JP2004351260A - Droplet discharging device, and droplet discharging method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet discharging device and a droplet discharging method by which the heating of a discharge head can be performed with low energy in an ink jet apparatus where a liquid body of high viscosity such as lubricating oil and a resin is discharged. <P>SOLUTION: The droplet discharging device is provided with: a discharge head 34 having a cavity storing a liquid body, a nozzle communicated with the cavity and a discharging means for discharging the liquid body stored in the cavity; and a liquid body tank 35 storing the liquid body for feeding the liquid body to the discharge head 34. The device has: a heating means provided on the discharge head; a chamber 38 provided at a movable position in the discharge head 34; and a temperature control means CONT controlling the temperature at the inside of the chamber 38 to the prescribed one. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a droplet discharge device and a droplet discharge method.
[0002]
[Prior art]
2. Description of the Related Art In recent years, an ink jet method (droplet discharging method) has been known as a method for forming a wiring pattern or the like. The ink-jet method is a printing technique well-known in a so-called ink-jet printer, in which droplets of material ink filled in a discharge head of an ink-jet device (droplet discharge device) are discharged from a discharge head onto a substrate, It is to fix. According to such an ink jet method, since the droplets of the material ink can be accurately ejected to a fine region, the material ink can be directly fixed to a desired region without performing photolithography. Therefore, no waste of material occurs, the manufacturing cost can be reduced, and this is a very rational method.
[0003]
Recently, an ink jet apparatus for discharging a high-viscosity liquid (liquid) such as lubricating oil or resin has been proposed. In such an ink-jet apparatus, a heating means is provided in a portion where the high-viscosity liquid flows, for example, a discharge head or the like, and the high-viscosity liquid is heated to reduce the viscosity (for example, Patent Document 1). reference).
[0004]
[Patent Document 1]
JP-A-2003-01790 [0005]
[Problems to be solved by the invention]
By the way, in the ink jet apparatus proposed in the above-mentioned Patent Document 1, the heat generated by the heating means is gradually transferred to the entire ejection head, and therefore, the heating of the ejection head requires a long time and consumes a large amount of energy. There was a problem. Further, there is a problem that a large amount of energy is consumed for heating the ejection head even when the drawing operation is stopped.
Furthermore, when filling the ink into the ejection head (suction type), energy for heating not only the ejection head but also the ink to be filled in the ejection head and the ink discarded due to the suction is required. Was. In this case, if the ink is not heated for a long time, a low-temperature and high-viscosity ink flows into the ejection head, causing a defective filling, and further causing a defective ejection.
[0006]
The present invention has been made in view of such circumstances, and in an ink jet apparatus that discharges a high-viscosity liquid material such as a lubricating oil or a resin, a droplet discharge that can heat a discharge head with low energy. It is an object to provide an apparatus and a droplet discharging method.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present invention employs the following solutions.
That is, the droplet discharge device of the present invention, a discharge head having a cavity for storing the liquid material, a nozzle communicating with the cavity, and a discharge means for discharging the liquid material stored in the cavity from the nozzle, A liquid tank for storing a liquid material for supplying the liquid material to the discharge head, comprising: a heating unit provided on the discharge head; It is characterized by comprising a chamber provided, and temperature control means for controlling the inside of the chamber to a predetermined temperature.
Here, the liquid material means a high-viscosity liquid such as a lubricating oil, a resin, and a liquid crystal.
Further, the heating means heats the ejection head, and means, for example, an electric heater or the like.
Further, the chamber is for accommodating the ejection head, and has a configuration having a part of a transfer device for transferring the ejection head. Further, the chamber has a heat insulating structure.
Further, the temperature control means controls the inside of the chamber to a predetermined temperature based on a measurement result of a temperature measuring means such as a temperature sensor provided in the chamber. Further, the amount of electric power supplied to the heating means is controlled based on the measurement result.
According to the present invention, the inside of the chamber is controlled to a predetermined temperature by the temperature control means. Further, the transfer device carries the discharge head into the chamber, so that the discharge head is stored in the chamber controlled to a predetermined temperature. Here, the heating means heats the ejection head, thereby reducing the viscosity of the liquid material in the ejection head. Further, the transport device carries the discharge head out of the chamber and drives the discharge means of the discharge head on the substrate, so that the liquid material having reduced viscosity as described above is discharged from the nozzle.
As described above, the heating unit heats the ejection head in a state where the ejection head is housed in the chamber controlled to the predetermined temperature, so that the heating can be performed in a short time.
Further, even when the heating of the ejection head is stopped after the heating of the ejection head, the temperature in the chamber is controlled to a predetermined value, so that the temperature of the ejection head can be maintained.
Therefore, it is possible to heat or keep the ejection head at a predetermined temperature with a small amount of energy. Further, since the liquid material in the discharge head is discharged in a state of reduced viscosity, it is possible to maintain a high discharge accuracy.
[0008]
Further, the present invention is the above-described droplet discharging apparatus, wherein the chamber further includes a heating unit for heating the inside of the chamber.
