JP2005066400A - Microchannel structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchannel structure which enables a fluid to be distributed uniformly to a plurality of microchannels arranged horizontally or three-dimensionally in the microchannel structure. <P>SOLUTION: The microchannel structure comprises introduction openings for introducing at least two fluids, introduction channels connected thereto, confluence parts where the fluids introduced through the introduction channels join together, and treatment channels extending to discharge openings for discharging the fluids from the confluence parts. The treatment channels have parts wherein the channel cross sections increase and decrease periodically. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

（比較例１）
第１の比較例として、図５に示すような２本の流路が並列に並んでいる微小流路構造体を製作した。形成した微小流路の図５のＩ−Ｉ’断面、Ｊ−Ｊ’断面の流路幅と深さはそれぞれ幅７１μｍと深さ３１μｍ、Ｋ−Ｋ’断面の流路幅は７１μｍと深さ３１μｍである。第一の流体の導入口（２）及び第二の流体の導入口（３）から合流部（１０ａ）、（１０ｂ）に至る流路は、図２にＺ−Ｚ’で示される線に対し、対称的となる構造を有する。
【００２８】
流体導入口（２）（３）からの流体が合流する部分（１０ａ）、（１０ｂ）での微小流路は５０°の角度（図５中、θａ’、θｂ’で示された部分）で合流させた。このような構造を持つ微小流路基板（１）は、７０ｍｍ×３８ｍｍ×１ｍｍ（厚さ）のパイレックス（登録商標）基板に一般的なフォトリソグラフィーとウエットエッチングにより形成して微小流路基板とし、２つの流体導入口（２）（３）と２つの流体排出口（１２）（１３）の位置に直径１．０ｍｍの貫通した小穴を機械的加工手段により設けた同サイズのパイレックス（登録商標）基板をカバー体（１４）として熱融着により接合することで基板に形成された微小流路が図５のものである以外は図６のように微小流路（１）を密閉した。
【００２９】
この微小流路の流体導入口（２）から第一の流体として純水を送液し、流体導入口（３）から第二の流体としてドデカンを送液した。送液は図４に示すように、マイクロシリンジ（１５）（１６）に注入し、マイクロシリンジポンプ（１７）で送液を行った。送液流速は（２）（３）からともに８μｌ／ｍｉｎである。送液流速が共に安定した状態で、（１２）と（１３）から排出液をそれぞれ捕集したところ、（１２）からドデカンが４．７μｌ／ｍｉｎ、純水が３．１μｌ／ｍｉｎであった。また、（１３）からドデカンが３．３μｌ／ｍｉｎ、純水が４．９μｌ／ｍｉｎであり、各流路での流体の流量に大きな差があった。結果を表１に示す。
【００３０】
実施例１においては排出口（１２）及び（１３）のいずれにおいても、導入されたドデカン及び純水はほぼ同じ流速となり均一に送液されていることが分かる。これに対し比較例１においては流速に変動が認められ、均一に送液できなかった。このことから、流体を均一に送液するには実施例１に用いた微小流路構造体を用いることが有用であることが分かり、化学反応に用いる場合には２以上の反応液を均一に接触させることができるため、混合比が一定となって混合液のｐＨなど反応条件を制御することができ、反応収率の向上等が見込まれる。
（実施例２）
第２の実施例として、実施例１と同じ微小流路構造体を用いて、流体導入口（２）から第一の流体としてポリビニルアルコール２．０％水溶液を送液し、流体導入口（３）から第二の流体として酢酸ブチルを送液した。送液は図４に示すように、マイクロシリンジ（１５）、（１６）に注入し、マイクロシリンジポンプ（１７）で送液を行った。送液流速は（２）からは２０μｌ／ｍｉｎ、（３）は１０μｌ／ｍｉｎであった。送液流速が共に安定した状態で、合流部（１０ａ）、（１０ｂ）で液滴生成を確認した。（１２）と（１３）より排出された液滴を観察するとそれぞれ平均粒子径３９μｍ、分散度６．５％と平均粒子径３８μｍ、分散度７．２％（分散度＝標準偏差／平均粒子径）の均一な粒子であった。結果を表２に示す。
【００３１】
【表２】

（比較例２）
第２の比較例として、比較例１と同じ微小流路基板を用いて、流体導入口（２）から第一の流体としてポリビニルアルコール２．０％水溶液を送液し、流体導入口（３）から第二の流体として酢酸ブチルを送液した。送液は図４に示すように、マイクロシリンジ（１５）、（１６）に注入し、マイクロシリンジポンプ（１７）で送液を行った。送液流速は（２）からは２０μｌ／ｍｉｎ、（３）は１０μｌ／ｍｉｎである。送液流速が共に安定した状態で、一方の合流部（１０ａ）で液滴生成を確認、もう一方の合流部（１０ｂ）では液滴生成せず層流となった。（１２）より排出された液滴を観察するとそれぞれ平均粒子径３２μｍ、分散度１０．４％、（１３）より排出された液滴は粒子径５００μｍ超の大きな液滴が生成した。
【００３２】
実施例２において排出口（１２）及び（１３）より排出された液滴は、導入された流体の送液速度が均一であるため分散性が極めて小さい均一な粒子径を有した液滴が得られることが分かる。これに対し比較例２においては流速に変動が認められ、排出口（１２）から排出される液滴のばらつきは大きく、排出口（１３）から排出される液滴は巨大なものとなってしまっており均一に送液できなかった。このことから、流体を均一に送液するには実施例２に用いた微小流路構造体を用いることが有用であり、均一な液滴を生成させるためには重要である。殊に液滴生成時に発生することがある微細な液滴の発生を極力抑えたり、逆に流量比が大きくずれ、層流となって大きな液滴となるのを抑えることできることが分かる。
