JP2004303672A - Plane heating type infrared radiation heating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new plane heating type infrared radiation heating device which can heat a medium-sized discoid material of 50 ϕ or so with rapid temperature elevation and a homogeneous temperature distribution. <P>SOLUTION: This device is composed of a composite type reflecting mirror 1 and an infrared lamp 4, and the composite type reflecting mirror 1 is composed by combining a hollow conical reflecting mirror 2 and a cylindrical reflecting mirror 3. Infrared ray radiated from the infrared lamp 4 includes straight light, reflected light reflected by the conical reflecting mirror 2 and oblique reflected light reflected by the cylindrical reflecting mirror 3, and this is designed to irradiate and heat a heated object 16. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a surface heating type infrared radiation heating apparatus for heating a medium-area disc-shaped material at a high speed with a uniform temperature distribution.
[0002]
[Prior art]
The conventional surface heating type infrared radiation heating device is composed of a composite reflection mirror and an infrared lamp, and the composite reflection mirror is a combination of a hollow parabolic reflection mirror and a cylindrical reflection mirror, An infrared lamp is installed at the focal point of the parabolic reflection mirror, and the heating object is irradiated with infrared light from the infrared lamp.The infrared light emitted from the infrared lamp is reflected by the straight light and the parabolic reflection mirror. And heated light can be heated (for example, see Patent Document 1).
[0003]
[Patent Document 1]
JP-A-10-82589
[Problems to be solved by the invention]
For the development of high quality semiconductor materials such as silicon and silicon carbide, it is very important to heat the semiconductor material at a high temperature and in a uniform temperature distribution in a clean atmosphere. Even with the above-described known conventional apparatus, the semiconductor material can be heated at a high temperature and with a uniform temperature distribution, but there is a problem that only a disk-shaped material having a small area of about 10φ can be heated.
The present invention has been made in view of the above problems, and provides a novel surface-heating type infrared radiation heating apparatus capable of rapidly heating a medium-area disk-shaped material of about 50φ with a uniform temperature distribution.
[0005]
[Means for solving the problem]
Therefore, the surface heating type infrared radiation heating apparatus of the present invention is composed of a composite reflection mirror and an infrared lamp, and the composite reflection mirror is a combination of a hollow conical reflection mirror and a cylindrical reflection mirror, Infrared light emitted from the lamp includes straight light, reflected light reflected by a conical reflecting mirror, and obliquely reflected light reflected by a cylindrical reflecting mirror, and irradiates and heats a heated object.
According to the present invention, a composite reflecting mirror is combined with a hollow conical reflecting mirror and a cylindrical reflecting mirror, and the infrared light emitted from the infrared lamp is emitted as straight light and the straight light reflected from the conical reflecting mirror. With the reflected light parallel to the above and the obliquely reflected light reflected by the cylindrical reflecting mirror, the temperature of the disk-shaped material having a medium area of about 50φ can be raised at a high speed and heat-treated.
[0006]
Further, the present invention provides a disk-shaped soaking mechanism below the composite reflection mirror, and adjusts the radiation intensity of the infrared ray emitted straight from the infrared lamp and the infrared ray radiated in the horizontal direction and reflected by the conical reflection mirror. The heating object is irradiated after being made uniform, and the entire heating object is heated substantially uniformly.
According to the present invention, a disk-shaped soaking mechanism is provided below the composite reflecting mirror, and infrared rays emitted straight from the infrared lamp and infrared rays emitted horizontally from the infrared lamp and reflected by the cone-shaped reflecting mirror are provided. Since the radiation intensity is made uniform to irradiate the heated object and the entire heated object is heated almost uniformly, a disk-shaped material with a medium area of about 50φ is raised at a high speed and with a substantially uniform temperature distribution. Can be heated and heat treated.
[0007]
Further, in the present invention, the disk-shaped heat equalizing mechanism is a transparent support plate having a thin periphery and a central heat equalizing disk thicker than the transparent support plate supported by the transparent support plate. It is.