According to the present invention, the same effects as those of the above-described droplet discharge device can be obtained, and further, since the chamber is provided with a heating unit, it is possible to satisfactorily heat the discharge head housed in the chamber. .
[0009]
According to the present invention, there is provided the droplet discharge device described above, wherein the chamber further includes capping means for hermetically covering a nozzle of the discharge head.
Here, the capping means is made of a sealing member made of rubber or the like, and covers the nozzles of the ejection head in an airtight manner.
According to the present invention, the same effects as those of the above-described droplet discharge device can be obtained, and the nozzle of the discharge head can be sealed by the capping unit. Further, since the capping means is disposed in the temperature-controlled chamber, the nozzle can be sealed in the same atmosphere as the inside of the chamber.
[0010]
Further, the present invention is the above-described droplet discharge apparatus, wherein the capping means further includes a pressure reducing means for reducing the pressure inside the discharge head.
Here, the decompression means is to reduce the pressure in the discharge head, thereby causing the liquid stored in the liquid tank to flow toward the discharge head, thereby filling the discharge head with the liquid.
According to the present invention, it is possible to achieve the same effects as those of the above-described droplet discharge device, and to fill the discharge head with a liquid material prior to droplet discharge. In addition, since the decompression means is disposed in the temperature-controlled chamber, the liquid material can be smoothly filled in the same atmosphere as the inside of the chamber.
[0011]
According to the present invention, there is provided the droplet discharge device described above, wherein the chamber further includes a recovery unit that performs a nozzle recovery operation.
Here, the recovery means is a means for driving the discharge means to discard the liquid material in the discharge head and then washing the nozzle with a wiper or the like.
According to the present invention, the same effects as those of the droplet discharge device described above can be obtained, and a nozzle recovery operation can be performed when a droplet discharge failure occurs or when a liquid material is hit by trial. Becomes possible. Further, since the recovery means is disposed in the temperature-controlled chamber, the recovery operation of the nozzle can be performed in the same atmosphere as the inside of the chamber.
[0012]
Further, the present invention is the droplet discharge device described above, wherein the chamber has a door portion for making the inside and the outside of the chamber communicated or disconnected, and a door opening and closing means for opening and closing the door portion. Is further provided.
Here, the door opening / closing means operates according to the transport of the ejection head by the transport device. For example, when a discharge head in a state of discharging droplets is carried into the chamber, first, the door opening and closing means opens the door, second, the transfer device transfers the discharge head into the chamber, and third, The door opening / closing means closes the door. As a result, the ejection head is sealed and housed in the chamber. Further, for example, when the ejection head is carried out of the chamber, first, the door opening / closing means opens the door, second, the transport device carries out the ejection head outside the chamber, and third, the door opening / closing means. Closes the door. Thereby, the ejection head is carried out, and the inside of the chamber is closed.
According to the present invention, the same effects as those of the droplet discharge device described above can be obtained, the chamber can be sealed, and the door can be opened and closed according to the loading and unloading of the discharge head. Become.
[0013]
Further, the droplet discharge method of the present invention, a discharge head having a cavity for storing the liquid material, a nozzle communicating with the cavity, and a discharge means for discharging the liquid material stored in the cavity from the nozzle, A liquid material tank for storing the liquid material for supplying the liquid material to the discharge head, a heating means provided on the discharge head, a chamber provided at a position where the discharge head is movable, and a predetermined interior of the chamber. And a temperature control unit for controlling the temperature of the liquid to discharge the liquid, wherein the discharge head waits in the chamber in a state where the liquid is not discharged.
Here, the non-ejection state means a state in which the ejection unit is not driven, for example, a state in which the droplet ejection operation is paused or in a standby state, a state in which the ejection head is filled with a liquid material, and the like. ing.
According to the present invention, it is possible to achieve the same effects as those of the above-described droplet discharge device, and to seal the discharge head in a state where the liquid material is not discharged.
[0014]
Further, the present invention is the droplet discharging method described above, wherein the chamber has a door portion for making the inside and the outside of the chamber into a communication state or a non-communication state, and a door opening and closing means for opening and closing the door portion. The door opening / closing means opens the door portion before the discharge head waits in the chamber, and the chamber houses the discharge head.
According to the present invention, the same effects as those of the above-described droplet discharge method can be obtained, and the inside of the chamber can be kept in a sealed state in advance before the discharge head is made to wait in the chamber. Further, when the ejection head is carried into the chamber, the door opening / closing means opens the door portion, so that the ejection head can be housed in the chamber.
[0015]
Further, the present invention is the droplet discharging method described above, wherein the chamber further comprises capping means for hermetically covering the nozzles of the discharge head, and pressure reducing means for reducing the pressure in the discharge head, wherein the discharge head is provided in the chamber. In the waiting state, the inside of the ejection head is depressurized and filled with the liquid material.
According to the present invention, the same effects as those of the droplet discharging method described above can be obtained, and the liquid can be filled in the discharging head prior to discharging the droplet.
[0016]
Further, the present invention is the droplet discharging method described above, wherein the chamber further includes a recovery unit for performing a nozzle recovery operation, and performs the nozzle recovery operation in a state where the discharge head is on standby in the chamber. It is characterized by the following.
