JP2004348080A - Light modulation device and method of optical adjustment thereof and projection type display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light modulation device in which a complicated optical adjustment is unnecessary when a one-dimensional type light modulator element is used, and excellent dependability and stability are given by furnishing an optical adjustment mechanism having a simple structure. <P>SOLUTION: The light modulation device is provided with a first adjustment means 5 which has a first lens 1 which collimates light diffused from a light source at least in a first direction, for example, Y-direction, and a second lens 2 which focuses the light emitted from the first lens 1 in a second direction (for example, X-direction) which is substantially orthogonal to the optical axis and to the first direction, and adjusts position by moving the optical path from the light source into the second direction; a second adjustment means 6 which adjusts the position by moving the second lens 2 in a third direction (for example, z-direction) substantially along the optical axis; a third adjustment means 7 which adjusts the position by moving the second lens 2 in a turning direction around the third direction; and a monitor means 22 for the light emitted from the second lens 2 and emitted by being modulated with the light modulator element. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention particularly relates to a light modulation device suitable for being applied to various optical devices using a light modulation element having a one-dimensional structure, an optical adjustment method thereof, and a projection display device.
[0002]
[Prior art]
In various image display devices such as projectors and printers, as a method of increasing the resolution of an image, a light beam from a one-dimensional image display light modulation element is projected onto an image forming unit while being scanned by an optical scanning unit, and a two-dimensional image is formed. A forming method is known (for example, see Patent Document 1).
[0003]
As this one-dimensional light modulation element, a GLV (Grating Light Valve) developed by Silicon Light Machine (SLM) of the United States is known (for example, see Patent Documents 2 and 3).
[0004]
This GLV is composed of a phase reflection type diffraction grating utilizing light diffraction. As an example of the GLV, as shown in FIG. 6, for example, the GLV is constituted by a strip-shaped first surface 30a and a second surface 30b, and the first surface 30a and the second surface 30b are relatively moved. This forms a diffraction grating. In the illustrated example, for example, a first surface 30a composed of three movable ribbons and a second surface 30b composed of three fixed ribbons are alternately arranged to constitute a ribbon element composed of six ribbons.
[0005]
By applying an appropriate voltage to the GLV having such a configuration between the common electrode 32 on the substrate (not shown) and the first surface 30a, the first surface 30a, that is, the movable ribbon is appropriately The diffraction grating moves to the substrate side and is deformed to form a diffraction grating for incident light.
The first surface 30a of this GLV has an advantage that a high-speed switching operation is possible because its width and length are minute, for example, about 25 μm and about 200 μm, respectively. Furthermore, since the operating range of the movable ribbon is controlled by modulating the drive voltage by displaying a wide bandwidth, that is, by changing the reflectivity of the diffracted light correspondingly, a high degree of modulation with a change in the amount of light can be realized. It is possible to provide a high-resolution, low operating voltage and a small image display device.
[0006]
However, for example, when a display device is configured using such a one-dimensional type light modulation element, a ribbon element composed of, for example, six ribbons as described with reference to FIG. Approximately 1000 elements are arranged side by side in the ribbon width direction, and light modulated by the operation of each element is scanned by a scanning unit such as a galvanomirror to project or print on a screen or the like.
[0007]
In this case, the light modulation element having a one-dimensional configuration is formed into a fixed length in a one-dimensional extension direction, and has a long shape in which light is condensed with an appropriate width in a direction orthogonal thereto. It is necessary to beam-form light from a light source, which is compared with the case of using a two-dimensional light modulation element such as an LCD (Liquid Crystal Display) or a DLP (Digital Light Processing, registered trademark of Texas Instruments) using a micromirror. Then, the arrangement configuration of the optical device becomes complicated (for example, refer to Patent Document 4).
In the manufacture, various optical components such as a prism and a collimating lens must be accurately aligned and fixedly arranged, which complicates the manufacturing operation, and requires reliable use of such a one-dimensional light modulation element. To configure various optical devices having excellent performance and stability, there is a problem that it is difficult to improve productivity and yield.
