JP2005069456A - Annular orifice and flow rate control valve or pressure control valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an annular orifice capable of being simply manufactured with high precision even when cross sectional area is comparatively small or large depth is required and to provide a flow rate control valve or a pressure control valve using the annular orifice. <P>SOLUTION: This annular orifice formed in an inside flow passage of fluid equipment is composed of a through hole having larger cross sectional area than required cross sectional area of the orifice and a rod inserted into the through hole and adjusted in such a way that its cross sectional area becomes the cross sectional area of the orifice requiring difference between the cross sectional area of the orifice and the cross sectional area of the through hole. The flow rate control valve incorporates one or more poppet valve mechanisms adopting the annular orifice. The flow rate control valve or the pressure control valve incorporates two or more poppet valve mechanisms adopting the annular orifice. Cross sectional areas of the annular orifices are the same or cross sectional areas of a part or all of the annular orifices differ from each other. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention is compared to a fluid device such as a valve for controlling a pressure fluid and an actuator operated by the pressure fluid, particularly an orifice having a small cross-sectional area (for example, a cross-sectional area corresponding to a hole having an inner diameter of less than φ1), and a cross-sectional area. Thus, the present invention relates to a fluid device having an orifice with a depth (for example, an aspect ratio (= depth of hole / inner diameter of hole) exceeding 5).
Generally, one or more flow paths through which a fluid passes are formed inside the fluid device, and one or more orifices are formed in the middle of the flow path. The shape and size of the orifice is an important factor that determines the flow characteristics of the fluid device. As fluidic devices have become smaller and more precise, it has become necessary to manufacture orifices with a small cross-sectional area with high precision.

Conventionally, in order to digitally adjust the operation speed of a device operated by a fluid, a cross-sectional area of the solenoid valve manifold that discharges the fluid for controlling the fluid operation device and a flow path connecting the fluid operation device is changed. 2. Description of the Related Art There is known a fluid regulator speed adjusting device in which orifice blocks having different orifices are installed in a rotatable manner (see, for example, Patent Document 1). In the fluid regulator speed adjusting device, the orifice block can be rotated and an orifice having an appropriate cross-sectional area can be selected in order to obtain a desired operating speed.
Japanese Patent Laid-Open No. 2000-9240

  However, in Patent Document 1, in order to digitally change the operation speed at an appropriate interval, it is necessary to appropriately change the cross-sectional areas of the plurality of orifices provided in the orifice block. For example, when four orifices are provided, each inner diameter is determined as shown in Table 1 from the required flow rate. It is very difficult to machine an orifice having a determined inner diameter with high accuracy by machining such as a drill. In particular, it is remarkable when drilling with an inner diameter of less than φ1 or drilling with an aspect ratio exceeding 5 is required. In such a case, processing takes time and labor, and the cost increases.

  In order to determine the inner diameter of the orifice, normally, following the procedure shown in Table 1, a prototype is made, and it is confirmed whether a desired flow rate can be obtained. If an error that can not be put to practical use occurs, trial and error are repeated. In addition, users of fluidic devices often modify the device on which the fluidic device is mounted. This modification may change the required flow rate. In either case, the cross-sectional area cannot be easily changed with an orifice manufactured only by drilling.

本発明は斯かる従来の問題点を解決するために為されたもので、その目的は、比較的断面積が小さい、または深さを必要とする場合であっても、高精度かつ簡便に製作できる環状オリフィスを提供することにある。

The present invention has been made to solve such a conventional problem, and its purpose is to produce a highly accurate and simple even if the cross-sectional area is relatively small or a depth is required. It is to provide an annular orifice that can be made.

  Another object of the present invention is to provide a flow control valve or a pressure control valve using this annular orifice.

The invention according to claim 1 is the annular orifice formed in the internal flow path of the fluid device, and is inserted into the through-hole having a cross-sectional area larger than the required cross-sectional area of the orifice and the through-hole. The cross-sectional area is constituted by a rod that is adjusted so as to be a cross-sectional area of an orifice that requires a difference from the cross-sectional area of the through hole.
The invention according to claim 2 is characterized in that in the fluid control valve for opening and closing the main valve by the poppet, one or more poppet valve mechanisms adopting the annular orifice according to claim 1 are incorporated.

