JP2005043125A - Vibrator and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To eliminate a problem in a conventional vibrator that a suspension mechanism, if any, is not enough to prevent the vibration of vibration reeds from filtering out into a circuit substrate. <P>SOLUTION: This vibrator comprises the pair of vibration reeds being vibrated to generate Coriolis force corresponding to a change in attitude of the vibrator and having a node for obstructing the propagation of the vibration, a pair of beams connected to the pair of vibration reeds, a cantilever connected to the node, a first detection part provided on the cantilever for detecting a change in the shape of the cantilever caused by the Coriolis force, and a support part for supporting the pair of beams. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vibrator such as a vibratory gyroscope and an electronic apparatus including the vibrator.
[0002]
[Prior art]
In the conventional vibrator described in Patent Document 1 below, in order to detect a change in the posture of the vibrator, the sound piece generates vibration (drive vibration) for generating a Coriolis force corresponding to the change, and Vibration (detection vibration) excited by the generated Coriolis force is performed. The vibrator reduces a shift in frequency of both vibrations due to stress on the circuit board caused by leakage of the both vibrations of the sound piece to the circuit board on which the vibrator is placed. Therefore, it has a suspension system that supports the sound piece in a floating state or a suspended state.
[0003]
[Patent Document 1]
US Pat. No. 5,396,144
[Problems to be solved by the invention]
However, the conventional vibrator has a problem that even if it has the suspension mechanism, leakage of vibration of the sound piece to the circuit board cannot be sufficiently avoided.
[0005]
In addition to the above problem, a detection unit provided on the beam supporting the sound piece for detecting a change in the shape of the beam based on the Coriolis force is configured to detect both vibrations of the sound piece on the beam. There has also been a problem that a change in the shape of the beam due to leakage is mistaken as a change in the shape of the beam based on the Coriolis force.
[0006]
[Means for Solving the Problems]
In order to solve the above-described problems, the first vibrators according to the present invention are mutually extending along a first direction (Y direction) which is a central axis of rotation constituting a change in the posture of the vibrator. A pair of parallel rod-shaped sound pieces that vibrate to generate a Coriolis force corresponding to the rotation, parallel to a virtual plane (XY plane) including the pair of sound pieces, and A pair of parallel rod-shaped beams extending in a second direction (X direction) perpendicular to the first direction, each end of which is a first node in one of the pair of sound pieces And the second node, the first node and the second node preventing propagation of the vibration of one of the pair of sound pieces to the pair of beams connected to the first node and the second node. The other end of each of the pair of sound pieces, the first node and the second node A third node and a fourth node corresponding to, which prevent propagation of the vibration of the other of the pair of sound pieces to the pair of beams connected to the third node and the fourth node. A pair of beams connected to the third node and the fourth node, and a rod-shaped first cantilever beam extending in the second direction (X direction), one end of which is the first node A first cantilever beam connected to a node, the other end of the first cantilever beam being located on an imaginary straight line starting from the first node and extending away from the third node; and the first cantilever beam A first detection unit provided for detecting a change in shape of the first cantilever beam caused by the Coriolis force; and a support unit connected to the pair of beams. And a support portion that supports the pair of beams.
[0007]
The vibrator according to the present invention is a rod-shaped second cantilever extending in the second direction (X direction), one end of which is connected to the second node, and the other end of the second node. The second cantilever positioned on a virtual straight line extending in a direction away from the fourth node from the starting point, and a second detector provided on the second cantilever, Rotation about a third direction (Z direction) perpendicular to the virtual plane (XY plane) as a central axis, and acceleration along the first direction (Y direction) in cooperation with the first detection unit It is desirable to further include the second detection unit to be removed.