[0008]
[Patent Document 1]
U.S. Pat. No. 5,982,553
[Patent Document 2]
U.S. Pat. No. 3,164,824
[Patent Document 3]
US Patent No. 5,941,579
[Patent Document 4]
JP 2002-169123 A
[0009]
[Problems to be solved by the invention]
In view of such a problem, the present invention eliminates the need for complicated optical adjustment even when using a one-dimensional optical modulator, and provides a more reliable and stable optical modulator by providing an optical adjustment mechanism having a simple configuration. It is an object of the present invention to provide a light modulation device having excellent performance and a projection display device using the same.
[0010]
[Means for Solving the Problems]
The present invention provides a light modulation device that irradiates light from a light source to a light modulation element having a one-dimensional configuration to perform light modulation, and at least a first direction from the light source, for example, a Y direction of orthogonal X, Y, and Z coordinates. A first lens for collimating the light diffused in the first direction, and condensing the light emitted from the first lens in the optical axis direction and in a second direction (for example, X direction) substantially orthogonal to the first direction. A second lens for adjusting the position by moving at least the optical path of the light from the light source in a second direction (X direction); and adjusting the second lens to its optical axis. Second adjusting means for adjusting the position by moving the lens in a third direction (for example, the Z direction) substantially along the axis, and adjusting the position by moving the second lens in a rotation direction having the third direction as a rotation axis. A third adjusting means for performing the light emission from the second lens; Providing a monitoring means for monitoring the light emitted by adjustment.
[0011]
Further, according to the present invention, in a light modulation device that irradiates light from a light source to a light modulation element having a one-dimensional configuration to perform light modulation, a third light diffusion device that diffuses at least light from the light source in a first direction (for example, a Y direction). It is different from the light modulation device having the above-described configuration in that the configuration is such that the lens is provided. In this case, the first lens for collimating the light from the third lens and the light emitted from the first lens are substantially aligned with the optical axis direction (for example, the Z direction) and the first direction (Y direction). A first adjusting unit that has a second lens that condenses light in a second direction (X direction) orthogonal to the first lens and that performs position adjustment by moving at least the optical path of light from the light source in the second direction; Second adjusting means for adjusting the position by moving the second lens in a third direction substantially along the optical axis thereof, and a rotating direction having the third lens as a rotation axis in a direction substantially parallel to the optical axis. And a monitor for monitoring the light emitted from the second lens and modulated by the light modulation element and emitted.
[0012]
Further, according to the present invention, in the light modulation device having the above-described configurations, a mirror that reflects light from the light source is provided between the light source and the second lens, and at least this mirror and the second lens are connected to the first lens. The position is adjusted by moving the adjustment means in the second direction (X direction).
[0013]
Further, the present invention provides a suitable optical adjustment method using the light modulation device having the above-described configuration. That is, an optical adjustment method for a light modulation device that irradiates light from a light source to a light modulation element having a one-dimensional configuration to perform light modulation, wherein the light modulation device is provided with at least a first direction (for example, a Y direction) from the light source. A first lens for collimating the light diffused in the first direction, and condensing the light emitted from the first lens in the optical axis direction and in a second direction (for example, X direction) substantially orthogonal to the first direction. A second lens, monitoring light emitted from the second lens and modulated by the light modulation element, and moving at least an optical path of the light from the light source in the second direction. A first adjustment for performing the adjustment, a second adjustment for performing the position adjustment by moving the second lens in a third direction substantially along the optical axis, and a rotation axis for moving the second lens in the third direction. And a third adjustment for position adjustment by moving in the rotation direction. .
[0014]
Further, the present invention employs a method similar to the above-described optical adjustment method, except that the light modulation device is provided with a third lens for expanding at least light from the light source in a first direction. The third lens is configured to collimate the light from the first lens by a first lens, and to move the third lens in a rotation direction having a direction along the optical axis direction as a rotation axis to perform a position adjustment to perform a third adjustment. And
[0015]
Further, a projection type display device according to the present invention comprises a projection type display device using the light modulation devices having the above-described configurations.
[0016]
As described above, according to the present invention, in a light modulation device using a light modulation element having a one-dimensional configuration, light from a light source is transmitted in a first direction (for example, Y direction) which is a longitudinal direction of a one-dimensional shape of the light modulation element. ) And irradiates the light modulating element with an elongated beam shape condensed with a predetermined width in the width direction thereof. The light emitted from the optical system provided with the adjusting means is once irradiated on the light modulating element, and the modulated light from the light modulating element is monitored by the monitoring means. The position adjustment in the width direction, the focal length direction (depth direction), and the rotation direction perpendicular to the direction can be performed easily and accurately.
