JP2005043783A - Device for inspecting liquid crystal display panel, and method for inspecting liquid crystal panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for inspecting a liquid crystal display panel with which short circuit/disconnection of a conductor pattern and cell inspection of the liquid crystal display panel are certainly detected with a simple and convenient control in process of manufacturing the liquid crystal display panel. <P>SOLUTION: In the device for inspecting the liquid crystal display panel, a switching element group is formed on end parts of respective signal lines of a matrix of the liquid crystal display panel by using a matrix forming process, other terminals of the switching elements for the end parts of the respective signal lines are connected with common signal lines. An inspection signal output part is connected with the common signal line of one side end parts of the lines to supply the inspection signals thereto and a voltage measuring part 230 is connected with the common signal line of the other side end parts. Furthermore, inspection probe end parts 512, 521 are positioned to scan the upper side of gate terminals (conductive layers) 11 of the switching elements, the gate signals are supplied to the gate terminals of the switching elements in a capacitive coupling state and the switching elements on both end parts are made to be in conductive states. If the lines are not disconnected, a normal voltage is measured at the voltage measuring part 230 and consequently the quality of the lines is checked in a complete non-contact state with the matrix part. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a liquid crystal panel inspection apparatus and a liquid crystal panel inspection method capable of inspecting a wiring defect of a liquid crystal panel at the time of manufacturing the liquid crystal panel in a non-contact manner with a pattern to be inspected.

  In recent years, a matrix type liquid crystal display has been used as a liquid crystal display with a large display area, and in order to manufacture such a matrix type liquid crystal display panel, for example, a polarizing plate is formed on the back surface of a glass substrate, It is necessary to form an X electrode (scanning electrode and Y electrode (signal or display electrode) on the surface. In the active matrix type, a MOS transistor is further incorporated on the substrate as an active element. Then, a liquid crystal panel is driven. A circuit was formed.

  When manufacturing a liquid crystal display panel, for example, a gate electrode, an island, and a signal line (source, drain) are first formed on a substrate, a protective film is formed thereon, and then a pixel is formed to manufacture a matrix. A driving circuit for driving these is formed in the vicinity of the periphery of the matrix.

The inspection of the display panel at the time of manufacturing the conventional liquid crystal display panel is performed for the first time after the drive circuit is formed. For example, the inspection apparatus described in Patent Document 1 protects the signal line portion after the manufacture of the liquid crystal display panel is completed. A part of the protective film is removed, the inspection terminal is brought into direct contact with the signal line, an inspection signal is supplied from the inspection terminal to the signal line, and the operation state is inspected to determine whether it is normal or defective.
JP-A-6-27494

  However, the electrodes and pixels formed on the glass substrate of the liquid crystal display panel are vulnerable to external mechanical stress. If the inspection probe is brought into direct contact with the electrode part or the active element, the contact part is damaged. On the contrary, the defect rate is increased, which is counterproductive. For this reason, conventionally, there has been no apparatus for inspecting during the manufacturing process of the liquid crystal display panel. For this reason, it has been awaited to be realized by an inspection apparatus capable of inspecting pass / fail during the manufacturing process of the liquid crystal display panel.

  The present invention has been made in order to solve the above-described problems of the prior art, and it is an object of the present invention to provide a liquid crystal panel inspection apparatus and an inspection method capable of inspecting a display panel during the manufacturing process of the liquid crystal display panel. As a means for achieving the object, for example, an embodiment of the invention according to the present invention has the following configuration.

  That is, switching elements that are turned off in an uncontrolled state are formed at both ends of each signal line of the matrix forming portion of the display panel, and the other terminals of the switching elements for each signal line are connected to each other by a common signal line, The switching element is an inspection device capable of inspecting a liquid crystal display panel having a gate portion that turns on / off the switching element by receiving external energy, and is in contact with a part of the common signal line at one end of the signal line. Inspection signal supply means for supplying an inspection signal; detection means for detecting an inspection signal supplied by the inspection signal supply means in contact with a part of the common signal line at the other end of the signal line; and the switching element An inspection probe capable of individually supplying external energy to each of the gate portions of the switching element, and the inspection probe. Probe positioning means for positioning and scanning at a position separated from each gate portion, and supply of a gate control signal to the inspection probe positioned by the positioning means to output external energy necessary for gate control of the switching element A gate control means, and whether or not the signal line connected to the switching element whose gate is controlled can be inspected according to whether or not the detection means detects an inspection signal during gate control by the gate control means. Features.

  For example, the signal line includes a gate line, a Cs line, and a data line of a matrix forming portion.

  Further, for example, the probe positioning means electrostatically couples one probe to the gate portion of one switching element of the signal line to be inspected and adjoins the other probe to the signal line to which the one probe is electrostatically coupled. Electrostatically coupled with the gate part of the other switching element of the signal line, the inspection signal supply means contacts a part of the common signal line of the one switching element to supply an inspection signal, and the detection means An inspection signal from the other common signal line of the other switching element can be detected, and a short circuit of the line can be inspected based on whether or not the inspection signal is detected in a line adjacent to the inspection signal supply line. To do.

