JP2005061747A - Heat-treating setter and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat-treating setter capable of heat-treating by placing a novel and large treating object, capable of stably placing the treating object without substantially causing a warp, and capable of uniformly heating the treating object. <P>SOLUTION: This heat-treating setter introduces the treating object G into a heat treatment furnace by placing the treating object G on a placing surface 1b of a plate part 1a. The crystallized glass heat-treating setter 1 has the plate part 1a formed into a structure of welding a plate-like member 23 in a plane shape, and sets a thermal expansion coefficient range of 30 to 750 °C to -10×10<SP>-7</SP>to 15×10<SP>-7</SP>/K. In this manufacturing method of the heat-treating setter 1, a plurality of glass panes are held in a plane shape; its joining end surfaces are oppositely arranged; the end surfaces are heated, softened, and welded to be formed into a welded glass pane; the welded glass pane is heat-treated and crystallized to be formed into a welded crystallized glass pane; and is processed in desired dimensional accuracy. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a heat treatment setter for placing an object to be processed and introducing it into a heat treatment furnace, and in particular, for heat treatment suitable for a large plasma display panel (hereinafter referred to as PDP) substrate, a glass substrate for a liquid crystal panel, and the like. It is about setters.

  In recent years, with the diversification of display devices, a large-screen flat display attracts attention. The typical PDP has two glass substrates facing each other on the front and back, both glass substrates on the top and bottom, and a 100-150 μm cell sandwiched between the sides. Characters and images are displayed by discharging gas by applying a gas containment voltage, and is characterized by being thinner than the size of the display screen.

  A paste is applied on the glass substrate in order to form a precise circuit pattern of electrodes and insulating layers, and about 500 to 700 in a heat treatment furnace (or called a baking furnace) in order to fix the applied paste to the plate glass. Baking in the temperature range of ° C. For this reason, a setter for heat treatment of a glass substrate is required to have little thermal deformation, and at present, a crystallized glass plate, a ceramic plate or the like is used.

  For example, Patent Document 1 uses a surface plate and an attachment in order to maintain the flatness of a large setter made of a crystallized glass plate at a desired accuracy.

  Further, Patent Document 2 discloses a setter made of a silicon carbide (SiC) ceramic plate, and the heat treatment of the flat display panel is described by causing the setter itself to generate heat by energizing the setter.

Furthermore, Patent Document 3 describes a method for producing a large plate on which a quartz glass plate is welded.
JP 10-81571 A JP 2002-293558 A JP 2003-26433 A

  In recent years, with an increase in the size of a display panel for increasing the size of a screen and the batch processing of a plurality of panels, a large setter for heat treatment has been required.

  However, the large setter made of the crystallized glass plate of Patent Document 1 has a limit in the dimension in the width direction due to the plate making method, so that a setter having a desired size cannot be obtained with an integral crystallized glass plate. There's a problem. For this reason, when the crystallized glass plate is bonded using an adhesive, there is a problem in strength because the bending strength strength of the bonded portion is lowered with respect to other parts. There is also a problem of contaminating the object to be processed by peeling off the solidified adhesive.

  Moreover, the setter which consists of a silicon carbide (SiC) ceramic board of patent document 2 can produce the setter of a desired magnitude | size by enlarging a baking equipment, but not only the installation cost increases, but porous There is a problem that it is very expensive because a surface treatment for countermeasures against gas emission at a high temperature due to the sintered body is required.

  Furthermore, the large plate to which the quartz glass plate of Patent Document 3 is welded is very expensive in the same manner as the silicon carbide ceramic plate, and the structure of the large plate is in a glass state, so that it is cracked during handling. There is a problem of insufficient strength that causes cracks and the like.

  The present invention has been made in view of the above problems, and it is possible to place and heat-treat an unprecedented large-sized substrate, so that the setter is not substantially warped, such as a glass substrate. It is an object of the present invention to provide a heat-treating setter capable of stably placing an object to be processed on a setter and capable of uniformly heating the object to be processed, and a method for manufacturing the same.