[0017]
That is, in the present invention, the light from the light source is diffused in the first direction, collimated by the first lens, and the light is irradiated on the light modulation element by the second lens. Is adjusted by the first lens to the length in the longitudinal direction of the one-dimensional light modulation element.
Then, it is moved by the first adjusting means in a second direction (for example, the X direction) substantially perpendicular to the first direction (for example, the Y direction), and is moved in the horizontal direction perpendicular to the longitudinal direction of the light modulation element. A first adjustment of the position is performed. Further, the second adjustment is performed by moving the second lens in a third direction (for example, the Z direction) along the optical axis direction by the second adjustment means to adjust the focal length. When the rotation of the second lens or the third lens for diffusing the light from the light source is provided between the light source and the first lens, the rotation of the third lens is adjusted by the third adjusting means. Then, a shift in the rotation direction irradiated on the light modulation element, that is, the adjustment of 3 in the case where the light modulation element is obliquely shifted from the longitudinal direction is performed.
[0018]
As described above, in the present invention, the monitoring means is provided to monitor the light emitted from the light modulation element, and the displacement of the irradiation position in the three directions is adjusted by performing the above-described first to third adjustments. Can be adjusted well. In addition, since these adjustment units have a simple configuration in which only a horizontal movement unit and a rotation unit for adjusting the position of each lens and the like are provided, a light modulation device and an optical adjustment method with a simple device configuration are provided. be able to.
In particular, when a mirror is provided to change the optical path by, for example, 90 °, only the mirror and the second lens can be moved in the second direction to adjust the position in the second direction. Further simplification and downsizing can be achieved.
[0019]
As described above, according to the present invention, in a light modulation device using a one-dimensional light modulation element, it is possible to reliably irradiate light from the light source to the light modulation element with an appropriate beam shape. This is possible later, and it is possible to simplify the work of assembling and configuring such optical components, and to improve the productivity and the yield.
Further, when a projection type display device is configured using such a light modulation device, a projection type display device capable of displaying at a high resolution and in which assembly adjustment of the optical system is simple and excellent in productivity is excellent. Can be provided.
[0020]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, each embodiment according to the present invention will be described in detail, but it goes without saying that the present invention is not limited to the following examples, and that various other modifications and changes are possible.
[0021]
(1) First embodiment
FIG. 1 shows a configuration diagram of a light modulation device according to an embodiment of the present invention. The example shown in FIG. 1 is a light modulation device that modulates light from a light source 10 by inputting the light from a light source 10 to a light modulation element 13 having a one-dimensional structure, for example, a so-called array in which semiconductor lasers are arranged one-dimensionally. A light source 10 such as a laser is used. In this case, the light from the light source 10 is diffused in the first direction, for example, the Y direction (in the example shown in the drawing, the direction perpendicular to the plane of FIG. 1) at the coordinates indicated by the arrows X, Y, and Z. In this light modulation device, a first lens 1 composed of a collimator lens or the like for collimating at least the light L diffused in the first direction, and a light emitted from the first lens 1 And a second lens 2 composed of a cylindrical lens or the like that condenses light in a second direction (Z direction) substantially perpendicular to the first direction and the first direction.
[0022]
In the present embodiment, at least the optical path of the light from the light source is moved in the second direction, in the illustrated example, in the direction indicated by the arrow a which is the vertical direction on the plane of FIG. The first adjusting means 5 and the second adjusting means for adjusting the position by moving the second lens 2 in a third direction substantially along the optical axis thereof, in the example shown in FIG. 6, third adjusting means 7 for adjusting the position by moving the second lens 2 in the rotation direction indicated by arrow c with the third direction as the rotation axis, and light emitted from the second lens 2 A monitor means 22 for monitoring the light modulated and emitted by the modulation element 13 is provided.
[0023]
As the light modulation element 13, for example, a one-dimensional light modulation element having a GLV-type configuration as described with reference to FIG. 6 can be used. That is, for example, the light-modulating device has at least a first surface and a second surface, and forms a diffraction grating by relatively moving the first surface and the second surface. Can be. Specifically, for example, six strip-shaped ribbon elements are formed on a substrate by alternately arranging, for example, three movable ribbons and three fixed ribbons. Then, by applying an appropriate voltage between the common electrode on the substrate side and the movable ribbon, the movable ribbon moves toward the substrate side by an appropriate amount and is deformed, forming a diffraction grating for incident light, and performing light modulation. Configuration.
