JP2004322417A - Liquid ejection head, liquid ejection device, and manufacturing method for liquid ejection head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inkjet recording head which has the height notably reduced to be made compact, and widely, to provide a liquid ejection head. <P>SOLUTION: The liquid ejection head includes a head member 10 with nozzle openings 11a and liquid ejection means 12 for jetting a liquid of the nozzle opening part; a channel formation member 20 where channel spaces 20a-20f as channels of the liquid to communicate with the nozzle openings 11a of the head member 10 are set penetrating; a sub-tank member 40 where sub-tank spaces 40a-40f which communicate with the channel spaces 20a-20f to function as sub-tanks, and which also have the damper function are formed; and a sealing member 30 interposed between the channel formation member 20 and the sub-tank member 40. The channel formation member 20, the sub-tank member 40 and the sealing member 30 are all plane-shape members and are layered in parallel to each other. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a liquid ejecting head for ejecting a liquid droplet from a nozzle opening by a liquid ejecting unit, a liquid ejecting apparatus, and a liquid ejecting method.
[0002]
[Prior art]
In general, an ink jet recording apparatus, which is an example of a liquid ejecting apparatus, includes a recording head having a nozzle opening, a liquid ejecting unit (for example, a piezoelectric vibrator or a heating element) for ejecting ink from the nozzle opening, and recording data. A control main unit for controlling the liquid ejecting means.
[0003]
The ink is supplied to the recording head via an on-carriage type in which the ink cartridge is directly mounted on the carriage equipped with the recording head, or from an ink storage unit which is not directly mounted on the carriage but is fixed to the main body of the liquid ejecting apparatus via a flexible tube. For example, an off-carriage type that supplies ink to a sub tank is roughly classified.
[0004]
In the case of an off-carriage type recording head, it is preferable that a sub-tank is formed in order to stably supply the ink supplied via the flexible tube toward the nozzle opening.
[0005]
JP-A-9-277561 and JP-A-2001-232808 disclose typical conventional examples of a recording head having a subtank. In these recording heads, a seal member and an ink supply needle penetrating the seal member are provided between the flow path forming member and the sub tank.
[0006]
Japanese Patent Application Laid-Open No. 2001-205818 discloses a recording head of a type in which an ink supply needle is not provided. In this recording head, an ink supply port member similar to the ink supply needle is provided so as to penetrate the seal member.
[0007]
[Problems to be solved by the invention]
In the conventional print heads disclosed in JP-A-9-277561 and JP-A-2001-232808, the height of the print head is increased because an ink supply needle penetrating the seal member is provided. . Further, in the assembling process, a welding process of the ink supply needle is required.
[0008]
In the print head disclosed in Japanese Patent Application Laid-Open No. 2001-205818, the welding step of the ink supply needle is not required in the assembling step. However, since the ink supply port member similar to the ink supply needle is provided, The point that the height is high is the same as the above-mentioned recording head.
[0009]
The inventor of the present invention has intensively studied the miniaturization of the recording head. Then, it has been found that by sealing the space between the flow path forming member and the sub tank with a planar seal member, the ink supply needle or a member similar thereto can be eliminated.
[0010]
The present invention has been made in view of such a point, and an object of the present invention is to provide an ink jet recording head whose height is remarkably reduced and which can be downsized, and a liquid ejecting head in general.
[0011]
[Patent Document 1]
JP-A-9-277561 (see FIG. 7)
[Patent Document 2]
JP 2001-232808 A (see paragraph [0024], FIG. 5)
[Patent Document 3]
JP 2001-205818 A (see paragraphs [0016] and [0018], FIG. 2)
[0012]
[Means for Solving the Problems]
The present invention provides a head member having a nozzle opening and a liquid ejecting unit for ejecting liquid from the nozzle opening, and a passage space serving as a liquid passage communicating with the nozzle opening of the head member penetratingly provided. A flow path forming member, a sub tank member in which a sub tank space is formed by a deformable damper member while communicating with the flow path space and functioning as a sub tank, and interposed between the flow path forming member and the sub tank member Wherein the flow path forming member, the sub-tank member, and the seal member are substantially planar members, and are stacked in parallel with each other. It is.