The setter for heat treatment according to the present invention has a thermal expansion coefficient of −10 × 10 ^{−7 in} a temperature range of 30 to 750 ° C. introduced into the heat treatment furnace in a state where the workpiece is placed on the placement surface of the flat plate portion. A setter for heat treatment made of crystallized glass of ˜15 × 10 ⁻⁷ / K, wherein the flat plate portion has a structure in which a plurality of plate-like members are welded in a planar shape.

In the present invention, a structure in which a plurality of plate-like members are welded in a planar shape means that a plurality of plate-like members made of crystallized glass are welded together to form a flat plate portion having a desired size. It means that it is not by bonding or other mechanical joining. Since the structure is such that a plurality of plate-like members are welded, it is possible to easily form a mounting surface having an unprecedented size, and bonding such as bonding or other mechanical bonding is possible. The site does not cause local strength reduction. Moreover, the setter for heat treatment formed of crystallized glass having a thermal expansion coefficient of −10 × 10 ⁻⁷ to 15 × 10 ⁻⁷ / K in a temperature range of 30 to 750 ° C. is a temperature higher than that of normal heat resistant glass. The difference is not substantially deformed and can withstand repeated use.

  Moreover, the setter for heat treatment of the present invention is characterized in that the same crystals as the plate-like members are precipitated at substantially the same rate at the joining sites of the plate-like members by welding.

  The fact that the same crystals as the plate-like members are precipitated at substantially the same rate at the bonding site by welding of the plate-like members means that if the main crystal of the plate-like member is β-quartz, for example, Means that the same β-quartz and, if the main crystal is β-spodumene, β-spodumene is precipitated at almost the same rate. As described above, the same crystal as the plate-like member is precipitated in the joint portion at almost the same rate, so that the strength of the joint portion can be close to the strength of the plate-like member itself in the normal crystal precipitation state.

  Moreover, the setter for heat treatment of the present invention is characterized in that the bending strength of the bonded portion is 70% or more with respect to the bending strength of the plate-like member, that is, the non-bonded portion.

  The bending strength of the joining portion is preferably 70% or more with respect to the bending strength of the plate-like member, and it is possible to prevent stress fracture caused by a local decrease in strength of the joining portion. Moreover, it is more preferable that it is 80% or more with respect to the bending strength of a plate-shaped member, and it is ideal that it is equivalent or more than a non-joining site | part. When performing absolute evaluation, it is preferable to use the bending strength evaluated by the method prescribed in JIS R1601.

Moreover, the setter for heat treatment of the present invention is made of crystallized glass having β-quartz as a main crystal and having a thermal expansion coefficient of −10 × 10 ^{−7 to} 5 × 10 ⁻⁷ / K in a temperature range of 30 to 750 ° C. Once formed, even when a temperature difference of about 700 ° C. (also referred to as a heat shock) occurs in the heat treatment setter, no major deformation or destruction due to the expansion difference occurs.

Moreover, the setter for heat treatment of the present invention is formed of crystallized glass having a thermal expansion coefficient of 5 × 10 ⁻⁷ to 15 × 10 ⁻⁷ / K having a β-spodumene as a main crystal and a temperature range of 30 to 750 ° C. Thus, the heat resistance temperature during continuous use is higher by 50 to 100 ° C. than the crystallized glass having β-quartz as the main crystal, and the Vickers hardness is increased by about 10 to 50 in terms of strength. For example, Neoceram N-11 made by Nippon Electric Glass Co., Ltd., which is a milky white crystallized glass, has a coefficient of thermal expansion of 12 × 10 ⁻⁷ / K in the temperature range of 30 to 750 ° C., and the continuous use temperature is about 800 ° C, short-term use temperature is about 900 ° C, thermal shock strength is about 600 ° C, and Vickers hardness is Hv720.

