JP2004323342A - Carbon nanotube orientatation method, and carbon nanotube composition - Google Patents
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Abstract
Description
本発明は、カーボンナノチューブを配向させる技術とそれを用いた配線技術や電子デバイス作製技術、及び樹脂加工技術に関する。 The present invention relates to a technique for aligning carbon nanotubes, a wiring technique and an electronic device manufacturing technique using the same, and a resin processing technique.
カーボンナノチューブは、１９９１年に発見されたもので（Nature , 354 , pp.56-58(1991)）、直径1〜1 00nm、長さ1um〜100mmで中空の円筒形の構造を持った炭素だけからなる物質である。その特異的な構造に由来した様々な物性を有するカーボンナノチューブはナノテクノロジーを代表する材料として大きく注目を浴びている。例えば、カーボンナノチューブの導電性を利用したもの（特開2002-075102号、特開2003-034751号等）、電界電子放出性を利用したもの（特開2001-035362号、特開2003-063814号等）、帯電防止材料（特開2002-067209号等）、放熱性を利用したもの（特開平10-168502号等）、機械強度や耐腐食性を向上させたもの（特開2002-097375号等）等、幅広い分野で数多くの検討事例を列挙することができる。 Carbon nanotubes were discovered in 1991 (Nature, 354, pp.56-58 (1991)), and consist only of carbon with a hollow cylindrical structure with a diameter of 1 to 100 nm and a length of 1 to 100 mm. It is a substance consisting of Carbon nanotubes having various physical properties derived from their specific structures have attracted much attention as materials that represent nanotechnology. For example, those utilizing the conductivity of carbon nanotubes (JP-A-2002-075102, JP-A-2003-034751 and the like) and those utilizing the field electron emission (JP-A-2001-035362, JP-A-2003-063814) Etc.), antistatic materials (Japanese Patent Application Laid-Open No. 2002-067209, etc.), materials utilizing heat dissipation (Japanese Patent Application Laid-Open No. 10-168502, etc.), and materials having improved mechanical strength and corrosion resistance (Japanese Patent Application Laid-Open No. 2002-097375) Many examples can be listed in a wide range of fields.
更に、カーボンナノチューブは前記通り大きなアスペクト比を有する特異的な構造であり、効果的にＣＮＴの特性を引き出すためにはカーボンナノチューブが一方向に配向していることが好ましいため、その配向制御方法に関する検討も数多く行われている。例えば、カーボンナノチューブを基板上に並べる方法（特許文献１：特開2001-312953号）や基板上でカーボンナノチューブを製造する方法（特許文献２：特開2002-338221号）、ＣＮＴを高分子中に分散して延伸する方法（フレーレンナノチューブネットワーク・ニュースレターNo.1(1999)pp.41-43）などが挙げられる。これらの配向方法を用いることで、電界放出型電子源アレイや、高強度のカーボンナノチューブ含有高分子フィルムなどが実現されている。 Further, since the carbon nanotube has a specific structure having a large aspect ratio as described above, and it is preferable that the carbon nanotube is oriented in one direction in order to effectively bring out the properties of the CNT, the method relates to an orientation control method thereof. Many studies have been conducted. For example, a method of arranging carbon nanotubes on a substrate (Patent Document 1: Japanese Patent Application Laid-Open No. 2001-312953), a method of producing carbon nanotubes on a substrate (Patent Document 2: Japanese Patent Application Laid-Open No. 2002-338221), and a method of using CNT in a polymer (Fullerene nanotube network newsletter No.1 (1999) pp.41-43). By using these alignment methods, a field emission type electron source array, a high-strength carbon nanotube-containing polymer film, and the like have been realized.
しかしながら基本的に前者２つの配向方法では、カーボンナノチューブの円筒軸が基板面に対して垂直方向に配向し、後者の配向方法では円筒軸が延伸方向に平行に配向するため、その配向方向にほとんど自由度がない。さらに前者２つの配向方法では、電気泳動法などでカーボンナノチューブを基板面に固着することで配向したり、炭素化合物を熱分解することでカーボンナノチューブの配向膜を基板上に成長させたりするため、作製するのに時間がかかるといった問題がある。また後者の配向方法では、高分子中に分散して延伸する必要性があり、その用途が限られてしまうといった問題がある。
本発明の目的は、上記のような問題点を解決するもので、簡便で且つ汎用性が広い方法で、短時間のうちに所望の方向にカーボンナノチューブを配向させることにある。 An object of the present invention is to solve the above-described problems, and to provide a simple and versatile method for aligning carbon nanotubes in a desired direction in a short time.