[0013]
According to the present invention, since a flat seal member is used, the flow path forming member and the sub tank member are also formed in a flat shape and the seal member is laminated between the two members, so that there is no need to provide an ink supply needle. An off-carriage type liquid ejecting head can be constructed. Since there is no need to provide an ink supply needle, the height of the liquid ejecting head is significantly reduced, and a significant downsizing is realized.
[0014]
The seal member can be formed of, for example, seal rubber.
[0015]
The sub-tank member seals, for example, a partition wall forming member that forms a communication part of the sub-tank space with the flow path space and a partition excluding the surface on the side opposite to the flow path space, and a surface of the sub-tank space on the side opposite to the flow path space. And a deformable damper member that stops. In this case, it is preferable that the partition wall forming member and the damper member are made of the same material and are joined by welding. As a material of the partition wall forming member and the damper member, for example, polyethylene, polypropylene, or the like can be used.
[0016]
Preferably, a deformation regulating member for preventing the sub tank member from being deformed by the reaction force of the seal member is provided on the surface of the sub tank member opposite to the surface on which the seal member is laminated. As the deformation regulating member, for example, a SUS plate having a thickness of about 1 mm can be used.
[0017]
In this case, it is preferable that the sub-tank member be formed with a plurality of contact surfaces that are supported by the deformation regulating member. At this time, the deformation of the sub-tank member is prevented by the plurality of contact surfaces being supported by the deformation restricting member.
[0018]
Further, it is preferable that the flow path forming member, the seal member, the sub-tank member, and the deformation restricting member are unitized and temporarily fixed independently of the head member. The sub-tank member is protected by being unitized by sandwiching the sub-tank member between the flow path forming member and the seal member and the deformation regulating member.
[0019]
For example, the flow path forming member, the seal member, the sub tank member, and the deformation restricting member are unitized by heat caulking using caulking pins.
[0020]
The head member is fixed to the unitized flow path forming member, the seal member, the sub-tank member, and the deformation regulating member with screws, for example. At this time, it is preferable that the screw penetrates the unitized flow path forming member, the sub tank member, and the deformation regulating member in order to improve the mechanical strength of the liquid jet head.
[0021]
In addition, it is preferable that a seal member (second seal member) is provided between the flow path forming member and the head member.
[0022]
The liquid ejecting head may be capable of ejecting a plurality of types of liquids (for example, a plurality of colors of ink). In this case, the head member has a plurality of nozzle openings and a plurality of liquid ejecting means for respectively ejecting the liquid in the plurality of nozzle opening portions, and the flow path forming member has a plurality of nozzles of the head member. A plurality of passage spaces each communicating with the opening are provided therethrough, and the sub-tank member is formed with a plurality of sub-tank spaces which communicate with the plurality of passage spaces and function as sub-tanks and also have a damper function. Have been.
[0023]
According to another aspect of the invention, there is provided a liquid ejecting apparatus including: a liquid ejecting head having any of the features described above; and a control unit for controlling the liquid ejecting unit.
[0024]
Further, according to the present invention, a head member having a nozzle opening and a liquid ejecting means for ejecting liquid from the nozzle opening, and a flow passage space as a flow passage of the liquid communicating with the nozzle opening of the head member penetrates. And a sub-tank member in which a sub-tank space which also communicates with the flow path space and functions as a sub-tank and also has a damper function is formed, and the flow path forming member and the sub-tank member And a seal member interposed therebetween, wherein the flow path forming member, the sub tank member, and the seal member are all planar members, and are stacked in parallel with each other. A method of manufacturing a jet head, comprising: a step of temporarily fixing the flow path forming member, the seal member, the sub tank member, and the deformation restricting member as a unit; Unitized said flow path forming member, the sealing member is a method of comprising the a step of fixing the head member to the sub-tank member and the deformation restricting member.
[0025]
According to the present invention, since the fixing operation on the head member is performed in a state where the sub-tank member is protected by the unitization, the possibility of breakage of the sub-tank member can be significantly reduced.
[0026]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0027]
FIG. 1 is a schematic sectional view showing an ink jet recording head as a liquid jet head according to an embodiment of the present invention. 2A is a top perspective view of the inkjet recording head of FIG. 1, and FIG. 2B is a bottom perspective view of the inkjet recording head of FIG. FIG. 3 is a perspective view showing each member before assembling the ink jet recording head of FIG.