According to the present invention, the disk-shaped heat equalizing mechanism is constituted by a central heat equalizing disk which is a transparent support plate having a thin periphery and is supported by the transparent support plate, and which is thicker than the transparent support plate. Therefore, the irradiation intensity of the infrared ray passing through the central heat equalizing disc is weakened, and the irradiation intensity of the infrared ray passing through the surrounding thin transparent support plate is made substantially uniform, and the heating of the entire heated object is made substantially uniform, and the intensity of the irradiation is about 50φ. A medium-area disk-shaped material can be heated and heated at a high speed with a substantially uniform temperature distribution.
[0008]
Further, in the present invention, a vacuum chamber having a transparent disk provided thereon is disposed below the composite reflection mirror, a heated object is placed in the vacuum chamber, and infrared rays emitted from the infrared lamp emit the transparent circle. The heating object is irradiated through the plate to heat the entire heating object to a substantially uniform temperature distribution.
In the present invention, a heated object is put in a vacuum chamber, and the entire heated object is heated to a substantially uniform temperature distribution by irradiating the heated object in the vacuum chamber. The whole heated object can be heated.
[0009]
Further, in the present invention, a transparent column is provided in the vacuum chamber, the column being fixed to the transparent disk.
In the present invention, since the transparent cylinder is provided in the vacuum chamber and fixed to the transparent disk, the oblique irradiation light emitted from the infrared lamp or the oblique reflected light reflected by the cylindrical reflecting mirror is applied to the transparent cylinder. It is totally reflected on the inner surface of the outer wall and does not emit infrared light from the infrared lamp to the outside of the heated object, but irradiates the heated object with straight-ahead light to uniformize the heating of the entire heated object, increase the heating efficiency, and increase the speed and uniformity. The temperature can be raised in a temperature distribution, and heat treatment can be performed in a clean atmosphere.
[0010]
In the present invention, the surface heating type infrared radiation heating device according to any one of claims 1 to 5 is attached to both the upper and lower portions of the vacuum chamber, and infrared rays are irradiated from both the upper surface and the lower surface of the heated object. The entire heated product is heated to a uniform temperature distribution.
In the present invention, since infrared rays are irradiated from both the upper surface and the lower surface of the heated object to heat the entire heated object to a uniform temperature distribution, the heat treatment can be performed at very high speed and with high efficiency.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of the present invention will be described based on examples shown in the drawings. In the figure, reference numeral 1 denotes a composite-type reflecting mirror, which is formed by combining a hollow conical reflecting mirror 2 located above and a hollow cylindrical reflecting mirror 3 connected to the conical reflecting mirror 2. . An infrared lamp 4 is provided at the center of the conical reflection mirror 2.
The composite mirror 1 is fixed on an upper lid 6 of a cylindrical vacuum chamber 5 described later. A through-hole window 7 is provided in the upper lid 6 of the cylindrical vacuum chamber 5, and a transparent disk 8 is vacuum-sealed with an O-ring 31 at the position of the through-hole window 7 and fixed with a holding ring 13. The diameter of the through-hole window 7 in which the transparent disk 8 is vacuum-sealed by the O-ring 31 and fixed by the holding ring 13 is equal to the inner diameter of the cylindrical reflecting mirror 3 of the composite reflecting mirror 1 and an infrared lamp. The infrared rays from 4 pass through the transparent disk of the through-hole window 7 to irradiate a heated object described later.
[0012]
The infrared rays emitted from the infrared lamp 4 are: straight traveling light directly emitted from the infrared lamp 4, obliquely irradiated light directly emitted from the infrared lamp 4, reflected light reflected by the conical reflecting mirror 2, and cylindrical light. And obliquely reflected light reflected by the reflection mirror 3. Most of the reflected light reflected by the conical reflecting mirror 2 becomes straight light parallel to the straight light radiated directly from the infrared lamp 4, and irradiates a heated object made of a medium-area disk-shaped material.