[0008]
The vibrator according to the present invention is a rod-shaped second cantilever extending in the second direction (X direction), one end connected to the third node, and the other end connected to the third node. A second cantilever beam positioned on a virtual straight line extending in a direction away from the first node from a starting point, and a second detection unit provided on the second cantilever beam, It is desirable to further include the second detection unit that removes rotation around the third direction (Z direction) perpendicular to the virtual plane (XY plane) in cooperation with the first detection unit. .
[0009]
The vibrator according to the present invention is a rod-shaped second cantilever extending in the second direction (X direction), one end of which is connected to the fourth node and the other end is the fourth node. A second cantilever beam located on a virtual straight line extending in a direction away from the second node starting from the second node, and a second detection unit provided on the second cantilever beam, It is desirable to further include the second detection unit that removes the acceleration along the first direction (Y direction) in cooperation with the first detection unit.
[0010]
The vibrator according to the present invention is a rod-shaped second cantilever extending in the second direction (X direction), one end of which is connected to the second node, and the other end of the second node. The second cantilever beam located on a virtual straight line extending in a direction away from the fourth node from the starting point, and a rod-shaped third cantilever extending in the second direction (X direction) The third cantilever which is a beam and has one end connected to the third node and the other end positioned on an imaginary straight line extending from the third node in a direction away from the first node When,
A rod-like fourth cantilever extending in the second direction (X direction), one end connected to the fourth node and the other end starting from the fourth node. It is desirable to further include the fourth cantilever beam positioned on an imaginary straight line extending in a direction away from the first straight beam.
[0011]
The vibrator according to the present invention is a second detection unit provided in the second cantilever and has a third direction (Z direction) perpendicular to the virtual plane (XY plane) as a central axis. It is desirable to further include a second detection unit that removes rotation and acceleration along the first direction (Y direction) in cooperation with the first detection unit.
[0012]
The vibrator according to the present invention is a second detection unit provided in the third cantilever and has a third direction (Z direction) perpendicular to the virtual plane (XY plane) as a central axis. It is desirable to further include the second detection unit that removes rotation in cooperation with the first detection unit.
[0013]
The vibrator according to the present invention is a second detection unit provided in the fourth cantilever, and cooperates with the first detection unit in acceleration along the first direction (Y direction). It is desirable to further include the second detection unit to be removed.
[0014]
The vibrator according to the present invention is a second detection unit provided in the second cantilever and has a third direction (Z direction) perpendicular to the virtual plane (XY plane) as a central axis. The second detection unit that removes rotation and acceleration along the first direction (Y direction) in cooperation with the first detection unit; and a second detection unit provided on the third cantilever 3rd detection part which is the 3rd detection part, and removes rotation centering on the 3rd direction (Z direction) perpendicular to the virtual plane (XY plane) in cooperation with the 1st detection part And a fourth detection unit provided on the fourth cantilever to remove acceleration along the first direction (Y direction) in cooperation with the first detection unit. It is desirable to further include four detection units.
[0015]
In the vibrator according to the aspect of the invention, the first, second, third, and fourth detection units may be in the vicinity of a node corresponding to each detection unit among the first, second, third, and fourth nodes. It is desirable to be provided.
[0016]
In the vibrator according to the aspect of the invention, it is preferable that the support portion is provided on an imaginary straight line that connects approximately the centers of the pair of beams.
[0017]
An electronic apparatus according to the present invention includes the above-described vibrator.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Specific examples of the vibrator according to the present invention will be described with reference to the drawings.
[Specific Example 1]
As is known in the art, the vibrator of specific example 1 should detect changes in the posture of the vibrator (for example, the amount of rotation, the speed and the acceleration that constitute the change in the posture of the vibrator, and their directions). , A drive mode for performing vibration for generating a Coriolis force corresponding to the change, and a detection mode for detecting the Coriolis force. Hereinafter, the detection mode will be described after describing the configuration and the drive mode of the vibrator of the specific example 1 in parallel.