  Alternatively, a switching element that is turned off in an uncontrolled state is formed at both ends of each signal line connected to the inspection target cell of the matrix forming portion of the display panel, and the other terminal of the switching element for each signal line end is formed. The inspection device is capable of inspecting a liquid crystal display panel having a gate unit that is connected to each other by a common signal line and receives external energy to turn on / off the switching device, and is connected to the gate terminal of the cell. A first pulse signal is supplied to a part of the common signal line at one end of the gate signal line, and a part of the common signal line at the end of the Cs signal line connected to the drain terminal of the cell. Is maintained at a low voltage level, and the second signal having a frequency higher than that of the first pulse signal is applied to the common signal line at the end of the data signal line of the cell. A test signal supply means for supplying a test signal, a detection means for detecting a current flowing in a common signal line for supplying a second pulse signal of the cell, and a common signal line for supplying a test signal by the test signal supply means. A probe for supplying external energy for controlling the switching element to each gate part of the connected switching element, and a probe positioning for scanning the inspection probe at a position spaced apart from each gate part of the switching element And gate control means for supplying a gate control signal to the inspection probe positioned by the positioning means to output external energy necessary for gate control of the switching element, during gate control by the gate control means Whether or not the detection means has detected a current flowing in the data line Characterized in that it allows inspection of the quality of the cells in a non-contact manner matrix portion.

  Further, a switching element that is turned off in an uncontrolled state is formed at least one end of each signal line of the matrix forming portion of the display panel, and the other terminals of the switching element are connected to each other by a common signal line, and the switching is performed. An inspection device capable of inspecting a liquid crystal display panel having a gate portion for turning on / off the switching element by connecting external ends of the signal line ends where no element is formed to each other through a common signal line. An inspection signal supply means for supplying an inspection signal in contact with a part of the common signal line at one end of the signal line; and a part of the common signal line at the other end of the signal line. Detection means for detecting an inspection signal supplied by the inspection signal supply means, and each of the gate portions of the switching element individually Gate control is performed on the inspection probe capable of supplying external energy, probe positioning means for positioning and scanning the inspection probe at a position separated from each gate portion of the switching element, and the inspection probe positioned by the positioning means. Gate control means for supplying a signal and outputting external energy necessary for gate control of the switching element, and controlling the gate depending on whether or not the detection means detects an inspection signal during gate control by the gate control means It is possible to inspect the quality of the signal line to which the switching element is connected.

  For example, the common signal line at the end of the signal line where the switching element is not formed is cut off after the end of the inspection.

  For example, the probe positioning means scans the inspection probe so that the inspection probe and the gate portion are in an electrostatically coupled state, and the inspection probe is electrostatically coupled to the gate portion and the gate control means. The switching element can be controlled to be turned on / off by supplying an AC inspection signal supplied from the gate to the gate portion.

  Further, for example, the gate part is composed of a photosensor, the probe positioning means scans the inspection probe at a position spaced from the gate part, and the inspection probe includes a light emitting means and is supplied from the gate control means. The switching element can be controlled to be turned on / off by supplying light energy corresponding to the inspection signal to the gate portion.

  Also, switching elements that are turned off in an uncontrolled state are formed at both ends of the signal lines of the matrix forming portion of the liquid crystal display panel, and the other terminals of the switching elements for each of the signal lines are connected to each other by a common signal line to form a matrix. A liquid crystal display panel for enabling inspection of the quality of a panel substrate in a non-contact manner with each part, wherein each switching element is provided with a gate part for turning on / off the switching element upon receiving external energy It is characterized by.

  Furthermore, it is a liquid crystal display panel for enabling inspection of the quality of the panel substrate in a non-contact manner with the matrix forming portion, and one of the signal lines to be inspected of the matrix forming portion of the liquid crystal display panel has one at the end. A switching element connected to the signal line and the other connected to the common signal line is formed, and a gate portion for turning on / off the switching element by receiving external energy is formed for each switching element, and the liquid crystal display panel Forming a common signal line that connects the other ends of the signal lines to be inspected in the matrix forming unit to each other, and a liquid crystal display panel that can detach the common signal line that connects the other ends to each other after the inspection ends. Features.

Alternatively, a switching element that is turned off in an uncontrolled state is formed at both ends of each signal line of the matrix formation portion of the display panel, and the other terminals of the switching elements for each signal line are connected to each other by a common signal line, A switching element is a method for displaying a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion for turning on / off the switching element in response to external energy, the common signal line at one end of the signal line being Positioning and scanning an inspection probe capable of supplying an inspection signal in contact with a part and supplying external energy to each of the gate portions of the switching element at a position spaced apart from the gate portion of the switching element And supplying a gate control signal to the positioned inspection probe. Outputs external energy necessary for gate control of the element, detects the inspection signal supplied in contact with a part of the common signal line at the other end of the signal line, and performs the inspection at the time of gate control by the gate control signal The liquid crystal display panel inspection method enables inspection of the quality of a signal line connected to a switching element whose gate is controlled depending on whether or not a signal is detected.

