fluid spring main body having a diameter smaller than the diameter of the fitting protrusion. The fluid spring unit according to any one of claims 1 to 4.   The fluid spring unit according to any one of claims 1 to 5, wherein a fluid passage communicating with the inside of the fluid spring body is formed in at least one of the pair of sandwiching plates.   The fluid spring unit according to any one of claims 1 to 6, wherein the fluid spring unit is used in an anti-vibration base device that is laid directly or indirectly on an object to be isolated and performs vibration isolation on the object to be isolated. An anti-vibration table apparatus that is laid directly or indirectly on an object to be anti-vibrated and performs anti-vibration of the object to be anti-vibrated,
The vibration isolation table device includes a ceiling plate that directly or indirectly contacts a vibration isolation object, a hanging plate that hangs down from the periphery of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate. ,
Between the inner surface of the ceiling plate and the base portion, and between the inner surface of the hanging plate and the base portion,
An anti-vibration table apparatus, wherein each of the fluid spring units according to any one of claims 1 to 6 is interposed.

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