According to a third aspect of the present invention, in the fluid control valve or pressure control valve that opens and closes the main valve by a poppet, two or more poppet valve mechanisms employing the annular orifice according to claim 1 are incorporated, and the sectional area of the annular orifice is Both are the same.
According to a fourth aspect of the present invention, in the fluid control valve or pressure control valve that opens and closes the main valve by a poppet, two or more poppet valve mechanisms employing the annular orifice of claim 1 are incorporated, and a part or all of the annular orifice is incorporated. Are different from each other in cross-sectional area.

  According to the first aspect of the present invention, since the cross-sectional area of the annular orifice can be set by adjusting the rod outer diameter, the set cross-sectional area can be set with high accuracy. In addition, the machining is easier and the cost can be reduced as compared with the conventional orifice manufactured only by the hole machining. In particular, it is extremely effective when manufacturing an orifice having a cross-sectional area corresponding to a hole having an inner diameter of less than φ1 or an aspect ratio exceeding 5.

Moreover, since the cross-sectional area of the orifice can be easily changed by exchanging the rod, it is effective when the flow rate adjustment / change is required.
By providing one or more annular orifices according to claim 1, the fluid control valve according to claim 2 or the fluid control valve or pressure control valve according to claims 3 and 4 can be simply configured.
In addition, according to the annular orifice of the first aspect, it is possible to easily form the fixed orifice provided in the supply / exhaust port of the fluid actuator such as the cylinder so that the excessive speed is not generated.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 shows a fluid control valve constituted by one poppet valve mechanism employing an annular orifice of the present invention (corresponding to claims 1 and 2).
In the fluid control valve A according to the present embodiment, the orifice plate 2 having the through hole 100 is fixed in a sealed state between the upper cover 1 and the lower cover 4, and between the upper cover 1 and the orifice plate 2. The upper air chamber 3 is formed in the upper portion, the lower air chamber 5 is formed between the lower cover 4 and the orifice plate 2, and the poppet valve mechanism 20 spans the upper empty chamber 3 and the lower air chamber 5 through the through hole 100. Built in.

Here, a fluid inlet 6 communicating with the upper air chamber 3 is provided on the side surface of the upper cover 1. A fluid outlet 7 communicating with the lower air chamber 5 is provided on the side surface of the lower cover 4. Further, a valve seat 101 is formed at the mouth of the through hole 100 on the upper air chamber 3 side.
The poppet valve mechanism 20 has a disk-shaped poppet 102 disposed in the upper air chamber 3 so that the shaft center is substantially coincident with the shaft center of the through hole 100 and can contact the valve seat 101, and the upper air chamber. 3, a spring 103 installed between the upper cover 1 and the poppet 102, a driving device 105 disposed in the lower air chamber 5 with its axis substantially coincident with the axis of the through hole 100, and the through hole 100 The cylindrical rod 106 is inserted between the poppet 102 and the driving device 105.

The poppet 102 is provided with a sealing material 104 on the contact surface with the valve seat 101 for sealing with the valve seat 101.
The driving means 105 for driving the poppet 102 is installed so that its axis is substantially coincident with the axis of the through hole 100. That is, the axis of the driving means 105 substantially coincides with the axis of the poppet 102. Between the poppet 102 and the driving means 105, a cylindrical rod 106 that abuts each other is disposed. The drive means 105 may be a means generally employed as a drive means for a fluid control valve, such as a solenoid, a piezoelectric element, or a push button. In particular, when automatic control is to be performed at high speed, a solenoid or piezoelectric element capable of high-speed response is used as a driving means.

The difference between the inner diameter of the through hole 100 and the outer diameter of the cylindrical rod 106 becomes a flow path (hereinafter referred to as an annular orifice 10) that connects the upper air chamber 3 and the lower air chamber 5. By adjusting the outer diameter of the cylindrical rod 106 while keeping the inner diameter of the through hole 100 constant, the cross-sectional area of the annular orifice 10 that sets the flow rate of the fluid flowing out from the fluid outlet 7 to a desired size is set.
Next, the operation of the fluid control valve A according to this embodiment configured as described above will be described.

