JP2004309421A - Pressure variable controller and pressure variable control method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To finely change pressure in a wide variable range, and to easily and accurately control the pressure by one operation, even in any pressure range. <P>SOLUTION: This controller/method is provided with a gas input part 1 for supplying gas from a gas input source A, the first gas output part 3 for discharging the gas supplied from the gas input part 1, the second gas output part 2 for discharging the gas supplied from the gas input part 1, the first gas pressure variable throttle valve 4 for changing continuously a gas flow rate discharged to the first gas output part 3 from the gas input part 1, and the second gas pressure variable throttle valve 5 for changing continuously a gas flow rate discharged to the second gas output part 2 from the gas input part 1, while interlocked with the first gas pressure variable throttle valve 4. A pressure difference generated between pressure in the first gas output part 3 and pressure in the second gas output part 2, due to a difference in the discharged gas flow rates, is controlled using the first and second gas pressure variable throttle valve 4, 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a variable pressure control device used in a technical field for calibrating an indicated value of a pressure gauge and a variable pressure control method using the variable pressure control device.
[0002]
[Prior art]
One of the major disaster factors for buildings such as buildings is a strong wind such as a typhoon. In particular, in order to ensure the wind resistance of buildings such as high-rise buildings, it is necessary to accurately evaluate the wind load during strong winds. For this reason, wind tunnel tests were conducted with wind pressure gauges (pressure gauges and wind pressure sensors) that measure wind pressure (wind load) mounted on the walls of buildings and other structures to predict the wind pressure on the structures and the effect of the building wind on the surroundings. Is also often done. As described above, in order to accurately measure the wind load acting on an object such as a structure with a wind pressure gauge (wind pressure sensor), it is necessary to accurately calibrate the indicated value of the wind pressure gauge (wind pressure sensor).
[0003]
By the way, with respect to the prior art in which the pressure gauge was calibrated, a process gas was introduced by opening and closing a variable flow rate valve and a separation valve, and the indicated value of the pressure gauge when the pressure inside the processing chamber was constant was obtained. 2. Description of the Related Art A semiconductor manufacturing apparatus for calibrating an indicated value of a standard pressure gauge is disclosed (for example, see Patent Document 1).
[0004]
[Patent Document 1]
JP 2002-280362 A (Page 1, FIG. 1)
[0005]
[Problems to be solved by the invention]
However, in the related art, it is difficult to freely control the pressure in a pressure range to be adjusted for calibrating the pressure gauge, for example, particularly in a pressure range near the atmospheric pressure (zero pressure value). In the vicinity, the reading of the pressure gauge cannot be calibrated accurately. Further, in order to accurately calibrate the indicated value of the pressure gauge in a desired pressure range, it is required to freely control the pressure in a pressure range as wide as possible.
[0006]
In view of the above, the present invention has a wide variable range, can change the pressure delicately, can easily and accurately control the pressure with a single operation in any pressure range, and further, It is an object of the present invention to realize a variable pressure control device capable of accurately calibrating an indicated value of a meter and a variable pressure control method using the variable pressure control device.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides a gas input unit to which gas is supplied from a gas input source, a first gas output unit to discharge gas supplied from the gas input unit, A second gas output section for discharging the supplied gas, a first gas pressure variable throttle valve for continuously changing a first gas flow rate discharged from the gas input section to the first gas output section, A second gas pressure variable throttle valve that continuously changes a second gas flow discharged from the gas input unit to the second gas output unit in conjunction with the first gas pressure variable throttle valve; By changing the first gas flow rate and the second gas flow rate by the first and second gas pressure variable throttle valves, the pressure at the first gas output section and the pressure at the first gas output section are changed. When a pressure difference is generated between the second gas output portion and the pressure at the second gas output portion, To provide a variable pressure control apparatus characterized by controlling the pressure difference.
[0008]
The present invention also provides a rotor provided with a first slit and a second slit and rotatable on a central axis, and a rotor having the same central axis and having both a first gas hole and a second gas hole. A first stator and a second stator, wherein the rotor is mounted so as to be sandwiched between the first stator and the second stator in both directions, and the first gas hole and the second gas of the first stator are provided. The one surface provided with the holes and the one surface provided with the first gas holes and the second gas holes of the second stator respectively correspond to the first slit and the second gas holes of the rotor. The first gas hole of the first stator is in slidable contact with a surface provided with a slit, and the first gas hole of the first stator communicates with a gas input unit to which gas is supplied from a gas input source. 2 gas holes from the gas input section The first gas hole and the second gas hole of the second stator communicate with a second gas output unit that discharges the supplied gas, and the second gas output unit discharges a gas that is supplied from the gas input unit. And the first gas holes of the first stator and the second stator communicate with the first slit of the rotor while the first slit is in communication with the first slit of the rotor in accordance with the rotation of the rotor. The cross-sectional area of the communicating first gas hole is continuously changed, and the second gas hole of the first stator and the second stator communicates with the second slit of the rotor. The cross-sectional area is continuously changed in conjunction with the cross-sectional area of the first gas hole, and the first gas flow discharged to the first gas output and the second gas output are discharged to the second gas output. By changing the second gas flow rate, Together creating a pressure difference between the pressure in the pressure and the second gas output unit in the first gas output portion, to provide a pressure variable control apparatus characterized by controlling the pressure difference.