[0019]
FIG. 1 is a front view showing the configuration of the vibrator of the first specific example. FIGS. 2A, 2B, and 2C show the vibrator of the first specific example in the drive mode. It is the perspective view, side view, and top view which show this. As shown in FIG. 1, the vibrator 1 of the first specific example includes two sound pieces 2 a and 2 b that detect a rotation around the Y direction shown in the figure, which constitutes a change in the posture of the vibrator 1. And a pair of beams 3a, 3b, four beams 4a, 4b, 4c, 4d, a support unit 5, drive units 6, 7, and a detection unit 8.
[0020]
The sound pieces 2a and 2b are a pair of rod-like members that extend along the Y direction and are parallel to each other, are homogeneous, and have a rectangular cross section. The sound pieces 2a and 2b perform flexural vibration so as to detect the rotation about the Y direction as the center axis. More specifically, for example, the sound piece 2a does not move the nodes 20 and 21 that are the connection points between the two beams 3a and 3b, that is, the vibration of the sound piece 2a is prevented from propagating to the beams 3a and 3b. As a fixed point to be performed, as shown in FIGS. 2A and 2B, the driving unit 6 including the driving elements 6a and 6b assists the virtual plane (XY plane) including the sound pieces 2a and 2b. It vibrates by repeating bending along the Z direction which is a vertical direction.
[0021]
The positions of the nodes 20 and 21 in the sound piece 2a are defined by the length of the sound piece 2a. The nodes 20 and 21 are defined, for example, at a position of 20 to 30% of the length of the sound piece 2a starting from the end of the sound piece 2a, and preferably at a position of 22 to 23%.
[0022]
The sound piece 2b performs bending vibration similar to that of the sound piece 2a symmetrically with the sound piece 2a with the assistance of the drive unit 7 including the drive elements 7a and 7b and with the nodes 22 and 23 as fixed points. That is, as shown in FIGS. 2 (A), 2 (B), and 2 (C), when viewed from the side of the vibrator 1, for example, the sound piece 2a is reversed in the Z direction. When the sound piece 2b is deformed, the sound piece 2b is deformed into a "<" shape in the Z direction symmetrical to the shape of the sound piece 2a. Further, when the sound piece 2a is deformed in a “<” shape in the Z direction, the sound piece 2 b is deformed in a “<” shape in the Z direction opposite to the shape of the sound piece 2 a.
[0023]
Returning to FIG. 1, the pair of beams 3a and 3b are parallel to each other in a direction parallel to the virtual plane (XY plane) including the sound pieces 2a and 2b and perpendicular to the Y direction, that is, extending in the X direction. A pair of rod-shaped members having a rectangular cross section, and the length (thickness) in the Z-axis direction is the same as the length (thickness) in the Z-axis direction of the sound pieces 2a and 2b. More specifically, one end 3a of the pair of beams constitutes a node 20 which is a fixed point by connecting one end to the sound piece 2a, and a fixed point by connecting the other end to the sound piece 2b. And a node 22 corresponding to the node 20 is formed. Similarly, the other 3b of the pair of beams constitutes a node 21 which is a fixed point when one end is connected to the sound piece 2a, and a fixed point by connecting the other end to the sound piece 2b. A node 23 corresponding to the existing node 21 is formed.
[0024]
The beams 4a, 4b, 4c, and 4d are cantilever beams. For example, the beam 4a has one end connected to the node 20 of the sound piece 2a and the other end connected to the node 22 from the node 20 of the sound piece 2a. It is located on a virtual straight line extending in a direction away from the center. The other beams 4b, 4c, and 4d also have the same relationship as the relationship between the beam 4a and the node 20 with respect to the nodes 21, 22, and 23 of the sound pieces 2a and 2b.
