JPH06222816A - Method and device for controlling actuator - Google Patents

Abstract

PURPOSE:To decrease the number of wirings and pipelines led from a programmable controller and a driving device and also to decrease the number of signals sent from a sensor by adding a controller to each actuator and decentralizing the control of these actuators in order to attain the local jobs. CONSTITUTION:The actuators 10, 12, 14, 16, 18 and 20 are provided with the controllers 24, 28, 32, 36, 46 and 48, respectively. These controllers are connected to each other with a data transmission line and receive the control instructions for those actuators. Then, the controllers control the actuators respectively according to each control instruction and send back the control results. In such a constitution, the signals can be locally processed. Furthermore, it is possible to know the value of load according to the information received from other controllers and to decentralize the control jobs depending on the value of load.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator for assembling and conveying a work, and more particularly to a method and apparatus for controlling the actuator by a fluid pressure or electric power source.

[0002]

2. Description of the Related Art Actuators used for assembling and transporting parts in each factory line are mechanically combined with each other to assemble and transport one work. Then, typically, a programmable signal (PC) or the like, which is the center of control, and a control signal, and electricity amplified and controlled by the signal,
It is controlled by an air driver or the like, and further returns operation signals scattered in the line to the PC to perform a series of operations.

[0003]

However, when assembling and transporting a work by coordinating the actuators, several to several tens of linearly and rotationally moving actuators are required, and these actuators are centrally arranged around the work. To be done. In addition, sensors for monitoring the operation of the actuator are scattered around the actuator and the work.

For example, the process of carrying an IC chip is several meters
In some cases, m to several tens of mm, while the actuators that perform them are concentrated in a very narrow space. However, in each actuator, drive electric wiring, drive fluid piping, and wiring from each sensor are randomly arranged up to the PC.
On the other hand, if the wires are bundled together, they become very large, which hinders the operation of the actuator.

Furthermore, when the actuator is mechanically connected and branched, the wiring and piping reaching the other PC becomes enormous.

When a large number of actuator groups related to one work process are connected like a belt conveyor line, the PC, which is the center of control, monitors and controls all of them, increasing the load on the CPU and signal transmission system. There is.

As described above, when the centralized management of the actuators is performed, the piping and wiring are increased due to the centralized actuators, and the load on the PC for the centralized management control becomes excessively large. Further, it causes a limitation due to the limit of communication capability and an increase in the cost of the device.

Furthermore, if the actuators are individually controlled, the operation of a certain part is lost unless the actuators are linked to each other, which causes the system as a whole to stop. Moreover, if an abnormality occurs in the centralized control device, the entire system goes down.

Therefore, the present invention provides a method and apparatus for controlling an actuator, which reduces wiring, pipes, signals from a sensor, etc. from a PC or a drive unit by decentralizing the control unit so that work can be performed locally. The purpose is to provide.

[0010]

In order to achieve the above-mentioned object, the present invention decentralizes the controller of the actuator, and the controller of the actuator which correlates to an appropriate work unit receives information of the correlated actuator, Send control instruction commands and a series of programs or procedures to check the sensors of other actuators or program, proc
By confirming the proper operation of the edure and receiving its end, the signal processing is performed more locally.

Further, preferably, the control device of each actuator relocates the control management work to the control device having a small load in the group in real time, the overall management, the sensor management, the abnormality detection, Reallocate processes such as warning to each control device to perform work.

In addition, even for one work, its CPU
Appropriately distributes Program level tasks to multiple control units and relocates them in real time to speed up processing.

At this time, the basic structure of the program is Ob
ject-Oriented System, based on Model-Driven Approach, it is described by Task, Procedure, Function,
Configure the Program and Module to correspond to the system description of complicated semiconductor manufacturing equipment.

[0014]

Since the control device can be distributed and work can be performed locally, the wiring from the PC or driver, the piping, the signal line from the sensor, and the control signal line can be significantly reduced, and a spatial margin can be provided. Reduces damage caused by movement of wiring, piping, etc., and improves reliability.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

[0016] Generally, CIM users use CIM (Computer Integeg) in order to efficiently produce their products.
We are conducting research and development on operating methods of rated manufacturing) and FA (Factory Automation). Our research and development work mainly includes support cooperation (development) for CIM users to incorporate their parts into the system for CIM and FA manufactured by us, such as actuators. Becomes

As a means for this support cooperation, a real actuator can be easily configured for CIM and FA, proper performance, suitable manufacturing method, supply method, means, compatibility,
It has maintainability.

