JP2005032094A - System for disclosing manufacture information of semiconductor wafer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To display stock information of each processing step of a semiconductor wafer on a customer-side terminal device. <P>SOLUTION: Data of the numbers of finished products, unfinished articles, and products in process of semiconductor wafers is stored in a storage means (database) 24. A screen information transfer command is transferred to an information disclosing server 22 when a prescribed operation is performed on a customer-side terminal device 11. The information disclosing server 22 searches the data from the database 24 and generates and transfers screen data to the customer-side terminal device 11. Information on the numbers of finished products, unfinished articles, and products in process of semiconductor wafers, corresponding to the customer, is displayed on the customer-side terminal device. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a semiconductor wafer manufacturing information disclosure system that displays information on a semiconductor wafer formed through a plurality of processing steps on a customer terminal device.

  Semiconductor wafers are formed through various processing steps. These processing steps include, for example, single crystal manufacturing, lapping, etching, diffusion, mirror finishing, hydrogen treatment, epitaxial growth, and the like. These processing steps are performed at each factory. When one processing step is completed, the product is transported to the factory where the next processing step is performed. After the final processing step, the product is shipped to the customer after being inspected. In this specification, a product for which the final processing step has been completed is referred to as a “finished product”, and a product for which any of the processing steps other than the final processing step has been completed is referred to as an “incomplete product”. A product for which one of the processing steps is in progress is referred to as a “work in process”.

  As a production form of semiconductor wafers, so-called build-to-order production in which products are manufactured in response to orders from customers is adopted. According to the build-to-order manufacturing, it is sufficient to manufacture the product in an amount corresponding to the number of orders from the customer. Therefore, the build-to-order production has an advantage that it is difficult to generate inventory compared to the mass production.

In practice, however, inventory is generated in the custom-made production of semiconductor wafers. This is due to the following reasons (1) to (4).
(1) Usually, the yield is taken into consideration, and products are manufactured in excess of the number of orders. For this reason, finally, a remaining finished product is generated, and the finished product becomes an inventory product.
(2) The shipment of semiconductor wafers is performed on a case-by-case basis, and fractions may occur. For example, when the number of units accommodated in one case is 25, a case where the number of finished products is less than 25 is not shipped because the number of units is insufficient. A finished product having 1 to 24 fractions in such a situation becomes a stock product.
(3) Although the manufacturing has been started by an order from the customer, there is a case where a partial cancellation occurs in the manufacturing stage. Then, in the cancellation occurrence stage, the completed / unfinished product for the cancellation becomes a stock product.
(4) In order to respond quickly to orders from customers, pre-production is performed separately from order production. The unfinished product / finished product manufactured in the pre-production is preferentially applied to the order from the customer. However, if there is no order from the customer, the unfinished product / finished product for the pre-production will be in stock.

  When inventory occurs, maintenance costs are required to maintain the inventory, leading to cost increases. However, the occurrence of inventory is unavoidable for the reasons (1) to (4) above. Therefore, producers are conducting sales activities such as printing a list of inventory items on a regular basis (such as at the end of every month) on paper and distributing this list to the target customers. In this way, producers try to reduce inventory as much as possible by actively disclosing inventory information to customers.

  By the way, although not related to a semiconductor wafer, a general technique for disclosing inventory information using a terminal device on the customer side is disclosed in, for example, Patent Document 1 below. The following Patent Document 1 is a technique related to a wood distribution system, in which a terminal device on the customer side and a server device on the supplier side are communicably connected via a communication line. The server apparatus is provided with a database for storing inventory data including wood types, quantities, storage locations, and the like. When a predetermined input operation is performed on the customer terminal device, the inventory data is transferred from the supplier server device to the customer terminal device, and the inventory information is displayed on the display of the customer terminal device.

Japanese Patent Laid-Open No. 2001-325496 (page 9, table 4)

  With respect to disclosing semiconductor wafer inventory information, it is desired to use a terminal device on the customer side, as in the technique of Patent Document 1, rather than using paper.

  However, the generation form of the wood inventory shown in Patent Document 1 and the generation form of the semiconductor wafer inventory are different, and the semiconductor wafer inventory information cannot simply be disclosed by the technique of Patent Document 1. . The technology for disclosing inventory information typified by Patent Document 1 discloses a completed product at the shipping stage as an inventory product, and does not disclose an unfinished product being manufactured as an inventory product. That is, the conventional technology for disclosing inventory information is not suitable for the generation mode of semiconductor wafer inventory, and there is actually no technology suitable for the generation mode of semiconductor wafer inventory.