[0025]
The support part 5 includes a support member 5a and a disk member 5b. The support member 5a extends in the Y-axis direction, has a rectangular cross section, and the length (thickness) in the Z-axis direction is the length (thickness) in the Z-axis direction of the sound pieces 2a and 2b and the beams 3a and 3b. ). The disk member 5b is provided substantially at the center of the support member 5a, and the length (thickness) in the Z-axis direction is the same as the length (thickness) in the Z-axis direction of the support member 5a. More specifically, one end of the support member 5a is connected to the approximate center of the beam 3a, thereby forming the connection point 24, and the other end is connected to the approximate center of the beam 3b, whereby the connection point 25. In this way, by adopting a structure in which the sound pieces 2 a and 2 b are positioned symmetrically with respect to the center of the support portion 5, it is possible to reduce the vibration of the sound pieces 2 a and 2 b from propagating to the support portion 5. The disc member 5b has a disc shape whose diameter is longer than the length (width) of the support member 5a in the X-axis direction, and in order to place the vibrator 1 on a circuit board (not shown), for example, In order to fix the vibrator 1 to the circuit board with a conventionally known adhesive, it has an area necessary for fixing by the bonding.
[0026]
The detection unit 8 includes a conventionally known piezo element (not shown) that generates an electric signal indicating the magnitude of the deformation or displacement according to the deformation or displacement generated in the beam 4a based on the Coriolis force described later. 8a and 8b. More specifically, the detection electrode 8a is attached in the vicinity of the node 20 on the XZ plane (upper surface) of the beam 4a, and the detection electrode 8b is a beam 4a that has a relation between the attachment surface of the detection electrode 8a and the front and back. Is attached in the vicinity of the node 20 on the XZ plane (bottom surface) of the XZ plane, whereby the detection electrodes 8a and 8b are located symmetrically with respect to the beam 4a.
[0027]
Next, the detection mode of the vibrator 1 of the specific example 1 will be described.
FIGS. 3A and 3B are a perspective view and a front view showing the vibrator of the first specific example in the detection mode. In the driving mode in which the sound pieces 2a and 2b vibrate in the Z direction as described above, the vibrator 1 of the specific example 1 is centered on the Y axis, which is one of changes in the posture of the vibrator 1. When the rotation occurs, as shown in FIG. 3A, the Coriolis force F indicated by the solid arrow and the Coriolis force F indicated by the dotted arrow are alternately applied to the sound pieces 2a and 2b along the X direction. The sound pieces 2a and 2b are bent and vibrated along the X direction by the Coriolis force F.
[0028]
As shown in FIGS. 3A and 3B, the bending vibration along the X direction changes the shape of the beams 4a, 4b, 4c, and 4d. In particular, the beams 4a, 4b, A large change in shape occurs in the vicinity of the nodes 20, 21, 22, and 23 on 4c and 4d as compared with other positions. The detection unit 8 provided in the vicinity of the node 20 in the beam 4a generates an electric signal indicating a change in the shape of the beam 4a by a piezoelectric element, and outputs the electric signal to a calculation unit (not shown). When the arithmetic unit receives the electric signal from the detection unit 8, the arithmetic unit processes the electric signal according to a conventionally known method to calculate the rotation, that is, the change in the posture of the vibrator 1.
[0029]
As described above, according to the vibrator 1 of the first specific example, the nodes 20, 21, 22, and 23 are vibrated in the Z direction in the driving mode of the sound pieces 2a and 2b and in the X direction in the detection mode. The vibration of the sound pieces 2a and 2b is applied to the support portion 5 because it has a function of preventing the vibrations of the sound pieces 2a and 2b from propagating to the pair of beams 3a and 3b to which the support portion 5 is connected. Leakage can be reduced compared to a conventional vibrator that does not have a configuration such as nodes 20, 21, 22, and 23.
