JP2004325706A - Optical waveguide forming method, optical waveguide forming device, optical circuit board, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waveguide forming method capable of forming an optical waveguide to a desired position of a resin substrate by solving the problem that the formation of the minute optical waveguide is heretofore difficult because of the difficulty in making the diameter of the optical waveguides to be formed smaller than the diameter of the luminous flux to be irradiated, as well as an optical waveguide forming device, an optical circuit board, and an electronic device. <P>SOLUTION: The optical waveguide forming method formed the optical waveguide 160 by supplying energy having a first distribution to a first region 162 of a substrate 150 including a resin material, applying energy having a second distribution to a second region 164 included in the first region 162 and changing the refractive index of the substrate 150 in at least a portion of the second region 164. The energy is preferably applied to the first region by irradiating the region with the light of a first wavelength and to the second region by irradiating the region with the light having a second wavelength shorter than the first wavelength. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an optical waveguide forming method, an optical waveguide forming device, an optical circuit board, and an electronic device.
[0002]
[Background technology]
2. Description of the Related Art Conventionally, as a method of forming an optical waveguide by irradiating and curing light in a resin, for example, there is a method disclosed in JP-A-2002-202427 (Patent Document 1). Patent Document 1 discloses a method of forming an optical waveguide by irradiating a photocurable resin with a light beam having a small diameter and curing the same to form a cured resin portion having an increased refractive index.
[0003]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 2002-202427
[Problems to be solved by the invention]
However, in the method disclosed in Patent Document 1, it is difficult to make the diameter of the formed optical waveguide smaller than the diameter of the light beam to be irradiated, and thus it is difficult to form a fine optical waveguide. The problem has arisen.
[0005]
Therefore, an object of the present invention is to provide an optical waveguide forming method, an optical waveguide forming apparatus, an optical circuit board, and an electronic device that can solve the above-described problems. This object is achieved by a combination of features described in the independent claims. The dependent claims define further advantageous embodiments of the present invention.
[0006]
[Means for Solving the Problems]
To achieve the above object, according to a first aspect of the present invention, there is provided an optical waveguide forming method for forming an optical waveguide on a base containing a resin material whose refractive index changes by receiving a predetermined energy from the outside. Giving energy having a first distribution to a first region of the base, giving energy having a second distribution to a second region included in the first region, and applying energy having a second distribution to at least a part of the second region. An optical waveguide forming method is provided, wherein an optical waveguide is formed by changing a refractive index of a substrate. Thereby, an extremely thin optical waveguide can be formed on the base.
[0007]
Further, by irradiating the first region with the first light having the first wavelength, energy having the first distribution is given to the first region, and the second region having the shorter wavelength than the first wavelength is provided. It is preferable that energy having a second distribution be given to the second region by irradiating the second region with light. Further, it is preferable that the first region is irradiated with the first light for a predetermined time and the second region is irradiated with the second light for a period shorter than the predetermined period. Thereby, the optical waveguide can be formed on the base three-dimensionally with high positional accuracy and uniformly.
[0008]
The resin material may include a material that absorbs two photons. Thereby, the optical waveguide can be formed thinner on the base. Further, the position of the optical waveguide can be accurately formed in the depth direction of the base.
[0009]
According to a second aspect of the present invention, there is provided an optical circuit board having a light guide formed by the above light guide forming method and an electronic apparatus. The electronic device includes, for example, an optical communication device that transmits and receives an optical signal, such as a transmitter that transmits an optical signal, a receiver that receives an optical signal, and a repeater that relays an optical signal, and other devices. Further, the electronic device includes, for example, a device that can be connected to a communication line, such as a facsimile, a personal computer, a digital camera, a display device, a printing device, a game machine, and a tuner, and a device that can internally perform optical communication. Further, the electronic device includes a substrate having the optical waveguide, an electric component, a mechanical component, and other components, and a device and a component in which an electric circuit, an electronic circuit, an optical circuit, and other circuits are combined.