  The fluid flows into the upper air chamber 3 through the fluid inlet 6 from the P direction with an air source (not shown). Here, when the driving means 105 is driven (output state) and a force directed to the poppet 102 is generated, this force is transmitted to the poppet 102 via the cylindrical rod 106 and the fluid in the upper air chamber 3 is transferred. The poppet 102 is separated from the valve seat 101 against the pressure and tension of the spring 103. At this time, the fluid flows from the upper air chamber 3 through the annular orifice 10 to the lower air chamber 5, flows out through the fluid outlet 7 in the X direction (downstream side), and the fluid pressure provided on the downstream side. It is supplied to a cylinder or the like (not shown).

On the other hand, when the output from the driving means 105 is stopped, the poppet 102 is again pressed against the valve seat 101 by the pressure of the fluid in the upper air chamber 3 and the tension of the spring 103, and the fluid flowing into the upper air chamber 3 is The flow into the lower air chamber 5 through the annular orifice 10 is blocked.
As described above, according to the present embodiment, it is possible to reliably switch between discharging and blocking the fluid.

  According to the present embodiment, since the annular orifice 10 is formed by the difference between the inner diameter of the through hole 100 and the outer diameter of the cylindrical rod 106, the inner diameter of the through hole 100 is constant, and the cylindrical rod 106. By adjusting the outer diameter, the cross-sectional area of the annular orifice 10 that sets the flow rate of the fluid flowing out from the fluid outlet 7 to a desired size can be set. That is, even if it is necessary to set the cross-sectional area of the annular orifice 10 with high accuracy, hole processing that is difficult to perform with high accuracy is performed with an inner diameter that is relatively accurate (for example, a hole with an inner diameter of φ2 or more). The accuracy of the required cross-sectional area of the annular orifice 10 is ensured by the outer diameter machining of the rod, which allows easy high-precision machining, compared to the conventional annular orifice formed by drilling. The required accuracy of the cross-sectional area of the annular orifice 10 can be ensured. Of course, even when the depth is larger than the inner diameter of the annular orifice 10 (for example, the aspect ratio exceeds 5), the required accuracy of the cross-sectional area of the annular orifice 10 can be ensured. Even if it is necessary to change the cross-sectional area of the annular orifice 10, it is only necessary to replace the cylindrical rod 106 with a rod having a different outer diameter.

The fluid control valve A according to the present embodiment can be applied not only to switching between discharging and blocking of fluid but also to controlling the flow rate of fluid. In that case, the detection means 52 is installed in the vicinity of the fluid outlet 7, the flow rate of the fluid flowing out is detected, and the value is fed back to a mechanism (not shown) such as an electronic circuit that controls the drive means 105, and the control mechanism The flow rate of the fluid can be controlled by intermittently opening and closing the poppet valve mechanism 20 in response to a command from. On the other hand, when the pressure fluctuation of the fluid in the P direction is severe, a detection unit 51 is installed in the vicinity of the fluid inlet 6 to detect the pressure of the inflowing fluid, and the value also controls the drive unit 105 (not shown). )), More precise flow rate control is possible. Furthermore, the pressure is detected by the detection means 52, the value is fed back to the mechanism that controls the drive means 105, and the poppet valve mechanism 20 is opened and closed intermittently by a command from the control mechanism, thereby controlling the pressure. It becomes possible.
(Second embodiment)
FIG. 2 shows a digital flow rate control (or pressure control valve) B incorporating four poppet valve mechanisms described in the first embodiment (corresponding to claim 3).

  The digital flow control (or pressure control valve) B according to the present embodiment has the same configuration as that of the first embodiment except that four poppet valve mechanisms are incorporated. As for the individual poppet valve mechanisms, similarly to the poppet valve mechanism of the first embodiment, the through hole (100), the valve seat (101), the disc-shaped poppet (102), the spring (103), and the sealing material (104) The driving means (105) and the cylindrical rod (106) are configured. One poppet valve mechanism is hereinafter referred to as a poppet valve unit. Further, in order to identify each of the four poppet valve units, subscripts (a, b, c, d) are added to the part numbers.