[0030]
Further, according to the vibrator 1 of the specific example 1 described above, the sound pieces 2a and 2b are symmetrical with respect to the support portion 5, more precisely, about a virtual straight line passing through the support portion 5 and parallel to the Y-axis direction. Since they are arranged symmetrically with respect to each other, the vibrations generated in the sound pieces 2a and 2b in mutually opposite phases are canceled by the support portion 5 located at an equal distance from the sound pieces 2a and 2b. That is, since the vibration of the sound piece 2 a leaks to the support portion 5 and the vibration of the sound piece 2 b leaks to the support portion 5, the vibration of the sound pieces 2 a and 2 b leaks to the support portion 5. The relationship between the sound pieces 2a and 2b and the support portion 5 can be reduced as compared with a conventional vibrator that does not have a line-symmetric relationship as described above.
[0031]
Further, according to the vibrator 1 of the specific example 1 described above, the change in the shape (deflection angle) of the beam 4a depending on the vibration of the sound pieces 2a and 2b caused by the Coriolis force F is detected in other places. Since it is provided in the vicinity of the node 20, which is remarkable compared to the change in the shape of the above, the Coriolis force, that is, the change in the posture of the vibrator 1 will be detected in other places. It becomes possible to detect with higher accuracy compared to.
[0032]
[Specific Example 2]
4A, FIG. 4B, and FIG. 4C are front views showing the configuration of the vibrator of the second specific example. As shown in FIG. 4A, the vibrator 30 of the specific example 2 includes a detection unit 9 including detection electrodes 9a and 9b in addition to the detection unit 8 of the vibrator 1 of the specific example 1. The detection unit 9 is provided in the vicinity of the node 22 on the beam 4c described above. In other words, the detection electrodes 9a and 9b are about a virtual straight line extending in the Y direction through the center of the support unit 5 in the beam 4c. The detection electrodes 8a and 8b are arranged in line-symmetric positions. As shown in FIG. 4A, the detection unit 8 provided in the vicinity of the node 20 in the beam 4a and the detection unit 9 provided in the vicinity of the node 22 in the beam 4c have the Y direction as the central axis. Rotation about the Z direction, which is a direction perpendicular to the virtual plane (XY plane), which is a disturbance to the rotation, is removed by a conventionally known method in cooperation with each other.
[0033]
Here, as a conventionally known removal method, for example, the detection units 8 and 9 output a signal having the same polarity with respect to the Coriolis force, and on the other hand, a signal having a different polarity with respect to the disturbance is output. A method of detecting the Coriolis force by adding between the former signals and canceling the disturbance by adding also between the latter signals can be used. In place of the above method, the detection units 8 and 9 output signals having different polarities with respect to the Coriolis force, and on the other hand, signals with the same polarity regarding disturbances, and the calculation unit performs subtraction between the former signals. In addition to detecting the Coriolis force by applying, a method of canceling the disturbance by subtracting the latter signal can be used.
[0034]
As shown in FIG. 4B, the other transducer 40 of the specific example 2 includes a detection unit 10 including detection electrodes 10a and 10b in addition to the detection unit 8 of the transducer 1 of the specific example 1. The detection unit 10 is provided in the vicinity of the node 23 on the beam 4d. In other words, the detection electrodes 10a and 10b are positioned symmetrically with the detection electrodes 8a and 8b at the center of the support unit 5 in the beam 4d. Is provided. As shown in FIG. 4B, the detection unit 8 provided in the vicinity of the node 20 in the beam 4a and the detection unit 10 provided in the vicinity of the node 23 in the beam 4d have the Y direction as the central axis. The acceleration along the Y direction, which is a disturbance for rotation, is removed by the above-described conventionally known method in cooperation with each other.
[0035]
Still another vibrator 50 of the specific example 2 includes a detection unit 11 including detection electrodes 11a and 11b in addition to the detection unit 8 of the vibrator 1 of the specific example 1, as illustrated in FIG. . The detection unit 11 is provided in the vicinity of the node 21 on the beam 4b. In other words, the detection electrodes 11a and 11b are detection electrodes for a virtual straight line extending in the X direction through the center of the support unit 5 in the beam 4b. It is provided at a position symmetrical with 8a and 8b. As shown in FIG. 4C, the detection unit 8 provided in the vicinity of the node 20 in the beam 4a and the detection unit 11 provided in the vicinity of the node 21 in the beam 4b have the Y direction as the central axis. Rotation around the Z direction detectable by the vibrator 30 shown in FIG. 4A, which is a disturbance for rotation, and along the Y direction detectable by the vibrator 40 shown in FIG. 4B. The acceleration is removed by the above-mentioned conventionally known method in cooperation with each other.
