JP2005046844A - Rotor for rotary adsorber - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotor for a rotary adsorber sufficiently durable even at a temperature higher than 200°C. <P>SOLUTION: The rotor 1 has a plurality of circular arc sectors 2 each composed of a honeycomb-structured gas adsorption element 4 with many small penetration holes and arranged in a cylindrical rim 7 divided into circular arc cross sections by radially extending spokes 3. The sectors 2, the spokes 3, and the rim 7 are united with a caulking material 8 such as a silicone, placed at the joint faces between them. On the axial direction end face of the spoke, there is placed a heat insulation sheet 10 which is composed of a plate made of an incombustible material and covers both the end face and the joint parts of two of the circular arc sectors being brought into contact with both sides of the end face. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a rotor for a rotary adsorber of a type in which a partition plate attached to a case defines at least an adsorption zone, a regeneration zone, and a cooling zone on an end surface of the rotor held rotatably. More specifically, arc-shaped sectors each comprising a gas adsorbing element having a honeycomb structure having a plurality of small through holes are arranged in a cylindrical rim that is partitioned into arcs in cross section by spokes extending radially inside, and each of these sectors is arranged. The present invention relates to a rotor for a rotary adsorber in which a caulking material is interposed between the joint surfaces of a ring and spokes and rims.

  Hereinafter, the structure of a conventional rotor for a rotary adsorption machine will be described with reference to FIGS. FIG. 7 is a perspective view showing the main part of the rotary type adsorption machine that rotatably holds the rotor, FIG. 8 is a perspective view of the rotor, and FIG. 9 is a seal function of each arcuate sector and spoke. FIG. 10 is a cross-sectional view taken along the line AA of FIG. 8 showing the joint portion, and FIG. 10 is a partially exploded perspective view showing the entire structure of the rotor including the outer peripheral rim 107.

  A rotary adsorber 100, particularly for organic solvents, equipped with a conventional adsorbing element 104 rotates a rotor 101 in a holding case 110 that is divided into an adsorption zone S, a cooling zone T, and a regeneration zone U, respectively. An adsorption zone and a regeneration zone are temporarily set on one end face of the rotor, and when the rotor surface passes through the adsorption zone S, the organic solvent is absorbed by the adsorption element 104 in which the gas containing the organic solvent is carried on the rotor 101. And the regeneration air heated to a temperature exceeding the boiling point of the organic solvent at 180 ° C. to 200 ° C. passes through the adsorption element 104 from the other end surface opposite to the end surface. To remove the adsorbed organic solvent.

  Among gases containing organic solvents, for example, gases generated in semiconductor component manufacturing processes and the like contain organic compounds such as DMSO (dimethyl sulfoxide), MEA (monoethanolamine), and HMDS (hexamethylene disilazane). . These organic compounds cannot be sufficiently removed at a regeneration temperature of 180 to 200 ° C. For this reason, such organic compounds are only accumulated in the rotor, causing performance deterioration and rotor burning. In order to remove such organic compounds, high temperature air heated to 200 to 350 ° C. must be sent to the rotor 101 in the regeneration zone U.

  A honeycomb-structured rotor 101 in which a plurality of arc-shaped sectors 102 are combined and integrated into a cylindrical shape has a plurality of radially extending hubs 105 extending radially outward from a metal axially extending hub 105 through which a shaft 106 passes. Reinforced with metal spokes 103. Each sector 102 of the metal spoke and the honeycomb structure is bonded or bonded using a heat-resistant caulking material 108 such as silicone. In addition, a metal outer rim 107 that protects the outer periphery of the rotor 101 and the honeycomb structure 104 are also bonded together via a silicone caulking material 108.

  As described above, the rotor 101 is rotatably attached to the holding case 110, and the partition plate 111 that divides the adsorption zone S, the regeneration zone U, and the cooling zone T is sealed with silicon rubber with a PTFE film (see FIG. (Not shown) is slidably pressed on the end face of the rotor 101 to prevent leakage and mixing of each passing gas.

