JP2005074550A - Curvature setting device for polishing jig and method for injecting air to polishing jig - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a curvature setting device for a polishing jig in which the injection time is short, the error of the height of a top is small, and the curvature setting work of a balloon member is automated. <P>SOLUTION: Air is injected at a large flow rate when the injection of air to the balloon member 25 is started. When air is injected, a dome part 25A of the balloon member 25 is gradually expanded, the surface height becomes higher, and a contact terminal 175 is pushed up. When the contact terminal 175 is raised at a specified height, a first sensor 181 detects a rod 174. The control part drives and controls the air injection control equipment on the basis of the detection signal. The flow rate of air is switched from the large flow rate to a small flow rate. Further, when the dome part 25A is expanded and a second sensor 182 detects the rod 174, the control part closes the air injection control equipment on the basis of the detection signal, and the supply of air is stopped. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method of injecting air in a curvature setting device for a polishing jig, and in particular, used for a polishing device for polishing a toric surface, an aspheric surface, a non-toric surface, a surface having an arbitrary free-form surface, etc. of a plastic lens. The present invention relates to a curvature setting device for a polishing jig that automatically sets a curvature of a dome-shaped surface of a balloon member of a polishing jig according to a shape of a surface to be polished of a lens, and a method of injecting air into the polishing jig.

  Conventionally, in order to polish a concave surface of a lens cut into a spherical or toric surface shape by an NC control curve generator with a polishing apparatus, a polishing pad is attached to a metal polishing jig having a convex surface substantially matching the shape of the concave surface to be polished. Is applied by sliding the polishing jig and the lens relative to each other in a state where the polishing jig is pressed against the concave surface to be polished. Therefore, in such a polishing method, it is necessary to prepare different polishing jigs for each concave shape of the lens to be polished. For example, in the case of a toric lens for correcting astigmatism, a toric surface (a part of a surface obtained by rotating an arc around the axis that is in the same plane as the arc and does not pass through the center of curvature of the arc) is 3000 to 4000. Since there are many types, it was necessary to prepare as many polishing jigs as there were. For this reason, not only the manufacturing cost of the polishing jig is increased, but also a large storage space is required for orderly storing a large number of polishing jigs, and the management thereof is complicated.

  Also, not only spherical surfaces and toric surfaces, but also aspherical surfaces (parts of rotating surfaces whose curvature continuously changes from the apex to the periphery), non-toric surfaces (surfaces having mutually perpendicular principal meridians with different curvatures, at least On the other hand, a concave surface with a complicated shape, such as a free-form surface such as a progressive multifocal lens, may be formed. The conventional polishing method has a problem that it cannot be polished.

  Therefore, as a method for solving such a problem, a polishing apparatus and a polishing jig described in Patent Document 1 have been proposed.

JP 2000-117604 A

  The polishing apparatus described in JP 2000-117604 A includes a holding tool for holding an object to be polished, a polishing jig having a flexible sheet that is inflated into a dome shape by air pressure, and the flexible sheet. A polishing pad that is attached to the surface of the workpiece, and the object to be polished in a track-free polishing locus in which the locus of polishing is slightly shifted every round by the reciprocating motion of the holder in the right and left and back and forth directions and the swinging movement of the polishing jig. A surface to be polished of an object is polished by an abrasive supplied between the polishing pad and the surface to be polished.

  In this way, if the curvature of the dome is changed by air pressure, a single jig can handle a wide range of concave shapes, so there is no need to prepare different polishing jigs for each concave shape. There is an advantage that the number can be greatly reduced.

  In using the above-described polishing jig, it is desired to develop an apparatus capable of automatically performing a dome curvature setting operation in accordance with the curvature of the surface to be polished in order to improve workability.

  The polishing apparatus disclosed in the above Japanese Patent Application Laid-Open No. 2000-117604 sets the curvature of the dome portion by changing the internal pressure of the flexible sheet, but the deformation amount of the dome portion with respect to the pressure fluctuation amount is large. In some cases, it may be difficult to adjust the pressure according to the curvature, and the desired curvature may not be obtained even with the same pressure due to deterioration of the flexible sheet.

  Therefore, the present inventors have previously measured the correlation between the vertex height of the dome portion and the curvature, and by supplying air, the dome portion of the balloon member is adjusted to a height corresponding to the desired curvature. It was considered to use a method of inflating until the dome portion was set.

  In putting a device using such a method into practical use, it is desired that the device can inject air accurately at a predetermined apex height in a short time. In order to inject air in a shorter time, the amount of air injected per unit time may be increased. However, if the timing of stopping air injection is shifted, the error in the air injection amount increases and an accurate apex height is obtained. There is a risk of being lost. On the other hand, if the injection amount of air per unit time is reduced, the influence of the deviation of the timing of stopping the air injection is reduced, but it takes time to inject air and increases the time required to manufacture the lens.

  If air is excessively injected, a method of discharging the injected air to a predetermined apex height is also conceivable, but an air discharge mechanism is also required in addition to the air injection mechanism. There is a problem that the structure of the apparatus becomes complicated and the discharging operation takes time. In addition, since it is necessary to perform the curvature setting of the dome every time the shape of the polished surface of the lens changes, it is also desirable that the device can inject air with a simpler operation so as to reduce the burden on the operator. ing.

  The present invention has been made in order to solve the above-described conventional problems. The object of the present invention is to change the air flow rate to a low flow rate during air injection so that the dome portion does not inject excessively. A curvature setting device for a polishing jig and a polishing jig that can reliably set the vertex height to a predetermined height in a short time and reduce the burden of the operator on the adjustment of the vertex height. The object is to provide a method of injecting air into the device.

  To achieve the above object, according to a first aspect of the present invention, there is provided a curvature setting for a polishing jig in which the surface of the balloon member is inflated into a dome shape by supplying air to the balloon member of the polishing jig and set to a predetermined curvature. An apparatus having an air inlet for supplying air to the balloon member and having the polishing jig installed thereon, an air supply means for injecting air into the air inlet, and the balloon member A height measuring device for detecting the height of the surface of the device, the height measuring device is capable of detecting a plurality of different heights, and based on a detection signal from the height measuring device The air supply means changes the air supply flow rate per unit time to a low flow rate and injects air.

  According to a second invention, in the first invention, the air supply means includes a plurality of branch flow paths having different air supply flow rates per unit time, and based on detection signals from the height measurement device, The flow rate is changed by switching the branch flow path.

