JP2004270935A - Micro fluid element, pressing mechanism, and flow rate adjusting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro fluid element capable of simplifying its structure and preventing its damage received when adjusting flow rate, having excellent operation property, and being advantageous from the viewpoint of cost and to provide a flow rate adjusting method. <P>SOLUTION: This micro fluid element is provided with an element main body 11 having a flow passage 5 like a capillary tube and a diaphragm 7 displaceable relative to the flow passage 5 and a pressing mechanism 12 pressing the diaphragm 7 to displace it. The pressing mechanism 12 is provided with a movable pressing member 15 displaceable relative to the element main body 11 by turning, and the diaphragm 7 is pressed by the movable pressing member 15. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a microfluidic device capable of opening and closing a flow path through which a fluid flows and adjusting the flow rate of the fluid, and a method of adjusting the flow rate of the microfluidic device.

The microfluidic device is used as a microchemical device in which a microchannel is formed, connected to a reaction tank, an electrophoresis column, a membrane separation mechanism, and the like.
This microfluidic device has a capillary channel inside, and is used for microreaction devices (microreactors) such as chemistry and biochemistry, integrated DNA analysis devices, microelectrophoresis devices, and microchromatography devices. It can be used as an analytical device, a microdevice for preparing an analytical sample such as mass spectrum or liquid chromatography, a physicochemical processing device such as extraction, membrane separation, and dialysis, and a spotter for microarray production.
Note that the microfluidic device is also called a microfluidic device, a microfluidic device, a microfabricated device, a lab-on-a-chip, or a micro total analytical system (μ-TAS). Means an element on which is formed.

In Patent Documents 1 to 3 filed by the present applicant, a flexible film-shaped member is provided on a member having a groove to form a groove as a capillary channel, and this film-shaped member (diaphragm) is A microfluidic device that can be displaced by being pressed by a diaphragm pressing mechanism such as a weight, a pinch, an actuator, and a screw is disclosed. In these microfluidic devices, the flow rate of the fluid in the flow path can be adjusted by adjusting the position of the film-shaped member (diaphragm).
In the microfluidic device, various actuators such as a spring-type clamp that are not integrated with the microfluidic device and a screw-type compression mechanism that is integrated with the microfluidic device are employed as the diaphragm compression mechanism.

  Patent Document 4 filed by the present applicant discloses a mechanism for displacing a diaphragm with a fluid for adjusting a flow rate.

However, in the above-described microfluidic device, the width of the flow path to be subjected to flow rate adjustment is very small, such as about 10 to 300 μm. Therefore, high precision is required for positioning the diaphragm compression mechanism with respect to the flow path. There is a drawback that the structure of the fixing mechanism and the diaphragm compression mechanism is complicated and expensive.
When a screw-type compression mechanism is used, it is relatively easy to adjust the cross-sectional area of the flow path during compression, but when compressing the diaphragm, a force in the screw rotation direction acts on the diaphragm. Therefore, the diaphragm and the like are easily damaged, and it has been particularly difficult to employ this mechanism in a small microfluidic device.
Further, in the case of a microfluidic device using a fluid for adjusting a flow rate, a pipe for a fluid for adjusting a flow rate is required. Further, since a pressure control device for the fluid is required for each microfluidic device, the configuration of the device becomes complicated, which is disadvantageous in terms of operability and cost.
JP 2001-70784 A WO 02 / 24320A1 pamphlet JP-A-2002-219697 JP-A-2002-239374

  The problem to be solved by the present invention is to provide a microfluidic device and a flow control method which can simplify the structure, prevent damage during flow control, are excellent in operability, and are advantageous in cost. To provide.

  The present inventors have provided a pressing mechanism that presses and displaces the diaphragm, and configured the pressing mechanism to press the diaphragm by a movable pressing member that can be displaced by rotation or bending deformation, thereby solving the above problem. The present inventors have found that it can be solved, and completed the present invention based on this finding.

  That is, the present invention provides a microfluidic device main body (11) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5), and presses the diaphragm (7). And a movable pressing member (15) displaceable with respect to the microfluidic device main body (11) by rotating the movable pressing member (15). According to (15), there is provided a microfluidic device configured to be able to press the diaphragm (7).

  The present invention also provides a microfluidic device body (11) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5), and presses the diaphragm (7). And a movable pressing member (29) displaceable with respect to the microfluidic device main body (11) by elastic bending deformation. (29) A microfluidic device configured to be able to press the diaphragm (7).

  The present invention also provides a microfluidic device body (181) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5), pressing the diaphragm (7). A movable pressing member (195) that can be displaced relative to the microfluidic device main body (181) by rotating, and the diaphragm () is moved by the movable pressing member (195). 7) A pressing mechanism configured to be able to press is provided.

  The present invention also provides a method of adjusting a flow rate of a fluid in a flow path of the microfluidic device, wherein the flow rate is adjusted by adjusting a displacement amount of a movable pressing member.

The following effects can be obtained with the microfluidic device of the present invention.
(1) Since the pressing mechanism for pressing the diaphragm by the movable pressing member that can be displaced by rotation or bending deformation is provided, the diaphragm pressing position can be accurately determined by the pressing mechanism having a simple structure.
For this reason, the structure of the microfluidic device can be simplified without lowering the accuracy of the diaphragm pressing positioning.
Therefore, the size and cost of the microfluidic device can be reduced.
(2) Since the diaphragm can be pressed by displacing the movable pressing member by rotation or bending deformation, the diaphragm can be prevented from being damaged unlike a conventional product using a screw-type pressing mechanism. Therefore, the durability of the microfluidic device can be improved.
(3) Since the diaphragm can be pressed by moving the movable pressing member downward with a finger or a moving mechanism, the flow rate can be adjusted by an easy operation.
(4) Ancillary devices (such as a fluid pressure control device) are not required as compared with a conventional product using a fluid for flow control, and the device configuration is simplified. Therefore, it is advantageous in terms of operability and cost.
(5) By using a pressing mechanism capable of maintaining the posture of the movable pressing member at the diaphragm pressing position and the non-pressing position, the flow rate can be easily and accurately adjusted.
(6) By adopting a lock mechanism in which the movable pressing member is locked at the diaphragm pressing position or the non-pressing position, the opening degree of the flow path can be kept constant. Therefore, the flow rate can be adjusted easily and accurately.
(7) A plurality of diaphragms can be independently displaced by adopting a configuration in which the movable pressing member includes first and second arms, which can press different diaphragms. Therefore, the flow rates of the plurality of flow paths can be independently adjusted.
(8) When one of the first and second arms presses one of the diaphragms, the other arm does not press the other of the diaphragms, so that one operation is performed. Thus, one of the two flow paths can be opened and the other can be closed.
Therefore, it is not necessary to separately perform the operation of closing one of the two flow paths and the operation of opening the other of the flow paths, and the switching of the flow paths can be performed easily and in a short time.
(9) By employing a configuration in which the pressing mechanism is detachable from the microfluidic device main body, the pressing mechanism can be removed from the used microfluidic device and reused. Therefore, the manufacturing cost of the microfluidic device can be reduced.

The microfluidic device of the present invention includes a microfluidic device main body having a capillary channel and a diaphragm displaceable with respect to the channel, and a pressing mechanism for pressing and displacing the diaphragm, wherein the pressing mechanism is provided. A movable pressing member that is displaceable with respect to the microfluidic device body by rotating, and is configured such that the diaphragm can be pressed by the movable pressing member.
The pressing mechanism may include a movable pressing member that can be displaced with respect to the microfluidic device main body by elastic bending deformation, and the movable pressing member may press the diaphragm.
The movable pressing member can be configured to be displaceable in a direction approaching and separating from the microfluidic device main body.
In the present invention, since the pressing mechanism that presses the diaphragm by the movable pressing member that can be displaced by rotation or bending deformation is provided, the pressing position of the diaphragm can be accurately determined by the pressing mechanism having a simple structure.
Therefore, the structure of the microfluidic device can be simplified without lowering the accuracy of the diaphragm pressing positioning, and the microfluidic device can be reduced in size and cost.
Further, since the diaphragm can be pressed by displacing the movable pressing member by rotating or bending deformation, unlike the conventional product using a screw-type pressing mechanism, it is possible to prevent the diaphragm from being damaged. Therefore, the durability of the microfluidic device can be improved.
Further, since the diaphragm can be pressed by moving the movable pressing member downward with a finger or a moving mechanism, the flow rate can be adjusted by an easy operation.
Further, as compared with a conventional product using a fluid for adjusting a flow rate, an auxiliary device (such as a pressure control device for a fluid) is not required, and the device configuration is simplified. Therefore, it is advantageous in terms of operability and cost.
In the present invention, the displacement of the diaphragm refers to the movement of the diaphragm for changing the cross-sectional area of the flow path to change the fluid flow rate in the flow path. Further, it is desirable that the diaphragm can be completely restored to the non-displaced state when the pressing is stopped. However, the present invention is not limited to this, and the restoration may be incomplete.

It is preferable that the pressing mechanism is configured to be able to maintain the posture of the movable pressing member at a position where at least one of the diaphragms is pressed and a position where no pressing is performed.
According to this configuration, the flow rate can be easily and accurately adjusted.
The position where the diaphragm is pressed may be a position where the flow path is completely closed by the diaphragm or a position where the flow path is not closed.

The pressing mechanism may be configured to have a lock mechanism that locks the movable pressing member at a position where at least one of the diaphragms is pressed or a position where no pressing is performed.
By employing the lock mechanism, the opening degree of the flow path can be kept constant. Therefore, the flow rate can be adjusted easily and accurately.

The pressing mechanism includes a moving mechanism that displaces the movable pressing member, the moving mechanism includes an operation unit that is rotatable with respect to the movable pressing member, and the movable pressing member is displaced by rotating the operating unit. It can be configured to be able to.
According to this configuration, the flow rate can be adjusted by a simple operation of rotating the operation unit.
In the pressing mechanism, an urging member is provided between the operation unit and the movable pressing member, and the urging member elastically moves and presses at least one of the diaphragms at a position where the urging member presses at least one of the diaphragms. The configuration can be such that the posture of the member can be maintained.
According to this configuration, the structure of the pressing mechanism can be simplified.