And, not only these actuators themselves have the support and cooperation means, but also our company, other users,
Ordering, manufacturing with collaborators and within other companies,
It is necessary to be suitable for a system (for example, an inter-company accounting system, a network, an inter-company logistics system, an inter-company design collaboration work network computer system) that is handled so that management, planning, and combination can be performed easily. Technical equipment (computer network, EWS network management system, assembly module management processor, their network management software, OS), intelligent network (WAN, LAN, LON) for assembly, processing, warehouse, and logistics system,
And not only those man-machine interfaces, but also different factories, different departments, different companies, different regions, different systems between countries, management CIM, FA system not only assuming software, programs and characters,
It has means for matching interfaces such as its management method, data structure, data format, file structure, file format, database management method, ordering system and the like. This means (electrical, protocol, data structure) manages and coordinates all the search structures, and in some cases both perform appropriate repairs.

For these purposes: A. All of the actuators, structures, and their components (motors, ball screws, timing belts, bearing boxes, bevel gear boxes, sensors, pulleys, etc.) are shaped, mounted, hole locations, widths. By adopting a standardized and compatible block structure or module structure, etc., each can be used independently and can be assembled.

The mounting is also unified by making the basic dimensions common. B. Each member's manufacturing method, manufacturing process, inspection result and its designing method, handling method, other members connected to it, and the overall structure (hierarchical structure) are converted into data, and all the data on how the member is used are coded. , GA (double helix structure, triple helix structure, etc.) with artificial displacement and intersection called natural life, artificial selection of circuit means such as semiconductor circuit and biomolecular circuit means, and natural selection Genetic Algorithm preferably implemented by
Are stored in the form of a code (DNA) based on a magnetic recording medium or molecular structure (such as arrangement of nuclei). And so that each member has data of a combination thereof, for example, a bar code, a metal code (a magnetic or non-magnetic pattern), or a pattern obtained by direct laser trimming or a lithographic method on the surface of a metal (these are electrical patterns). , Which has an electronic circuit, a memory, a CPU, a programmable system, is processed into a concave portion of a metal surface, and the surface is coated so as to be flush with the metal surface. Attach it to the inside or the surface of the member with a capsule or tape.

Of course, the data of each member can be stored as management data on another computer by a management code and can be retrieved by the code. However,
With such a configuration, it can be used only when there is a management computer and a system therefor, and cannot be used in an emergency on site.

Therefore, take these code readers to the site, or arrange them at the site if necessary,
Functions such as members and actuators that are built into the robot or actuator or that are arranged by a predetermined mounting means and that have a self-regenerating means for executing the history, processing, and reconfiguration of the member on the spot are required. is there.

To this end, the actuator control device is allowed to have flexibility, replacement, and rearrangement for the types of motors and solenoid valves, and actuator identification.
Provision of means for (identification) by itself and the surroundings (barcode, memory card, RAM, EPROM, arithmetic unit, wireless ID module by microwave, etc.). In addition, the history and experience received by the actuator are automatically recorded.

Each actuator then has its own controller, integrated by means of network communication, which comprises several mechanically integrated actuator groups, several interrelated tasks, associated actuator groups, Or they are integrated and FM
Each actuator is loaded on S, production process and changes,
It is assumed that actuator groups and their cells, groups, and units are rearranged and reconfigured according to optimization. Further, each cell, group, unit, and each actuator integrated by the network means are managed by the network address on the network and the network control process manager, and resources, addresses, etc. are reconfigured as necessary. They are done even when the network is up. Network management is controlled by LAN control (network protocol TPC / IP such as NFS) implemented in UNIX or the like, MAP or the like. Local controller programs are also high, middle,
Initially loaded and reloaded as appropriate from other controllers in the lower level and parallel.

Each controller is disposed inside the structure of each actuator, and is preferably formed so as not to project a protrusion outside so as to be flush or a paragraph from the plane to prevent unnecessary malfunction. The structure conformed to the standard, or
These are standardized actuators, structures, and structural members with T-slots. Each structural member is connected to a signal line associated with each controller, network wiring and wireless coupling, and is attached to a hole, groove, inside, and outside in each profile. In addition, the air passage is used for its use. Each actuator or structure has the function of sending and receiving signals, power supplies, air pressure, etc. in a fixed, relative motion connection when constrained to each other or only one of them. Further, each structure has its transmission line and its composite transmission line, and the optical transmission line may use water, oil, or air transmission line instead of the optical fiber.

The linear and rotational guide means for restricting the correlation between the actuator and the structure are directly formed on the structural member and the structure body of the actuator.

The signal system is performed by bus, optical communication, wireless communication, microwave, ultrasonic communication. Electric power is collected by a trolley guide, a rotating brush, and a roller brush. Power and signals are transmitted as a unit by a microwave or the like transmitted by a photocell or the like. The sensor, controller, and drive use the power from the microwave or the like or have a battery for storage.

For each actuator, one or more of these stations are provided with a standardized module circuit or box.