  A third invention is a method for injecting air into a polishing jig in which air is supplied to a balloon member of a polishing jig to inflate the surface of the balloon member into a dome shape and set to a predetermined curvature. After the supply is started, the air supply amount per unit time is changed to a low flow rate based on a detection signal that detects that the height of the surface of the balloon member is lower than the predetermined height by a predetermined distance, and the balloon The supply of air is stopped based on a detection signal that detects that the surface of the member has reached the predetermined height, and the surface of the balloon member is set to a predetermined height.

  In the present invention, the air flow is increased at the start of air injection, and when the height of the surface of the balloon member approaches a predetermined height, the air supply amount is changed to a lower flow rate. When the surface reaches the predetermined height, the supply of air is stopped, so that the air can be injected in a short time, and the amount of excessively injected air is small and the apex height is reduced. It can be set accurately.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
FIG. 1 is a front view showing an embodiment of a curvature setting device for a polishing jig adopting an air injection method according to the present invention, FIG. 2 is a side sectional view showing the curvature setting device, and FIG. FIG. 4 is an enlarged cross-sectional view taken along line IV-IV in FIG. 3, FIG. 5 is a cross-sectional view showing the structure and valve of the air inlet, and FIG. 6 is a cover when air is supplied. FIG. 7 is a sectional view of the height measuring device, and FIG. 8 is a diagram showing an air supply circuit. 9 is a schematic configuration diagram of a polishing apparatus in which the curvature setting apparatus is used, FIG. 10 is a plan view showing a polishing jig to which a polishing pad is attached, FIG. 11 is a bottom view showing the polishing jig, and FIG. 10 is a sectional view taken along line XII-XII, FIG. 13 is a diagram showing the relationship between the height of the polishing jig and the radius of curvature of the dome portion of the balloon member, FIG. 14 is a plan view showing the polishing pad, and FIG. FIGS. 16A and 16B are diagrams showing trackless polishing trajectories, and FIGS. 17A, 17B and 17C are zero-point adjustments of the height measuring device and the dome portion. FIG. 18 is a flowchart for explaining the vertex height measurement, FIG. 18 is a flowchart showing the procedure of the curvature setting operation of the balloon member by the curvature setting device, and FIG. 19 is a block diagram of the curvature setting device.

  The curvature setting device for a polishing jig according to the present invention is used in a polishing device for polishing a spectacle lens. In the present embodiment, an example applied to polishing a concave surface made of a toric surface of a plastic lens for correcting astigmatism is shown. As a lens to be polished, a semi-finished lens having only a convex surface made of urethane or epithio resin was used.

First, before explaining the curvature setting apparatus for a polishing jig according to the present invention, the configuration of the polishing apparatus and the polishing jig used in this polishing apparatus will be outlined.
In FIG. 9, a spectacle lens polishing apparatus denoted as a whole by reference numeral 1 is composed of an apparatus main body 2 installed on the floor surface, and the apparatus main body 2 movable in the left-right direction on the paper surface and centering on a horizontal axis 3. A gate-shaped arm 4 rotatably disposed in a direction orthogonal to the arm, an arm drive device (not shown) for reciprocating the arm 4 in the left-right direction and rotating in the direction orthogonal to the paper surface, and the arm 4 and a lens mounting portion 6 to which a lens 5 is mounted via a lens holder 7, and a jig driving device (not shown) disposed in the apparatus main body 2 so as to be positioned below the lens mounting portion 6. Thus, a swinging device 8 or the like that swings and swings around the vertical axis K (not rotating) is provided. Further, a polishing jig 9 detachably provided on the rocking device 8, a polishing pad 10 detachably attached to the polishing jig 9, a lens lifting device 11 for raising and lowering the lens mounting portion 6, and the like It has. The oscillating device 8 is attached to the vertical rotating shaft 21 so as to swing and swing at an oscillating angle α (for example, 5 °), and the polishing jig 9 is provided on the upper surface. Yes.

  Such a polishing apparatus 1 is widely used conventionally except for the new structure of the polishing jig 9. For example, a general-purpose polishing apparatus (TORO-X2SL) manufactured by LOH, which is generally commercially available, is used. It is used for polishing the lens 5.

  The lens 5 is a semi-finished lens in which only the convex surface 5a is finished, and the concave surface 5b is cut into a predetermined toric surface shape by a curve generator that performs three-dimensional NC control in advance (processing accuracy within 3 μm: lens diameter) 50 mm, maximum surface roughness Ry 0.3 to 0.5 μm). In order to attach the lens 5 to the curve generator and the polishing apparatus 1, the lens holder 7 is attached to the convex surface 5a in advance by a device called a layout blocker manufactured by LOH, for example.

  The lens holder 7 is composed of a yato 13 made of tool steel and the like, and an adhesive 16 that bonds the yato 13 and the lens 5 together. As the adhesive 16, a low melting point alloy, for example, an alloy composed of bismuth, lead, tin, indium, gallium (melting point: about 49 ° C.) is used.

  The concave surface polishing of the lens 5 by the polishing apparatus 1 is performed by attaching a lens 5 having a concave surface 5b cut to the lens mounting portion 6 of the arm 4 via a lens holder 7 and attaching a polishing pad 10 to the polishing jig 9. Is attached to the rocking device 8, and the lens 5 is lowered by the lens lifting device 11 to press the concave surface 5 b against the surface of the polishing pad 10. In this state, the abrasive is supplied to the surface of the polishing pad 10, and the swinging device 8 is swung and swung while the arm 4 is reciprocated in the left and right and front and rear directions. By these movements, the concave surface 5b of the lens 5 is polished by the polishing pad 10 and the polishing agent in a trackless polishing locus in which the polishing locus is slightly shifted every round as shown in FIG. 16 (a) or (b). Finish to the desired toric surface. The polishing allowance is about 5 to 9 μm. As the abrasive, for example, a solution in which an abrasive (abrasive grains) such as alumina oxide or diamond powder is dispersed in a polishing liquid (eg, nitric acid aqueous solution) is used.

  4, 5, and 10 to 12, the polishing jig 9 closes a balloon member 25 that is formed in a cup shape by an elastic material and that opens on the back side, and a lower surface side opening of the balloon member 25. A fixing tool 26 that holds the inside of the balloon member 25 and a valve 27 that supplies air 23 to the inside of the balloon member 25 are configured.

  The balloon member 25 has a substantially oval shape when viewed from the front and a surface having a flat or gently convex curved surface, and a substantially oval shape integrally extending downward from the outer periphery of the dome portion 25A. The tube portion 25B and an annular inner flange 25C extending integrally at the rear end of the tube portion 25B are configured.