The pressing mechanism includes a moving mechanism for displacing the movable pressing member. The moving mechanism is configured to be movable in parallel with respect to the movable pressing member, so that the movable pressing member can be displaced by the parallel movement of the moving mechanism. Can be configured.
According to this configuration, the flow rate can be adjusted by an easy operation.

The movable pressing member may include first and second arms, and these arms may be configured to be able to press different diaphragms, respectively.
According to this configuration, the plurality of diaphragms can be displaced independently. Therefore, the flow rates of the plurality of flow paths can be independently adjusted.

In the microfluidic device of the present invention, the microfluidic device main body has first and second flow paths branched from a main flow path, and the diaphragm is capable of being displaced with respect to the first flow path, A second diaphragm displaceable relative to a second flow path, wherein the first and second arms are configured such that when one of these arms presses one of the diaphragms, the other arm is It can be configured so that the other of the diaphragms is not pressed.
According to this configuration, one of the two flow paths can be opened and the other can be closed by one operation.
Therefore, there is no need to separately perform an operation of closing one of the two flow paths and an operation of opening the other of the flow paths, and the switching of the flow paths can be performed easily and in a short time.

The movable pressing member can be configured to be able to press the diaphragm via a buffer member that can be deformed by pressing.
The buffer member is not particularly limited as long as it has a characteristic of being deformed by pressing.
For example, a spring such as a coil spring, an elastic body such as rubber or elastomer, a porous body such as foamed polyethylene or polyurethane, a fiber such as cotton, a combination structure of a slide cam and an elastic body, and the like can be given.

In the present invention, it is possible to adopt a configuration in which an intermediate member is provided between the movable pressing member and the diaphragm, and the movable pressing member can press the diaphragm via the intermediate member.
The intermediate member may be configured to be fixed to the diaphragm. The intermediate member is not limited to the configuration fixed to the diaphragm. For example, the intermediate member may be provided in a guide positioned with respect to the microfluidic device main body without being fixed to the movable pressing member or the diaphragm.
Further, the intermediate member may be fixed to a film-shaped member or the like, and may be movable in a direction in which the diaphragm is displaced, but may be immovable in a direction parallel to the diaphragm.
The intermediary member is preferably a spherical, hemispherical, cylindrical, columnar, truncated cone, or truncated pyramid-shaped convex body. As the material, metal such as steel, glass, synthetic resin and the like can be adopted.

In the present invention, the pressing mechanism may be integrated with the microfluidic device main body, or may be configured to be detachable from the microfluidic device main body.
When the pressing mechanism is detachable from the microfluidic device main body, the pressing mechanism is a member independent of the microfluidic device main body, and the microfluidic device is obtained by mounting the pressing mechanism at a predetermined position of the microfluidic device main body. Can be.
The pressing mechanism includes the movable pressing member, and may have any shape as long as the diaphragm can be pressed by the movable pressing member when mounted on a predetermined position of the microfluidic device main body.
It is preferable that the pressing mechanism has a surface that can be in close contact with the surface of the microfluidic device body on which the diaphragm is formed. As the pressing mechanism, for example, a mechanism having a flat contact surface can be given, and it is preferable to have a plate-shaped portion constituting the contact surface.
When the pressing mechanism has a plate-shaped portion, the movable pressing member can press the diaphragm through a defective portion (a hole or a notch) provided in the plate-shaped portion. The material of the plate portion is not particularly limited, but a material having high rigidity is preferable.
In order to mount the pressing mechanism on the microfluidic device main body, for example, the following mechanism can be used. A pressing mechanism is fixed to a lid provided in a device using a microfluidic element, for example, an analyzer or a synthesizer, and when the lid is rotated for opening and closing, the diaphragm is pressed by a movable pressing member. A positioning pin or the like for fixing the microfluidic device main body can be provided at a position.
By making the pressing mechanism detachable from the microfluidic device main body, a relatively expensive pressing mechanism can be removed from a used microfluidic device and reused. Therefore, the manufacturing cost of the microfluidic device can be reduced.

  The pressing mechanism of the present invention is a pressing mechanism that presses and displaces the diaphragm of a microfluidic device main body having a capillary flow path and a diaphragm that can be displaced with respect to the flow path. And a movable pressing member that can be displaced with respect to the microfluidic device main body, so that the diaphragm can be pressed by the movable pressing member.

  The method for adjusting the flow rate of a microfluidic device according to the present invention is a method for adjusting the fluid flow rate in the flow path of the microfluidic device, wherein the flow rate is adjusted by adjusting a displacement amount of a movable pressing member. And

<Example 1>
FIGS. 1 and 2 show a first embodiment of the microfluidic device of the present invention. 2A shows a state in which the diaphragm is not displaced, and FIG. 2B shows a state in which the diaphragm is displaced.
The microfluidic device shown here includes a microfluidic device main body 11 having a capillary channel 5 and a diaphragm 7 displaceable with respect to the channel 5, and a pressing mechanism 12 for pressing and displacing the diaphragm 7. I have. Hereinafter, the microfluidic device main body is simply referred to as an element main body.
The element body 11 is configured by sequentially laminating a first resin layer 2, a second resin layer 3, and a third resin layer 4 on a base material 1. The resin layers 2, 3, and 4 can be composed of an energy ray-curable composition. For the third resin layer 4, a material that can be elastically deformed by pressing is used.
The flow path 5 is formed in the second resin layer 3. An intermediate portion in the extending direction of the flow path 5 is a wide portion 6 which is widened. The shape of the wide portion 6 can be circular.
The portion of the third resin layer 4 facing the wide portion 6 is a diaphragm 7. The diaphragm 7 is elastically displaced downward by the pressing mechanism 12 so that the opening of the flow path 5 can be adjusted.
An inflow port 8 and an outflow port 9 are formed in the third resin layer 4 at positions corresponding to both ends of the flow path 5, respectively. It can be derived.
Luer fittings 10a and 10b are provided in the third resin layer 4 at positions corresponding to the inlet 8 and the outlet 9, respectively.

The pressing mechanism 12 includes a fixed member 13 fixed to the element body 11, a movable pressing member 15 that rotates (swings) about a support shaft 19 provided on the fixed member 13, and the movable pressing member 15 is locked. Locking member 21 (lock mechanism).
The fixing member 13 includes a plate-like base 13a and extending portions 13b, 13b extending upward from both ends of the base 13a, and is formed in a U-shaped cross section. A bearing 14 is provided on each of the extending portions 13b, 13b. The support shaft 19 is constituted by a pin 20 inserted through the bearing 14.
The movable pressing member 15 includes a plate-shaped pressing member main body 15a, a cylindrical portion 16 formed at a base end of the pressing member main body 15a, and a substantially L-shaped plate-shaped formed at a distal end portion of the pressing member main body 15a. It has a locking portion 18 and a pressing portion 17 formed on the lower surface of the pressing member body 15a so as to protrude downward.
The cylindrical portion 16 is formed with a bearing 16a.

The pressing portion 17 has a substantially conical shape whose diameter is reduced downward, and is formed at a position where the diaphragm 7 can be pressed (preferably, a position corresponding to the center of the diaphragm 7). The pressing portion 17 is preferably provided closer to the base end of the pressing member body 15a than the locking portion 18.
The locking member 21 has a step portion 22 at which the locking portion 18 of the movable pressing member 15 is locked. The locking member 21 is elastically deformable in a direction in which the upper end is displaced in the direction of the inflow port 8 (leftward in the figure). The locking member 21 is preferably formed at a position where the movable pressing member 15 is weakly biased in the direction of the cylindrical portion 16 (to the right in the figure).

[Production of base material 1, first and second resin layers 2, 3]
Using a bar coater on a substrate 1 made of Dainippon Ink and Chemicals, Inc., having a width of 2.5 cm, a length of 7.5 cm, and a thickness of 3 mm, made of polystyrene "Dick Styrene XC510" (hereinafter referred to as [p1]). The energy ray-curable composition [e1] was applied and irradiated with ultraviolet rays as energy rays for 3 seconds to form a non-flowable and incompletely cured first resin layer 2 (98 μm in thickness).
An energy-ray-curable composition [e1] is further applied on the first resin layer 2 using a bar coater, and ultraviolet rays are irradiated as energy rays to portions other than the portion that becomes the flow path 5 and the wide portion 6 for 3 seconds. Then, the composition in the irradiated portion was made non-flowable and incompletely cured. The uncured energy-ray-curable composition [e1] in the non-irradiated portion is removed by running water to form a second resin layer 3 (98 μm in thickness) having a groove-shaped channel 5 having a substantially rectangular cross section and a wide portion 6. did.
Thus, a groove-shaped flow path 5 having a width of 150 μm, a depth of 98 μm, and a length of 50 mm, and a cylindrical wide portion 6 having a diameter of 300 μm are formed on the second resin layer 3 along the flow path 5. Thus, a member [A1], which is a laminate of the base material 1, the first resin layer 2, and the second resin layer 3, was produced.

[Production of Third Resin Layer 4]
An energy ray-curable composition [e2] is applied to the corona-treated surface of a biaxially oriented polypropylene film “FOR” (thickness: 30 μm, not shown) manufactured by Nimura Chemical Co. using a bar coater, and the energy ray is applied to the composition. Ultraviolet rays were irradiated for 1 second to form a non-flowable and incompletely cured coating film, and this coating film was laminated on the second resin layer 3.
The third resin layer made of a cured product of the energy ray-curable composition [e2] by irradiating the ultraviolet ray from the polypropylene biaxially stretched film side for another 30 seconds to completely cure the coating film in an incompletely cured state. 4 (thickness: 64 μm) was formed and simultaneously fixed to the surface of the second resin layer 3. At this time, the first resin layer 2 and the second resin layer 3 were simultaneously cured.
By peeling the biaxially stretched polypropylene film, an element main body 11 in which the portion of the third resin layer 4 facing the wide portion 6 became the diaphragm 7 was produced.