本発明者らは、イオン性液体中に分散したカーボンナノチューブに電界を印加すると電界印加方向の電気抵抗が大幅に低下し、カーボンナノチューブの円筒軸方向が印加した電界方向に配向することを見出し本発明に至った。即ち、本発明は、少なくともカーボンナノチューブを含んだ材料に電界を印加することにより、カーボンナノチューブを配向させることを特徴とするカーボンナノチューブの配向方法である。 The present inventors have found that when an electric field is applied to carbon nanotubes dispersed in an ionic liquid, the electric resistance in the direction in which the electric field is applied is significantly reduced, and the cylinder axis direction of the carbon nanotubes is oriented in the direction of the applied electric field. Invented the invention. That is, the present invention is a method for aligning carbon nanotubes, which comprises applying an electric field to a material containing at least carbon nanotubes to orient the carbon nanotubes.
また、カーボンナノチューブとイオン性液体からなるゲル状組成物にすることは、カーボンナノチューブの周りにイオン性液体が溶媒和し分散している、ゲル中においてカーボンナノチューブが流動可能である、カーボンナノチューブはもちろんイオン性液体自体も多少の導電性を有している等の理由により、電界印加による配向制御に非常に適している。更に、カーボンナノチューブとイオン性液体からなるゲル状組成物は粘性があるため、所定の位置に塗布するもしくは適量だけ滴下する等のハンドリング性、加工性に非常に優れているため、本発明の応用用途を広げることができる。 In addition, the gel composition comprising the carbon nanotube and the ionic liquid is formed by solvating and dispersing the ionic liquid around the carbon nanotube, allowing the carbon nanotube to flow in the gel, Of course, the ionic liquid itself is very suitable for orientation control by applying an electric field because it has some conductivity. Furthermore, since the gel composition composed of carbon nanotubes and ionic liquid is viscous, it is extremely excellent in handleability and processability such as application to a predetermined position or dropping in an appropriate amount, and therefore the application of the present invention Uses can be expanded.
本発明に従えば、電界印加方向に従った所望の方向に短時間のうちにカーボンナノチューブを配向することができる。またカーボンナノチューブは印加される電界によって配向するので、電界の印加強度、印加時間、印加周期等を制御することでその配向の度合いをコントロールすることも容易に実現できる。 According to the present invention, the carbon nanotubes can be oriented in a desired direction according to the electric field application direction within a short time. In addition, since the carbon nanotubes are oriented by the applied electric field, it is also easy to control the degree of the orientation by controlling the applied strength, application time, application cycle, and the like of the electric field.
また本発明は、カーボンナノチューブとイオン性液体からなるゲル状組成物であり、カーボンナノチューブが配向しているゲル状組成物である。 The present invention is also a gel composition comprising a carbon nanotube and an ionic liquid, wherein the carbon nanotube is oriented.
本発明のゲル状組成物および配向制御方法は次のような用途に利用できる。
例えば、半導体ＩＣは飛躍的に高性能化が進められてきたものの、現状ではリソグラフィー技術の限界が見え始め、リソグラフィー技術の限界を破った微細化した配線構造を形成することができる新たな技術が望まれている。そこで、カーボンナノチューブの約１ｎｍといった極細の径を利用した研究が多く行われているが（特開平2002-329723号等）、逆にカーボンナノチューブのその細さ故、加工性が非常に悪くまだ実用化にはほど遠い。しかし、本発明によればカーボンナノチューブを含んだゲル状組成物を塗布し、電界を所望の方向に印加しながらカーボンナノチューブを基板上に接着もしくは固着することでナノ配線を行うことができる。
またこの配向による抵抗値の変化を利用したスイッチング素子やメモリへの応用が可能である。
The gel composition and the orientation control method of the present invention can be used for the following applications.
For example, although semiconductor ICs have been dramatically improved in performance, at present the limits of lithography technology are beginning to be seen, and new technologies that can form finer wiring structures that break the limits of lithography technology have been developed. Is desired. Therefore, many studies have been conducted using ultra-fine carbon nanotubes having a diameter as small as about 1 nm (Japanese Patent Application Laid-Open No. 2002-329723). It is far from becoming. However, according to the present invention, nanowiring can be performed by applying a gel-like composition containing carbon nanotubes and applying or applying an electric field in a desired direction to adhere or fix the carbon nanotubes on a substrate.