（実施例３）
第３の実施例として、図２微小流路の内、処理流路（１１ａ，１１ｂ）に断面積の増減がない流路を有する構造となる図８のような微小流路を作製した。形成した微小流路の図８のＦ−Ｆ’断面、Ｇ−Ｇ’断面の流路幅と深さはそれぞれ幅１２０μｍと深さ５５μｍ、Ｈ−Ｈ’断面の流路幅は１５０μｍと深さ５５μｍである。第一の流体の導入口（２）及び第二の流体の導入口（３）から合流部（１０ａ）、（１０ｂ）に至る流路は、図８にＹ−Ｙ’で示される線に対し、対称的となる構造を有する。
【００３３】
実施例１と同じ微小流路構造体を用いて、流体導入口（２）から第一の流体としてポリビニルアルコール３．０％水溶液を送液し、流体導入口（３）から第二の流体としてデカンを送液した。送液は図４に示すように、マイクロシリンジ（１５）、（１６）に注入し、マイクロシリンジポンプ（１７）で送液を行った。送液流速は（２）からは４０μｌ／ｍｉｎ、（３）は８μｌ／ｍｉｎであった。送液に用いた溶液は、５Ｃ濾紙（直径９ｃｍ）と共にスターラーで１０分攪拌したものを用いた。送液流速が共に安定した状態で、合流部（１０ａ）、（１０ｂ）で液滴生成を確認した。（１２）と（１３）より排出された液滴を観察するとそれぞれ平均粒子径７７μｍ、分散度５．３％と平均粒子径６８μｍ、分散度４．１％（分散度＝標準偏差／平均粒子径）の均一な粒子であった。結果を表３に示す。また微小流路を観察すると、（４ｂ）Ｆ−Ｆ’部分、（７ｂ）Ｇ−Ｇ’部分に繊維状の異物が挟まっていた。
【００３４】
【表３】

（比較例３）
第２の比較例として、図５のような２本の流路が並列に並んでいる微小流路構造体を製作した。形成した微小流路の図５のＩ−Ｉ’断面、Ｊ−Ｊ’断面の流路幅と深さはそれぞれ幅１５２μｍと深さ５６μｍ、Ｋ−Ｋ’断面の流路幅は１５２μｍと深さ５６μｍである。送液は実施例３と同様に行った。送液流速が共に安定した状態で、一方の合流部（１０ａ）、（１０ｂ）で液滴生成を確認した。排出口（１２）では平均粒子径が小さく、分散度の大きな多分散な液滴が生成した。合流部（１０ａ）を観察すると、繊維状の
異物が流路（７）から（１０ａ）にかけて挟まっていた。
【００３５】
実施例３と比較例３とを比較すると、実施例３において排出口（１２）及び（１３）より排出された液滴は、導入された流体が、処理流路上流部に設けられた２本以上に分岐した流路の途中にトラップされ、各流体の送液の乱れを最小限にすると共に各合流部での流れの乱れを防ぐことにより生成する液滴の大きさを均一にすることが出来ることがわかる。特に合流部での異物挟み込みによる流体の乱れを防ぐことにより合流流体同士の安定送液や、均一液滴の生成に効果があることが分かる。
【００３６】
【発明の効果】
本発明の微小流路構造体は、流体を導入するための導入口及び流体を排出するための排出口を備え、かつ、基板上に前記導入口及び排出口と連通する共通チューブまたは、共通流路を有した構造体であって、前記流体を化学処理するあるいは前記流体より液滴を生成させるための微小流路部分の一部の断面積が周期的に増減し、前記流体を化学処理するあるいは前記流体より液滴を生成させるための微小流路部分の上流部の微小流路の一部が、液滴を排出する流路より細くなっている部分を有し、またそれぞれの導入口には共通流路から少なくとも２つ以上の別の流路を経由して一つの微小流路へ流体を導入することで微小流路構造体に平面的あるいは立体的に配置された複数の微小流路に均一に流体を分配することが可能となる。
【００３７】
また本発明の微小流路構造体を、２以上の流体を導入するための導入口及びこれに連通する導入流路と、導入流路より導入された流体が合流する合流部と、合流部より流体を排出させるための排出口に至るまでの処理流路と、を有した構造体であって、導入流路が導入口より２以上に分岐しており、かつ、導入流路のいずれにも処理流路中の断面積の最小部よりも狭い断面積を有する部分を有する微小流路構造体とすることで、均一に流体を送液でき、流体の合流部分における異物等の混入による流路形状変化や目詰まりを回避することができる。
【図面の簡単な説明】
【図１】（ａ）は本発明における最も基本的な微小流路形状を示した概念図であり、（ｂ）は図１（ａ）のＡ−Ａ’又はＢ−Ｂ’断面、（ｃ）はＣ−Ｃ’断面であり、（ｄ）は処理流路中の流路断面積が周期的に増減している部分の内の狭い部分であるＤ−Ｄ’断面、（ｅ）は広い部分であるＥ−Ｅ’断面を示す図である。
【図２】実施例１および実施例２に示した微小流路形状の概略図であり、Ｆ−Ｆ’断面部およびＧ−Ｇ’断面部は、それぞれ、導入口（２）、（３）からの導入流路中に存在する狭小部分であり、Ｈ−Ｈ’断面部は、処理流路中の流路断面積が周期的に増減している部分である。
【図３】実施例１および実施例２に示した微小流路基板上に貫通口を有する蓋基板を有した流路の概略図である。
【図４】微小流路による液滴生成状況を示す概略図である。
【図５】比較例１および比較例２に示した微小流路形状の概略図である。
【図６】比較例１および比較例２に示した微小流路基板上に貫通口を有する蓋基板を有した流路の概略図である。
【図７】流路の交差する合流部近傍の概念図であり、（ａ）はＹ字構造、（ｂ）両側Ｙ字構造（両側剪断構造）、（ｃ）両側Ｙ字状構造（ずらし構造）である。
【図８】実施例３に示した微小流路形状の概略図であり、Ｆ−Ｆ’断面部およびＧ−Ｇ’断面部は、それぞれ、導入口（２）、（３）からの導入流路中に存在する狭小部分である。
【符号の説明】
１：微小流路基板
２：第一の流体の導入口
３：第二の流体の導入口
４、４ａ、４ｂ、５、５ａ、５ｂ、７、７ａ、７ｂ、８、８ａ、８ｂ：導入口と連通する流路
６、６ａ、６ｂ、９、９ａ、９ｂ：導入流路の交差する交差部
１０、１０ａ、１０ｂ：第一の流体と第二の流体の合流部
１１、１１ａ、１１ｂ：流体を化学処理するあるいは前記流体より液滴を生成させるため処理流路
１２、１３：排出口
１４：カバー体（蓋）
１５：第一の流体
１６：第二の流体[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microchannel structure having a plurality of microchannels that perform chemical reaction or microdroplet generation, and has a microchannel structure that uniformly distributes fluid to the plurality of microchannels. About the body.
