JP2005031426A - Glass mask for exposure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass mask for exposure with which a substrate can be exposed to a plurality of patterns by a single exposure even when the pattern is large in size and therefore, the cost of exposure can be reduced. <P>SOLUTION: A plurality of glass masks 14 each having an exposure pattern 12 formed thereon are connected and fixed while the patterns 12 are positioned so as to obtain the glass mask having the plurality of patterns 12 as a whole. By using the mask, a substrate can be exposed to the plurality of the patterns 12 by a single exposure. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is a technique relating to a glass mask for exposure.
[0002]
[Prior art]
As an exposure glass mask used in an exposure apparatus for manufacturing a semiconductor, a mask in which a plurality of patterns are formed on a single exposure glass mask is used (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 11-38595 [0004]
[Problems to be solved by the invention]
If one pattern is small like a semiconductor, a plurality of patterns can be formed on one exposure glass mask, but one exposure pattern becomes large, for example, for manufacturing a large plasma display panel. In the glass mask for exposure, there is a case where it is a limit in size to form one pattern on one glass mask for exposure. For this reason, in such a case, one pattern is exposed on the substrate in one exposure, and there is a problem that the cost of exposure increases.
[0005]
Therefore, the present invention provides a glass mask for exposure that can expose a plurality of patterns on a substrate in one exposure even if the pattern is large, and as a result, can reduce the cost of exposure. The purpose is to provide.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the invention according to claim 1 is formed by connecting and fixing a plurality of glass mask bodies each having an exposure pattern formed in a state where the patterns are positioned with respect to each other. It is a feature.
[0007]
In this way, a plurality of glass mask bodies each having an exposure pattern formed thereon are connected and fixed in a state where the patterns are positioned with each other, thereby having a plurality of patterns as a whole. Therefore, by using this, a plurality of patterns can be exposed on the substrate in one exposure.
[0008]
The invention according to claim 2 is characterized in that, in the invention according to claim 1, the plurality of glass mask bodies are connected to each other through a glass connecting member.
[0009]
Thus, since several glass mask bodies are connected through the connection member, these glass mask bodies are mutually permitted after allowing the whole shift | offset | difference of the glass mask bodies produced when positioning patterns. Can be fixed. And since a connection member is glass, it will deform | transform like a glass mask body with respect to a temperature change etc., and it deform | transforms favorably, without applying an excessive force.
[0010]
The invention according to claim 3 is the invention according to claim 2, wherein the connecting member is provided at the position of the facing edge on the mutually facing side of the plurality of glass mask bodies along the facing edge. It has a connection member and a side edge part connection member provided along the side edge part at the position of the side edge part on both sides in the extending direction of the opposing edge part.
[0011]
In this way, the connecting member is provided with the opposing edge connecting member provided along the opposing edge at the position of the opposing edge of the plurality of glass mask bodies, and the side edge on both sides in the extending direction of the opposing edge. Since it has the side edge part connection member provided along a side edge part in a position, a several glass mask body can be reliably connected with the minimum connection member.
[0012]
The invention according to claim 4 is characterized in that, in the invention according to claim 2, the whole of the plurality of glass mask bodies is provided in an inner range of one of the connecting members.
[0013]
Thus, since the whole several glass mask body is provided in the inner side range of one connection member, positioning fixation of the some glass mask body with respect to a connection member becomes easy.
[0014]
The invention according to claim 5 is characterized in that, in the invention according to any one of claims 1 to 4, a metal reinforcing member is provided on the outer edge.
[0015]
Thus, since the metal reinforcing member is provided on the outer edge, the strength can be improved.
[0016]
The invention according to claim 6 is characterized in that, in the invention according to claim 5, the reinforcing member is provided so as to surround the entire outer periphery.
[0017]
Thus, since the reinforcing member is provided so as to surround the entire outer periphery, the overall strength can be reliably improved.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
The glass mask for exposure of 1st Embodiment of this invention is demonstrated below with reference to FIG. 1 and FIG.
