JP2004295903A - Actuator control unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator control unit, capable of controlling actuators by common instructions irrespective of types of actuators and capable of performing alterations, including changes in the types of the actuators. <P>SOLUTION: The control unit connected to an actuator via a servo mechanism 58 controls the operation of the actuator according to the program and performs communications with another actuator or an upper primary control unit by the same interface through a communications control unit 122, thereby carrying out the work in cooperative manner. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an actuator control device that operates a plurality of actuators in a coordinated manner.

  Actuators used for assembling and transporting parts in each factory line are mechanically combined with each other to assemble and transport one work. Typically, a control signal is controlled by a programmable control (PC) or the like, which is the center of the control, and is controlled by an electric or pneumatic driver, etc., which is amplified and controlled by the signal. Then, a series of operations are performed (see Non-Patent Document 1).

Fumio Sudo and Takeo Kobayashi, "Introduction to FA Systems in the CIM Era", Ohmsha, published June 1, 1990

  However, when assembling and transporting a work in cooperation with actuators, several to several tens of linearly and rotationally operated actuators are required, and these actuators are concentrated around the work. Further, sensors for monitoring the operation of the actuator are scattered around the actuator and the work.

  For example, while the step of transporting the IC chip may be several mm to several tens of mm, the actuators that perform those steps are concentrated in a very narrow space. However, in each actuator, the driving electric wiring, the driving fluid piping, and the wiring from each sensor are randomly arranged to the PC. On the other hand, if the wires are bundled, they become very large, which hinders the operation of the actuator.

  Furthermore, if the actuator is mechanically connected and branched, the wiring and piping to the other PC become enormous.

  When a large number of actuator groups related to one operation process are connected like a belt conveyor line, the PC which is the center of the control monitors and controls all of them, and the load on the CPU and the signal transmission system increases.

  As described above, when centralized control of actuators is performed, pipes and wirings are increased due to concentrated actuators, and the burden on a PC for centralized control is excessively increased. It also causes limitations due to limitations in communication capability and increases the cost of the device.

  Further, when the actuators are individually controlled, the operation of a certain portion is lost if the actuators are not linked to each other, which causes the whole system to stop. In addition, if an abnormality occurs in the centralized control device, the whole will be down.

  An object of the present invention is to provide an actuator control device that can be controlled by a common command regardless of the type of actuator and that can be easily changed including the type of actuator.

An actuator control device of the present invention is an actuator control device that operates a plurality of actuators in a coordinated manner.
A control unit that is connected to each of the actuators and controls operation of the actuator;
A communication control unit connected to each of the control units and performing transmission and reception of information between the respective actuators and a higher-order main control device via a network by the same interface
It is characterized by having.

  The present invention decentralizes the actuator control device, the actuator control device correlated with an appropriate work unit receives the information of the correlated actuator, sends a control instruction command and a series of programs or procedures, and sends the control instruction command to another actuator sensor. Signal processing is performed more locally by confirming that the program or procedure is operating properly and receiving the end.

  In addition, preferably, the control device of each actuator rearranges control management work to a control device having a small load in the group in real time, or performs overall management, sensor management, abnormality detection, warning, etc. The process is relocated to each control device to perform work.

  Even for one task, the task of the program level of the CPU is appropriately distributed to a plurality of control devices, reallocation is performed in real time, and processing is accelerated.

  At this time, Object-Oriented System is used as the basic structure of the Program, and Task, Procedure, Function, Program, and Module are described and described based on the Model-Driven Approach to create a system description of complex semiconductor manufacturing equipment. Make it correspond.

  By being able to work locally by decentralizing the control device, wiring from PCs and drivers, piping, signal lines from sensors, and control signal lines can be significantly reduced. Injury due to movement of piping etc. is reduced and reliability is improved.

  In the present invention, since the actuators and the higher-level main control device are connected by the communication control unit having the same interface via the control unit, it is possible to control each actuator with a common command regardless of its type. It is possible to provide an actuator control device that can change the actuator easily.

  Further, according to the present invention, the load on the PC of the centralized control device is reduced, and the reliability and cost can be reduced by reducing the data amount of the communication system.