As described above, the composite reflection mirror 1 is fixed to the upper lid 6 of the vacuum chamber 5, but a disc-shaped soaking mechanism 9 is provided between the composite reflection mirror 1 and the upper lid 6 of the vacuum chamber 5. It is. The disk-shaped heat equalizing mechanism 9 is a transparent support plate 10 having a thin periphery and a central heat equalizing disk 11 thicker than the transparent support plate 10 supported by the transparent support plate 10. In the disk-shaped soaking mechanism, the periphery of the thin transparent support plate 10 is sandwiched and supported between the lower part of the cylindrical reflection mirror 2 of the composite reflection mirror 1 and the upper lid 6 of the vacuum chamber 5.
[0013]
As described above, in order to sandwich the periphery of the thin transparent support plate 10 of the disc-shaped soaking mechanism 9 between the lower part of the cylindrical reflection mirror 2 and the upper lid 6 of the vacuum chamber 5, the upper lid 6 is transparent. A holding ring 13 for holding and fixing the disk 8 is provided, and the periphery of the thin transparent support plate 10 is held on the holding ring 13.
The upper lid 6 of the vacuum chamber 5 is detachable from the vacuum chamber 5, and the upper lid 6 is detached from the vacuum chamber 5 while the composite reflection mirror 1 is fixed on the upper lid 6. Is opened so that a heated object 16 to be described later can be taken in and out of the opening.
[0014]
A transparent column 12 positioned in the vacuum chamber 5 is fixed to a transparent disk 8 which is vacuum-sealed on the upper lid 6 of the vacuum chamber 5 with an O-ring 31 and fixed with a holding ring 13.
Below the vacuum chamber 5, symmetrically below the upper composite-type reflecting mirror 1, the infrared lamp 4, and the disk-shaped soaking mechanism 9 and symmetrically with the lower composite-type reflecting mirror 1, the infrared lamp 4, and the disk-shaped soaking mechanism 9 Is provided. For this purpose, the bottom plate 15 of the vacuum chamber 5 is provided with a through-hole window 7 in exactly the same manner as the lid 6 described above, and the transparent disk 8 is fixed with a holding ring 13. The transparent cylinder 12 to be positioned is fixed.
In the vacuum chamber 5, a heating object mounting table 14 on which a heating object 16 is mounted is provided. The heated object mounting table 14 is provided with a through hole 17 at the center, and the heated object 16 is mounted on an edge of the through hole 17.
Further, cooling water for cooling the complex type reflecting mirror 1 is made to flow through the complex type reflecting mirror 1, cooling water is sent from a cooling water inlet 18, and cooling water flows out from a cooling water outlet 19. It is like that.
[0015]
FIG. 3 shows an external view of the surface heating type infrared radiation heating apparatus of the present invention. As shown in the figure, the surface heating type infrared radiation heating apparatus of the present invention is supported on a support base 20. Specifically, the vacuum chamber 5 is supported at the center of the upper horizontal table 21 of the support base 20, and the lower composite mirror 1 is supported downward.
At least two screw shafts 22, 22 are erected on the upper horizontal base 21, and the respective screw shafts 22, 22 are rotatable. A screw 23 is formed on each of the screw shafts 22, a bevel gear 24 is fixed to the lower end of any of the screw shafts 22, and a shaft support 25 is provided on the upper horizontal base 21. A bevel gear 24 is provided on a horizontal shaft 26 which is rotatably supported on the shaft 25, and the screw shaft 22 is rotated by rotating an operation handle 27 provided on the horizontal shaft 26 by meshing these bevel gears 24, 24. . The two screw shafts 22, 22 are linked by an endless chain 28 at their upper ends so as to operate synchronously.
[0016]
Female screws 29, 29 are screwed into the screws 23, 23 of the respective screw shafts 22, and the female screws 29 are connected to a connecting support plate 30 fixed to the upper lid 6 of the vacuum chamber 5. is there. With this configuration, the screw shafts 22, 22 are rotated to move the female screws 29, 29 up and down, and the upper lid 6 of the vacuum chamber 5 and the upper composite mirror 1 are moved up and down, so that the upper lid 6 of the vacuum chamber 5 is moved. Is opened and closed.