[Production of pressing mechanism]
U-shaped member (length 10 mm, width 6 mm, height 6 mm) formed of polystyrene "Dick Styrene SR-500-1" (high impact polystyrene) (hereinafter referred to as [p2]) manufactured by Dainippon Ink and Chemicals, Inc. ), A through hole (diameter: 0.62 mm) serving as the bearing 14 was formed by a drill to form the fixing member 13.
The movable pressing member 15 was made of polystyrene (p2). The movable pressing member 15 has a shape in which a cylindrical portion 16 (4 mm in diameter) and a locking portion 18 are provided at a base end and a distal end of a plate-shaped pressing member main body 15a (dimensions: 20 mm × 6 mm × 1 mm), respectively. . The pressing portion 17 has a substantially conical shape (R at the front end: 0.25 mm) having a spherical front end, and is formed at a position about 3 mm from the front end of the pressing member main body 15a. The cylindrical portion 16 was formed with a through hole (diameter 0.61 mm) to be a bearing 16a.
An iron pin 20 having a diameter of 0.6 mm is passed through the bearing 16a of the movable pressing member 15 and the bearing 14 of the fixed member 13, so that the movable pressing member 15 can rotate around the pin 20 (support shaft 19) as a fulcrum. .
The fixing member 13 was bonded to the surface of the third resin layer 4 with an epoxy adhesive.
The locking member 21 made of polystyrene (p2) was bonded to the surface of the third resin layer 4 with an epoxy adhesive.

[Formation of other structures]
An inlet 8 and an outlet 9 (both having a diameter of 0.5 mm) were formed in the third resin layer 4 at positions corresponding to both ends of the flow path 5 of the element body 11.
Luer fittings 10a and 10b were bonded to the third resin layer 4 at positions corresponding to the inflow port 8 and the outflow port 9, respectively, with an epoxy resin.
A microfluidic device was obtained as described above.

The method for preparing the energy ray-curable composition used in Example 1 is described below.
[Preparation of energy ray-curable composition [e1]]
60 parts of a trifunctional urethane acrylate oligomer “Unidick V4263” (average molecular weight 2000) manufactured by Dainippon Ink and Chemicals, Inc., and 20 parts of 1,6-hexanediol diacrylate “New Frontier HDDA” manufactured by Daiichi Kogyo Seiyaku Co., Ltd. 20 parts of nonylphenoxy polyethylene glycol (n = 17) acrylate “N-177E” manufactured by Daiichi Kogyo Seiyaku Co., Ltd., 5 parts of 1-hydroxycyclohexylphenyl ketone “Irgacure 184” manufactured by Ciba-Geigy as a photopolymerization initiator, And 0.5 part of 2,4-diphenyl-4-methyl-1-pentene manufactured by Kanto Chemical Co., Ltd. as a polymerization retarder was uniformly mixed to prepare an energy ray-curable composition [e1].
Table 1 shows the tensile modulus and elongation at break of the ultraviolet ray cured product of the energy ray-curable composition [e1]. The contact angle with water was 13 degrees. Unless otherwise specified, “parts” means “parts by mass”.

[Preparation of energy ray-curable composition [e2]]
40 parts of the above “Unidick V-4263”, 60 parts of an acrylate mixture “Sartomer C2000” manufactured by Somar Co., which mainly contains ω-tetradecanediol diacrylate and ω-pentadecanediol diacrylate, and “N-177E” 20 parts, 5 parts of the above-mentioned “Irgacure 184” as a photopolymerization initiator, and 0.1 part of the above 2,4-diphenyl-4-methyl-1-pentene as a polymerization retarder were mixed together to form an energy ray-curable composition. Compound [e2] was prepared.

[Energy beam irradiation]
Ultraviolet rays of 50 mW / cm ² (using a Multilight 200 light source unit manufactured by Ushio Inc.) were used as energy rays. Irradiation with energy rays was performed in a nitrogen atmosphere.

[Opening / closing test of flow path]
Water (fluid) colored with methylene blue (manufactured by Wako Pure Chemical Industries, Ltd.) is supplied to the channel 5 from a micro syringe (not shown) through a soft vinyl chloride tube (not shown) connected to the luer fitting 10a. The mixture was injected, discharged from the outlet 9, and led out of the system through a soft vinyl chloride tube (not shown) connected to the luer fitting 10b.
As shown in FIG. 2A, in a state where no downward force is applied to the movable pressing member 15 (normal state) (diaphragm non-pressing position), the movable pressing member 15 does not rotate downward. The diaphragm 7 is not pressed. Therefore, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.

As shown in FIG. 2B, the movable pressing member 15 is pressed by a finger in the direction of the diaphragm 7 (a direction approaching the element body 11: downward in the figure), and the movable pressing member 15 is rotated around the support shaft 19 as a fulcrum. I let it.
As a result, the pressing portion 17 presses the diaphragm 7 to be displaced downward, and the diaphragm 7 that has entered the wide portion 6 of the flow channel 5 reduces the cross-sectional area of the flow channel 5 and reduces the flow rate of the colored water.
When the movable pressing member 15 was further rotated to displace the diaphragm 7 to a position where the flow path 5 was completely closed (diaphragm pressing position), the flow of the colored water in the flow path 5 was interrupted.
At this time, the locking portion 18 of the movable pressing member 15 is locked by the step 22 of the locking member 21, and the state in which the flow of the colored water is shut off is maintained without pressing the movable pressing member 15. I was sure that.
When the locking of the movable pressing member 15 with the locking member 21 is released, the movable pressing member 15 rotates upward (in a direction away from the element body 11), and the diaphragm 7 is elastically displaced upward and colored. It was confirmed that water flowed through the flow path 5 again.
Thus, in this microfluidic device, the flow rate of the fluid in the flow path 5 could be adjusted by adjusting the amount of displacement of the movable pressing member 15.

The microfluidic device of the present embodiment has the following advantages.
(1) Since the pressing portion 17 is configured to press the diaphragm 7 by the rotation of the movable pressing member 15, the position where the pressing portion 17 presses the diaphragm 7 can be accurately determined by the pressing mechanism 12 having a simple structure. Can be determined.
For this reason, the structure of the microfluidic device can be simplified without lowering the accuracy of the diaphragm pressing positioning.
Therefore, the size and cost of the microfluidic device can be reduced.
(2) The diaphragm 7 can be pressed by the pressing portion 17 that moves downward by the rotation of the movable pressing member 15. For this reason, unlike a conventional product using a screw-type pressing mechanism, no excessive force is applied to the diaphragm 7 and the diaphragm 7 can be prevented from being damaged. Therefore, the durability of the microfluidic device can be improved.
(3) Since the diaphragm 7 can be pressed by rotating the movable pressing member 15 downward with a finger or the like, the flow rate can be adjusted by an easy operation.
(4) Ancillary devices (such as a fluid pressure control device) are not required as compared with a conventional product using a fluid for flow control, and the device configuration is simplified. Therefore, it is advantageous in terms of operability and cost.
(5) Since the movable pressing member 15 can be locked to the locking member 21 (lock mechanism) while being rotated downward, the flow of the colored water can be reduced without pressing the movable pressing member 15. The shut-off state can be maintained. That is, the opening degree of the flow path 5 can be maintained constant by the locking member 21.
Therefore, the flow rate can be adjusted easily and accurately.
(6) Since the movable pressing member 15 rotates around the support shaft 19 provided at the base end, the vertical movement width of the locking portion 18 provided at the distal end becomes the largest. . For this reason, the degree of opening of the flow path 5 can be maintained constant by locking the locking portion 18 to the locking member 21. Therefore, the flow rate can be adjusted easily and accurately.
Further, by providing the pressing portion 17 on the base end side of the pressing member main body 15 a rather than the locking portion 18 (distal end portion), the vertical movement width of the locking portion 18 is made larger than the vertical movement width of the pressing portion 17. be able to. Therefore, the accuracy of the height position adjustment of the pressing portion 17 can be improved.

<Example 2>
FIG. 3 shows a second embodiment of the microfluidic device of the present invention. 3A shows a state where the diaphragm is not displaced, and FIG. 3B shows a state where the diaphragm is displaced. This embodiment is an example of a microfluidic device using an intermediate member.
In the following description, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description may be omitted.
In the microfluidic device of this embodiment, the pressing portion 23 is formed in a cylindrical shape (diameter 3 mm, height 3 mm). The lower surface of the pressing portion 23 is formed flat.
A steel ball 25 (0.5 mm in diameter), which is a convex member, is fixed to the upper surface of the diaphragm 7 (the side opposite to the wide portion 6) as an intermediate member. The steel ball 25 is preferably provided at a position substantially corresponding to the center of the diaphragm 7. The steel ball 25 is fixed to the diaphragm 7 by a cured product of the energy ray-curable composition [e2].

[Opening / closing test of flow path]
Colored water was introduced into the channel 5 in the same manner as in Example 1.
As shown in FIG. 3A, in the normal state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
As shown in FIG. 3B, when the movable pressing member 15 is pressed downward and rotated to lock the locking member 21, the pressing portion 23 presses the steel ball 25 downward, and the diaphragm 7 is pressed. Was pressed downward by the steel ball 25 and displaced, the flow path 5 was closed, and the flow of the colored water was cut off.
As shown in FIG. 3A, when the locking of the movable pressing member 15 with respect to the locking member 21 was released, the flow of the colored water in the flow path 5 was recovered.

In the microfluidic device of the present embodiment, since the steel ball 25 pressing the diaphragm 7 is fixed to the diaphragm 7, even when the relative position of the movable pressing member 15 to the diaphragm 7 changes, the position at which the diaphragm 7 is pressed. Is always constant. Therefore, the flow rate of the fluid in the flow path 5 can be adjusted with high accuracy.
In addition, since the flow rate can be accurately adjusted even when the dimensional accuracy of each member is low, it is easy to manufacture the microfluidic device and the manufacturing cost can be reduced.
Further, even when the position of the movable pressing member 15 changes, a force in a direction other than the downward direction (for example, a force in the horizontal direction) is not easily transmitted to the diaphragm 7, so that damage to the diaphragm 7 can be prevented.