  In FIG. 2, the inner diameters of the through holes (100a, 100b, 100c, 100d) are the same with the four poppet valve units. The outer diameters of the cylindrical rods (106a, 106b, 106c, 106d) are also the same. Therefore, the sectional area of the annular orifice 10 is also the same. When changing the cross-sectional area of the annular orifice 10, it is only necessary to change the cylindrical rods (106a, 106b, 106c, 106d) to those having different outer diameters.

The operation of each poppet valve unit is the same as that of the first embodiment, and the one with the subscript a will be described as a representative.
In the upper air chamber 3, a disc-shaped poppet 102 a is arranged so that its axis substantially coincides with the axis of the through hole 100 a and abuts against the valve seat 101 a. Further, in order to seal the valve seat 101a and the poppet 102a, a sealing material 104a is provided on the contact surface of the disc-shaped poppet 102a with the valve seat 101a. This seal is pressed by the disc-shaped poppet 102a against the valve seat 101a by the pressure of the fluid flowing into the upper air chamber 3 and the tension of the spring 103a installed between the upper cover 1 and the disc-shaped poppet 102a. By doing so, it becomes reliable, and the fluid flowing into the upper air chamber 3 can be blocked from flowing into the lower air chamber 5 through the through hole 100a.

  In the lower air chamber 5, driving means 105a for driving the disc-shaped poppet 102a is installed so that its axis is substantially coincident with the axis of the through hole 100a. That is, the axis of the driving means 105a substantially coincides with the axis of the disc-shaped poppet 102a. Between the disc-shaped poppet 102a and the driving means 105a, a cylindrical rod 106a that is in contact with each other is disposed. When the driving means 105a is driven (becomes an output state) and a force directed to the disk-shaped poppet 102a is generated, this force is transmitted to the disk-shaped poppet 102a via the cylindrical rod 106a, and the upper air chamber 3 The disc-shaped poppet 102a is separated from the valve seat 101a against the pressure of the fluid inside and the tension of the spring 103a. At this time, the fluid flows from the upper air chamber 3 into the lower air chamber 5 through the through hole 101a. On the other hand, when the driving of the driving means 105a is stopped, the cylindrical poppet 102a is again pressed against the valve seat 101a by the pressure of the fluid in the upper air chamber 3 and the tension of the spring 103a, and flows into the upper air chamber 3. The fluid is blocked from flowing into the lower air chamber 5 through the through hole 100a.

As described above, the poppet valve unit composed of the parts with the subscripts b, c, d operates by the same mechanism as the poppet valve unit composed of the parts with the subscript a.
In the present embodiment, when only one of the four poppet valve units is opened, when two are opened, when three are opened, and when all are opened, the sum of the cross-sectional areas of the annular orifice 10 is sequentially increased. As the flow rate increases, the flow rate of the fluid gradually increases. That is, by changing the number of opening the poppet valve mechanism, a step operation with the maximum value when all four poppet valve mechanisms are open is possible. By taking this step operation into consideration, more precise flow rate control (or pressure control) is possible compared to the case of the first embodiment.
(Third embodiment)
FIG. 3 shows a digital flow control valve (or pressure control valve) C having four poppet valve units built therein as in the second embodiment (corresponding to claim 4).

  In the digital flow control valve (or pressure control valve) C according to this embodiment, the inner diameters of the through holes (200a, 200b, 200c, 200d) of the poppet valve unit are the same as in the second embodiment. However, the cylindrical rods (206a, 206b, 206c, 206d) have different outer diameters. That is, the cross-sectional areas of the annular orifices 10a, 10b, 10c, and 10d are different from each other (FIG. 4). Such annular orifices 10a, 10b, 10c, and 10d having different cross-sectional areas can be easily manufactured only by changing the outer diameter of the cylindrical rods (206a, 206b, 206c, and 206d). Moreover, even if the sectional areas of the annular orifices 10a, 10b, 10c, and 10d are different, the through holes (200a, 200b, 200c, and 200d) have the same inner diameter, and the same tool can be used when processing the through holes. This also facilitates the manufacturing process.