Further, each actuator can have all control function elements, and a part of the control function elements can be appropriately selected and replaced. It can be done before, during or after assembly.

The controller is a power source for each control (generator, chemical cell, fuel cell, bio-cell, internal combustion engine,
Solar cell, indoor photovoltaic cell, microwave),
It is also possible to drive the control independently. Also,
The controller has a switching valve for fluid pressure control (pilot type 2-way valve, 3-way valve, 4-way valve, 5-way valve), output,
Rotation speed with input pressure feedback, Torque control unit integrated with inverter control driver and scroll compressor etc. Proportional control valve, compressor such as PMW pulse valve and scroll compressor, vacuum pump for intake of individual or one scroll compressor It has a FRL (Filter, a pressure reducing valve, and a lubricator as necessary) in which the one used for vacuum generation is arranged. Each controller that combines an electric actuator and a fluid system to perform load response pressure automatic control (feedforward + feedback) or adaptive control by a neuron controller can be combined with an electric actuator + air balancer, and each actuator It also has a means for viewing the contents of a higher-level control device or a higher-level management computer or changing data, has a bitmap color LCD, and has a micro keyboard.

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 shows a basic example in which various actuators are combined.

The combination of actuators in FIG.
The actuator 10 corresponding to the axis, the actuator 12 corresponding to the Y axis, the actuator 14 corresponding to the Z axis, the actuator 16 corresponding to the θ axis, and the chucks 38, 4.
It is composed of actuators 18 and 20 that drive 0.

Then, the actuator 1 corresponding to the X axis
Reference numeral 0 is composed of an electric actuator 22 including a ball screw, a servo mechanism, and a guide, and a control device 24 for controlling the electric actuator 22. The actuator 12 corresponding to the Y axis is an electric actuator including a timing belt, a stepping motor, and a guide. The actuator 26 and a control device 28 that controls the electric actuator 26 are included.

Also, the actuator 14 corresponding to the Z axis
Is composed of a pneumatic actuator 30 and a control device 32 for controlling the pneumatic actuator. The actuator 16 corresponding to the θ axis is an electric rotary actuator 34 including a stepping motor and a harmonic drive.
And a control device 36 for controlling the electric rotary actuator 34.

Further, the actuators 18 and 20 for driving the chucks 38 and 40 are composed of pneumatic actuators 42 and 44 and control devices 46 and 48 for controlling the pneumatic actuators 42 and 44, respectively.

Next, the structure of each actuator will be described with reference to the drawings.

FIG. 2 shows an actuator 1 corresponding to the X axis.
It is a figure which shows the outline of 0.

The electric actuator 22 of the actuator 10 has a ball screw 52 for moving the moving body 50.
A guide 54 for guiding the moving body 50, a motor 56 for driving the ball screw 52, a servo mechanism 58 for controlling the motor 56, and the actuator 10.
And a control device 60 for controlling the. The actuator 10 is provided with a position sensor 62 for detecting the position of the moving body 50.

FIG. 3A is an example showing the structure of the motor 56 of FIG. The motor 56 shown in FIG. 2 has a multi-stage structure, and the armature 51 constituting the stator has two stages. The rotor is composed of a permanent magnet 53 fixed to a shaft 61 supported by a bearing 55. Armature 51, 5
As shown in FIG. 3B, each of the magnetic poles 1 has, for example, six magnetic poles 59, and the magnetic poles 59 of the armatures 51 and 51 are three poles each other.
An angle difference of 0 degree is provided. Then, by alternately exciting the first-stage and second-stage armatures 51, 51, the rotation becomes smooth similarly to the case where the 12-pole motor 56 is rotated. Further, as compared with the 12-pole motor 56, the number of poles is small, the size can be reduced, and a large number of windings can be wound around the armature 51, so that a large torque can be obtained. Reference numeral 57 is an encoder.

FIG. 4 shows an actuator 1 corresponding to the Y axis.
It is a figure which shows the outline of 2.

The electric actuator 26 of the actuator 12 includes a timing belt 66 for moving the moving body 64, a guide 68 for guiding the moving body 64, a stepping motor 70 for driving the timing belt 66, and the actuator 12 And a control device 72 for controlling the.

FIG. 5 shows an actuator 1 corresponding to the Z axis.
It is a figure which shows the outline of 4.

The pneumatic actuator 30 of the actuator 14 includes a piston 74 for moving a moving body (not shown), a cylinder 76, a drive device 78 for driving the piston 74, and a control device 80 for controlling the actuator 14. Composed of and.

FIG. 6 shows an actuator 1 corresponding to the θ axis.
It is a figure which shows the outline of 6.