[0002]
[Prior art]
In recent years, a microchannel structure having a microchannel having a length of about several centimeters on a glass substrate of several cm square and a width and depth of sub-μm to several hundred μm is used, and the fluid is transferred to the microchannel. Research into chemical reactions or microdroplet generation by introducing them is attracting attention. Such a microchannel can perform an efficient chemical reaction due to the effect of a short intermolecular distance in a microspace and a large specific interface area. In addition, by introducing two types of liquids having different interfacial tensions into the flow path where the crossing portion exists, it is possible to generate micro droplets having a very uniform particle size.
[0003]
Attempts have been made to apply chemical reactions in microchannels and microdroplets to industrial production while taking advantage of the characteristics of such microspaces. In this case, due to the small space, the amount of generated per unit time is inevitably reduced in a single micro flow path. However, if a large number of micro flow paths can be arranged in parallel, the micro flow path can be reduced. The production amount per unit time can be increased while utilizing the characteristics of the road. For example, attempts have been made to stack a micro-channel substrate having a single micro-channel by connecting vertical portions penetrating common portions such as an inlet of a reaction solution and an outlet of a reaction product (for example, non-flow channel). Patent Document 1).
[0004]
In this way, when performing chemical synthesis or microdroplet generation in large quantities while taking advantage of the features of microspace, the degree of integration of microchannels, which is the smallest unit, is increased planarly or stacked in three dimensions. However, it has been very difficult to distribute fluid uniformly to two or more microchannels, for example, microchannels arranged in a plane or three-dimensionally at the same time. It was.
[Non-Patent Document 1]
Kikutani et al., “High-yield microchannel synthesis using pile-up microreactors”, Proceedings of the 3rd Chemistry and Microsystem Research Meeting, 9 pages, May 2001
[0005]
[Problems to be solved by the invention]
The object of the present invention has been proposed in view of such a conventional situation, and it is possible to uniformly distribute a fluid to a plurality of microchannels arranged in a plane or three-dimensionally on a microchannel structure. Furthermore, another object of the present invention is to provide a microchannel structure that can efficiently perform chemical reaction or microdroplet generation.
