JP2005017766A5 - - Google Patents
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- Publication number
- JP2005017766A5 JP2005017766A5 JP2003183299A JP2003183299A JP2005017766A5 JP 2005017766 A5 JP2005017766 A5 JP 2005017766A5 JP 2003183299 A JP2003183299 A JP 2003183299A JP 2003183299 A JP2003183299 A JP 2003183299A JP 2005017766 A5 JP2005017766 A5 JP 2005017766A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- component
- butyl
- tert
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003183299A JP4230837B2 (ja) | 2003-06-26 | 2003-06-26 | 化学増幅型ポジ型ホトレジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003183299A JP4230837B2 (ja) | 2003-06-26 | 2003-06-26 | 化学増幅型ポジ型ホトレジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005017766A JP2005017766A (ja) | 2005-01-20 |
| JP2005017766A5 true JP2005017766A5 (enExample) | 2006-11-09 |
| JP4230837B2 JP4230837B2 (ja) | 2009-02-25 |
Family
ID=34183440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003183299A Expired - Lifetime JP4230837B2 (ja) | 2003-06-26 | 2003-06-26 | 化学増幅型ポジ型ホトレジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4230837B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101492403B1 (ko) * | 2007-09-12 | 2015-02-13 | 주식회사 동진쎄미켐 | 용해촉진제 및 이를 포함하는 포토레지스트 조성물 |
-
2003
- 2003-06-26 JP JP2003183299A patent/JP4230837B2/ja not_active Expired - Lifetime