[0028]
As shown in FIGS. 1 to 3, the ink jet recording head 100 of the present embodiment is configured by laminating a head member 10, a flow path forming member 20, a seal member 30, and a sub tank member 40. I have.
[0029]
As shown in FIG. 2, a nozzle plate 11 having a plurality of nozzle openings 11 a is provided on the bottom surface of the head member 10. The nozzle openings 11a are arranged in six rows to support color printing using six colors of ink.
[0030]
Further, as shown in FIG. 1, the head member 10 has a piezoelectric member for ejecting ink from the nozzle openings 11a by changing the pressure of the ink in the nozzle openings corresponding to each of the plurality of nozzle openings 11a. A vibrator 12 is provided.
[0031]
Further, as shown in FIGS. 1 and 3, the head member 10 is provided with ink flow paths 13a to 13c to supply ink to the nozzle openings 11a in communication with the nozzle openings 11a, corresponding to the six colors of ink, respectively. 13f.
[0032]
As shown in FIG. 3, a flow path forming member 20 is attached to the upper surface of the head member 10 via a seal rubber 15.
[0033]
4A is a top perspective view of the flow path forming member 20 of FIG. 3, and FIG. 4B is a bottom perspective view of the flow path forming member 20 of FIG.
[0034]
As shown in FIGS. 4A and 4B, the flow path forming member 20 is a planar member as a whole. The flow path forming member 20 is provided with flow path spaces 20a to 20f as ink flow paths communicating with the ink flow paths 13a to 13f of the head member 10, respectively. The flow path spaces 20a to 20f are formed so as to penetrate the flow path forming member 20, and the upper surface side is open in a circular shape having a relatively large diameter. On the other hand, the openings on the head member 10 side (lower surface side) of the flow path spaces 20a to 20f are formed at the distal ends of the protrusions 21a to 21f formed on the surface (lower surface) of the flow path forming member 20 on the head member 10 side. It has a relatively small circular opening.
[0035]
As shown in FIG. 1, the tips of the protrusions 21 a to 21 f of the flow path forming member 20 on the head member 10 side are connected to the ink flow path of the head member 10 via the seal rubber 15 in the assembled state of the inkjet recording head 100. The openings 13a to 13f are pressed. As a result, the ink flow paths 13 a to 13 f of the head member 10 and the flow path spaces 20 a to 20 f of the flow path forming member 20 are connected in a state sealed by the seal rubber 15.
[0036]
On the other hand, as shown in FIG. 4A, filters 60a to 60f shown in FIG. 3 are placed on the inner edges of the openings on the upper surface side of the flow path spaces 20a to 20f of the flow path forming member 20 (FIG. 1). Support surface portions 26a to 26f are formed. Since the support portions 26a to 26f are used as described above, the filters 60a to 60f can be stably held by the flow path forming member.
[0037]
On the upper surface of the flow path forming member 20, a caulking pin 70 for heat caulking is provided in an upright state. In addition, a projection 23 for fitting a seal member 30 described later is provided on the upper surface of the flow path forming member 20. The passage forming member 20 is formed with a through hole 28 through which a fixing screw 80 (described later) for coupling with the head member 10 penetrates.
[0038]
As shown in FIG. 4A, in the present embodiment, seven caulking pins 70 are formed, six protrusions 23 are formed, and three through holes 28 are formed. . Four of the seven caulking pins are arranged on the left edge in FIG. 4A, and four are arranged on the right edge in FIG. 4A. The six protrusions 23 are arranged substantially evenly around the openings on the upper surface side of the flow path spaces 20a to 20f formed so as to converge at a substantially central portion of the flow path forming member 20, and each of the protrusions 23 It is formed corresponding to the region between the road space and the flow passage space. One of the three through holes 28 is disposed at the left edge in FIG. 4A, and one is disposed at the right edge in FIG. 4A. One is arranged at the front edge.
[0039]
5A is a top perspective view of the seal member 30 of FIG. 3, and FIG. 5B is a bottom perspective view of the seal member 30 of FIG.
[0040]
As shown in FIGS. 5A and 5B, the seal member 30 is a substantially planar member as a whole. The seal member 30 has communication holes 30a to 30f communicating with the flow passage spaces 20a to 20f of the flow passage forming member 20, respectively. Each of the communication holes 30 a to 30 f is formed as a circular hole having the same size and penetrating the seal member 30.