[0006]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention provides an inlet for introducing two or more fluids, an introduction channel communicating with the inlet, a junction where the fluid introduced from the introduction channel joins, and the junction And a processing channel extending from the portion to the discharge port for discharging the fluid, and the processing channel has a minute portion having a portion in which the channel cross-sectional area periodically increases and decreases By using the flow channel structure, the above-mentioned problems with the prior art could be solved, and the present invention could finally be completed.
[0007]
Furthermore, the present invention is such that even in such a structure, the introduction flow path is branched into two or more from the introduction port, so that the fluid can be fed more uniformly, and the flow path arrangement is symmetrical with respect to a predetermined baseline. It is excellent in the uniform liquid feeding property, and any of the introduction channels has a part or the whole of a part having a cross-sectional area narrower than the minimum part of the cross-sectional area in the processing channel. It is possible to avoid changes in the flow path shape and clogging due to contamination of foreign matter etc. at the fluid confluence, and the flow path arrangement structure where the introduction flow path and the treatment flow path intersect is provided with two introduction flow paths. A Y-shaped structure with a crossing, a double-sided Y-shaped structure having a structure in which two introduction flow paths for feeding another fluid are sandwiched on both sides of one fluid introduction flow path, or a single fluid introduction flow Two introduction flow channels that send different fluids to both sides of the channel are separate junctions It has been found that by using various Y-shaped structures such as a double-sided Y-shaped structure that has such a structure, the particle size and chemical reaction efficiency of the droplets can be controlled by changing the crossing angle. Finally, the present invention has been completed. Hereinafter, the present invention will be described in detail.
[0008]
The microchannel structure according to the present invention includes an introduction port for introducing two or more fluids, an introduction channel communicating with the inlet, a merging portion where fluids introduced from the introduction channel merge, and the merging portion A processing flow path to a discharge port for discharging more fluid, and having a portion in which the flow path cross-sectional area is periodically increased or decreased in the processing flow path, Alternatively, an introduction port for introducing two or more fluids, an introduction channel communicating with the inlet, a merging portion where the fluid introduced from the introduction channel merges, and a discharge for discharging the fluid from the merging portion A processing flow path leading to the outlet, wherein the introduction flow path branches into two or more from the introduction opening, and any of the introduction flow paths is in the treatment flow path. Characterized in that it has a portion having a cross-sectional area narrower than the minimum portion of the cross-sectional area of A fine channel to.
[0009]
Here, the two or more fluids used in the present invention are liquid materials such as water and oil that are substantially incompatible with each other when droplets are generated. The component is not particularly limited as long as it can feed the flow channel in the microchannel structure, and the component is not particularly limited as long as droplets can be formed. On the other hand, when a chemical reaction is performed, reactants are included in one or both of them, and these include slurries that contain fine powders or droplets that are not compatible with the fluid. There is no problem.
[0010]
The processing flow channel in the micro flow channel structure of the present invention has a portion where the flow channel cross-sectional area is periodically increased or decreased. By the flow channel configuration having such a structure, the object of the present invention is provided. The uniform liquid feeding can be achieved.
[0011]
In addition, the microchannel structure according to the present invention includes an introduction port for introducing two or more fluids described above, an introduction channel communicating with the inlet, a junction where fluids introduced from the introduction channel merge, and a junction It is a flow path provided from the junction to the outlet for discharging the fluid and from the junction to the outlet for discharging the fluid, and is a processing flow for efficiently generating droplets and performing chemical reactions. Although it has a path | route, these details are demonstrated using drawing below.
[0012]
FIG. 1 shows an example of the microchannel structure of the present invention. In this microchannel structure, two microchannels (4) and (5) equivalent from the first fluid introduction port (2) are formed on the microchannel substrate (1), and the second channel Two equivalent micro channels (7) and (8) are formed from the fluid inlet (3). As described above, since the introduction channel is branched into two or more from the introduction port, the fluid introduced from the introduction port and fed through the channel in the microchannel structure can be fed more uniformly. . And until (2) and (3), in order to supply the 1st fluid and the 2nd fluid to each micro channel, it has a common channel or structure.
[0013]
A crossing portion (6) where the flow paths (4) and (5) divided into two from the introduction port (2) for introducing the first fluid into two equivalent flow paths intersect each other is formed. . Further, an intersection (9) is formed in which the two flow paths (7) and (8) intersect each other from the introduction port (3) for introducing the second fluid into the equivalent flow paths. In addition, a merge portion (10) where the first fluid and the second fluid merge is formed. The flow path (11) from the junction (10) is a place where a chemical reaction is performed or a microdroplet is generated.
[0014]
From the first fluid inlet (2) to the merging section (10) and from the second fluid inlet (3) to the merging section (10) are from the flow path (11) and its extrapolation line. XX ′ line, that is, a structure that is symmetric with respect to a predetermined base line. By setting it as the flow-path structure which has such a symmetrical structure, the fluid sent can be sent more uniformly.