  The setter for heat treatment of the present invention is characterized in that the flatness of the mounting surface of the flat plate portion is 0.3% or less and the Ra value of the surface roughness of the mounting surface is 0.1 to 1 μm. And

  In the present invention, the flatness is a ratio of the amount of warpage per unit length specified in JIS R3202, and the surface roughness Ra is an arithmetic average roughness specified in JIS B0601, and is a measured cutoff value. Means a value when measured under conditions of 0.8 mm and a measurement length of 4 mm. Since the setter for heat treatment of the present invention has high flatness, that is, the flatness of the mounting surface on which a large glass substrate is directly mounted, that is, the ratio of the warpage per 500 mm in length is 0.3% or less. The large glass substrate placed directly on the surface of the setter is not warped, and the large glass substrate can be heat-treated while maintaining high flatness.

  Furthermore, the setter for heat treatment of a glass substrate according to the present invention has a surface roughness of a mounting surface on which a large glass substrate is directly mounted within a range of 0.1 to 1 μm in Ra value, so that the large glass substrate is softened. The surface pattern of the setter is not transferred to the surface, and when a large glass substrate is placed on the setter mounting surface, the large glass substrate does not slide on the setter mounting surface, and after heat treatment A large glass substrate can be easily separated from the mounting surface of the setter.

  Further, when the heat treatment setter of the present invention is provided with a through hole or a concave groove which is a ventilation hole for introducing air through the contact surface with the object to be treated, the heat treatment setter is brought into close contact with the heat treatment jig after the heat treatment. When separating an object to be processed such as a certain plate glass, air can quickly enter from the vent hole and the object to be processed can be easily separated from the heat treatment jig. In addition, since it consists of crystallized glass, many pores (voids) do not exist inside such as alumina ceramics, silicon carbide and other sintered bodies, and no impurity gas is generated when the temperature of the heat treatment is increased. It does not contaminate the surface of the workpiece.

  A method for manufacturing a heat-treating setter according to the present invention is a method for manufacturing a heat-treating setter made of crystallized glass introduced into a heat-treating furnace in a state where an object to be processed is placed on a mounting surface of a flat plate part, Holding a plurality of glass plates in a flat shape, the end faces to be joined are arranged opposite to each other, the end faces are heated and softened and welded to form a welded glass plate, and the welded glass plate is heat-treated and crystallized. A welded crystallized glass plate is obtained, and the welded crystallized glass plate is processed to a desired dimensional accuracy.

  In the production method of the present invention, when a plurality of glass plates are held in a flat shape and the end surfaces to be joined are arranged to face each other, the end surfaces are heated and softened and welded to form a welded glass plate. In order to prevent a decrease in strength, it is important not to make the cross section of the bonded portion smaller than the cross section of the glass plate, but it is preferable to make the cross section larger than the cross section of the glass plate. In addition, by crystallizing the welded glass plate by heat treatment to obtain a welded crystallized glass plate, it is possible to perform the crystallization process on the joining site with substantially the same thermal history as the glass plate.

  In addition, the method for producing the setter for heat treatment of the present invention is such that the end face to which the glass plate is bonded is heated and softened to a predetermined temperature of 1300 ° C. or higher, and is fused and cooled and solidified within 20 seconds. It is characterized by.