[0041]
The seal member 30 is made of seal rubber, and the flow path forming member 20 side (lower surface side) is flat, but the upper surface side has convex portions 34a to 34f on the periphery of each communication hole 30a to 30f. . Further, positioning holes 32 are formed at respective positions corresponding to the six protrusions 23 provided on the flow path forming member 20.
[0042]
The seal member 30 has a shape and a size that do not interfere with the swaging pins 70 and the through holes 28 formed in the flow path forming member 20. More specifically, the seal member 30 may have any shape and size so as to cover the upper surface openings of the flow path spaces 20a to 20f of the flow path forming member 20 and the area where the six protrusions 23 are present. .
[0043]
As shown in FIG. 3, the sub-tank member 40 includes a partition wall forming member 41 that forms a partition except for an upper surface of the sub-tank spaces 40a to 40f functioning as sub-tanks and a communicating portion with the communication holes 30a to 30f, and a sub-tank space 40a to And a damper film 42 for sealing the upper surface of 40f.
[0044]
In the present embodiment, the partition wall forming member 41 and the damper film 42 are made of polypropylene, and are joined by welding. As a material of the partition wall forming member and the damper film, polyethylene or the like may be used.
[0045]
The sub tank spaces 40a to 40f communicate with the communication holes 30a to 30f of the seal member 30, respectively. And, since the damper film 42, which is a polypropylene film, is deformable, the sub-tank spaces 40a to 40f have a damper function.
[0046]
6A is a top perspective view of the partition wall forming member 41 of FIG. 3, and FIG. 6B is a bottom perspective view of the partition wall forming member 41 of FIG.
[0047]
As shown in FIGS. 6A and 6B, the partition wall forming member 41 is formed of a substantially planar member as a whole. Therefore, as a result, the sub-tank member 40 including the partition wall forming member 41 and the damper film 42 becomes a substantially planar member as a whole.
[0048]
As described above, the partition wall forming member 41 is connected to the ink flow paths 13a to 13f of the head member 10 via the communication holes 30a to 30f of the seal member 30 and the flow path spaces 20a to 20f of the flow path forming member 20, respectively. The partition walls of the communicating sub-tank spaces 40a to 40f are formed so as to separate each of the sub-tank spaces. That is, the sub tank spaces 40 a to 40 f are formed so as to penetrate the partition wall forming member 41, and the upper surface side is closed by the damper film 42. On the other hand, ink supply passages 45a to 45f drawn from a flexible tube connection port 45 formed so as to be concentrated at one location of the partition wall forming member 41 communicate with the sub tank spaces 40a to 40f, respectively.
[0049]
In the partition wall forming member 41, caulking pin holes 47 are formed at respective positions corresponding to the seven caulking pins 70 provided in the flow path forming member 20. In the partition wall forming member 41, through screw holes 48 are formed at respective positions corresponding to the three through holes 28 formed in the flow path forming member 20.
[0050]
On the other hand, the damper film 42 has a shape and a size that do not interfere with the caulking pin holes 47 and the through holes 48 formed in the partition wall forming member 41. More specifically, the area where the sub-tank spaces 40a to 40f and the ink supply paths 45a to 45f are formed without covering the swaging pin holes 47 and the through holes 48 for screws formed on the upper surface of the partition wall forming member 41. The shape and size of the damper film 42 are required to cover the damper film 42.
[0051]
The lower surface of the partition wall forming member 41 is substantially flat at a portion corresponding to the seal member 30. Thereby, as shown in FIG. 1, in the assembled state of the ink jet recording head 100, the ridges 34 a to 34 f around the communication holes 30 a to 30 f on the upper surface of the seal member 30 press the lower surface of the partition wall forming member 41. It has become. Thereby, the partition wall forming member 41 and the seal member 30 are connected in a sealed state. The thickness (height) of the seal member used here is smaller than that of a conventional ink supply needle, so that the head can be easily reduced in size.
[0052]
On the upper surface of the partition wall forming member 41, three contact surface portions 44a to 44c that are abutted and supported by a deformation restricting member 50 described later are formed. As shown in FIG. 3, the damper film 42 has a shape that allows the contact surfaces 44 a to 44 c of the partition wall forming member 41 to be exposed on the damper film 42.