  As the material of the balloon member 25, for example, synthetic rubber (for example, IIR) or natural rubber close to natural rubber having a hardness of 20 to 50 degrees (JIS) is used. The thickness T of the balloon member 25 is substantially uniform throughout and is about 0.5 to 2 mm (usually equal to about 1 mm). It is preferable to prepare a plurality of types of balloon members 25 according to the size of the lens 5 to be polished and the shape of the surface to be polished.

  4 and 12, the fixing device 26 is composed of two members, an inner fixing device 29 and an outer fixing device 30, which are arranged in a stacked manner, whereby the lower end portion of the tubular portion 25B of the balloon member 25 and the inner flange 25C are connected. By sandwiching from the inside and the outside, the lower surface side opening of the balloon member 25 is hermetically sealed.

  The inner fixture 29 is formed of an elliptical plate having the same size as the inner shape of the cylindrical portion 25B of the balloon member 25, and forms a sealed space 32 together with the dome portion 25A of the balloon member 25.

  The outer fixing tool 30 includes a main body 30A formed in an elliptical cup shape that opens upward, and a protrusion 30B that projects integrally with the lower surface of the main body 30A. 36, the inner fixture 29 is fitted together with the cylindrical portion 25B of the balloon member 25, and is fixed by a plurality of set screws 37. Thereby, the inner flange 25C of the balloon member 25 is pressed against the bottom surface of the recessed portion 36, and the sealed space 32 of the balloon member 25 is kept airtight.

  The protruding body 30B of the outer fixing tool 30 extends over the entire length of the lower surface of the main body 30A in the major axis direction of the recessed portion 36 of the outer fixing tool 30, and two engaging recesses 38, 39 and a through hole 42 (FIGS. 11 and 12) opened on the upper surface of the main body 30A, and engaging grooves 40 (FIGS. 4 and 11) are formed over the entire length on both the left and right side surfaces.

  In FIG. 5, the valve 27 includes a valve body 43 whose upper end is screwed into a screw hole 41 provided in the inner fixture 29 and whose lower end is located in the through hole 42 of the outer fixture 30. A ball 44, conical coil springs 45, 46, an exhaust pin 47, a seat 48 and an E ring 49 are incorporated in the valve body 43.

  The inside of the valve body 43 is partitioned into two upper and lower chambers 51 a and 51 b by a partition wall 50 having a communication hole 52. The ball 44 is housed in the upper chamber 51a and is urged downward by the conical coil spring 45, so that the ball 44 is normally seated on a valve seat 53 formed in the upper opening of the communication hole 52, thereby allowing a communication hole hole. 52 is blocked.

  The exhaust pin 47 is disposed in the lower chamber 51b so as to be movable up and down, penetrates the receiving seat 48 and the E-ring 49, and is normally biased downward by a conical coil spring 46 to receive the receiving pin 47. It is pressed against the seat 48. An upper end 47 a of the exhaust pin 47 is loosely inserted into the communication hole 52 and faces the ball 44 in close proximity, and a lower end 47 b protrudes below the valve body 43.

  10, 11, 14, and 15, the polishing pad 10 used for polishing the concave surface 5 b of the lens 5 is made of, for example, a fibrous cloth such as polyurethane, felt, or nonwoven fabric, a synthetic resin, or the like. And a polishing portion 55 (FIG. 14) formed in an oval shape having the same size as the front view of the dome portion 25A of the balloon member 25, and the periphery of the polishing portion 55 And a plurality of fixed pieces 56 extending outward from the outer side. The polishing portion 55 is composed of eight petal pieces 58 that are radially formed by a plurality of grooves 57 that are formed from the outer periphery toward the center. The fixed piece 56 is formed by extending the outer edges of four petal pieces 58 positioned in the major axis direction and the minor axis direction of the eight petal pieces 58 in the radial direction.

  Such a polishing pad 10 is detachably attached to the polishing jig 9 by a fastening member 60 shown in FIG. 14 formed in a ring shape by a spring material. When attaching the polishing pad 10, the dome portion 25A of the balloon member 25 is expanded in advance to a predetermined shape by supplying air 23, and then the polishing portion 55 of the polishing pad 10 is placed on the dome portion 25A. Next, both ends 60a, 60b of the tightening member 60 are sandwiched between fingers to narrow the distance between them, thereby increasing the diameter of the tightening member 60. In this state, the tightening member 60 is pressed against the fixed piece 56 from above. Bend downward and fit to the outer periphery of the outer fixture 30. When the fingers are removed from both end portions 60a and 60b, the fastening member 60 returns to its original small-diameter shape, so that the fixing piece 56 is tightened and pressed against the outer periphery of the outer fixture 30, thereby completing the mounting of the polishing pad 10. To do.

Next, the structure and the like of the curvature setting device for a polishing jig according to the present invention will be described.
1 to 6, a curvature setting device for a polishing jig, generally indicated by reference numeral 70, includes a box-shaped casing 72 installed on a work table 71, and a width direction at the rear upper end of the casing 72. A vertically long box-type cover 73 provided in the center is provided, and the air supply device (air compressor) 77 for supplying the air 23 to the balloon member 25 is disposed on one side of the casing 72. Yes.

  At the center of the upper surface of the casing 72, a polishing jig conveying device 74 for reciprocating the polishing jig 9 in the front-rear direction is installed, an operation unit 80 is provided on the front surface, and a control unit 82 is arranged inside. It is installed. The upper surface plate 72A of the housing 72 forms a base on which the polishing jig transport device 74 is installed.

  The cover 73 is opened at the lower front portion and accommodates the rear half of the polishing jig transport device 74, and a height measuring device 75 for measuring the apex height of the dome portion 25 </ b> A of the balloon member 25 at the upper part inside. And the raising / lowering apparatus 76 which raises / lowers this height measuring apparatus 75 is arrange | positioned.

  The operation unit 80 includes a power switch 81, a height data input means 83 for inputting the apex height of the dome portion 25A of the balloon member 25 to the control unit 82, a start button 84, A pause button 85 and the like are provided. In this case, in the present embodiment, an example in which an operation button is used as the height data input unit 83 is shown, but the present invention is not limited to this. For example, a keyboard, a bar code reader, an externally connected computer, via a network It may be a data input or the like.

The polishing jig transporting device 74 includes a box-shaped fixed case 90 that is open upward and downward and is long in the front-rear direction, and in the case 90 in the front-rear direction so as to cover a part of the upper surface opening of the fixed case 90. An installation table 91 on which the polishing jig 9 is installed so as to be movable, and a drive device 92 for reciprocating the installation table 91 between two positions, a jig mounting position C ₁ and a height measurement position C _2. Etc. The jig mounting position C ₁ is the upper front position of the polishing jig transport device 74, the height measurement position C ₂ is the upper rear position of the polishing jig transport device 74, and the position directly below the height measuring device 75. is there.

