JP2004308701A - Deformation quantity correction gate valve - Google Patents

Deformation quantity correction gate valve Download PDF

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Publication number
JP2004308701A
JP2004308701A JP2003099910A JP2003099910A JP2004308701A JP 2004308701 A JP2004308701 A JP 2004308701A JP 2003099910 A JP2003099910 A JP 2003099910A JP 2003099910 A JP2003099910 A JP 2003099910A JP 2004308701 A JP2004308701 A JP 2004308701A
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Japan
Prior art keywords
seal
valve body
valve
curve
opening
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JP2003099910A
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JP4264934B2 (en
Inventor
Koji Ogawa
浩司 小川
Hiromi Shimoda
洋巳 下田
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SMC Corp
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SMC Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To form a curved surface on a bottom surface of a seal mounting groove, a valve seat or the like for offsetting bending in order to prevent sealing effect from being deteriorated on both right and left ends of a seal of a gate valve due to the bending. <P>SOLUTION: A bending quantity curve 30 is plotted for representing the bending generated at each position on the seal 24 in a right and left direction when a valve body 22 is pressed, and the bending quantity curve 30 is rotated on paper by 180° to produce an inverted bending quantity curve 31. The curved surface corresponding to the inverted bending quantity curve 31 is formed on the bottom surface of the lateral seal mounting groove and the seal 24 having a constant thickness is mounted in the lateral seal mounting groove. A compression quantity of the seal 24 is made to be constant over the entire area of the seal when the valve body 22 is pressed on the valve seat surface 25. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、半導体製造装置などの真空チェンバー間や真空チェンバーと大気との間などに配設されるゲートバルブに関する。
【０００２】
【従来の技術】
【特許文献１】
図２には、米国特許第６，３９０，４４８号特許明細書・図面（特許文献１）に記載されたゲートバルブを簡略化して示し、操作ボディ１０の上側にバルブボディ１１が固定されている。バルブボディ１１は前壁１２、後壁１３、左壁１４、右壁１５、底壁１６及び蓋体１７から構成され、対抗する前壁１２及び後壁１３に横長の長方形の開口部１８，１９がそれぞれ形成されている。シャフト２１の上方部がバルブボディ１１の中心部に縦方向に向いて位置し、シャフト２１の上部の前側に弁体２２の左右方向の中心部が連結されている。弁体２２の長方形の面（シール２４の取付面であり、図２（ｂ） では左面）２３の外周部に底面が平坦なシール装着溝が形成され、シール装着溝にシール２４が装着されている。図示が省略されているが、図２（ｂ） において弁体２２は上下方向の中央部を中心として回動可能である。シャフト２１の操作により、弁体２２のシール２４が開口部１８の弁座面２５を押圧して開口部１８を閉じたり、弁体２２を下降させて開口部１８を全開させたりする。
【０００３】
例えば、左側の開口部１８を大気に連通させ、右側の開口部１９を真空チェンバーに連通させる。シャフト２１の操作により、弁体２２の長方形の面２３の中心位置と長方形の開口部１８の中心位置とを一致させて、弁体２２のシール２４を開口部１８の弁座面２５に押圧して開口部１８を閉じる。このとき、図２（ｃ） に矢印で示すように、シャフト２１から弁座面２５の方向への力Ｆが弁体２２（シール２４）に作用し、弁体２２（シール２４）には弁座面２５からの反力が作用し、大気圧と真空との差圧力が弁体２２に作用する。なお、左側の開口部１８及び右側の開口部１９がともに真空チェンバーに連通されるときは、大気圧と真空との差圧力は作用しない。