[0015]
In FIG. 1, the flow paths (4 ′), (5 ′), (7 ′) are located in the portions near the junction (10) of the flow paths (4), (5), (7), (8), respectively. ), (8 ′), and a portion having a cross-sectional area narrower than the minimum portion of the cross-sectional area in the processing flow path (11) for causing droplet generation and chemical reaction. Such a narrow portion includes the AA ′ cross section and the BB ′ cross section shown as partial cross sections of the flow paths (4 ′), (5 ′), (7 ′), and (8 ′) in FIG. And CC ′, which is a cross section of the flow path from the junction (6) or (9) to the junction (10), can be understood. This narrow part is usually filtered with a mesh below the microchannel in order to prevent contaminants larger than the microchannel diameter from entering the microchannel, but fibrous impurities pass very rarely. Or solid matter generated in the common flow path may enter the micro flow path and prevent uniform liquid transfer. This clogging can be prevented by providing a narrow area upstream of the micro flow path. This is because it can be prevented. Moreover, it is because sufficient fluid flow volume can be ensured by having two or more flow paths from the inlets (2) and (3).
[0016]
The channel (11) is provided with a portion where the channel cross-sectional area increases and decreases periodically. Such periodic increase / decrease of the area is controlled by the width and depth of the flow path, and the increase / decrease by the width of the flow path is controlled by, for example, periodically creating a mask diagram before etching. For example, in wet etching, when a wavy channel mask is prepared and etched to the extent that the dots are connected to each other, the depth can be increased or decreased. The increase / decrease in the groove width of the channel portion can also be controlled by a double etching process or the like. Further, the angle, width, period and length of the channel are not particularly limited as long as the target chemical treatment or droplets can be generated.
[0017]
As a flow path having such a periodic area increase / decrease, the flow path (11) of FIG. 1A is shown, and cross-sectional views corresponding to the DD ′ cross section and the EE ′ cross section, respectively. 1 (d) and FIG. 1 (e). In FIG. 1D and FIG. 1E, the portion corresponding to the DD ′ cross section of the flow passage having a periodic area increase / decrease in the flow passage (11) is a portion where the cross-sectional area is minimized. The portion corresponding to the cross section EE ′ is a portion where the cross-sectional area is maximized, and the flow path (11) has a structure in which the cross-sectional area varies periodically.
[0018]
More specifically, the channel cross-sectional area may be increased or decreased regardless of one side, both sides, the bottom surface, or the like of such a micro channel. In the case where droplets are generated in a flow path having such a structure, it is desirable that the structure not form a wall perpendicular to the fluid flow direction. This is because the droplet may be damaged or destroyed when there is a sharp angle in the flow path.
[0019]
In addition, (4 ′), (5 ′), and (4 ′), and (5 ′) As shown in (7 ′) and (8 ′), there may be a narrow portion equal to or smaller than the cross-sectional area of the flow path (11) that is the smallest, or a part, a plurality of places, or the entire number. Any number is acceptable.
[0020]
In addition, as shown in FIG. 7, the arrangement of the flow paths in the vicinity of the merging portion where two or more introduced fluids merge, as described above, a Y-shaped structure in which two introduction flow paths intersect (FIG. 7 (a) )), A double-sided Y-shaped structure (FIG. 7 (b)) having a structure in which two introduction flow paths through which another fluid is fed are sandwiched between both sides of one fluid introduction flow path, or one Various types such as a double-sided Y-shaped structure (Fig. 7 (c)) in which the two introduction flow paths through which different fluids are fed on both sides of the fluid introduction flow path have different joining portions By using this Y-shaped structure, it is possible to control the particle size and chemical reaction efficiency of the droplet by changing the crossing angle.
[0021]
The microchannel substrate having the microchannel as described above can be manufactured by directly processing a substrate material such as glass, quartz, ceramic, silicon, or metal or resin by machining, laser processing, etching, or the like. . Further, when the substrate material is ceramic or resin, it can also be manufactured by molding using a mold such as a metal having a channel shape. Further, in the case of a thin film sheet, a minute flow path may be formed by punching a hole in a desired flow path shape by punching or X-ray lithography and press-bonding to a substrate or sheet having a through-hole. Generally, the microchannel substrate is laminated and integrated with a cover body having a small hole with a diameter of about several millimeters at a position corresponding to the fluid inlet, the fluid outlet, and the outlet of each microchannel. Used as a microchannel structure. As shown in FIG. 3, when joining the cover body and the microchannel substrate, or as a method of joining a plurality of microchannel substrates, the substrate material is ceramic or metal. If an adhesive is used, or if the substrate material is glass, quartz, or resin, the surface is activated by applying a load at a high temperature of one hundred to several hundreds of degrees, or if the substrate material is silicon, the surface is activated by washing. Bonding methods suitable for each substrate material, such as bonding at room temperature, are used.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail. Needless to say, the present invention is not limited to these examples, and can be arbitrarily changed without departing from the scope of the invention.