  If the above-described high-temperature air exceeding 200 ° C. is sent to the rotor and regenerated, the silicone or rubber caulking material cannot withstand such a high temperature. Or rubber | gum will deteriorate, As a result, the joining property or adhesion between a spoke and a rotor will come, and the circular-arc-shaped sector which comprises a rotor will drop | omit, and rotor itself will be unusable.

  Therefore, the temperature of the passing air is limited, the accumulated high-boiling organic solvent and polymer cannot be sufficiently removed, resulting in a decrease in purification performance, and polymerization within the accumulated rotor is possible. In the case of a solvent having a property, it cannot be regenerated and the polymer crushes the pores of the adsorbing element such as zeolite, thereby reducing the purification performance as the adsorbing element.

  Accordingly, an object of the present invention is to provide a rotor for a rotary adsorption machine that can sufficiently withstand a high temperature exceeding 200 ° C.

  According to the present invention, according to the present invention, in the rotor for a rotary adsorption machine in which a plurality of arc-shaped sectors made of honeycomb-structured elements are arranged in a cylindrical rim, a joint portion between two arc-shaped sectors adjacent to each other is formed. This is achieved by including a non-combustible material plate covering and placing the non-combustible material plate across the two arcuate sectors adjacent to each other. With this configuration, it is avoided that heated high-temperature regeneration air is directly blown to the joints between the sectors, and temperature rise applied to the caulking material interposed at the joints between the sectors is also avoided. It is possible to avoid a decrease in sealing performance or adhesive force due to deterioration of the material. At the same time, hot hot air will be blown to the adsorbing element other than the portion covered with the non-combustible material plate, and the boiling point organic solvent and polymer adhering to the adsorbing element are desorbed and blown away. A decrease in adsorption performance when the adsorption element itself is reused is also avoided.

  According to one preferred embodiment of the rotor for a rotary adsorption machine according to the present invention, the plate made of noncombustible material is fitted in a recess formed across the two arcuate sectors adjacent to each other. Has been placed. With such a configuration, the non-combustible material plate does not protrude from the end surface of the rotor, and in use, the holding case that partitions the rotor end surface into the adsorption zone S and the regeneration zone U in the above-described conventional rotor for rotary adsorption machine The rotor pressing member such as a seal material that is slidably pressed against the end surface of the rotor that is rotatably mounted in the holding case and the non-combustible material plate is avoided, and the partition A favorable effect is obtained that gas leakage and mixing between the zones of the rotor partitioned by the plate can be prevented.

  According to another preferred embodiment of the rotor for a rotary adsorption machine according to the present invention, the plate made of non-combustible material is a laminate in which a metal plate is stacked on a heat-resistant sheet. With this configuration, it is possible to impart high fastness and durability to the plate made of non-combustible material, and an excellent heat shielding effect is maintained over a long period of time.

  As described above, the rotor for a rotary adsorber according to the present invention is a rotor for a rotary adsorber in which a plurality of arc-shaped sectors made of honeycomb-structured elements are arranged in a cylindrical rim, and between two adjacent arc-shaped sectors. The non-combustible material plate that covers the joints of the non-combustible material is disposed across the two arcuate sectors adjacent to each other, and thus the conventional processing is impossible. Even when high boiling point organic solvents exceeding ℃ or solvents with a possibility of polymerization adhere to the adsorbing element, the caulking material such as silicone intervening at the joint between the sectors is not deteriorated, and in the regeneration zone, 200 ℃ or more It is possible to constantly flow high-temperature air into the rotor.

  The rotor for a rotary adsorber according to the present invention is capable of releasing only the adhesion of the organic solvent to the adsorbing element, which could not be cleaned conventionally, and the performance of the adsorbing element in the rotor and the rotor itself. Enables continuous and repeated use without reducing mechanical strength, thus enabling quick and smooth waste gas treatment operations to be continuously performed, preventing reduction of waste gas treatment efficiency, and extending the life of the rotor. The effect said that it contributes greatly to is obtained.