The actuator 16 is composed of an electric rotary actuator 34 including a stepping motor and a harmonic drive, and a control device 36 for controlling the electric rotary actuator 34.

FIG. 7 is a diagram showing the outline of the actuators 18 and 20 for driving the chucks 38 and 40. The actuators 18 and 20 are respectively pneumatic actuators 4.
2, 44 and control devices 46, 48 for controlling the pneumatic actuators 42, 44. When using the suction pad 81 instead of the chucks 38 and 40, as shown in FIG.
4 is used.

Here, an example showing the relationship between the actuator 84 and the leg portion 86 is shown in FIG. In this example, the actuator 84 includes a motor 88, a moving body 90, a frame 92, and a control device 94. The moving body 90 is provided with a contact 96 for signal connection, and an end portion of the frame 92 is The signal bus 98 for signal connection is exposed. And, the signal bus 98 and the bus 100 of the leg 86 are connected when they are coupled. The control device 94 is provided with a display 102 capable of displaying the contents of each actuator, a host control device, and a host computer, inputting a signal for extracting data to be displayed on the display 102, and changing the data, as necessary. An input means is provided. On the other hand, the leg portion 86 is provided with the network control device 104. The network control device 104 is also provided with the display 106 similarly to the control device 94. Further, as shown in FIG. 10, the network control device 104 is provided with a front panel 108 for storing all data of each member and inserting a card 110 having an ID for identification.

Next, the structure of the control device will be described.

FIG. 11 is a diagram showing the configuration of the control device for the actuator shown in FIG. 2. The drive driver 112, which is included in the servo mechanism 58 in FIG. The controller 60, which is connected to the bus 116, includes a CPU 118, a memory 120, a communication controller 122, an input / output controller 124, and an input unit 126 and an output unit 128 connected to the input / output controller 124. . The position sensor 62 shown in FIG. 2 is connected to the input unit 126.

The servo mechanism 58 has a driver for driving the motor 56 and a driver controller for integrally controlling these. The driver controls the inverter by PWM and digital control.

The controller 60 manages the actuator operation program, transmits the position command and the speed command to the servo mechanism 58, and further, the motor 56 and the servo mechanism 58.
The feedback signal from each element of is monitored.

The communication interface of the control device 60 is, for example, a serial interface represented by RS232C or RS422, GP-IB, BCD,
Centronics parallel LAN dedicated interface, 1
A high-speed optical LAN such as 00 Mbps, a LAN via a parallel interface represented by a gateway, etc.
Or external controller, PC, computer, Ethernet, token ring, MAP, PC LAN,
LON (Local Operating Network, for example, refer to Japanese Patent Publication No. 3-504066 and Japanese Patent Publication No. 3-505642), WAN, OSI, and other communication, and mutual communication with the control module.

The respective elements of these control devices may be integrally configured to realize miniaturization, or they can be separated for each function and can be shared with many types of actuators for general use. Therefore, cost reduction may be achieved. For example, the control module may be fully digitalized or semi-digitalized by using an ASIC, a one-chip multi-CPU, a DSP, an AI controller with a neuron chip, or the like to achieve both high functionality and low cost. Furthermore, by switching software or predetermined software as needed in advance or in the middle, not only various induction motors, AC servo motors, DC servo motors, stepping motors, but also pneumatic actuators, counter balances by belt pulleys, Cylinder air balance by belt pulley, double speed air balancer and their combined control, feed forward control, speed S-curve control, observer control, end effect, force control, position / speed control, X,
By enabling multi-axis control of Y, Z, θ, etc., and device control of conveyors, lifters, etc. simultaneously or integrally, it is possible to achieve both higher functionality and lower cost. With the above system configuration, an intelligent and self-sustained distributed system in CIM / FA can be achieved.

In this case, the controlled motor and the corresponding interface type are judged automatically from the impedance, the circuit configuration, etc., the identification memory using the data carrier technology, the bar code, the ID tag, etc. In this way, it is possible to achieve significant labor savings and intelligentization when building networks and lines. In addition, signals may be simultaneously transmitted by using a power supply line for a motor or the like, and by utilizing distributed communication having nozzle resistance, spectrum document communication, or the like, and wiring may be significantly saved. As a noise countermeasure for the actuator, vibration analysis (modal analysis) and measurement may be used together with CAE to identify the system and perform active noise control.

FIG. 12 is a diagram showing the configuration of the actuator control device 32 shown in FIG. 5. The electromagnetic valve electropneumatic converter 130 connected to the air source 132 included in the drive device 78 shown in FIG. Is connected to the control device 80, and the control device 8
0 is the CPU 136 and the memory 1 connected by the bus 134.
38, a communication control device 140, an input / output control device 142, and an input unit 144 and an output unit 146 connected to the input / output control device 142. The sensor 82 shown in FIG. 5 is connected to the input section 144.

