JP2005017766A5 - - Google Patents

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Publication number
JP2005017766A5
JP2005017766A5 JP2003183299A JP2003183299A JP2005017766A5 JP 2005017766 A5 JP2005017766 A5 JP 2005017766A5 JP 2003183299 A JP2003183299 A JP 2003183299A JP 2003183299 A JP2003183299 A JP 2003183299A JP 2005017766 A5 JP2005017766 A5 JP 2005017766A5
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JP
Japan
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group
component
butyl
tert
mass
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JP2003183299A
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English (en)
Japanese (ja)
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JP2005017766A (ja
JP4230837B2 (ja
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Priority to JP2003183299A priority Critical patent/JP4230837B2/ja
Priority claimed from JP2003183299A external-priority patent/JP4230837B2/ja
Publication of JP2005017766A publication Critical patent/JP2005017766A/ja
Publication of JP2005017766A5 publication Critical patent/JP2005017766A5/ja
Application granted granted Critical
Publication of JP4230837B2 publication Critical patent/JP4230837B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003183299A 2003-06-26 2003-06-26 化学増幅型ポジ型ホトレジスト組成物 Expired - Lifetime JP4230837B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003183299A JP4230837B2 (ja) 2003-06-26 2003-06-26 化学増幅型ポジ型ホトレジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003183299A JP4230837B2 (ja) 2003-06-26 2003-06-26 化学増幅型ポジ型ホトレジスト組成物

Publications (3)

Publication Number Publication Date
JP2005017766A JP2005017766A (ja) 2005-01-20
JP2005017766A5 true JP2005017766A5 (enrdf_load_stackoverflow) 2006-11-09
JP4230837B2 JP4230837B2 (ja) 2009-02-25

Family

ID=34183440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003183299A Expired - Lifetime JP4230837B2 (ja) 2003-06-26 2003-06-26 化学増幅型ポジ型ホトレジスト組成物

Country Status (1)

Country Link
JP (1) JP4230837B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101492403B1 (ko) * 2007-09-12 2015-02-13 주식회사 동진쎄미켐 용해촉진제 및 이를 포함하는 포토레지스트 조성물

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