[0010]
According to the third aspect of the present invention, there is provided an optical waveguide forming apparatus for forming an optical waveguide on a base including a resin material whose refractive index changes by receiving light from the outside, and a stage for mounting the base, A first light source that generates a first light having a first wavelength, a second light source that generates a second light having a second wavelength shorter than the first wavelength, and a first light. A first light condensing portion for condensing light on a first region of the base, and a second light condensing portion for condensing second light on a second region included in the first region An optical waveguide forming apparatus is provided.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described through embodiments of the present invention with reference to the drawings, but the following embodiments do not limit the invention according to the claims and are described in the embodiments. Not all combinations of features are essential to the solution of the invention.
[0012]
FIG. 1 is a view showing an optical waveguide forming apparatus 100 according to one embodiment of the present invention. The optical waveguide forming apparatus 100 includes a first light source 122 and a second light source 124, a first lens unit 132 and a second lens unit 134, which are examples of a light collecting unit, and a base 150 that forms an optical waveguide. The stage 142 to be mounted, the overall control unit 110 for controlling the entire optical waveguide forming apparatus 100, the light source control unit 120 for controlling the first light source 122 and the second light source 124, the first lens unit 132, A lens control unit 130 that controls the second lens unit 134 and a stage control unit 140 that controls the stage 142 are provided.
[0013]
The base 150 includes a resin material that changes the refractive index by receiving energy from the outside. The resin material includes, for example, a thermosetting resin that is cured by receiving thermal energy, an ultraviolet curable resin that is cured by receiving ultraviolet light, a resin that is cured by receiving both light energy and heat energy, and the like. Further, it is preferable that the base 150 contains a resin material such that the refractive index of a region receiving the energy is higher than the refractive index of the region other than the region or the air. The base 150 may be made of a resin material that changes its refractive index by receiving energy from the outside.
[0014]
The first light source 122 and the second light source 124 generate light having different energies. It is preferable that the sum of the energies of the light generated by the first light source 122 and the second light source 124 is larger than the energy required to change the refractive index of the resin material forming the base 150. In the present embodiment, the first light source 122 and the second light source 124 are semiconductor lasers, and generate a laser beam a and a laser beam b having a shorter wavelength than the laser beam a, respectively.
[0015]
The light source control unit 120 controls the first light source 122 and the second light source 124. That is, the light source control unit 120 controls the wavelength, intensity, irradiation time, and the like of the laser light generated by the first light source 122 and the second light source 124. Further, the light source control unit 120 may control the first light source 122 and / or the second light source 124 so that the base 150 is irradiated with the laser light a and / or b in a pulsed manner.
[0016]
The first lens unit 132 and the second lens unit 134 focus the laser beams a and b on the base 150, respectively. Further, the lens control unit 130 controls the first lens unit 132 and the second lens unit 134 to control the focal position of the laser beams a and b with respect to the base 150. Further, the lens control unit 130 may control the irradiation position of the laser beams a and b on the base 150.
[0017]
The stage 142 places the base 150 thereon. The stage control unit 140 controls the stage 142. Specifically, the stage control unit 140 controls the stage 142 to move the base 150 in the horizontal direction, thereby moving the position of the base 150 relative to the laser beams a and b. Further, the stage control section 140 may move the focal position of the laser beams a and b with respect to the base 150 by controlling the stage 142 to move the base 150 in the vertical direction.
[0018]
The overall control unit 110 comprehensively controls a control system including the light source control unit 120, the lens control unit 130, and the stage control unit 140. For example, the overall control unit 110 gives an instruction to the control system based on the formation pattern of the optical waveguide to be formed on the base 150.
[0019]
FIG. 2 is a diagram showing the base 150 irradiated with the laser beams a and b. FIG. 2A is a top view of the base 150, and FIG. 2B is a cross-sectional view of the base 150 along AA ′ of FIG. 2A. The operation of the optical waveguide forming apparatus 100 will be described with reference to FIGS.
