JP2005070446A - Graph display system and graph preparation method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a display system and a graph preparation method for displaying many graphs based on data retrieved from a database stored in a server computer on a terminal device in a short time. <P>SOLUTION: The graph display system has a database server 11, a data retrieval server 12 and a terminal device 13 which are mutually connected. A database 11a is stored in the database server 11. A data retrieval part 12a reads out data from the database 11a. A graph file is prepared in a graph data preparation part 12b on the basis of read-out data and is stored in a graph file storage part 12c. Therefore, a load of graph preparation is eliminated in the terminal device 13. Consequently, the terminal device 13 can read out, expand, and display the graph file as a graph in a short time. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a graph display system and a graph creation method used for displaying a plurality of graphs at high speed.

  In the manufacture of a semiconductor device, particularly an LSI, there are a large number of processes up to several hundreds, and a large number of manufacturing apparatuses are used. For this reason, a computer integrated production system (CIM) is used in managing the manufacturing process, the manufacturing apparatus, the manufacturing conditions, and the like. A CIM is accessed by many clients in order to execute various LSI processes on a production line or a development line. Therefore, in the CIM for LSI, a distributed system using a plurality of terminal devices (for example, personal computer PC) on the client side is introduced together with data management by a server computer. Using this terminal device, a client accesses data from a server computer, processes the data, creates a graph, etc., displays it on a screen, and examines the processing contents (for example, patents). Reference 1).

  By using a distributed CIM system, many clients can easily access manufacturing data, efficiently manage manufacturing processes, and accelerate production or development of products.

  However, since LSI is miniaturized and the manufacturing process is complicated, precise control of manufacturing conditions is required in the manufacturing process. For this reason, the amount of data to be handled becomes very large, and the number of graphs for grasping the status of the manufacturing process also increases. For this reason, it takes time to process data in the terminal device on the client side, which is one of the causes of delay in the progress of the manufacturing process.

  In a conventional graph display system for a terminal device, graph graphic data is created based on all necessary data in a client terminal device, and is expanded into a graph and displayed on a screen. Therefore, as the number of necessary graphs increases, the time for creating these graphs becomes very long.

Also, when outputting graphs to the screen of the terminal device, if many graphs are displayed on the same screen, the amount of memory used will be very large, and a page fault that frequently accesses the disk area of the terminal device will occur. There arises a problem that the processing speed of the apparatus becomes extremely slow.
Japanese Patent Laid-Open No. 10-188209 (P5, FIG. 1)

  The present invention has been made in view of such circumstances, and an object of the present invention is to create data obtained by searching from a database stored in a server computer as a large number of graphs. Is to provide a graph display system and a graph creation method.

  In order to solve the above-described problem, a first aspect of the present invention is a graph display system connected to a first server computer having a database for storing various data, the first server computer, and the first server computer. Means for retrieving and reading data from the database of one server computer, means for creating a graph file including screen coordinate data on which the data is plotted from the read data, and means for storing the graph file A second server computer comprising: a second server computer connected to the second server computer; and the graph file read from the second server computer; and the read graph file is expanded to display one or more graphs. And a terminal device comprising means for displaying And butterflies.

  The second aspect of the present invention is a graph having a first server computer, a second server computer connected to the first server computer, and a terminal device connected to the second server computer. A display system graph creation method, wherein a second server computer reads data from a database of the first server computer and creates a graph file including screen coordinate data plotted from the read data The terminal device reads the graph file from the second server computer, expands the read graph file, and displays one or more graphs.

  As described above in detail, according to the present invention, it is possible to provide a graph display system capable of displaying a large number of graphs in a terminal device in a short time by creating a graph file in the second server computer.

  Further, a graph creation method for creating an appropriate graph in a short time can be obtained by appropriately selecting data in the second server computer. Thereby, a large number of graphs can be displayed in the terminal device in a short time.

  Embodiments of the present invention will be described below with reference to the drawings.

  In the first embodiment, an example in which the graph display system of the present invention is applied to a graph display of quality data of a semiconductor manufacturing process will be described. FIG. 1 is a block diagram showing Embodiment 1 of a graph display system according to the present invention.

  For example, quality data is transmitted and stored in the database unit 11a of the database server 11 that is the first server computer from the site of the manufacturing process in the semiconductor factory.

  The data search server 12, which is a second server computer, includes a data search unit 12a, a graph data creation unit 12b, and a graph file storage unit 12c. The data retrieval unit 12a periodically retrieves data stored in the database unit 11a of the database 11, for example, once every half day.

  The data search unit 12a transmits data obtained from the search of the database unit 11a to the graph data creation unit 12b. Further, the data search unit 12a creates a searched data search list and stores it inside.