As shown in FIG. 13, the actuators constructed as described above are arranged in the central control unit 152 by the communication means 154 so that the actuators 156 and 160 are provided.
The control devices 158 and 162 are connected. In the example shown in FIG. 13, two groups 164 and 166 of the actuators 156 and 160 are connected to the central controller 152.

The operation of connecting the actuator shown in FIG. 13 will be described with reference to FIG.

Here, the actuators 156a and 156 are
b will be described.

First, the actuator 156a is driven (S1). Then, the driving of the actuator 156a is completed (S2). When the driving of the actuator 156a is completed, the operation of the actuator 156a is confirmed by the control device of the actuator 156b (S3). If the operation of the actuator 156a is normal, the actuator 156b is driven (S4). Actuator 156b
When the operation of is completed (S5), the actuator 156a
The controller confirms the operation (S6). If an abnormality of the actuator 156a is detected here (S
7), an alarm is issued (S8), and the controller of the actuator 156b analyzes the abnormal signal (S9). Then, the actuator 156b is returned to the origin (S10), and at the same time, the actuator 156a is also returned to the origin (S1).
1). Here, self-diagnosis is performed respectively (S12, S14),
The result is recorded (S16, S18) and displayed (S1).
7, S19). On the other hand, in the control device of the actuator 156a, the self-diagnosis result of the actuator 156b is confirmed,
If it is OK, the actuator 156a is started (S15).

Next, a structure formed by combining columnar members and actuators will be described.

The structure 210 of the actuator illustrated in FIG. 15 has a first section 212 depending on the working process.
And a second section 214 attached to it, and a belt conveyor 216 is attached to the first section 212.

The first section 212 is provided with a control unit 222 having a motor box 220 and a display unit which are arranged flush with the upper surface of the actuator 218 at one end of the actuator 218. By forming the motor box 220 and the control device 222 so as to be flush with the upper surface of the actuator 218 in which they are arranged, the motor box 220 and the control device 222 have compatibility when attached to other members, and
Since the shape is compact, the space can be effectively used. Therefore, it is possible to form the other motor boxes 224, 226, etc. shown in the drawing so as to be flush with the upper surface of the provided actuator.

On the other hand, in the second section 214, the balancers 232 provided side by side with the actuators 228 and 230 are erected so as to face each other, and the movable bodies 234 of the attached actuators 228 and 230 and the balancer 232,
Both ends of the actuator 238 are connected to the 236, respectively. The actuator 238 is substantially orthogonal to the actuators 228 and 230 and the balancer 232 that are provided side by side, and is connected while maintaining a substantially horizontal state. The actuator 242 is connected to the moving body 240 of the actuator 238, and the moving body 244 of the actuator 242 has a mechanical hand 2 at the tip of the rod.
A cylinder 248 to which 46 is connected is connected. The actuators 250 and 252 are arranged in series so as to be oriented in the portion where the first section 212 and the second section 214 are connected and in the longitudinal direction thereof.
Cylinders 258 and 260 each having a cylinder rod for positioning are connected to the moving bodies 254 and 256 of 52, respectively. By the way, a belt conveyor 216 is provided so as to be connected to the first section 212, and programming keyboards 262 and 264 having a function as an input / output device of the control system are provided at the connected parts. The programming keyboards 262 and 264 are
Various devices that are detachably attached to the columnar member 266 and are incorporated in the actuator structure 210, specifically, various actuators 268, 238, 242, and 2.
28, 230, 250, 252, balancer 232, cylinders 258, 248, 260, mechanical hand 24
6, the belt conveyor 216, and the like can be comprehensively managed by the control system. It should be noted that various control devices constituting the control system, the processor, and transmission circuits for various signals including, for example, optical signals, electric signals, fluid pressure signals, etc. are housed inside the actuator and the columnar member 266, respectively.

Next, the case where the actuator structure 210 has a plurality of steps as a whole and functions as an independent production line will be described.

As shown in FIG. 16, a parts pallet 274 having an ID module (not shown) is conveyed from a warehouse 270 via an unmanned vehicle 272 and a belt conveyor 216. The parts pallet 274 is carried into the first section 212 of the actuator structure 210 and subjected to a predetermined process. Note that the work 276 is similarly provided with an ID module. afterwards,
The second component pallet 274 is moved to the second position via a transport means (not shown).
Load into section 214. In the second section 214, after a predetermined process is performed, all the predetermined production lines are completed and the product is conveyed to another process.

On the other hand, the case where each section of the actuator structure 210 functions as an independent production line will be described.