【０００４】
このように、弁体２２（シール２４）は曲げモーメントを受け、図２（ｄ） に誇張して示すように弓状に湾曲して撓み（変形）δが発生し、この撓みδは弁体２２（シール２４）の左右方向の中央近くで小さく、中央から遠い左右端に行くに従い大きくなる。弁体２２をアルミニューム製となし、シール２４の横方向長さを３３０〜３８０ｍｍとした通常のゲートバルブでは、左右両端部での撓み量は０．２〜０．５ｍｍであり、変位量比（変位量／左右方向長さ）は０．０００６〜０．００１４となる。弁体２２をステンレスとなした場合には、変位量比は０．０００６〜０．００１４よりも小さな値となる。この撓みによって、弁体２２の左右両端面のシール２４の圧縮量が、中央近傍のシール２４の圧縮量よりも著しく小さくなり、そのため相対的にシール２４の左右両端部でのシール効果が低減し、リークが発生し易くなる。そして、左右両端面のシール２４の圧縮量を適正にすると、中央近傍のシール２４の圧縮量が過大となり、シール２４の中央近傍での劣化が進むこととなる。
【０００５】
【発明が解決しようとする課題】
本発明は、ゲートバルブにおいて、長方形の弁体の面に装着されたシールの左右両端部でのシール効果が低減することを防ぐため、シール装着溝の底面又は弁座面に撓みを打ち消すための曲面を形成し、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにすることを課題１とし、シールの左右方向の各位置での撓みを打ち消すように変えて、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域にで一定となるようにすることを課題２とする。
【０００６】
【課題を解決するための手段】
本発明は、前記課題を達成するために、バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に平坦な弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部にシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、撓み量曲線を紙面上で１８０度回転させた逆撓み量曲線を作成し、横方向のシール装着溝の底面に逆撓み量曲線に相当する曲面を形成し、横方向のシール装着溝に厚みが一定のシールを装着し、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブである。
本発明は、バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部に底面が平坦なシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、横方向の弁座面に撓みを打ち消す方向に撓み量曲線に相当する曲面を形成し、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブである。
本発明は、バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に平坦な弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部に底面が平坦なシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、撓み量曲線を紙面上で１８０度回転させた逆撓み量曲線を作成し、横方向のシールの厚みを逆撓み量曲線に相当する量だけ厚くし、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブである。
本発明は、前記の発明において、弁体の左右方向長さが３３０〜３８０ｍｍの場合、変位量比（変位量／左右方向長さ）を０．０００６〜０．００１４としたことを特徴とする変形量補正ゲートバルブである。なお、弁体をアルミニューム合金製となすことができる。
【０００７】
【発明の実施の形態】
図１（ａ） 〜（ｄ） は、本発明の変形量補正ゲートバルブの実施の形態第１を示しす。図２（ｃ） に示すように、従来のゲートバルブは、シャフト２１から弁体２２（シール２４）の左右方向の中心に力Ｆを作用させ、シール２４を弁座面２５に押圧したときに、図２（ｄ） に示すように弁体２２（シール２４）が湾曲し撓みが生ずる。図１（ａ） は、この撓み量を図に示した撓み量曲線３０であり、図１（ａ） の横軸はシール２４の左右方向の長さを示し、縦軸はシール２４の各位置に生ずる撓み量を示す。図１（ｂ） は、図１（ａ） の撓み量曲線を紙面上で１８０度回転させた逆撓み量曲線３１である。
【０００８】
図１（ｃ） に示すように、弁体２２の横方向のシール装着溝の底面２６に逆撓み曲線３１に相当する曲面を形成する。そして、弁体２２の横方向のシール装着溝の底面に厚みが一定のシール２４を装着し、縦方向のシール装着溝の表面を横方向のシールの表面の左右両端と同一の面とする。そして、弁座面２５の表面は平坦である。
図１（ｃ） の曲面を有する弁体２２のシール２４を弁座面２５に接近させ、弁体２２のシール２４が弁座面２５に接触した瞬間が、図１（ｄ） に示されている。こうした状態で、シャフト２１から弁体２２の左右方向の中心に力Ｆを作用させ、シール２４を弁座面２５に押圧すると、シール２４が撓み量曲線３０の曲面に向かって湾曲しようとする。しかし、弁体２２の横方向のシール装着溝の底面２６には、撓みを打ち消す方向に逆撓み量曲線３１の曲面が形成され、シール２４の厚みは一定であるので、シール２４の表面は、撓み量曲線３０の曲面に逆撓み量曲線３１の曲面が重ねられた形、即ち平面となる。弁体２２のシール２４の面が平面となるので、シール２４の圧縮量がシール２４の全域で一定となる。
【０００９】
図１（ｅ） は、本発明の変形量補正ゲートバルブの実施の形態第２を示す。図１（ｅ） では、弁座面２５の横方向に、撓みを打ち消す方向に、撓み曲線３０に相当する曲面を形成した。なお、実施の形態第２では弁座面２５に撓み曲線３０を形成したので、窪みの向きは、実施の形態第１の弁体２２のシール装着溝の撓み曲線３０と同一になる。