According to the present invention, the same effects as those of the droplet discharge method described above can be obtained, and a nozzle recovery operation can be performed when a droplet discharge failure occurs or when a liquid material is hit by trial. Becomes possible.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail.
FIG. 1 is a diagram showing an embodiment of a droplet discharge device of the present invention.
In FIG. 1, reference numeral 30 denotes a droplet discharge device. The droplet discharge device 30 has a base 31, a substrate moving means 32, a head moving means 33, a discharge head 34, a liquid tank 35, a storage chamber (storage chamber) 38, a control unit CONT (temperature control means), and the like. It is configured.
[0018]
The base 31 is provided with the substrate moving means 32 and the head moving means 33 thereon.
The substrate moving means 32 is provided on the base 31 and has a guide rail 36 arranged along the Y-axis direction. The substrate moving means 32 is configured to move the slider 37 along the guide rail 36 by, for example, a linear motor. The slider 37 is provided with a motor (not shown) for the θ-axis. This motor is, for example, a direct drive motor, and its rotor (not shown) is fixed to the table 39. Under such a configuration, when power is supplied to the motor, the rotor and the table 39 rotate in the θ direction, and the table 39 is indexed (rotated).
[0019]
The table 39 positions and holds the substrate S. That is, the table 39 has a known suction holding means (not shown), and the substrate S is suction-held on the table 39 by operating the suction holding means. The substrate S is accurately positioned and held at a predetermined position on the table 39 by positioning pins (not shown) of the table 39. The table 39 is provided with a discard area 41 for the ejection head 34 to discard or test-punch ink (liquid). The discard area 41 is formed extending in the X-axis direction, and is provided on the rear end side of the table 39.
[0020]
The head moving means 33 includes a pair of stands 33a, 33a erected on the rear side of the base 31, and a traveling path 33b provided on the stands 33a, 33a. They are arranged along the axial direction, that is, the direction perpendicular to the Y-axis direction of the substrate moving means 32. The traveling path 33b is formed with a holding plate 33c passed between the gantry 33a, 33a and a pair of guide rails 33d, 33d provided on the holding plate 33c. A slider 42 for holding the ejection head 34 in the length direction of 33d is movably held. The slider 42 is configured to travel on the guide rails 33d, 33d by operation of a linear motor (not shown) or the like, thereby moving the ejection head 34 in the X-axis direction.
The pair of guide rails 33d, 33d are provided so as to extend in a storage chamber 38, which will be described later, and when the slider 42 travels along the guide rails 33d, 33d, the ejection head is placed in the storage chamber 38. 34 moves. That is, the head moving means 33 has a function as a transfer device for transferring the ejection head 34 into the storage chamber 38.
[0021]
Motors 43, 44, 45, 46 as swing positioning means are connected to the ejection head 34. When the motor 43 is operated, the ejection head 34 moves up and down along the Z axis, and positioning on the Z axis is possible. The Z axis is a direction (vertical direction) orthogonal to the X axis and the Y axis. Further, when the motor 44 is operated, the ejection head 34 swings along the direction β in FIG. 1 to be positioned, and when the motor 45 is operated, the ejection head 34 swings in the γ direction, and the positioning is performed. When the motor 46 is operated, the ejection head 34 swings in the α direction, and can be positioned.
[0022]
As described above, the ejection head 34 can be linearly moved in the Z-axis direction and positioned on the slider 42, and swings along α, β, and γ to be positioned. Therefore, the position or posture of the ink ejection surface of the ejection head 34 with respect to the substrate S on the table 39 side can be accurately controlled.
[0023]
FIGS. 2A and 2B are schematic configuration diagrams for explaining the ejection head 34. FIG.
As shown in FIG. 2A, the ejection head 34 includes, for example, a nozzle plate 12 and a vibration plate 13 made of stainless steel, and the two are joined via a partition member (reservoir plate) 14. A plurality of cavities 15... And a reservoir 16 are formed between the nozzle plate 12 and the vibration plate 13 by a partition member 14, and these cavities 15. I have.
The ejection head 34 is provided with a heater (heating means) 3, and the amount of power supplied to the heater 3 is controlled by the controller CONT.
[0024]
Each cavity 15 and the inside of the reservoir 16 are filled with a liquid material, and a flow path 17 therebetween functions as a supply port for supplying the liquid material from the reservoir 16 to the cavity 15. I have. The nozzle plate 12 has a plurality of hole-shaped nozzles 18 for ejecting the liquid material from the cavities 15 in a state of being arranged vertically and horizontally. On the other hand, a hole 19 that opens into the reservoir 16 is formed in the diaphragm 13, and a liquid tank 35 is connected to the hole 19 via the tube 24 (see FIG. 1).
[0025]
Further, a piezoelectric element (piezo element) 20 is joined to the surface of the vibration plate 13 opposite to the surface facing the cavity 15 as shown in FIG. The piezoelectric element 20 is sandwiched between the pair of electrodes 21 and 21 and is configured to bend so as to protrude outward when energized, and functions as a discharge unit in the present invention.