[0009]
It is preferable that each of the first slit and the second slit is a slit whose width gradually decreases from one end to the other end.
[0010]
Preferably, the size of the first gas hole is smaller than the size of the second gas hole.
[0011]
In an initial state in which the rotor is not rotated, the first gas hole is not in communication with the first slit, and the second gas hole is in partial communication with the second slit. preferable.
[0012]
In addition, the present invention continuously changes the first gas flow rate discharged from the gas input portion to which the gas is supplied from the gas input source to the first gas output portion, and performs the second gas flow from the gas input portion. By continuously changing a second gas flow rate discharged to a gas output unit in conjunction with the first gas flow rate, and changing the first gas flow rate and the second gas flow rate, There is provided a variable pressure control method, wherein a pressure difference is generated between a pressure at a first gas output section and a pressure at the second gas output section, and the pressure difference is controlled.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of a variable pressure control device and a variable pressure control method according to the present invention will be described based on examples with reference to the drawings. First, the principle of the present invention will be described.
[0014]
FIG. 1 is a schematic diagram showing the principle including the variable pressure control device 9 of the present invention. The principle of calibrating the indicated value of a pressure gauge by using the variable pressure control method of the present invention using the variable pressure control device 9 is described. explain. The variable pressure control device 9 of the present invention includes a gas input section 1, a first gas output section 3, a second gas output section 2, a first gas pressure variable throttle valve 4, and a second gas pressure section. A variable throttle valve 5.
[0015]
The gas input unit 1 is supplied with a gas such as air or nitrogen from a gas input source A. The gas input source A is a pressure regulator in which the pressure is kept constant and supplies a constant gas flow rate.
[0016]
The first gas output unit 3 discharges gas supplied from the gas input unit 1 into the variable pressure control device 9. A pressure gauge (differential pressure gauge) B to calibrate the indicated value is connected to the first gas output unit 3. Further, the second gas output unit 2 also discharges gas supplied from the gas input unit 1 into the variable pressure control device 9. The second gas output unit 2 is open to the atmosphere, for example.
[0017]
A first gas pressure variable throttle valve 4 is provided between the gas input unit 1 and the first gas output unit 3. The gas supplied from the gas input unit 1 has a first gas flow rate through the first gas pressure variable throttle valve 4, flows into the variable pressure control device 9, and is discharged to the first gas output unit 3. Is done. A pressure is generated in the first gas output unit 3 by the gas flow discharged to the first gas output unit 3. This generated pressure is referred to herein as a calibration pressure value.
[0018]
Between the gas input unit 1 and the second gas output unit 2, a second gas pressure variable throttle valve 5 is further provided in addition to the first gas pressure variable throttle valve 4 described above. The gas supplied from the gas input unit 1 is discharged to the second gas output unit 2 via the first gas pressure variable throttle valve 4 and the second gas pressure variable throttle valve 5.
[0019]
As described above, the second gas output unit 2 is open to the atmosphere, for example, and the pressure at the second gas output unit is substantially equal to the atmospheric pressure. In calibrating the indicated value of the pressure gauge B, the pressure at the second gas output unit 2 serves as a pressure reference for measuring a differential pressure from a calibration pressure value described later. The pressure in section 2 is called the reference pressure value. Here, the reference pressure value is the atmospheric pressure.
[0020]
The pressure measured as the calibration pressure value in the first gas output unit 3 is the same as the pressure at the gas flow point 6 in the variable pressure control device 9 shown in FIG.
[0021]
Between the first gas output unit 3 and the second gas output unit 2, the pressure of the difference between the calibration pressure value at the first gas output unit 3 and the reference pressure value at the second gas output unit 2; That is, in order to accurately measure the differential pressure, the precision pressure gauge 8 is connected.