[0053]
The contact surface portions 44a to 44c have a function of preventing the deformation of the partition wall forming member 41 which is likely to occur due to the small thickness of the seal member 30, and therefore, the protruding ridges 34a on the periphery of the communication holes 30a to 30f on the upper surface of the seal member 30. It is preferable to arrange them in a well-balanced manner with respect to -34f. In the present embodiment, the contact surface 44b is formed at the center of the region surrounded by the communication holes 30a to 30f, and the contact surface 44a is formed on the front side in FIG. 6A with respect to the communication holes 30a to 30f. A contact surface portion 44c is formed on the rear side in FIG. 6A with respect to the communication holes 30a to 30f. As shown in FIG. 6A, one of the through screw holes 48 is formed to penetrate the contact surface portion 44a. As described above, one of the plurality of contact surface portions is formed at a substantially central portion of the partition wall forming member 4150, and the other contact surface portion is formed so as to sandwich the contact surface portion formed at the central portion of the partition wall formation member 4150. The deformation of the partition wall forming member 41 caused by the reaction force of the seal member 30 is effectively prevented by the contact surface portion abutting on a deformation regulating member 50 described later.
[0054]
7A is a top perspective view of the deformation regulating member 50 of FIG. 3, and FIG. 7B is a bottom perspective view of the deformation regulating member 50 of FIG.
[0055]
As shown in FIGS. 7A and 7B, the deformation restricting member 50 is a planar member as a whole. The deformation restricting member 50 is manufactured from, for example, a SUS plate having a thickness of about 1 mm.
[0056]
In the deformation regulating member 50, caulking pin holes 57 are formed at respective positions corresponding to the seven caulking pins 70 provided on the flow path forming member 20. In addition, screw holes 58 are formed in the deformation regulating member 50 at positions corresponding to the three through holes 28 formed in the flow path forming member 20. The screw hole 58 has a screw shape in which the fixing screw 80 can be fixed, or a penetrating shape in which self-tapping or fixing with a nut is possible.
[0057]
Thereby, in the assembled state of the ink jet recording head 100, the deformation restricting member 50 comes into contact with the contact surfaces 44 a to 44 c of the partition wall forming member 41, so that the contact portion with the contact surfaces 44 a to 44 c and the caulking pin 70 and the fixing member are fixed. The deformation of the partition wall forming member 41 is effectively suppressed via the fixing portion with the screw 80.
[0058]
Next, a method of manufacturing the above-described inkjet recording head 100 will be described.
[0059]
First, the partition wall forming member 41 and the damper film 42 are welded to form the sub tank member 40. Then, the flow path forming member 20, the seal member 30, the sub tank member 40, and the deformation regulating member 50 are unitized independently of the head member 10 and the seal rubber 15.
[0060]
In the present embodiment, the flow path forming member 20, the seal member 30, the sub tank member 40, and the deformation regulating member 50 are unitized by heat caulking using caulking pins 70.
[0061]
First, the projection 23 of the flow path forming member 20 and the positioning hole 32 of the seal member 30 are fitted. Next, the filters 60a to 60f are placed on the support surfaces 26a to 26f of the flow path spaces 20a to 20f of the flow path forming member 20. In this state, the caulking pin hole 47 of the sub-tank member 40 and the caulking pin hole 57 of the deformation regulating member 50 are fitted to the caulking pin 70 formed in the flow path forming member 20, and then the caulking pin 70 is subjected to a heat caulking process. You. Thereby, the flow path forming member 20, the sealing member 30, the sub tank member 40, and the deformation regulating member 50 are unitized.
[0062]
FIG. 8A is a top perspective view showing a state where the flow path forming member 20, the seal member 30, the sub tank member 40, and the deformation restricting member 50 are unitized, and FIG. FIG. 5 is a bottom perspective view showing a state where the member 20, the seal member 30, the sub tank member 40, and the deformation restricting member 50 are unitized.
[0063]
By employing such a unitization, in a state where the sub-tank member 40 is protected so as to be sandwiched between the flow path forming member 20 and the seal member 30 and the deformation regulating member 50, a fixing operation to be described later with respect to the head member 10 is performed. Can be implemented. Thereby, the possibility of breakage or the like of the sub tank member 40 can be significantly reduced.