[0026]
The vibration plate 13 to which the piezoelectric element 20 is bonded in such a configuration flexes outward simultaneously with the piezoelectric element 20, thereby increasing the volume of the cavity 15. Then, the inside of the cavity 15 communicates with the inside of the reservoir 16, and when the liquid material is filled in the reservoir 16, the liquid material corresponding to the increased volume in the cavity 15 flows from the reservoir 16. It flows in via path 17.
When the power supply to the piezoelectric element 20 is released from such a state, both the piezoelectric element 20 and the diaphragm 13 return to their original shapes. Therefore, since the cavity 15 also returns to the original volume, the pressure of the liquid in the cavity 15 increases, and the liquid droplet 22 is discharged from the nozzle 18.
[0027]
The ejection means of the ejection head may be other than the electromechanical transducer using the piezoelectric element (piezo element) 20. For example, a method using an electrothermal transducer as an energy generating element, a charge control type, A continuous system such as a pressurized vibration type, an electrostatic suction system, or a system in which an electromagnetic wave such as a laser is irradiated to generate heat and a liquid material is discharged by the action of the generated heat can also be adopted.
[0028]
Next, returning to FIG. 1, another configuration of the droplet discharge device 30 will be described.
The control unit CONT controls the droplet discharge operation of the discharge head 34, the driving operation of the substrate moving means 32 and the head moving means 33, the power supply to the heater 3, and the like, and also controls the atmosphere in the storage chamber 38 described later. This is to control the temperature to a predetermined value. Further, the amount of power supplied to the heater 3 is controlled based on the measurement result of the temperature sensor provided in the storage chamber 38.
[0029]
The liquid material tank 35 is disposed on one of the pedestals 33a, 33a, and the inside thereof is connected to the discharge head 34 via a pipe (not shown). Further, the liquid material tank 35 is provided with a heater (not shown) inside or outside thereof. This heater is used to heat the stored liquid material. In particular, when the liquid material has high viscosity, the heater lowers the viscosity by heating, and the liquid from the liquid tank 35 to the discharge head 34 is heated. It is intended to facilitate the inflow of the body.
[0030]
Since the gantry 33a supports the traveling path 33b, it is located at a position sufficiently close to the ejection head 34 traveling on the traveling path 33b. Therefore, the tube 24 for sending the liquid material from the liquid material tank 35 to the discharge head 34 is sufficiently shorter than the conventional one, that is, has a length substantially equal to the length of the traveling path 33b.
[0031]
The storage chamber 38 is disposed on the other of the frames 33a, 33a.
The storage chamber 38 has a configuration in which the inside is surrounded by a wall made of a heat insulating material.
As shown in FIG. 3, inside the storage chamber 38, a part of the head moving unit 33, a suction sealing pad (capping unit) 50 that hermetically covers the nozzle 18 of the ejection head 34, and the temperature in the storage chamber 38. A temperature sensor 40 to be measured, a suction pump (decompression means) 51 connected to the suction sealing pad 50, a waste liquid tank 52 connected to the suction pump 51, a liquid material sensor 53 for detecting a liquid material, and a discharge head 34. A wiper (recovery means) 55 for cleaning the nozzle forming surface 18 on which the nozzles 18 are formed, and a liquid receiving section (recovery means) 56 for performing test hitting of the liquid material are provided.
Further, on the wall of the storage chamber 38, an opening / closing door (door part) 58 that connects or disconnects the inside and the outside of the storage chamber 38, and an opening / closing mechanism unit that opens and closes the opening / closing door 58 ( A door opening / closing means) 57 and an external heater (heating means) 59 for heating the storage chamber 38 are provided.
[0032]
The suction / sealing pad 50 is a pad that abuts and covers the nozzle forming surface 18a of the ejection head 34 where the nozzle 18 is formed, and a flexible pipe (not shown) communicating with a hole (not shown) formed in the pad. (Not shown), and a moving mechanism for moving the pad with respect to the ejection head 34 so that the pad is in contact with the pad, and further separating the pad from the pad. The pad is formed of a heat insulating material made of rubber, soft synthetic resin, or the like.
[0033]
The suction pump 51 depressurizes the inside of the discharge head 34 via the suction sealing pad 50 by performing a pressure reducing operation after the pad of the suction sealing pad 50 comes into contact with the nozzle forming surface 18a of the discharge head 34.
[0034]
The liquid material sensor 53 detects a liquid material. As the liquid material sensor 53, a conventionally known sensor is appropriately selected and used according to the type of the liquid material. For example, when the liquid material is non-light-transmitting, a sensor including a light-emitting element and a light-receiving element can be used.
[0035]
That is, a transparent portion is provided in a pipe connecting between the suction pump 51 and the suction sealing pad 50, and the light emitting element and the light receiving element are arranged on both sides of the transparent portion. With this configuration, when the liquid material does not pass through the transparent portion, the light from the light emitting element is received by the light receiving element, so that the liquid material is not detected, and when the liquid material passes through the transparent portion, The light from the light emitting element is blocked by the liquid, and the liquid cannot be received by the light receiving element, so that the liquid is detected.