  The present invention has been made in view of such a situation, and an object of the present invention is to make it possible to display inventory information for each processing step of a semiconductor wafer on a terminal device on the customer side.

Therefore, the first invention is
In a semiconductor wafer manufacturing information disclosure system for displaying information on a semiconductor wafer formed through a plurality of processing steps on a customer side terminal device,
Storage means for storing, for each processing step, information on the number of products for which processing has been completed and information on the number of products in progress for processing;
An information disclosure server that generates screen information including the number information for each processing step based on the number information of the storage means,
The customer side terminal device and the information disclosure server are communicably connected by a communication means,
When a predetermined operation is performed at the customer side terminal device, a screen information transfer command is transferred from the customer side terminal device to the information disclosure server, and screen information corresponding to the screen information transfer command is generated at the information disclosure server, and the information disclosure server The screen information is transferred from the customer terminal device to the customer terminal device, and the product number information for each processing step is displayed on the customer terminal device.

  In the first aspect of the invention, the storage means (database) 24 stores the product number data of finished, unfinished and in-process semiconductor wafers. When a predetermined operation is performed on the customer terminal device 11, a screen information transfer command is transferred to the information disclosure server 22. The information disclosure server 22 retrieves the product quantity data from the database 24, generates screen data, and transfers it to the customer terminal device 11. Then, the customer terminal device 11 displays information on the number of finished semiconductor wafers, unfinished products, and in-process products according to the customer.

The second invention is the first invention,
The storage means stores product quantity information for semiconductor wafers not assigned to customer orders.

  In the second aspect of the invention, the information on the finished product and the unfinished product stored in the database 24 is information on a product that is not assigned to a customer order, that is, an inventory product.

The third invention is the second invention, further comprising a producer-side terminal device and a mail server,
The customer side terminal device, the producer side terminal device and the mail server are communicably connected by a communication means,
When an order quantity is input at a predetermined location on the screen while the screen based on the screen information transferred from the information disclosure server is displayed on the customer side terminal device, the order quantity information is transferred to the mail server. When the mail server is stored and accessed by the producer side terminal device, the stored order quantity information is displayed on the producer side terminal device.

  In the third invention, when the order quantity is input to a predetermined location on the screen in a state where the information on the inventory is displayed on the customer side terminal device 11 according to the second invention, the order quantity is sent to the mail server 23 on the producer side. An email containing the data is transferred. When the producer-side terminal device 21 accesses the mail server 23, the order quantity is displayed.

  According to the first invention, the producer can disclose the production progress information of the ordered product to the customer via the customer side terminal device.

  According to the second aspect of the invention, the producer can disclose the latest stock information of the finished product / unfinished product to the customer via the customer side terminal device. From the customer's point of view, you can check the inventory of finished and unfinished products at any time. Therefore, it can be said that inventory sales are promoted rather than the conventional method of regularly disclosing the inventory list.

  According to the third invention, the customer can place an order while checking the stock of the semiconductor wafer. Therefore, it can be said that inventory sales are promoted rather than the conventional method of regularly disclosing the inventory list.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a system configuration diagram according to the present embodiment.

  Various devices on the customer side 10 and various devices on the producer side 20 are connected via the Internet 5 so as to be able to transmit and receive each other. The customer side terminal device 11 is provided on the customer side 10, and the producer side terminal device 21, the information disclosure server 22, the mail server 23, and the database 24 are provided on the producer side 20.

  The Internet 5 provides services such as WWW (World Wide Web). In the Internet 5, data is transmitted and received according to a predetermined protocol (TCP / IP). A VAN or the like may be used instead of the Internet 24.

  The customer side terminal device 11 is a personal computer, for example, and includes a display device such as a display and an input device such as a keyboard and a mouse. The customer terminal device 11 is installed with software for browsing a Web page on a display device like a WWW browser. In addition, software for transferring the order quantity data as an e-mail is installed in the mail server 22 when an order quantity is input in a state where predetermined screens 70 and 80 described later are displayed on the display device. The customer side terminal device 11 may be a means for wirelessly transmitting / receiving information to / from the Internet via a relay base, for example, a portable terminal device such as a mobile phone, a PHS, or a portable personal computer having a communication function. Good.

  Each side of the producer 20 has factories and branches, and various devices at the factories and branches are connected by a WAN. It is connected to the Internet 5 and WAN via a dedicated line.

  The producer-side terminal device 21 is, for example, a personal computer, and includes a display device such as a display and an input device such as a keyboard and a mouse. The producer side terminal device 21 is installed with software for viewing the contents of the order quantity mail transferred from the customer side terminal device 11 to the mail server 22 on the display device.