[0020]
The stage control unit 140 moves the stage 142 based on an instruction from the general control unit 110 such that laser beams a and b are applied to predetermined positions on the base 150 placed on the stage 142. That is, referring to FIG. 2, first region 162 of base 150 is irradiated with laser light a, and second region 164 included in first region 162 is irradiated with laser light b. The stage controller 140 moves the stage 142. The stage control unit 140 may move the stage 142 continuously or intermittently while irradiating the base 150 with the laser beams a and b.
[0021]
The lens control unit 130 controls the first lens unit 132 so that the laser light a emitted from the first light source 122 is focused on the first area 162, and adjusts the focus of the laser light a. . Further, the lens control unit 130 controls the second lens unit 134 so that the laser light b emitted from the second light source 124 is focused on the second area 164, and focuses the laser light b. adjust. That is, the lens control unit 130 controls the first lens unit 132 and the second lens unit 134 so that the focal points of the laser beams a and b are aligned with the position where the optical waveguide is to be formed in the depth direction of the base 150. Control. In this case, the lens control unit 130 may control the first lens unit 132 and the second lens unit 134 such that the laser beams a and b are focused on the surface of the base 150.
[0022]
The light source control unit 120 instructs the first light source 122 and the second light source 124 to generate laser lights a and b having predetermined wavelengths. Based on the instruction, the first light source 122 generates a laser light a having a predetermined wavelength, and the second light source 124 generates a laser light b having a shorter wavelength than the predetermined wavelength.
[0023]
The generated laser beams a and b are condensed by the first lens unit 132 and the second lens unit 134 and are applied to the first region 162 and the second region 164 of the base 150, respectively. That is, the second region 164 is irradiated with both the laser beams a and b. Then, the first region 162 and the second region 164 are irradiated with the laser beams a and b for a predetermined time, respectively. Thus, the optical waveguide 160 is formed in the third region 166 where the sum of the energies of the laser beams a and b exceeds the change energy at which the refractive index of the resin material forming the base 150 changes.
[0024]
When the optical waveguide 160 is formed in a predetermined region of the base 150 by irradiating the laser beams a and b, the overall control unit 110 transmits the optical waveguide 160 in the base 150 to the stage control unit 140 next. Is instructed to move the stage 142 so that the regions to be formed are irradiated with the laser beams a and b. The stage control section 140 moves the stage 140 to a predetermined position based on the instruction. Then, the area is irradiated with the laser beams a and b, and the refractive index of the resin material in the area is changed, thereby forming (extending) the optical waveguide 160. By repeating the above operation, the optical waveguide 160 having a desired pattern can be formed at a desired position on the base 150.
[0025]
In the present embodiment, the desired area of the base 150 is irradiated with the laser beams a and b by moving the stage 140. However, by scanning the base 150 with the laser lights a and b, The desired regions 150 may be irradiated with the laser beams a and b. Further, the base 150 may be irradiated with the laser beams a and b by moving the stage 140 and scanning the base 150 with the laser beams a and b.
[0026]
While moving the stage 140 so that the laser light a and b are irradiated to the region where the optical waveguide 160 is to be formed next, the light source control unit 120 controls the first light source 122 and the second light source 124 The operation of generating the lights a and b may be limited. Specifically, for example, the generation of the laser beams a and b of the first light source 122 and the second light source 124 is stopped, or the levels of the laser beams a and b are reduced.
[0027]
FIG. 3 is a diagram showing a relationship between a region irradiated with laser light on the base 150 and energy received by the base 150 from the laser light. FIG. 3A is a diagram showing a relationship between the region irradiated with the laser beams a and b and the energy received by the base 150 from each of the laser beams a and b. FIG. 3B is a diagram illustrating a relationship between a region irradiated with the laser beams a and b and a sum of energy received by the substrate 150 from the laser beams a and b.
[0028]
The energy that the substrate 150 receives from each of the laser beams a and b is preferably substantially equal to or smaller than the change energy at which the refractive index of the substrate 150 changes. Further, it is preferable that the distribution of energy that the base 150 receives from each of the laser beams a and b with respect to the distance from the center of the first region 162 and the second region 164 is a continuous curve distribution. It is preferable that one of the laser beams a and b has a steeper energy distribution to the base 150 than the other has a steeper energy distribution to the base 150.