[0036]
The waste liquid tank 52 is for storing excess liquid flowing out of the discharge head 34 when the pressure inside the discharge head 34 is reduced by the suction pump 51 via the suction sealing pad 50. Here, in the present embodiment, the liquid material sensor 53 is provided between the suction sealing pad 50 and the suction pump 51 as described above. However, depending on the type of the liquid material, the liquid material sensor is provided in the waste liquid tank 52. You may do so. In this case, for example, by detecting the liquid level of the liquid material stored in the waste liquid tank 52 with a level sensor, it may be detected that a certain amount of surplus liquid material has flowed out of the ejection head 34.
[0037]
The wiper 55 cleans the nozzle forming surface 18a by moving against the discharge head 34 and abutting against and rubbing against the discharge head 34. Further, the wiper 55 is provided with a moving mechanism for separating the wiper 55 from the ejection head 34. The wiper 55 is formed of rubber, a soft synthetic resin, or the like.
[0038]
The liquid receiving portion 56 is a portion for performing a test strike of the liquid material. Further, the liquid receiving portion 56 is provided with a moving mechanism for separating the liquid receiving portion 56 from the ejection head 34. The liquid receiving portion 56 is formed by a sponge or the like.
[0039]
The opening / closing door 58 is opened / closed by an opening / closing mechanism (door opening / closing means) 57 when the ejection head 34 is carried into the storage chamber 38 or when the ejection head 34 is carried out from the storage chamber 38. When the opening / closing door 58 is closed, the storage chamber 38 is completely closed.
[0040]
The external heater 59 is provided on the wall of the storage chamber 38 and heats the storage chamber 38 according to the power supply of the control device CONT to increase the temperature inside the storage chamber 38.
[0041]
The suction sealing pad 50, the suction pump 51, the liquid material detection sensor 53, the wiper 55, the liquid receiver 56, the temperature sensor 40, the opening / closing mechanism 57, and the external heater 59 are connected to the control unit CONT. Each operation is controlled by the device CONT.
[0042]
In the above configuration, a heater may be provided in addition to the suction sealing pad 50. In this case, the power supplied to the heater is controlled by the control unit CONT, so that the discharge head 34 can be heated when the discharge head 34 contacts the suction sealing pad 50.
Further, a temperature measuring means such as a temperature sensor may be provided in addition to the suction sealing pad 50. In this case, the controller CONT controls the heater 3 and the external heater 59 based on the measurement result of the temperature sensor, so that the ejection head 34 can be maintained at a predetermined temperature.
[0043]
Next, an example of the droplet discharge method of the present invention will be described based on the operation of the droplet discharge device 30 having such a configuration. In this description, any kind of liquid material is used without any particular limitation.
[0044]
First, the controller CONT supplies power to the external heater 59 based on the measurement result of the temperature sensor 40, and controls and sets the inside of the storage chamber 38 to a predetermined temperature.
The temperature control in the storage chamber 38 by the control device CONT is always performed in the operation described below.
[0045]
Next, prior to discharging the liquid material onto the substrate S, the discharge head 34 is stored in the storage chamber 38 in order to fill the discharge head 34 with the liquid material and remove bubbles and the like remaining inside.
Specifically, the opening / closing mechanism 57 drives the opening / closing door 58 to bring the inside and the outside of the storage chamber 38 into communication, that is, open. In this state, the head moving means 33 conveys the discharge head 34 and stores it in the storage chamber 38. Further, the opening / closing mechanism 57 drives the opening / closing door 58 to bring the inside and the outside of the storage chamber 38 into a non-communication state, that is, a closed state.
[0046]
Next, by controlling the controller CONT, the suction sealing pad 50 is moved, and the pad is brought into contact with the nozzle forming surface 18a of the ejection head 34 to cover it in an airtight manner. Subsequently, the suction pump 51 is operated to depressurize the inside of the discharge head 34 via the suction sealing pad 50. Then, a pressure difference is generated between the inside of the liquid tank 35 and the inside of the discharge head 34 connected to the suction sealing pad 50, whereby the liquid in the liquid tank 35 flows into the discharge head 34, The body is filled.
Further, the control device CONT controls the power supply to the heater 3 based on the temperature in the storage chamber 38 measured by the temperature sensor 40, and heats or keeps the discharge head 34 warm. Thereby, the viscosity of the liquid material in the ejection head 34 is reduced.
[0047]
When the filling of the liquid material into the ejection head 34 by the suction pump 51 is continued, the excess liquid material flows out of the nozzle 18 of the ejection head 34 after the inside of the ejection head 34 is sufficiently filled with the liquid material. Then, the liquid material that has flowed out is detected by the liquid material detection sensor 53, thereby detecting that the liquid material is sufficiently filled in the ejection head. When this detection signal is sent to the control device CONT, the control device CONT receiving this signal stops the operation of the suction pump 51 and stops the flow of the liquid material from the liquid material tank 35 side to the discharge head 34 side. Let it.
