JP2004333350A5 - - Google Patents

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JP2004333350A5
JP2004333350A5 JP2003131157A JP2003131157A JP2004333350A5 JP 2004333350 A5 JP2004333350 A5 JP 2004333350A5 JP 2003131157 A JP2003131157 A JP 2003131157A JP 2003131157 A JP2003131157 A JP 2003131157A JP 2004333350 A5 JP2004333350 A5 JP 2004333350A5
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Japan
Prior art keywords
scanner
scanning
axis
probe microscope
along
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JP2003131157A
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Japanese (ja)
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JP3944469B2 (en
JP2004333350A (en
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Priority to JP2003131157A priority Critical patent/JP3944469B2/en
Priority claimed from JP2003131157A external-priority patent/JP3944469B2/en
Publication of JP2004333350A publication Critical patent/JP2004333350A/en
Publication of JP2004333350A5 publication Critical patent/JP2004333350A5/ja
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Publication of JP3944469B2 publication Critical patent/JP3944469B2/en
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Claims (8)

走査型プローブ顕微鏡の被走査物を少なくともｚ軸に沿って走査する走査機構であり、
被走査物をｚ軸に沿って移動させるための第一のｚスキャナと、
第一のｚスキャナの中心軸すなわち第一のｚスキャナの中心を通りｚ軸に平行な軸に対して対称性良く位置している少なくともｚ軸に沿って変位し得る少なくとも一つの第二のｚスキャナと、
第一のｚスキャナと第二のｚスキャナを共に保持するスキャナ保持部とを備えている、走査型プローブ顕微鏡の走査機構。A scanning mechanism that scans an object to be scanned of a scanning probe microscope at least along the z-axis;
A first z scanner for moving the object to be scanned along the z axis;
At least one second z that can be displaced along at least the z-axis that is positioned symmetrically with respect to the central axis of the first z-scanner, i.e., through the center of the first z-scanner and parallel to the z-axis. A scanner,
A scanning mechanism of a scanning probe microscope, comprising a scanner holding unit that holds both the first z scanner and the second z scanner. 請求項１において、第一のｚスキャナと第二のｚスキャナを共に、ｚ軸に直交すると共に互いに直交するｘ軸とｙ軸に沿って移動させるためのｘｙスキャナを更に備えており、走査型プローブ顕微鏡の被走査物をｚ軸に加えてｚ軸に直交し互いに直交するｘ軸とｙ軸にも沿って走査し得る、走査型プローブ顕微鏡の走査機構。2. The scanning type according to claim 1, further comprising an xy scanner for moving both the first z-scanner and the second z-scanner along the x-axis and the y-axis that are orthogonal to the z-axis and orthogonal to each other. A scanning mechanism of a scanning probe microscope capable of scanning an object to be scanned of a probe microscope along an x axis and a y axis perpendicular to the z axis and perpendicular to each other in addition to the z axis. 請求項１または請求項２において、走査機構はただ一つの第二のｚスキャナを有し、第二のｚスキャナは第一のｚスキャナを取り囲む形状を有している、走査型プローブ顕微鏡の走査機構。3. A scanning probe microscope scan according to claim 1, wherein the scanning mechanism has only one second z scanner, and the second z scanner has a shape surrounding the first z scanner. mechanism. 請求項１または請求項２において、走査機構は複数の第二のｚスキャナを有し、それらの第二のｚスキャナは第一のｚスキャナの中心軸の周りに角度的に等間隔に配置されている、走査型プローブ顕微鏡の走査機構。3. The scanning mechanism according to claim 1, wherein the scanning mechanism includes a plurality of second z scanners, and the second z scanners are angularly spaced around the central axis of the first z scanner. The scanning mechanism of the scanning probe microscope. 請求項１〜請求項４において、第二のｚスキャナには、第一のｚスキャナに印加される電圧波形に対して、周波数が同じで位相が逆の波形の電圧が印加される、走査型プローブ顕微鏡の走査機構。5. The scanning type according to claim 1, wherein the second z scanner is applied with a voltage having a waveform having the same frequency and an opposite phase with respect to the voltage waveform applied to the first z scanner. Probe microscope scanning mechanism. 請求項３において、第一のｚスキャナ、または、第二のｚスキャナのどちらか一方は、チューブスキャナであり、ｚ軸に沿ってだけでなくｘ軸とｙ軸に沿っても変位し得る、走査型プローブ顕微鏡の走査機構。In Claim 3, either the first z scanner or the second z scanner is a tube scanner and can be displaced not only along the z axis but also along the x and y axes. Scanning mechanism of scanning probe microscope. 請求項１〜請求項６において、第二のｚスキャナに保持された錘を更に備えている、走査型プローブ顕微鏡の走査機構。7. The scanning mechanism of a scanning probe microscope according to claim 1, further comprising a weight held by the second z scanner. 請求項１〜請求項７の走査機構を用いた走査型プローブ顕微鏡。A scanning probe microscope using the scanning mechanism according to claim 1.
JP2003131157A 2003-05-09 2003-05-09 Scanning mechanism and scanning probe microscope using the same Expired - Lifetime JP3944469B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003131157A JP3944469B2 (en) 2003-05-09 2003-05-09 Scanning mechanism and scanning probe microscope using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003131157A JP3944469B2 (en) 2003-05-09 2003-05-09 Scanning mechanism and scanning probe microscope using the same

Publications (3)

Publication Number Publication Date
JP2004333350A JP2004333350A (en) 2004-11-25
JP2004333350A5 true JP2004333350A5 (en) 2005-10-27
JP3944469B2 JP3944469B2 (en) 2007-07-11

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JP2003131157A Expired - Lifetime JP3944469B2 (en) 2003-05-09 2003-05-09 Scanning mechanism and scanning probe microscope using the same

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688643B2 (en) * 2005-11-10 2011-05-25 エスアイアイ・ナノテクノロジー株式会社 Excitation cantilever holder and scanning probe microscope
JP2007171022A (en) 2005-12-22 2007-07-05 Canon Inc Scanning probe device
JP2007171021A (en) 2005-12-22 2007-07-05 Canon Inc Scanning probe device and driving stage for same
JP4498285B2 (en) * 2006-02-01 2010-07-07 キヤノン株式会社 Scanning probe device
JP4378385B2 (en) 2006-05-17 2009-12-02 キヤノン株式会社 Driving stage in scanning probe apparatus, scanning probe apparatus
JP2009162772A (en) * 2009-03-09 2009-07-23 Canon Inc Scanning probe device

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