弁体２２のシール２４の平坦な表面を弁座面２５に接近させ、シャフト２１から弁体２２の左右方向の中心に力Ｆを作用させ、弁体２２・シール２４を弁座面２５に押圧すると、弁体２２（シール２４）が撓み量曲線３０の曲面に向かって湾曲しようとし、シール２４の圧縮量がシール２４の全域で一定となる。
【００１０】
図１（ｆ） は、本発明の変形量補正ゲートバルブの実施の形態第３を示す。図１（ｆ） では、横方向のシールの厚みを逆撓み量曲線に相当する量だけ厚くした。そして、縦方向のシール２４の表面は、シール２４の表面２４Ａの左右両端部の表面と同一の面とする。
平坦なシール装着溝の底面２６に図１（ｆ） のシール２４を装着させ、このシール２４を平坦な弁座面２５に接近させ、シャフト２１から弁体２２の左右方向の中心に力Ｆを作用させ、このシール２４を弁座面２５に押圧すると、シール２４が撓み量曲線３０の曲面に向かって湾曲しようとする。しかし、シール２４の表面２４Ａには逆撓み量曲線３１の厚みに相当する曲面が形成されているので、弁体２２のシール２４の面は、撓み量曲線３０の曲面に逆撓み量曲線３１の曲面が重ねられた形、即ち平面となる。弁体２２のシール２４の面が平面となるので、シール２４の圧縮量がシール２４の全域で一定となる。
【００１１】
【発明の効果】
請求項１，２の変形量補正ゲートバルブは、シール装着溝の底面又は弁座面に逆撓み量曲線又は撓み量曲線に相当する曲面が形成されているので、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となり、長方形の弁体に装着されたシールの左右両端部でのシール効果が低減することを防ぐことができる。
請求項３の変形量補正ゲートバルブは、横方向のシールの厚みを逆撓み量曲線に相当する量だけ厚くしたので、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域にで一定となり、長方形の弁体に装着されたシールの左右両端部でのシール効果が低減することを防ぐことができる。
【図面の簡単な説明】
【図１】図１（ａ） は撓み量曲線を示す図であり、図１（ｂ） は逆撓み量曲線を示す図であり、図１（ｃ） は本発明の実施の形態第１の弁体のシール装着溝の底面に逆撓み量曲線に相当する曲面を形成した弁体を示す図であり、図１（ｄ） は図１（ｃ） の弁体をバルブボディに挿入した状態を示す図であり、図１（ｅ） は本発明の実施の形態第２の弁座面に撓み量曲線に相当する曲面を形成したバルブボディを示す図であり、図１（ｆ） は本発明の実施の形態第３の横方向のシールの厚みを逆撓み量曲線に相当する量だけ厚くしたシールを示す図である。
【図２】図２（ａ） は従来のゲートバルブの一部を断面で示す正面図であり、図２（ｂ） は図２（ａ） の右側断面図であり、図２（ｃ） は図２（ａ） のＡ−Ａ線断面図であり、図２（ｄ） は図２（ｃ） の弁体が撓んだ状態を示す図である。
【符号の説明】
１１ バルブボディ
２１ シャフト
２２ 弁体
２４ シール
２５ 弁座面
２６ 底面
３０ 撓み量曲線
３１ 逆撓み量曲線[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a gate valve disposed between vacuum chambers of a semiconductor manufacturing apparatus or between a vacuum chamber and the atmosphere.
[0002]
[Prior art]
[Patent Document 1]
FIG. 2 schematically shows a gate valve described in U.S. Pat. No. 6,390,448 (Patent Document 1), in which a valve body 11 is fixed above an operation body 10. . The valve body 11 includes a front wall 12, a rear wall 13, a left wall 14, a right wall 15, a bottom wall 16 and a lid 17, and the opposing front wall 12 and rear wall 13 have oblong rectangular openings 18 and 19, respectively. Are formed respectively. The upper portion of the shaft 21 is positioned vertically at the center of the valve body 11, and the center of the valve body 22 in the left-right direction is connected to the front of the upper portion of the shaft 21. A seal mounting groove having a flat bottom surface is formed on the outer peripheral portion of the rectangular surface (the mounting surface of the seal 24, the left surface in FIG. 2B) 23 of the valve body 22, and the seal 24 is mounted in the seal mounting groove. I have. Although not shown, in FIG. 2B, the valve body 22 is rotatable around a central portion in the vertical direction. By operating the shaft 21, the seal 24 of the valve body 22 presses the valve seat surface 25 of the opening 18 to close the opening 18 or lowers the valve body 22 to fully open the opening 18.