  Based on the data sent from the data search unit 12a, the graph data creation unit 12b generates new data that can be created, including coordinate data, and stores it as a graph file. Write to part 12c.

  The terminal device 13 on the client side includes a data receiving unit 13a, a data reading / expanding unit 13b, and a graph drawing creation / display unit 13c.

  The data receiving unit 13a reads a graph file from the graph file storage unit 12c of the data search server 12, reads a data search list from the data search unit 12a, and sends the data search list to the data reading and expanding unit 13b. The read graph file and data search list are expanded as data that enables graph display in the data reading and expansion unit 13b.

  Finally, the developed data is converted and displayed by the graph creation and display unit 13c according to the display screen of the terminal device 13. It is also possible to install a plurality of terminal devices 13 and operate them independently.

  An example of the display screen and the displayed graph in the terminal device 13 is shown in FIG. In FIG. 2, the display screen 20 is composed of a plurality of graph areas 21. In each graph area 21, the width and height of the graph are determined, and the position thereof is determined by the graph arrangement coordinates 22.

  In each graph area 21, a graph display area 23 is defined by determining an upper margin, a lower margin, a left margin, and a right margin. Further, according to the graph display coordinates 24, measurement data, measurement contents, etc. are plotted, and a graph 25 is drawn. These graphs 25 are displayed on the display screen 20 as n vertically and m horizontally.

  A series of flow charts of data search by the data search unit 12a in the data search server 12 is shown in FIG.

  First, at the start of the sequence (step S1), the data search unit 12a reads the processing content instructed by the external client and decodes it (step S2). Next, the user ID, password, database ID, and the like described in the processing contents from the client are identified and connected to the database unit 11a (step S3). The data search unit 12a further searches the database unit 11a for a data table of a predetermined process defined in the processing content, for example, a data table of the lithography quality control process (step S4).

  Subsequently, the data defining the field is retrieved from the retrieved data table (step S5). Based on the data defining the field, detailed data of the lithography quality control process, for example, dimension measurement data, alignment measurement, film Data such as thickness measurement is retrieved from the data table (step S6).

  The searched data is input as a data search list such as product type, process QC table name, comment for each process QC table, search start date / time, search end date / time, etc., and stored in the data search unit 12a (step S7). ).

  Next, the data search unit 12a transfers the searched data to the graph data creation unit 12b (step S8).

  Further, steps S5 to S8 are repeatedly executed until all the processing contents designated by the client are completed. If the data table of the predetermined process defined in the processing content is further present after the process by the repetition is completed, the process returns to step S4 and the data table is searched.

  After all the processes having the designated processing contents are completed, the connection between the data search unit 12a of the data search server 12 and the database unit 11a of the database server 11 is disconnected (step S9). Thus, the data search sequence is completed (S10).

  For example, FIG. 4A shows a data table in the lithography process as an example of the data table in the quality control process.

  The data table is composed of product type, lot number, process, processing date and time related to these data, index data such as processing devices, and measurement data such as sunpo0010 and sunpo0020. The process described in the data table is defined as the process QC, and the contents thereof are determined. For example, sunpo0010 is data of size 1, and sunpo0020 is data of size 2 (FIG. 4B).

  An example of the data search list stored in the data search unit 12a is shown in FIG. It is classified into the product type, table name, comment, etc., and the record is left, so that the search from the terminal device 13 described later can be easily performed.

  Next, FIG. 5 shows a processing flow chart of graph file creation in the graph data creation unit 12b. First, at the start of the sequence (step S11), the graph data creation unit 12b reads the data defining the processing content instructed by the external client, stored in the data search unit 12a, and decodes the processing content. (Step S12). Next, the user ID, password, database ID, and the like described in the processing content are identified, and predetermined data is read from the data search unit 12a (step S13).

  Subsequently, based on the number of graph areas 21 defined in the processing content, an arrangement configuration, graph arrangement coordinates 22 and the like are assigned to the display screen 20 (step S14). Next, based on the data of the data search unit 12a, the position and size of the graph display area 23 in the graph area 21 and the margins in the graph area 21 are determined (step S15).

  Further, the origin of coordinates is determined, numerical values such as a vertical axis and a horizontal axis are determined, and graph display coordinates 24 of graph data are given based on the origin (step S16). Thereby, each graph 25 is developed for each graph display area 23 (step S17).

  In addition, the display of index data such as each processing date / time, type, and lot number of the corresponding type and process record in each graph display area 23 can be displayed in the same manner (step S18). After the processing is completed for all the graph data, it is transferred to the graph file storage unit 12c (step S19).

  Steps S15 to S19 are repeatedly executed until all the specified processing details are completed, and the sequence ends when all the specified processing details are executed (step S20).