  Each control unit can allocate tasks, procedures, and processes in a correlated manner and relocate it, so that the CPU, arithmetic circuit, and communication load of the control unit can be properly set, and the control unit has appropriate capacity and cost as a whole. It can be. Further, when one of the control devices becomes abnormal or in an emergency state, the other control device can perform the support or the substitute, the management, and the alarm.

  Hereinafter, the present invention will be described with reference to the drawings.

  Generally, users of CIM are conducting research and development on operation means of Computer Integrated Manufacturing (CIM) and Factory Automation (FA) in order to efficiently produce their own products. The work performed by the Company for its R & D activities is mainly for the cooperation of CIM users to manufacture (for example, integrate (develop)) parts into the system for CIM and FA using actuators. It becomes.

  As a means of this support cooperation, it is assumed that a real actuator has a form easily configured for CIM and FA, appropriate performance, a manufacturing method, a supply method, means, compatibility, and maintainability suitable for it.

  These actuators not only have their own means of support and cooperation, but also make it easy to place orders, manufacture, manage, plan, and combine between our company and other users and collaborators, and within other companies. (E.g., a business-to-business account system, a network, a business-to-business logistics system, and a business-to-business design collaboration network computer system). Technical equipment for it (computer network, EWS network management system, assembly module management processor, their network management software, OS), intelligent network of assembly, processing, warehouse, distribution system (WAN, LAN, LON), and so on Man-machine interface, different systems between different factories, different departments, different companies, different regions, different countries, management CIM, FA systems, as well as software, programs and character assumptions, management methods, It has means for matching interfaces such as a data structure, a data format, a file structure, a file format, a database management method, and an ordering system. This means (electrical, protocol, data structure) manages and matches the entire search structure, and in some cases both provide the appropriate correspondence restoration.

  For these purposes, A. Actuators, structures, and their components (motors, ball screws, timing belts, bearing boxes, bevel gear boxes, sensors, pulleys, etc.) are all standardized in shape, mounting, hole position, width, etc. By adopting a block structure or a modular structure having compatibility and compatibility, each can be used independently and can be assembled.

  Mounting is also unified by sharing the basic dimensions.

B. Data on the manufacturing method, manufacturing process, inspection results, design method, handling method, other members connected to it, and overall configuration (hierarchical structure) of each member, and code all the data on how the member is used GA (helical structure such as double helix structure, triple helix structure, etc.) with sudden displacement, intersection, natural selection called artificial life by artificial or pseudo biological circuits of circuit means such as semiconductor circuits and biomolecule circuit means Is stored in the form of a code (DNA) by a magnetic recording medium or a molecular structure (such as the arrangement of nuclei). For example, a bar code, a metal code (magnetic or non-magnetic pattern), a direct laser trimming or a lithographic pattern on a metal surface (for example, , An electronic circuit, a memory, a CPU, and a Programmable system, are machined into recesses on the surface of the metal, and the surface is coated so as to be flush with the metal surface). Attach the inside or surface of the member with a capsule or tape.

  Of course, all the data of each member can be stored as management data on another computer by the management code, and can be extracted by the code. However, such a configuration can be used only when there is a management computer and a system therefor, and cannot be used in an emergency at the site.

  Therefore, these code readers are brought to the site, or placed on the site as necessary, built in the robot or actuator, or arranged by predetermined mounting means, the history of the member on the spot, Functions such as members and actuators having a self-regeneration means for executing processing and reconstruction are required.

  For this purpose, the actuator control device has a degree of freedom with respect to the type of the motor and the solenoid valve, allows replacement and rearrangement, and provides identification information holding means that allows identification of the actuator from itself and the surroundings ( Barcodes, memory cards, RAMs, EPROMs, arithmetic devices, wireless ID modules using microwaves, etc.). In addition, the history and experience received by the actuator are automatically recorded.

  Then, each actuator has its own controller and is integrated by means of network communication, which may include several mechanically integrated actuator groups, some correlated operations, related actuator groups, or It is assumed that each actuator is rearranged and reconfigured according to load, production process, change, and optimization in the integrated FMS, and the actuators are grouped, grouped, and unitized. Furthermore, each cell, group, unit, and each actuator integrated by the network means is managed by a network address on the network and a network control process management body, and resources and addresses are reconfigured as necessary. They are done even when the network is up. Network management is controlled by LAN control (network protocol TPC / IP such as NFS) or MAP implemented in UNIX (registered trademark) or the like. The program of the local controller is also initially loaded and reloaded from other controllers in the upper, middle, lower, and parallel states.