  Furthermore, switching elements that are turned off in an uncontrolled state are formed at both ends of each signal line of the matrix forming portion of the display panel, and the other terminals of the switching elements for each signal line are connected to each other by a common signal line. Each of the switching elements is a method for displaying a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion for turning on / off the switching element in response to external energy, and the inspection target of the liquid crystal display panel The inspection signal is supplied to a part of the one common signal line of the signal line and the inspection signal can be detected from the other common signal line of the signal line adjacent to the signal line, and the inspection probe is connected to at least one of the inspection target signal lines. The other of the gate line of the switching element at the end and the signal line adjacent to the signal line to be inspected The switching element is positioned so that the external energy can be supplied in a state of being separated from the gate part of the switching element formed between the common signal line on the other end and the other end, and the switching element on one end of the signal line to be inspected after positioning The switching element at the one end is made conductive through the inspection probe positioned at the gate portion of the test signal to supply an inspection signal to the inspection target signal line, and the other end of the signal line adjacent to the inspection target line The inspection target line is determined by whether or not the inspection signal supplied to the inspection target signal line is detected by bringing the switching element at the other end into a conductive state via the inspection probe positioned at the gate portion of the switching element. And a liquid crystal display panel inspection method that inspects whether adjacent signal lines are short-circuited. To.

  In addition, a switching element that is turned off in an uncontrolled state is formed at both ends of each signal line connected to the inspection target cell of the matrix forming portion of the display panel, and the other terminal of the switching element for each signal line end is formed. A method of inspecting a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion that is connected to each other by a common signal line and receives an external energy to turn on / off the switching element. The first pulse signal is supplied to a part of the common signal line at the gate signal line end connected to the gate terminal of the cell, and the common communication at the Cs signal line end connected to the drain terminal of the cell A part of the signal line is maintained at a low voltage level, and the first pulse signal is applied to the common signal line at the end of the data signal line of the cell. A second pulse signal having a high frequency is supplied, and the inspection probe is separated from each gate portion of the switching element formed at the end of the signal line connected to the inspection target cell on the common signal line side supplying the inspection signal. Co-communication for positioning in such a state that external energy can be supplied, supplying a gate signal to the positioned inspection probe, controlling each switching element to a conductive state, and supplying a second pulse signal of the cell The liquid crystal display panel inspection method is characterized in that the quality of the cell can be inspected in a non-contact manner with respect to the matrix portion based on whether or not a predetermined amount of current is detected by detecting the current flowing through the signal line.

  According to the present invention, since the quality of the panel can be inspected without contact with the matrix part during the manufacturing process of the liquid crystal panel, the repair of the defective part is facilitated, and the determination of the defective panel is made early and the panel reliability is improved. Inspection can be performed without loss of sex.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of an invention according to the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited to the relative arrangement | positioning of a component demonstrated below, a numerical value, etc. at all, and it is not the meaning which limits the scope of the present invention to the following description unless there is a specific description.

  As an embodiment according to the present invention, a liquid crystal panel inspection apparatus and inspection method capable of inspecting the quality of a matrix formed on a substrate in a liquid crystal display panel used in a liquid crystal display without contacting the matrix portion Will be described.

  First, the principle of the inspection method in the present embodiment will be described with reference to FIGS. FIG. 1 is a diagram for explaining a schematic configuration of an inspection apparatus according to this embodiment, FIG. 2 is a schematic diagram for explaining a configuration of a panel to be inspected in this embodiment, and FIG. 3 is this embodiment. FIG. 4 is a diagram for explaining the principle of line continuity / disconnection inspection in the inspection apparatus of the example, FIG. 4 is a diagram for explaining the principle of short-circuit inspection of adjacent lines in the inspection apparatus of this embodiment, and FIG. It is a figure for demonstrating the cell operation | movement inspection principle in the test | inspection apparatus of an example.

  In the following description, an example in which the present invention is applied to a p-Si TFT active matrix liquid crystal display panel will be described. However, the present invention is not limited to this example, and it is apparent that the present invention can be applied to any matrix type liquid crystal display.

  First, an inspection apparatus according to this embodiment will be described with reference to FIG. In FIG. 1, for example, 100 controls the entire inspection apparatus and can store the inspection results in a built-in storage unit, and 200 is an inspection probe or inspection terminal for inspecting a liquid crystal panel during the manufacture of the inspection object. It is a supply control part which performs electrical signal supply control and electrical characteristic measurement control of.

  The supply control unit 200 is connected to an inspection signal output unit 210 and a pulse signal output unit 220 that are inspection signal supply sources, a voltage measurement unit 230 and an electric current measurement unit 240 that are electrical characteristic measurement means, and the like. In the supply control unit 200, the inspection probes A510, B520, C530, and D540 that scan the inspection target line of the inspection target liquid crystal panel, and the connection terminals A550, B560, C570, D580, E590, and the common signal line are connected. Connection control with F600 is performed.

  210 is an inspection signal output unit that supplies an inspection signal V having a predetermined voltage as an inspection signal, 220 is a pulse signal output unit that supplies a pulse signal, and the pulse signal output unit 220 has a built-in oscillator and outputs various pulse signals. It can occur. A gate signal Vg serving as a gate signal of the switching element, a rectangular pulse signal V1 having a specific frequency used for cell inspection, and a rectangular pulse signal V2 having a half period of the rectangular pulse signal V1 can be output.

A voltage measuring unit 230 is connected to any one of the connection terminals (550 to 600) and can measure the voltage of the connected connection terminal part.
Reference numeral 240 denotes a current measurement unit that measures a current flowing through a connection terminal portion connected at the time of cell operation confirmation described later.

  500 is capable of positioning and conveying inspection probes A510, B520, C530, and D540 and connecting terminals A550, B560, C570, D580, E590, and F600 to common signal lines 15, 25, 35, 45, 55, and 65. Connect to. Flat pads 511, 521, 531 and 541 are formed at the tip of the inspection probes A510, B520, C530 and D540, and high electrostatic coupling is obtained facing the switching element control means of the switching element. It is desirable to be configured as follows.