[0036]
As described above, according to the vibrators 30, 40, and 50 of the second specific example, one of the detection unit 8 and the added detection units 9, 10, and 11 is inherently detected in cooperation with each other. It is a disturbance for rotation with the power Y direction as the central axis, and the rotation with the Z direction as the central axis or the acceleration along the Y direction, or the rotation and the acceleration are removed, so the Y direction is the central axis. The rotation can be detected with higher accuracy than the vibrator 1 of the first specific example.
[0037]
[Specific Example 3]
FIG. 5 is a front view illustrating the configuration of the vibrator according to the third specific example. As shown in FIG. 5, the vibrator 60 of the specific example 3 is added to the nodes 22, 23, and 21 of the beams 4 c, 4 d, and 4 b as shown in FIG. 4 in addition to the detection unit 8 of the specific example 1. All three detection units 9, 10, 11 are included. As a result, like the vibrators 30, 40, and 50 of the second specific example, the rotation about the Z direction as the central axis and the acceleration along the Y direction, which are disturbances for the rotation about the Y direction as the central axis, are detected. Therefore, the rotation around the Y direction can be detected with high accuracy by removing the disturbance. Further, in addition to the cancellation of the disturbance, by adding all four signals representing the Coriolis force, the level of the signal after the addition representing the Coriolis force is changed to the Coriolis force in the vibrators 30, 40 and 50 shown in FIG. As a result, it is possible to reduce the load of amplification processing and the like in the subsequent calculation unit.
[0038]
[Specific Example 4]
FIG. 6 is a front view illustrating the configuration of the vibrator according to the fourth specific example. As shown in FIG. 6, the vibrator 70 of the specific example 4 has only the cantilever 4a among the cantilever beams 4a, 4b, 4c, and 4d of the vibrator 1 of the specific example 1 shown in FIG. However, other configurations are the same as those of the vibrator 1 of the first specific example.
[0039]
Since the vibrator 70 of the specific example 4 has only one cantilever 4a as described above, the vibration of the sound pieces 2a and 2b in the drive mode and the detection mode is the same as that of the vibrator 1 of the specific example 1. Although the stability is inferior to the vibration of the sound pieces 2a and 2b in both modes, the nodes 20, 21, 22, and 23 have the vibrations of the sound pieces 2a and 2b as in the vibrator 1 of the first specific example. Propagation to the pair of beams 3a and 3b is prevented, and the symmetrical arrangement of the sound pieces 2a and 2b around the support portion 5 cancels the vibration of the sound pieces 2a and 2b at the position of the support portion 5. Therefore, the leakage of the vibration of the sound pieces 2a, 2b from the support portion 5 is compared with the conventional vibrator having the configuration of the nodes 20, 21, 22, 23 or the line symmetry of the sound pieces 2a, 2b. And can be reduced.
[0040]
[Specific Example 5]
FIG. 7 is a front view illustrating the configuration of the vibrator of the fifth specific example. As shown in FIG. 7A, the vibrator 80 of the fifth specific example is one of the cantilevers 4a, 4b, 4c, and 4d included in the vibrator 30 of the second specific example illustrated in FIG. Only the cantilevers 4a and 4c are provided, and the other configurations are the same as those of the vibrator 30 of the specific example 2.
[0041]
As shown in FIG. 7B, the other vibrator 90 of the specific example 5 includes the cantilever beams 4a, 4b, 4c, and 4d of the vibrator 40 of the specific example 2 illustrated in FIG. Of which only cantilevers 4a and 4d
Other configurations are the same as those of the vibrator 40 of the second specific example.