<Example 3>
FIG. 4 shows a third embodiment of the microfluidic device of the present invention. 4A shows a state in which the diaphragm is not displaced, FIG. 4B shows a state in which the diaphragm is slightly displaced, and FIG. 4C shows a state in which the diaphragm is further displaced. This embodiment is an example of a microfluidic device using a buffer member.
In the microfluidic device of this embodiment, a disk-shaped buffer member 24 (diameter 3 mm, thickness 1 mm) is provided on the lower surface side of the cylindrical pressing portion 23 (diameter 3 mm, height 2 mm). The cushioning member 24 was made of polyurethane (“Elastollan 564” manufactured by Nippon Elastollan Corporation, hereinafter referred to as [p3]), which is a material that can be deformed by pressing, and was bonded to the pressing portion 23 with a rubber-based adhesive.
The locking member 26 has first and second step portions 22a and 22b to which the locking portion 18 of the movable pressing member 15 is locked. The second step 22b is provided at a position lower than the first step 22a. The height difference between the steps 22a and 22b was 0.5 mm. Other configurations were the same as those of the second embodiment.

[Opening / closing test of flow path]
Colored water was introduced into the channel 5 in the same manner as in Example 1.
As shown in FIG. 4A, in the normal state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
As shown in FIG. 4B, when the movable pressing member 15 is pressed downward and rotated to lock the locking portion 18 to the first step portion 22a, the buffer member 24 moves the steel ball 25 downward. When pressed, the diaphragm 7 was pressed downward by the steel ball 25 and displaced, the flow path 5 became narrower, and the flow rate of the colored water decreased.
As shown in FIG. 4C, when the movable pressing member 15 is further rotated downward to lock the locking portion 18 to the second step portion 22b, the buffer member 24 presses the steel ball 25 downward. Then, the diaphragm 7 was displaced, the flow path 5 was closed, and the flow of the colored water was cut off.
In the state shown in FIG. 4B and FIG. 4C, the buffer member 24 is deformed in a direction in which the portion in contact with the steel ball 25 becomes thinner.
As shown in FIG. 4A, when the locking of the movable pressing member 15 with respect to the locking member 26 was released, the flow of the colored water in the flow path 5 was recovered.

In the microfluidic device of the present embodiment, since the buffer member 24 that can be deformed by pressing is provided on the lower surface side of the pressing portion 23, the downward moving distance of the steel ball 25 is smaller than the downward moving distance of the pressing portion 23. Smaller.
Therefore, the turning distance of the movable pressing member 15 can be set to be longer than the moving distance of the steel ball 25, and the fine adjustment of the displacement amount of the diaphragm 7 becomes easy. For example, even when the depth of the flow path 5 is minute (for example, about 100 μm), the width (cross-sectional area) of the flow path 5 can be set to a desired value with high accuracy.
Further, since the turning distance of the movable pressing member 15 can be set to be large, the movable pressing member 15 can be securely locked to the locking member 26 even when the dimensional accuracy of the locking member 26 (lock mechanism) is low. Can be. Therefore, the manufacture of the microfluidic device is facilitated, and the manufacturing cost can be reduced.

<Example 4>
FIG. 5 shows a fourth embodiment of the microfluidic device of the present invention. 5A is a plan view of the microfluidic device of the present embodiment, FIGS. 5B and 5C are longitudinal sectional views of the microfluidic device, and FIG. 5B shows a state where the diaphragm is not displaced. , (C) shows a state in which the diaphragm is displaced. The present embodiment is an example of a microfluidic device having a movable pressing member that is displaced by bending deformation.
The pressing mechanism 27 includes a fixing member 28 fixed to the element body 11, a movable pressing member 29 fixed to the fixing member 28, and a locking member 21 (locking mechanism) for locking the movable pressing member 29. ing.
The movable pressing member 29 includes a plate-shaped pressing member main body 29a, a substantially L-shaped plate-shaped locking portion 18 formed on a distal end portion 29c of the pressing member main body 29a, and a lower surface of the distal end side portion 29c of the pressing member main body 29a. And a pressing portion 17 formed to protrude downward.
The movable pressing member 29 is fixed to the fixed member 28 at the base end 29b of the pressing member main body 29a.
The pressing member body 29a has flexibility and can be elastically bent and deformed. For this reason, the movable pressing member 29 has its proximal end (the proximal end 29 b) fixed to the fixed member 28 and its distal end (the distal end portion 29 c) moves up and down (the element main body 11 b) due to bending deformation of the pressing member main body 29 a. (Displacement in the direction of approaching and moving away from).
Since the pressing portion 17 is provided on the front end portion 29c, the movable pressing member 29 can press the diaphragm 7 on the front end that can move up and down.

[Opening / closing test of flow path]
As shown in FIG. 5B, when the movable pressing member 29 was at the normal position where the diaphragm 7 was not pressed, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
As shown in FIG. 5C, the movable pressing member 29 is pressed downward with a finger or the like, and the pressing member body 29a is bent and deformed, so that the pressing portion 17 is moved to a position where the diaphragm 7 is pressed. At this time, the locking portion 18 was locked to the locking member 21.
As a result, the diaphragm 7 was displaced, the flow path 5 was closed, and the flow of the colored water was cut off.
As shown in FIG. 5B, when the locking of the movable pressing member 29 with respect to the locking member 21 is released, the pressing member main body 29a is elastically restored to the undeformed state (normal position) and the colored water Flow has recovered.

In the microfluidic device of the present embodiment, since the pressing portion 17 presses the diaphragm 7 by bending deformation of the pressing member main body 29a, the pressing portion 17 causes the diaphragm 7 to be pressed by the pressing mechanism 27 having a simple structure. The pressing position can be accurately determined.
For this reason, the structure of the microfluidic device can be simplified without lowering the accuracy of the diaphragm pressing positioning. Therefore, the size and cost of the microfluidic device can be reduced.
In addition, when the pressing of the movable pressing member 29 in the bent and deformed state is stopped, the movable pressing member 29 returns to the normal position by the elastic restoring force of the pressing member main body 29a. Can be returned to. Therefore, it is possible to quickly change the flow rate set value.
The movable pressing member 29 has a base portion 29b fixed to the fixing member 28, a distal portion 29c is vertically movable, and the pressing portion 17 provided on the distal portion 29c can press the diaphragm 7. Therefore, the size of the pressing member main body 29a can be reduced, and the installation area thereof can be reduced.
In addition, since the vertical movement width is the largest at the distal end of the movable pressing member 29, the opening of the flow path 5 is kept constant by locking the locking portion 18 at the distal end to the locking member 21. be able to. Therefore, the flow rate can be adjusted easily and accurately.
Further, by providing the pressing portion 17 on the base end side of the pressing member main body 29 a rather than the locking portion 18 (distal end portion), the vertical movement width of the locking portion 18 is made larger than the vertical movement width of the pressing portion 17. be able to. Therefore, the accuracy of the height position adjustment of the pressing portion 17 can be improved.

<Example 5>
FIGS. 6 to 10 show a fifth embodiment of the microfluidic device of the present invention. 6 shows a state in which one of the two diaphragms is displaced, FIG. 7 shows a state in which none of the two diaphragms is displaced, and FIG. 8 shows a state in which the other of the two diaphragms is displaced. .
The microfluidic device shown here includes a device body 31 and a pressing mechanism 32.
First and second flow paths 5a and 5b branched from a main flow path (not shown) are formed in the element body 31, and the flow paths 5a and 5b are respectively provided with first and second wide portions 6a and 6a. 6b is provided. First and second outlets (not shown) are formed at the ends of the flow paths 5a and 5b, respectively.
The portions of the third resin layer 4 facing the wide portions 6a and 6b are first and second diaphragms 7a and 7b, respectively.
First and second steel balls 25a, 25b (intermediate members or convex members) are fixed to the diaphragms 7a, 7b, respectively.

The pressing mechanism 32 includes a fixing member 33 fixed to the element main body 31, a movable pressing member 35 supported by a supporting member 34 provided on the fixing member 33, and rotating (swinging). And a moving mechanism 36 for moving.
The fixing member 33 includes a cylindrical base 37, a support member 34 formed on a bottom plate 37 a of the base 37, and a communication plate 38 attached to the base 37.
The base 37 is formed in a rectangular tube shape having a main body 37b (made of phenol resin) having a U-shaped cross section on a bottom plate 37a (0.2 mm thick) made of an iron plate.
The support member 34 has a U-shaped cross section, and supports the movable pressing member 35 at one end 34a and the other end 34b.
Stoppers 39a and 39b are formed on one end and the other end of the bottom plate portion 37a, respectively.

The movable pressing member 35 includes first and second arms 40b and 40c extending in different directions from the central portion 40a.
The first arm 40b and the second arm 40c are formed in directions crossing each other. For this reason, the movable pressing member 35 is formed so that when one of the first and second arms 40b and 40c is substantially horizontal, the other extends obliquely upward.
The first arm 40b includes a first arm body 40e made of an iron plate having a thickness of 0.2 mm and a first pressing portion 23a (diameter 2 mm, height 2 mm). The second arm 40c includes a second arm body 40f made of an iron plate having a thickness of 0.2 mm and a second pressing portion 23b (diameter 2 mm, height 2 mm).
The movable pressing member 35 is rotatable (swingable) about a central portion 40a. When the movable pressing member 35 rotates in a counterclockwise direction, the first arm 40b contacts the first stopper 39a and rotates in a clockwise direction. When moved, the second arm 40c comes into contact with the second stopper 39b.
The pressing portions 23a and 23b are formed on the lower surfaces of the first and second arm bodies 40e and 40f, respectively, and can move up and down through holes 37e and 37f formed in the bottom plate portion 37a, respectively.

The moving mechanism 36 includes an operation unit 41, an operation arm 42 extending substantially perpendicularly from the operation unit 41, and a posture maintaining mechanism 43.
The operation unit 41 is configured to rotate around a rotation shaft 38 a provided on the communication plate 38.
The operating arm 42 is inserted through a hole 37d provided in the upper plate 37c of the fixing member 33.
The posture maintaining mechanism 43 includes a coil spring 45 (biasing member) provided in a hole 44 provided at a distal end of the operating arm 42, and a steel ball 46 (convex) biased by the coil spring 45 toward the distal end of the operating arm. Member).