  Inspection probes A 510, B 520, C 530, and D 540 are at one end while maintaining a state separated by a predetermined distance from a conductive layer (described later) connected to the gate terminal of a switching element disposed in the liquid crystal panel by the transport controller 500. Are connected to the other end, and the connection terminals A550, B560, C570, D580, E590, and F600 are connected to the switching elements under the control of the transport controller 500. , 55, 65 are contact-controlled.

When inspecting a matrix type liquid crystal display panel in which TFTs are formed in a matrix on a glass substrate,
(1) Conduction / disconnection inspection between both ends of data line (2) Conduction / disconnection inspection between both ends of Cs line (3) Conduction / disconnection inspection between both ends of gate line (4) Short-circuit inspection between adjacent lines (5 It is sufficient to perform each inspection of the operation inspection (charge / discharge inspection) of each cell.

  For example, in the p-Si TFT active matrix formation part, each line and cell part cannot have sufficient mechanical strength, so the inspection probe of the inspection apparatus is in direct contact with the line on the substrate to form the line. It will be damaged. Therefore, when the above-described inspection is to be performed during manufacturing, it is necessary to inspect the matrix portion completely in a non-contact manner.

  For this reason, when performing the inspection by the inspection method of the present embodiment, the switching elements connected to each other by the common signal line are formed in the peripheral part of the matrix part, and the switching part is connected to the gate part of the switching element. Switching element control means for supplying a trigger signal for controlling on / off of the element is provided.

  That is, in this embodiment, as shown in FIG. 2, for example, switching elements are formed by using a matrix forming process at the end of each signal line (gate line, Cs line, data line) forming a matrix of a glass substrate. (Switching element groups A10, B20, C30, D40, E50, F60) are formed. As a result, the switching elements can be formed at the same time by using the process for forming the matrix without adding a special process for forming the switching elements.

  One of the switching elements is connected to the end of the signal line from the matrix, while the other is connected to the common signal line (15, 25, 35, 45, 55, 65). Note that it is desirable that at least a part of the common signal line is not formed with a protective film formed by the matrix manufacturing process, but the signal line is exposed and the inspection probe of the inspection apparatus can be directly contacted.

  And the switching element control means (for example, 42b) which receives the energy supplied from the outside and controls on / off of a switching element is connected to the gate terminal of a switching element (for example, 41b). The switching element control means (for example, 42b) is formed of, for example, a conductive layer having a predetermined area. When the conductive layer is connected to the gate portion and the switching element (for example, 41b) is turned on, the surface of the conductive layer is set to a predetermined distance. The inspection probe tip (511, 521, 531, 541) is positioned at a separated position, and a gate signal (pulse signal) is supplied from the inspection probe (A510, B520, C530, D540) as an electrostatic coupling state to switch the switching element. Turn on.

  In this way, the configuration in which the gate signal is supplied by electrostatic coupling is based on the assumption that a protective film is formed on the matrix forming part (and the switching element part) in the manufacturing process. For example, the protective film is formed. This is because the ON / OFF control can be surely performed without contact with the conductive pattern or the switching element of the matrix forming portion.

  The switching element control means is not composed of a conductive layer that can be electrostatically coupled to the sensor probe side, but is composed of a photoelectric conversion element, the photoelectric conversion element is connected to the gate terminal, and light energy is applied to the photoelectric conversion element. The switching element may be operated by supplying it. However, pinpoint light irradiation is required so as not to affect the gate portion of the adjacent switching element.

  In the example of FIG. 2, the switching element group A10 at the left end of the gate line of the matrix part 300, the switching element group B20 at the right end, the switching element group C30 at the left end of the Cs line, the switching element group D40 at the right end, and the data line A switching element group E50 is formed at the upper end and a switching element group F60 is formed at the lower end. A common signal line, 15, 25, 35, 45, 55, 65 is provided for each switching element group at the other end of the switching element group.

The principle of each inspection described above will be described below with reference to FIGS.
(1) Conduction / disconnection inspection between both ends of the gate line (Fig. 3)
The inspection apparatus supply control section 200 connects the inspection signal output section 210 to the common signal line 15 of the switching element group A10 at the left end of the gate line, and connects the common signal line 25 of the switching element group B20 to the voltage measurement section 230 of the inspection apparatus. Connect to. Note that the test signal output unit 210 and the voltage measurement unit 230 may be connected to opposite common signal lines.

  Then, the conveyance control unit 500 of the inspection apparatus moves the inspection probes A 510 and B 520 by the same distance from the upper end to the lower end in FIG. 2, for example, so that the leading ends 511 and 421 become the same gate line of the substrate to be inspected. The scanning is sequentially performed so that the conductive layers connected to the gate portions of the switching elements at both ends connected to each other are opposed to each other.

  The tip portions 511 and 521 of the inspection probes 510 and 520 are provided with a flat plate shape having at least the same area as the conductive layer connected to the gate portion of the switching element, so that efficient electrostatic coupling can be performed. However, if the tip portions 511 and 521 have a certain area, a gate signal can be supplied even if they are not flat.