[0003]
For example, the left opening 18 communicates with the atmosphere, and the right opening 19 communicates with the vacuum chamber. By operating the shaft 21, the center position of the rectangular surface 23 of the valve body 22 is matched with the center position of the rectangular opening 18, and the seal 24 of the valve body 22 is pressed against the valve seat surface 25 of the opening 18. To close the opening 18. At this time, a force F from the shaft 21 toward the valve seat surface 25 acts on the valve element 22 (seal 24) as shown by an arrow in FIG. The reaction force from the seat surface 25 acts, and the differential pressure between the atmospheric pressure and the vacuum acts on the valve body 22. When both the left opening 18 and the right opening 19 are connected to the vacuum chamber, the differential pressure between the atmospheric pressure and the vacuum does not act.
[0004]
As described above, the valve element 22 (seal 24) receives the bending moment, and is bent in an arc shape as shown in an exaggerated manner in FIG. 22 (seal 24) is small near the center in the left-right direction, and increases toward the left and right ends far from the center. In a normal gate valve in which the valve body 22 is made of aluminum and the length of the seal 24 in the lateral direction is 330 to 380 mm, the amount of deflection at both left and right ends is 0.2 to 0.5 mm, and the displacement ratio (Displacement amount / length in the left-right direction) is 0.0006 to 0.0014. When the valve body 22 is made of stainless steel, the displacement ratio becomes a value smaller than 0.0006 to 0.0014. Due to this bending, the amount of compression of the seals 24 at the left and right end surfaces of the valve body 22 becomes significantly smaller than the amount of compression of the seals 24 near the center, so that the sealing effect at the left and right end portions of the seal 24 is relatively reduced. , Leaks are likely to occur. If the amount of compression of the seals 24 at the left and right end surfaces is made appropriate, the amount of compression of the seal 24 near the center becomes excessive, and the deterioration near the center of the seal 24 proceeds.
[0005]
[Problems to be solved by the invention]
The present invention relates to a gate valve for preventing the seal effect at the left and right ends of a seal mounted on the surface of a rectangular valve body from being reduced. The object of the present invention is to form a curved surface so that the amount of compression of the seal is constant over the entire area of the seal when the valve body is pressed against the valve seat surface. Another object is to make the compression amount of the seal constant over the entire area of the seal when the valve body is pressed against the valve seat surface.
[0006]
[Means for Solving the Problems]
According to the present invention, in order to achieve the above object, rectangular openings are respectively formed in opposing walls of a valve body, a flat valve seat surface is formed around an opening on an inner surface of the wall, and a vertical The lateral center of the valve body is connected to the oriented shaft, a seal mounting groove is formed on the outer peripheral portion of the rectangular surface of the valve body, a seal is mounted in the seal mounting groove, and the valve body is operated by operating the shaft. Closing the opening, or the gate valve allows the valve body to fully open the opening and allow an object to pass through,
When the valve body is pressed, a bending amount curve generated at each position in the left and right direction of the seal is created, a bending amount curve is formed by rotating the bending amount curve by 180 degrees on the paper surface, and a reverse bending amount curve is created. A curved surface corresponding to the reverse deflection curve is formed, a seal with a constant thickness is mounted in the lateral seal mounting groove, and when the valve body is pressed against the valve seat surface, the compression amount of the seal is constant over the entire area of the seal. This is a deformation correction gate valve characterized in that:
According to the present invention, a rectangular opening is formed in each of the opposing walls of the valve body, a valve seat surface is formed around an opening in the inner surface of the wall, and the valve body is provided with a shaft oriented in the vertical direction. The central part of the valve body is connected, a seal mounting groove having a flat bottom is formed on the outer peripheral part of the rectangular surface of the valve body, a seal is mounted in the seal mounting groove, and the valve body closes the opening by operating the shaft. In the gate valve, wherein the valve body allows the object to pass by fully opening the opening,
A curve is generated at each position in the left and right direction of the seal when the valve is pressed, and a curved surface corresponding to the curve is formed on the lateral valve seat in a direction to cancel the deflection. The amount of compression of the seal is constant over the entire area of the seal when pressed.