The fixed case 90 includes two end plates 94 and 94 (FIG. 2) that are installed on the base 72 </ b> A of the casing 72 so as to oppose each other in the front-rear direction, and the left and right symmetry connecting the end plates 94 and 94. And a pair of outer frames 96, 96 (FIG. 4). The outer frame 96 is formed of a vertical plate 96a, an upper horizontal piece 96b, and a lower horizontal piece 96c by being formed in a U shape by bending a metal plate. Further, as shown in FIG. 3, the upper horizontal piece 96b is not constant in width over the entire length, and the width of the front half 96b-1 is set to be narrower than the width of the rear half 96b-2. spacing D ₁ of the between the front half portion 96b-1 of the upper horizontal plate 96b of the 96 are slightly wider set than the width of the linear protrusion 30B of the outer fixture 30. On the other hand, the interval D ₂ between the second half portion 96b-2 is the first half portion is set smaller than the distance D ₁ of the between 96b-1, the inner end portion 196c, 196c polishing jig 9 is height measurement position C ₂ to its opposite When it moves to, the engagement with the engagement groove 40 (FIG. 4) of the protrusion 30 </ b> B restricts the lifting of the polishing jig 9 by the air 23 when supplying air to the balloon member 25. The front end portion 196e of the inner front end portion 196c is bent upward at an appropriate angle by forming the cut groove 196d so that the engagement to the engagement groove 40 can be smoothly performed.

  The lower horizontal piece 96c of each outer frame 96 is separated from the upper surface of the base 72A, and an appropriate gap G is set. The gap G allows the abrasive to flow out of the case when the abrasive enters the case from the upper open portion of the fixed case 90. The front and rear ends of the outer frame 96 are supported by support members 154 attached to the inner side surfaces of the front and rear end plates 94.

The installation base 91 is formed in a rectangular plate shape with a material having a small friction coefficient such as a fluororesin, and a fitting groove 97 (FIG. 4) in which the protrusion 30 </ b> B of the outer fixing tool 30 is fitted at the center of the upper surface. Is formed. Further, the bottom surface of the fitting groove 97 forms a reference surface (H) for measuring the apex height of the dome portion 25A of the balloon member 25, and includes an air injection port portion 95 and a pair of front and rear positioning pins. 99a and 99b (FIG. 11) are provided. On the other hand, near the both sides of the lower surface of the installation base 91, a total of four engaging portions 100 (FIG. 4) for driving force transmission are formed. The engaging part 100 is formed by a concave part with a circular (or rectangular) horizontal cross section. In such an installation table 91, the polishing jig 9 is normally installed from above while stopped at the jig mounting position C ₁ of the polishing jig conveying device 74. The height distance between the inner end portion 196c lower surface of the second half portion 96b-2 and the upper surface of the fitting groove 97 in a state where the installation base 91 is positioned at a height measurement position C ₂ the upper horizontal plate 96b, the since from the engaging groove 40 of the projection member 30B of the outer fixture 30 is configured to be the same as the height of the lower part, the polishing jig 9 is moved in the height measurement position C _2, linear protrusion The polishing jig 9 is fixed in a state where the lower surface of 30B and the upper surface of the fitting groove 97 (reference surface for height measurement) are in contact with each other.

  5 and 6, the air injection port portion 95 of the polishing jig curvature setting device 70 includes the injection port member 98 and a cover member 102 covering the injection port member 98.

  The injection port member 98 includes a disk-shaped main body 98A and a male screw portion 98B protruding integrally at the center of the lower surface of the main body 98A, and a recess 103 is formed at the center of the upper surface of the main body 98A. An air inlet 104 is formed. The inner diameter of the recess 103 is set to be larger than the outer diameter of the lower end 47 b of the exhaust pin 47 so that the exhaust pin 47 can be loosely fitted. The air inlet 104 includes a horizontal hole 104A formed in a radial direction passing through the center of the main body 98A, and a vertical vertical hole 104B whose upper end communicates with the horizontal hole 104A and whose lower end opens to the lower surface of the male screw portion 98B. The openings 104a at both ends of the lateral hole 104A are open to the outer peripheral surface of the main body 98A. The lateral hole 104A is not limited to this, and may be formed obliquely as shown by a two-dot chain line 105 in FIG. 5, for example, and may be opened on the slope 106 formed on the outer periphery of the upper surface of the main body 98A.

  The male screw portion 98B is formed in a cylindrical shape having the vertical hole 104B inside, and a male screw that is screwed into a screw hole 111 formed on the upper surface of the installation base 91 is formed on the outer periphery. The screw hole 111 forms a supply passage for the air 23 and is connected to the air supply device 77 via a pipe 112 (FIG. 1).

  The cover member 102 is formed in a cup shape by an elastic material such as rubber, so that a disc-shaped elastic deformation portion 102A having a round opening 115 in the center and an outer periphery of the elastic deformation portion 102A are integrally provided. And a cylindrical portion 102B surrounding the outer periphery of the main body 98A. The elastic deformation portion 102A is in close contact with the upper surface 116 of the inlet member 98 as shown in FIG. 5 except when air is supplied, and prevents the polishing liquid from entering the air inlet 104.

  The cylindrical portion 102B is formed to be thicker than the elastic deformation portion 102A, and the lower end portion is fixed to the lower end portion of the outer peripheral surface of the main body 98A of the inlet member 98 by welding or the like. An annular gap 120 is formed between the inner circumferential surface of the cylindrical portion 102B and the outer circumferential surface of the main body 98A, and the air inlet 104 communicates with the gap 120. The cylindrical portion 102B has an outer diameter set to be approximately the same as or slightly smaller than the hole of the through hole 42 of the outer fixture 30, thereby facilitating fitting into the through hole 42. When the pressure in the cover member 102, that is, the pressure in the gap 120 is increased by the supply, the cover member 102 is elastically deformed outward and pressed against the inner wall of the through hole 42.

  When the air 23 is supplied from the air supply device 77 to the inlet member 98, the air 23 is guided to the gap 120 through the air inlet 104 and raises the pressure in the cover member 102. Therefore, the elastically deforming portion 102A is elastically deformed upward as shown in FIG. 6 and is separated from the upper surface 116 of the inlet member 98, is in close contact with the lower surface 43a of the valve body 43, and below the air inlet 104 and the valve 27. The side chamber 51b (FIG. 5) is communicated. When the air 23 is supplied to the lower chamber 51b, the pressure in the lower chamber 51b rises, and the ball 44 is pushed up against the conical coil spring 45 by this pressure to open the communication hole 52. Accordingly, the air 23 is injected into the balloon member 25 through the communication hole 52 and expands the dome portion 25A.