  The operation of the digital flow control valve (or pressure control valve) C according to this embodiment is the same as that of the second embodiment, and the step operation can be performed in the same manner. However, not only the number of poppet valve units to be opened, but the same number of poppet valve units to be opened, the open orifices 10a, 10b, 10c, and 10d are disconnected depending on which poppet valve units are combined. Since the sum of the areas is different, the number of steps can be increased compared to the second embodiment, and more precise flow control (or pressure control) is possible.

In addition, even when the pressure fluctuation in the P direction is large, the annular orifices 10a, 10b, 10c, 10d to be opened or a combination thereof can be selected finely so that the cross-sectional area adapted to the pressure at that time can be obtained. Can be controlled.
In the description of the first embodiment and the second embodiment, the case where the cylindrical rod 106 constituting the poppet valve mechanism or the poppet valve unit is always in contact with the disc-shaped poppet 102 and the driving means 105 has been described. It may be integrated or fixed with either the poppet 102 side or the driving means 105 side, and the other may be in a free state. Further, when the driving means 105 is OFF, the rod end surface on the free state side does not need to be in contact with the poppet 102 or the driving means 105 that does not fix the cylindrical rod 106 (when ON, the contact is not made). I need it). The same applies to the third embodiment.

Moreover, the material for the sealing material 104 constituting the poppet valve unit is not limited. In addition to elastic bodies such as rubber, hard plastic or metal may be used.
In the second embodiment and the third embodiment, the case where a plurality of poppet valve units are arranged on a straight line has been described. Instead, for example, as shown in FIG. 5, the poppet valve units are arranged on the circumference. Alternatively, as shown in FIG. 6, they may be arranged in a staggered manner.

It is sectional drawing which shows the fluid control valve which concerns on 1st embodiment of this invention. It is sectional drawing which shows the digital flow control (or pressure control valve) which concerns on 2nd embodiment of this invention. It is sectional drawing which shows the digital flow control (or pressure control valve) which concerns on 3rd embodiment of this invention. It is a top view of the annular orifice part in FIG. It is a top view which shows the example which arranged four annular orifices on the circumference. It is a top view which shows the example which arranged four annular orifices in zigzag form.

Explanation of symbols

A Fluid control valve B, C Digital flow control valve (or pressure control valve)
DESCRIPTION OF SYMBOLS 1 Upper cover 2 Orifice plate 3 Upper air chamber 4 Lower cover 5 Lower air chamber 6 Fluid inlet 7 side surface of upper cover 1 Fluid outlet 10, 10a, 10b, 10c, 10d Annular orifice 20 Poppet valve mechanism 51 Detection means 52 Detection means 100, 100a, 100b, 100c, 100d Through-holes 101, 101a, 101b, 101c, 101d Valve seats 102, 102a, 102b, 102c, 102d Poppets 103, 103a, 103b, 103c, 103d Springs 104, 104a, 104b, 104d, 104d Sealing material 105, 105a, 105b, 105c, 105d Driving means 106, 106a, 106b, 106c, 106d Rods 200a, 200b, 200c, 200d Through holes 206a, 206b, 20 of the poppet valve unit 6c, 206d rod

Claims (4)

In the annular orifice formed in the internal flow path of the fluid device,
A through hole having a cross-sectional area larger than the required cross-sectional area of the orifice;
And a rod that is inserted into the through-hole and adjusted so that the cross-sectional area thereof is the cross-sectional area of the orifice that requires a difference from the cross-sectional area of the through-hole. An annular orifice. In the fluid control valve that opens and closes the main valve with a poppet,
A fluid control valve comprising at least one poppet valve mechanism employing the annular orifice according to claim 1. In a fluid control valve or pressure control valve that opens and closes the main valve with a poppet,
Two or more poppet valve mechanisms employing the annular orifice according to claim 1 are incorporated,
A flow rate control valve or a pressure control valve characterized in that the annular orifices have the same cross-sectional area. In a fluid control valve or pressure control valve that opens and closes the main valve with a poppet,
Two or more poppet valve mechanisms employing the annular orifice according to claim 1 are incorporated,
A flow rate control valve or a pressure control valve characterized in that part or all of the annular orifices have different cross-sectional areas.

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