In general, Li ₂ O—Al ₂ O ₃ —SiO ₂ -based low expansion crystallized glass is melted at about 1700 ° C. and the viscosity is 10 ³ to 10 ⁴ poise at a temperature of 1300 to 1500 ° C. by a roll method or the like. Molded into a glass plate. The obtained glass plate is phase-separated to a size of about 5 nm. When such a glass plate is crystallized, crystal nuclei such as Al ₂ Ti ₂ O ₇ , ZrO ₂ , ZrO ₂ .TiO ₂ , TiO ₂ precipitate at about 750 to 800 ° C., and β at about 900 ° C. -Quartz precipitates β-spodumene at about 1000 ° C. Therefore, when heating and softening the end face of a glass plate that has undergone phase separation, if the heating to solidification is not performed in a short time, undesired crystals will precipitate and the desired strength will be obtained at the joint site. Disappear. In the present invention, in order to prevent undesired precipitation of crystals, the end face to which the glass plate is bonded is heated to 1300 ° C. or more, softened and welded, and cooled to about 900 ° C. or less and solidified within 20 seconds. It is important to use a welded glass plate. In order to raise the temperature of the end face to which the glass plate is joined to such a high temperature in a short time, it is preferable that a heating means such as a burner is movable relative to the end face of the glass plate.

  Moreover, the manufacturing method of the setter for heat processing of this invention is characterized by rotating this glass plate, when heating and softening and welding the end surface of the several glass plate arrange | positioned facing.

  In general, an original glass for producing crystallized glass has a so-called short characteristic in which viscosity rapidly changes with temperature change. For this reason, when the end face of the glass plate is heated and softened, gravity acts and hangs down, so that it cannot be formed into a plate shape. Therefore, when the end surfaces of a plurality of glass plates arranged opposite to each other are heated, softened, and welded, it is necessary to rotate the softened parts so that they do not hang down and deform. The direction of rotation of a plurality of opposed glass plates is such that when the glass plate is supported horizontally, the front and back are reversed, and when the glass plate is supported vertically, the vertical direction is reversed. When it is rotated, it is possible to prevent the softened portion from sagging. When rotating the glass plate, it is necessary to rotate it together with a heating means such as a burner.

  In addition, the method for manufacturing the setter for heat treatment of the present invention comprises heating and softening the end faces of a plurality of glass plates to form a welded glass plate, and heating both sides of the welded portion of the welded glass plate. The temperature is raised above the annealing point, and then gradually cooled below the strain point.

  Since very large thermal strains are generated on both sides of the welded portion of the fused glass plate heated to 1300 ° C. or higher and softened, if it is cooled as it is, thermal strains are generated on both sides of the welded portion. A crack caused by this will cause the welded glass plate to break. Therefore, it is necessary to heat the part where the thermal strain on both sides of the welded part is heated to raise the temperature above the annealing point, and then gradually cool it below the strain point.

  The method for producing a heat-treating setter according to the present invention is characterized in that, after sharpening the end surfaces of a plurality of glass plates, the end surfaces are heated and softened and welded to form a welded glass plate.

  In order to make the shape of the welded part of the welded glass plate into a desired shape close to a flat plate efficiently, it is preferable to sharpen the end face to which the glass plate is joined. Thereby, it becomes possible to raise end surface temperature to 1300 degreeC or more by heating for a short time, and it becomes easy to control so that a welding part does not become large too much.

  Moreover, the manufacturing method of the setter for heat treatment of the present invention is characterized in that, after purifying the end face to which the glass plate is bonded, the end face is heated and softened and welded to obtain a welded glass plate.

  When foreign substances such as wrinkles or moisture adhere to the end face to which the glass plate is joined, undesired crystal precipitation occurs at the joining portion due to the dirt, and the desired strength cannot be obtained. Thus, in order to prevent undesired crystal precipitation at the joining site, it is important to purify the end face to which the glass plate is to be joined, and then heat and soften the end face to form a welded glass plate. It becomes. As cleaning means for the end face to which the glass plate is joined, washing with organic or other cleaning liquid for organic dirt, heat cleaning to incinerate by raising the end temperature to 500 ° C or higher in a clean environment, inorganic matter The dirt may be etched with an acid or alkali solution, and the end may be cut out to expose a new end face.

  In addition, heating and softening of the end face of the glass plate can be performed using a burner that uses combustion gas and oxygen, but there are heating methods such as electric heaters, infrared lamps, infrared lasers, etc. that do not adhere soot and moisture. preferable.