[Opening / closing test of flow path]
As shown in FIG. 6, in a state where the operation unit 41 is rotated clockwise until it comes into contact with the upper plate portion 37c, the operating arm 42 is tilted left (counterclockwise) and attached by the coil spring 45. The urged steel ball 46 presses the first arm 40b downward.
As a result, the movable pressing member 35 tilts leftward with the one end 34a of the support member 34 as a fulcrum, and the first arm 40b comes into contact with the first stopper 39a.
For this reason, the first pressing portion 23a pressed the first steel ball 25a downward, the first diaphragm 7a was displaced downward, the first flow path 5a was closed, and the flow of the colored water was shut off.
When the first diaphragm 7a is pressed by the first arm 40b, the second arm 7c is in a state of extending obliquely upward, so that the second diaphragm 7b is not pressed.
Therefore, the colored water flowed from the main flow path (not shown) to the second flow path 5b, and flowed out from the second outlet.
In this state, the first arm 40b is pressed downward by the steel ball 46 urged by the coil spring 45. When the steel ball 46 moves rightward due to the rotation of the operation unit 41, the distance between the tip of the operating arm 42 and the first arm 40b becomes shorter, and the compressive force applied to the coil spring 45 increases. Therefore, the attitude of the movable pressing member 35 is stably maintained by the repulsive force of the coil spring 45.

As shown in FIG. 7, when the operation unit 41 is rotated in the counterclockwise direction, the operation arm 42 is turned substantially in the vertical direction, and the steel ball 46 is moved to the concave portion 40 d provided in the central portion 40 a of the movable pressing member 35. Reached.
As a result, the movable pressing member 35 is supported by the one end 34a and the other end 34b of the support member 34, and the inclinations of the first and second arms 40b and 40c with respect to the horizontal plane are substantially the same.
Therefore, the first and second pressing portions 23a and 23b are not pressed against the steel balls 25a and 25b, the diaphragms 7a and 7b are not displaced, and the colored water flows from the main flow path (not shown). It flowed into both the passages 5a and 5b and flowed out from the first and second outlets.
In this state, since the central portion 40a is pressed downward by the steel ball 46 urged by the coil spring 45, the movable pressing member 35 is supported by the one end 34a and the other end 34b of the support member 34. The posture of the movable pressing member 35 was stably maintained.

As shown in FIG. 8, when the operation unit 41 is rotated counterclockwise until it comes into contact with the upper plate 37c, the operation arm 42 tilts counterclockwise, and the steel ball 46 moves the second arm 40c downward. Press As a result, the movable pressing member 35 tilts rightward with the other end 34b of the support member 34 as a fulcrum, and the second arm 40c comes into contact with the second stopper 39b.
For this reason, the second pressing portion 23b pressed the second steel ball 25b downward, the second diaphragm 7b was displaced downward, the second flow path 5b was closed, and the flow of the colored water was shut off.
When the second diaphragm 7b is pressed by the second arm 40c, the first arm 40b is extended obliquely upward, so that the first diaphragm 7a is not pressed.
Therefore, the colored water flowed from the main flow path (not shown) to the first flow path 5a, and flowed out from the first outlet.
In this state, when the steel ball 46 moves to the left due to the rotation of the operation unit 41, the compressive force applied to the coil spring 45 increases, and the resilient force of the coil spring 45 maintains the posture of the movable pressing member 35 stably. Was.
As shown in FIG. 6, when the operation unit 41 is rotated clockwise again, the first diaphragm 7a is displaced downward, the first flow path 5a is closed, and the colored water flows into the second flow path 5b. Out of the second outlet.

In the present embodiment, the movable pressing member 35 includes the first and second arms 40b and 40c, which can press different diaphragms 7a and 7b, respectively, so that the two diaphragms 7a and 7b are displaced independently. be able to.
Therefore, the flow rates of the plurality of flow paths can be independently adjusted.

In this embodiment, the movable pressing member 35 includes first and second arms 40b and 40c. These arms 40b and 40c are configured such that when the first diaphragm 7a is pressed by the first arm 40b, the second diaphragm 7b is not pressed by the second arm 40c. Further, the arms 40b and 40c are configured such that when the second diaphragm 7b is pressed by the second arm 40c, the first diaphragm 7a is not pressed by the first arm 40b.
Thus, one operation can open one of the two flow paths 5a and 5b and close the other.
Therefore, there is no need to separately perform the operation of closing one of the flow paths 5a and 5b and the operation of opening the other of the flow paths, and the switching of the flow paths 5a and 5b can be performed easily and in a short time.

Further, in this embodiment, since the posture maintaining mechanism 43 having the coil spring 45 and the steel ball 46 is provided, the movable pressing member 35 is inclined in the counterclockwise direction (FIG. 6), and is not inclined. (FIG. 7), or when it is tilted clockwise (FIG. 8), the posture can be stably maintained.
Therefore, the flow rates in the first and second flow paths 5a and 5b can be adjusted with high accuracy.
Further, the flow rate in the first and second flow paths 5a and 5b can be adjusted by a simple operation of rotating the operation unit 41.

In the present invention, a moving mechanism using, for example, a safety pin-shaped bar spring or a leaf spring as the urging member instead of the coil spring 45 is also possible.
For example, the urging member is compressed and mounted, and shifts from a first stable position (FIG. 6) where the diaphragm 7a is pressed to a second stable position (FIG. 7) where the diaphragms 7a and 7b are not pressed. At this time, a mechanism in which the biasing member is compressed more greatly, that is, a mechanism in which energy is stabilized at a plurality of positions is also possible.

<Example 6>
FIGS. 11 to 13 show a sixth embodiment of the microfluidic device of the present invention. FIG. 11 shows a state in which one of the two diaphragms is displaced, and FIG. 12 shows a state in which the other of the two diaphragms is displaced.
The microfluidic device shown here includes a device body 31 having flow paths 5a and 5b and diaphragms 7a and 7b, and a pressing mechanism 52 for pressing and displacing the diaphragm 7.

The pressing mechanism 52 includes a fixed member 53 fixed to the element body 31, a movable pressing member 55 that can rotate (swing) with respect to the fixed member 53, and a moving mechanism 56 that rotates the movable pressing member 55. ing.
The movable pressing member 55 includes first and second arms 60b and 60c extending in different directions from the central portion 60a.
The first arm 60b and the second arm 60c are formed in directions crossing each other. For this reason, the movable pressing member 55 is formed so that when one of the first and second arms 60b and 60c is substantially horizontal, the other extends obliquely upward.
The movable pressing member 55 is capable of rotating (swinging) with a central convex portion 60d provided at the central portion 60a as a fulcrum.
The first arm 60b includes a first arm main body 60e and a first pressing portion 23a, and the second arm 60c includes a second arm main body 60f and a second pressing portion 23b.

The moving mechanism 56 includes an operation section 61, an operation arm section 62 extending substantially perpendicularly from the operation section 61, and a coil spring 65 (biasing member).
The operation unit 61 is configured to rotate around a rotation shaft 53 a provided on the fixed member 53.
The upper end of the coil spring 65 reaches the top surface of the hole 64 provided in the operation arm portion 62, and the lower end thereof has a substantially hemispherical spring receiving portion 66 (biasing) attached to the central portion 60 a of the movable pressing member 55. Member receiving portion). The coil spring 65 is always in a compressed state.

[Opening / closing test of flow path]
As shown in FIG. 11, in a state where the operation unit 61 is rotated clockwise until it comes into contact with the step portion 53 b of the fixing member 53, the operation arm unit 62 is tilted to the left, and the upper part of the coil spring 65 is moved leftward. The pressing force applied to the spring receiving portion 66 due to the elasticity of the coil spring 65 increases at the left portion of the coil spring 65.
As a result, the movable pressing member 55 is inclined leftward (counterclockwise) around the center convex portion 60d until the second arm 60c contacts the bottom plate portion 53c of the fixed member 53. For this reason, the first pressing portion 23a pressed the first steel ball 25a downward, the first diaphragm 7a was displaced downward, the first flow path 5a was closed, and the flow of the colored water was shut off.
Therefore, the colored water flowed from the main flow path (not shown) to the second flow path 5b, and flowed out from the second outlet.

As shown in FIG. 12, in a state where the operation unit 61 is rotated counterclockwise until it comes into contact with the step 53b of the fixing member 53, the operation arm unit 62 is tilted rightward and the upper part of the coil spring 65 is The pressing force applied to the spring receiving portion 66 due to the elasticity of the coil spring 65 increases rightward of the coil spring 65.
As a result, the movable pressing member 55 is inclined rightward (clockwise) until the first arm 60b contacts the bottom plate 53a of the fixed member 53. For this reason, the second pressing portion 23b pressed the second steel ball 25b downward, the second diaphragm 7b was displaced downward, the second flow path 5b was closed, and the flow of the colored water was shut off.
Therefore, the colored water flowed from the main flow path (not shown) to the first flow path 5a, and flowed out from the first outlet.
As shown in FIG. 11, when the operation unit 61 is rotated clockwise again, the first diaphragm 7a is displaced downward, the first flow path 5a is closed, and the colored water flows into the second flow path 5b. Was.
In the state shown in FIGS. 11 and 12, the compression force applied to the coil spring 65 increases when the inclination of the operation arm 62 decreases due to the rotation of the operation unit 61, and the repulsive force of the coil spring 65 causes the movable pressing member 55 The posture was kept stable.

In this embodiment, similarly to the fifth embodiment, the flow rate can be independently adjusted in the first and second flow paths 5a and 5b. Further, the switching of the flow paths 5a and 5b can be easily performed.
In this embodiment, since the moving mechanism 56 has the coil spring 65, when the movable pressing member 55 is tilted counterclockwise (FIG. 11) or clockwise (FIG. 12). The posture can be maintained stably.
Therefore, the flow rate of the first and second flow paths 5a and 5b can be accurately adjusted by a simple operation of rotating the operation unit 61.
Further, the structure of the pressing mechanism 52 can be simplified.