[0042]
As shown in FIG. 7C, still another vibrator 100 according to the fifth specific example includes cantilevers 4a, 4b, 4c, and 4d included in the vibrator 50 according to the second specific example illustrated in FIG. Of these, only the cantilever beams 4a and 4b are provided, and the other configurations are the same as those of the vibrator 50 of the specific example 2.
[0043]
Since the vibrators 80, 90, 100 of the specific example 5 have two cantilever beams as described above, the vibration of the sound pieces 2a, 2b in the drive mode and the detection mode is the vibrator 30 of the specific example 2. , 40 and 50, the stability is inferior to the vibration of the sound pieces 2a and 2b in both modes. However, like the vibrators 30, 40, and 50 of the specific example 2, the nodes 20, 21, 22, and 23 prevent the vibration of the sound pieces 2a and 2b from propagating to the pair of beams 3a and 3b. Since the line-symmetric arrangement of the sound pieces 2 a and 2 b around the support portion 5 cancels the vibration of the sound pieces 2 a and 2 b at the position of the support portion 5, the vibration of the sound pieces 2 a and 2 b is transmitted from the support portion 5. Leakage can be reduced as compared with a conventional vibrator that does not have the configuration of the nodes 20, 21, 22, 23 or the line pieces symmetrically of the sound pieces 2 a, 2 b, and in addition, the two detection units Therefore, disturbance for rotation with the Y axis as the central axis to be detected can be removed, and thereby the detection accuracy can be improved.
[0044]
[Applied equipment]
Application devices using the vibrators of the specific examples described above include electronic devices such as mobile phones, digital cameras, video cameras, and navigation systems that need to detect changes in posture. In the electronic device, the vibrator of the specific example provided in the electronic device can enjoy the above-described effect by detecting a change in the posture of the electronic device as a change in the posture of the vibrator. .
[0045]
【The invention's effect】
According to the vibrator according to the present invention, the pair of beams to which the support unit is connected are provided between the nodes that prevent the propagation of vibration of the pair of sound pieces, and the detection unit has one end on one sound piece. Since the other end is provided on a beam on a virtual straight line extending in a direction away from the node on the other sound piece with the other end as a starting point, the vibration of the pair of sound pieces is applied to the support portion. Propagation can be reduced as compared with a conventional vibrator that does not have the configuration.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a configuration of a vibrator according to a specific example 1;
FIG. 2 is a diagram illustrating a driving mode of a vibrator according to a specific example 1;
FIG. 3 is a diagram showing a detection mode of a vibrator of specific example 1;
FIG. 4 is a diagram illustrating a configuration of a vibrator according to a specific example 2;
FIG. 5 is a diagram illustrating a configuration of a vibrator according to a specific example 3;
FIG. 6 is a diagram showing a configuration of a vibrator of a specific example 4;
7 is a diagram showing the configuration of a vibrator of Example 5. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Vibrator 2a, 2b Sound piece 3a, 3b A pair of beam 4a, 4b, 4c, 4d Beam 5 Support part 6, 7 Drive part 8 Detection part 20, 21, 22, 23 Node 24, 25 Connection point

Claims (12)

A pair of mutually parallel rod-like sound pieces extending along a first direction that constitutes a central axis of rotation that constitutes a change in the posture of the vibrator for generating a Coriolis force corresponding to the rotation A pair of sound pieces that vibrate;
A pair of mutually parallel rod-shaped beams extending in a second direction parallel to a virtual plane including the pair of sound pieces and perpendicular to the first direction, each end of the pair of beams Propagation of the vibration of one of the pair of sound pieces to the pair of beams connected to the first and second nodes of the first and second nodes of one of the sound pieces. The third node and the fourth node corresponding to the first node and the second node in the other of the pair of sound pieces, respectively connected to the first node and the second node to be blocked. The third node and the fourth node that prevent propagation of the other vibration of the pair of sound pieces to the pair of beams connected to the third node and the fourth node. A pair of beams connected to
A rod-shaped first cantilever extending in the second direction, one end of which is connected to the first node, and the other end is moved away from the third node starting from the first node. The first cantilever beam located on an extending virtual straight line;