[0064]
On the other hand, a seal rubber 15 is attached to the head member 10. Then, the member unitized as described above is fixed to the head member 10 by three fixing screws 80. FIG. 9 is a schematic sectional view of the inkjet recording head 100 including a section of the fixing screw 80.
[0065]
As shown in FIG. 9, each fixing screw 80 is inserted into the through hole 18 of the head member 10 from the lower surface side of the head member 10, penetrates the through hole 28 of the flow path forming member 20, and It is inserted into the through hole 48 and further screwed into a through screw hole 58 provided in the deformation regulating member 50.
[0066]
In the ink jet recording head 100 of the present embodiment as described above, the planar seal member 30 is used, the flow path forming member 20 and the sub tank member 40 are also formed in a planar shape, and the seal member is provided therebetween. Since they are stacked, the height is significantly reduced, that is, a remarkable downsizing is realized.
[0067]
Further, according to the present embodiment, since the fixing screw 80 penetrates the unitized flow path forming member 20, the sub tank member 40, and the deformation regulating member 50 to fix each member, the ink jet recording head 100 The mechanical strength is high.
[0068]
As shown in FIG. 10, the inkjet recording head 100 described above can constitute an inkjet recording apparatus 300 in combination with a control unit 200 for controlling the piezoelectric vibrator 12 which is a liquid ejecting unit. . It is preferable that the control unit 200 independently controls each piezoelectric vibrator 12 corresponding to each nozzle opening 11a.
[0069]
In the above, an ink ejecting unit (an example of a liquid ejecting unit) that ejects ink from the nozzle opening 11 a is not limited to the piezoelectric vibrator 12. For example, a magnetostrictive element may be used as a pressure generating element, and the pressure chamber communicating with the nozzle opening 11a may be expanded and contracted by the magnetostrictive element to eject ink from the nozzle opening 11a. The ink may be ejected from the nozzle openings 11a by causing pressure fluctuations in the pressure chambers due to bubbles that expand and contract due to the heat from the heating elements.
[0070]
Although the above description has been made with respect to an ink jet recording head, the present invention is broadly applied to liquid ejecting heads in general. As an example of the liquid, in addition to ink, glue, nail polish, liquid metal for forming a circuit, or the like may be used. Further, the present invention can be applied to a head for manufacturing a color filter in a display such as a liquid crystal. Further, the present invention can be applied to a head for injecting a biological organic material used for manufacturing a biochip.
[0071]
【The invention's effect】
According to the present invention, a substantially planar seal member is used, and the flow path forming member and the sub-tank member are also planarly formed and the seal members are laminated between the two members. An off-carriage type liquid ejecting head without the above can be constructed. In addition, the deformation of the sub tank due to the use of the substantially planar seal member is effectively prevented by the fixing and reinforcing members. Therefore, since there is no need to provide an ink supply needle, the height of the liquid ejecting head is remarkably reduced, remarkable downsizing is realized, and the liquid ejecting head is provided with a sufficient mechanical strength of the head. A liquid ejecting apparatus can be provided.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view showing an inkjet recording head according to an embodiment of the present invention.
FIG. 2A is a top perspective view of the inkjet recording head of FIG. 1, and FIG. 2B is a bottom perspective view of the inkjet recording head of FIG.
FIG. 3 is a perspective view showing members before assembling the inkjet recording head of FIG. 1;
4A is a top perspective view of the flow path forming member of FIG. 3, and FIG. 4B is a lower perspective view of the flow path forming member of FIG.
5A is a top perspective view of the seal member of FIG. 3; FIG. 5B is a bottom perspective view of the seal member of FIG. 3;
6A is a top perspective view of the partition wall forming member of FIG. 3, and FIG. 6B is a bottom perspective view of the partition wall forming member of FIG.
7 (a) is a top perspective view of the deformation restricting member of FIG. 3, and FIG. 7 (b) is a bottom perspective view of the deformation restricting member of FIG.
FIG. 8A is a top perspective view showing a state where a flow path forming member, a seal member, a sub-tank member, and a deformation restricting member are unitized; FIG. FIG. 5 is a bottom perspective view showing a state where members, a seal member, a sub tank member, and a deformation regulating member are unitized.
FIG. 9 is a schematic sectional view of the inkjet recording head of FIG. 1 including a section of a fixing screw.
FIG. 10 is a schematic diagram of an ink jet recording apparatus.