In the illustrated example, an optical system 21 for adjusting the modulated light emitted from the light modulation element 13 is provided between the light modulation element 13 and the monitor 22.
For example, when the optical modulation element 13 is a GLV-type light modulation element having the above-described structure in which the diffraction grating is provided, the optical system 21 may combine the modulated ± 1st-order diffracted light or remove unnecessary order diffracted light. And a Schlieren filter or the like. In the case where a one-dimensional light modulation element having another configuration is used, an optical system that efficiently emits light emitted from the light modulation element to the monitor unit 22 can be applied.
Further, the monitoring means 22 can be constituted by, for example, an integrating sphere and a photodetector.
In addition, it is desirable to use, for example, modulated light having the highest luminance as the modulated light incident on the monitor unit 22.
[0024]
Next, an optical adjustment method of the light modulation device having such a configuration will be described with reference to FIG. 2A (a) to 2 (c) schematically show an example of a positional deviation mode of the irradiation position S of the light irradiated on the one-dimensional light modulation element 13, and the one-dimensional light modulation element. 13, the longitudinal direction is represented by Y, and the width direction is represented by X. That is, in FIG. 2A, the dashed lines X and Y indicate the same directions as the X-axis and Y-axis directions in FIG. 1 described above.
In the example shown in FIG. 2A (a), the irradiation spot S is illuminated obliquely, and is shown in FIG. 2A (d) by the third adjustment by the above-described third adjustment means by moving in the rotation direction indicated by the arrow c. Thus, the irradiation position S can be adjusted to a desired position.
[0025]
The example of FIG. 2A (b) is a case where the irradiation position S is shifted in the horizontal direction. Similarly, the first adjustment by the above-described first adjustment by the horizontal movement indicated by the arrow a in FIG. It can be adjusted to the desired position shown in (d).
The example in FIG. 2A (c) shows the irradiation position S when the focal length of the second lens 2, which is a condenser lens, is shifted. In this case, the focal length can be accurately adjusted by the second adjustment by moving the second lens 2 in the direction indicated by the arrow b which is the optical axis direction, and similarly, the focal length can be adjusted to the position shown in FIG. 2A (d). it can.
[0026]
More specifically, the monitoring means 22 monitors the detection power of, for example, a photodetector or the like with respect to the irradiation position (for example, in the X or Y direction) as shown in FIGS. 2B (a) to 2 (d). The adjustment amount can be controlled. That is, when a convex waveform is shown as shown in FIG. 2B (a), the position is adjusted by the third adjusting means in the rotation direction described in FIG. 2A (a), and the power is adjusted as shown in FIG. 2B (b). Is substantially zero when the power is low and constant as shown in FIG. 2B (c), and when the power is low and constant as shown in FIG. 2B (c). The position adjustment by the second adjusting means in the focal length direction described in (1) is performed. By such an adjustment operation, as shown in FIG. 2B (d), adjustment is performed until a certain high power is detected, which is a detection state when irradiation is performed at an appropriate position, so that accurate alignment can be performed. It becomes.
[0027]
According to the light modulation device according to the configuration of the present invention and the optical adjustment method using the same, independent alignment in each direction can be accurately performed with a simple configuration, and the light modulation element has a one-dimensional configuration. Can be efficiently irradiated with light from a light source. In this case, the beam profile such as the beam shape and the intensity distribution does not change, and the stability is excellent. Therefore, by utilizing the present invention, it is possible to provide a high-resolution, high-output optical communication device, for example, when applied to a high-resolution, high-luminance display device or a printing device, or a communication device. It becomes.
Also, in the manufacture of the optical modulator, it is not necessary to accurately align and fix various optical components such as a prism and a collimating lens, and the optical modulator having such a one-dimensional configuration has excellent reliability and stability. Various optical devices can be manufactured with high productivity and high yield.