(Example 1)
As a first example, a microchannel structure in which two channels are arranged in parallel as shown in FIG. 2 was manufactured. The FF ′ cross section and GG ′ cross section of FIG. 2 of the formed microchannel have a width and depth of 72 μm and a depth of 33 μm, respectively, and a channel width of the HH ′ section is 82 μm to 150 μm. It has a portion where the wavy shape repeats 10 times with a period of 120 μm. The flow path from the first fluid introduction port (2) and the second fluid introduction port (3) to the junctions (10a) and (10b) corresponds to the line indicated by YY 'in FIG. Have a symmetrical structure.
[0023]
The microchannels at the portions (10a) and (10b) where the fluids from the fluid inlets (2) and (3) join are joined at an angle of 50 ° (portions indicated by θa and θb in FIG. 2). It was. The microchannel substrate (1) having such a structure is formed on a Pyrex (registered trademark) substrate of 70 mm × 38 mm × 1 mm (thickness) by general photolithography and wet etching to form a microchannel substrate. .
[0024]
Pyrex (registered trademark) of the same size in which small holes having a diameter of 1.0 mm are provided by mechanical machining means at the positions of the two fluid inlets (2) (3) and the two fluid outlets (12) (13). ) The microchannel (1) was sealed as shown in FIG. 3 by bonding the substrate as a cover body (14) by heat fusion.
[0025]
Pure water was fed as the first fluid from the fluid inlet (2) of the microchannel, and dodecane was fed as the second fluid from the fluid inlet (3). As shown in FIG. 4, the liquid was injected into the microsyringe (15) (16), and the liquid was fed with the microsyringe pump (17).
[0026]
The liquid feeding flow rate is 8 μl / min from both (2) and (3). When the discharged liquid was collected from (12) and (13) in a state where both liquid feeding flow rates were stable, dodecane was 4.0 μl / min and pure water was 3.9 μl / min from (12). . From (13), dodecane was 3.8 μl / min and pure water was 4.1 μl / min. The results are shown in Table 1.
[0027]
[Table 1]

(Comparative Example 1)
As a first comparative example, a microchannel structure having two channels arranged in parallel as shown in FIG. 5 was manufactured. The channel width and depth of the formed microchannel in FIG. 5 taken along lines II ′ and JJ ′ are 71 μm and 31 μm in width, and the channel width of KK ′ is 71 μm in depth. 31 μm. The flow path from the first fluid introduction port (2) and the second fluid introduction port (3) to the junctions (10a) and (10b) corresponds to the line indicated by ZZ ′ in FIG. Have a symmetrical structure.
[0028]
The microchannels at the portions (10a) and (10b) where the fluids from the fluid inlets (2) and (3) merge are at an angle of 50 ° (portions indicated by θa ′ and θb ′ in FIG. 5). Merged. The microchannel substrate (1) having such a structure is formed on a Pyrex (registered trademark) substrate of 70 mm × 38 mm × 1 mm (thickness) by general photolithography and wet etching to form a microchannel substrate. Pyrex (registered trademark) of the same size in which small holes having a diameter of 1.0 mm are provided by mechanical machining means at the positions of the two fluid introduction ports (2) (3) and the two fluid discharge ports (12) (13) The micro flow path (1) was sealed as shown in FIG. 6 except that the micro flow path formed on the substrate by bonding the substrate as a cover body (14) by thermal fusion was that of FIG.
[0029]
Pure water was fed as the first fluid from the fluid inlet (2) of the microchannel, and dodecane was fed as the second fluid from the fluid inlet (3). As shown in FIG. 4, the liquid was injected into the microsyringe (15) (16), and the liquid was fed with the microsyringe pump (17). The liquid feeding flow rate is 8 μl / min from both (2) and (3). When the discharged liquid was collected from (12) and (13) in a state where both liquid flow rates were stable, dodecane was 4.7 μl / min and pure water was 3.1 μl / min from (12). . Further, from (13), dodecane was 3.3 μl / min and pure water was 4.9 μl / min, and there was a large difference in the flow rate of fluid in each flow path. The results are shown in Table 1.
[0030]
In Example 1, it can be seen that the introduced dodecane and pure water are almost the same flow rate and are uniformly fed at both the discharge ports (12) and (13). On the other hand, in Comparative Example 1, fluctuations were observed in the flow rate, and the liquid could not be fed uniformly. From this, it can be seen that it is useful to use the microchannel structure used in Example 1 in order to send the fluid uniformly, and in the case of using it for a chemical reaction, two or more reaction solutions should be uniformly supplied. Since they can be brought into contact with each other, the mixing ratio becomes constant, the reaction conditions such as the pH of the mixed solution can be controlled, and the reaction yield can be improved.
(Example 2)
As a second example, using the same microchannel structure as in Example 1, a 2.0% aqueous solution of polyvinyl alcohol is fed as the first fluid from the fluid inlet (2), and the fluid inlet (3 ) As a second fluid. As shown in FIG. 4, the liquid was injected into the microsyringe (15) and (16), and the liquid was fed with the microsyringe pump (17). The liquid feeding flow rate was 20 μl / min from (2), and 10 μl / min from (3). Droplet generation was confirmed at the merging portions (10a) and (10b) in a state where both the liquid feeding flow rates were stable. When the droplets discharged from (12) and (13) are observed, the average particle size is 39 μm, the dispersity is 6.5%, the average particle size is 38 μm, and the dispersity is 7.2% (dispersion = standard deviation / average particle size). ) Uniform particles. The results are shown in Table 2.