  When the top of the dome portion 25A reaches a predetermined height and the supply of the air 23 is stopped, the pressure in the air injection port 104 is reduced, so that the elastic deformation portion 102A is elastically restored to the original state, and the injection port member It adheres to the upper surface 116 of 98. Moreover, since the pressure in the lower chamber 51b is also reduced by stopping the injection of the air 23, the ball 44 is lowered by the spring force of the conical coil spring 45 to close the communication hole 52, and thus the air to the balloon member 25 is removed. 23 injection is completed. In order to return the inside of the balloon member 25 to atmospheric pressure, the ball 44 is pushed up by the exhaust pin 47 to open the communication hole 52 of the valve 27 and the sealed space 32 of the balloon member 25 is opened to the atmosphere.

  2 and 4, a commercially available rodless air cylinder is used as the drive device 92 for linearly reciprocating the installation base 91 in the front-rear direction. The rodless air cylinder 92 includes a cylinder body 150 that is long in the front-rear direction and a movable member 151 that is linearly reciprocated by the cylinder body 150 in the front-rear direction. The cylinder body 150 has an upper surface covered with a guide plate 152, an opening formed on the lower surface side over substantially the entire length in the longitudinal direction, and a piston (not shown) slidably incorporated therein, and the front and rear ends are the ends described above. It is being fixed to the board 94,94, respectively.

  The movable member 151 is formed of a bottom portion 151A and a pair of side portions 151B and 151C facing in the left-right direction by being formed into a U-shape whose front view is opened upward by bending a metal plate. Has been. The bottom portion 151 </ b> A is located below the cylinder body 150 and is fixed to a piston in the cylinder body 150 via a connecting member 153. The bottom 151A is spaced from the upper surface of the base 72A.

  Each of the side portions 151B and 151C has an engaging portion 155a (FIG. 2) integrally projecting upward at the front and rear ends of the upper end surface. The engaging portions 155a of the side portions 151B and 151C are respectively engaged with the engaging portions 100 of the installation base 91 from below, and these engaging portions 100 and 155a generate the driving force of the cylinder body 150. A driving force transmission portion for transmitting to the installation base 91 is formed. That is, when the rodless air cylinder 92 is driven, the engaging portion 155 a presses the inner wall of the engaging portion 100, so that the installation base 91 moves integrally with the movable body 151. Note that the upper end of the engaging portion 155 a is not in contact with the engaging portion 100. This is because the driving force transmission unit simply transmits the driving force and does not support the weight of the installation table 91 including the polishing jig 9.

  The guide member 152 covers the entire upper surface of the cylinder body 150, and the installation base 91 is slidably mounted on the upper surface in the front-rear direction. In addition, the guide member 152 integrally includes bent pieces 152a and 152a that are bent downward at both left and right ends. The guide member 152 is placed on the upper surface of the cylinder body 150 via an intervening member 156 as necessary, and both front and rear ends of the guide member 152 are supported by support plates 157 attached to the inner side surfaces of the front and rear end plates 94. Since the guide member 153 covers the upper surface of the cylinder body, the abrasive that has entered from the opening above the fixed case 90 is prevented from directly falling on the cylinder body.

  In FIG. 2, the elevating device 76 includes a Z-axis guide 160 vertically attached to the back plate of the cover 73, a slider 161 on which the height measuring device 75 is mounted, and the slider 161 as the Z-axis guide 160. It is comprised with the drive device 162 etc. which raise / lower along. The driving device 162 uses a stepping motor.

  As shown in FIG. 7, the height measuring device 75 includes the height detecting means 88, a detecting means 170 for detecting the height detecting means 88, and the detecting means 170 serving as a reference surface H (see FIG. 17) and a zero point adjusting mechanism 171 for manually adjusting the height of the detecting means 170 so that the height from 17) can be detected.

  The height detecting means 88 is fitted to the rod 174 slidably fitted into the cylindrical body 172 via the bearing 173, the contact terminal 175 attached to the lower end of the rod 174, and the upper end of the rod 174. And a retaining ring 177 fixed by screws 176. The retaining ring 177 is placed on the upper surface of a holding member 178 that supports the upper end of the cylindrical body 172, thereby preventing the rod 174 from falling off the cylindrical body 172. The lower surface of the contact terminal 175 is formed as a flat surface and contacts the apex P of the dome portion 25A.

  The detection means 170 includes a holder 180 and first and second sensors 181 and 182 attached to the holder 180. The first and second sensors 181 and 182 include a light emitting unit (e.g., a light emitting diode as a light emitting element) 181a and 182a, and a light receiving unit (e.g., a photodiode, phototransistor, and photo IC as a light receiving element) 181b and 182b. A photosensor consisting of: In this embodiment, a photosensor is used in which the light emitting element is a light emitting diode and the light receiving element is a phototransistor.

  The holder 180 is attached to the holding member 178 via a connecting plate 183 so as to be positioned above the holding member 178, and a tip portion is positioned above the rod 174. The holder 180 has a through hole (or recess) 184 through which the upper end of the rod 174 can be inserted, and the first and second sensors 181 and 182 are vertically arranged on the inner wall of the through hole 184. They are spaced apart by about 1 to 3 mm. Each of the first and second sensors 181 and 182 includes a pair of light emitting diodes and phototransistors (181a, 181b, and 182a) embedded in the inner wall of the through hole 184 so as to be opposed to each other by 180 ° in the circumferential direction. 182b). The phototransistors 181b and 182b are configured to receive light emitted from the light emitting diodes 181a and 182a, convert the light into electrical signals, and send the electrical signals to the control unit 82. When the rod 174 rises to block the light from the light emitting diode 181a, the output signal of the phototransistor 181b changes. When the light from the light emitting diode 182a blocks, the output signal of the phototransistor 182b changes. Thereby, the height detecting means 88 is detected by the first and second sensors 181 and 182.

  The zero point adjusting mechanism 171 includes a holding member 186 that holds the cylindrical body 172, an adjustment screw 187 that moves the holding member 186 up and down, a screw support member 188 to which the adjustment screw 187 is attached, and the like. It is configured.

  The holding screw 185 is screwed into the adjustment screw 185, and a knob 185A is integrally formed at the upper end. A lock nut 190 is screwed into a portion between the knob 185A and the screw support member 186. ing. On the other hand, a ring 191 is attached to the lower end side of the adjusting screw 185, and a compression coil spring 192 is mounted between the ring 191 and the holding member 178, and backlash of the holding member 178 is caused. Prevents rattling. The screw support member 186 is fixed to the lower surface of the slider 161.

