JP2005058985A - Classifier - Google Patents

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JP2005058985A
JP2005058985A JP2003322243A JP2003322243A JP2005058985A JP 2005058985 A JP2005058985 A JP 2005058985A JP 2003322243 A JP2003322243 A JP 2003322243A JP 2003322243 A JP2003322243 A JP 2003322243A JP 2005058985 A JP2005058985 A JP 2005058985A
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classification
medium
supply
container
classifier
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Hideaki Kiyokawa
英明 清川
Shinkichi Ito
新吉 伊藤
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CHUO KAKOKI
Chuo Kakohki Coltd
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CHUO KAKOKI
Chuo Kakohki Coltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a new classifier capable of efficiently classifying required fine particles from fine particles of a particle size of ≤10 μm. <P>SOLUTION: A filter with pass-through holes having a size preventing falling of classifying media of ceramics, plastics or metals is provided at a bottom part of a cylindrical or rectangular casing, and the classifying media are placed on the filter. One or more discharge ports or supply ports are respectively provided to the classifier, and a supply cone having one or more supply ports or discharge ports is attached to the lower part of the classifier. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

発明の詳細な説明Detailed Description of the Invention

本発明は、主に10μm以下の微細粒子を分級する場合に大いに効果がある。  The present invention is very effective when mainly classifying fine particles of 10 μm or less.

本発明は、分級媒体の材質を選定することにより、不純物の混入が殆どないことから不純物の混入を嫌う分野に大いに効果がある。  The present invention has a great effect in the field where impurities are hardly mixed because the contamination medium is hardly mixed by selecting the material of the classification medium.

従来の分級方法を大きく分けると、サイクロン形式による風力を利用した方法、又は機械的にファンを回転させ、その遠心力を利用した方法、スクリーンを利用した方法、水及び溶剤を使い重力沈降を利用した方法等がある。本発明のような分級媒体を利用した技術はない。  The conventional classification methods can be broadly divided into a method using wind power in a cyclone format, a method using mechanically rotating a fan and utilizing the centrifugal force, a method using a screen, and gravity sedimentation using water and a solvent. There are methods. There is no technique using a classification medium like the present invention.

従来の分級装置の持つ欠点は、分級装置内で被分級物が高速度で運動することによる摩耗が多く、その摩耗物が不純物として被分級物中に混入する。  The disadvantage of the conventional classifier is that the classifier has a lot of wear due to movement of the classifier at a high speed, and the wear is mixed as impurities into the classifier.

又、機械的にファンを回転させる分級装置は回転軸部があり、その回転軸部に被分級物の粉体が入り、それによる摩耗が生じ、又メンテナンスが多く必要となる。  Further, the classifying device that mechanically rotates the fan has a rotating shaft portion, and powder of the classified material enters the rotating shaft portion, thereby causing wear and requiring a lot of maintenance.

又、サイクロン形式、機械的ファンの回転の分級装置では10μm以下の粉体粒子の分級は、分級効率(分級カット点による効率)が悪く、特に1μm以下についての分級効率(分級カット点による効率)が信頼できない程となる。  Also, in the cyclone type mechanical fan rotation classifier, the classification of powder particles of 10 μm or less has poor classification efficiency (efficiency due to classification cut point), especially the classification efficiency for 1 μm or less (efficiency due to classification cut point). Is unreliable.

又、水及び溶剤を使った重力沈降方法は、分級するに必要な時間が大変長くなる欠点がある。  Moreover, the gravity sedimentation method using water and a solvent has the fault that time required for classification becomes very long.

又、スクリーンを利用した方法では10μm以下の粉体粒子の分級、ましてや1μm以下の分級は困難である。  In addition, it is difficult to classify powder particles of 10 μm or less by the method using a screen, and further, to classify 1 μm or less.

本発明は上記課題を下記構成により解決するものである。  The present invention solves the above problems by the following configuration.

本発明は分級媒体を利用し10μm以下の微粒子、特に1μm以下の微粒子の分級を可能にし、尚、不純物の混入を殆どなくし、又、機械的部分のメンテナンス等をなくすことを特徴とする。  The present invention is characterized in that it enables classification of fine particles of 10 μm or less, particularly fine particles of 1 μm or less by using a classification medium, hardly contaminating impurities, and eliminating maintenance of mechanical parts.

又、本発明の分級装置は分級媒体を分級容器に充填することにより、分級媒体間の空間を応用して、又これに振動を与えることによりその空間を変更し、分級する分級点を変えることが可能である。  In addition, the classification device of the present invention applies the space between the classification media by filling the classification medium in the classification container, and changes the classification by changing the space by applying vibration to the classification medium. Is possible.