[0031]
[Table 2]

(Comparative Example 2)
As a second comparative example, using the same microchannel substrate as in Comparative Example 1, a 2.0% aqueous solution of polyvinyl alcohol is fed as the first fluid from the fluid inlet (2), and the fluid inlet (3) Butyl acetate was fed as a second fluid. As shown in FIG. 4, the liquid was injected into the microsyringe (15) and (16), and the liquid was fed with the microsyringe pump (17). The liquid feeding flow rate is 20 μl / min from (2), and 10 μl / min from (3). In the state where both liquid feeding flow rates were stable, droplet formation was confirmed at one confluence portion (10a), and no droplet was produced at the other confluence portion (10b), resulting in laminar flow. When the liquid droplets discharged from (12) were observed, an average particle diameter of 32 μm and a degree of dispersion of 10.4% were formed, and the liquid droplets discharged from (13) produced large liquid droplets having a particle diameter of over 500 μm.
[0032]
In the second embodiment, the liquid droplets discharged from the discharge ports (12) and (13) have a uniform particle diameter with extremely small dispersibility because the liquid feeding speed of the introduced fluid is uniform. You can see that On the other hand, in Comparative Example 2, the flow velocity fluctuated, the variation of the droplets discharged from the discharge port (12) was large, and the droplets discharged from the discharge port (13) became huge. The solution could not be delivered uniformly. For this reason, it is useful to use the microchannel structure used in Example 2 in order to send the fluid uniformly, which is important for generating uniform droplets. In particular, it can be seen that generation of fine droplets that may occur at the time of droplet generation can be suppressed as much as possible, and conversely, the flow rate ratio can be greatly shifted to prevent laminar flow and large droplets.
(Example 3)
As a third example, a microchannel as shown in FIG. 8 having a structure in which the processing channels (11a, 11b) have no cross-sectional area increase / decrease among the microchannels in FIG. 2 was produced. The channel width and depth of the formed microchannel in FIG. 8 FF ′ and GG ′ in FIG. 8 are 120 μm and 55 μm in width, and the channel width in the HH ′ section is 150 μm in depth. 55 μm. The flow path from the first fluid introduction port (2) and the second fluid introduction port (3) to the junctions (10a) and (10b) corresponds to the line indicated by YY ′ in FIG. Have a symmetrical structure.
[0033]
Using the same microchannel structure as in Example 1, a 3.0% aqueous solution of polyvinyl alcohol is fed as the first fluid from the fluid inlet (2) and as the second fluid from the fluid inlet (3). Decane was fed. As shown in FIG. 4, the liquid was injected into the microsyringe (15) and (16), and the liquid was fed with the microsyringe pump (17). The liquid feed flow rate was 40 μl / min from (2) and 8 μl / min from (3). The solution used for feeding was a 5C filter paper (diameter 9 cm) and stirred for 10 minutes with a stirrer. Droplet generation was confirmed at the merging portions (10a) and (10b) in a state where both the liquid feeding flow rates were stable. When the liquid droplets discharged from (12) and (13) are observed, the average particle diameter is 77 μm, the degree of dispersion is 5.3%, the average particle diameter is 68 μm, and the degree of dispersion is 4.1% (dispersion degree = standard deviation / average particle diameter). ) Uniform particles. The results are shown in Table 3. Moreover, when the microchannel was observed, fibrous foreign matters were sandwiched between (4b) FF ′ and (7b) GG ′.
[0034]
[Table 3]

(Comparative Example 3)
As a second comparative example, a microchannel structure having two channels arranged in parallel as shown in FIG. 5 was manufactured. The channel width and depth of the formed microchannel in FIG. 5 taken along lines II ′ and JJ ′ are 152 μm and depth of 56 μm, respectively, and the channel width of KK ′ is 152 μm. 56 μm. The liquid feeding was performed in the same manner as in Example 3. Droplet generation was confirmed at one of the merging portions (10a) and (10b) in a state where both the liquid feeding flow rates were stable. At the outlet (12), polydisperse droplets having a small average particle size and a high degree of dispersion were generated. When the merging portion (10a) is observed, it is fibrous.
Foreign matter was caught between the flow paths (7) and (10a).
[0035]
When Example 3 and Comparative Example 3 are compared, the droplets discharged from the discharge ports (12) and (13) in Example 3 are the two fluids introduced in the upstream of the processing channel. It is trapped in the middle of the flow path branched as described above, and the size of the generated droplets can be made uniform by minimizing the disturbance of the flow of each fluid and preventing the disturbance of the flow at each junction. I understand that I can do it. In particular, it can be seen that preventing the fluid from being disturbed due to the inclusion of foreign matter at the merging portion is effective for stable liquid feeding between the merging fluids and generation of uniform droplets.