  It should be noted that the display screen 20 is not necessarily one screen, and it is needless to say that a plurality of display screens 20 may be provided when the number of the graphs 25 is large.

  Next, FIG. 6 shows a processing flowchart from reading of the graph file to display of the graph in the terminal device 13.

  First, at the start of the sequence (step S21), the terminal device 13 reads the data search list from the data search unit 12a of the data search server 12 (step S22) and displays it on the screen of the terminal device 13 (step S23). When a quality control data table for a specific process is selected from the contents of the data search list (step S24), a graph file of the data table for the quality control process for the corresponding product type, process, etc. is stored in the graph file storage unit 12c of the data search server 12. (Step S25).

  Corresponds to the number of vertical and horizontal graphs read into the terminal device 13, the graph width, the graph height, the vertical and horizontal margins, the graph layout indicated by the graph layout coordinates 22, the title displayed on the graph 25, and the original data of the graph 25. A graph list is created using screen coordinates or the like in the graph display area 23 (step S26).

  In order to draw a figure on the display screen 20, the graph arrangement coordinates 22 are converted into screen coordinates within the display screen (step S27), and a graph list is displayed on the screen of the terminal device 13 (step S28). Thus, the sequence is finished (step S9).

  The terminal device 13 also has a function of displaying an enlarged graph of the graph by clicking or double-clicking a specific graph from among a plurality of graphs displayed on the screen as a graph list. An example of the enlarged graph is shown in FIG. FIG. 7B is a screen display of a graph list. With this function, the contents of an arbitrary graph can be read in more detail.

  According to the present embodiment, a graph creation method capable of displaying a large number of graphs in the terminal device 13 in a short time can be obtained by creating a graph file in the data search server 12 which is the second server computer.

  FIG. 8 shows a graph explanatory diagram in Embodiment 2 of the graph creation method according to the present invention. In order to accurately represent the graph, in principle, all the data obtained by the measurement are plotted. On the other hand, the more measurement points, the longer it takes to create the graph. Therefore, in order to create an appropriate graph in a short time, the method described below is used as an example.

  FIG. 8 is an explanatory diagram of a graph representing temperature trend data. This trend data is performed, for example, to check the accuracy of temperature control in a heat treatment furnace. Further, the processing described below is instructed to the data search server 12 as processing contents by an external client.

  An average value 81 and its standard deviation values (3σ) 82a and 82b are calculated from all data. Next, data out of this range is deleted from the processing target as an abnormal value 83.

  Subsequently, standard deviation values (σ) 84 a and 84 b are calculated for the data excluding the abnormal value 83. On the other hand, the number of plots and the plot interval are determined based on the number of data. Next, data for each plot interval is extracted. Further, data deviating from the standard deviation values (σ) 84a and 84b are extracted and added to the plot as additional data 85 if necessary.

  According to the present embodiment, a graph creation method for creating an appropriate graph in a short time can be obtained by appropriately selecting data. Thereby, a large number of graphs can be displayed in the terminal device in a short time.

(Modification)
FIG. 9 shows a modification of the second embodiment of the graph creation method. In this modification, a method for setting a reference value will be described as an example of an abnormal value deletion method.

  Further, the processing described below is instructed to the data search server 12 as processing contents by an external client.

  FIG. 9 is an explanatory diagram of a graph representing the trend data of the temperature similar to FIG. First, reference values 82c and 82d are set in advance. Next, the average value 81 is calculated from all the data, and then the data that exceeds the reference values 82c and 82d is deleted from the processing target as the abnormal value 83.

  Subsequently, standard deviation values (σ) 84 a and 84 b are calculated for the data excluding the abnormal value 81. On the other hand, the number of plots and the plot interval are determined based on the number of data. Next, data for each plot interval is extracted. Further, data deviating from the standard deviation values (σ) 84a and 84b are extracted and added to the plot as additional data 85 if necessary.

  According to this modification, a graph creation method for creating an appropriate graph in a short time can be obtained by appropriately selecting data.

  Example 3 of the graph creation method according to the present invention relates to a graph creation method for creating an appropriate graph in a short time.

  Further, the processing described below is instructed to the data search server 12 as processing contents by an external client.

  FIG. 10 is an explanatory diagram of a graph representing trend data that changes with time. In the present embodiment, a method of expressing an approximate curve of measurement data as a function is shown.

  First, the function F (x) 101 and its standard deviation values (3σ) 102a and 102b are calculated from all data. Next, data out of this range is deleted from the processing target as the abnormal value 103.

  Subsequently, standard deviation values (σ) 104 a and 104 b are calculated for the data excluding the abnormal value 103. On the other hand, the number of plots and the plot interval are determined based on the number of data. Next, data for each plot interval is extracted. Further, data deviating from the standard deviation values (σ) 104 a and 104 b are extracted, and a plot is added as additional data 105 if necessary.