  The control unit 82 has a function of controlling the driving device 162 so as to change the height of the height measuring device 75 in accordance with the vertex height data input from the operation unit 80, and a setting table for the polishing jig conveying device 74. The air injection control device 166 provided in the middle of the pipe 112 is controlled according to the detection signal from the detection means 170 of the height measuring device 75 and the function of controlling the driving device 92 that moves 91 forward and backward. It has functions such as supply, stop, and flow rate control. When the control unit 82 receives the detection signal from the first sensor 181 during air injection, the control unit 82 sends a control signal to the air injection control device 166 so as to switch to injection with a smaller flow rate. When the detection signal from the second sensor 182 is received, it is determined that the apex height of the dome portion 25A has reached a predetermined height, and a control signal is sent to the air injection control device 166 so as to stop the air supply. .

Figure 8 is a diagram showing the injection circuit of the air injection control device 166, a pipe 112 connecting the air compressor 77 and the balloon member 25 has a branch channel A _1, A _2, the branch channel A _1, A ₂ Pressure regulator J provided on the front side and flow rate regulators F ₁ and F provided on each of A ₁ and A _2
2 and a switching valve G for switching the branch flow paths A ₁ and A ₂ . Flow rate per short air 23 flowing through the branch flow path A1, the flow regulator F _1, F ₂ Thus, the flow rate of the air 23 flowing through the branch flow path A ₂ is set sufficiently larger than the flow rate per unit time. In this case, the control of the air flow rate is performed by the control unit 80 that has received the detection signal from the first sensor 181 sending a control signal to the switching valve G so as to switch the branch flow path from A ₁ to A ₂ .

Next, the procedure of the curvature setting operation of the balloon member 25 by the curvature setting method and the curvature setting device 70 for the polishing jig will be described based on the flowchart shown in FIG.
Before starting the work, the zero point adjustment of the height measuring device 75 is performed in advance.

  Zero point adjustment is performed so that the height measuring device 75 can accurately detect the height from the reference surface H, and the height measuring device 75 detects the height of the reference surface H as zero. Thus, the height position of the height measuring device 75 with respect to the slider 161 is adjusted.

When this zero point adjustment is performed, the slider 161 is positioned at the lowest point position (zero point adjustment position Q ₁ ) as shown in FIG. This zero point adjustment position Q ₁ is a position for detecting zero height, and is a pulse having a predetermined number of pulses (20,000 pulses in this embodiment) from the origin position Q _{0 of the} slider 161 set in advance. This is the position where the signal is sent to the stepping motor 162 and lowered.

The origin position Q ₀ is set to a predetermined height in consideration of the height of the height measuring device 75, the height measurement range of the polishing jig, and the like. In this embodiment, the slider 161 is Yes as full stop at a predetermined height on the Z-axis guide, and its position as the origin position Q ₀ by the detection signal by the home position sensor 163 when the slider 161 is raised . In the following description, when the position of the slider 161 on the Z-axis guide is represented by the number of pulses, the pulse that raises the slider 161 is counted as plus, and the pulse that descends is counted as minus, and the origin position Q
_{The zero} position is set to 20,000 pulses, and the zero point adjustment position Q ₁ is set to zero pulses.

In the state where the slider 161 is lowered to the zero point adjustment position Q ₁ , in FIG. 17A, the lower surface of the contact terminal 175 contacts the reference surface H, and the retaining ring 177 is spaced upward from the upper surface of the holding member 178. The upper end of the rod 174 is located below the first sensor 181 and does not block the light from the light emitting diode 181a.

Next, the holding screw 185 is gradually lowered by rotating the adjusting screw 185, and the rotation of the adjusting screw 185 is stopped at the moment when the rod 174 blocks the light emitted from the light emitting diode 181a and the first sensor 181 detects it. The holding member 178 is fixed at the position, and the zero point adjustment of the height measuring device 75 is finished (this state is indicated by a two-dot chain line). At this time, in the zero point adjustment position Q ₁ , the contact terminal 175 is in contact with the reference plane H, and the detection means 170 has detected the height detection means 88. When the number of pulses is zero, the height measurement device 75 The height detected by is adjusted to zero.

Next, (step 200 in FIG. 18) and the power switch 81 to ON, move returning the installation base 91 to the jig mounting position C ₁ (step 201). Further, the slider 161 sends a pulse signal to the stepping motor 162 is raised to the original position Q ₀ in step 202, to wait for a height measuring device upward (FIG. 17 (b)). When the slider 161 is raised to a predetermined position to detect the origin positioning sensor 163 is a slider 161, the detection signal is driving the stepping motor 162 is stopped by the control unit and sent to the control unit, the slider 161 to the home position Q ₀ is Stop.

  Next, the polishing jig 9 described in the processing instruction column of the instruction sheet for the lens 5 to be polished is selected and installed on the installation table 91 (step 203). At this time, the polishing pad 10 is not yet attached to the balloon member 25. In order to install the polishing jig 9 on the installation base 91, the polishing jig 9 is placed on the installation base 91 as shown in FIG. 5 and the injection port member 98 is inserted into the through hole 42 through the cover member 102. In addition, the polishing jig 9 may be positioned in the front-rear and left-right directions with respect to the installation base 91 by engaging the positioning recesses 38, 39 and the positioning pins 99a, 99b shown in FIG. In this state, the lower surface 43a of the valve body 43 faces the upper surface of the elastically deforming portion 102A of the cover member 102 with a slight gap as shown in FIG. 5, and the lower end portion of the exhaust pin 47 is loose in the recess 103. The air 23 can be supplied to the balloon member 25 by being inserted.

  Next, the vertex height data of the balloon member 25 of the polishing jig 9 installed on the installation table 91 is confirmed according to the instruction sheet, and the data is input to the control unit 82 by the height data input means 83 (step). 204).

When the data input and the installation of the polishing jig 9 on the installation table 91 are completed, the start button 84 is operated (step 205). Accordingly, the control unit 82 performs arithmetic processing based on the input data, drives the stepping motor 162 by a predetermined number of pulses, and lowers the slider 161 from the origin position Q ₀ by a predetermined amount as shown in FIG. The height measuring device 75 is held at a predetermined height position corresponding to the input data (step 206).