  Each controller is disposed inside the structure of each actuator, and is preferably formed so as to prevent an unnecessary malfunction from occurring on the same plane or as one paragraph from the plane so that the projection does not come out. The structure is an actuator, structure, or structural member having a standardized or standardized T-slot. Each structural member is associated with a signal line, network wiring, and wireless connection associated with each controller, and is attached to holes, grooves, inside, and outside in each profile. Also, an air passage is provided for its use. Each actuator or structure has the function of sending and receiving signals, power, pneumatics, etc., in a fixed, relative movement connection when constrained to each other or only one of them. Each structure has its transmission path and its composite transmission path, and the optical transmission path may use water, oil, or air transmission paths instead of optical fibers.

  A linear or rotational guide means for restricting the correlation between the actuator and the structure is directly provided on the structural member of the actuator and the structure body.

  The signal system is performed by bus, optical communication, wireless communication, microwave, and ultrasonic communication. Electric power is collected by a trolley guide, a rotating brush, and a roller brush. The power and the signal are transmitted integrally by a microwave or the like transmitted by a photovoltaic cell or the like. The sensors, the controller, and the drive use power from a microwave or the like, or store and use a battery.

  For each actuator, one or more of these stations are provided with standardized module circuits and boxes.

  In addition, each actuator can have all control function elements, and a part of the control function elements can be appropriately selected and replaced. It can be performed before, during or after assembly.

  The controller has a power source (generator, chemical battery, fuel cell, biological battery, internal combustion engine, solar cell, indoor photovoltaic cell, microwave) for each control, and can also independently control and drive. . The controller has a switching valve for fluid pressure control (pilot type two-way valve, three-way valve, four-way valve, five-way valve). A FRL (Filter, decompression) in which a proportional control valve, a PWM pulse valve, a compressor such as a scroll compressor, and a vacuum pump are used individually or in a single scroll compressor to generate a vacuum by integrating a driver and a scroll compressor. Valve and, if necessary, a lubricator). Each controller that performs load response pressure automatic control (feed forward + feedback) or adaptive control by neuron controller by combining electric actuator and fluid system can be combined with electric actuator + air balancer, and each actuator And a means for viewing the contents of the host computer and the upper management level computer and changing data, a bitmap color LCD, and a micro keyboard.

  Next, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 shows a basic example in which various actuators are combined.

  1 includes an actuator 10 corresponding to the X axis, an actuator 12 corresponding to the Y axis, an actuator 14 corresponding to the Z axis, an actuator 16 corresponding to the θ axis, an actuator 18 for driving the chucks 38 and 40, 20.

  The actuator 10 corresponding to the X axis includes an electric actuator 22 including a ball screw, a servo mechanism, and a guide, and a control device 24 that controls the electric actuator 22. The actuator 12 corresponding to the Y axis includes a timing belt. And an electric actuator 26 comprising a stepping motor and a guide, and a control device 28 for controlling the electric actuator 26.

  The actuator 14 corresponding to the Z axis is composed of a pneumatic actuator 30 and a control device 32 for controlling the pneumatic actuator. The actuator 16 corresponding to the θ axis is composed of an electric rotary actuator 34 comprising a stepping motor and a harmonic drive, and an electric rotary actuator. And a control device 36 for controlling the actuator 34.

  Further, the actuators 18 and 20 for driving the chucks 38 and 40 include pneumatic actuators 42 and 44 and controllers 46 and 48 for controlling the pneumatic actuators 42 and 44, respectively.

  Next, the configuration of each actuator will be described with reference to the drawings.

  FIG. 2 is a diagram schematically illustrating the actuator 10 corresponding to the X axis.

  The electric actuator 22 of the actuator 10 includes a ball screw 52 for moving the moving body 50, a guide 54 for guiding the moving body 50, a motor 56 for driving the ball screw 52, and for controlling the motor 56. , And a control device 60 for controlling the actuator 10. Note that the actuator 10 is provided with a position sensor 62 for detecting the position of the moving body 50.