[0019]
The glass mask 11 for exposure of 1st Embodiment has the glass mask body 14 which is a plurality of specifically two emulsion masks each having the pattern formation part 13 in which the pattern 12 for exposure is formed. The plurality of glass mask bodies 14 are arranged on the same plane, and connected and fixed in a state where the patterns 12 are positioned. In FIG. 1, these glass mask bodies 14 are in a state in which the respective pattern forming portions 13 are directed downward (back side of the paper surface).
[0020]
Each of these glass mask bodies 14 is a single glass mask in which a pattern forming portion 13 is formed in a predetermined inner range of a surface 17 on one side in the thickness direction of a rectangular glass plate 16, and pattern formation is performed. A predetermined pattern 12 is formed on the portion 13. Here, these glass mask bodies 14 have basically the same outer shape, and for example, the same patterns 12 are formed.
[0021]
When the glass mask bodies 14 are in a state where the patterns 12 are positioned as described above, the glass mask bodies 14 are substantially coincided with each other in the length direction with a slight gap therebetween and the length directions being substantially parallel to each other. In such a state, the glass mask body 14 is connected via a plurality of glass connecting members 21 and 22.
[0022]
One is the direction in which the opposing edge 24 extends in the position of the opposing edge 24 on the opposite side of the two glass mask bodies 14, in other words, the direction orthogonal to the connecting direction of the two glass mask bodies 14. It is set as the opposing edge part connection member 21 provided so that it may extend along.
[0023]
Further, the remaining two are the extending directions of the side edges 25 at the positions of the side edges (edges) 25 on both sides in the extending direction of the facing edge 24. In other words, the two glass mask bodies 14 It is set as the side edge part connection member 22 provided so that it may each extend along a connection direction.
[0024]
Of course, no connecting member is provided at the edge 26 on the opposite side of the opposite edge 24.
[0025]
Here, the side edge connecting member 22 is provided over substantially the entire length in the connecting direction of the two glass mask bodies 14, and the opposing edge connecting member 21 is substantially the entire width between these side edge connecting members 22. It is provided over. All the connecting members 21 and 22 are provided only on the surface on the opposite side to the surface on which the pattern forming portion 13 of the glass mask body 14 is formed, that is, on the upper surface 17 on the upper side (front side in FIG. 1). It is not provided on the side or bottom surface. Further, all the connecting members 21 and 22 are bonded and fixed to the glass mask body 14 by, for example, bonding with an adhesive.
[0026]
The two glass mask bodies 14 connected and fixed by the connecting members 21 and 22 are made of metal reinforcing members on both side edge portions 25 on the side where the side edge connecting member 22 is provided. 27 is provided. As shown in FIG. 2, these reinforcing members 27 have a U-shaped cross section perpendicular to the length direction. The glass mask body 14 and the side edge connecting member 22 are fitted from the U-shaped opening side. If necessary, they can be attached to these by being bonded with an adhesive or screwed. Specifically, the reinforcing member 27 includes a lower plate portion 28 that contacts the lower surface of the glass mask body 14, a side plate portion 29 that contacts the side surfaces of the glass mask body 14 and the side edge connecting member 22, and a side edge connecting member. 22 has an upper plate portion 30 that is in contact with the upper surface of 22, and a reinforcing standing plate portion 31 that is erected perpendicularly to the upper plate portion 30. The reinforcing member 27 is provided only on the side edge 25 where the side edge connecting member 22 is provided.
[0027]
According to the glass mask 11 for exposure of 1st Embodiment described above, the several glass mask body 14 in which the pattern 12 for exposure was formed in each is connected and fixed in the state which mutually positioned pattern 12 mutually. As a result, a plurality of patterns 12 are provided as a whole. Therefore, by using this, a plurality of patterns 12 can be exposed on the substrate in one exposure. Therefore, even when the pattern 12 is large and only one portion can be formed on one glass mask body 14, an exposure glass mask 11 having a plurality of patterns 12 can be obtained, and one exposure can be performed. A plurality of patterns can be exposed on the substrate, and as a result, the cost of exposure can be reduced.