In FIG. 16, the actuator 218 is the actuator 268, the cylinder 278, and the suction pad 28 by the first actuator control device 298.
0 is controlled by the second actuator control device 300, the actuator 282 and the balancer 232, and the first balancer control device 304, respectively. further,
First actuator control device 298, second actuator control device 300, and first balancer control device 3
04 are respectively connected to the first multi-axis control device 306 via the multi-bus 284, and are integrally controlled as one work unit. Further, the actuator 250 and the cylinder 258 correspond to the third actuator control device 302.
And is connected to the second multi-axis control unit 308 via the multi-bus 284 and is integrally controlled as one work unit.

Thus, the actuator structure 210
In the integrated control of the first section 212, the first management connected to the first multi-axis control device 306 and the second multi-axis control device 308 by the LAN using electric signals, optical signals, wireless communication, etc. Via the microprocessor 324.

Second in actuator structure 210
In section 214, as before, actuator 238 by fourth actuator controller 310, actuator 242, cylinder 248 and mechanical hand 246 by fifth actuator controller 312, actuator 252 and cylinder 2;
Reference numeral 60 is controlled by the sixth actuator control device 314, actuator 228 and balancer 232 are controlled by the second balancer control device 316, and actuator 230 and balancer 232 are controlled by the third balancer control device 318, respectively. Further, the second balancer control device 316 and the third balancer control device 318 are respectively connected to the local control device 286 to move the actuator 238 in a substantially vertical direction while holding the actuator 238 in a horizontal state, and integrated synchronous control is performed. . The fourth and fifth actuator control devices 310, 312 and the local control device 286 are respectively connected to the third multi-axis control device 328 via the multi-bus 296 and are integrally controlled as one work unit. Therefore, the second section 21
Also in the integrated control in No. 4, the second management microprocessor 326 connected to the third multi-axis control device 328 and the fourth multi-axis control device 322 by a LAN using electric signals, optical signals, wireless communication, etc. Done by. The first to sixth actuator control devices 298,
Each of 300, 302, 310, 312, 314 can also function as a balancer control device, while the first to third balancer control devices 304, 316,
318 can also function as an actuator controller.

Next, the belt conveyor 216 is controlled by the belt conveyor control device 288 to drive the unmanned vehicle 272.
The warehouse 270 and the warehouse 270 are controlled by a controller and a control system (not shown), respectively.

The first management microprocessor 324 and the second management microprocessor 326, the belt conveyor controller 288, the unmanned vehicle 272, and the warehouse 27.
Each control device (not shown) of 0 is networked by a LAN using electric signals, optical signals, wireless signals, etc., and information can be freely transmitted to each other, and therefore, independent control devices are provided. An integrated control system of the actuator structure 210 as a production line can be configured.

This LAN network is not limited to the control system of the actuator structure 210 as an equivalent production line, but is connected to other production, management, information, communication and control systems, so that a larger scale is achieved. An integrated production control system is built. For example, F on a LAN network
A production management computer 290 that functions as a higher-level management computer as seen in A and CIM may be connected to form a part of a network of a larger-scale integrated production system. In this case, according to the process managed by the CIM and the ordering system, ordering, process management, assembly, processing, and transportation procedures and associated control objects such as actuators, sensors, pallets, robots, and control devices are operated according to the above-described processes. The program procedure or program editing is performed in real time as described above.

As user interfaces of these systems, input / output devices 292 and 294 such as programming keyboards 262 and 264 as shown in FIG. 15 are prepared. These input / output devices 292, 294 are R
A general-purpose interface such as S232C, RS422C, etc., and electric signals, optical coaxial communication, LAN and multi-bus by wireless signals, etc., Ethernet, token link can be freely connected to each control device, processor, computer, etc. In addition, an input / output device or a general-purpose interface that can be connected to a higher-level CIM computer, control device, processor, etc. is prepared. In this case, the whole work of editing, creating, changing, downloading, uploading, input / output of the control program, etc. Can be performed not only by the upper CIM computer, but also by each control device, processor, computer, or the like. Further, it is possible to access any control device, processor and computer. In this case, communication may be performed via a multi-bus (the multi-bus may be replaced with other transmission means) or a LAN, but all control devices, processors and computers are directly connected to each other via a network. You may. Alternatively, the software may be directly connected by a virtual network. As a result, it is possible to control the entire work site, monitor management information, and operate the work site, and not only improve workability, but also enable independent individual control while preserving the integrity of the entire system in each work and process management. This increases the flexibility of the entire system and is very effective for system changes, maintenance, and high-mix low-volume production.

[0075]

As described above, the load on the PC of the centralized control unit is reduced, and the reliability and cost can be reduced by reducing the data amount of the communication system.