  Hereinafter, several embodiments related to a rotor for a rotary adsorption machine according to the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view of a rotor for a rotary adsorption machine according to the present invention, and FIG. 2 is a partial sectional view taken along the line XX in FIG. 1 showing an embodiment of the rotor for the rotary adsorption machine according to the present invention. FIG. 3 is a view similar to FIG. 2 showing another embodiment of the rotor for a rotary adsorption machine according to the present invention, and FIG. 4 is a view of the rotor for the rotary adsorption machine according to the present invention. FIG. 5 is a view similar to FIG. 3 showing another embodiment, and FIG. 5 shows the entire structure of the rotor for a rotary adsorber according to the present invention including an outer rim provided with a plate made of noncombustible material. FIG. 6 is a partially exploded perspective view, and FIG. 6 is a YY cross-sectional partial arrow view in FIG. 1 of a rotor for a rotary adsorption machine according to the present invention including an outer peripheral rim provided with a plate made of noncombustible material.

  1 to 6, heat shields 9 and 11, which are plates made of incombustible material of a rotor 1 for a rotary adsorption machine according to the present invention, have a cylindrical shape that is partitioned in a circular arc shape by spokes 3 that extend radially inside. Eight arc-shaped sectors 2 each having a gas adsorbing element 4 having a ceramic fiber paper honeycomb structure having a large number of small through holes are arranged in the rim 7. Of these sectors, the contact surfaces of the two sectors 2 adjacent to each other, the spoke 3 and the rim 7 are joined together by a caulking material 8 preferably made of silicone. In general, the rotor composed of the honeycomb-shaped residue adsorbing element 4 has a structure in which a large number of small through holes are passed through both end faces, particularly for purification treatment of volatile organic compound-containing gas generated in the semiconductor manufacturing process. When used, the gas passes through the small through holes, so that harmful volatile organic compounds contained in the gas are adsorbed on the surface of the small through holes.

  The non-combustible material that can be used in the gas adsorbing element 4 of the rotor in the present invention needs to have properties such as heat resistance, heat insulation, wear resistance, and solvent resistance. That is, when the rotor becomes hot, the spokes supporting the rotor and the honeycomb structure are deformed by high heat, and incombustible material must be used to prevent this. This is because the heat resistance is required for the material to withstand high-temperature air at 200 to 350 ° C., and the heat insulation is necessary to protect the rotor from high-temperature air at 200 to 350 ° C. Abrasion resistance is required because friction occurs with a sealing material described later. In addition, solvent resistance is required due to the nature of the rotor that adsorbs organic solvents.

  As an incombustible material satisfying these properties, a material made of an inorganic material such as silicon nitride, graphite, ceramic paper, or felt can be used.

  1 and 5 show heat shields 10 and 11 made of a non-combustible material plate of a rotor 1 for a rotary adsorber according to the present invention, and one end surface portion of the spoke 3 and the outer peripheral rim 7 of the rotor. The heat-shielding seals are formed from a silicon nitride plate as a non-combustible material according to the embodiment of the present invention. In particular, when such a rotor for a rotary adsorption machine is used in a semiconductor manufacturing factory, a material having strong resistance to an organic solvent can be obtained by being always chemically affected by an organic compound-containing gas generated in the manufacturing process. It is indispensable to use, and silicon nitride is a suitable material as its specific material. Hereinafter, the configuration according to the present invention will be easily understood from the description related to the embodiment shown in FIGS.

  FIG. 2 shows one embodiment of the rotor 1 for a rotary adsorption machine according to the present invention, and is a diagram showing the relationship between the spokes 3 of the rotor 1 and the silicon nitride plate 10 which is a heat shield. The metal spoke 3 is bonded or bonded to two sectors 2 a and 2 b adjacent to each other among the six arc-shaped sectors constituting the rotor 1 by a caulking material 8. A metal mounting plate 9 is welded to the spoke 3 so as to be positioned at right angles, that is, parallel to the end face of the rotor 1, and the silicon nitride plate 10 is fixed on the mounting plate 9 with screws 13. Yes.

  The silicon nitride plate 10 has a width wider than the width of the mounting plate 9 that appears on the rotor end surface, and is a rectangular cross section extending in the axial direction that is drilled at the junction of the two sectors 2a and 2b adjacent to each other with the spoke 3 in between. It has a width that fits into the recess 14. As a result, the heat shielding seal does not protrude from the end face of the rotor, and a favorable effect is obtained that, in use, a collision with the rotor pressing member that can be provided on the partition plate 111 of the holding case 110 is avoided.