  FIG. 3A is an example showing the structure of the motor 56 of FIG. The motor 56 shown in FIG. 2 has a multi-stage structure, and the armature 51 constituting the stator has two stages. The rotor comprises a permanent magnet 53 fixed to a shaft 61 supported by a bearing 55. As shown in FIG. 3B, each of the armatures 51 and 51 has, for example, six magnetic poles 59, and the magnetic poles 59 of the armatures 51 and 51 have an angle difference of 30 degrees from each other. Then, by alternately exciting the armatures 51, 51 of the first and second stages, the rotation becomes smooth as in the case of rotating the 12-pole motor 56. In addition, compared to the motor 56 having 12 poles, the number of poles is small and the size can be reduced, and a large number of windings can be wound around the armature 51, so that a large torque can be obtained. Reference numeral 57 denotes an encoder.

  FIG. 4 is a diagram schematically illustrating the actuator 12 corresponding to the Y axis.

  The electric actuator 26 of the actuator 12 controls the timing belt 66 for moving the moving body 64, the guide 68 for guiding the moving body 64, a stepping motor 70 for driving the timing belt 66, and the actuator 12. And a control device 72.

  FIG. 5 is a diagram schematically illustrating the actuator 14 corresponding to the Z axis.

  The pneumatic actuator 30 of the actuator 14 includes a piston 74 for moving a moving body (not shown), a cylinder 76, a driving device 78 for driving the piston 74, and a control device 80 for controlling the actuator 14. Is done.

  FIG. 6 is a diagram schematically illustrating the actuator 16 corresponding to the θ axis.

  The actuator 16 includes an electric rotary actuator 34 including a stepping motor and a harmonic drive, and a control device 36 for controlling the electric rotary actuator 34.

  FIG. 7 is a view schematically showing the actuators 18 and 20 for driving the chucks 38 and 40. Each of the actuators 18 and 20 includes a pneumatic actuator 42 and 44 and a controller 46 and 48 for controlling the pneumatic actuators 42 and 44, respectively. When the suction pads 81 are used instead of the chucks 38 and 40, pneumatic actuators 42 and 44 are used as shown in FIG.

  Here, an example showing the relationship between the actuator 84 and the leg 86 is shown in FIG. In this example, the actuator 84 includes a motor 88, a moving body 90, a frame 92, and a control device 94. The moving body 90 is provided with a contact 96 for signal connection. The signal bus 98 for signal connection is exposed. The signal bus 98 and the bus 100 of the leg 86 are connected when they are connected. If necessary, the control device 94 is provided with a display 102 capable of displaying the contents of each actuator, a higher-level control device, and a higher-level management computer, inputting a signal for extracting data to be displayed on the display 102, and changing data. And input means for performing such operations. On the other hand, the leg 86 is provided with a network control device 104. The network controller 104 is provided with a display 106 in the same manner as the controller 94. Further, as shown in FIG. 10, the network control device 104 is provided with a front panel 108 in which all data of each member is stored and a card 110 having an ID for identification can be inserted.

  Next, the configuration of the control device will be described.

  FIG. 11 is a diagram illustrating a configuration of a control device of the actuator illustrated in FIG. 2. A driving driver 112 included in the servo mechanism 58 illustrated in FIG. 2 and supplied with power from a driver power supply 114 is connected to the control device 60. The control device 60 includes a CPU 118, a memory 120, a communication control device 122, an input / output control device 124, and an input unit 126 and an output unit 128 connected to the input / output control device 124. The input unit 126 is connected to the position sensor 62 shown in FIG.

  The servo mechanism 58 has a driver for driving the motor 56 and a driver controller for integrally controlling these. The driver performs inverter control by PWM and digital control.

  The control device 60 manages an actuator operation program, transmits a position command and a speed command to the servo mechanism 58, and monitors feedback signals from each element of the motor 56 and the servo mechanism 58.

  The communication interface of the controller 60 is, for example, a serial interface represented by RS232C, RS422, a dedicated interface for GP-IB, BCD, Centronics parallel LAN, a high-speed optical LAN such as 100 Mbps, a parallel interface represented by a gateway, or the like. LAN, external controller, PC, computer, etc., Ethernet (registered trademark), Token Ring, MAP, PC LAN, LON (Local Operating Network, for example, Japanese Patent Publication No. Hei 3-504066, Japanese Patent Publication No. Hei 3-505642) ), And communication between the control module and communication represented by WAN, OSI, and the like.