The control of the stepping motor 162 will be described in more detail with reference to FIG. 19. The vertex height data input to the control unit 82 and stored in the vertex height data storage unit 193 is converted into the number of pulses in the arithmetic processing unit 194. The number of pulses obtained by subtracting the number of pulses at the height of the apex from the number of pulses at the origin position Q ₀ of the slider 161 is calculated, a pulse signal having the number of pulses is generated from the pulse oscillator 195, and a stepping motor drive signal is generated by the drive circuit 196. And is sent to the stepping motor 162 to drive the stepping motor 162 and lower the slider 161.

Further, it starts lowering substantially air cylinder 92 at the same time the height measuring apparatus 75 installation base 91 is driven to start to move from the jig mounting position C ₁ to height measurement position C ₂ (step 207). When the movable member 151 of the rodless air cylinder 92 is moved by the cylinder body 150, the engaging portion 155a (FIG. 4) of the movable member 151 moves the engaging portion 100 of the installing base 91. This is done by pressing in the moving direction of the member 151 and moving the installation base 91 along the upper surface of the guide member 152. The respective moving speeds of the height measuring device 75 and the installation table 91 are set so that the arrival of the installation table 91 at the height measurement position C ₂ comes before the predetermined position of the height measurement device 75 arrives.

When the height measuring device 75 and the polishing jig 9 are moved to predetermined positions and the completion of the movement is confirmed (step 208), the switching valve G is switched from the closed state to the branch flow path A ₁ by a signal from the control unit 82. The state is switched to the state in which the balloon member 25 is connected. Thereby, the air 23 supplied from the air supply device 77 is injected into the balloon member 25 via the branch flow path A ₁ and the switching valve G. (Step 209: first injection step).

  In the first injection step, the injection is performed at a large flow rate in order to shorten the injection time. The injection with the large flow rate is performed until the first sensor 181 detects the rod 174 (step 210). When air 23 is injected into the balloon member 25 and the dome portion 25A is inflated, the dome portion 25A is inflated, so that the height of the apex P (FIG. 7) gradually increases, and the contact terminal 175 is pushed up. Then, when the rod 174 blocks the light of the light emitting diode 181 a and the first sensor 181 detects the rod 174, the detection signal is sent to the control unit 82. Based on this detection signal, the control unit 82 determines that the height of the dome portion 25A is lower than the predetermined height by a predetermined distance, that is, about 1 to 3 mm lower than the value input to the control unit 82. By switching G and connecting the branch flow path A2 to the balloon member 25, the injection amount of the air 23 is switched to a small flow rate (step 211: second injection step).

  When the air 23 is injected by the small flow rate, the height detecting means 88 is further pushed up by the dome portion 25A, the rod 174 blocks the light of the light emitting diode 182a, and the second sensor 182 detects the rod 174 (step 212). A detection signal is sent to the control unit 82. The control unit 82 determines that the height of the dome portion 25A has reached a predetermined height based on this detection signal, and closes the switching valve G, thereby stopping the supply of the air 23 from the air supply device 77 (step). 213).

  When air 23 is injected into the sealed space 32 and the dome portion 25A is expanded, the radius of curvature of the cross section including the central axis of the dome portion 25A is minimized in the minor axis direction (Y direction in FIG. 10), and the major axis direction ( A shape close to the toric surface that is maximum in the direction (X direction in FIG. 10) is formed. In this case, since the radius of curvature of the dome portion 25A changes according to the center height (vertex height) of the dome portion 25A as shown in FIG. 13, the height measuring device 75 measures the height of the dome center. By adjusting, the curvature radius of dome part 25A can be made into a desired curvature radius. Note that FIG. 13 shows the jig height in the polishing jig 9 having the balloon member 25 in which the long axis of the dome portion 25A is 90 mmφ and the ratio of the short axis to the long axis is 0.9 (from the bottom surface of the polishing jig to the center of the dome portion). It is a figure which shows the relationship between the height to a) and the curvature radius of the dome part 25A.

When the injection of the air 23 into the balloon member 25 is completed, the height measuring device 75 is returned to the origin position Q ₀ (step 214), the installation table 91 is returned to the jig mounting position C ₁ (step 215), and further polishing is performed. When the jig 9 is removed from the installation base 91 (step 216), the curvature setting operation of the balloon member 25 by the polishing jig curvature setting device 70 is completed (step 217), and the power switch is turned OFF (step 218). Furthermore, when performing the curvature setting operation of the other balloon member 25 continuously, the operation after step 203 is repeated.

  The polishing jig 9 in which the air 23 is injected into the balloon member 25 is removed from the installation base 91, and then the polishing pad 10 is attached and attached to the swing device 8 of the polishing apparatus 1 shown in FIG. Thus, the lens 5 is used for polishing the concave surface.

  In such a curvature setting device 70 for a polishing jig, the injection of the air 23 is expanded at once to a certain height by the first injection step with a large flow rate, and then slowly expanded by the second injection step with a small flow rate. Since the height is set to a predetermined height, an error in the air injection amount due to an error in the air injection stop timing can be reduced. In addition, the injection amount from the detection by the second sensor 182 to the stop of air injection can be reduced. Therefore, the time required for the injection is short and the error of the apex height is small. The operation of drawing the air after the injection and adjusting the height is unnecessary, and the curvature setting operation can be completely automated.

Further, the first and second sensors 181 and 182 are used as the height detection means 170, and the control unit 82 controls the switching valve G based on the detection signal to switch the flow rate of the air 23 or supply the air 23. Therefore, the structure is simple and can be manufactured at low cost.
In the case of this embodiment, since the pressure change when the flow rate is switched can be reduced, a small flow rate of air can be stably injected even when the pressure in the sealed space 32 is high.

FIG. 20 is a diagram showing another embodiment of the air injection circuit.
This embodiment, pressure regulator J ₁ to the branch paths A _1, A _2, instead of placing a pressure regulator J shown in FIG. 8 in the piping 112, J ₂ Are provided. The air 23 flowing through the branch flow path A ₁ is set larger than the pressure of the air 23 flowing through the branch flow path A ₂ by the pressure regulators J ₁ and J ₂ .
Thus, even if the pressure and flow rate of the air 23 are switched in the first and second injection steps, the same effects as those of the above-described embodiment can be obtained.

  In the above-described embodiment, the case of the two-stage injection method of the first injection process having a high flow rate and the second injection process having a low flow rate has been described. However, three or more different flow rates per unit time are used. The injection process may be performed step by step in order of increasing flow rate. In this case, it is preferable to increase the number of sensors of the detection means according to the number of times of switching.

FIG. 21 is a diagram showing still another embodiment of the air injection circuit.
In this embodiment, a branch passage A ₃ is additionally provided in the air injection circuit shown in FIG. 8, a flow regulator F ₃ is provided in the branch passage A _3, and _three branches are provided by a switching valve G ″. The flow paths A ₁ , A ₂ and A ₃ are switched.