A first detection unit provided on the first cantilever for detecting a change in shape of the first cantilever due to the Coriolis force;
A vibrator comprising: a support portion connected to the pair of beams and supporting the pair of beams. A rod-shaped second cantilever extending in the second direction, one end of which is connected to the second node, and the other end is moved away from the fourth node starting from the second node. The second cantilever beam located on an extending virtual straight line;
The second detection unit provided in the second cantilever beam, the rotation about a third direction perpendicular to the virtual plane as a central axis, and the acceleration along the first direction The vibrator according to claim 1, further comprising the second detection unit that is removed in cooperation with the detection unit. A rod-shaped second cantilever extending in the second direction, one end of which is connected to the third node and the other end is away from the first node starting from the third node. The second cantilever beam located on an extending virtual straight line;
The second detection unit provided on the second cantilever, the rotation having a third axis perpendicular to the virtual plane as a central axis is removed in cooperation with the first detection unit The vibrator according to claim 1, further comprising a second detection unit. A rod-shaped second cantilever extending in the second direction, one end of which is connected to the fourth node and the other end is away from the second node starting from the fourth node. The second cantilever beam located on an extending virtual straight line;
A second detection unit provided on the second cantilever, wherein the second detection unit removes acceleration along the first direction in cooperation with the first detection unit; The vibrator according to claim 1, further comprising: A rod-shaped second cantilever extending in the second direction, one end of which is connected to the second node, and the other end is moved away from the fourth node starting from the second node. The second cantilever beam located on an extending virtual straight line;
A rod-shaped third cantilever extending in the second direction, one end of which is connected to the third node and the other end is away from the first node starting from the third node. The third cantilever beam located on an extending virtual straight line;
A rod-shaped fourth cantilever extending in the second direction, one end of which is connected to the fourth node and the other end is away from the second node starting from the fourth node. The vibrator according to claim 1, further comprising: the fourth cantilever beam positioned on an extending virtual straight line. A second detection unit provided on the second cantilever beam, the rotation about a third direction perpendicular to the virtual plane as a central axis, and an acceleration along the first direction The vibrator according to claim 5, further comprising the second detection unit that is removed in cooperation with the detection unit. A second detection unit provided on the third cantilever, wherein the rotation is performed in cooperation with the first detection unit, the rotation being centered in a third direction perpendicular to the virtual plane; The vibrator according to claim 5, further comprising a second detection unit. A second detection unit provided on the fourth cantilever, wherein the second detection unit removes acceleration along the first direction in cooperation with the first detection unit; The vibrator according to claim 5, further comprising: The second detection unit provided in the second cantilever beam, the rotation about a third direction perpendicular to the virtual plane as a central axis, and the acceleration along the first direction The second detection unit to be removed in cooperation with the detection unit;
A third detection unit provided on the third cantilever, the rotation having a third axis perpendicular to the virtual plane as a central axis is removed in cooperation with the first detection unit; A fourth detection unit provided on a third detection unit and the fourth cantilever, wherein the acceleration along the first direction is removed in cooperation with the first detection unit. The vibrator according to claim 5, further comprising: 4 detection units. The first, second, third, and fourth detection units are provided in the vicinity of a node corresponding to each detection unit among the first, second, third, and fourth nodes. The vibrator according to any one of claims 1 to 9. The vibrator according to claim 1, wherein the support portion is provided on an imaginary straight line connecting substantially the centers of the pair of beams. An electronic device comprising the vibrator according to claim 1.

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