[0048]
The liquid material is filled in the discharge head 34 in this way, and after confirming that the liquid material has flowed out of the discharge head 34, the wiper 55 cleans the nozzle forming surface 18a. Therefore, only the liquid material is filled in the discharge head 34, and the preparation for discharging the liquid material is completed.
Note that, here, the liquid material may be subjected to trial hitting in the liquid receiving portion 56.
[0049]
When the liquid material is filled in the discharge head 34 in this way, the discharge head 34 is taken out of the storage chamber 38, returned to a proper position for discharge, and the liquid material is discharged onto the substrate S.
Specifically, the opening / closing mechanism 57 drives the opening / closing door 58 to bring the inside and the outside of the storage chamber 38 into communication, that is, open. In this state, the head moving means 33 conveys the ejection head 34 and arranges it at a regular position for ejection. Further, the opening / closing mechanism 57 drives the opening / closing door 58 to bring the inside and the outside of the storage chamber 38 into a non-communication state, that is, a closed state.
[0050]
In the droplet discharging method using such a droplet discharging device 30, by heating the discharging head 34 in the storage chamber 38 controlled at a predetermined temperature, the discharging head 34 can be heated in a short time. . Therefore, the ejection head 34 can be heated or kept at a predetermined temperature with a small amount of energy. Further, since the liquid material in the discharge head 34 is discharged in a state of reduced viscosity, it is possible to maintain a high discharge accuracy.
[0051]
The operation in the storage chamber 38 is not performed only when the discharge head 34 is filled with the liquid material, and the operation is appropriately performed when the liquid material is not discharged (non-discharge state). May go.
For example, when a discharge failure of the nozzle 18 occurs while the liquid material is being discharged to the substrate S, or when the droplet discharge including the step of transporting the substrate S is on standby, the suction sealing pad 50 is used. By selectively and continuously performing the sealing operation of the nozzle forming surface 18a, the recovery operation by the wiper 55 and the liquid receiving unit 56, and the decompression operation by the suction pump 51, preparation for discharging the liquid material can be performed. Here, the sealing operation, the recovery operation, and the decompression operation are performed in the storage chamber 38 controlled at a predetermined temperature, so that the liquid material can be smoothly filled.
[0052]
In addition, even in the liquid ejection preparation state, the heating of the ejection head 34 by the heater 3 and the measurement of the temperature in the storage chamber 38 by the temperature sensor 40 are performed, so that the temperature of the ejection head 34 is maintained at a predetermined temperature. be able to.
[0053]
Further, in the droplet discharge device, any constituent element can be formed by selecting a liquid material. For example, a metal colloid used as a material for metal wiring of various devices, a resist solution used in various manufacturing processes, a material for forming an organic EL element, a microlens material, a color filter material, and a liquid crystal device (liquid crystal display device) By using various materials such as a liquid crystal material, an alignment film material, and an overcoat material as a liquid material, various elements constituting a device can be formed.
[0054]
Next, as an example of forming such components, an example of manufacturing a liquid crystal display device will be described.
FIG. 4 is a cross-sectional view schematically illustrating a layer configuration of a liquid crystal display device (hereinafter, referred to as “the present liquid crystal panel”) manufactured using the droplet discharge device 30. FIG. 5 is a schematic view of the present liquid crystal panel as viewed from the display surface side. FIG. However, elements unnecessary for the description of the present invention, such as a polarizing plate and a phase difference plate, are omitted. An actual liquid crystal display device includes a polarizing plate and a retardation plate. In addition, the size and number of each component do not reflect the substance.
In the following description, the driving method of the liquid crystal is a passive matrix method for convenience, but another method such as an active matrix method may be used.
[0055]
As shown in FIGS. 4 and 5, in the present liquid crystal panel, a pair of glass substrates, that is, a first substrate 210 and a second substrate 220, which are spaced apart and opposed to each other, are basically interposed via a sealing material 230. A liquid crystal material 241 is provided in a cell 240 surrounded by a sealing material 230 which is bonded and sandwiched between the pair of substrates 210 and 220 to form a display area. The liquid crystal material 241 is provided by discharging the above-described droplet discharge device 30.
[0056]
On the inner surface of the first substrate 210, a large number of striped first electrodes 212 made of a transparent conductive film such as indium tin oxide (hereinafter abbreviated as ITO) are arranged in order from the substrate side, and An alignment film 211 made of a polyimide resin is formed. One end of the first electrodes 212 extends on the substrate outside the sealant 230 to form connection terminals. An alignment film 211 made of a polyimide resin is formed on the first electrodes 212. The orientation film 211 is oriented in a predetermined direction.
On the inner surface of the second substrate 220, a color filter 223 arranged in the order of R (red), G (green), and B (blue) corresponding to the pixel region, in order from the substrate side, is separated by a cell gap. A large number of striped second electrodes 222 formed of a transparent conductive material such as ITO and formed on a position intersecting the first electrodes 212, and an alignment film 221 formed of a polyimide resin are formed. One end of each of the second electrodes 222 extends on the substrate outside the sealant 230 to form a connection terminal. The orientation film 221 is oriented in a predetermined direction.