  The common signal line 25 of the switching element group B20 is connected to the voltage measuring unit 230 of the inspection device, and when the gate signal Vg is supplied to the gate parts of the switching elements at both ends of the inspection target line, the switching element is in a conductive state during that time. Thus, the voltage measurement unit 230 can measure a voltage value lower than the supplied power supply potential by a voltage drop due to the influence of the impedance component in the line part. For this reason, if the measured voltage value is equal to or higher than the predetermined voltage value, it is determined that there is no disconnection or thinning, and if the measured voltage value is equal to or lower than the predetermined voltage and a constant potential is measured, the line may be thinned. If it can be determined that a certain potential is not detected and a high impedance state can be determined, it is determined that the line is disconnected. If the detection signal voltage is too high (when the voltage drop is small), it may be possible to thicken the line.

  In this way, not only the conduction / disconnection of the gate line can be inspected, but also when the wiring pattern is partially thinned, it can be detected as an increase in resistance value. The same applies to the inspection of other lines.

(2) Conduction / disconnection inspection between both ends of Cs line (Fig. 3)
The inspection apparatus supply control unit 200 connects the inspection signal output unit 210 to the common signal line 35 of the switching element group C30 at the left end of the Cs line, and connects the common signal line 45 of the switching element group D40 to the voltage measurement unit 230 of the inspection apparatus. Connect to. The inspection signal output unit 210 and the voltage measurement unit 230 may be connected to opposite common signal lines.

  Then, the conveyance control unit 500 of the inspection apparatus moves the inspection probes A 510 and B 520 by the same distance from the upper end to the lower end in FIG. 2 so that the leading ends 511 and 521 are located at both ends of the same Cs line of the substrate to be inspected. Scanning is sequentially performed so that the conductive layer connected to the gate portion of the switching element is positioned opposite to the conductive layer.

  The common signal line of the switching element group D40 is connected to the voltage measuring unit 230 of the inspection device, and when the gate signal Vg from the inspection signal output unit 210 is supplied to the gate part of the switching element, the switching element is in a conductive state during that time. Thus, the voltage measurement unit 230 can measure a voltage value lower than the supplied power supply potential by the voltage drop due to the influence of the impedance component on the Cs line to be inspected.

  For this reason, if the measured voltage value is equal to or higher than the predetermined voltage value, it is determined that there is no disconnection or thinning, and if the measured voltage value is equal to or lower than the predetermined voltage and a constant potential is measured, the line may be thinned. If it can be determined that a certain potential is not detected and a high impedance state can be determined, it is determined that the line is disconnected. If the detection signal voltage is too high (when the voltage drop is small), it may be possible to thicken the line.

  Thus, not only the conduction / disconnection of the Cs line can be inspected, but also when the wiring pattern is partially thinned, it can be detected as an increase in resistance value. The transfer control unit 500 positions and scans the inspection probes A510 and B520 above the conductive layers of the switching element groups A10 and C30 in the case of inspection of the gate line. A510 and B520 are positioned and scanned over the conductive layers of the switching element groups B20 and D40.

(3) Conduction / disconnection inspection between both ends of data line (Fig. 3)
The inspection apparatus supply control section 200 connects the inspection signal output section 210 to the common signal line 55 of the switching element group E50 at the upper end of the data line, and connects the common signal line 65 of the switching element group F60 to the voltage measurement section 230 of the inspection apparatus. Connect to. The inspection signal output unit 210 and the voltage measurement unit 230 may be connected to opposite common signal lines.

  Then, the conveyance control unit 500 of the inspection apparatus moves the distal end portions 511 and 521 of the inspection probes 510 and 520 by the same distance from each other, for example, from the left end portion to the right end portion in FIG. , 521 are sequentially scanned so as to be opposed to the conductive layers connected to the gate portions of the switching elements at both ends connected to the same data line of the substrate to be inspected.

  The common signal line of the switching element group F60 is connected to the voltage measuring unit 230 of the inspection device. When the gate signal Vg is supplied to the gate part of the switching element, the switching element becomes conductive during that time, and the inspection signal output unit 210 is turned on. The voltage measurement unit 230 can measure a voltage value lower than the supplied power source potential by the voltage drop due to the influence of the impedance component on the gate line.

  In this way, if the measured voltage value is equal to or higher than the predetermined voltage value, it is determined that there is no disconnection or thinning, and if the measured voltage value is equal to or lower than the predetermined voltage and a constant potential is measured, the line may be thinned. If a constant potential is not detected and a high impedance state can be determined, it is determined that the line is disconnected. If the detection signal voltage is too high (when the voltage drop is small), it may be possible to thicken the line.

  For this reason, not only the conduction / disconnection of the data line can be inspected, but also when the wiring pattern is partially thinned, it can be detected as an increase in the resistance value. The same applies to the inspection of other lines.

  When inspecting the data line, the conveyance control unit 500 positions and scans the inspection probes A510 and B520 above the conductive layers of the switching element groups E50 and F60.

(4) Short circuit inspection between adjacent lines (Fig. 4)
The supply control unit 200 of the inspection apparatus connects the inspection signal output unit 210 to, for example, the common signal lines 15 and 35 of the switching element groups A10 and C30 connected to the gate line and the Cs line. The communication lines 25 and 45 are connected to the voltage measuring unit 230 of the inspection apparatus. The inspection signal output unit 210 and the voltage measurement unit 230 may be connected to opposite common signal lines. Then, the inspection probes A510 and B520 of the inspection apparatus are moved from one end portion to the other end portion so that one of the front end portions 511 and 521 is moved ahead by an adjacent line (one line).