  Further, as shown in FIG. 3 in place of the silicon nitride plate, it is proposed that the expanded graphite sheet 15 protects the deterioration of the coking material between the spoke 3 and its adjacent sectors. It is good also as a structure where 16 is provided in piles. This laminated structure can also be implemented for the heat shield 11 provided on the radial end face of the rim 7.

  As shown in FIG. 4, if a heat insulating material 17 such as a calcium silicate plate is disposed between the attachment plate 9 of the spoke 3 and the silicon nitride plate 10, the heat insulating property can be further improved.

  5 and 6, the end face portion of the rotor is shown in a sectional view, and the silicon outer peripheral rim 7 is an example in which the silicon nitride plate 11 is attached to the peripheral edge portion that appears on the end face of the arcuate sector 2. With such a structure, even when heated air is introduced into the rotor from above in the drawing, the joint portion is protected from heat by protecting the caulking material 8 with the silicon nitride plate 11. In FIG. 6, it is preferable to provide a metal angle member 12 under the silicon nitride plate 11 so as to be embedded in the outer peripheral edge of the sector, but only the silicon nitride plate 11 may be provided.

  In actual use, referring to FIG. 7, the rotor 101 is used in a case 110. The case 110 can accommodate the rotor 101 rotatably, and the rotor end face is divided into an adsorption zone S and a regeneration zone U. The adsorption zone S and the regeneration zone U across the cooling zone T are divided by a partition plate 111 that divides each zone, and the partition plate 111 is attached so that the seal material can contact the rotating rotor end surface. It prevents gas leakage between each zone.

It is a perspective view of the rotor for rotation type adsorption machines by the present invention. FIG. 2 is a partial cross-sectional view taken along the line XX in FIG. 1 showing an embodiment of a rotor for a rotary adsorption machine according to the present invention. FIG. 3 is a view similar to FIG. 2 showing another embodiment of the rotor for a rotary adsorption machine according to the present invention. FIG. 4 is a view similar to FIG. 3 showing yet another embodiment of a rotor for a rotary adsorption machine according to the present invention. It is a partial exploded perspective view which shows the whole structure of the rotor for rotary adsorption machines by this invention containing the outer periphery rim provided with the board made from a noncombustible material. It is the YY cross-section partial arrow directional view in FIG. 1 of the rotor for rotary adsorption machines by this invention containing the outer periphery rim provided with the board made from a noncombustible material. It is a perspective view which shows the principal part of the rotary adsorption machine which hold | maintained the rotor in the prior art rotatably. It is a perspective view of the rotor in a prior art. It is an AA cross-sectional arrow view of FIG. 8 which shows the seal | sticker and adhesion part of each arc-shaped sector and spoke in a prior art. It is a partial exploded perspective view which shows the whole structure of the rotor containing the outer periphery rim in a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rotor 2 Arc-shaped sector 3 Spoke 4 Gas adsorption element 5 Hub 6 Rotor shaft 7 Rim 8 Caulking material 9 Mounting plate 10 Thermal insulation seal (plate made of noncombustible material, silicon nitride plate)
11 Heat shield (non-combustible material plate, silicon nitride plate)
12 Angle member 13 Screw 14 Recessed rectangular section 15 Heat shield (plate made of noncombustible material, graphite sheet)
16 Metal plate 17 Heat insulation material (Calcium silicate plate)

Claims (3)

In the rotor for a rotary adsorption machine in which a plurality of arc-shaped sectors made of honeycomb structure elements are arranged in a cylindrical rim,
Comprising a plate made of non-combustible material covering a joint between two arcuate sectors adjacent to each other;
The rotor for a rotary adsorption machine, wherein the non-combustible material plate is disposed across the two arcuate sectors adjacent to each other.   2. The rotary suction machine according to claim 1, wherein the non-combustible material plate is fitted and disposed in a recess formed across the two arcuate sectors adjacent to each other. Rotor.   The rotor for a rotary adsorber according to claim 1 or 2, wherein the non-combustible material plate is a laminate in which a metal plate is stacked on a heat-resistant sheet.

Images