  The information disclosure server 22 is installed with software for generating screen data of a Web page and transferring the screen data to a data transfer command destination. In addition, software for managing the database 24 is installed. Here, the functions of screen data generation and database management are integrated in the information disclosure server 22, but various servers such as a Web server and a database server may be provided to distribute the functions.

  The mail server 23 stores the e-mail transferred from the customer-side terminal device 11 and installs software for transferring the e-mail to the producer-side terminal device 21 when the producer-side terminal device 21 is accessed. Has been.

  The database 24 stores the number of finished products, the number of unfinished products for each processing step, and the number of work pieces. Further, the database 24 stores various data displayed on various screens 50, 60, 70, and 80 to be described later regarding the semiconductor wafer. The data of the finished product, the unfinished product, and the in-process product of the semiconductor wafer stored in the database 24 is updated according to the progress of the manufacturing process at each factory. In this method, the number of finished products, unfinished products, and work-in-progress items may be automatically counted, and the data may be transmitted to update the data. The operator may input the number of data at the terminal device, and the data may be transmitted to update the data.

FIG. 2 is a diagram showing an example of screen transition and each screen in the present embodiment.
Each screen changes as indicated by the arrows in FIG. Next, data contents displayed on each screen will be described.

[Login screen]
FIG. 3 shows a login screen.
The screen 30 includes a customer system ID input unit 31 and a password input unit 32. In addition, an execution button 33 for transferring the input system ID and password data to the server side is provided. When the system ID is input on the screen 30, only the customer information corresponding to the system ID is displayed on the subsequent screens 40, 50, 60, 70, and 80.

[Menu screen]
FIG. 4 is a diagram showing a menu screen.
The screen 40 includes a screen 50 (production / inventory / device information screen), a screen 60 (unordered stock information screen), a screen 70 (process progress / delivery information screen), and a screen 80 (derived product inventory). Screen instruction buttons 41 to 44 for instructing screen transition to the (information screen). Also, a button 45 for instructing screen transition to the screen 30 (login screen) is provided.

[Production / Inventory / Device information screen]
FIG. 5 is a diagram showing a production / inventory / device information screen.
The screen 50 displays the production status and stock status of the product. The screen 50 has a table 51, and the table 51 includes the following items.
No ... Semiconductor wafer serial number displayed on the screen Customer Part number ... Product number assigned to each semiconductor wafer Customer Order number ... Number assigned to the order Delivery date specified by customer ... Delivery date specified by customer Scheduled shipping date ... each Planned number of shipments calculated based on the number of stocks and orders received for each processing process ... Planned number of products planned for production Shipped quantity ... Number of products shipped to the customer side Product / semi-product quantity ... Finished product / unfinished Total number of finished products in stock Production volume ... Number of in-process products
Each data displayed in each item of Table 51 is stored in the database 24.

  When the number of types of semiconductor wafers displayed on the screen exceeds a predetermined number (10 types in FIG. 5), a plurality of screens 50 are provided. The screen 50 has a screen instruction button 52 for instructing screen transition to the previous page, and a screen instruction button 53 for instructing screen transition to the next page. Furthermore, it has a screen instruction button 54 for instructing screen transition to the screen 40 (menu screen), and screen transition to the screen 60 (unordered stock information screen) and screen 70 (process progress / delivery information screen). Screen instruction buttons 55 and 56 for instructing.

[Process Progress / Delivery Information Screen]
FIG. 6 is a diagram showing a process progress / delivery date information screen.
The screen 60 displays the manufacturing progress status of the product that has been ordered by the customer. The screen 60 has a table 61, and the table 61 includes the following items.
No ... Semiconductor wafer serial number displayed on the screen Customer Part number ... Product number assigned to each semiconductor wafer Customer order number ... Number assigned to the order Delivery date specified ... Delivery date specified by the customer Planned shipping date ... Each Shipment date production volume calculated based on inventory quantity and order quantity for each processing process ... Work in progress status ... Number of unfinished products, work in progress, and number of finished products for each manufacturing process Status breakdown is "S", "W "," DW "," PW "," HG "," EP ", and" shipment ". “S” means single crystal manufacturing process, “W” means lapping and etching process, “DW” means diffusion process, “PW” means mirror process, “HG” "" Means a hydrogen treatment mirror process, and "EP" means an epitaxial process. “Shipment” means a shipment stage. The number indicated by the status is the number when converted into a product. For example, the number indicated by “S” is calculated and displayed based on the weight of the single crystal, the weight per product, and the acquisition rate when converted into a product.
Each data displayed in each item of Table 61 is stored in the database 24.