Further, the present invention can be applied to a switching element or a memory utilizing a change in resistance value due to this orientation.
また、従来鉛を含む半田を使って行われてきた半導体素子の金属フレームへの接着や外部電極との接続に、人体に有害な鉛を含まない金属フィラーを高充填してペーストにする方法などが検討されている。（特開平05-325635号、特開平09-245523号、特開2001-014944号、特開2003-016838号等）この導電性ペーストは、回路基板用の導体として用いられているだけでなく、最近ではプリント回路基板の電磁波シールド材料として導電性ペーストを使用する試みも行われ始めている。しかし、長い間使用していると接点に使用されている金属表面に酸化膜が形成されるため、接触抵抗値が大きく不安定になり、接点の信頼性が極端に低下する可能性があった。従って、酸化膜や腐食膜を形成しない安定な導電材料が望まれており、そのようなハンダ代替として利用することもできる。 In addition, conventional methods of using lead-containing solder to bond semiconductor elements to metal frames and connect them to external electrodes are used to paste high-fill metal fillers that do not contain harmful lead into paste. Is being considered. (JP-A-05-325635, JP-A-09-245523, JP-A-2001-014944, JP-A-2003-016838, etc.) This conductive paste is used not only as a conductor for a circuit board, Recently, attempts have been made to use a conductive paste as an electromagnetic wave shielding material for a printed circuit board. However, when used for a long time, an oxide film is formed on the metal surface used for the contact, so the contact resistance value becomes large and unstable, and the reliability of the contact may be extremely reduced. . Therefore, a stable conductive material that does not form an oxide film or a corrosion film is desired, and can be used as a substitute for such a solder.
さらに、高分子フィルムのヤング率などの機械的特性や寸法安定性を向上させるために、特開2003-82202号などではフィルム中にカーボンナノチューブを分散させることを提案しているが、分散しているカーボンナノチューブを配向させることでさらにその特性を向上させることにも本発明は利用できる。 Furthermore, in order to improve mechanical properties such as Young's modulus and dimensional stability of the polymer film, Japanese Patent Application Laid-Open No. 2003-82202 proposes dispersing carbon nanotubes in the film. The present invention can be used to further improve the characteristics of carbon nanotubes by orienting them.
以上のように、本発明のカーボンナノチューブの配向制御方法を用いれば、簡便で且つ汎用性が広い方法で、短時間のうちに所望の方向にカーボンナノチューブを配向することができるため、カーボンナノチューブを利用した様々なデバイスの高品質化、低コスト化が可能となる。 As described above, by using the method for controlling the orientation of carbon nanotubes of the present invention, the carbon nanotubes can be oriented in a desired direction in a short time in a simple and versatile manner. The quality and cost of various devices used can be reduced.
本発明において用いられるカーボンナノチューブは、炭素六角網面が円筒状に閉じた単層構造あるいはこれらの円筒構造が入れ子状に配置された多層構造をした材料のことである。単層構造のみから構成されていても多層構造のみから構成されていても良く、単層構造と多層構造が混在していてもかまわない。また部分的にカーボンナノチューブの構造を有している炭素材料も使用できる。チューブ径、長さ、構造等を特に限定するものではないが、単層のようなチューブ径が細く、且つ長いようなアスペクト比が大きいものがより望ましい。 The carbon nanotube used in the present invention is a material having a single-layer structure in which carbon hexagonal mesh planes are closed in a cylindrical shape or a multilayer structure in which these cylindrical structures are nested. It may be composed of only a single-layer structure or only a multilayer structure, and a single-layer structure and a multi-layer structure may be mixed. Further, a carbon material partially having a carbon nanotube structure can also be used. The tube diameter, length, structure, and the like are not particularly limited, but those having a small tube diameter, such as a single layer, and a long aspect ratio, such as a long tube, are more desirable.
本発明において用いられるイオン性液体は、特に限定するものはなく従来知られた各種のイオン性液体を使用することができるが、常温または可及的に常温に近い温度において液体を呈し、安定なものが好ましい。また、下記の一般式（Ｉ）〜（ＩＶ）で表されるカチオンと陰イオン（Ｘ−）よりなるイオン性液体が特に好ましい。 The ionic liquid used in the present invention is not particularly limited, and various conventionally known ionic liquids can be used, but the liquid is present at room temperature or as close to room temperature as possible, and is stable. Are preferred. Further, an ionic liquid comprising a cation represented by the following general formulas (I) to (IV) and an anion (X-) is particularly preferred.