Then, each control device can correlate and reallocate tasks, procedures, and processes so that the CPU, the arithmetic circuit, and the communication load of the control device can be made appropriate, and appropriate capacity and cost can be obtained as a whole. It can be a control device having. Further, when one control device is in an abnormal state or an emergency state, another control device can support or substitute for it, manage, or give an alarm.

[Brief description of drawings]

FIG. 1 is a basic diagram in which various actuators are combined.

FIG. 2 is a diagram schematically showing an actuator corresponding to the X axis.

FIG. 3 is a diagram showing a structure of the motor shown in FIG.

FIG. 4 is a diagram schematically showing an actuator corresponding to the Y axis.

FIG. 5 is a diagram schematically showing an actuator corresponding to the Z axis.

FIG. 6 is a diagram schematically showing an actuator corresponding to a θ axis.

FIG. 7 is a diagram schematically showing an actuator that drives a chuck.

FIG. 8 is a diagram schematically showing an actuator that drives a suction pad.

FIG. 9 is a diagram showing a relationship between an actuator and legs.

FIG. 10 is a diagram showing a front panel of the control device.

11 is a diagram showing a configuration of the control device of FIG.

12 is a diagram showing a configuration of the control device of FIG.

FIG. 13 is a diagram showing a connection of a plurality of actuators by a communication unit.

FIG. 14 is a diagram for explaining the operation of the actuator.

FIG. 15 is a diagram showing an actuator structure.

16 is a diagram showing functions of the actuator structure of FIG.

[Explanation of symbols]

 10, 12, 14, 16, 18, 20, ... Actuator 24, 28, 32, 36, 46, 48 ... Control device 62, 82 ... Position sensor 98 ... Signal bus 100, 116 ... Bus 102 ... Display 104 ... Network control device 110 ... Card 118 ... CPU 122 ... Communication control device 124 ... Input / output control device

Claims (56)