  When the gate signal Vg is supplied to the gate part of the switching element, the power is supplied to one line, and the voltage measuring part 230 is connected to the other adjacent line. Therefore, if the power supply potential supplied to one line is detected from the voltage measuring unit 230, a short circuit has occurred between the adjacent lines.

(5) Operation inspection (charge / discharge inspection) of each cell (FIG. 5)
The common signal line 15 of the gate line is connected to, for example, the pulse signal V2 of the pulse signal output unit 220 of the inspection apparatus. Then, the Cs line is connected to a low voltage level (for example, a ground level).

  Further, the common signal line (for example, the common signal line 65) at one end of the data line is connected to the pulse signal V1 of the pulse signal output unit 220 through the resistor R built in the supply control unit 200. Then, both ends of the resistor R are connected to the current measuring unit 240, and the current measuring unit 240 detects a potential difference between both ends of the resistor R and measures a current flowing through the resistor R (a charge amount of the cell to Cx).

  For example, when a test signal is supplied to the gate line when data is supplied to the data line, a positive current is detected, for example, and when a test signal is supplied to the gate line when data is not supplied to the data line, When the current in the direction is detected, it is confirmed that the cell is normally charged / discharged. This is sequentially performed for each cell.

  Note that detection of charge / discharge to a cell is not limited to the above example, and signal control may be performed at a timing at which cell operation can be detected.

  FIG. 6 shows a timing chart when the cell inspection is performed with the configuration shown in FIG. The example of FIG. 5 is timing when the cell is operating normally, and when the cell operation is not normal, current does not flow through the resistor R, or the flowing current is small, and the current measuring unit 240 does not detect at all. Or, the detection level detected is lowered.

  As described above, according to the present embodiment, at the time of manufacturing a liquid crystal panel to be inspected, a switching element is formed at the end of each signal line using the manufacturing process of the liquid crystal panel, By forming a flat conductive layer (conductive plate) on the gate terminal and connecting one end of each line of the switching terminal with a common signal line, a measuring means and a signal output means are connected to the common signal line in the inspection device. The matrix portion can be inspected simply by connecting the gate and controlling the gate portion of the switching element.

  In addition, by supplying an inspection signal by electrostatically coupling the conductive portion of the switching element to the tip portions 511 and 521 of the inspection probes 510 and 520, the liquid crystal is not brought into contact with the switching element or the matrix portion and the inspection probe. The panel can be inspected. For this reason, only the common signal lines that are not directly related to the performance of the liquid crystal panel are in direct contact with each other as in the past, and there is no possibility of damaging the signal line pattern, and a highly reliable liquid crystal panel is manufactured. it can.

  For this reason, even if the protective film is formed on the signal line part or cell part before the driver circuit is formed, it is only necessary to connect the connection terminal directly to a part of the common signal line. It is possible to inspect the quality of the matrix part without directly contacting the inspection probe with this part, and it is possible to easily repair the defective part, and in the case of a panel that cannot be repaired, the defective panel can be separated before performing subsequent manufacturing, It is possible to prevent useless manufacturing processes.

  As described above, according to the present embodiment, the inspection signal is supplied to the common signal line, and the inspection probe is positioned above the switching element at the end of the line (wiring pattern) to be inspected, so that the conductive layer Scanning is performed sequentially while maintaining a certain distance, and a gate signal is supplied when the conductive layer is in an electrostatically coupled state to control the switching elements at both ends of the line to be in a conductive state at the same time. It can be inspected.

  Furthermore, a short circuit between adjacent lines can be inspected only by supplying a signal to the adjacent line and inspecting whether the inspection signal is detected in the adjacent line. In addition, only the connection terminal is brought into contact with the common signal line, and the supply control of the inspection signal to the line is performed in a non-contact manner, and the measurement unit can be electrically connected to the matrix line in a non-contact manner. The LCD panel can be inspected without damaging it.

  In the above-described embodiment, the example in which the signal lines of the liquid crystal panel are disconnected, short-circuited, and the quality of the cell is inspected has been described. For this reason, a switching element is formed at both ends of the signal line, and the other side of the switching element is connected by a common signal line. However, the most common cause of panel failure is considered to be a break in the signal lines of the liquid crystal panel. When inspecting only the disconnection of the signal line of the liquid crystal panel, the above-described configuration is not necessary, the above-described switching element is formed at one end of the signal line to be inspected, and the other end of the signal line is all Only the common signal line that connects the signal tip portions to each other is formed.

  When performing the inspection, the inspection signal is supplied by bringing a connection terminal into contact with one of the common signal lines, and the inspection signal is detected by bringing a plurality of connection terminals into contact with the other common signal line. Then, switching control of the switching element is performed by the inspection probe, and whether or not the signal line is disconnected can be inspected depending on whether or not the inspection signal is detected when the switching element is turned on. The common signal line for supplying the inspection signal may be either common signal line. However, if the inspection signal is supplied to the common signal line connected to the switching element, the state in which the inspection signal flows to each signal line can be prevented. It is desirable to supply the inspection signal to the common signal line connected to the switching element.

  After the inspection is completed as described above, the common signal line directly connected to the signal line of the liquid crystal panel in which the switching element is not formed is removed.