  According to the present embodiment, a graph creation method for creating an appropriate graph in a short time can be obtained by deriving a function that approximates a graph from data. It is also possible to predict a trend using a function.

(Modification)
FIG. 11 shows a modification of the third embodiment of the graph creation method. In this modification, a method for setting a reference value will be described as an example of an abnormal value deletion method.

  Further, the processing described below is instructed to the data search server 12 as processing contents by an external client.

  First, a function F (x) 101 is obtained from all data, and reference values 102c and 102d are set based on the function F (x) 101. Next, data out of this range is deleted from the processing target as the abnormal value 103.

  Subsequently, standard deviation values (σ) 104 a and 104 b are calculated for the data excluding the abnormal value 103. On the other hand, the number of plots and the plot interval are determined based on the number of data. Next, data for each plot interval is extracted. Further, data deviating from the standard deviation values (σ) 104 a and 104 b are extracted, and a plot is added as additional data 105 if necessary.

  According to this modification, a graph creation method for creating an appropriate graph in a short time can be obtained by deriving a function that approximates a graph from data. Thereby, many graphs can be displayed in a short time in the terminal device. It is also possible to predict a trend using a function.

  In addition, this invention is not limited to the Example mentioned above at all, It can implement in various changes within the range which does not deviate from the main point of this invention.

The block diagram which shows 1st Embodiment of the graph display system by this invention. The conceptual diagram which shows the structural example of the screen display in 1st Embodiment of the graph display system by this invention. The flowchart which shows the operation | movement sequence of the data search part in 1st Embodiment of the graph display system by this invention. The list which shows the example of the data in 1st Embodiment of the graph display system by this invention. The flowchart which shows the operation | movement sequence of the graph data preparation part in 1st Embodiment of the graph display system by this invention. The flowchart which shows the operation | movement sequence of the terminal device in 1st Embodiment of the graph display system by this invention. The figure which shows the example of the screen display in 1st Embodiment of the graph display system by this invention. Explanatory drawing in 2nd Embodiment of the graph display method by this invention. Explanatory drawing which shows the modification in 2nd Embodiment of the graph display method by this invention. Explanatory drawing of the graph in 3rd Embodiment of the graph display method by this invention. Graph explanatory drawing which shows the modification in 3rd Embodiment of the graph display method by this invention.

Explanation of symbols

11 Database server 11a Database unit 12 Data search server 12a Data search unit 12b Graph creation unit 12c Graph file storage unit 13 Terminal device 13a Data reception unit 13b Data reading and expansion unit 13c Graph figure creation and display unit 20 Display screen 21 Graph area 22 Graph arrangement coordinate 23 Graph display area 24 Graph display coordinate 25 Graph 81, 101 Average value 82a, 82b, 102a, 102b Standard deviation value (3σ)
83, 103 Abnormal value 84a, 84b, 104a, 104b Standard deviation value (σ)
85, 105 Additional data 82c, 82d, 102c, 102d Reference value

Claims (11)

A first server computer comprising a database for storing various data;
A graph file that is connected to the first server computer and includes means for retrieving and reading data from the database of the first server computer, and screen coordinate data on which the data is plotted is created from the read data. A second server computer comprising means and means for storing the graph file;
A terminal connected to the second server computer and comprising means for reading the graph file from the second server computer, and means for expanding the read graph file and displaying one or more graphs And a graph display system. The graph display system according to claim 1, wherein the screen coordinate data further includes data obtained by extracting features of the graph from the data. The graph display system according to claim 2, wherein the data from which the characteristics of the graph are extracted is expressed as a function. The graph display system according to claim 1, wherein the reading unit of the second server computer reads quality control process data as search data. The graph display system according to claim 4, wherein the display unit of the terminal device reads the graph file based on data of the selected quality control process and displays the graph file. The graph display system according to claim 1, wherein the terminal device includes means for enlarging and displaying a part of a plurality of graphs displayed on the screen of the terminal device. A graph creation method for a graph display system having a first server computer, a second server computer connected to the first server computer, and a terminal device connected to the second server computer,
The second server computer reads data from the database of the first server computer,
Create and store a graph file containing screen coordinate data plotted from the read data,
The terminal device reads the graph file from the second server computer, expands the read graph file, and displays one or more graphs. The graph creation method according to claim 7, wherein the screen coordinate data further includes data obtained by extracting features of the graph from the data. The graph creation method according to claim 8, wherein the data from which the characteristics of the graph are extracted is expressed as a function. The graph creation method according to claim 7, wherein the second server computer reads quality control process data from a database of the first server computer. The graph creation method according to claim 10, wherein the terminal device reads the graph file based on data of the selected quality control process, and displays the graph file.

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