[Claims] 1. An actuator control device in which a plurality of actuators operate in cooperation with each other, wherein information relating to actuator control is transmitted by a data transmission line. 2. The actuator control device according to claim 1, wherein a plurality of actuators are mechanically linked or associated with each other by a spatial correlation. 3. The actuator control device according to claim 1, wherein the data transmission line transmits / receives data in relation to at least an address of a device, element signal, interface, etc. related to information. 4. The actuator control device according to claim 1, wherein the data transmission line transmits and receives data using a spread spectrum system as a communication system. 5. The actuator control device according to claim 1, wherein the information is a command control signal for actuating, stopping, position, velocity, acceleration, pressure, force, flow rate, etc. of the actuator. 6. The apparatus according to claim 1, wherein the information includes activation and deactivation of an actuator and a work associated therewith.
A control device for an actuator, which is information on state quantities such as position, velocity, acceleration, pressure, force, and flow rate. 7. The apparatus according to claim 1, wherein the actuator is linearly driven or rotated by an industrial rotary motor such as a fluid pressure cylinder, a fluid pressure rotary actuator, a stepping motor, an AC servo motor, a DC servo motor. An actuator control device characterized by the above. 8. The actuator control device according to claim 1, wherein the actuator is a linear actuator or a linear actuator based on an AC / DC stepping system or an induction system. 9. The plurality of devices according to claim 1, wherein the actuator comprises a power source system, a fluid pressure power source system, a signal bus, a signal coaxial cable, a signal optical fiber, a signal wireless signal system, and the like. An actuator control device characterized by being separated. 10. A control device for an actuator according to claim 1, wherein the power source or the signal system has a means for transmitting the power or the signal without using a wire with respect to the relative movement associated with the operation of the actuator. . 11. The actuator control device according to claim 1, wherein mechanical fastening is used as a mechanical coupling method of the plurality of actuators. 12. A control device for an actuator according to claim 1, wherein a mechanical coupling system of a plurality of actuators is mechanical linear motion, rotation, or sliding. 13. The actuator control device according to claim 1, wherein the plurality of actuators are a combination of an electric system and a fluid system. 14. An actuator control device according to claim 1, wherein the plurality of actuators are a combination of a rotary system and a linear system. 15. The apparatus according to claim 1, wherein a plurality of actuators are mechanically coupled, one actuator is spatially positioned, and one actuator grasps a work. Control device. 16. The apparatus according to claim 1, wherein the plurality of actuators are so-called X-axis and Y-axis of an industrial robot.
An actuator control device having an axial, Z-axis, and θ-axis chuck. 17. The actuator control device according to claim 1, wherein the plurality of actuators are so-called scalar type industrial robots. 18. The actuator control device according to claim 9, wherein a sliding means is used as a power supply system. 19. A control device for an actuator according to claim 9, wherein a sliding air joint means is used as a fluid pressure transmission system. 20. The actuator controller according to claim 9, wherein the information transmission system is a wireless system. 21. The actuator control device according to claim 9, further comprising means for separating from the surrounding space as an information transmission system. 22. The actuator control device according to claim 9, wherein, as an information transmission method, current and voltage of a power supply line are parasitically transmitted. 23. The actuator control device according to claim 9, wherein an air passage is used as a separating means as an information transmission system. 24. The actuator control device according to claim 9, wherein in the wireless optical transmission system, a passage length and a passage angle are variable as means for separating from the surrounding space. 25. The actuator control device according to claim 9, wherein an electromagnetic wave containing light is used as a medium as a wireless system of an information transmission system. 26. An actuator control device in which a plurality of actuators operate in a cooperative correlation, the actuator control device having communication control means for fetching data related to the actuator. 27. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein the actuator has a communication control device for taking in data by a communication transmission method. 28. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein the actuator has a communication control device for transmitting data by a communication transmission method. 29. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein a control device related to one actuator transmits information related to control to another control device. 30. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein the control device associated with one actuator transmits confirmation information of an operation signal and feedback information such as measurement data to another control device. Actuator control device. 31. The device according to claim 26, wherein some of the plurality of actuators are coupled by a mechanical fastening method and a linear, rotary, or sliding method. Actuator control device. 32. The apparatus of claim 31, wherein one of the several actuators applies a mechanical force to the workpiece.
An actuator control device having means for grasping by fluid force or the like. 33. The actuator control device according to claim 31, wherein one of the several actuators is fixed at a certain position in space. 34. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein the control means of the actuator controls another actuator. 35. An actuator control device in which a plurality of actuators operate in a cooperative correlation, wherein the control means of the actuators jointly perform a series of work. 36. A control device for an actuator, wherein the control means of the actuator controls the other actuator by receiving data related to the address and controlling the other actuator in cooperation and correlation. 37. The actuator control device according to claim 36, wherein the control means is integrated with the actuator. 38. The actuator control device according to claim 36, wherein the control means includes actuator driving means. 39. The actuator control device according to claim 36, wherein the control means has a sensor detection means. 40. The actuator control device according to claim 36, wherein the control means has a memory and a judgment means. 41. The actuator control device according to claim 36, wherein the control means has a program execution function. 42. The actuator control device according to claim 36, wherein the actuator is a fluid pressure cylinder or a fluid pressure rotary actuator. 43. The apparatus according to claim 36, wherein the actuator is a stepping motor, an AC servomotor, or D.
An actuator control device characterized by linear and rotational movements by a C servo motor. 44. An input / output means for driving and controlling an object, an actuator, a sensor, a switch, etc., and a communication interface for transmitting data based on an address signal and a data signal with a main controller. Actuator control device. 45. When exchanging information between a sequencer or a computer and a device such as an actuator, a sensor or a switch for driving and controlling an object by a data transmission means, a data transmission related to an address signal is branched to a connection with the data transmission means. An actuator control device characterized by using a device or a branched connection device. 46. Various pneumatic systems, electrical systems, signal systems and other joints and connectors related to devices connected to devices such as actuators, sensors and switches for driving and controlling objects are connected to other devices through a network. An actuator control device characterized by using a compatible socket for connection. 47. The actuator control device according to claim 46, comprising a socket in which at least a plurality of types of joints or connectors are integrated. 48. An actuator control device having a plurality of actuators, which has at least one communication path with a power source such as electricity and hydraulic pressure and its exhaust and ground, and an actuator and a signal transmission path of a sensor. Control device. 49. The actuator control device according to claim 48, wherein the signal transmitted through the signal transmission path is serial transmission or BUS transmission. 50. The actuator control device according to claim 49, wherein serial transmission is performed by light, electricity, or electromagnetic waves. 51. An operating means for moving an actuator from each power source, a means for inputting and outputting a signal (incoming / outgoing) which receives a signal from each sensor and is transmitted to the outside, and a means for pulse-through the signal. Actuator control device. 52. A high-speed data transmission system in which a device connected to a device such as an actuator, a sensor, and a switch for driving and controlling an object communicates with a main control device with respect to an address signal and a data signal through a communication interface and has noise resistance. A method for controlling an actuator, characterized in that: 53. The actuator control method according to claim 52, wherein the high-speed data transmission method is an optical transmission method. 54. A method for controlling an actuator according to claim 52 or 53, wherein a device connected to the equipment and a main controller are networked. 55. A method for controlling an actuator according to any one of claims 52 to 54, wherein devices such as an actuator, a sensor and a switch are integrated with a device connecting them. 56. When exchanging information between an actuator, a sensor, a switch, etc. for driving and controlling an object and a sequencer or a computer by means of a data transmission means, a connection of the data transmission means with a data A method for controlling an actuator, which is performed by a branching device that performs transmission or a branched connection device.