本発明の分級装置における分級媒体としては被分級物により異なるが、被分級物の分級する粒径が1μm以下の場合は、50μm以下のジルコニアビーズを使用することが望ましい。又その他の分級媒体として金属ビーズ、アルミナビーズ、プラスチックスビーズがある。  Although the classification medium in the classification apparatus of the present invention varies depending on the classification object, it is desirable to use zirconia beads of 50 μm or less when the particle diameter of the classification object is 1 μm or less. Other classification media include metal beads, alumina beads, and plastic beads.

本発明の分級装置として連続式で使用することが可能である。  It can be used continuously as the classifier of the present invention.

本発明の分級装置には分級媒体に付着した被分級物を払い落とす目的と、被分級物の凝集の分散、又、分級精度を高める目的のために振動を加えることが出来る。  The classifying apparatus of the present invention can be vibrated for the purpose of removing the classified matter adhering to the classification medium, the dispersion of the aggregates of the classified items, and the purpose of improving the classification accuracy.

次に、本発明を実施するための最良の形態について、湿式分級に適用した場合を例にとり説明をする。  Next, the best mode for carrying out the present invention will be described by taking as an example the case of application to wet classification.

ここでの湿式分級とは、水又は溶剤中に被分級物をスラリー化し、よく分散をし、このスラリーを本発明の分級装置を適用した場合を例にとり説明をする。  The wet classification here will be described by taking as an example a case where a substance to be classified is slurried in water or a solvent and well dispersed, and the slurry is applied to the classification apparatus of the present invention.

本発明の分級装置は排出口、又は供給口を各一つ以上を持ったノズルを有した分級容器と分級容器の下に取り付けられた供給口及び排出口を各一つ以上を持った供給コーンからなっている。  The classification device according to the present invention includes a classification container having a nozzle having one or more discharge ports or supply ports, and a supply cone having one or more supply ports and discharge ports attached under the classification container. It is made up of.

又、本発明の分級装置の上部にもう一段、分級容器を取り付けることにより分級容器が二段となり、この二段を使うことによって、さらに分級効率が高くなる。  Further, by attaching another classification container to the upper part of the classification device of the present invention, the classification container becomes two stages, and by using these two stages, the classification efficiency is further increased.

具体的には図1において、1の分級容器は上部に排出ノズルを持った円筒形で、2のフィルターを有し、これに、3のジルコニアビーズを投入した。  Specifically, in FIG. 1, the classification container 1 has a cylindrical shape with a discharge nozzle at the top, has 2 filters, and 3 zirconia beads are charged therein.

これに4の供給コーンを取り付け、又、1の分級容器には振動源として二つの5の振動モーターを取り付けてある。又、振動モーターにより振動を機外に伝達しないために、1の分級容器に6の緩衝材が11の架台に取り付けてあると同様に、機外とは12のフレキシブルホースにて振動の伝達を防いでいる。  Four supply cones are attached to this, and two classification motors are attached to one classification container as a vibration source. In addition, in order not to transmit vibration to the outside by the vibration motor, transmission of vibration is transmitted from the outside by 12 flexible hoses in the same way as 6 cushioning materials are attached to 11 racks in 1 classification container. It is preventing.

一方、7のタンクにスラリーを投入し被分級物を8の撹拌機で撹拌する。9のポンプにてスラリーを4の供給コーンに供給する。供給されたスラリーは、2のフィルターを通して3の分級媒体に入る。  On the other hand, the slurry is put into the tank 7 and the classification object is stirred with the stirrer 8. The slurry is supplied to the supply cone of 4 with the pump of 9. The supplied slurry enters 3 classification media through 2 filters.

2のフィルター及び3の分級媒体にて分級されたオーバーサイズのスラリーは、4の供給コーンから排出され7のタンクに戻る。一方、3の分級媒体と5の振動源による振動によって分級されたスラリーは、1の分級容器から排出され、10の製品タンクに入る。  The oversized slurry classified by 2 filters and 3 classification media is discharged from 4 feed cones and returned to 7 tanks. On the other hand, the slurry classified by the vibration by the classification medium 3 and the vibration source 5 is discharged from the classification container 1 and enters the product tank 10.

図2の図面は乾式の分級で、分級容器が二段となっている本発明を説明する。  The drawing of FIG. 2 illustrates the present invention in which the classification is a dry classification and the classification container has two stages.