  The heat-treating setter of the present invention has a structure in which a flat plate portion is formed by welding a plurality of plate-like members in a flat shape, and it is possible to easily form a mounting surface having a size that has not been conventionally possible, and adhesion Large joints can be used for large display panels and multiple panels because the joints have sufficient strength without causing any local strength reduction as in mechanical joints and other mechanical joints. It contributes greatly to the efficient production of

  In addition, since the setter for heat treatment of the present invention has a coefficient of thermal expansion close to zero, even if the heat treatment is repeated continuously or intermittently, the setter itself does not expand or contract, and the setter is placed directly on the setter. It is not affected and is not damaged by a sudden thermal shock, and can be used stably for a long time.

  Furthermore, the setter for heat treatment of the present invention has a flatness of a flat surface of a flat plate portion on which a large substrate is placed and has a high flatness of 0.3% or less, and is a large size placed on the surface of the setter. The large glass substrate can be heat-treated while maintaining high flatness without causing warpage of the glass substrate, and the Ra value of the surface roughness of the flat plate portion mounting surface is in the range of 0.1 to 1 μm. The pattern of the surface of the setter is not transferred to the softened surface of the large glass substrate, and when the large glass substrate is placed on the setting surface of the setter, the large glass substrate is The large glass substrate can be easily separated from the setter's mounting surface after heat treatment without causing the mounting surface to slide up, and has an excellent practical effect suitable for a large plasma display panel substrate. is there.

  The method for manufacturing a setter for heat treatment according to the present invention comprises a plurality of glass plates held in a flat shape, the end surfaces to be joined are arranged facing each other, and the end surfaces are heated and softened to form a welded glass plate. Since the welded glass plate is crystallized by heat treatment to form a welded crystallized glass plate, and the welded crystallized glass plate is processed to a desired dimensional accuracy, the present invention having the above-described high strength and high accuracy. It becomes possible to efficiently produce the setter for heat treatment.

  Hereinafter, an example according to an embodiment of the present invention will be described in detail with reference to FIG. In the figure, 1 is a setter for heat treatment made of crystallized glass, 2 and 3 are plate-like members, 4 is a bonding site, G is a glass substrate as a workpiece, 5 is a vent hole, Reference numeral 6 denotes a concave groove.

The heat-treating setter 1 is, for example, Neoceram N-0 made by Nippon Electric Glass Co., Ltd., which is a transparent crystallized glass, having a thermal expansion coefficient of −4 × 10 ⁻⁷ / K in the temperature range of 30 to 750 ° C. It consists of a plate (continuous use temperature is about 750 ° C., short-term use temperature is about 800 ° C., thermal shock strength is about 800 ° C., Vickers hardness is Hv 710), length 2500 mm, width 2200 mm, and thickness 5 mm. As shown in FIG. 1A, the heat treatment setter 1 has a structure in which a plate-like member 2 and a plate-like member 3 are joined at a joining portion 4 by welding. Β-quartz crystals are precipitated in the joint portion 4 at approximately the same rate as the plate-like members 2 and 3. Further, in the setter 1 for heat treatment, the mounting surface 1b of the flat plate portion 1a has a flatness of 0.3% or less, and the value of the warpage is such that the gap generated when it is mounted on the measuring platen is 0. It is within 3 mm, and the Ra value of the surface roughness of the mounting surface 1b is about 0.5 μm, which is a frosted glassy sand-printed surface. As shown in FIGS. 1B and 1C, the mounting surface 1b of the flat plate portion 1a has a through hole 5 or a concave groove 6 which is a vent hole for introducing air through the contact surface with the glass substrate G. Is provided.

  Next, a method for manufacturing the heat treatment setter 1 will be described with reference to the drawings.

  First, a large plate having a thickness of 6.5 mm was formed by a roll plate, and then cut into a rectangle having a length of 2500 mm × a width of 1110 mm to obtain two glass plates.