[0028]
Although not shown, in the above-described first embodiment, the light from the light source 10 is provided between the light source 10 and the second lens 2, specifically, between the first lens and the second lens. A configuration in which a mirror that reflects light can be provided. In this case, the position of the light source 10 is arranged in the upward or downward direction in FIG. 1 when the direction of the optical path is changed by, for example, 90 ° by the mirror, and is radiated toward the mirror, that is, along the Z direction. It is reflected in the X direction. Then, only the mirror and the second lens 2 are moved by the first adjusting means 5 in the second direction, that is, in the vertical direction indicated by the arrow a in FIG. It can be carried out.
[0029]
In such a configuration, since the first adjusting means 5 can be configured to move only the mirror and the second lens, the configuration of the device is further simplified, and the size of the device is reduced. Can be.
[0030]
(2) Second embodiment
Next, an example of the second embodiment according to the present invention will be described in detail with reference to the configuration diagram of FIG. 3, parts corresponding to those in FIG. 1 are denoted by the same reference numerals, and redundant description will be omitted.
In this example, as shown in FIG. 3, a third lens 4 composed of a cylindrical lens or the like that diffuses light from the light source 10 in a first direction, in the illustrated example, in a Y direction perpendicular to the paper surface is provided. Things.
[0031]
When the third lens 4 for diffusing light in one direction is provided, a point light source such as a normal semiconductor laser can be used. FIG. 4 schematically shows a configuration diagram viewed from the horizontal direction in this case, that is, the Z direction in FIG. 4, parts corresponding to those in FIG. 3 are denoted by the same reference numerals, and redundant description will be omitted. The light L from the light source is diffused by the third lens 4, and the spread in the Y direction is adjusted by appropriately selecting the distance between the third lens 4 and the first lens 1. Can be.
[0032]
The example shown in FIG. 3 shows a case where a mirror 3 that converts the optical path by, for example, 90 ° is provided between the first lens 1 and the second lens 2. With the configuration in which the mirror 3 is provided in this manner, only the mirror 3 and the second lens 2 are moved by the first adjusting means in the second direction, similarly to the modification of the first embodiment. That is, it is possible to perform the second adjustment of moving in the second direction indicated by the arrow a. Therefore, the device configuration of this portion can be simplified, and the overall device configuration can be reduced in size.
[0033]
In this case, the second adjusting means 6 moves the second lens 2 in the third direction indicated by the arrow b which is the vertical direction on the paper surface of FIG. Position adjustment can be performed.
Further, in this embodiment in which the third lens 4 is provided, the adjustment of the rotation direction of the light L from the light source is performed by providing the third adjustment means for rotating the third lens 4 as indicated by the arrow c. Can be. In this case, the adjustment mechanism provided on the second lens 2 is simplified, and a simpler device configuration can be achieved.
[0034]
In the example shown in FIG. 3, the light modulated and emitted by the light modulation element 13 is emitted to the monitor means 22 via the optical system 21 and adjusted in the same manner as in the example described in FIG. It goes without saying that the irradiation position on the light modulation element can be adjusted by the method.
In this example, similarly, a compact and simple optical modulator with an adjusting mechanism can be constructed, and complicated alignment of optical components and the like is not required, so that the productivity of the optical modulator with high reliability and stability is improved. Thus, the yield can be improved.
[0035]
In this embodiment, the light L from the light source may be applied to the light modulation element 13 along one optical path without providing the mirror 3. In this case, the first adjustment unit 5 performs the first adjustment by moving the first to third lenses 1, 2, and 4, and, if necessary, the light source 10 in the second direction (X direction). Shall be. Also in this case, the control of the irradiation position of the light to the light modulation element 13 can be performed with high accuracy by the adjustment of the adjusting units 5 to 7.
[0036]
(3) Third embodiment
Next, an example of an embodiment in which the light modulation device and the optical adjustment method according to the present invention are applied to a projection display device will be described in detail with reference to FIG. This example shows a case where the example of the second embodiment described in FIG. 3 is applied to a projection display device.
In FIG. 5, reference numerals 10R, 10G, and 10B denote light sources such as red, green, and blue lasers, respectively. The laser beams emitted from the light sources are directed in a first direction formed by a cylindrical lens or the like. The light is diffused by the third lenses 4R4G and 4B that diffuse in a direction perpendicular to the paper surface, and is adjusted to parallel light having a predetermined length by the first lenses 1R, 1G, and 1B composed of a collimator lens or the like. Then, the light is reflected by mirrors 11R, 11G, and 11B corresponding to the respective colors in an appropriate direction depending on the arrangement position, and is condensed by second lenses 2R, 2G, and 2B made of a cylindrical lens or the like. Are incident on the light modulation elements 13R, 13G, and 13B having a one-dimensional configuration as a beam having a predetermined width and length.