Further, spacers 242... For keeping the cell gap constant against external pressure are dispersed in the cell 240.
[0057]
In the present liquid crystal panel, a retardation plate and a polarizing plate are provided on the entire outer surface of the first substrate, but illustration and description thereof are omitted.
The present liquid crystal panel is generally manufactured through the steps shown in FIGS. 6A to 6E.
First, as an alignment film forming step, as shown in FIG. 6A, stripe-shaped first electrodes 212 are formed on one surface of a first substrate 210 by photolithography, and further, a display thereon is formed. An alignment film 211 is formed in a region to be a region and is oriented in a predetermined direction. The first electrodes 212 are extended on a substrate outside a sealing material to be formed later so that one terminal becomes a connection terminal.
[0058]
Next, as shown in FIG. 6B, a sealing material forming step, a spacer dispersing step, and a liquid crystal material discharging step are performed.
In the sealing material forming step, an uncured sealing material 230 is formed so as to surround the alignment film 211 using a photocurable resin ink.
In the spacer spraying step, spacers 242 are sprayed on the alignment film 221.
In the liquid crystal material discharging step, the liquid crystal material 240 is discharged using the droplet discharging device 30 described above. Here, the viscosity of the liquid crystal material 240 is reduced by heating the discharge head 34, and the liquid crystal material 240 is discharged without clogging of the nozzles. Further, since the ejection head 34 is fixed to the opening 51a of the mounting plate 51 by the above-described alignment device 100 under the temperature condition when the liquid crystal material 240 is ejected, errors due to thermal expansion of the ejection head 34 are reduced. The liquid crystal material 240 is discharged with a high degree of discharge accuracy without occurrence. Therefore, even if the liquid crystal material 240 is discharged near the uncured sealing material 230, the liquid crystal material 240 does not come into contact with the sealing material 230.
[0059]
Separately, as shown in FIG. 6C, color filters 223, 223... Are formed on one surface of the second substrate 220 although details are omitted, and second electrodes 222. The alignment film 221 is formed thereon, and an alignment film 221 is formed thereon as an alignment film forming step, and the alignment is performed in a predetermined direction. The second electrodes 222 are extended on a substrate outside the sealing material formed on the first substrate so that one terminal becomes a connection terminal.
[0060]
Next, as shown in FIG. 6D, a bonding step is performed. In this step, the first substrate 210 and the second substrate 220 are overlapped and pressure-bonded so that the alignment films 211 and 221 face inward while the first substrate 210 is inverted.
Note that the second substrate 220 may be inverted and pressure-bonded.
[0061]
Next, as shown in FIG. 6E, a sealing material curing step is performed. In this step, light from a high-pressure mercury lamp is irradiated from the outside of the first substrate 210 serving as a display surface through the filter F1, and the uncured sealing material 230 is cured by ultraviolet rays. At this time, if light irradiation and heating are used in combination, curing is further promoted, and complete curing is achieved in a short time.
By performing such a series of steps from FIG. 6A to FIG. 6E, the present liquid crystal panel is completed.
[0062]
As described above, since the liquid crystal material 240 is discharged using the above-described droplet discharge device, the same effects as those of the droplet discharge device described above can be obtained.
[0063]
Next, as an example of forming such components, an example of manufacturing an organic EL device will be described.
FIG. 7 is a side sectional view of an organic EL device in which some components are manufactured by the droplet discharge device. First, a schematic configuration of the organic EL device will be described.
As shown in FIG. 7, the organic EL device 301 includes an organic EL device including a substrate 311, a circuit element portion 321, a pixel electrode 331, a bank portion 341, a light emitting element 351, a cathode 361 (counter electrode), and a sealing substrate 371. A wiring of a flexible substrate (not shown) and a driving IC (not shown) are connected to the EL element 302. The circuit element portion 321 is formed on a substrate 311, and a plurality of pixel electrodes 331 are arranged on the circuit element portion 321. The bank portions 341 are formed in a lattice shape between the pixel electrodes 331, and the light emitting elements 351 are formed in the concave openings 344 formed by the bank portions 341. The cathode 361 is formed on the entire upper surface of the bank portion 341 and the light emitting element 351, and a sealing substrate 371 is stacked on the cathode 361.
[0064]
The manufacturing process of the organic EL device 301 including the organic EL element includes a bank part forming step for forming the bank part 341, a plasma processing step for appropriately forming the light emitting element 351, and a light emitting element formation for forming the light emitting element 351. The method includes a step, a counter electrode forming step of forming the cathode 361, and a sealing step of stacking and sealing the sealing substrate 371 on the cathode 361.
[0065]
The light emitting element forming step is to form the light emitting element 351 by forming the hole injection layer 352 and the light emitting layer 353 on the concave opening 344, that is, on the pixel electrode 331. The hole injection layer forming step and the light emitting layer forming step Is provided. The hole injection layer forming step includes a first discharge step of discharging a first composition (liquid) for forming the hole injection layer 352 onto each pixel electrode 331, and a discharged first composition. And a first drying step of forming a hole injecting layer 352 by drying the second composition (liquid material) for forming the light emitting layer 353. The method includes a second discharging step of discharging the liquid composition upward and a second drying step of forming the light emitting layer 353 by drying the discharged second composition.