<Example 7>
FIG. 14 shows a seventh embodiment of the microfluidic device of the present invention. 14A shows a state where the diaphragm is not displaced, and FIG. 14B shows a state where the diaphragm is displaced.
The microfluidic device shown here includes an element body 11 having a flow path 5 and a diaphragm 7 and a pressing mechanism 72 for pressing and displacing the diaphragm 7.
The pressing mechanism 72 includes a fixed member 73 fixed to the element body 11, a movable pressing member 74 fixed to the fixing member 73, and a moving mechanism 75 for displacing the movable pressing member 74.

The fixing member 73 includes a box-shaped base 77 and an intermediate plate 78 provided in the base 77.
The movable pressing member 74 includes a long plate-shaped pressing member main body 80 (length 10 mm, thickness 0.2 mm), and a pressing portion 23 (diameter 2 mm, height 2 mm) provided on the lower surface side of the pressing member main body 80. It has.
The pressing member main body 80 has flexibility and can be elastically bent and deformed.
The pressing member main body 80 has a base end portion 80a fixed to the upper surface of the bottom plate portion 77a of the base portion 77, an intermediate portion 80b extending obliquely upward from the base end portion 80a toward the distal end, and a distal end portion 80c. The pressing portion 23 is provided on the lower surface side of the distal end portion 80c.
The movable pressing member 74 bends the pressing member body 80 so that the steel ball 25 presses the diaphragm 7 from the normal position where the steel ball 25 does not press the diaphragm 7 (FIG. 14A). (B)).

The moving mechanism 75 includes an operation unit 81, a substantially spherical rotation center part 82, and an operation arm 83 extending downward from the rotation center part 82, and is rotatable about the rotation center part 82. Have been.
The operation portion 81 is formed in a rod shape, and is inserted through a hole 77c formed in the upper plate portion 77b.
The rotation center portion 82 is rotatably attached to a receiving portion 77d formed on the upper plate portion 77b.
The operating arm 83 is inserted through an elongated hole 78 a formed in the intermediate plate 78 along the movable pressing member 74.

[Opening / closing test of flow path]
As shown in FIG. 14A, in a state where the operation unit 81 is rotated counterclockwise until the operation arm 83 comes into contact with the peripheral edge of the hole 78a, the pressing member main body 80 is not deformed. , The pressing portion 23 does not press the steel ball 25. In this state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
In this state, when the operation section 81 is to be rotated clockwise, the pressing member main body 80 is pressed downward by the operating arm 83, and the resilient force of the pressing member main body 80 causes the movable pressing member 74 to be in a posture. Maintained stable.

As shown in FIG. 14B, in a state where the operation unit 81 is rotated clockwise until the operation arm 83 comes into contact with the peripheral edge of the hole 78 a, the operation arm 83 is moved to the distal end of the pressing member main body 80. , And presses the intermediate portion 80b downward.
As a result, the pressing member body 80 is bent and deformed downward at the intermediate portion 80b, and the pressing portion 23 moves downward.
For this reason, the pressing portion 23 pressed the steel ball 25 downward, the diaphragm 7 was displaced downward, the flow path 5 was closed, and the flow of the colored water was interrupted.

In this state, since the operation arm 83 is located on the distal end side from the curved portion 80d of the intermediate portion 80b, when the operation unit 81 is rotated in the counterclockwise direction, the pressing member main body 80 is further lowered by the operation arm 83. Will be pressed. Therefore, the posture of the movable pressing member 74 was stably maintained by the repulsive force of the pressing member main body 80.
As shown in FIG. 14A, when the operation unit 81 was rotated counterclockwise again, the pressing member main body 80 was elastically restored to the undeformed state, and the flow of the colored water was recovered.

In the present embodiment, since the pressing portion 23 presses the diaphragm 7 by bending deformation of the pressing member main body 80, the position where the diaphragm 7 is pressed is accurately determined by the pressing mechanism 72 having a simple configuration. be able to.
For this reason, the structure of the microfluidic device can be simplified without lowering the accuracy of the diaphragm pressing positioning. Therefore, the size and cost of the microfluidic device can be reduced.
Further, by stopping the pressing on the pressing member body 80 in the bent and deformed state, the movable pressing member 74 returns to the normal position by the elastic restoring force of the pressing member main body 80. Can be returned to. Therefore, it is possible to quickly change the flow rate set value.

Example 8
FIGS. 15 and 16 show an eighth embodiment of the microfluidic device of the present invention. FIG. 15A shows a state where the diaphragm is not displaced, and FIG. 15B shows a state where the diaphragm is displaced.
The microfluidic device shown here includes a device body 11 and a pressing mechanism 92.
The pressing mechanism 92 includes a cylindrical fixing member 93 fixed to the element body 11, a movable pressing member 95 supported by a support member 94 provided on the fixing member 93, and rotated (oscillated); And a moving mechanism 96 for rotating the 95.
The support member 94 is formed on the bottom plate 93 a of the fixing member 93.

The movable pressing member 95 includes a pressing member main body 97 (length 15 mm, thickness 0.2 mm) and a pressing portion 23 (diameter 2 mm, height 2 mm) provided on the lower surface side of the pressing member main body 97. .
The pressing member body 97 includes a long plate-shaped main portion 98 and a wing portion 99 provided at the center in the length direction of the main portion 98. The wing portions 99 are provided on both sides of the main portion 98, and are supported by the receiving portions 94 a of the support members 94. The pressing member body 97 is configured to rotate around the wing portion 99 as a fulcrum.
Hereinafter, the pressing member body 97 on the base end side (right side in the drawing) with respect to the center portion where the wing portion 99 is formed is referred to as a base end portion 97a, and pressing on the tip side (left side in the drawing) with respect to the center portion. The member main body 97 is referred to as a distal end portion 97b.
The wing-shaped portion 99 includes a plate-shaped base portion 99a projecting laterally from the main portion 98, and a curved plate-shaped tip portion 99b projecting further laterally from the base portion 99a. The distal end portion 99b protrudes downward, and the lower surface side (outer peripheral surface side) is supported by the support member 94.
The pressing portion 23 is provided on the lower surface side of the distal end portion of the pressing member main body 97.

The moving mechanism 96 includes an operation unit 100, a moving mechanism main body 101, and an operating unit 102, and can move in parallel in the direction in which the movable pressing member 95 extends (the left-right direction in the figure).
The operation unit 100 is inserted through a hole 93 c formed in the upper plate 93 b of the fixing member 93. The moving mechanism main body 101 is provided inside the fixed member 93, and is supported by the support portion 93d. The operating portion 102 is formed to protrude downward from the lower surface of the moving mechanism main body 101.

[Opening / closing test of flow path]
As shown in FIG. 15A, when the moving mechanism 96 is moved to the right, the proximal end portion 97a of the pressing member body 97 is pressed downward by the operating portion 102, and the pressing member body 97 is He leaned to the right around 99. In this state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
As shown in FIG. 15B, when the moving mechanism 96 is moved to the left, the distal end portion 97 b of the pressing member main body 97 is pressed downward by the operating section 102, and the pressing member main body 97 is winged. Leaning left around the center.
For this reason, the pressing portion 23 pressed the steel ball 25 downward, the diaphragm 7 was displaced downward, the flow path 5 was closed, and the flow of the colored water was interrupted.
As shown in FIG. 15A, when the moving mechanism 96 was moved rightward again, the pressing member body 97 was inclined rightward, and the flow of the colored water was recovered.

When the operating portion 102 is near the center of the pressing member main body 97, the base portion 99a of the wing portion 99 is elastically bent slightly downward by the pressing by the operating portion 102.
Therefore, in the state shown in FIG. 15A and FIG. 15B (the state in which the operating portion 102 is in the base end portion 97a or the distal end portion 97b), the moving mechanism 96 is moved toward the center of the pressing member body 97. In order to move the pressing member main body 97, the amount of bending deformation of the wing portion 99 increases, so that the posture of the pressing member main body 97 is stably maintained by its elasticity.

In the present embodiment, since the movable pressing member 95 can be rotated by the moving mechanism 96 that can move in parallel to the left and right, the operation of rotating the movable pressing member 95 is easy.
Therefore, the flow rate can be adjusted by an easy operation.

<Example 9>
FIGS. 17 to 20 show a ninth embodiment of the microfluidic device of the present invention. FIG. 17 shows a state where the diaphragm is not displaced, and FIG. 18 shows a state where the diaphragm is displaced.
The microfluidic device shown here includes a device body 11 and a pressing mechanism 112.
The pressing mechanism 112 rotates a fixed member 113 fixed to the element body 11, a movable pressing member 115 supported by a support member 114 provided on the fixed member 113, and rotating (swinging). And a moving mechanism 116 for moving.
The fixing member 113 includes a box-shaped base 117 and a support member 114 formed on the bottom plate 117a of the base 117.
The support member 114 is formed in a U-shaped cross section, and supports the movable pressing member 115 at the receiving portion 114a.

The movable pressing member 115 includes a pressing member main body 120 (length 15 mm, thickness 0.2 mm) and a pressing portion 23 (diameter 2 mm, height 2 mm) provided on the lower surface side of the pressing member main body 120. .
The pressing member main body 120 includes a long plate-shaped main portion 121 and a wing portion 122 provided at the center in the length direction of the main portion 121. The wing portions 122 are provided on both sides of the main portion 121, and are supported by the receiving portions 114 a of the support members 114. The pressing member main body 120 is configured to rotate around the wing portion 122 as a fulcrum.
Hereinafter, the pressing member main body 120 on the base end side (right side in the drawing) with respect to the center portion where the wing portion 122 is formed is referred to as a base end portion 120a, and pressing on the tip side (left side in the drawing) with respect to the center portion. The member main body 120 is referred to as a distal end portion 120b.
The pressing portion 23 is provided on the lower surface side of the distal end portion of the pressing member main body 120.