1の分級容器に3の分級媒体を充填する。同様に1’の分級容器に3’の分級媒体を充填し、2のフィルターにより1と1’の分級容器が分かれ、又、3と3’の分級媒体は同じ径、又、異なる径のどちらでも可能である。1’の分級容器には2’のフィルターを取り付け、この下部には4の供給コーンを有し、8の供給タンクから被分級物を4の供給コーンに供給する9の供給ブロワーを有している。一方、分級容器には5の振動源を有し、又、各外部との配管の継ぎには、7のフレキシブルホースにて振動の伝達を防ぐ。3の分級媒体を通過した被分級物は、11の排風ブロワーにより10のバッグフィルターに捕集され、12の製品タンクで受けられる。一方、3’を通過した被分級物の一部は、15の排風ブロワーにより14のバッグフィルターで捕集され、8の供給タンクに受けられる。  1 classification container is filled with 3 classification media. Similarly, a 1 'classification container is filled with a 3' classification medium, and 1 and 1 'classification containers are separated by two filters, and the 3 and 3' classification mediums have the same diameter or different diameters. But it is possible. The 1 'classifying vessel is fitted with a 2' filter, with a lower 4 supply cone, and an 8 supply blower for supplying the product to be classified from the 8 supply tank to the 4 supply cone. Yes. On the other hand, the classification container has 5 vibration sources, and the transmission of vibration is prevented by 7 flexible hoses at the joints of the pipes to the outside. The classified material that has passed through the classification medium 3 is collected in 10 bag filters by 11 exhaust blowers and received in 12 product tanks. On the other hand, a part of the classified material that has passed through 3 'is collected by 15 bag exhaust blowers by 14 bag filters and received by 8 supply tanks.

発明の作用・効果Effects and effects of the invention

本発明は、分級媒体の媒体の大きさとその充填性により媒体間の空隙が変化する。即ち、空隙が大きくなれば被分級物の粒子が通り易く、又、小さくなれば通り難くなる。この空隙の大きさを左右するのは分級媒体の大きさと、この分級媒体を振動させる振動数と振幅となる。又、分級媒体の比重は大きい方がよい。  In the present invention, the gap between the media changes depending on the size of the classification medium and its filling property. That is, if the voids are large, the particles to be classified are easy to pass, and if the voids are small, they are difficult to pass. The size of the air gap affects the size of the classification medium, and the frequency and amplitude for vibrating the classification medium. Also, the specific gravity of the classification medium should be large.

例えば、10μm以下で平均粒径1μmのアルミナで分級点を2μmでカットする場合、分級媒体として50μmのジルコニアビーズを使用し、その効果を確かめた。ジルコニアビーズは、セラミックスの中でも比重が大きく、又50μmの微細な粒子が製造、販売されていることから選定をした。  For example, when the classification point is cut at 2 μm with alumina of 10 μm or less and an average particle size of 1 μm, 50 μm zirconia beads were used as the classification medium, and the effect was confirmed. Zirconia beads were selected because they have a large specific gravity among ceramics and 50 μm fine particles are manufactured and sold.

分級容器にジルコニアビーズを充填し、この分級容器を振動することによりジルコニアビーズを振動させる。振動しているジルコニアビーズの下部からアルミナのスラリーを通過させる。アルミナのスラリーは10%濃度とし、そのアルミナを分級する分級点を2μm、これは2μm以下が80%程、含まれている。  The classification container is filled with zirconia beads, and the zirconia beads are vibrated by vibrating the classification container. The alumina slurry is passed through the bottom of the vibrating zirconia beads. The alumina slurry has a concentration of 10%, and the classification point for classifying the alumina is 2 μm, which is about 80% of 2 μm or less.

この時、2μmより細かいアルミナはジルコニアビーズの層を通過し、目的の製品として機外に排出される。又2μmより大きいアルミナはジルコニアビーズを通過出来ず、その下部より機外に排出される。もちろん、2μmのアルミナが完全に分級され製品となるのではなく、若干はジルコニアビーズを通過せずに2μm以上のアルミナと同伴する。  At this time, alumina finer than 2 μm passes through the layer of zirconia beads and is discharged out of the machine as a target product. Also, alumina larger than 2 μm cannot pass through the zirconia beads and is discharged out of the machine from the lower part. Of course, 2 μm of alumina is not completely classified into a product, but is slightly accompanied by 2 μm or more of alumina without passing through zirconia beads.

このように微粒子を目的の粒子に分級出来る作用があり、従来の装置では2μm以下の微粒子を分級し、2μm以下の中に2μm以上の粒子を含まないような分級は困難であり、この分級をするには長時間かけて水比分級するしかなかった。  In this way, there is an effect that fine particles can be classified into target particles. In conventional devices, it is difficult to classify fine particles of 2 μm or less and not to contain particles of 2 μm or more in 2 μm or less. The only way to do this was to classify the water ratio over a long period of time.

本発明の分級装置を利用することによって、高い分級精度が得られることから、より微粒子によるIC関連のシリコンウェハー等のラッピング材料には、大きな効果がある。  Since a high classification accuracy can be obtained by using the classification apparatus of the present invention, a wrapping material such as an IC-related silicon wafer using fine particles has a great effect.