[Explanation of symbols]
10 Head member
11 Nozzle plate
11a Nozzle opening
12 Piezoelectric vibrator
13a to 13f Ink communication holes
15 Seal rubber
18 Through hole
20 Flow path forming member
20a-20f Channel space
21a-21f Projection
23 Projection
26a-26f Support surface
28 Through hole
30 Seal rubber
30a-30f communication hole
32 Positioning hole
34a-34f swell
40 Sub tank member
41 Partition wall forming member
42 Damper film
44a-44c Contact surface
45 Flexible tube connection port
45a to 45f ink supply path
47 Caulking pin hole
48 Through hole
50 Deformation control member
57 Caulking pin hole
58 screw hole
60a-60f filter
70 Caulking pin
80 Fixing screw
100 inkjet recording head
200 control unit
300 inkjet recording device

Claims (12)

A head member having a nozzle opening, and liquid ejecting means for ejecting liquid from the nozzle opening,
A flow path forming member provided with a flow path space as the flow path of the liquid that communicates with the nozzle opening of the head member,
A sub-tank member in which a sub-tank space is formed by a deformable damper member that functions as a sub-tank in communication with the flow path space,
A seal member interposed between the flow path forming member and the sub tank member,
With
The liquid ejecting head according to claim 1, wherein the flow path forming member, the sub tank member, and the seal member have a substantially planar shape and are stacked in parallel with each other. The sub tank member,
A partition wall forming member that forms a partition except for a surface of the sub-tank space communicating with the flow path space and a surface opposite to the flow path space,
The damper member for sealing a surface of the sub-tank space on a side opposite to the flow path space,
2. The liquid jet head according to claim 1, wherein the liquid jet head is formed by a two-layer structure. 3. The liquid jet head according to claim 2, wherein the partition wall forming member and the damper member are made of the same material and are joined by welding. 4. The sub-tank member is provided with a deformation regulating member on a surface opposite to a surface on which the seal member is laminated, for preventing the sub-tank member from being deformed. The liquid jet head according to any one of the above. The liquid ejecting head according to claim 4, wherein the sub-tank member has a plurality of contact surfaces that are abutted and supported by the deformation restricting member. The liquid jet head according to claim 4, wherein the flow path forming member, the seal member, the sub tank member, and the deformation restricting member are unitized independently of the head member. The liquid ejecting head according to claim 6, wherein the flow path forming member, the seal member, the sub tank member, and the deformation regulating member are unitized and temporarily fixed by heat caulking using a caulking pin. . The head member is fixed to the united flow path forming member, the seal member, the sub tank member and the deformation regulating member with screws,
The liquid ejecting head according to claim 6, wherein the screw penetrates the flow path forming member, the sub tank member, and the deformation restricting member. 9. The liquid jet head according to claim 1, wherein a second seal member is provided between the flow path forming member and the head member. The head member has a plurality of nozzle openings, and a plurality of liquid ejecting means for respectively ejecting the liquid in the plurality of nozzle opening portions,
The flow path forming member is provided with a plurality of flow path spaces that respectively communicate with the plurality of nozzle openings of the head member,
10. The sub-tank member is formed with a plurality of sub-tank spaces which respectively communicate with the plurality of flow path spaces and function as a sub-tank and also have a damper function. Liquid jet head. A liquid jet head according to any one of claims 1 to 10,
A control unit for controlling the liquid ejecting unit,
A liquid ejecting apparatus comprising: A head member having a nozzle opening, and liquid ejecting means for ejecting liquid from the nozzle opening,
A flow path forming member provided with a flow path space as the flow path of the liquid that communicates with the nozzle opening of the head member,
A sub-tank member in which a sub-tank space is formed by a deformable damper member that functions as a sub-tank in communication with the flow path space,
A seal member interposed between the flow path forming member and the sub tank member,
With
The method for manufacturing a liquid jet head, wherein the flow path forming member, the sub tank member, and the seal member are all substantially planar members, and are stacked in parallel with each other.
A step of temporarily fixing the flow path forming member, the seal member, the sub-tank member and the deformation regulating member in a unit,
Fixing the head member to the unitized flow path forming member, the seal member, the sub tank member and the deformation regulating member,
A method for manufacturing a liquid jet head, comprising:

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