According to the present invention, a rectangular opening is formed in each of the opposing walls of the valve body, a flat valve seat surface is formed around an opening on the inner surface of the wall, and the valve body is provided on a shaft that is oriented vertically. A central portion in the lateral direction is connected, a seal mounting groove having a flat bottom surface is formed on the outer peripheral portion of the rectangular surface of the valve body, a seal is mounted in the seal mounting groove, and the valve body opens the opening by operating the shaft. A gate valve that closes or allows the valve to pass through an object by fully opening the opening.
When the valve body is pressed, a curve is generated at each position in the left and right direction of the seal, a reverse curve is formed by rotating the curve by 180 degrees on the paper, and the thickness of the seal in the horizontal direction is changed. A deformation correction gate valve characterized in that the thickness is increased by an amount corresponding to an amount curve so that the compression amount of the seal is constant over the entire area of the seal when the valve body is pressed against the valve seat surface.
The present invention is characterized in that, in the above invention, when the length of the valve body in the left-right direction is 330 to 380 mm, the displacement amount ratio (displacement amount / length in the left-right direction) is 0.0006 to 0.0014. This is a deformation correction gate valve. The valve body can be made of an aluminum alloy.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
1A to 1D show a first embodiment of a deformation correction gate valve according to the present invention. As shown in FIG. 2 (c), in the conventional gate valve, when a force F is applied from the shaft 21 to the center of the valve body 22 (seal 24) in the left-right direction and the seal 24 is pressed against the valve seat surface 25. As shown in FIG. 2D, the valve body 22 (seal 24) is bent and bent. FIG. 1A is a bending amount curve 30 showing the amount of bending, and the horizontal axis of FIG. 1A indicates the length of the seal 24 in the left-right direction, and the vertical axis indicates each position of the seal 24. Shows the amount of deflection that occurs. FIG. 1B is a reverse bending amount curve 31 obtained by rotating the bending amount curve of FIG. 1A by 180 degrees on the paper surface.
[0008]
As shown in FIG. 1C, a curved surface corresponding to the reverse bending curve 31 is formed on the bottom surface 26 of the lateral seal mounting groove of the valve body 22. Then, a seal 24 having a constant thickness is mounted on the bottom surface of the seal mounting groove in the horizontal direction of the valve element 22, and the surface of the seal mounting groove in the vertical direction is the same as the left and right ends of the surface of the seal in the horizontal direction. The surface of the valve seat surface 25 is flat.
The moment when the seal 24 of the valve body 22 having the curved surface shown in FIG. 1C approaches the valve seat surface 25 and the seal 24 of the valve body 22 comes into contact with the valve seat surface 25 is shown in FIG. I have. In this state, when a force F is applied from the shaft 21 to the center of the valve body 22 in the left-right direction to press the seal 24 against the valve seat surface 25, the seal 24 tends to bend toward the curved surface of the bending curve 30. However, on the bottom surface 26 of the seal mounting groove in the lateral direction of the valve element 22, a curved surface of the reverse bending amount curve 31 is formed in a direction to cancel the bending, and the thickness of the seal 24 is constant. This is a shape in which the curved surface of the reverse bending amount curve 31 is superimposed on the curved surface of the bending amount curve 30, that is, a flat surface. Since the surface of the seal 24 of the valve body 22 is flat, the amount of compression of the seal 24 is constant over the entire area of the seal 24.
[0009]
FIG. 1E shows a second embodiment of the deformation correction gate valve according to the present invention. In FIG. 1E, a curved surface corresponding to the bending curve 30 is formed in the lateral direction of the valve seat surface 25 and in the direction to cancel the bending. In the second embodiment, since the bending curve 30 is formed on the valve seat surface 25, the direction of the depression is the same as the bending curve 30 of the seal mounting groove of the first valve body 22 in the first embodiment.
The flat surface of the seal 24 of the valve body 22 is made to approach the valve seat surface 25, and a force F is applied from the shaft 21 to the center in the left-right direction of the valve body 22, thereby pressing the valve body 22 and the seal 24 against the valve seat surface 25. Then, the valve body 22 (seal 24) tends to curve toward the curved surface of the deflection amount curve 30, and the amount of compression of the seal 24 is constant over the entire area of the seal 24.
[0010]
FIG. 1F shows a third embodiment of the deformation correction gate valve according to the present invention. In FIG. 1 (f), the thickness of the seal in the lateral direction is increased by an amount corresponding to the reverse bending amount curve. The surface of the seal 24 in the vertical direction is the same as the left and right ends of the surface 24A of the seal 24.