  Each element of these control devices may be integrally configured to achieve miniaturization, or may be separable for each function and shared with various types of actuators to achieve versatility and low cost. May be achieved. For example, the control function may be fully digitalized and semi-digitalized using an ASIC, a one-chip multi-CPU, a DSP, an AI controller using a neuron chip, or the like, to achieve both high functionality and low cost. Furthermore, by switching software or predetermined software as needed in advance or on the way, not only various induction motors, AC servo motors, DC servo motors, stepping motors, but also pneumatic actuators, counter balance by belt pulleys, Cylinder air balance by belt pulley, double speed air balancer and their combined control, feed forward control, speed S-curve control, observer control, force control, position / speed control, multi-axis control such as X, Y, Z, θ, etc. By making it possible to simultaneously or integrally control devices such as a conveyor and a lifter, it is possible to achieve both higher functions and lower costs. With the system configuration as described above, an intelligent and independent distributed system in CIM / FA can be achieved.

  In this case, if the controlled motor and the corresponding interface type are determined from impedance, circuit configuration, etc., identification memory using data carrier technology, barcode, ID tag, etc., and the software is automatically used, the network can be used. And labor saving and intelligent operation when constructing lines. In addition, a signal may be transmitted simultaneously using a power supply line for a motor or the like, and at the same time using distributed communication, spread spectrum communication, or the like having noise resistance, so that significant wiring saving may be performed. As a measure against noise of the actuator, vibration analysis (modal analysis) and measurement may be used together with CAE to identify the system, and active noise control may be performed.

  FIG. 12 is a diagram showing the configuration of the control device 32 of the actuator shown in FIG. 5. The solenoid valve electropneumatic converter 130 connected to the air source 132 included in the drive device 78 of FIG. The control device 80 is connected to the CPU 136 and the memory 138 connected by the bus 134, the communication control device 140, the input / output control device 142, and the input unit 144 and the output unit 146 connected to the input / output control device 142. Be composed. The input unit 144 is connected to the sensor 82 shown in FIG.

  In the actuator configured as described above, the control devices 158 and 162 of the actuators 156 and 160 are connected to the central control device 152 by the communication unit 154, as shown in FIG. In the example shown in FIG. 13, two groups 164 and 166 of the actuators 156 and 160 are connected to the central control device 152.

  The connection operation of the actuator shown in FIG. 13 will be described with reference to FIG.

  Here, the actuators 156a and 156b will be described.

  First, the actuator 156a is driven (S1). Next, the driving of the actuator 156a is completed (S2). When the driving of the actuator 156a is completed, the operation of the actuator 156a is confirmed by the control device of the actuator 156b (S3). If the operation of the actuator 156a is normal, the actuator 156b is driven (S4). When the operation of the actuator 156b is completed (S5), the operation is confirmed by the control device of the actuator 156a (S6). Here, if an abnormality of the actuator 156a is detected (S7), a warning is issued (S8), and an abnormality signal is analyzed by the control device of the actuator 156b (S9). Then, the actuator 156b is returned to the origin (S10), and the actuator 156a is also returned to the origin (S11). Here, self-diagnosis is performed (S12, S14), and the results are recorded (S16, S18) and displayed (S17, S19). On the other hand, the control device of the actuator 156a checks the self-diagnosis result of the actuator 156b, and if it is OK, starts the actuator 156a (S15).

  Next, a structure formed by combining a columnar member, an actuator, and the like will be described.

  The actuator structure 210 illustrated in FIG. 15 is basically composed of a first section 212 and a second section 214 attached to the first section 212 in accordance with a work process, and a belt conveyor 216 is attached to the first section 212. ing.

  The first section 212 is provided with a motor box 220 disposed at one end of the actuator 218 flush with the upper surface of the actuator 218 and a control device 222 having a display unit. By forming the motor box 220 and the control device 222 flush with the upper surface of the actuator 218 on which they are disposed, the motor box 220 and the control device 222 have compatibility when attached to other members, and have a compact shape to save space. Effective utilization can be achieved. Therefore, the other motor boxes 224 and 226 shown in the drawing can be formed flush with the upper surface of the actuator provided.