[0028]
In addition, since the plurality of glass mask bodies 14 are connected to each other via the connecting members 21 and 22, the glass mask bodies 14 are allowed to be displaced from each other, and the glass mask bodies 14 are allowed to be displaced. The mask bodies 14 can be fixed. In addition, since the connecting members 21 and 22 are made of glass, they are deformed in the same manner as the glass mask body 14 with respect to temperature changes and the like, and are deformed satisfactorily without applying excessive force.
[0029]
Furthermore, the connecting member is provided on the opposite edge connecting member 21 provided along the opposing edge 24 at the position of the opposing edge 24 of the plurality of glass mask bodies 14, and the sides on both sides in the extending direction of the opposing edge 24. Since it has the side edge part connection member 22 each provided along the side edge part 25 in the position of the edge part 25, the several glass mask body 14 can be connected reliably with the minimum connection member.
[0030]
In addition, since the metal reinforcing member 27 is provided on the outer side edge portion 25, the strength can be improved.
[0031]
An exposure glass mask according to a second embodiment of the present invention will be described below with reference to FIG. 3 focusing on the differences from the first embodiment. In addition, the same code | symbol is attached | subjected to the part similar to 1st Embodiment, and the description is abbreviate | omitted.
[0032]
In the second embodiment, the opposed edge connecting member 21 is not provided in the first embodiment, and a plurality of specifically, only two side edge connecting members 22 are provided, and a plurality of specifically, two glass masks. The body 14 is connected and fixed in a state where the patterns 12 are positioned. Specifically, the two side edge connecting members 22 of the second embodiment are in the vicinity of the side edge 25 on both sides in the extending direction of the opposed edge 24 and slightly inside the side edge 25. It is provided in the position shifted so as to extend along the extending direction of the side edge 25. Moreover, these side edge connecting members 22 are short in length provided only in the vicinity of the opposing edge 24.
[0033]
Further, in the second embodiment, a metal reinforcement having a frame shape so as to be provided on the entire circumference, that is, the side edge 25 and the edge 26 of the two glass mask bodies 14 connected by the side edge connecting member 22. A member 33 is provided. In the reinforcing member 33 of this embodiment, four divided bodies 34 having a U-shaped cross-section perpendicular to the length direction are fitted to corresponding edges of the glass mask body 14 from the U-shaped opening side. At the same time, the adjacent objects are connected by screws or the like to form a square frame. In this case, the side edge connecting member 22 is not fitted into the reinforcing member 33 and is disposed on the inner side of the reinforcing member 33.
[0034]
In such a glass mask for exposure 11 of the second embodiment, since the reinforcing member 33 is provided so as to surround the entire outer periphery, the overall strength can be reliably improved.
[0035]
An exposure glass mask according to a third embodiment of the present invention will be described below with reference to FIG. 4 focusing on the differences from the first embodiment. In addition, the same code | symbol is attached | subjected to the part similar to 1st Embodiment, and the description is abbreviate | omitted.
[0036]
In the third embodiment, a plurality of glass connecting members 36 that specifically connect and fix two glass mask bodies 14 have all the glass mask bodies 14 in the inner range (inner range in plan view). It has a large area to be provided. That is, the two glass mask bodies 14 are fixedly connected to each other by being fixed to one glass connecting member 36 in a state where the patterns 12 are positioned with each other. In FIG. 4, these glass mask bodies 14 are arranged on the upper side (the front side in the drawing) of the connecting member 36. Moreover, since the pattern formation part 13 of the glass mask body 14 is arrange | positioned on the opposite side with respect to the connection member 36, the glass mask body 14 is in the state which orient | assigned each pattern formation part 13 in FIG. . Here, as shown by hatching in FIG. 4, each of the glass mask bodies 14 is outside the pattern forming portion 13, and the side edge portions 25 and the edge portions 26 on both sides excluding the opposite edge portion 24 are made of an adhesive or the like. It will be joined to the connecting member 36 by adhesion.