The air 23 flowing in the branch channel A ₃ is set to be larger than the flow rate of the air 23 flowing in the branch channel A ₂ by the flow rate regulator F ₃ and smaller than the flow rate of air flowing in the branch channel A ₁ . . Then, the control unit 82 selects the branch flow path used in the first injection process according to the vertex height data stored in the vertex height data storage unit, and sends a control signal to the switching valve G ″. Switch the feed branch flow path. For example, if the apex height stored in the data storage unit is less than or equal to a predetermined height, the flow is first switched to the branch flow path A ₃ and injected at a medium flow rate, and the branch is made when the first sensor detects it. Switch to the flow path A ₂ and inject at a low flow rate. When the vertex height stored in the data storage unit is equal to or higher than the predetermined height, the first sensor switches to the branch flow path A ₁ and injects at a high flow rate, and is detected by the first sensor. Sometimes it is switched to the branch flow path A ₂ and injected at a low flow rate. By doing this, it is possible to select an appropriate injection amount according to the vertex height, so even when the vertex height is low, the vertex height can be set accurately, and when the vertex height is high Since the injection can be switched to a larger flow rate, the injection can be performed in a shorter time. When the apex height is lower (for example, when the difference in height before and after air injection is less than or equal to the difference in height between the first and second sensors 181 and 182), from the beginning. The branch flow path A ₂ may be used to inject at a small flow rate, and the detection signal from the first sensor 181 may be received or injected as it is.

FIG. 22 is a diagram showing still another embodiment of the air injection circuit.
In this embodiment, a flow rate regulator F ₄ is provided in one flow path, and the flow rate regulator F ₄ is controlled by a control unit to change the flow rate. In this case, the valve G ′ ″ is an open / close valve that does not have a switching function. First, a control signal is sent to the flow rate regulator F ₄ to increase the flow rate, and then the valve G ′ ″ is opened to inject air. When a detection signal is sent from the first sensor, the control unit sends a control signal to the flow rate regulator F ₄ so as to reduce the flow rate. When a detection signal is sent from the second sensor, a control signal is sent from the control unit to the valve G ′ ″ so as to close the valve G ′ ″. In this way, the control is more complicated than when the branch flow path is switched by the switching valve as in the above-described embodiment, but there is an advantage that the injection flow rate can be arbitrarily changed. In this case, the flow rate can be continuously changed from a large flow rate to a small flow rate according to a detection signal from the height detection means.

  In the above-described embodiment, the gap type photosensor is used as the detection unit 170. However, the present invention is not limited to this, and a reflection type photosensor may be used.

It is a front view which shows one Embodiment of the curvature setting apparatus for polishing jigs which employ | adopted the air injection method which concerns on this invention. It is side sectional drawing which similarly shows a curvature setting apparatus. It is a top view which shows the state which installed the grinding jig in the installation stand. It is an expanded sectional view in the IV-IV line of FIG. It is sectional drawing which shows the structure and valve | bulb of an air inlet part. It is sectional drawing which shows the state of the elastic member at the time of air supply. It is sectional drawing of a height measuring apparatus. It is a figure which shows an air injection circuit. It is a schematic block diagram of the grinding | polishing apparatus in which a curvature setting apparatus is used similarly. It is a top view which shows the polishing jig | tool with which the polishing pad was attached. It is a bottom view which similarly shows a grinding | polishing jig | tool. It is the XII-XII sectional view taken on the line of FIG. It is a figure which shows the relationship between the height of a grinding | polishing jig | tool, and the curvature radius of the dome part of a balloon member. It is a top view which shows a polishing pad. It is a perspective view which shows the clamping member of a polishing pad. (A), (b) is a conceptual diagram which shows the track-less grinding | polishing locus | trajectory of a grinding | polishing apparatus, respectively. (A), (b), (c) is a figure for demonstrating the zero point adjustment of a height measuring apparatus, and the measurement of the vertex height of a dome part. It is a flowchart which shows the procedure of the curvature setting operation of the balloon member by a curvature setting apparatus. It is a block diagram of a curvature setting device. It is a figure which shows other embodiment of an air injection circuit. It is a figure which shows further embodiment of an air injection circuit. It is a figure which shows another embodiment of an air injection circuit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Polishing apparatus, 5 ... Lens, 5a ... Convex surface, 5b ... Concave surface, 9 ... Polishing jig, 23 ... Air, 25 ... Balloon member, 25A ... Dome part, 27 ... Valve, 70 ... Curvature setting apparatus for polishing jig , 74 ... Polishing jig conveying device, 75 ... Height measuring device, 77 ... Air supply device, 83 ... Height data input means, 88 ... Height detection means, 166 ... Air injection control device, 170 ... Detection means, 171 ... Zero point adjustment mechanism, 174 ... Rod, 175 ... Contact terminal, 181 ... First sensor, 182 ... Second sensor, A ₁ , A ₂ , A ₃ ... Branch channel, C ₁ ... Jig mounting position, C ₂ ... Height measurement position, H ... Reference plane, F ₁ , F ₂ , F ₃ ... Flow rate regulator, G, G "... Switching valve, G ''' ... _{valve, J 1, J 2, J} 3 ... pressure regulator.

Claims (3)

A polishing jig curvature setting device that expands the surface of the balloon member into a dome shape by supplying air to the balloon member of the polishing jig and sets the predetermined curvature.
An installation base having an air inlet for supplying air to the balloon member and on which the polishing jig is installed;
Air supply means for injecting air into the air inlet;
A height measuring device for detecting the height of the surface of the balloon member;
The height measuring device can detect a plurality of different heights;
A curvature setting device for a polishing jig, wherein air is injected by changing an air supply flow rate per unit time of the air supply means to a low flow rate based on a detection signal from the height measuring device. The curvature setting device for a polishing jig according to claim 1,
The air supply means has a plurality of branch flow paths with different air supply flow rates per unit time,
A curvature setting device for a polishing jig, wherein the flow rate is changed by switching these branch flow paths based on a detection signal from the height measuring device. A method of injecting air into a polishing jig to set a predetermined curvature by expanding the surface of the balloon member into a dome shape by supplying air to the balloon member of the polishing jig,
After starting the air supply, the air supply amount per unit time is changed to a low flow rate based on the detection signal that the height of the surface of the balloon member is a predetermined distance lower than the predetermined height, A polishing treatment, wherein the supply of air is stopped and the surface of the balloon member is set to a predetermined height based on a detection signal that detects that the surface of the balloon member has reached the predetermined height. How to inject air into the tool.

Images