［ＮＲ4xＨ4-x］+ ・・（ＩＩＩ）
［ＰＲ5xＨ4-x］+ ・・（ＩＶ）
上記の式（Ｉ）〜（ＩＶ）において、R2〜R5はそれぞれ独立で炭素数１０以下のアルキル基またはエーテル結合を含み、炭素と酸素の合計数が１０以下のアルキル基を表す。式（Ｉ）においてＲ１は炭素数１〜４のアルキル基または水素原子を表し、炭素数１のメチル基がより好ましい。また式（Ｉ）において、Ｒ２とＲ1は同一ではないことが好ましい。式（ＩＩＩ）及び（ＩＶ）において、Ｘは１〜４の整数である。
[NR4 x H 4-x ] +・ ・ (III)
[PR5 x H 4-x ] +・ (IV)
In the above formulas (I) to (IV), R2 to R5 each independently represent an alkyl group having 10 or less carbon atoms or an ether bond, and represent an alkyl group having a total number of carbon and oxygen of 10 or less. In the formula (I), R1 represents an alkyl group having 1 to 4 carbon atoms or a hydrogen atom, and a methyl group having 1 carbon atom is more preferable. In the formula (I), R2 and R1 are preferably not the same. In the formulas (III) and (IV), X is an integer of 1 to 4.
陰イオン（Ｘ−）としては、テトラフルオロホウ酸、ヘキサフルオロリン酸、ビス（トリフロロメチルスルホニル）イミド酸、過塩素酸、トリス（トリフロロメチルスルホニル）炭素酸、トリフロロメタンスルホン酸、ジシアンアミド、トリフロロ酢酸、有機カルボン酸、またはハロゲンイオンより選ばれた少なくとも１種である。これらは１種類のみ用いても良いし、複数のイオン性液体を用いても良い。カーボンナノチューブのイオン性液体への添加量は特に制限はないが、イオン性液体に対するカーボンナノチューブの量は重量比で１％程度が好ましい。またカーボンナノチューブの純度が悪くなるほどゲル化しにくくなるため触媒等の不純物が少ないものが好ましく、カーボンナノチューブの純度が７０％程度以上のものがより好ましい。 As the anion (X-), tetrafluoroboric acid, hexafluorophosphoric acid, bis (trifluoromethylsulfonyl) imidic acid, perchloric acid, tris (trifluoromethylsulfonyl) carbonic acid, trifluoromethanesulfonic acid, dicyanamide , Trifluoroacetic acid, organic carboxylic acids, or halogen ions. These may be used alone or a plurality of ionic liquids may be used. The amount of the carbon nanotube added to the ionic liquid is not particularly limited, but the amount of the carbon nanotube to the ionic liquid is preferably about 1% by weight. Further, since the lower the purity of the carbon nanotube, the more difficult it is to gel, the lower the impurity such as the catalyst, the more preferable the carbon nanotube, and the more preferable the purity of the carbon nanotube is about 70% or more.
また更に、イオン性液体の他に有機材料、無機材料、金属等と組合せても良く、この場合もその重量に特に制限はないが、電界印加時において導電性を有していることが好ましい。 Furthermore, in addition to the ionic liquid, an organic material, an inorganic material, a metal, or the like may be combined. In this case, the weight is not particularly limited, but preferably has conductivity when an electric field is applied.
本発明における電界印加の方法は、例えばカーボンナノチューブを分散させたゲル状液体の両端に電気良導体の金属電極を取り付けて、直流電圧源、もしくは交流電圧源にて電圧を印可することで実施できる。この際、ゲル状液体がイオン性液体であることが好ましい。また印可される電圧は連続的でも構わないが、断続的なパルス電圧でももちろん可能である。 The method of applying an electric field in the present invention can be carried out, for example, by attaching metal electrodes of a good electrical conductor to both ends of a gel-like liquid in which carbon nanotubes are dispersed, and applying a voltage with a DC voltage source or an AC voltage source. At this time, the gel liquid is preferably an ionic liquid. The applied voltage may be continuous, but may be an intermittent pulse voltage.