[0022]
In an initial state in which the variable pressure control device 9 is not operated, the first gas pressure variable throttle valve 4 is closed, and the second gas pressure variable throttle valve 5 is open. Therefore, in this initial state, the gas from the gas input unit 1 is not discharged to the first gas output unit 3 through the gas pressure variable throttle valve 4, and the pressure in the first gas output unit 3 That is, the calibration pressure value is the pressure at the second gas output unit 2, that is, the same atmospheric pressure as the reference pressure value.
[0023]
By operating the variable pressure control device 9, the first gas flow rate flowing into the variable pressure control device 9 from the gas input unit 1 via the first variable gas pressure throttle valve 4 is further increased by the second gas The gas is discharged from the second gas output unit 2 through the pressure restrictor valve 5 as a second gas flow rate. Thereby, the flow rate of the gas discharged in the first gas output unit 3, that is, the generated pressure in the first gas output unit 3 is adjusted. That is, by changing the first gas flow rate and the second gas flow rate, respectively, the generated pressure in the first gas output unit 3 is controlled, and the generated pressure (calibration pressure value) and the second gas A pressure difference is generated between the pressure at the output unit 2 (reference pressure value).
[0024]
By controlling the first gas pressure variable throttle valve 4 and the second gas pressure variable throttle valve 5 to generate and control the pressure difference, the precision pressure gauge 8 controls the reference pressure value and the calibration pressure value. Can be calibrated based on the measured differential pressure while the pressure gauge (differential pressure gauge) B connected to the second gas output unit 2 is accurately measured.
[0025]
In calibrating the indicated value of the pressure gauge B based on the principle described above, in order to accurately calibrate the indicated value of the pressure gauge B particularly in a pressure range near zero, the first gas pressure variable throttle valve 4 is required. It is important to freely control (adjust and control) the second gas pressure variable throttle valve 5.
[0026]
Therefore, in the present invention, the first gas pressure restrictor valve 4 causes the flow rate (first gas flow rate) of the gas discharged (going) from the gas input section 1 to the first gas output section 3, in other words, the first gas flow rate. The flow rate of the gas discharged from the gas pressure throttle valve 4 is continuously changed. At this time, the first gas pressure throttle valve 4 and the second gas pressure throttle valve 5 are linked (a linked state is indicated by a broken line 7). That is, the second gas pressure throttle valve 5 continuously changes the flow rate (second gas flow rate) of the gas discharged to the second gas output unit 2 in conjunction with the first gas pressure throttle valve 4. Let it.
[0027]
Specifically, the first gas flow rate discharged from the first gas pressure throttle valve 4 is continuously increased. At the same time, the second gas pressure throttle valve 5 continuously reduces (decreases) the flow rate of the second gas to be discharged in conjunction with the first gas pressure throttle valve 4. Then, the pressure at the circulation point 6 (that is, the pressure generated at the first gas output unit 3) continuously and gradually changes to a high pressure. In this way, a pressure difference is generated between the generated pressure at the first gas output unit 3, ie, the calibration pressure value, and the pressure at the second gas output unit 2, ie, the reference pressure value. Then, the pressure difference is freely controlled by the first gas pressure throttle valve 4 and the second gas pressure throttle valve 5, so that the pressure difference can be freely changed.
[0028]
(Example)
The structure of the variable pressure control device according to the present invention will be described in more detail based on the following embodiments. FIG. 2 is a schematic side sectional view of the variable pressure control device 10 according to the embodiment of the present invention, and FIG. 3 is an exploded perspective view showing a partial basic structure of the variable pressure control device 10. FIG. 4A is a schematic plan view of the rotor 12 as viewed from above, and FIGS. 4B and 4C are schematic diagrams of the pressure variable control device 10 as viewed from above. FIG. 2 is a schematic plan view and a schematic plan view seen from below.
[0029]
The variable pressure control device 10 is configured to include a cylindrical rotor 12 rotatable on a central axis 11 and first and second cylindrical stators 13 and 14 having the same central axis 11. (Prepare). The rotor 12, the first stator 13, and the second stator 14 are housed in a base 18. The base 18 is installed on the ground 16 via a support 17 and has a role of a housing.
[0030]
The rotor 12 is mounted so as to be sandwiched between the first stator 13 and the second stator 14 in both directions (in this embodiment, from the vertical direction). The shaft center 11a is fitted into the center shaft holes 12e, 13e, 14e formed on the center shaft 11 of the rotor 12, the first stator 13, and the second stator 14, respectively, and the nut 11b is fitted to the base 18. , 11c.