ここで50μmの径のビーズを分級容器に充填すると、静止状態の時のビーズの最小間隙が約18μmとなる。ここで分級容器に振動を与えることで、その振動の大、小で下部から供給される被分級物に対する抵抗も変わる。又、被分級物を供給する速さによっても抵抗が異なる。  Here, when beads having a diameter of 50 μm are filled in a classification container, the minimum gap between the beads when stationary is about 18 μm. Here, by applying vibration to the classification container, the resistance to the classification object supplied from the lower part changes depending on whether the vibration is large or small. Further, the resistance varies depending on the speed of supplying the classification object.

これらの抵抗により、ビーズの空間を通過する被分級物の粒子径が決められる。これにより被分級物の分級点(カット点)が決められる。  These resistances determine the particle size of the classified material that passes through the bead space. Thereby, the classification point (cut point) of the classification object is determined.

試験例Test example

以下、本発明の効果を確認するために行った試験例について説明をする。  Hereinafter, test examples conducted for confirming the effects of the present invention will be described.

試験機としては、分級容器200φ×150H、ステンレス製製品排出用ノズル径25φ、フィルター通気孔30μm、分級媒体50μmのジルコニアビーズ。
振動モーター:60W×6P−2台
振動数:1200rpm
全振幅:4m/m
被分級物:10μm以下のアルミナ(平均粒径1μm、2μm以下80%)
スラリー供給量:0.2L/min
スラリー濃度:10%
分級点:2μm
運転時間:連続60min運転
The test machine is a zirconia bead having a classification container 200φ × 150H, a stainless steel product discharge nozzle diameter 25φ, a filter vent 30 μm, and a classification medium 50 μm.
Vibration motor: 60W x 6P-2 units Frequency: 1200rpm
Total amplitude: 4m / m
Classification object: Alumina of 10 μm or less (average particle size 1 μm, 2 μm or less 80%)
Slurry supply amount: 0.2 L / min
Slurry concentration: 10%
Classification point: 2μm
Operation time: Continuous 60 min operation

その結果、製品としては0.85kgの2μm以下のアルミナ粉を回収した。
回収率0.2L/min×60=12L
12L×0.1=1.2kg……アルミナ粉
1.2kg×0.80=0.96kg……2μm以下のアルミナ粉
回収率(0.85÷0.96)×100=88.5%
残りの11.5%は原液タンクの方に戻った。
As a result, 0.85 kg of alumina powder of 2 μm or less was recovered as a product.
Recovery rate 0.2L / min × 60 = 12L
12L × 0.1 = 1.2kg …… Alumina powder
1.2 kg × 0.80 = 0.96 kg …… Aluminum powder recovery of 2 μm or less (0.85 ÷ 0.96) × 100 = 88.5%
The remaining 11.5% returned to the stock solution tank.

産業上の利用の可能性Industrial applicability

本発明は、微粒子の精密分級を目的とする業界、特に電子業界には大きな利用の可能性がある。  The present invention has a great potential for use in industries aiming at fine classification of fine particles, particularly in the electronics industry.

本発明の分級装置によるモデル図である。It is a model figure by the classification device of this invention.

Claims (4)

円筒形、又は角筒形のケースの底部にセラミックス、プラスチックス、又は金属等の分級媒体が落下しない大きさの通気孔を有したフィルター上に該分級媒体を入れた排出口、又は供給口を各一つ以上を有し、分級容器の下部には供給口、又は排出口を各一つ以上有した供給コーンを取り付けた分級装置。  A discharge port or a supply port in which the classification medium is put on a filter having a vent hole of a size that prevents the classification medium such as ceramics, plastics, or metal from dropping at the bottom of a cylindrical or rectangular tube case. A classification device having one or more of each, and a supply cone having one or more supply ports or discharge ports attached to the lower part of the classification container. 該分級装置は、二段以上重ねることが可能な分級装置である。  The classification device is a classification device that can be stacked in two or more stages. 該分級装置は、被分級物が粉体の状態、又はスラリー状態のどちらにも対応が可能な分級装置である。  The classifying device is a classifying device capable of dealing with a material to be classified in either a powder state or a slurry state. 該分級装置は、分級媒体に振動を与えるために分級容器に一つ以上の振動モーターを有する分級装置である。  The classification device is a classification device having one or more vibration motors in a classification container in order to give vibration to the classification medium.
JP2003322243A 2003-08-11 2003-08-11 Classifier Pending JP2005058985A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015010025A (en) * 2013-07-01 2015-01-19 宇部マテリアルズ株式会社 Alkaline earth metal compound fine particle dispersion and method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015010025A (en) * 2013-07-01 2015-01-19 宇部マテリアルズ株式会社 Alkaline earth metal compound fine particle dispersion and method for producing the same

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