[0037]
Here, a first adjusting unit 5R, 5G and 5B, a second adjusting unit 6R, 6G and 6B, and a third adjusting unit 7R, 7G and 7B are provided in the optical system of the light corresponding to each color. The moving direction of each adjusting means can be selected in the same manner as in the example described with reference to FIG. That is, the first adjustment unit adjusts the position of each light modulation element in the width direction, the second adjustment unit adjusts the position of the condensing lens of each light modulation element in the focal length direction, and the third adjustment unit Position adjustment in a rotation direction inclined from the one-dimensional longitudinal direction of each light modulation element can be performed.
[0038]
The modulated light from each of the light modulating elements 13R, 13G, and 13B is converged into one light flux via, for example, dichroic mirrors 14, 15, and is turned off, for example, in the same manner as in the example described in each of the above embodiments. The light is incident on a switching mirror 23 via an optical system 21 constituting a spatial filter including a knurl relay optical system and a schlieren filter. Here, when the position is adjusted by the monitor unit 22, light is made to enter the monitor unit 22 by the switching lens 23. When the position adjustment is completed and projection is performed, an image emitted from the optical system 21 by, for example, rotating the switching mirror 23 is formed on the projection lens 17 by, for example, an image formed on an image plane indicated by a broken line b. Then, the image emitted from the projection lens 17 is scanned and irradiated by the scanner 18 in the horizontal direction of the screen 19 as shown by an arrow g, and an image can be projected.
[0039]
For example, in the above-described typical configuration example of the GLV element, three fixed ribbons and three movable ribbons are alternately arranged. However, as the light modulation elements 10R, 10B, and 10G, the GLVs are arranged in the width direction of the ribbon. A light modulation element having a one-dimensional configuration can be formed by arranging, for example, 1080 elements for the number of pixels.
The beam shape of a laser beam or the like is applied to the one-dimensional light modulation element such that the first lens is irradiated with a predetermined length in the longitudinal direction and the second lens is irradiated with a predetermined width in the width direction. By adjusting and applying a voltage corresponding to an image signal to each of the light modulation elements 10R, 10G, and 10B, the modulated light diffracted and modulated from each light modulation element has a one-dimensional predetermined pixel size (length). And a beam modulated in accordance with the image signal. On the other hand, the image formed by the projection lens 17 is scanned by the scanner 18 in the direction indicated by the arrow g to be displayed on the screen 19 as a two-dimensional image.
[0040]
Also in this case, by applying the adjustment method described with reference to FIG. 2 described above, it is possible to perform positioning with high accuracy so that light from each light source is applied to an appropriate position of each color light modulation element. it can.
[0041]
As described above, by configuring the projection display device by applying the present invention, assembling of the optical components of the projection display device can be simplified, and the alignment can be accurately performed by the monitor means. It is possible to apply a small projection type display device with high resolution and high luminance. Also, in the manufacture thereof, the assembling work of the optical components can be simplified, and the productivity and the yield can be improved.
[0042]
Note that, in the above-described projection display device, a case has been described in which the light modulation device according to the second embodiment of the present invention is used to perform alignment with respect to the light modulation elements of each color of the projection display device. The optical modulator according to the first embodiment described with reference to FIG. 1, the mirror provided in the example shown in FIG. 1, and other various configurations can be adopted.
Furthermore, it goes without saying that the above-described lenses, optical systems, monitor means, and the like are not limited to the above examples, and optical lenses and optical components having various configurations can be applied.
[0043]
【The invention's effect】
As described above, according to the light modulation device of the present invention, when a light modulation element having a one-dimensional configuration advantageous for high resolution is used, alignment in a direction orthogonal to the longitudinal direction of the light modulation element is performed. By providing a first adjusting means for performing the alignment, a second adjusting means for performing the alignment in the direction of the focal length of the condenser lens, and a third adjusting means for performing the alignment in the oblique direction with respect to the light modulating element, it is easy to provide With a simple configuration, the light from the light source can be accurately positioned on the surface of the one-dimensional light modulation element, whereby the light can be irradiated efficiently, and the light with high resolution and high output can be obtained. A modulation device can be provided.