  In the above description, when performing a short circuit inspection of adjacent lines, if the adjacent lines are data lines and Cs lines, switching elements are not provided at both ends of the data lines and Cs lines. A switching element may be provided only at the end, and the other end may be directly connected to the common signal line. The power supply is connected to the common signal line directly connected to the line, and the presence or absence of disconnection can be inspected based on whether or not the voltage is detected when the switching element at the other end is turned on. In this case, it is necessary to cut between the common signal line and the end of the line after completion of the inspection (or to delete / invalidate the common signal line).

It is a figure for demonstrating schematic structure of the inspection apparatus of the example of one embodiment concerning this invention. It is a schematic diagram for demonstrating the structure of the panel test | inspected in this Embodiment. It is a figure for demonstrating the line continuity / disconnection test | inspection principle in the test | inspection apparatus of this Embodiment. It is a figure for demonstrating the short circuit test | inspection principle of the adjacent line in the test | inspection apparatus of this embodiment. It is a figure for demonstrating the cell operation | movement test | inspection principle in the test | inspection apparatus of this embodiment. It is a timing chart in the case of inspecting a cell in the present embodiment.

Claims (13)

A switching element that is turned off in an uncontrolled state is formed at both ends of each signal line of the matrix forming portion of the display panel, and the other terminals of the switching elements for each signal line are connected to each other by a common signal line. Is an inspection device capable of inspecting a liquid crystal display panel having a gate portion for turning on / off the switching element in response to external energy,
Inspection signal supply means for supplying an inspection signal in contact with a part of the common signal line at one end of the signal line;
Detection means for detecting an inspection signal supplied by the inspection signal supply means in contact with a part of the common signal line at the other end of the signal line;
An inspection probe capable of individually supplying external energy to each of the gate portions of the switching element;
Probe positioning means for positioning and scanning the inspection probe at a position separated from each gate part of the switching element;
Gate control means for supplying a gate control signal to the inspection probe positioned by the positioning means to output external energy necessary for gate control of the switching element;
A liquid crystal display panel characterized in that it is possible to inspect whether a signal line connected to a switching element whose gate is controlled is determined by whether or not the detection means detects an inspection signal during gate control by the gate control means. Inspection device. The liquid crystal display panel inspection apparatus according to claim 1, wherein the signal lines include a gate line, a Cs line, and a data line of a matrix forming unit. The probe positioning means electrostatically couples one probe to the gate portion of one switching element of the signal line to be inspected, and connects the other probe to a signal line adjacent to the signal line to which the one probe is electrostatically coupled. Electrostatically coupled to the gate of the other switching element,
The inspection signal supply means supplies an inspection signal in contact with a part of the common signal line of the one switching element,
The detection means can detect an inspection signal from the other common signal line of the other switching element, and can inspect a short circuit of the line depending on whether the inspection signal is detected in a line adjacent to the inspection signal supply line. 3. The liquid crystal display panel inspection apparatus according to claim 1, wherein the liquid crystal display panel inspection apparatus comprises: A switching element that is turned off in an uncontrolled state is formed at both ends of each signal line connected to the cell to be inspected in the matrix formation portion of the display panel, and the other terminal of the switching element for each signal line end is co-communication Each of the switching elements is connected to each other by a signal line, and each switching element is an inspection apparatus capable of inspecting a liquid crystal display panel including a gate unit that receives external energy to turn on / off the switching element,
A first pulse signal is supplied to a part of the common signal line at one end of a gate signal line connected to the gate terminal of the cell, and a Cs signal line end connected to the drain terminal of the cell A test signal that maintains a part of the common signal line at a low voltage level and supplies a second pulse signal having a higher frequency than the first pulse signal to the common signal line at the end of the data signal line of the cell. Supply means;
Detecting means for detecting a current flowing in a common signal line for supplying a second pulse signal of the cell;
A test probe for supplying external energy for controlling the switching element to each gate portion of the switching element connected to a common signal line through which the test signal supply means supplies a test signal;
Probe positioning means for positioning and scanning the inspection probe at a position spaced from each gate portion of the switching element;
Gate control means for supplying a gate control signal to the inspection probe positioned by the positioning means to output external energy necessary for gate control of the switching element;
An inspection apparatus for a liquid crystal display panel, wherein the quality of the cell can be inspected in a non-contact manner with respect to the matrix portion depending on whether or not the detection means detects a current flowing in the data line during gate control by the gate control means. . A switching element that is turned off in an uncontrolled state is formed on at least one end of each signal line of the matrix formation portion of the display panel, the other terminals of the switching element are connected to each other through a common signal line, and the switching element is formed. An inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion that connects the end portions of the signal lines that are not connected to each other through a common signal line, and each switching element receives external energy to turn on / off the switching elements. ,
Inspection signal supply means for supplying an inspection signal in contact with a part of the common signal line at one end of the signal line;
Detection means for detecting an inspection signal supplied by the inspection signal supply means in contact with a part of the common signal line at the other end of the signal line;
An inspection probe capable of individually supplying external energy to each of the gate portions of the switching element;
Probe positioning means for positioning and scanning the inspection probe at a position spaced from each gate portion of the switching element;
Gate control means for supplying a gate control signal to the inspection probe positioned by the positioning means to output external energy necessary for gate control of the switching element;