[0031]
The height h2 of the cylindrical rotor 12 is, for example, 5 mm, and is formed of stainless steel. The rotor 12 has a first slit 24 and a second slit 25. Each of the first slit 24 and the second slit 25 has a cross section similar to a curved shape as shown in FIG. 3, and goes from one end 24a, 25a of the substantially semicircular shape to the other end 24b, 25b. A slit whose width gradually narrows. The size (width) of the first slit 24 is formed smaller than the size (width) of the second slit 25.
[0032]
On the other hand, the first stator 13 is provided with a first gas hole 13a and a second gas hole 13b, and similarly, the second stator 14 is provided with a first gas hole 14a and a second gas hole 14b. . The cross-sectional shape of the first gas holes 13a, 14a and the second gas holes 13b, 14b is, for example, circular, and the size (cross-sectional size) of the first gas holes 13a, 14a is equal to that of the second gas holes 13b, 14b. It is formed smaller than the size (the size of the cross section).
[0033]
This is for the following reason. As described later, since a high-pressure gas maintained at a constant pressure flows from the gas input source A into the first gas holes 13a and 14a, the gas is discharged from the second gas holes 13b and 14b. In the second gas holes 13b and 14b from which the gas is discharged, the size of the first gas holes 13a and 14a is made larger than the size of the second gas holes 13b and 14b in consideration of the viscosity of the gas. Is also made smaller.
[0034]
In the present embodiment, the first stator 13 and the second stator 14 are formed in the same cylindrical shape, and have a height h1 of, for example, 8 mm, and are formed of carbon graphite.
[0035]
One surface (first surface) 13c of the first stator 13 on which the first gas hole 13a and the second gas hole 13b are provided, and the first gas hole 14a and the second gas hole 14b of the second stator 14 are provided. The one surface (second surface) 14c is in sliding contact with the surfaces 12d and 12c of the rotor 12 where the first slit 24 and the second slit 25 are provided.
[0036]
As described above, the rotor 12, the first stator 13, and the second stator 14 are housed in the base 18 as shown in FIG. 2, and the lower surface 13d of the first stator 13 and the upper surface of the second stator 14 are provided. 14d is in contact with the inner wall surfaces 18c, 18d of the base 18, respectively.
[0037]
The first gas hole 13a of the first stator 13 communicates with a gas input unit 21 to which a gas such as air or nitrogen is supplied from a gas input source A. Specifically, the first gas hole 13a of the first stator 13 communicates with a gas hole 18a penetrating through the base 18, and the inlet of the gas hole 18a serves as a gas input unit 21. An input plug (port) 21a is provided on a lower surface 18g of the base 18 where the gas input unit 21 is located.
[0038]
The second gas hole 13b of the first stator 13 communicates with a second gas output unit 22 that discharges gas flowing from the gas input unit 21 into the variable pressure control device 10. The second gas output unit 22 is open to, for example, the atmosphere. The pressure in the second gas pressure section 22 becomes a reference pressure value. In the case of this embodiment, the reference pressure value is equal to the atmospheric pressure. Specifically, the second gas hole 13b of the first stator 13 communicates with a gas hole 18b provided through the base 18, and the outlet of the gas hole 18b is connected to the second gas output unit 22. Has become. An output plug (port) 22a is provided on the lower surface 18g of the base 18 where the second gas output unit 22 is located.
[0039]
FIG. 4C is a schematic view of the lower surface 18g of the base 18 as described above, that is, a schematic view of the variable pressure control device 10 as viewed from below. In FIG. 4 (c), the first stator 13, the pipe 31 for communicating the input plug 21a with the gas input source A, and the pipe 32 for communicating from the output plug 22a to the open air are indicated by dotted lines. It is shown.
[0040]
The first gas hole 14a and the second gas hole 14b of the second stator 14 communicate with a first gas output unit 23 that discharges gas supplied from the gas input unit 21 into the variable pressure control device 10. The discharged gas becomes a pressure generated in the first gas output unit 23, that is, a calibration pressure value. Specifically, the first gas hole 14a and the second gas hole 14b of the second stator 14 communicate with a gas hole 18e provided through the base 18, and the outlet of the gas hole 18e is connected to the first gas hole 18e. The gas output section 23 of FIG. An output plug (port) 23a is provided on the upper surface 18f of the base 18 where the first gas output unit 23 is located.
[0041]
FIG. 4B is a schematic view of the base 18 as viewed from the upper surface 18f direction, that is, a schematic view of the variable pressure control device 10 as viewed from above. In FIG. 4B, a gas hole 18e where the second stator 14, the first gas hole 14a and the second gas hole 14b merge and communicate, and a communication which is connected to the pressure gauge B whose indicated value is to be calibrated. A tube (tube) 33 extends from the output plug 23a and is indicated by a dashed line.
