JP2005053769A - Ozone generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone generator having good ozone generation performances. <P>SOLUTION: In the ozone generator wherein a dielectric 10 connected to a high-voltage electrode and an earth electrode 16 are opposed to each other across a discharge space 26, and a starting material gas is passed through the discharge space 26 to generate ozone, the dielectric 10 is a dielectric which is integrated with a gap-forming rib 12 by screen printing. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ozone generator.

  Conventional ozone generators have been proposed in which aluminum electrodes drawn in multiple layers are stacked via spacers as shown in Patent Document 1, but the soot layer as a dielectric layer has a certain thickness. It is difficult to obtain surface uniformity.

  As shown in FIG. 7, an ozone generator is also known in which a gap spacer 41, a ceramic dielectric plate 42, and an electrode plate 43 are sequentially laminated between cooling jacket and electrodes 40, 40.

JP 11-310403 A Japanese Patent No. 2983153

  By the way, it is important for ozone generation performance that uniform discharge occurs in the discharge space.

  In the above ozone generator, since the gap spacer 41 is manufactured by machining, the accuracy of the gap in the discharge space is poor, and as a result, the discharge is biased. It was.

  Then, the objective of this invention is providing the ozone generator which solves the said subject and has favorable ozone generation performance.

  In order to achieve the above object, according to the first aspect of the present invention, a dielectric connected to a high voltage electrode and a ground electrode are opposed to each other through a discharge space, and a raw material gas is caused to flow into the discharge space to generate ozone. In the ozone generator, the gap generator rib is integrally formed on the dielectric plate by screen printing.

  According to a second aspect of the present invention, there is provided an ozone generator for generating ozone by causing a dielectric connected to a high voltage electrode and a ground electrode to face each other through a discharge space and flowing a raw material gas into the discharge space to generate ozone. It is an ozone generator in which a gap forming rib is integrally formed on the top by etching or pressing.

  The invention according to claim 3 is the ozone according to claim 1 or 2, wherein the gap constituting rib has a height of 200 μm and the accuracy of the discharge space formed by the gap constituting rib is ± 10 μm or less. Generator.

  According to a fourth aspect of the present invention, a shock absorbing material is formed by forming a metal film on the back surface of the dielectric on which the gap constituting ribs are formed, and the two dielectric plates on which the metal film is formed facing each other. The ozone generator according to any one of claims 1 to 3, wherein a ground electrode is provided in contact with the gap constituting rib side of both dielectric plates, and a high voltage is applied to both metal films.

  According to a fifth aspect of the present invention, the gap constituting rib is formed from the peripheral edge of the dielectric plate toward the center, and the raw material gas is flowed from the peripheral edge to the center by the gap constituting rib. Is an ozone generator.

  Invention of Claim 6 is an ozone generator in any one of Claims 1-5 whose width | variety of the gap structure rib is 0.5 mm or less.

  The invention according to claim 7 is the ozone generator according to any one of claims 1 to 6, wherein the gap constituting rib is formed of a lead-free material.

  The invention according to claim 8 is the ozone generator according to any one of claims 1 to 7, wherein the gap constituting rib formed of glass is integrally formed on a dielectric plate such as titania, silica, alumina or the like.

  A ninth aspect of the present invention is the ozone generator according to any one of the first to eighth aspects, wherein the ground electrode is provided with a cooling fin.

  The invention of claim 10 is the ozone generator according to any one of claims 1 to 8, wherein the ground electrode is provided with a water cooling jacket.

  According to the present invention, an excellent effect that ozone generation performance can be improved is exhibited.

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  1 to 3 show an air-cooled ozone generator, FIG. 1 is an exploded perspective view, FIG. 2 is a front sectional view, and FIG. 3 is a detailed sectional view of a portion D in FIG.

  In FIG. 1 to FIG. 3, reference numeral 10 denotes a dielectric made of a thin glass plate 11, and a gap constituting rib 12 is integrally formed on the surface of the thin glass plate 11 by screen printing described later. Further, a metal film 13 such as aluminum is formed on the back surface of the dielectric 10 as a high voltage electrode.

  The dielectrics 10 and 10 are provided so that the metal films 13 and 13 are opposed to each other, and an impact buffering material 14 such as rubber or a spring material is provided therebetween.

  The metal film 13 is provided with leads 15 for applying a high voltage.

  The dielectrics 10 and 10 provided with the impact buffering material 14 in between are accommodated in the upper and lower ground electrodes 16 and 17.