A liquid crystal display panel characterized in that it is possible to inspect whether a signal line connected to a switching element whose gate is controlled is determined by whether or not the detection means detects an inspection signal during gate control by the gate control means. Inspection device. 6. The inspection apparatus for a liquid crystal display panel according to claim 5, wherein the common signal line at the end of the signal line where the switching element is not formed is disconnected after the inspection is completed. The probe positioning means scans the inspection probe so that the inspection probe and the gate portion are in an electrostatically coupled state, and the inspection probe is supplied from the gate control means in an electrostatically coupled state to the gate portion. The liquid crystal display panel inspection apparatus according to claim 1, wherein an AC inspection signal is supplied to the gate unit to enable on / off control of the switching element. The gate portion is composed of a photosensor, the probe positioning means positions and scans the inspection probe at a position separated from the gate portion, the inspection probe includes a light emitting means, and an inspection signal supplied from the gate control means The liquid crystal display panel inspection apparatus according to claim 1, wherein the switching element can be controlled to be turned on / off by supplying light energy corresponding to the above to the gate portion. A switching element which is turned off in an uncontrolled state is formed at both ends of the signal lines of the matrix forming part of the liquid crystal display panel, and the other terminals of the switching elements for each of the signal lines are connected to each other by a common signal line. A liquid crystal display panel for enabling inspection of the quality of a panel substrate in a non-contact manner, wherein each switching element is provided with a gate portion for turning on / off the switching element in response to external energy. panel. A liquid crystal display panel for enabling inspection of the quality of the panel substrate in a non-contact manner with the matrix forming portion,
A switching element in which one is connected to the signal line and the other is connected to a common signal line is formed at one end of each signal line to be inspected in the matrix forming portion of the liquid crystal display panel, and the switching element is externally connected to each switching element. Forming a gate part that turns on and off the switching element in response to energy,
Forming a common signal line that connects the other end of each signal line to be inspected in the matrix forming portion of the liquid crystal display panel;
A liquid crystal display panel, wherein a common signal line connecting the other end portions to each other can be disconnected after the inspection is completed. A switching element that is turned off in an uncontrolled state is formed at both ends of each signal line of the matrix forming portion of the display panel, and the other terminals of the switching elements for each signal line are connected to each other by a common signal line. Is a display method of a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion for turning on / off the switching element in response to external energy,
While supplying a test signal in contact with a part of the common signal line at one end of the signal line,
An inspection probe capable of supplying external energy individually to each gate part of each of the switching elements is positioned and scanned at a position separated from each gate part of the switching elements,
A gate control signal is supplied to the positioned inspection probe to output external energy necessary for gate control of the switching element, and is supplied in contact with a part of the common signal line at the other end of the signal line. Detecting the inspection signal;
A method for inspecting a liquid crystal display panel, wherein the quality of a signal line connected to a switching element whose gate is controlled can be inspected based on whether or not the inspection signal is detected during gate control by the gate control signal. A switching element that is turned off in an uncontrolled state is formed at both ends of each signal line of the matrix forming portion of the display panel, and the other terminal of the switching element for each signal line is connected to each other by a common signal line, and each switching is performed. The element is a display method of a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion that turns on / off the switching element in response to external energy,
In addition to supplying a test signal to a part of one common signal line of the signal line to be inspected of the liquid crystal display panel, the test signal can be detected from the other common signal line of the signal line adjacent to the signal line,
A gate part of a switching element formed at least between a gate part of a switching element at one end of a signal line to be inspected and a common signal line at the other end of the signal line adjacent to the signal line to be inspected. And positioned so that the external energy can be supplied in a state separated from
After positioning, the switching element at one end is made conductive through the inspection probe positioned at the gate of the switching element at one end of the inspection target signal line, and an inspection signal is supplied to the inspection target signal line.
The switching element at the other end is made conductive through the inspection probe positioned at the gate of the switching element at the other end of the signal line adjacent to the inspection target line and supplied to the inspection target signal line. An inspection method for a liquid crystal display panel, wherein whether or not a signal line adjacent to the inspection target line is short-circuited is determined depending on whether or not an inspection signal is detected. A switching element that is turned off in an uncontrolled state is formed at both ends of each signal line connected to the cell to be inspected in the matrix formation portion of the display panel, and the other terminal of the switching element for each signal line end is co-communication A method for inspecting a liquid crystal panel in an inspection apparatus capable of inspecting a liquid crystal display panel having a gate portion that is connected to each other by a signal line and receives external energy to turn on / off the switching element.
The first pulse signal is supplied to a part of the common signal line at the end of the gate signal line connected to the gate terminal of the cell and the end of the Cs signal line connected to the drain terminal of the cell. Maintaining a part of the common signal line at a low voltage level, supplying a second pulse signal having a frequency higher than that of the first pulse signal to the common signal line at the end of the data signal line of the cell;
Position the inspection probe so that external energy can be supplied in a state of being separated from each gate portion of the switching element formed at the end of the signal line connected to the inspection target cell on the common signal line side that supplies the inspection signal. And supplying a gate signal to the positioned inspection probe to control each switching element to a conductive state,
By detecting the current flowing through the common signal line that supplies the second pulse signal of the cell and detecting a predetermined amount of current, the quality of the cell can be inspected without contact with the matrix portion. Inspection method for liquid crystal display panels.

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