[0042]
On the other hand, as shown in FIGS. 3 and 4A, a gear 12f is provided on the entire side peripheral portion 12g of the rotor 12. (Note that, in FIG. 4A, only a part of the gear 12f is illustrated, and the remaining gear 12f is omitted from the two-dot chain line.) The side circumference of the rotor 12 is engaged with the gear 12f. A worm 15 is provided in contact with the portion 12e. By rotating the worm 15, the surfaces 12 c and 12 d of the rotor 12 are in sliding contact with the first surface 13 c of the first stator 13 and the second surface 14 c of the second stator 14, respectively, while the direction indicated by the arrow g (counterclockwise rotation). ), The rotor 12 can rotate.
[0043]
In the variable pressure control device 10 according to the embodiment of the present invention, the first gas holes 13a and 14a are in the first slit 24 when the variable pressure control device 10 is not operated, that is, in the initial state where the rotor 12 is not rotated. Not in communication with On the other hand, the second gas holes 13b and 14b partially communicate with the second slit 25. This state will be further described with reference to FIG.
[0044]
FIG. 4A is a plan view schematically showing the rotor 12 in the initial state from above. As shown in FIG. 4A, the cross section 34a of the first gas hole 14a and the cross section 34b of the second gas hole 14b of the second stator 14 that are in sliding contact with the surface 12c of the rotor 12 are indicated by dotted circles. It is shown. The cross section 34a of the first gas hole 14a is located near the other end 24b of the first slit 24 and is in contact with the surface 12c of the rotor 12, but does not intersect with the first slit 24, that is, the first gas hole 14a does not communicate with the first slit 24. Similarly, the first gas hole 13a of the first stator 13 is not in communication with the first slit 24 in the initial state. Needless to say, the first gas holes 13a and 14a do not communicate with the second slit 25.
[0045]
The reason why the first gas holes 13a and 14a do not communicate with the first slit 24 is as follows. Since a high-pressure gas maintained at a constant pressure flows from the gas input source A into the first gas holes 13a and 14a, the first gas holes 13a and 14a are initially connected to the first slits 24. This is to keep the closed state without communicating with the user. Thereby, the danger that the high-pressure gas suddenly flows into the variable pressure control device 10 can be prevented.
[0046]
On the other hand, a part of the cross section 34b of the second gas hole 14b is in contact with the surface 12c of the rotor 12, and intersects one end 25a of the second slit 25. That is, the second gas hole 14 b is partially connected to the second slit 25. Similarly, the second gas hole 13b of the first stator 13 is also in partial communication with the second slit 25 in the initial state.
[0047]
This is for the following reason. In calibrating the indicated value of the pressure gauge B, in the initial state, the second gas holes 13b and 14b are partially communicated with the second slit 25, so that the first gas output portion 23 and the second gas This is because the pressure difference between the output unit 22 and the output unit 22 is set to zero.
[0048]
According to a feature of the present invention, as the rotor 12 rotates from the initial state, the first gas holes 13a and 14a of the first stator 13 and the second stator 14 communicate with the first slit 24 of the rotor 12, that is, as described above. The cross-sectional area (first cross-sectional area) where the cross section of the first gas holes 13a and 14a intersects the first slit 24 gradually changes continuously. Further, with the change of the first cross-sectional area, the second gas holes 13b, 14b of the first stator 13 and the second stator 14 communicate with the second slit 25 of the rotor 12, that is, the second gas holes 13b, 14b The cross-sectional area (the second cross-sectional area) where the cross-section of the cross section intersects with the second slit 25 gradually changes continuously in conjunction with the first cross-sectional area.
[0049]
More specifically, when the rotor 12 is rotated in the direction shown by the arrow g from the initial state where the rotor 12 shown in FIG. 4A is not rotating, the cross section 34a of the first gas hole 14a becomes While sliding on the surface 12c of the first slit 24, it slides with the first slit 24 gradually widening from the other end 24b of the first slit 24, and the first cross-sectional area continuously increases gradually. The first gas holes 13a operate in the same manner as the first gas holes 14a. For this reason, the first gas holes 14 a and 13 a communicate with the first slit 24 and flow in (supplied) from the gas input unit 21 and are discharged to the first gas output unit 23 (first gas flow). Continuously and gradually increases, and the gas generation pressure in the first gas output unit 23, that is, the calibration pressure value continuously increases.