  On the other hand, in the second section 214, a balancer 232 provided side by side with the actuators 228, 230 is respectively erected, and the moving bodies 234, 236 of the provided actuators 228, 230 and the balancer 232 are provided with the actuator 238. Both ends are respectively connected. The actuator 238 is connected to the provided actuators 228 and 230 and the balancer 232 substantially orthogonally and while maintaining a substantially horizontal state. An actuator 242 is connected to the moving body 240 of the actuator 238, and a cylinder 248 having a mechanical hand 246 connected to the tip of the rod is connected to the moving body 244 of the actuator 242. Actuators 250 and 252 are continuously connected to a portion where the first section 212 and the second section 214 are connected and the longitudinal direction thereof, and cylinder rods for positioning are respectively provided on moving bodies 254 and 256 of the actuators 250 and 252. Are connected to each other.

  A belt conveyor 216 is provided so as to be connected to the first section 212, and programming keyboards 262 and 264 having a function as an input / output device of the control system are provided at the connected portion. The programming keyboards 262, 264 are detachably attached to the columnar member 266, and various devices incorporated in the actuator structure 210, specifically, various actuators 268, 238, 242, 228, 230, 250. , 252, balancer 232, cylinders 258, 248, 260, mechanical hand 246, belt conveyor 216, etc., can be managed collectively by a control system. Note that various control devices and a processor that constitute the control system, and a transmission circuit of various signals including, for example, an optical signal, an electric signal, a fluid pressure signal, and the like are housed inside the actuator and the columnar member 266, respectively.

  Next, a case where the actuator structure 210 has a plurality of steps as a whole and functions as an independent production line will be described.

  As shown in FIG. 16, a parts pallet 274 having an ID module (not shown) is transported from a warehouse 270 via an unmanned vehicle 272 and a belt conveyor 216. The component pallet 274 is carried into the first section 212 of the actuator structure 210 and subjected to a predetermined process. The work 276 is also provided with an ID module. After that, the component pallet 274 is carried into the second section 214 via a conveyance unit (not shown). In the second section 214, after a predetermined process is performed, a predetermined production line is conveyed to another process after completing all processes.

  On the other hand, a case where each section of the actuator structure 210 functions as an independent production line will be described.

  16, an actuator 218 is controlled by a first actuator control device 298, an actuator 268, a cylinder 278, and a suction pad 280 are controlled by a second actuator control device 300, and an actuator 282 and a balancer 232 are controlled by a first balancer control device 304. Each is controlled. Further, the first actuator control device 298, the second actuator control device 300, and the first balancer control device 304 are each connected to the first multi-axis control device 306 via the multi-bus 284, and are connected to one work unit. Is controlled as a whole. The actuator 250 and the cylinder 258 are controlled by the third actuator control device 302, are connected to the second multi-axis control device 308 via the multibus 284, and are integrally controlled as one work unit.

  As described above, the integrated control of the first section 212 in the actuator structure 210 is performed by the first multi-axis control device 306 and the second multi-axis control device 308 by the LAN using the electric signal, the optical signal, the wireless communication, or the like. Via a first management microprocessor 324 connected to

  In the second section 214 of the actuator structure 210, similarly to the above, the actuator 238 is controlled by the fourth actuator control device 310, and the actuator 242, the cylinder 248, and the mechanical hand 246 are controlled by the fifth actuator control device 312. The cylinder 260 is controlled by a sixth actuator controller 314, the actuator 228 and the balancer 232 are controlled by a second balancer controller 316, and the actuator 230 and the balancer 232 are controlled by a third balancer controller 318.

  The second balancer controller 316 and the third balancer controller 318 are respectively connected to the local controller 286 to move the actuator 238 in a substantially vertical direction while holding the actuator 238 in a horizontal state, and perform integrated synchronous control. The fourth and fifth actuator control devices 310 and 312 and the local control device 286 are respectively connected to the third multi-axis control device 328 via the multibus 296, and are integrally controlled as one work unit. Accordingly, the integrated control in the second section 214 is also performed by the second multi-axis control device 328 and the second multi-axis control device 322 connected to the third multi-axis control device 328 and the fourth multi-axis control device 322 by a LAN using an electric signal, an optical signal, wireless communication, or the like. This is performed by the management microprocessor 326. Note that these first to sixth actuator control devices 298, 300, 302, 310, 312, and 314 can also function as balancer control devices, while the first to third balancer control devices 304, 316, and 318 can also function as actuator control devices.