[0044]
In particular, when a mirror is provided between the first lens for collimation and the second lens 2 for condensing, the extension direction of the optical path can be adjusted to an appropriate position, and the size of the device can be reduced. Can be achieved. In particular, by moving only the mirror and the second lens, alignment in the width direction orthogonal to the longitudinal direction of the light modulation element can be performed, and the adjustment mechanism can be simplified and the device can be downsized. .
[0045]
Further, the light modulation element has at least a first surface and a second surface, and the first surface and the second surface are relatively moved to form a diffraction grating and light is modulated. Similarly, even when a light modulation element having a so-called GLV type configuration is used, a light irradiation position on the element surface can be accurately adjusted, and an efficient light modulation device can be provided with a simple configuration.
Further, by providing a third lens for diffusing the light from the light source and providing the third lens with adjusting means for performing the alignment in the rotational direction, the structure of each adjusting means can be simplified and downsized. Can be.
[0046]
Further, according to the optical adjustment method of the present invention, for the light modulation element having the one-dimensional configuration, the modulation light emitted from the light modulation element is monitored, and the alignment in the width direction orthogonal to the longitudinal direction is performed. By performing the first adjustment to be performed, the second adjustment to perform the alignment in the direction of the focal length of the condenser lens, and the third adjustment to perform the alignment in the oblique direction, light can be easily, reliably, and accurately. Positioning on the surface of the modulation element can be performed, and simplification in assembling optical components can be achieved.
[0047]
Further, by applying the light modulation device and the optical adjustment method according to the present invention to a projection type display device, a projection type display device having a high resolution, a high brightness, a small size, and a simple adjustment mechanism can be easily assembled with its optical components. Can be provided.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of an example of a light modulation device.
FIG. 2 is an explanatory diagram of an optical adjustment method of the light modulation device.
FIG. 3 is a schematic configuration diagram of an example of a light modulation device.
FIG. 4 is a schematic configuration diagram of a main part of the light modulation device.
FIG. 5 is a schematic configuration diagram of an example of a projection display device.
FIG. 6 is an explanatory diagram of an example of a one-dimensional light modulation element.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 first lens, 2 second lens, 3 mirror, 4 third lens, 5 first adjusting means, 6 second adjusting means, 7 third adjusting means, 10 light source, 13 light modulation element, 14 dichroic mirror, 15 dichroic mirror, 17 projection lens, 18 scanner, 19 screen, 21 optical system, 22 monitoring means, 30a first surface, 30b second surface, 32 common electrode

Claims (20)

In a light modulation device that performs light modulation by making light from a light source incident on a light modulation element having a one-dimensional configuration,
A first lens that collimates at least light diffused in a first direction from the light source, and a second lens that emits light emitted from the first lens substantially orthogonal to its optical axis direction and the first direction. And a second lens that focuses light in the direction of
First adjusting means for adjusting a position by moving at least an optical path of light from the light source in the second direction;
Second adjusting means for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
Third adjusting means for adjusting the position by moving the second lens in a rotation direction about the third direction as a rotation axis;
A light modulating device comprising: a monitor for monitoring light emitted from the second lens and modulated by the light modulation element and emitted. A mirror that reflects light from the light source is provided between the light source and the second lens,
2. The light modulation device according to claim 1, wherein at least the mirror and the second lens are moved in the second direction by the first adjustment means to perform position adjustment. The light modulation element has at least a second surface of a first surface, and is formed by forming a diffraction grating by relatively moving the first surface and the second surface, and is light-modulated. The light modulation device according to claim 1. The light modulation element has at least a first surface and a second surface, and the light modulation is performed by forming a diffraction grating by relatively moving the first surface and the second surface. 3. The light modulation device according to claim 2, wherein: 2. The light modulation device according to claim 1, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. The light modulation device according to claim 2, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. The light modulation device according to claim 3, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. The light modulation device according to claim 4, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. In a light modulation device that performs light modulation by making light from a light source incident on a light modulation element having a one-dimensional configuration,
A first lens that collimates at least light diffused in a first direction from the light source, and a second lens that emits light emitted from the first lens substantially orthogonal to its optical axis direction and the first direction. And a third lens that diffuses light from the light source in a first direction.