[0050]
At the same time, the cross section 34b of the second gas hole 14b which partially intersects (communicates with) the semicircular one end 25a of the second slit 25 is formed with the second slit 25 whose width is gradually reduced. It slides, and the second cross-sectional area gradually decreases continuously in conjunction with the first cross-sectional area. The second gas holes 13b operate in the same manner as the second gas holes 14b. For this reason, the second gas holes 14b, 13b communicate with the second slit 25, and the gas flow rate (second flow rate) discharged from the gas hole 18e into which the first gas flow rate flows into the second gas output unit 22 (second flow rate). The gas flow rate is continuously reduced gradually, and the second gas output unit 22 is opened to the atmosphere.
[0051]
The first gas flow that flows into the variable pressure control device 10 and is discharged from the first gas output unit 23 gradually increases, while the second gas that is discharged from the second gas output unit 22 is increased. Since the gas flow rate gradually decreases, the pressure generated in the first gas output unit 23 gradually increases. That is, a pressure difference occurs between the calibration pressure value and the pressure at the second gas output unit 22, that is, the reference pressure value.
[0052]
By changing the first gas flow rate and the second gas flow rate as described above, the gas generation pressure (calibration pressure value) at the first gas output unit 23 and the gas generation pressure at the second gas output unit 22 are changed. This pressure difference can be controlled by generating a pressure difference between the gas pressure (reference pressure value) and adjusting the rotation of the rotor 12.
[0053]
As described above, the first gas hole 13a of the first stator 13, the first gas hole 14a of the second stator 14, and the first slit 24 of the rotor 12 are provided with the first gas pressure variable restrictor described in the principle of the present invention. It has the role of a valve 4 (see FIG. 1). The second gas hole 13b of the first stator 13, the second gas hole 14b of the second stator 14, and the second slit 25 of the rotor 12 are provided with the second gas pressure variable throttle valve 5 described in the principle of the present invention. (See FIG. 1).
[0054]
Since the first gas flow rate is increased and the second gas flow rate is decreased at the same time by the variable pressure control device 10 of the present embodiment, the variable range of the pressure can be expanded as compared with the related art. . That is, the conventional first gas pressure variable throttle valve and the second gas pressure variable throttle valve that generate pressure are independently controlled (controlled in a semi-fixed state) independently of each other. Therefore, the variable range of pressure was also limited. Compared with such a conventional case, the variable pressure control device 10 of the present embodiment can greatly widen the range in which the pressure fluctuation can be adjusted (variable pressure range).
[0055]
Further, the generated pressure can be controlled by a single operation of rotating the rotor 12, and delicate control of the pressure can be realized by continuously changing the pressure. Can be controlled.
[0056]
As described above, it is possible to smoothly perform pressure control in a pressure range such as the vicinity of the atmospheric pressure where the pressure adjustment has been conventionally impossible.
[0057]
In the above-described principle of the present invention and the present embodiment, the second gas output units 2 and 22 are opened to the atmosphere, and the reference pressure value in the second gas output units 2 and 22 is equal to the atmospheric pressure. I have. However, the reference pressure value is not necessarily limited to the atmospheric pressure, and a pressure higher or lower than the atmospheric pressure can be used as the reference pressure value.
[0058]
Further, in the principle and the embodiment of the present invention, the case where the gas flows from the gas input source A to the gas input units 1 and 21 has been described. However, the meaning of the phrase in the present specification that "gas is supplied from the gas input source to the gas input unit" means not only the case where gas at a predetermined pressure flows from the gas input source into the gas input unit, This also includes a case where a gas is sucked from a gas input unit using a vacuum pump or the like as a gas input source (a negative gas is supplied). When a gas is sucked by a vacuum pump or the like, an absolute pressure (a pressure based on a vacuum state) is measured as a calibration pressure value in the first gas output unit.
[0059]
(Action)
Next, the operation of the present embodiment will be described with reference to FIGS. In an initial state in which the rotor 12 is not rotated, the first gas holes 13a and 14a are in a closed state not communicating with the first slit 24, and the pressure in the first gas output unit 23 and the second gas output The pressure difference from the pressure in section 22 is zero (close to zero). From this initial state, the worm 15 is manually rotated, for example, to rotate the rotor 12 in the direction indicated by the arrow g (counterclockwise). Then, the surface 12d of the rotor 12 and the surface 13c of the first stator 13, and the surface 12d of the rotor 12 and the surface 14c of the second stator 13 slide, respectively. Then, the above-described first cross-sectional area gradually increases, and the rate of communication between the first gas holes 13a, 14a of the first stator 13 and the second stator 14 and the first slit 24 of the rotor 12 increases. Go. That is, the first gas flow rate discharged from the gas input source A to the first gas output unit 23 via the gas input unit 21 continuously increases.