The moving mechanism 116 includes an operation unit 123, a rotating body 124 that is rotated by the operation unit 123, and an operation arm 125 that rotates the movable pressing member 115.
The operation section 123 includes an elevating body 126, a coil spring 127 (biasing member), and an operation rod 128.
The operation rod 128 includes a frustoconical head 129 provided in a hole 126 a formed in the elevating body 126, and a rod 130 extending downward from the head 129.
The coil spring 127 is formed so as to gradually increase in diameter from the upper end to the lower end. The upper end reaches the lower surface side of the head portion 129 of the operation rod 128, and the lower end extends to the upper plate portion 117 b of the base 117. Has reached.
The rotating body 124 includes a rotating body main body 131 formed in a substantially pentagonal column shape and a rotating shaft 132, and is capable of rotating about the rotating shaft 132.
A switching projection 133 projecting in an inverted V-shape is formed on an upper portion of the rotating body main body 131. Locking recesses 134a and 135a are respectively formed on the first surface 134 which is one surface (the left surface in the drawing) of the switching convex portion 133 and the second surface 135 which is the other surface (the right surface in the drawing). Is formed.
The operating arm 125 is biased downward by a coil spring 136 (biasing member) provided in a hole 131a formed in a lower portion of the rotating body main body 131.

[Opening / closing test of flow path]
As shown in FIG. 17, when the rotating body 124 is rotated in the counterclockwise direction, the base end portion 120 a of the pressing member main body 120 is pressed downward by the operation arm 125, and the pressing member main body 120 is It is inclined to the right (clockwise direction) with the fulcrum as a fulcrum. At this time, the tip of the operation rod 128 is located on the second surface 135. In this state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.

Since the diameter of the coil spring 127 gradually increases downward, the operation rod 128 can be displaced in a direction in which the tip moves left and right with the head 129 as a fulcrum.
For this reason, when the elevating body 126 of the operation section 123 is pressed downward, the operation rod 128 moves downward against the elastic force of the coil spring 127, and the rod section 130 is tilted while its tip is the It descended along the two surfaces 135 and reached the locking recess 135a.
When the elevating body 126 was further pressed, the tip of the rod part 130 was locked in the locking recess 135a, the rod part 130 pressed the second surface 135 downward, and the rotating body 124 was rotated clockwise.
As a result, the distal end portion 120b of the pressing member main body 120 is pressed downward by the operation arm 125, and the pressing member main body 120 is inclined leftward (counterclockwise) about the wing 122.
For this reason, the pressing portion 23 pressed the steel ball 25 downward, the diaphragm 7 was displaced downward, the flow path 5 was closed, and the flow of the colored water was interrupted.
As shown in FIG. 18, when the pressing on the elevating body 126 is stopped, the elevating body 126 moves upward due to the repulsive force of the coil spring 127. At this time, the tip of the operation rod 128 is located on the first surface 134.

When the elevating body 126 is pressed downward again, the tip of the rod portion 130 descends along the first surface 134 of the switching projection 133 to reach the locking recess 134a, and the rod portion 130 presses the first surface 134 downward. The rotating body 124 has rotated in the counterclockwise direction.
As shown in FIG. 17, the pressing member main body 120 was inclined rightward, and the flow of the colored water was recovered.
In the state shown in FIGS. 17 and 18, when the rotating body 124 is rotated, a force in the compression direction is applied to the coil spring 136, so that the posture of the movable pressing member 115 is stably maintained.

In this embodiment, since the movable pressing member 115 can be rotated by operating the operation unit 123, the operation of rotating the movable pressing member 115 is easy. Therefore, the flow rate can be adjusted by an easy operation.
Further, the posture of the movable pressing member 115 can be stably maintained.

<Example 10>
FIG. 21 and FIG. 22 show a tenth embodiment of the microfluidic device of the present invention. 21A shows a state where the diaphragm is not displaced, and FIG. 21B shows a state where the diaphragm is displaced.
The microfluidic device shown here includes the device main body 11 and a pressing mechanism 142.
The pressing mechanism 142 includes a fixed member 143 fixed to the element body 11, a movable pressing member 145 that rotates around a support shaft 144 provided on the fixing member 143, and a moving mechanism 146 that rotates the movable pressing member 145. And
The movable pressing member 145 includes a plate-shaped pressing member main body 147, a cylindrical portion 148 formed at a base end of the pressing member main body 147, and a pressing portion 17 formed on a lower surface of the pressing member main body 147. I have. The movable pressing member 145 is configured to rotate around a support shaft 144 provided on the cylindrical portion 148.
It is desirable that the movable pressing member 145 is urged upward (clockwise) by an urging member (not shown).

The moving mechanism 146 includes a rod-shaped operation unit 151 and a substantially disk-shaped cam 152.
The operation unit 151 is inserted through a hole 143 a formed in the fixing member 143.
The cam 152 is provided with a rotation shaft 153 at a position slightly distant from the center 152a, and rotates around the rotation shaft 153. A flat portion 154 is formed on the periphery of the cam 152.
The flat portion 154 is formed at a position where the distance from the rotation shaft 153 is relatively large. That is, the distance between the flat portion 154 and the rotating shaft 153 is longer than the distance between the flat portion 154 and the center 152a.

[Opening / closing test of flow path]
As shown in FIG. 21A, when the operation unit 151 is rotated clockwise until it comes into contact with the peripheral edge of the hole 143a, the distance between the lowermost part of the cam 152 and the rotation shaft 153 is compared. Since the distance is short, the movable pressing member 145 is not pressed downward. In this state, the diaphragm 7 was not displaced, and the fluid in the flow path 5 flowed without resistance.
As shown in FIG. 21B, in a state where the operation unit 151 is rotated counterclockwise until it comes into contact with the peripheral edge of the hole 143a, the distance between the lowermost portion of the cam 152 and the rotation shaft 153 is reduced. Because of its relatively long length, the movable pressing member 145 was pressed downward by the cam 152. Accordingly, the movable pressing member 145 rotates counterclockwise, the pressing portion 17 presses the diaphragm 7, the diaphragm 7 is displaced downward, the flow path 5 is closed, and the flow of the colored water is shut off. Was. At this time, the cam 152 was positioned by making the flat portion 154 substantially parallel to the pressing member main body 147, and the posture of the movable pressing member 145 was stably maintained.
As shown in FIG. 21A, when the operation unit 151 is rotated clockwise again, the movable pressing member 145 is rotated clockwise, the diaphragm 7 is in the non-displaced state, and the flow of the colored water is reduced. Recovered.

In the present embodiment, since the movable pressing member 145 can be rotated by operating the operation unit 151, the operation of rotating the movable pressing member 145 is easy. Therefore, the flow rate can be adjusted by an easy operation.
Further, since the cam 152 has the flat portion 154, the cam 152 can be positioned in a state where the diaphragm 7 is pressed, and the posture of the movable pressing member 145 can be stably maintained.

<Example 11>
FIG. 23 shows an eleventh embodiment of the microfluidic device of the present invention. 23A shows a state where the diaphragm is not displaced, and FIG. 23B shows a state where the diaphragm is displaced.
The microfluidic device shown here includes an element body 11 and a pressing mechanism 162.
The pressing mechanism 162 includes a fixing member 163 fixed to the element body 11, a movable pressing member 164 fixed to the fixing member 163, and a locking member 165 (locking mechanism) for locking the movable pressing member 164. ing.
The movable pressing member 164 includes a plate-shaped pressing member main body 166 and a pressing portion 17 formed on the lower surface of the pressing member main body 166.
The pressing member main body 166 is formed in a substantially L-shape including a base 167 extending from the fixing member 163 in parallel to the element main body 11 and an extension 168 extending upward from the tip of the base 167.
The pressing portion 17 is formed on the lower surface of the distal end portion 167b of the base 167.
A base end 167 a of the base 167 is fixed to the fixing member 163.
The pressing member main body 166 has flexibility and can be elastically bent and deformed.
For this reason, the movable pressing member 164 has its proximal end (the proximal end 167 a) fixed to the fixing member 163, and its distal end (the distal end portion 167 b) moves up and down (the element main body 11 (Displacement in the direction of approaching and moving away from).
Since the pressing portion 17 is provided on the front end portion 167b, the movable pressing member 164 can press the diaphragm 7 on the front end that can move up and down.
On the front side (the locking member 165 side) of the extending portion 168, a step portion 168a that locks with the locking portion 165a of the locking member 165 is formed.
The movable pressing member 164 prevents the pressing portion 17 from pressing the diaphragm 7 when the pressing member main body 166 is in an undeformed state, and does not press the diaphragm 7 when the pressing member main body 166 is bent and deformed upward. It is configured.

[Opening / closing test of flow path]
As shown in FIG. 23A, by moving the extending portion 168 upward, the base 167 of the pressing member main body 166 is elastically bent and deformed upward, and the step 168a is moved to the position of the locking member 165. In a state where the diaphragm 7 is locked by the locking portion 165a, the pressing portion 17 does not press the diaphragm 7, and the fluid in the flow path 5 flows without resistance.
As shown in FIG. 23B, when the extending portion 168 is moved in a direction away from the locking member 165, the step portion 168a is separated from the locking portion 165a, and the pressing member main body 166 is in an undeformed state.
In this state, the pressing portion 17 descends by the elastic restoring force of the pressing member main body 166 and presses the diaphragm 7 downward, and the displacement of the diaphragm 7 closes the flow path 5 and cuts off the flow of the colored water. Was.
As shown in FIG. 23A, when the extending portion 168 was moved upward and the pressing member main body 166 was bent again, the flow of the colored water was recovered.

In the microfluidic device of the present embodiment, since the movable pressing member 164 is configured to press the diaphragm 7 in an undeformed state, the diaphragm 7 can be reliably displaced by the elastic restoring force of the pressing member main body 166. Can be.
Therefore, the flow rate can be adjusted accurately.