The seal 24 shown in FIG. 1F is mounted on the bottom surface 26 of the flat seal mounting groove, and the seal 24 is brought close to the flat valve seat surface 25, and a force F is applied from the shaft 21 to the center of the valve body 22 in the left-right direction. When the seal 24 is pressed against the valve seat surface 25, the seal 24 tends to bend toward the curved surface of the deflection curve 30. However, since a curved surface corresponding to the thickness of the reverse deflection curve 31 is formed on the surface 24A of the seal 24, the surface of the seal 24 of the valve element 22 is formed by the curved surface of the reverse deflection curve 31 and the curved surface of the reverse deflection curve 31. A curved surface is superimposed, that is, a flat surface. Since the surface of the seal 24 of the valve body 22 is flat, the amount of compression of the seal 24 is constant over the entire area of the seal 24.
[0011]
【The invention's effect】
In the deformation amount correcting gate valve according to the first and second aspects, since the curved surface corresponding to the reverse bending amount curve or the bending amount curve is formed on the bottom surface of the seal mounting groove or the valve seat surface, the valve body is pressed against the valve seat surface. When this occurs, the amount of compression of the seal becomes constant over the entire area of the seal, and it is possible to prevent the sealing effect at the right and left ends of the seal attached to the rectangular valve body from being reduced.
In the deformation correction gate valve of the third aspect, the thickness of the seal in the lateral direction is increased by an amount corresponding to the reverse deflection curve, so that when the valve body is pressed against the valve seat surface, the amount of compression of the seal is equal to the entire area of the seal. Thus, the sealing effect at the left and right ends of the seal mounted on the rectangular valve body can be prevented from being reduced.
[Brief description of the drawings]
FIG. 1A is a diagram showing a curve of the amount of bending, FIG. 1B is a diagram showing a curve of the amount of reverse bending, and FIG. 1C is the first embodiment of the present invention. FIG. 1D is a view showing a valve body having a curved surface corresponding to a reverse bending amount curve formed on a bottom surface of a seal mounting groove of the valve body. FIG. 1D shows a state where the valve body of FIG. 1C is inserted into the valve body. FIG. 1E is a view showing a valve body in which a curved surface corresponding to a bending amount curve is formed on a second valve seat surface according to the second embodiment of the present invention, and FIG. 1F is a view showing the present invention. FIG. 10 is a diagram showing a seal in which the thickness of the third lateral seal is increased by an amount corresponding to a reverse bending amount curve according to the third embodiment.
2 (a) is a front view showing a part of a conventional gate valve in cross section, FIG. 2 (b) is a right side cross section of FIG. 2 (a), and FIG. 2 (c) is FIG. 2A is a sectional view taken along line AA of FIG. 2A, and FIG. 2D is a view showing a state in which the valve body of FIG. 2C is bent.
[Explanation of symbols]
11 Valve Body 21 Shaft 22 Valve 24 Seal 25 Valve Seat 26 Bottom 30 Deflection Curve 31 Reverse Deflection Curve

Claims (4)

バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に平坦な弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部にシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、撓み量曲線を紙面上で１８０度回転させた逆撓み量曲線を作成し、横方向のシール装着溝の底面に逆撓み量曲線に相当する曲面を形成し、横方向のシール装着溝に厚みが一定のシールを装着し、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブ。Rectangular openings are respectively formed in opposing walls of the valve body, flat valve seating surfaces are formed around openings in the inner surface of said walls, and a longitudinally oriented shaft has a lateral center of the valve body. Parts are connected, a seal mounting groove is formed on the outer peripheral portion of the rectangular surface of the valve body, a seal is mounted on the seal mounting groove, the valve body closes the opening by operating the shaft, or the valve body is In a gate valve that allows an object to pass by fully opening the opening,