[0066]
In the light emitting element forming step, the above-described droplet discharging apparatus is used in a first discharging step in the hole injection layer forming step and a second discharging step in the light emitting layer forming step.
In the manufacture of the organic EL device 301 as well, prior to the ejection for forming each component, bubbles and the like are removed from the inside of the ejection head 34 in advance, so that the material for forming the hole injection layer and the light emission from the ejection head 34 can be obtained. The material for forming the layer can be discharged well. Therefore, the hole injection layer and the light emitting layer can be respectively formed well.
[0067]
Next, an example of an electronic device in which some components are formed by the droplet discharge device will be described.
FIG. 8 is a perspective view showing a mobile phone as an example of such an electronic device. In FIG. 8, reference numeral 1000 denotes a mobile phone main body, and reference numeral 1001 denotes a display unit using the above-mentioned organic EL element (organic EL device 301).
Since the electronic device (mobile phone) shown in FIG. 8 includes the display portion 1001 made of the above-described organic EL element, the cost is reduced, and the components of the display portion 1001 are formed well. It was done. Note that the liquid crystal display device shown in FIGS. 4 and 5 may be employed in place of the organic EL element 301.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a droplet discharge device of the present invention.
FIGS. 2A and 2B are schematic configuration diagrams of an ejection head.
FIG. 3 is a diagram for explaining a main part of the droplet discharge device shown in FIG. 1;
FIG. 4 is a cross-sectional view illustrating a liquid crystal display device manufactured using a droplet discharge device.
FIG. 5 is a plan view showing a liquid crystal display device manufactured using the droplet discharge device.
FIG. 6 is a view schematically showing a manufacturing process of the liquid crystal display device.
FIG. 7 is a side sectional view of the organic EL device.
FIG. 8 is a perspective view illustrating an example of an electronic device.
[Explanation of Symbols 0]
3 ... heater (heating means), 15 ... cavity, 18 ... nozzle, 20 ... piezoelectric element (discharge means), 30 ... droplet discharge device, 34 ... discharge head, 35 ... liquid tank, 38 ... storage chamber (chamber) .., 50... Suction suction pad (capping means), 51. Suction pump (decompression means), 55. ... Opening / closing door (door part), 59 ... External heater (heating means), CONT ... Control device (temperature control means)

Claims (10)

A discharge head having a cavity for storing the liquid material, a nozzle communicating with the cavity, and discharge means for discharging the liquid material stored in the cavity from the nozzle, and supplying the liquid material to the discharge head And a liquid material tank for storing a liquid material, for a droplet discharge device comprising:
Heating means provided on the ejection head,
A chamber provided at a position where the ejection head can move,
Temperature control means for controlling the inside of the chamber to a predetermined temperature,
A droplet discharge device comprising: 2. The apparatus according to claim 1, wherein the chamber further includes a heating unit configured to heat the inside of the chamber. The droplet discharge apparatus according to claim 1, wherein the chamber further includes a capping unit that hermetically covers the nozzle of the discharge head. 4. The apparatus according to claim 3, wherein the capping unit further includes a pressure reducing unit configured to reduce the pressure inside the discharge head. 5. The apparatus according to claim 1, wherein the chamber further includes a recovery unit that performs a recovery operation of the nozzle. The said chamber is further provided with the door part for making the inside and the exterior of the said chamber a communication state or a non-communication state, and the door opening / closing means which opens and closes the said door part, The Claims characterized by the above-mentioned. Item 6. A droplet discharge device according to any one of Items 5. A discharge head having a cavity for storing the liquid material, a nozzle communicating with the cavity, and discharge means for discharging the liquid material stored in the cavity from the nozzle, and supplying the liquid material to the discharge head Tank for storing a liquid material for heating, a heating means provided in the discharge head, a chamber provided in a position where the discharge head is movable, and a temperature control for controlling the inside of the chamber to a predetermined temperature. Means, and a method for discharging the liquid material by a droplet discharge device comprising:
A droplet discharge method, wherein the discharge head waits in the chamber when the liquid is not discharged. The chamber further includes a door unit for bringing the inside and the outside of the chamber into a communicating state or a non-communicating state, and a door opening / closing unit that opens and closes the door unit,
8. The droplet discharging method according to claim 7, wherein the door opening / closing means opens the door portion before the discharge head waits in the chamber, and the chamber houses the discharge head. The chamber further includes a capping unit that hermetically covers the nozzle in the discharge head, and a pressure reducing unit that reduces the pressure in the discharge head,
9. The droplet discharging method according to claim 7, wherein the liquid is filled by depressurizing the inside of the ejection head while the ejection head is on standby in the chamber. 10. The chamber further includes a recovery unit that performs a recovery operation of the nozzle,
10. The droplet discharge method according to claim 7, wherein the recovery operation of the nozzle is performed in a state where the discharge head is on standby in the chamber.

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