  Next, as shown in FIG. 2 (A), an end face 22a that joins two glass plates 22 and 23 to the fixed base 10b on the base 10a of the welding apparatus 10 and the movable base 10c on the guide rail 10d, respectively. , 23a are opposed to each other, and the end surface 22a is set at the position of the burners 11 and 12, and is fixed to the fixed base 10b and the movable base 10c by fasteners (not shown). As shown in an enlarged manner, the end faces 22a and 23a are, for example, curved surfaces having a tip R of 2 mm, continuous with the surface by chamfering of 45 °, and processed into a sharp shape as a whole. At this time, the end faces 22a and 23a may be cleaned, or may be previously cleaned by the above-described cleaning means. The mounting surfaces of the fixed base 10b and the movable base 10c are adjusted in height so that the two glass plates 22 and 23 are joined within a predetermined range of flatness.

  After that, as shown in FIG. 2 (B), the moving table 10c is moved so that the end surfaces 22a and 23a of the glass plates 22 and 23 are brought into contact with each other, and the burners 11 and 12 are used, as shown in FIG. The burners 11 and 12 supported by the swing arm 15 reciprocating in the direction of the arrow by the drive unit 16 are moved relative to the end faces 22a and 23a of the glass plates 22 and 23 and heated to 1300 ° C. or higher, for example, 1350 ° C. To do. Thereafter, it is cooled to about 900 ° C. or less within 20 seconds and solidified to form a welded portion 24 slightly thicker than the glass plates 22 and 23 as shown in FIG. To.

  At this time, in order to prevent the softened portion from sagging, the glass plates 22 and 23 are rotated together with the base 10a of the welding apparatus 10 in the direction of reversing the front and back indicated by arrows.

  Next, as shown in FIG. 2 (D), by using annealing burners 13 and 14, the portions of 100 to 200 mm width where the temperature does not rise on both sides of the welded portion 24 of the welded glass plate 25 are gradually heated. The temperature is raised to 700 ° C or higher, which is a cold spot, and then gradually cooled to 645 ° C or lower, which is a strain point, over 5 minutes. At this time, similarly to the burners 11 and 12 shown in FIG. 2C, the annealing burners 13 and 14 supported by the swing arm 15 reciprocating in the direction of the arrow by the drive unit 16 are supported, and the welded glass plate 25 is supported. You may move relatively.

As shown in FIG. 3 (A), in the crystallization furnace 17, a welded glass plate 25 is horizontally supported via a support 18, and Al ₂ Ti ₂ O ₇ , ZrO ₂ , Crystal nuclei such as ZrO ₂ · TiO ₂ are precipitated and crystallized by precipitating β-quartz at about 900 ° C. or β-spodumene at about 1000 ° C. to obtain a welded crystallized glass plate 26. During the crystallization, the welded glass plate 25 is softened and slightly deformed, so that the mounting surface of the support member 18 has a height so that the glass plates 22 and 23 are within a predetermined flatness. Adjust it.

  Finally, as shown in FIG. 3 (B), a welded crystallized glass plate 26 is placed on the support portion of the grinding machine 19, and the surface thereof is cooled with coolant (such as cutting water) using a generator 20 of diamond abrasive grains. After being ground to a thickness of about 5.5 mm while applying (not shown), lapping is performed on each side with a polishing machine using # 600 abrasive grains, and the front and back surfaces are processed flat and smooth. . By such processing, both the front and back surfaces of the welded crystallized glass plate 26 have a flatness of 0.3% or less and a Ra value in the range of 0.1 to 1.0 μm, for example, 0.5 μm. It is supposed to be rough. It is sufficient that the flatness and the surface roughness are realized on at least the placement surface 1b of the setter 1 on which the glass substrate G is directly placed. Further, the end surface of the welded crystallized glass plate 26 is finished into a desired chamfered shape while applying coolant (not shown) such as cutting water with a grinding wheel 21 of diamond abrasive grains. In this way, an unprecedented large heat setter 1 having a length of 2500 mm, a width of 2200 mm, and a thickness of 5 mm as shown in FIG. 1 was obtained.