When the valve body is pressed, a bending amount curve generated at each position in the left and right direction of the seal is created, a bending amount curve is formed by rotating the bending amount curve by 180 degrees on the paper surface, and a reverse bending amount curve is created. A curved surface corresponding to the reverse deflection curve is formed, a seal with a constant thickness is mounted in the lateral seal mounting groove, and when the valve body is pressed against the valve seat surface, the compression amount of the seal is constant over the entire area of the seal. A deformation correction gate valve characterized in that: バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部に底面が平坦なシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、横方向の弁座面に撓みを打ち消す方向に撓み量曲線に相当する曲面を形成し、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブ。Rectangular openings are respectively formed in opposing walls of the valve body, a valve seat surface is formed around an opening in the inner surface of the wall, and a laterally oriented shaft has a laterally central portion of a valve body formed on a vertically oriented shaft. A seal mounting groove having a flat bottom surface is formed on an outer peripheral portion of the rectangular surface of the valve body, a seal is mounted in the seal mounting groove, and the valve body closes an opening by operating a shaft, or the valve body is closed. A gate valve that allows the object to pass by fully opening the opening,
A curve is generated at each position in the left and right direction of the seal when the valve is pressed, and a curved surface corresponding to the curve is formed on the lateral valve seat in a direction to cancel the deflection. Wherein the amount of compression of the seal is made constant over the entire area of the seal when the gate valve is pressed. バルブボディの対抗する壁に長方形の開口部がそれぞれ形成され、前記壁の内面の開口部の周囲に平坦な弁座面が形成され、縦方向に向けられたシャフトに弁体の横方向の中心部が連結され、前記弁体の長方形の面の外周部に底面が平坦なシール装着溝が形成され、シール装着溝にシールが装着され、シャフトの操作により弁体が開口部を閉じたり、前記弁体が前記開口部を全開させて物体を通過可能とするゲートバルブにおいて、
弁体の押圧時にシールの左右方向の各位置に生ずる撓み量曲線を作成し、撓み量曲線を紙面上で１８０度回転させた逆撓み量曲線を作成し、横方向のシールの厚みを逆撓み量曲線に相当する量だけ厚くし、弁体を弁座面に押圧したときにシールの圧縮量がシールの全域で一定となるようにしたことを特徴とする変形量補正ゲートバルブ。Rectangular openings are respectively formed in opposing walls of the valve body, flat valve seating surfaces are formed around openings in the inner surface of said walls, and a longitudinally oriented shaft has a lateral center of the valve body. Parts are connected, a seal mounting groove having a flat bottom surface is formed on the outer peripheral portion of the rectangular surface of the valve body, a seal is mounted on the seal mounting groove, and the valve body closes the opening by operating the shaft, or In a gate valve in which a valve body allows the object to pass by fully opening the opening,
When the valve body is pressed, a curve is generated at each position in the left and right direction of the seal, a reverse curve is formed by rotating the curve by 180 degrees on the paper, and the thickness of the seal in the horizontal direction is changed. A deformation correction gate valve characterized in that the thickness is increased by an amount corresponding to an amount curve so that the compression amount of the seal is constant over the entire area of the seal when the valve body is pressed against the valve seat surface. 弁体の左右方向長さが３３０〜３８０ｍｍの場合、変位量比（変位量／左右方向長さ）を０．０００６〜０．００１４とした請求項１ないし３のいずれか一つの変形量補正ゲートバルブ。4. The deformation correction gate according to claim 1, wherein the displacement ratio (displacement / length in the left-right direction) is 0.0006 to 0.0014 when the length of the valve body in the left-right direction is 330 to 380 mm. valve.
JP2003099910A 2003-04-03 2003-04-03 Deformation correction gate valve Expired - Fee Related JP4264934B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005252184A (en) * 2004-03-08 2005-09-15 Nippon Valqua Ind Ltd Seal plate of vacuum gate valve and seal member used for the same
JP5890929B1 (en) * 2015-07-01 2016-03-22 株式会社ブイテックス Gate valve
JP6063594B1 (en) * 2016-06-02 2017-01-18 株式会社ブイテックス Vacuum gate valve and opening method of vacuum gate valve

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KR102327338B1 (en) * 2021-07-21 2021-11-18 이노레스 주식회사 Valve blade with reinforcing stick

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005252184A (en) * 2004-03-08 2005-09-15 Nippon Valqua Ind Ltd Seal plate of vacuum gate valve and seal member used for the same
JP4578829B2 (en) * 2004-03-08 2010-11-10 日本バルカー工業株式会社 Seal plate for vacuum gate valve and seal member used therefor
JP5890929B1 (en) * 2015-07-01 2016-03-22 株式会社ブイテックス Gate valve
JP6063594B1 (en) * 2016-06-02 2017-01-18 株式会社ブイテックス Vacuum gate valve and opening method of vacuum gate valve

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