[0060]
At the same time, the above-mentioned second cross-sectional area gradually decreases, and the ratio of the communication between the second gas holes 13b, 14b of the first stator 13 and the second stator 14 and the second slit 25 of the rotor 12 decreases. I will do it. That is, the flow rate of the second gas discharged from the gas input unit 21 to the second gas output unit 22 via the gas holes 18e continuously decreases. The second gas output 22 is open to the atmosphere, and the pressure at the second gas output is always approximately equal to atmospheric pressure.
[0061]
Therefore, a pressure difference occurs due to a difference between the first gas flow rate flowing from the gas input section 21 and the second gas flow rate discharged to the second gas output section 22, and the pressure in the first gas output section 23 is increased. (Generation pressure) increases. When the first gas flow rate is at a maximum and the second gas flow rate is at a minimum, the pressure at the first gas output unit 23 is the highest.
[0062]
By rotating the rotor 12 as described above, the pressure generated between the first gas output unit 23, ie, the calibration pressure value, and the pressure at the second gas output unit 22, ie, the reference pressure value, is generated. The difference is controlled.
[0063]
(Application example)
FIG. 5 shows an application example of the above-described variable pressure control devices 9 and 10 of the present embodiment. FIG. 5 shows a state in which the indicated values of the pressure gauges are calibrated using the variable pressure control devices 9 and 10. A plurality of pressure gauges (wind pressure gauge, wind pressure sensor, differential pressure gauge) 51 are attached to a structure 53 standing on the ground 55 in a wind tunnel experiment or when measuring wind pressure acting on a structure outdoors. Specifically, all of the plurality of pressure gauges 51 are attached to holes 53b provided on a wall surface 52a of a structure 53 such as a building via a pipe (pipe) 52. The plurality of pressure gauges 51 measure a wind pressure (wind load) received by the structure 53 due to a wind load in a direction indicated by an arrow k, for example.
[0064]
Each of the pressure gauges 51 is connected to the first gas output units 3 and 23 of the variable pressure control devices 9 and 10 via the switching device 54. The switching device 54 switches the pipe (tube) 54a so that the pressure gauge B, of which the indicated value is to be calibrated, and the first gas output units 3 and 23 among the plurality of pressure gauges 51 communicate with each other. In FIG. 5, only a part of each of the plurality of pressure gauges 51, the pipe (tube) 52, and the pipe 54a of the switching device 54 is illustrated, and other pressure gauges and pipes are not illustrated, or Represents.
[0065]
On the other hand, the tip 32a of the pipe 32 extending from the second gas output unit 2, 22 is open to the lower side 56 of the wind pressure receiving the wind load in this application example. Therefore, the reference pressure in the second gas output units 2 and 22 in this case is a predetermined pressure higher than the atmospheric pressure.
[0066]
When it is desired to calibrate the indicated value of the pressure gauge B while measuring the wind pressure with the pressure gauge B, the pressure gauge B and the variable pressure control devices 9 and 10 are communicated by the switching device 4. Thereafter, the first gas pressure variable throttle valve 4 and the second gas pressure variable throttle valve 5 of the variable pressure control devices 9 and 10 (the rotor 12, the first stator 13, and the second stator 14 ( The pressure is controlled according to FIG. As described above, the pressure between the second gas output units 2 and 22 and the first gas output units 3 and 23 measured by the precision manometer 8 while performing the pressure control by the variable pressure controllers 9 and 10. The indicated value of the pressure gauge B communicating with the first gas output units 3 and 23 is calibrated according to the differential pressure.
[0067]
The pressure gauge B is switched to another pressure gauge whose calibration value is desired to be calibrated by the switching device 54, and calibration of the calibration value is similarly performed for all the plurality of pressure gauges 51.
[0068]
In the principle of the invention described above and in this application example, the differential pressure, which is the pressure difference between the calibration pressure value and the reference pressure value, was measured by the precision pressure gauge 8 when calibrating the indicated value of the pressure gauge B. However, in addition to the differential pressure, it is also possible to measure an absolute pressure or a gauge pressure (a pressure based on the atmospheric pressure) as a calibration pressure value.
[0069]
As described above, the embodiments of the variable pressure control device and the variable pressure control method according to the present invention have been described based on the examples. However, the present invention is not particularly limited to such examples, and the present invention is not limited thereto. It goes without saying that there are various embodiments within the scope of technical matters.
[0070]
【The invention's effect】
According to the present invention having the above configuration, the pressure can be finely changed in a wide variable range, and the pressure can be easily and accurately controlled by a single operation in any pressure range. The meter reading can be calibrated accurately.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing the principle of a variable pressure control device according to the present invention.
FIG. 2 is a schematic side sectional view of the variable pressure control device according to the embodiment of the present invention.