以下に、実施形態例を挙げ、添付図面を参照して、本発明の実施の形態を具体的かつ詳細に説明する。 Hereinafter, embodiments of the present invention will be described specifically and in detail with reference to the accompanying drawings.
本発明の一実施例を、図1〜4を用いて説明する。以下、単層のカーボンナノチューブを用いた場合の配向方法に関して述べるが、多層のカーボンナノチューブやカーボンナノホーンなどを用いることはもちろん可能である。直径約1nm、長さ1umの単層のカーボンナノチューブ（HiPco : Carbon Nanotechnologies社製）とイオン性液体である1-ブチル-3-メチルイミダゾリウムヘキサフルオロホスフェート（化式（Ｖ））（Fluka社製）とを重量比でカーボンナノチューブが1wt%となるように混合し、乳鉢に加えて約15分ほど磨り潰すことで単層カーボンナノチューブ２が分散した黒色ゲル状組成物が得られる（図１）。
One embodiment of the present invention will be described with reference to FIGS. Hereinafter, an alignment method using a single-walled carbon nanotube will be described. However, it is of course possible to use a multi-walled carbon nanotube or a carbon nanohorn. A single-walled carbon nanotube (HiPco: Carbon Nanotechnologies) having a diameter of about 1 nm and a length of 1 μm and 1-butyl-3-methylimidazolium hexafluorophosphate (chemical formula (V)), an ionic liquid (Fluka) ) Is mixed so that the weight ratio of carbon nanotubes is 1 wt%, and the mixture is ground in a mortar for about 15 minutes to obtain a black gel composition in which single-
このようにして得られた黒色ゲルを図２に示すようなガラス製治具３の凹部５に一様に塗布し、両端の金属製電極４間に、直流電源を用いて10Vの電圧を１分程印加する。この際、印加する電界は1V/cm以上が好ましい。このようにして電圧印加方向の黒色ゲル７の電気抵抗が低下し、ゲル中に分散している単層カーボンナノチューブ８を電圧印加方向に配向することができる（図３）。
The black gel thus obtained is uniformly applied to the concave portion 5 of the
この結果を詳細に説明する。
カーボンナノチューブの配向変化を電気抵抗値の変化としてモニターするために図６に示すような測定用セルを作成した。まず、４端子法により電気抵抗値を測定するために、ガラス基板上に、金を蒸着により、電極の幅1ｍｍ、電極間の間隔幅2ｍｍ、中央の間隔幅は1ｍｍとなるように４本の線状の電極を形成した。これら４本の電極全てをまたがるようにカーボンナノチューブゲルを塗布した。電界を印加する方法としては、図７に示すように電気抵抗値の測定方向に対して平行方向に配置できるようにした。
This result will be described in detail.
In order to monitor the change in the orientation of the carbon nanotube as a change in the electric resistance value, a measurement cell as shown in FIG. 6 was prepared. First, in order to measure the electric resistance value by the four-terminal method, gold was vapor-deposited on a glass substrate, and the electrode width was 1 mm, the interval width between the electrodes was 2 mm, and the center interval width was 1 mm. A linear electrode was formed. A carbon nanotube gel was applied so as to straddle all four electrodes. As a method of applying an electric field, as shown in FIG. 7, the electric field can be arranged in a direction parallel to the measurement direction of the electric resistance value.