  The heat treatment setter thus produced was evaluated as follows. Due to the convenience of the evaluation test equipment, a heat treatment setter having a thickness of 3 mm was cut into 50 mm × 120 mm × 3 mm to prepare a strength test sample. No. Nos. 1 and 2 are those in which the joint surface (streak) can be visually observed in the welded part. Nos. 3 and 4 are those in which the joining surface (streaks) cannot be visually observed in the welded part. Reference numerals 5 and 6 are non-welding strength test samples. In addition, an autograph tester manufactured by Shimadzu Corp. Model: AGS-500D was used as a measuring machine, and the measurement conditions were set to a span of 100 mm and a crosshead speed (descent speed) of 0.5 mm / min in a three-point bending test. The results are shown in Table 1.

  From the measured numerical values in Table 1, No. with the welded part. No. 1 to 4 and No. It was found that there was no great difference in strength between 5 and 6, and the welded product was somewhat stronger, though slightly.

  Next, a thermal stability test was performed. As shown in FIG. 4, the surface accuracy of a welded sample S and a non-welded sample having dimensions of 210 mm × 300 mm × 3 mm was measured on the surface plate 30 by the following method. The measurement of the amount of warpage is set so that the scale is zero by applying the terminal 32a of the dial gauge 32 fixed to the movable stand 31 to the position of the center PO. Based on this value, slide toward the corner of the welded sample S. Stop at position P1 10mm before the corner and read the value at that time. Similarly, the other corners P2 to P4 are also measured. When the front side is finished, the back side measurement is started. When the measurement is completed, the surface is turned up, and it is put into a heat treatment furnace having a temperature distribution as shown in FIG. 5, and surface accuracy is measured after one time of feeding. Measure later surface accuracy. The wall thickness was measured at a point 50 mm before the corner. The results are shown in Table 2.

  From the results in Table 2, there is no significant difference between the welded sample S and the non-welded sample, and the amount of change such as warpage is 60 μm (0.06 mm) at maximum, and the average is less than 10 μm (0.01 mm). It was a practically excellent value.

  When the glass substrate G having a length of 2300 mm and a width of 2000 mm was heat-treated at a temperature of 650 ° C. on the mounting surface 1 b of the flat plate portion 1 a using the heat treatment setter 1, the large glass substrate G was warped. It was possible to perform the heat treatment without problems while maintaining high flatness. After the heat treatment, the glass substrate G could be easily taken out from the placement surface 1b of the heat treatment setter 1. Further, even when the heat treatment was repeated continuously or intermittently, the heat treatment setter 1 did not expand and contract and was not damaged by a thermal shock or the like, so that it could be used stably for a long time.

  The thermal expansion coefficient was measured with a Dilatometer. The transmittance was measured using a spectrophotometer. The flatness was measured according to JIS R3202, and the surface roughness Ra was measured according to JIS B0601.

  The structure of the setter for heat treatment of the present invention can be applied to heat treatment of a large field emission display (FED) substrate or the like, and can also be applied to a fireproof window made of large crystallized glass that requires heat resistance. Is possible.