  Next, the belt conveyor 216 is controlled by the belt conveyor control device 288, and the unmanned vehicle 272 and the warehouse 270 are each controlled by a control device and a control system (not shown).

  The first management microprocessor 324 and the second management microprocessor 326, the belt conveyor control device 288 and the unmanned vehicle 272, and the respective control devices (not shown) of the warehouse 270 are provided with electric signals, optical signals, wireless signals, respectively. Networked by a LAN using signals and the like, information can be freely transmitted to each other, and therefore, an integrated control system of the actuator structure 210 as an independent production line can be configured. .

  This LAN network is connected not only to the control system of the actuator structure 210 as an equivalent production line, but also to other production, management, information, communication, and control systems, thereby providing a larger integrated production management system. The system is built. For example, a production management computer 290 serving as a higher-level management computer such as that found in FAs and CIMs may be connected to a LAN network, and may be part of a network for a larger-scale integrated production system. In this case, in accordance with the process managed by the CIM and the ordering system, ordering, process management, assembling, processing, and transfer procedures, and the associated control objects such as actuators, sensors, pallets, robots, and control devices are operated in accordance with the above-described processes. As described above, the program procedure or program editing is performed in real time as appropriate.

  As the user interface of these systems, input / output devices 292 and 294 such as programming keyboards 262 and 264 as shown in FIG. 15 are prepared. These input / output devices 292 and 294 can be freely connected to general-purpose interfaces such as RS232C and RS422C, LANs and multibuses using electrical signals, optical coaxial communication, wireless signals, etc., Ethernet (registered trademark), and token links. , A computer or the like. In addition, an input / output device or a general-purpose interface that can be connected to a higher-level CIM computer, control device, processor, etc. is provided. In this case, the entire work of editing, creating, changing, downloading, uploading, inputting and outputting the control program, etc. Can be performed not only by the upper CIM computer but also by each control device, processor, computer and the like. Further, it is possible to access any control device, processor, and computer. In this case, communication may be performed via a multi-bus (the multi-bus may be replaced with other transmission means) or a LAN, but all control devices, processors, and computers are directly connected to each other by a network. May be. Alternatively, the connection may be directly made by software using a virtual network. This makes it possible to perform overall control at the work site, monitor and operate management information, and not only to improve workability, but also to perform independent individual control that preserves the integrity of the entire system in each work and process management. This increases the flexibility of the whole system, and is very effective for system change, maintenance, and multi-product small-quantity production.

It is a basic figure which combined various actuators. FIG. 3 is a diagram schematically illustrating an actuator corresponding to an X axis. FIG. 3 is a diagram illustrating a structure of the motor of FIG. 2. FIG. 3 is a diagram schematically illustrating an actuator corresponding to a Y axis. FIG. 3 is a diagram schematically illustrating an actuator corresponding to a Z axis. FIG. 3 is a diagram schematically illustrating an actuator corresponding to the θ axis. FIG. 3 is a diagram schematically illustrating an actuator that drives a chuck. It is a figure which shows the outline of the actuator which drives a suction pad. It is a figure showing the relation between an actuator and a leg. It is a figure showing the front panel of a control device. FIG. 3 is a diagram illustrating a configuration of a control device of FIG. 2. FIG. 6 is a diagram illustrating a configuration of a control device in FIG. 5. It is a figure showing connection by a communication means of a plurality of actuators. It is a figure for explaining operation of an actuator. It is a figure showing an actuator structure. FIG. 16 is a diagram illustrating functions of the actuator structure of FIG. 15.

Explanation of reference numerals

10, 12, 14, 16, 18, 20 ... Actuators 24, 28, 32, 36, 46, 48 ... Control devices 62, 82 ... Position sensors 98 ... Signal buses 100, 116 ... Bus 102 ... Display 104 ... Network control devices 110 card 118 CPU 122 communication controller 124 input / output controller

Claims (2)

In an actuator control device that operates a plurality of actuators in cooperation,
A control unit that is connected to each of the actuators and controls operation of the actuator;
A communication control unit connected to each of the control units and performing transmission and reception of information between the respective actuators and a higher-order main control device via a network by the same interface
An actuator control device comprising: The device of claim 1,
An actuator control device, comprising: identification information holding means for holding identification information for identifying each of the actuators connected to the control unit.

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