[0029]
In the present embodiment, the laser light a and b are different from the distance from the center of the first region 162 and the distance from the center of the second region 164 (that is, the distance from the focal point of the laser light a and b). The energy distribution received from a and b shows a Gaussian distribution. Here, the energy that the base 150 receives from the laser beams a and b includes light energy and heat energy. That is, the refractive index may be changed by giving energy including both light energy and heat energy to the base 150 from the outside, or the refractive index may be changed by giving either light energy or heat energy. . Further, by making the wavelength of the laser light a longer than the wavelength of the laser light b, the distribution of the energy that the laser light b gives to the base 150 is steeper than the distribution of the energy that the laser light a gives to the base 150. .
[0030]
By irradiating the second region 164 with the laser beams a and b whose energy distribution with respect to the distance from the focal point indicates a Gaussian distribution, the energy distribution received by the base 150 in the second region 164 is changed to the laser beam a or b. Can be steeper than the energy distribution. Accordingly, when only the laser beam b and / or a is irradiated on the base 150, the base 150 emits the laser beams a and b from a region where the energy received from the laser beam b and / or a exceeds the change energy. The region (the third region 166 in the present embodiment) in which the energy received from exceeds the change energy can be reduced. That is, the optical waveguide can be formed thinner on the base 150 than when the base 150 is irradiated with only the laser light b and / or a.
[0031]
In the present embodiment, the optical waveguide 160 is formed on the substrate 150 by irradiating the substrate with two light beams, laser beams a and b. However, by irradiating the substrate 150 with three or more laser beams, The optical waveguide 160 may be formed on the base 150. Thereby, the optical waveguide 160 can be formed even thinner.
[0032]
The base 150 may include a two-photon absorbing resin material. The probability that the refractive index of the resin material forming the base 150 changes is generally inversely proportional to the square of the distance from the focal point in the case of one-photon absorption, whereas the probability of the two-photon absorption being different from the distance from the focal point. It is inversely proportional to the fourth power. That is, by configuring the base 150 to include a material that absorbs two-photons, the energy distribution in FIG. 3B can be made steeper, so that the optical waveguide can be formed more narrowly on the base 150. .
[0033]
The substrate 150 may include a dye whose dye absorption edge shifts to a long wavelength side or a short wavelength side by receiving predetermined energy, such as an azo dye. For example, the base 150 may include a dye that is oxidized by irradiation with a laser beam having a predetermined wavelength and whose dye absorption edge shifts to a longer wavelength side. Thus, the refractive index in third region 166 can be more easily changed.
[0034]
In addition, the base 150 may include a dye that is oxidized by irradiation with a laser beam and whose dye absorption edge shifts to a shorter wavelength side. In this case, the laser light is applied to a region to be a clad. Accordingly, since the refractive index of the region containing the oxidized dye can be made smaller than that of the region not irradiated with the laser light, an optical waveguide having a core containing the dye not irradiated with the laser light as a core is formed. be able to. In this case, the coloring matter may be dispersed and contained in the substrate 150, or may be contained only around the region where the core is formed. Further, the dye may be applied around a region where the core is formed.
[0035]
FIG. 4 is a diagram illustrating an optical communication device 10 which is an example of an electronic apparatus including an optical circuit board having an optical waveguide according to the present invention. The optical communication device 10 is an example of an optical circuit board, and includes a base 150 on which optical waveguides 160-1 and 160-2 are formed, optical transmission lines 170-1 and 170-2, a light emitting element 180, and a light receiving element. 182 and a control circuit 184.
[0036]
The control circuit 184 outputs an electric signal for controlling the light emitting element 180. The control circuit 184 outputs an electric signal for controlling the light emitting element 180 based on the electric signal received from the light receiving element 182, for example. Further, the control circuit 184 may output an electric signal based on an instruction from another circuit. The light emitting element 180 is an element that emits light such as a semiconductor laser, and generates an optical signal based on the electric signal received from the control circuit 184. The optical waveguide 160-1 transmits an optical signal generated by the light emitting element 180. The optical transmission line 170-1 transmits the optical signal received from the optical waveguide 160-1 to another optical communication device.