  When the number of semiconductor wafers displayed on the screen exceeds a predetermined number (10 types in FIG. 6), a plurality of screens 60 are provided. The screen 60 has a screen instruction button 52 for instructing screen transition to the previous page, and a screen instruction button 63 for instructing screen transition to the next page. Furthermore, a screen instruction button 64 for instructing screen transition to the screen 40 (menu screen) is provided.

[Unallocated inventory information screen]
FIG. 7 shows an unallocated inventory information screen.
The screen 70 displays a stock of completed / unfinished products that have not been assigned to the customer's order. The screen 70 has a table 71, and the table 71 includes the following items.
No ... Serial wafer serial number displayed on the screen Customer Part number ... Product number assigned to each semiconductor wafer Unordered product / semi-finished product inventory ... Number of unfinished products in stock for each processing step Temporary hold quantity ... Number of orders by customer Input unit 71a for inputting
The breakdown of unordered product / semi-finished product inventory is “S”, “W”, “DW”, “PW”, “HG”, “EP”. “S” means single crystal manufacturing process, “W” means lapping and etching process, “DW” means diffusion process, “PW” means mirror process, “HG” "" Means a hydrogen treatment mirror process, and "EP" means an epitaxial process. Note that the number indicated in the unordered product / semi-finished product inventory is the number when converted into a product. For example, the number indicated by “S” is calculated and displayed based on the weight of the single crystal, the weight per product, and the acquisition rate when converted into a product.
Each data displayed in each item excluding the temporarily pressed quantity in Table 71 is stored in the database 24.

  When the number of semiconductor wafers displayed on the screen exceeds a predetermined number (10 types in FIG. 7), the screen 70 is provided with a plurality of pages. The screen 70 has a screen instruction button 72 for instructing screen transition to the previous page, and a screen instruction button 73 for instructing screen transition to the next page. Further, a screen instruction button 74 for instructing screen transition to the screen 40 (menu screen) is provided. Moreover, it has the execution button 75 for transmitting the order number input into the input part 71a to the producer side.

[Derived product inventory information screen]
FIG. 8 is a diagram showing a derivative product inventory information screen.
On the screen 80, information on derivative products is displayed. Derivatives are inventories generated at the shipping stage. For example, this includes products that have been canceled by customers, fractional products that are less than the number of cases accommodated, and the like. The screen 80 has a table 81, and the table 81 includes the following items.
No… Serial number of semiconductor wafer displayed on the screen Customer Part number… Product number assigned to each semiconductor wafer Amount of derivative product… Reason for the number of derivative products in stock… Reason for occurrence of derivative products Is not available for immediate delivery (×).
Temporary press quantity: Input unit 81a for the customer to input the number of orders
Each data displayed in each item excluding the temporarily pressed quantity in Table 81 is stored in the database 24.

  When the number of types of semiconductor wafers displayed on the screen exceeds a predetermined number (10 types in FIG. 8), a plurality of pages of screen 80 are provided. The screen 80 has a screen instruction button 82 for instructing screen transition to the previous page, and a screen instruction button 83 for instructing screen transition to the next page. Furthermore, a screen instruction button 84 for instructing screen transition to the screen 40 (menu screen) is provided. Moreover, it has the execution button 85 for transmitting the order quantity input into the input part 81a to the producer side.

  Next, the operation of this embodiment will be described.

  When the customer side terminal device 11 accesses the information disclosure server 22, the screen data of the screen 30 is transferred from the information disclosure server 22 to the customer side terminal device 11 via the Internet 5. Then, the screen 30 is displayed on the display device of the customer terminal device 11.

  When the customer inputs his / her system ID and password to the input units 31 and 32 of the screen 30 and clicks the execution button 33, the input system ID and password data is transferred from the customer side terminal device 11 to the information disclosure server 22. Are transferred via the Internet 5. When the consistency of these data is confirmed by the information disclosure server 22, the screen data of the screen 40 is transferred from the information disclosure server 22 to the customer side terminal device 11 via the Internet 5. Then, the screen 40 is displayed on the display unit of the customer terminal device 11.

  For example, when the customer clicks the screen instruction button 41 on the screen 40, a screen information transfer command for instructing transfer of the screen 50 is transferred from the customer side terminal device 11 to the information disclosure server 22 via the Internet 5. The information disclosure server 22 searches the database 24 for various data corresponding to the system ID and displayed on the screen 50, and generates screen data of the screen 50. The generated screen data of the screen 50 is transferred from the information disclosure server 22 to the customer side terminal device 11 via the Internet 5. Then, the screen 50 is displayed on the display device of the customer terminal device 11.