  As shown in FIGS. 1 and 2, the upper and lower ground electrodes 16 and 17 include a storage chamber 18 for storing dielectrics 10 and 10 and a source gas supply chamber 19 for flowing a source gas such as air or oxygen. A large number of air-cooling cooling fins 20 are provided on the outer surface formed and positioned in the storage chamber 18, and a raw material gas outlet pipe 21 for discharging generated ozone is connected to the storage chamber 18.

  FIG. 1 also shows a view inverted 180 ° to show details of the storage chamber 18 and the source gas supply chamber 19 of the upper ground electrode 16.

  The lower ground electrode 17 is provided with a power supply terminal 22 for applying a high voltage to the metal film 13 formed on the dielectrics 10 and 10 facing the source gas supply chamber 19 and insulated from the ground electrode 17. The lead 15 is connected to the terminal 23. Furthermore, a supply port 24 for supplying a source gas to the source gas supply chamber 19 is provided in the lower ground electrode 17.

  Now, the thin glass 11 as a dielectric plate is formed in a 12 cm square (10-15 cm square) with a thickness of 1 mm or less, and a gap forming rib 12 is formed on the surface thereof by screen printing.

  The gap forming rib 12 is printed by printing a paste used in a PDP (plasma display) on a thin glass 11 having a thickness of 0.3 mm and a rib height of 200 μm. After printing so as to have a height, it is formed by firing. Thereby, the accuracy can be maintained at an accuracy of ± 10 μm or less with respect to the rib height (discharge gap) of 200 μm.

  As shown in the figure, the gap constituting ribs 12 are formed so as to radiate from the center of the thin glass 11, and the raw material gas gathers from the periphery of the thin glass 11 through the gap constituting ribs 12 to the center. The raw material gas outlet pipe 21 is made to flow.

  The gap forming ribs 12 may be formed by a press method or by etching in addition to screen printing.

  Further, a hard coating 25 having a thickness of 0.1 mm or less is formed on the electrode surface in contact with the gap constituting rib 12 of the storage chamber 18 of the ground electrodes 16 and 17 for the purpose of sputtering resistance. A discharge space 26 is formed between the glasses 11.

  Next, the operation of the present invention will be described.

  A high voltage is applied from the terminal 23 to the metal film 13 on the back surface of the dielectric 10 and the upper and lower ground electrodes 16 and 17 are grounded, and a source gas such as oxygen, air, or oxygen fluoride air is supplied from the supply port 24 The gas is supplied to the gas supply chamber 19. The source gas enters the discharge space 26 formed between the thin glass 11 and the hard coating 25 from the storage chamber 18, that is, flows from the outer periphery of the thin glass 11 toward the center by the gap constituting rib 12, where ozone And is discharged from the source gas outlet pipe 21.

  In this discharge space 26, the thin glass plate 11 is as thin as 1 mm or less, the gap of the discharge space 26 is uniform at 200 μm, creeping discharge and silent discharge occur simultaneously, and the cooling performance is high, so that the ozone generation performance is increased. Is possible.

  Further, as shown in FIG. 4, as a modification of the dielectric 10 in which the gap-forming rib 12 is formed on the thin glass plate 11, the gap-forming rib 12 may be formed in a direction perpendicular to the edge of the thin glass plate 11. Good. More specifically, the gap-constituting ribs 12 are formed so as to extend perpendicular to the edge of one side, and are formed on each side of the thin glass plate 11 on a quadrangle. Each of the gap constituting ribs 12 increases in length toward the center of the side. The ribs do not intersect each other, and a predetermined interval is provided between the tips of the extended gap constituting ribs 12. Have.

  Thereby, the source gas flows from the periphery of the dielectric 10 to the gas outlet 35 of the dielectric 10.

  In this way, by forming the gap constituting ribs 12 perpendicularly or parallel to the screen printing direction, the angle at which the glass paste is imprinted on the thin glass plate 11 can be kept constant in the screen printing squeegee process. it can. Therefore, the gap constituting rib 12 having a uniform height can be formed, and the gap constituting rib 12 having better dimensional accuracy can be obtained.

  As described above, a uniform discharge space 26 with no gap can be formed at the contact portion between the gap-constituting rib 12 and the ground electrode 17, so that stable discharge can be performed, and ozone generation performance can be improved. Therefore, the ozone generator can be prevented from malfunctioning.

  In the present embodiment, the thin glass 11 is used as the dielectric plate. However, in addition to the thin glass 11, a dielectric plate is formed of a dielectric material such as titania, silica, alumina, etc., and is integrally formed on the dielectric plate. The gap constituting rib 12 may be formed.