First adjusting means for adjusting a position by moving at least an optical path of light from the light source in the second direction;
Second adjusting means for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
Third adjusting means for adjusting the position by moving the third lens in a rotation direction having a rotation axis substantially along the optical axis thereof;
A light modulating device comprising: a monitor for monitoring light emitted from the second lens and modulated by the light modulation element and emitted. A mirror that reflects light from the light source is provided between the light source and the second lens,
10. The light modulation device according to claim 9, wherein at least the mirror and the second lens are moved in the second direction by the first adjustment means to perform position adjustment. The light modulation element has at least a first surface and a second surface, and the light modulation is performed by forming a diffraction grating by relatively moving the first surface and the second surface. The light modulation device according to claim 9, wherein: The light modulation element has at least a second surface of a first surface, and is formed by forming a diffraction grating by relatively moving the first surface and the second surface, and is light-modulated. The light modulation device according to claim 10. An optical adjustment method of a light modulation device that performs light modulation by incident light from a light source to a light modulation element having a one-dimensional configuration,
A first lens for collimating at least the light diffused in the first direction from the light source to the light modulation device, and a light emitted from the first lens in an optical axis direction and the first direction. A second lens that condenses light in a second direction that is substantially orthogonal to the second lens;
Monitoring the light emitted from the second lens and modulated and emitted by the light modulation element,
A first adjustment for adjusting a position by moving at least an optical path of light from the light source in the second direction;
A second adjustment for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
An optical adjustment method for an optical modulation device, comprising: performing a third adjustment for adjusting a position by moving the second lens in a rotation direction about the third direction as a rotation axis. A mirror that reflects light from the light source is provided between the light source and the second lens,
14. The method according to claim 13, wherein the position adjustment is performed by moving at least the mirror and the second lens in the second direction. 14. The optical modulation method according to claim 13, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. The method according to claim 14, wherein a third lens for diffusing light from the light source in the first direction is provided between the light source and the first lens. An optical adjustment method of a light modulation device that performs light modulation by incident light from a light source to a light modulation element having a one-dimensional configuration,
A first lens for collimating at least the light diffused in the first direction from the light source to the light modulation device, and a light emitted from the first lens in an optical axis direction and the first direction. A second lens that condenses light in a second direction substantially orthogonal to the light source, and a third lens that diffuses light from the light source in the first direction between the light source and the first lens. ,
Monitoring the light emitted from the second lens and modulated and emitted by the light modulation element,
A first adjustment for adjusting a position by moving at least an optical path of light from the light source in the second direction;
A second adjustment for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
An optical adjustment method for an optical modulation device, wherein the third adjustment is performed by moving the third lens in a rotation direction about the third direction as a rotation axis to perform position adjustment. A mirror that reflects light from the light source is provided between the light source and the second lens,
18. The optical adjustment method for a light modulation device according to claim 17, wherein at least the mirror and the second lens are moved in the second direction to perform position adjustment. In a projection display device that irradiates light from a light source to a light modulation element having a one-dimensional configuration to perform light modulation, and projects and displays light-modulated light.
A first lens that collimates at least light diffused in a first direction from the light source, and a second lens that emits light emitted from the first lens substantially orthogonal to its optical axis direction and the first direction. And a second lens that focuses light in the direction of
First adjusting means for adjusting a position by moving at least an optical path of light from the light source in the second direction;
Second adjusting means for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
Third adjusting means for adjusting the position by moving the second lens in a rotation direction about the third direction as a rotation axis;
A projection type display device comprising: a monitor for monitoring light emitted from the second lens and modulated and emitted by the light modulation element. In a projection display device that irradiates light from a light source to a light modulation element having a one-dimensional configuration to perform light modulation, and projects and displays light-modulated light.
A first lens for collimating at least light from the light source in a first direction, and light emitted from the first lens substantially orthogonal to the optical axis direction and the first direction; A second lens for condensing light in a second direction, and a third lens for diffusing light from the light source in the first direction;
First adjusting means for adjusting a position by moving at least an optical path of light from the light source in the second direction;
Second adjusting means for adjusting the position by moving the second lens in a third direction substantially along the optical axis;
Third adjusting means for adjusting the position by moving the third lens in a rotation direction having a rotation axis substantially along the optical axis thereof;
A projection type display device comprising: a monitor for monitoring light emitted from the second lens and modulated and emitted by the light modulation element.

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