It is explanatory drawing of the setter for heat processing made from crystallized glass concerning this invention, Comprising: (A) is a perspective view, (B) introduces air through the contact surface with a glass substrate in the mounting surface of a flat plate part. Sectional drawing of the setter for heat processing which provided the through-hole to perform, (C) is sectional drawing of the setter for heat processing which provided the ditch | groove. It is explanatory drawing of the manufacturing method of the setter for heat processing which concerns on this invention, Comprising: (A) is explanatory drawing just before applying two glass plates with a welding apparatus, (B) is a burner with two glass plates. Explanatory view of welding with flame, (C) is a side view of (B), (D) is an explanation of heating both sides of the welded portion of the welded glass plate to raise the temperature above the annealing point and gradually cooling it. Figure. It is explanatory drawing of the manufacturing method of the setter for heat processing which concerns on this invention, Comprising: (A) is explanatory drawing which uses a support material as a welded crystallized glass plate in a crystallization furnace, (B) is explanatory drawing which processes the welding crystallized glass plate with a grinding machine, and produces the setter for heat processing. Explanatory drawing of the dimension evaluation method in the thermal stability test regarding the setter for heat processing. Explanatory drawing of the temperature distribution of the heat processing furnace in the thermal stability test regarding the setter for heat processing.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Setter 1a Flat plate part 1b Placement surface 1c End surface 2, 3 Plate-shaped member 4 Joining part 10 Welding apparatus 10a Base 10b Fixed base 10c Moving base 10d Guide rail 11, 12 Burner 13, 14 Annealing burner 15 Swing arm 16 Drive Part 17 Crystallization furnace 18 Support material 19 Grinding machine 20 Generator 21 Grinding wheel 22, 23 Glass plate 24 Welding part 25 Welded glass plate 26 Welded crystallized glass plate 30 Surface plate 31 Moving stand 32 Dial gauge G Glass substrate ( Processed material)
S welding sample

Claims (10)

The thermal expansion coefficient in the temperature range of 30 to 750 ° C. introduced into the heat treatment furnace in a state where the workpiece is placed on the placement surface of the flat plate portion is −10 × 10 ⁻⁷ to 15 × 10 ⁻⁷ / K. A heat-treating setter made of crystallized glass, wherein the flat plate portion has a structure in which a plurality of plate-like members are welded in a planar shape.   2. The heat-treating setter according to claim 1, wherein the same crystal as the plate-like member is precipitated at substantially the same ratio at the joint portion between the plate-like members.   The setter for heat treatment according to claim 1 or 2, wherein the bending strength of the joint portion is 70% or more with respect to the bending strength of the plate-like member.   4. The flatness of the mounting surface of the flat plate portion is 0.3% or less, and the Ra value of the surface roughness of the mounting surface is 0.1 to 1 [mu] m. The setter for heat treatment as described in 2.   A method of manufacturing a setter for heat treatment made of crystallized glass introduced into a heat treatment furnace in a state where an object to be processed is placed on a placement surface of a flat plate portion, and holding a plurality of glass plates in a flat shape The end surfaces to be joined are arranged opposite to each other, and the end surfaces are heated and softened and welded to form a welded glass plate. The welded glass plate is heat-treated to crystallize to form a welded crystallized glass plate, A method for producing a setter for heat treatment, characterized by processing a crystallized glass plate with a desired dimensional accuracy.   The end face to which the glass plate is joined is heated and softened to a predetermined temperature of 1300 ° C. or higher and welded, and cooled and solidified within 20 seconds to form a welded glass plate. A method of manufacturing a setter for heat treatment.   The method for producing a heat-treating setter according to claim 5 or 6, wherein the glass plates are rotated when the end faces of the plurality of glass plates arranged opposite to each other are heated, softened and welded.   Heat and soften the end faces of a plurality of glass plates to form a fused glass plate, heat both sides of the welded portion of the fused glass plate to raise the temperature above the annealing point, and then strain The method for producing a setter for heat treatment according to any one of claims 5 to 7, wherein the setter is gradually cooled to the following.   The setter for heat treatment according to any one of claims 5 to 8, wherein after sharpening the end surfaces of the plurality of glass plates, the end surfaces are heated and softened and welded to form a welded glass plate. Production method.   10. The heat-treating setter according to claim 5, wherein after the end face to which the glass plate is bonded is purified, the end face is heated and softened and welded to obtain a welded glass plate. Method.

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