[0037]
The optical transmission line 170-2 transmits an optical signal generated in another optical communication device. The optical waveguide 160-2 transmits the optical signal received from the optical transmission line 170-2. The light receiving element 182 is an element such as a photodiode, and generates an electric signal based on the light received from the optical waveguide 160-2. Then, the control circuit 184 receives the electric signal from the light receiving element 182 and performs a predetermined process based on the electric signal.
[0038]
FIG. 5 is a perspective view showing a configuration of a personal computer 1000 which is an example of an electronic apparatus including an optical circuit board having an optical waveguide according to the present invention. 8, a personal computer 1000 includes a display panel 1002 and a main body 1006 having a keyboard 1004. The optical circuit board having the optical waveguide of the present invention is used for communication between the built-in boards of the main body 1006 of the personal computer 1000 and between the main body 1006 and the display panel 1002.
[0039]
The examples and application examples described through the above embodiments of the present invention can be used in appropriate combination or with modifications or improvements depending on applications. The present invention is limited to the description of the above embodiments. Not something. It is apparent from the description of the appended claims that embodiments in which such combinations or changes or improvements are made can be included in the technical scope of the present invention.
[Brief description of the drawings]
FIG. 1 is a view showing an optical waveguide forming apparatus 100 according to an embodiment of the present invention.
FIG. 2 is a diagram showing a substrate 150 irradiated with laser beams a and b.
FIG. 3 is a diagram illustrating a relationship between a region irradiated with laser light on a base 150 and energy of the laser light.
FIG. 4 is a diagram showing an optical communication device 10 including an optical circuit board having an optical waveguide according to the present invention.
FIG. 5 is a perspective view illustrating a configuration of a personal computer 1000 as an example of an electronic apparatus including an optical circuit board having an optical waveguide according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Optical communication apparatus, 100 ... Optical waveguide forming apparatus, 110 ... General control part, 120 ... Light source control part, 122 ... Light source, 124 ... Light source, 130 ... Lens Control unit, 132: lens unit, 134: lens unit, 140: stage, 140: stage control unit, 142: stage, 150: base, 160: optical waveguide, 162 area, 164 area, 166 area, 170 optical transmission path, 180 light emitting element, 182 light receiving element, 184 control circuit, 1000 ...・ Personal computer, 1002 ・ ・ ・ Display panel, 1004 ・ ・ ・ Keyboard, 1006 ・ ・ ・ Main unit

Claims (7)

An optical waveguide forming method for forming an optical waveguide on a base containing a resin material whose refractive index changes by receiving predetermined energy from the outside, wherein energy having a first distribution is applied to a first region of the base. Forming the optical waveguide by applying energy having a second distribution to a second region included in the first region and changing a refractive index of the base in at least a part of the second region. A method of forming an optical waveguide. By irradiating a first light having a first wavelength to the first region, energy having the first distribution is given to the first region, and a first light having a wavelength shorter than the first wavelength is provided. 2. The method according to claim 1, wherein irradiating the second region with the second light beam gives energy having the second distribution to the second region. 3. The method according to claim 2, wherein the first light is applied to the first area for a predetermined time, and the second light is applied to the second area for a time shorter than the predetermined time. The optical waveguide forming method according to the above. The optical waveguide forming method according to claim 1, wherein the resin material includes a material that absorbs two photons. An optical circuit board having an optical waveguide formed by the optical waveguide forming method according to claim 1. An electronic device having an optical waveguide formed by the optical waveguide forming method according to claim 1. An optical waveguide forming apparatus for forming an optical waveguide on a substrate including a resin material whose refractive index changes by receiving light from the outside,
A stage for mounting the substrate,
A first light source that generates a first light having a first wavelength;
A second light source that generates a second light having a second wavelength shorter than the first wavelength;
A first condensing unit that condenses the first light on a first region of the base;
An optical waveguide forming apparatus, comprising: a second light condensing unit that condenses the second light on a second area included in the first area.

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