[0017]
When heating the heating object 16 with the surface heating type infrared radiation heating apparatus of the present invention having the above configuration, the upper lid 6 of the vacuum chamber 5 is opened as described above, and the heating object 16 is placed on the heating object mounting table 14. Is placed. Thereafter, the upper lid 6 is lowered and closed, and the air in the vacuum chamber 5 is exhausted by a vacuum pump to evacuate the vacuum chamber 5. Thereafter, the infrared lamp 4 is turned on to emit infrared light. The infrared light radiated from the infrared lamp 4 is reflected by the conical reflection mirror 2, straight light traveling straight from the infrared lamp 4 to the heating object 16, oblique irradiation light directly irradiating the heating object 16 from the infrared lamp 4. And the obliquely reflected light reflected by the cylindrical reflecting mirror 3.
[0018]
The radiation intensity distribution of the infrared irradiation light as described above is strong at the center and weak at the outer periphery, as shown in FIG. Therefore, in the apparatus of the present invention, the infrared ray at the center is absorbed by the disk-shaped soaking mechanism 9 provided between the composite reflection mirror 1 and the transparent disk 8 provided on the upper lid 6 of the vacuum chamber 5, and Has an approximate trapezoidal shape as shown in FIG. Further, in the apparatus of the present invention, the periphery of the heating object 16 is heated by the irradiation light totally reflected on the inner surface of the outer wall of the transparent cylinder 12 by the transparent cylinder 12 in the vacuum chamber 5, and the infrared intensity distribution on the heating object is shown in FIG. (C), and a disk-shaped medium having a medium area can be uniformly heated over its entire surface.
[0019]
【The invention's effect】
The surface heating type infrared radiation heating apparatus of the present invention comprises a composite reflection mirror and an infrared lamp, and the composite reflection mirror combines a hollow conical reflection mirror and a cylindrical reflection mirror, and emits light from the infrared lamp. Since the infrared light emitted includes straight light, reflected light reflected by a conical reflecting mirror, and obliquely reflected light reflected by a cylindrical reflecting mirror, the heating object is irradiated and heated. A disk having a medium area of about 50φ is formed by the linear light, the reflected light parallel to the straight light reflected by the conical reflecting mirror, and the oblique reflected light reflected by the cylindrical reflecting mirror. The material can be heated at a high speed and heated.
[0020]
Further, in the present invention, a disk-shaped soaking mechanism is installed below the composite reflection mirror, and the composite reflection mirror and the infrared ray emitted straight from the infrared lamp are radiated in the horizontal direction and reflected by the conical reflection mirror. Irradiation of the heating object is performed by uniformizing the radiation intensity of infrared rays, and the entire heating object is heated substantially uniformly. Therefore, a disk-shaped material having a medium area of about 50φ is formed at a high speed and with a substantially uniform temperature distribution. It can be heated and heat-treated.
[0021]
Further, in the present invention, the disk-shaped soaking mechanism is a transparent support plate having a thin periphery and a central transparent disk thicker than the transparent support plate supported by the transparent support plate. Therefore, the irradiation intensity of the infrared light passing through the central transparent disk is reduced, and the irradiation intensity of the infrared light passing through the thin transparent support plate around the center is made substantially uniform, and the heating of the entire heated object is made substantially uniform. A disk-shaped material having an area can be heated and heated at a high speed with a substantially uniform temperature distribution.
[0022]
Further, in the present invention, a vacuum chamber having a transparent disk provided thereon is disposed below the composite reflection mirror, a heated object is placed in the vacuum chamber, and infrared rays emitted from the infrared lamp emit the transparent circle. Since the entire heated object is heated to a substantially uniform temperature distribution by irradiating the heated object through the plate, the heating efficiency can be increased, and the entire heated object can be heated at high speed in a clean atmosphere.