測定方法を次に述べる。まず、電場印加用の電極はカーボンナノチューブゲルの両端から外した状態でカーボンナノチューブゲルの電気抵抗値を測定しておく。次に電場印加用電極をカーボンナノチューブゲルの両端に配置した状態で14V/cmの直流電場を10秒間印加した後、素早く電場印加用の電極はカーボンナノチューブゲルの両端から外し電気抵抗値を測定する。その後、２分間そのまま放置した後、前記と同じ方法で電場印加前後での電気抵抗値を再測定した。ただし、電場印加時間は10秒から300秒まで徐々に長くしていった。この結果を図８に示すが、電場印加直後は電気抵抗値が大きく低下し、２分間放置後にはまた元の電気抵抗値に戻り、再度電場を印加すると再度電気抵抗値が低下するといった可逆的な変化が見られた。つまり、電場を印加しないとランダムな配向状態をとるのに対して、電場印加時にはカーボンナノチューブゲル中のカーボンナノチューブが電場印加方向と同じ方向に配向していることを示している。この現象を用いてスイッチングやメモリに応用できる。 The measuring method will be described below. First, the electric resistance value of the carbon nanotube gel is measured in a state where the electrode for applying an electric field is removed from both ends of the carbon nanotube gel. Next, after applying a DC electric field of 14 V / cm for 10 seconds with the electric field applying electrodes arranged at both ends of the carbon nanotube gel, quickly remove the electric field applying electrodes from both ends of the carbon nanotube gel and measure the electric resistance value. . Then, after leaving it as it was for 2 minutes, the electric resistance value before and after the electric field application was measured again by the same method as described above. However, the electric field application time was gradually increased from 10 seconds to 300 seconds. The results are shown in FIG. 8, and the reversibility is such that the electric resistance value greatly decreases immediately after application of the electric field, returns to the original electric resistance value after standing for 2 minutes, and decreases again when the electric field is applied again. Changes were seen. In other words, this indicates that the carbon nanotubes in the carbon nanotube gel are oriented in the same direction as the direction in which the electric field is applied when the electric field is applied, whereas the orientation is random when the electric field is not applied. It can be applied to switching and memory using this phenomenon.
次に図９に示す通り、電場印加方向を電気抵抗値測定方法と直交方向に印加すること以外は同じ方法で電界印加前後でのカーボンナノチューブゲルの電気抵抗値を測定した。図１０に示す通り、電気抵抗値の測定方向と直交した方向にカーボンナノチューブが配向していることを示している。 Next, as shown in FIG. 9, the electric resistance value of the carbon nanotube gel before and after the electric field application was measured by the same method except that the electric field application direction was applied in a direction orthogonal to the electric resistance value measuring method. As shown in FIG. 10, the carbon nanotubes are oriented in a direction perpendicular to the direction in which the electric resistance is measured.
以下、実施例1と同様に、直径約1nm、長さ1umの単層のカーボンナノチューブ（HiPco : Carbon Nanotechnologies社製）とイオン性液体である1-ブチル-3-メチルイミダゾリウムヘキサフルオロホスフェート（化式Ｖ）（Fluka社製）とを重量比でカーボンナノチューブが1wt%となるように混合し、乳鉢に加えて約15分ほど磨り潰すことでカーボンナノチューブが分散した黒色ゲル状組成物が得られる。 Hereinafter, as in Example 1, a single-walled carbon nanotube (HiPco: Carbon Nanotechnologies) having a diameter of about 1 nm and a length of 1 μm and 1-butyl-3-methylimidazolium hexafluorophosphate (chemical compound) Formula V) (manufactured by Fluka) is mixed so that the weight ratio of the carbon nanotubes is 1 wt%, and the mixture is crushed in a mortar for about 15 minutes to obtain a black gel composition in which the carbon nanotubes are dispersed. .
このようにして得られた黒色ゲルを図４に示すような金属製電極９間にわずかな隙間が開いたガラス製治具１１に一様に封入し、両端の金属製電極に10Vの電圧を1分印加する。このとき電極間の隙間間隔は1um〜1mmが好ましい。また、印加する電界は1V/cm以上が好ましい。このようにして電圧印加方向の黒色ゲル１０の電気抵抗が低下し、ゲル中に分散しているカーボンナノチューブ１３を電圧印加方向に配向することができ、図５のような治具配置に対して垂直なカーボンナノチューブアレイ１４を作製することができる。
The black gel thus obtained is uniformly sealed in a
以上単層のカーボンナノチューブを用いた場合の配向方法に関して述べたが、多層のカーボンナノチューブやカーボンナノホーンなどを用いることはもちろん可能である。 Although the orientation method using a single-walled carbon nanotube has been described above, it is of course possible to use a multi-walled carbon nanotube or a carbon nanohorn.
この配向方法および組成物を用いれば、スイッチング素子、メモリ、配線などの電気、電子素子や、フィルムなどの材料に利用することが出来る。 If this orientation method and composition are used, they can be used for electric and electronic elements such as switching elements, memories and wirings, and materials such as films.
２ 単層カーボンナノチューブ
３ ガラス製治具
４ 金属電極
５ 凹部
６ 直流電源
７ 黒色ゲル
８ 単層カーボンナノチューブ
９ 金属電極
１０ 黒色ゲル
１１ ガラス製治具
１３ カーボンナノチューブ
１４ カーボンナノチューブアレイ
2 Single-
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