  In addition, the dielectric plate and the gap forming rib 12 may be formed of the same dielectric material, or the hybrid dielectric 10 may be formed using dielectric materials having different dielectric constants.

  For example, in the hybrid type dielectric 10 in which the gap-constituting ribs 12 are formed of glass on an alumina dielectric plate, the difference between the dielectric constants of the dielectric plates and the gap-constituting ribs 12 is used to make a difference based on the gap. There is an advantage that both the silent discharge and the ratio of the creeping discharge formed on the surface of the dielectric plate and the gap forming rib 12 can be freely changed.

  Further, the gap forming rib 12 is made of a lead-free dielectric material, so that there is an effect that the environment may be improved.

  5 and 6 show another embodiment of the present invention, in which the ground electrodes 16 and 17 are cooled by water cooling.

  First, gap-forming ribs 12 are formed on a thin glass plate 11 as a dielectric plate by screen printing, an aluminum metal film 13 is formed on the back surface thereof, and an impact buffering material 14 is sandwiched therebetween.

  The ground electrodes 16, 17 are formed with a water cooling chamber 27 outside the storage chamber 18 that houses the dielectrics 10, 10. The ground electrodes 16, 17 are provided with a lid body 28 that closes the water cooling chamber 27. A water supply / drainage pipe 29 for supplying and discharging cooling water is connected to 28 to constitute a water cooling jacket 30.

  A seal ring 31 is provided between the lid 28 and the ground electrodes 16 and 17, and a partition plate 32 is provided for forming a bypassed cooling water channel in the lid 28. Further, the lid 28 and the ground electrodes 16 and 17 are formed with boss portions 33 through which the source gas outlet pipe 21 is inserted.

  5 and 6, since the ground electrodes 16 and 17 are cooled by the water cooling jacket 30, the cooling performance is further improved and the ozone generation performance can be further enhanced.

1 is an exploded perspective view showing an embodiment of the present invention. FIG. 2 is a front sectional view of FIG. 1. FIG. 3 is a detailed cross-sectional view of a main part of FIG. It is a top view which shows the modification of the dielectric material plate in which the gap structure rib was integrally formed. It is a disassembled perspective view which shows other embodiment of this invention. FIG. 6 is a front sectional view of FIG. 5. It is a figure which shows a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Dielectric 12 Gap structure rib 13 Metal film 14 Shock absorbing material 16, 17 Ground electrode 20 Cooling fin 26 Discharge space 30 Water cooling jacket

Claims (10)

  Gap configuration by screen printing on a dielectric plate in an ozone generator that generates ozone by making a dielectric connected to a high voltage electrode and a ground electrode face each other through a discharge space, and flowing a raw material gas into the discharge space An ozone generator characterized by integrally forming a rib.   In an ozone generator that generates ozone by causing a dielectric connected to a high voltage electrode and a ground electrode to face each other through a discharge space and flowing a raw material gas into the discharge space, a gap is formed on the dielectric plate by etching or pressing. An ozone generator characterized in that a structural rib is integrally formed.   3. The ozone generator according to claim 1, wherein the gap constituting rib has a height of 200 μm and an accuracy of a discharge space formed by the gap constituting rib is ± 10 μm or less.   A metal film is formed on the back surface of the dielectric on which the gap constituting ribs are formed, and the two dielectric plates on which the metal film is formed are attached to the shock-absorbing material so that the metal films face each other. The ozone generator according to any one of claims 1 to 3, wherein a ground electrode is provided in contact with the gap constituting rib side of the body plate, and a high voltage is applied to both the metal films.   The ozone generator according to any one of claims 1 to 4, wherein a gap constituting rib is formed from the periphery of the dielectric plate toward the center, and the raw material gas is flowed from the periphery to the center by the gap constituting rib.   The ozone generator according to any one of claims 1 to 5, wherein a width of the gap constituting rib is 0.5 mm or less.   The ozone generator according to any one of claims 1 to 6, wherein the gap constituting rib is formed of a lead-free material.   The ozone generator according to any one of claims 1 to 7, wherein the gap constituting ribs made of glass are integrally formed on a dielectric plate such as titania, silica, alumina or the like.   The ozone generator according to any one of claims 1 to 8, wherein the ground electrode is provided with a cooling fin. The ozone generator according to any one of claims 1 to 8, wherein the ground electrode is provided with a water cooling jacket.

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