[0037]
In addition, if the glass mask body 14 exists in the inner side range of the connection member 36, you may make it the side edge part 25 and the edge part 26 of the glass mask body 14 overlap with the edge part of the connection member 36, for example. Moreover, it is good also considering the inner side range from the adhesion part of the glass mask body 14 in the connection member 36 as a hole.
[0038]
In the exposure glass mask 11 according to the third embodiment, since the plurality of glass mask bodies 14 are entirely provided in the inner range of one connecting member 36, the plurality of glass mask bodies 14 with respect to the connecting member 36 are arranged. Positioning and fixing become easy.
[0039]
In the first to third embodiments described above, the case where two glass mask bodies 14 are connected has been described as an example. However, three or more glass mask bodies 14 can be connected.
[0040]
【The invention's effect】
As described above in detail, according to the invention according to claim 1, a plurality of glass mask bodies each formed with an exposure pattern are connected and fixed in a state where the patterns are positioned with respect to each other. Thus, it has a plurality of patterns as a whole. Therefore, by using this, a plurality of patterns can be exposed on the substrate in one exposure. Therefore, even if the pattern is large, a plurality of patterns can be exposed on the substrate in one exposure, so that the cost of exposure can be reduced.
[0041]
According to the invention which concerns on Claim 2, since several glass mask bodies are connected via the connection member, after permitting the whole shift | offset | difference of the glass mask bodies which arises when positioning patterns. These glass mask bodies can be fixed to each other. And since a connection member is glass, it will deform | transform like a glass mask body with respect to a temperature change etc., and it deform | transforms favorably, without applying an excessive force.
[0042]
According to the invention which concerns on Claim 3, a connection member is the opposing edge part connection member provided along the opposing edge part in the position of the opposing edge part of several glass mask bodies, and both sides in the extension direction of an opposing edge part Therefore, the plurality of glass mask bodies can be reliably connected with the minimum number of connecting members.
[0043]
According to the invention which concerns on Claim 4, since the whole of several glass mask body is provided in the inner side range of one connection member, positioning fixation of the several glass mask body with respect to a connection member becomes easy.
[0044]
According to the invention which concerns on Claim 5, since the metal reinforcement member is provided in the outer edge part, intensity | strength can be improved.
[0045]
According to the invention which concerns on Claim 6, since the reinforcement member is provided so that the whole outer periphery may be enclosed, the whole intensity | strength can be improved reliably.
[Brief description of the drawings]
FIG. 1 is a plan view showing a glass mask for exposure according to a first embodiment of the present invention.
FIG. 2 is a partially enlarged perspective view showing the glass mask for exposure according to the first embodiment of the present invention.
FIG. 3 is a plan view showing a glass mask for exposure according to a second embodiment of the present invention.
FIG. 4 is a plan view showing a glass mask for exposure according to a third embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Glass mask for exposure 12 Pattern 14 Glass mask body 21 Opposing edge connection member (connection member)
22 Side edge connection member (connection member)
24 Opposing edge 25 Side edge 27, 33 Reinforcing member 36 Connecting member

Claims (6)

An exposure glass mask comprising: a plurality of glass mask bodies each having an exposure pattern formed thereon connected and fixed in a state where the patterns are positioned with respect to each other. The glass mask for exposure according to claim 1, wherein the plurality of glass mask bodies are connected to each other through a glass connecting member. The connecting member is on both sides in the extending direction of the opposing edge, and the opposing edge connecting member provided along the opposing edge at the position of the opposing edge on the mutually opposing side of the plurality of glass mask bodies. The glass mask for exposure according to claim 2, further comprising a side edge connecting member provided along the side edge at the position of the side edge. 3. The glass mask for exposure according to claim 2, wherein the whole of the plurality of glass mask bodies is provided in an inner range of the one connecting member. The glass mask for exposure according to any one of claims 1 to 4, wherein a metal reinforcing member is provided on an outer edge portion. 6. The glass mask for exposure according to claim 5, wherein the reinforcing member is provided so as to surround the entire outer periphery.

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