[0023]
Furthermore, in the present invention, since the transparent column is provided in the vacuum chamber and fixed to the transparent disc, the oblique irradiation light directly irradiated from the infrared lamp or the cylindrical reflecting mirror reflects the light. The obliquely reflected light is totally reflected on the inner surface of the outer wall of the transparent cylinder, and the infrared light from the infrared lamp is not radiated to the outside of the heated object. The temperature can be raised at a high speed with a uniform temperature distribution, and the heat treatment can be performed in a clean atmosphere.
[0024]
In the present invention, the surface heating type infrared radiation heating device according to any one of claims 1 to 5 is attached to both the upper and lower portions of the vacuum chamber, and infrared rays are irradiated from both the upper surface and the lower surface of the heated object. Since the entire heated object is heated to a uniform temperature distribution, the heat treatment can be performed at a very high speed and with high efficiency in a clean atmosphere.
[Brief description of the drawings]
FIG. 1 is a sectional front view showing an embodiment of a surface heating type infrared radiation heating apparatus of the present invention.
FIG. 2 is a view showing an intensity distribution of infrared irradiation of the heating device of the present invention.
FIG. 3 is an external view of a surface heating type infrared radiation heating apparatus of the present invention.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 composite reflecting mirror 2 conical reflecting mirror 3 cylindrical reflecting mirror 4 infrared lamp 5 vacuum chamber 6 top lid 7 through-hole window 8 transparent disc 9 disc-shaped soaking mechanism 10 transparent support plate 11 soaking disc 12 transparent Column 13 Pressing ring 14 Heated object mounting table 15 Bottom plate 16 Heated object 17 Through hole 18 Cooling water inlet 19 Cooling water outlet 20 Supporting pedestal 21 Upper horizontal table 22 Screw shaft 23 Screw 24 Bevel gear 25 Shaft support 26 Horizontal shaft 27 Operating handle 28 Endless chain 29 Female screw 30 Connection support plate 31 O-ring

Claims (6)

It is composed of a composite reflection mirror and an infrared lamp.The composite reflection mirror is a combination of a hollow conical reflection mirror and a cylindrical reflection mirror. A surface heating type infrared radiant heating device that includes a reflected light reflected by a reflecting mirror and an oblique reflected light reflected by a cylindrical reflecting mirror, and irradiates and heats a heating object. A disk-shaped soaking mechanism is installed below the composite reflecting mirror, and the intensity of the infrared radiation emitted straight from the infrared lamp and the infrared radiation radiated in the horizontal direction and reflected by the conical reflecting mirror are made uniform, and the heated object is made uniform. The surface heating type infrared radiation heating apparatus according to claim 1, wherein the heating is performed so that the entire heated object is substantially uniformly heated. 3. The disk-shaped soaking mechanism according to claim 2, wherein the disk-shaped soaking mechanism is a transparent supporting plate having a thin peripheral portion, and a central portion soaking plate having a thickness greater than that of the transparent supporting plate supported by the transparent supporting plate. Surface heating type infrared radiation heating device. A vacuum chamber provided with a transparent disk at the top is disposed below the composite reflection mirror, and a heated object is placed in the vacuum chamber. Infrared rays radiated from the infrared lamp pass through the transparent disk and are heated. The surface heating type infrared radiation heating apparatus according to any one of claims 1 to 3, wherein the heating is performed so as to heat the entire heated object to a substantially uniform temperature distribution. 5. The surface heating type infrared radiation heating apparatus according to claim 4, wherein a transparent column is provided in the vacuum chamber and fixed to the transparent disk. The surface heating type infrared radiation heating apparatus according to any one of claims 1 to 5 is attached to both the upper and lower portions of the vacuum chamber, and the entirety of the heating object is uniformly irradiated by irradiating infrared rays from both upper and lower surfaces of the heating object. Surface heating type infrared radiation heating device that heats up to a suitable temperature distribution.

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