<Example 12>
FIG. 24 shows a twelfth embodiment of the microfluidic device of the present invention.
The microfluidic device shown here includes an element body 181 and a pressing mechanism 192.
The element main body 181 is configured by laminating resin layers 2, 3, and 4 on the base material 1, similarly to the element main body 11, and the resin layer 3 has the flow path 5 having the wide portion 6. . A portion of the resin layer 4 corresponding to the wide portion 6 is a diaphragm 7, and a steel ball 25 a (intermediate member) is adhered to the upper surface of the diaphragm 7.
The pressing mechanism 192 includes a fixed member 193, a movable pressing member 195 that rotates (swings) with respect to the fixed member 193, and a moving mechanism 36 that rotates the movable pressing member 195.
The fixing member 193 includes a base 197, a support member 34 formed on a bottom plate 197 a of the base 197, and a communication plate 38 attached to the base 197.
The base 197 includes a main body 197b having a U-shaped cross section on a bottom plate 197a (plate-like portion). The bottom plate portion 197a has a flat plate shape, and has a length and a width substantially equal to those of the element body 181.
A hole 197c is formed in the bottom plate portion 197a at a position corresponding to the first pressing portion 23a, and the first pressing portion 23a can press the diaphragm 7 via the steel ball 25a through the hole 197c. I have.
The bottom plate portion 197a is provided with a notch 198 at a position corresponding to the luer fittings 10a and 10b.
The movable pressing member 195 has the same configuration as the above-described movable pressing member 35 except that the movable pressing member 195 does not include the second pressing portion 23b.
The pressing mechanism 192 can be attached to the element main body 181 by bringing the lower surface of the bottom plate portion 197a into close contact with the upper surface of the resin layer 4.
The pressing mechanism 192 is detachable from the element main body 181.

[Opening / closing test of flow path]
The element main body 181 was fixed on a stage (not shown) using a positioning pin (not shown), and the pressing mechanism 192 was superimposed on the element main body 181 such that the positions of the hole 197c and the diaphragm 7 coincided with each other. .
A flow channel opening / closing test was performed in the same manner as in Example 5. When the diaphragm 7 was displaced by the pressing mechanism 192, the flow of the colored water was interrupted, and when the pressing by the pressing mechanism 192 was stopped and the diaphragm 7 was brought into the non-displaced state, the flow of the colored water was recovered.

  In this embodiment, since the pressing mechanism 192 is detachable from the element body 181, the pressing mechanism 192, which is a relatively expensive component, can be removed from the used microfluidic element and reused. Therefore, the manufacturing cost of the microfluidic device can be reduced.

<Example 13>
FIGS. 25 and 26 show another example of an element body that can be used in the microfluidic element of the present invention.
The element body 171 shown here is configured by sequentially laminating a first resin layer 172, a second resin layer 173, a third resin layer 174, and a fourth resin layer 175 on the base material 1.
The first resin layer 172 is formed of a cured product of the energy ray-curable composition [e1] having a thickness of 98 μm, and has a linear defect part (width 150 μm) that becomes the flow channel 176.
The third resin layer 174 is formed of a cured product of the energy ray-curable composition [e1] having a thickness of 98 μm, and has a linear defect portion (width 150 μm) serving as the flow channel 177. A circular wide portion 6 having a diameter of 600 μm is formed at one end of the defective portion.
The second resin layer 173 is formed of a cured product of the energy ray-curable composition [e1] having a thickness of 98 μm, and has a circular shape of 200 μm in diameter serving as a communication flow channel 178 that connects the flow channel 176 and the flow channel 177. It has a through hole.
The fourth resin layer 175 is formed of a cured product of the energy ray-curable composition [e2] having a thickness of 98 μm, and a portion corresponding to the wide portion 6 of the third resin layer 174 becomes the diaphragm 7.
An inlet 8 (0.5 mm in diameter) is formed in the resin layer 173, 174, or 175 at a position corresponding to the end of the flow path 176, and the fourth resin layer 175 (diameter The outlet 9 was formed at 0.5 mm).

  A microfluidic device was manufactured in the same manner as in Examples 1 to 11, except that the element body 171 was used instead of the element body 11 or 31. However, when the pressing mechanisms 32, 52 (see FIGS. 6 to 13) are employed, one of the two pressing portions 23a, 23b presses the diaphragm 7.

[Opening / closing test of flow path]
When the opening and closing test of the flow channel was performed in the same manner as in Examples 1 to 11, when the diaphragm 7 was displaced by the pressing mechanism, the diaphragm 7 came into contact with the peripheral portion of the communication flow channel 178, and the communication flow channel 178 was closed. The flow of colored water was cut off.
When the pressing by the pressing mechanism was stopped and the diaphragm 7 was not displaced, the flow of the colored water was recovered.

It is a top view (a) and a side view (b) of the microfluidic device of the present invention shown as a 1st example. FIG. 2 is a longitudinal sectional view of the microfluidic device shown in FIG. 1. FIG. 5 is a cross-sectional view illustrating a main part of the microfluidic device of the present invention shown as a second embodiment. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 3rd Example. It is the top view (a) of a microfluidic device of the present invention shown as a 4th example, and a longitudinal section (b) and (c). It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 5th Example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 5th Example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 5th Example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a fifth example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a fifth example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as the 6th Example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as the 6th Example. FIG. 14 is an exploded perspective view showing the structure of the microfluidic device pressing mechanism of the present invention shown as a sixth embodiment. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as the 7th Example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 8th Example. It is an exploded perspective view showing the structure of the pressing mechanism of the micro fluidic device of the present invention shown as an 8th example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 9th Example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 9th Example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a ninth example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a ninth example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 10th Example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a tenth example. It is sectional drawing which shows the principal part of the microfluidic device of this invention shown as 11th Example. It is an exploded perspective view showing the structure of the pressing mechanism of the microfluidic device of the present invention shown as a twelfth embodiment. FIGS. 4A and 4B show another example of a microfluidic device main body that can be used in the microfluidic device of the present invention, wherein FIG. 4A is a plan view and FIG. FIG. 26 is an exploded perspective view showing the structure of the microfluidic device body shown in FIG. 25.

Explanation of reference numerals

5, 176, 177, 178 ... flow path 5a ... first flow path 5b ... second flow path,
7 diaphragm 7a first diaphragm 7b second diaphragm 11, 31, 171, 181 microfluidic device main body 12, 27, 32, 52, 72, 92, 112, 142 , 162, 192 ... pressing mechanism 15, 29, 35, 55, 74, 95, 115, 145, 164 ... movable pressing member 21, 26, 165 ... locking member (lock mechanism)
24 ... buffer members 25, 25a, 25b ... steel balls (intermediate members)
36, 56, 75, 96, 116, 146 moving mechanism 40b, 60b first arm 40c, 60c second arm 41, 61, 81, 100, 123, 151 operating unit 65 ... Coil spring (biasing member)

Claims (15)

A microfluidic device main body (11) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5), and a pressing mechanism for pressing and displacing the diaphragm (7) (12)
The pressing mechanism (12) includes a movable pressing member (15) displaceable with respect to the microfluidic device main body (11) by rotating, and presses the diaphragm (7) by the movable pressing member (15). A microfluidic device characterized by being configured so as to be able to perform the method. A microfluidic device main body (11) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5), and a pressing mechanism for pressing and displacing the diaphragm (7) (27)
The pressing mechanism (27) includes a movable pressing member (29) that can be displaced with respect to the microfluidic device main body (11) by elastic bending deformation, and presses the diaphragm (7) by the movable pressing member (29). A microfluidic device characterized in that it is configured to be capable of The said pressing mechanism (32) is comprised so that the attitude | position of a movable pressing member (35) can be maintained in the position which presses at least one of the said diaphragms (7), and the position which does not press. Or the microfluidic device according to 2. The said pressing mechanism (12) has a lock mechanism (21) which a movable pressing member (15) locks in the position which presses at least one of the said diaphragms (7), or the position which does not press. The microfluidic device according to claim 1. The pressing mechanism (32) includes a moving mechanism (36) for displacing the movable pressing member (35), and the moving mechanism (36) can be rotated with respect to the movable pressing member (35). 5. The microfluidic device according to claim 1, wherein the movable pressing member (35) is displaceable by rotating the operation unit (41). 6. . An urging member (65) is provided between the operation unit (61) and the movable pressing member (55), and the urging member (65) presses at least one of the diaphragms (7a, 7b). 6. The microfluidic device according to claim 5, wherein the elasticity of the movable pressing member (55) allows the posture of the movable pressing member (55) to be maintained at the position and the position where no pressing is performed. The pressing mechanism (92) includes a moving mechanism (96) for displacing the movable pressing member (95), and the moving mechanism (96) is movable in parallel with the movable pressing member (95). The microfluidic device according to any one of claims 1 to 4, wherein the movable pressing member (95) can be displaced by the parallel movement of the (96). The movable pressing member (35) includes first and second arms (40b, 40c), and these arms (40b, 40c) are configured to be able to press different diaphragms (7a, 7b). The microfluidic device according to claim 1. The microfluidic device main body (31) has first and second flow paths (5a, 5b) branched from a main flow path,
The diaphragm has a first diaphragm (7a) displaceable with respect to the first flow path (5a) and a second diaphragm (7b) displaceable with respect to the second flow path (5b),
The first and second arms (40b, 40c) are configured such that when one of these arms presses one of the diaphragms, the other arm does not press the other of the diaphragms. A microfluidic device according to claim 8. 10. The movable pressing member (15) according to any one of claims 1 to 9, wherein the movable pressing member (15) is configured to be able to press the diaphragm (7) via a buffer member (24) deformable by pressing. A microfluidic device as described. An intermediate member (25) is provided between the movable pressing member (15) and the diaphragm (7), and the movable pressing member (15) presses the diaphragm (7) via the intermediate member (25). The microfluidic device according to any one of claims 1 to 10, wherein the microfluidic device is configured to be able to perform the operation. The microfluidic device according to claim 11, wherein the intermediate member (25) is fixed to the diaphragm (7). The microfluidic device according to any one of claims 1 to 12, wherein the pressing mechanism is detachable from the microfluidic device body. A pressing mechanism for pressing and displacing the diaphragm (7) of a microfluidic device main body (181) having a capillary channel (5) and a diaphragm (7) displaceable with respect to the channel (5). (192)
A movable pressing member (195) that is displaceable with respect to the microfluidic device body (181) by rotating is provided, and the diaphragm (7) can be pressed by the movable pressing member (195). A pressing mechanism (192). A method for adjusting a fluid flow rate in a flow path of a microfluidic device according to any one of claims 1 to 13, wherein the flow rate is adjusted by adjusting a displacement amount of a movable pressing member. Characteristic flow control method.

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