FIG. 3 is an exploded perspective view showing a partial basic structure of the variable pressure control device of the present embodiment.
FIG. 4A is a schematic plan view of a rotor viewed from above, FIG. 4B is a schematic plan view of a variable pressure control device viewed from above, and FIG. 2) is a schematic plan view seen from below the variable pressure control device.
FIG. 5 is a schematic diagram showing an application example of the variable pressure control device of the present embodiment.
[Explanation of symbols]
1,21 Gas input unit
2, 22 Second gas output unit
3, 23 First gas output unit
4 First variable gas pressure throttle valve
5. Second gas pressure variable throttle valve
6 distribution points
10 Variable pressure control device
11 center axis
11a shaft center
11b, 11c Nut
12 rotor
12c, 12d, 13c, 14c surface
12e, 13e, 14e Central shaft hole
12f gear
12g side circumference
13 1st stator
13a, 14a First gas hole
13b, 14b 2nd gas hole
13d bottom surface
13c Front
14 Second stator
14c second side
14d, 18f top surface
15 worms
16 ground
17 props
18 Base
18a, 18b, 18e Gas hole
18c, 18d inner wall surface
21a Input plug (port)
22a, 23a Output plug (port)
24 1st slit
24a, 25a One end
24b, 25b The other end
25 Second slit
31, 32, 33, 52, 54a tube
32a tip
34a, 34b cross section
51 Multiple pressure gauges (differential pressure gauges)
52a wall
53 structures
54 Switching device
55 ground
56 under wind pressure

Claims (6)

A gas input section to which gas is supplied from a gas input source;
A first gas output unit for discharging gas supplied from the gas input unit;
A second gas output unit for discharging gas supplied from the gas input unit;
A first gas pressure variable throttle valve for continuously changing a first gas flow rate discharged from the gas input unit to the first gas output unit;
A second gas pressure variable throttle valve that continuously changes a second gas flow discharged from the gas input unit to the second gas output unit in conjunction with the first gas pressure variable throttle valve; With
By changing the first gas flow rate and the second gas flow rate by the first and second gas pressure variable throttle valves, the pressure in the first gas output section and the second gas output A pressure difference between the pressure and the pressure in the section, and controlling the pressure difference. A rotor provided with a first slit and a second slit and rotatable on a central axis;
A first stator and a second stator having the same central axis and having both a first gas hole and a second gas hole;
The rotor is mounted so as to be sandwiched between the first stator and the second stator in both directions, and one surface of the first stator where the first gas hole and the second gas hole are provided; One surface of the second stator where the first gas hole and the second gas hole are provided is in sliding contact with the surface of the rotor where the first slit and the second slit are provided, respectively. Yes,
The first gas hole of the first stator is in communication with a gas input unit to which gas is supplied from a gas input source, and the second gas hole of the first stator is supplied from the gas input unit. The first gas hole and the second gas hole of the second stator are in communication with a second gas output portion that discharges gas, and the first gas hole and the second gas hole of the second stator discharge gas that is supplied from the gas input portion. It communicates with the output unit,
According to the rotation of the rotor, the first gas holes of the first stator and the second stator communicate with the first slit of the rotor, and the cross-sectional area of the first gas hole communicating with the first slit is changed. While changing continuously, the cross-sectional area of the second gas hole in which the second gas hole of the first stator and the second stator communicates with the second slit of the rotor is changed. It changes continuously in conjunction with the area,
By changing the first gas flow rate discharged to the first gas output section and the second gas flow rate discharged to the second gas output section, the pressure at the first gas output section is changed. A pressure difference between the pressure at the second gas output portion and the pressure at the second gas output portion, and the pressure difference is controlled. 3. The variable pressure control device according to claim 2, wherein each of the first slit and the second slit is a slit whose width gradually decreases from one end to the other end. 4. The variable pressure control device according to claim 2, wherein the size of the first gas hole is smaller than the size of the second gas hole. In an initial state in which the rotor is not rotated, the first gas hole is not in communication with the first slit, and the second gas hole is in partial communication with the second slit. The variable pressure control device according to any one of claims 2 to 4, wherein: A first gas flow rate discharged from a gas input section to which a gas is supplied from a gas input source to a first gas output section is continuously changed, and the first gas flow rate is discharged from the gas input section to a second gas output section. The second gas flow rate to be continuously changed in conjunction with the first gas flow rate,
By changing the first gas flow rate and the second gas flow rate, a pressure difference is generated between the pressure at the first gas output section and the pressure at the second gas output section, A variable pressure control method comprising controlling the pressure difference.

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