[0036]
【The invention's effect】
The microchannel structure of the present invention includes an inlet for introducing a fluid and an outlet for discharging the fluid, and a common tube or a common flow communicating with the inlet and the outlet on the substrate. A structure having a path, wherein the fluid is chemically processed, or a partial cross-sectional area of a micro-channel portion for generating droplets from the fluid is periodically increased and decreased to chemically process the fluid Alternatively, a part of the micro-channel upstream of the micro-channel portion for generating droplets from the fluid has a portion that is narrower than the channel for discharging the droplets, and each inlet has Is a plurality of microchannels arranged in a plane or three-dimensionally in a microchannel structure by introducing a fluid from a common channel to one microchannel via at least two other channels It becomes possible to distribute the fluid uniformly.
[0037]
Further, the microchannel structure according to the present invention includes an inlet for introducing two or more fluids, an introduction channel communicating with the inlet, a merging portion where fluid introduced from the introduction channel merges, and a merging portion And a processing flow channel leading to a discharge port for discharging fluid, the introduction flow channel branching into two or more from the introduction port, and any of the introduction flow channels By using a micro-channel structure that has a portion having a cross-sectional area narrower than the minimum cross-sectional area in the processing channel, the fluid can be fed uniformly, and the channel by mixing foreign matter etc. in the fluid junction Shape changes and clogging can be avoided.
[Brief description of the drawings]
FIG. 1A is a conceptual diagram showing the most basic microchannel shape in the present invention, FIG. 1B is a cross-sectional view taken along line AA ′ or BB ′ in FIG. ) Is a CC ′ cross section, (d) is a DD ′ cross section that is a narrow portion of the portions where the cross-sectional area of the processing flow passage periodically increases and decreases, and (e) is wide. It is a figure which shows the EE 'cross section which is a part.
FIGS. 2A and 2B are schematic views of the microchannel shape shown in Example 1 and Example 2. The FF ′ cross-section and the GG ′ cross-section are introduction ports (2) and (3), respectively. The HH ′ cross-sectional portion is a portion where the cross-sectional area of the processing flow passage periodically increases and decreases.
FIG. 3 is a schematic view of a channel having a lid substrate having a through hole on the microchannel substrate shown in Example 1 and Example 2;
FIG. 4 is a schematic diagram showing a state of droplet generation by a microchannel.
FIG. 5 is a schematic view of a microchannel shape shown in Comparative Example 1 and Comparative Example 2;
6 is a schematic view of a channel having a lid substrate having a through hole on the microchannel substrate shown in Comparative Example 1 and Comparative Example 2. FIG.
FIGS. 7A and 7B are conceptual diagrams in the vicinity of a merged portion where the flow paths intersect, wherein FIG. 7A is a Y-shaped structure, FIG. 7B is a double-sided Y-shaped structure (both-side sheared structure), and FIG. ).
FIG. 8 is a schematic diagram of the shape of the microchannel shown in Example 3, wherein the FF ′ cross-section and the GG ′ cross-section are respectively introduced from the introduction ports (2) and (3). It is a narrow part existing in the road.
[Explanation of symbols]
1: Microchannel substrate
2: First fluid inlet
3: Second fluid inlet
4, 4a, 4b, 5, 5a, 5b, 7, 7a, 7b, 8, 8a, 8b: flow paths communicating with the inlet
6, 6a, 6b, 9, 9a, 9b: intersections where the introduction channels intersect
10, 10a, 10b: Merge portion of the first fluid and the second fluid
11, 11a, 11b: Processing flow path for chemically treating a fluid or generating droplets from the fluid
12, 13: Discharge port
14: Cover body (lid)
15: First fluid
16: Second fluid

Claims (6)

An inlet for introducing two or more fluids, an introduction channel communicating with the inlet, a junction where the fluid introduced from the introduction channel merges, and an outlet for discharging the fluid from the junction A microchannel structure characterized in that the process channel has a portion in which the channel cross-sectional area periodically increases and decreases. The microchannel structure according to claim 1, wherein the introduction channel is branched into two or more from the introduction port. 3. The microchannel according to claim 1, wherein each of the introduction channels has a portion having a cross-sectional area narrower than a minimum portion of a cross-sectional area in the processing channel. Structure. An inlet for introducing two or more fluids, an introduction channel communicating with the inlet, a junction where the fluid introduced from the introduction channel merges, and an outlet for discharging the fluid from the junction The introduction flow path branches into two or more from the introduction port, and any of the introduction flow paths is disconnected in the treatment flow path. A microchannel structure having a portion having a cross-sectional area narrower than a minimum portion of an area. 5. The microchannel structure according to claim 1, wherein the microchannel structure has a symmetrical structure with respect to a predetermined base line in the microchannel structure. The microchannel structure according to any one of claims 1 to 5, wherein the arrangement in the introduction channel and the processing channel communicating with the merging portion has a Y-shaped structure.

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