  The screen transition from the screen 40 to the screens 60, 70, 80, the screen transition from the screen 50 to the screens 70, 80, and the screen transition from the screen 40 to the next screen or the previous screen of each screen 50, 60, 70, 80. This is performed in the same manner as the screen transition to the screen 50. That is, when the screen information transfer command is transferred from the customer side terminal device 11 to the information disclosure server 22, screen data corresponding to the screen information transfer command is generated by the information disclosure server 22, and the customer side terminal device is generated from the information disclosure server 22 Each screen is displayed on the display device of the customer side terminal device 11 by transferring the screen data to 11.

Up to this point, the display of the information of the semiconductor wafer on the display device of the customer side terminal device 11 has been described. However, in the present embodiment, the order of the semiconductor wafer can also be made from the customer side terminal device 11.
When the customer inputs the order quantity into the input unit 71a of the screen 70 and clicks the execution button 75, the order quantity data is transferred from the customer terminal device 11 to the mail server 23 via the Internet 5 as an e-mail. This electronic mail is stored in the mail server 23. When the mail server 23 is accessed by the producer side terminal device 21, the content of the email, that is, the order quantity is displayed on the display device of the producer side terminal device 21. Therefore, the producer can confirm the order quantity. In response to the contents of this e-mail, the producer instructs the factory to put the unfinished product to be stocked on the production line again.

  Similarly, when the customer inputs the order quantity into the input unit 81a of the screen 80 and clicks the execution button 85, the order quantity data is transferred from the customer side terminal device 11 to the mail server 23 via the Internet 5 as an e-mail. Is done. This electronic mail is stored in the mail server 23. The producer instructs the factory to ship the finished product in stock according to the contents of the mail.

  According to this embodiment, the producer can disclose the production progress information of the ordered product to the customer via the customer side terminal device. Furthermore, the producer can disclose the latest stock information of the finished product / unfinished product to the customer via the customer side terminal device. From the customer's point of view, you can check the inventory of finished and unfinished products at any time. In addition, the customer can place an order while checking the stock of the semiconductor wafer. From the above, it can be said that inventory sales are promoted more than the conventional method of regularly disclosing the inventory list.

FIG. 1 is a system configuration diagram according to the present embodiment. FIG. 2 is a diagram showing an example of screen transition and each screen in the present embodiment. FIG. 3 shows a login screen. FIG. 4 is a diagram showing a menu screen. FIG. 5 is a diagram showing a production / inventory / device information screen. FIG. 6 is a diagram showing a process progress / delivery date information screen. FIG. 7 shows an unallocated inventory information screen. FIG. 8 is a diagram showing a derivative product inventory information screen.

Explanation of symbols

5 Internet 11 Customer-side terminal device 21 Producer-side terminal device 22 Information disclosure server 23 Mail server 24 Database

Claims (3)

In a semiconductor wafer manufacturing information disclosure system for displaying information on a semiconductor wafer formed through a plurality of processing steps on a customer side terminal device,
Storage means for storing, for each processing step, information on the number of products for which processing has been completed and information on the number of products in progress for processing;
An information disclosure server that generates screen information including the number information for each processing step based on the number information of the storage means,
The customer side terminal device and the information disclosure server are communicably connected by a communication means,
When a predetermined operation is performed at the customer side terminal device, a screen information transfer command is transferred from the customer side terminal device to the information disclosure server, and screen information corresponding to the screen information transfer command is generated at the information disclosure server, and the information disclosure server The semiconductor wafer manufacturing information disclosure system is characterized in that screen information is transferred from the customer terminal device to the customer terminal device, and the product number information for each processing step is displayed on the customer terminal device. 2. The semiconductor wafer manufacturing information disclosure system according to claim 1, wherein the storage means stores product quantity information for semiconductor wafers not assigned to customer orders. Furthermore, it has a producer side terminal device and a mail server,
The customer side terminal device, the producer side terminal device and the mail server are communicably connected by a communication means,
When an order quantity is input at a predetermined location on the screen while the screen based on the screen information transferred from the information disclosure server is displayed on the customer side terminal device, the order quantity information is transferred to the mail server. 3. The semiconductor wafer manufacturing information disclosure system according to claim 2, wherein the stored order quantity information is displayed on the producer-side terminal device when it is stored and accessed by the producer-side terminal device to the mail server. .

Images