JP2004266872A - Oscillating piece, vibrator, oscillator, and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibrating piece in which variation of the CI value is stabilized among vibrating piece elements, even if the base part is shortened, and the entire vibrating piece is reduced in size, and also to provide a vibrator having the piece, and an oscillator and electronic equipment comprising the vibrator. <P>SOLUTION: The vibrating piece comprises a base part, and a vibrating arm part projecting therefrom, wherein a groove is provided in the surface part and/or the rear side part of the vibratory arm part and a cut is made in the base part. Even if the vibratory arm part generates vibration having a vertical component, the vibration is prevented from leaking to the base part side by the notch. Consequently, the variation in the CI value is stabilized among vibrating piece elements, while reducing the size of the base part. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a vibrating piece made of, for example, quartz or the like, a vibrator having the vibrating piece, an oscillator including the vibrator, and an electronic device.

Conventionally, a tuning-fork type quartz vibrating piece, which is a vibrating piece, is configured as shown in FIG. 12, for example.
That is, the tuning-fork type crystal vibrating piece 10 has a base 11 and two arms 12 and 13 protruding from the base 11. Grooves 12a and 13a are formed on the surfaces of the parts 12 and 13 of the two brains. This groove is also formed on the back side of the arms 12 and 13 in FIG.
For this reason, as shown in FIG. 13 which is a cross-sectional view taken along the line AA ′ of FIG. 12, the arms 12 and 13 have a substantially H-shaped cross-sectional shape.

In such a substantially H-shaped tuning-fork type quartz vibrating piece 10, even if the size of the vibrating piece is reduced, the vibration loss of the arms 12 and 13 is low and the CI value (crystal impedance or equivalent series resistance) is also low. It has the characteristic that it can be.
For this reason, the substantially H-shaped tuning-fork type quartz vibrating piece 10 is applied to, for example, a vibrator which is required to have high precision performance even if it is particularly small.
The size of the substantially H-shaped tuning-fork type quartz vibrating piece 10 is, for example, as shown in FIG. 12, the length of the arms 12 and 13 is 1.644 mm and the width is 0.1 mm. , 13 are formed with grooves 12a, 13a having a width of 0.07 mm.
Further, the base 11 has a vertical length of 0.7 mm in the figure.

Even in the case of the extremely small tuning-fork type quartz vibrating reed 10 as described above, further miniaturization is required in order to respond to recent demands for miniaturization of devices such as electric equipment.
In order to meet the demand for miniaturization, if the length of the base 11 in the vertical direction in FIG. 12 is made shorter than 0.7 mm, the length of the resonator element 10 as a whole is shortened, and the resonator element 10 is downsized. It was the best, but had the following problems.
That is, unless the length of the base portion 11 is set to 40% or more of the length of the arm portions 12 and 13 in general, the influence of the fixed variation of the resonator element is likely to occur, and the CI value variation between the resonator element elements is likely to occur. was there.
Specifically, as shown in FIG. 13, when the thickness of the arms 12 and 13 is D, the width of the arms 12 and 13 is W, and the length of the arms 12 and 13 is L, the tuning-fork type crystal vibrating piece is used. The frequency f of 10 is
f∝W / L2 Equation 1
Must be satisfied. That is, the shorter the length L of the arms 12 and 13 of the vibrating reed 10, the smaller the width W of the arms 12 and 13.

The tuning-fork type quartz vibrating piece 10 shown in FIG. 12 has a very small width L of 0.1 mm because the length L of the arms 12 and 13 is as short as 1.644 mm because the size is reduced as described above. I have. Further, the thickness D of the arms 12, 13 is also 0.1 mm.
By the way, as shown in FIG. 14A, if the width W is long and the thickness D is short, the arms 12 and 13 of the tuning-fork type quartz vibrating piece 10 have a normal horizontal vibration as shown by an arrow B in the figure. Will be done.
However, when the width W is shortened as described above, as shown in FIG. 14B, a component in the vertical direction (the direction of arrow C in the figure) is included, and is indicated by an arrow E in FIG. 14B. The arms 12 and 13 vibrate in the directions.
This is because the vertical vibration component displacement (nm) increases rapidly when the width W / thickness D of the arms 12 and 13 is smaller than 1.2, as is apparent from the diagram shown in FIG. I understand.

As described above, when the vertical components of the vibration of the arms 12 and 13 increase and the arms 12 and 13 move, the vibration is transmitted to the base 11 of the vibrating reed 10 and the base 11 for fixing the vibrating reed 10 to a package or the like. The energy escapes from the adhesive or the like in the fixing region.
When the vibration leaks to the base 11 and the energy escapes from the fixing area of the base 11, the vibration of the arms 12 and 13 becomes unstable depending on the vibrating reed due to the variation of the fixing of the vibrating reed. The variation of the CI value between the devices was large.
In order to prevent such leakage of vibration of the arms 12 and 13 and escape of energy from the fixed region of the base 11, the length of the arms 12 and 13 should be 40% or more of the length L as described above. At the base 11. Therefore, this has been an obstacle to downsizing the resonator element 10 itself.

  In view of the above problems, the present invention has been made in consideration of the above-described problem. Even when the base portion is shortened, the variation between the CI elements of the resonator element is stabilized, and the entire resonator element can be reduced in size, a resonator having the resonator, an oscillator including the resonator, An object is to provide an electronic device.

  The object is a vibrating reed having a base and a vibrating arm formed so as to protrude from the base, wherein a groove is formed on a surface portion and / or a back surface of the vibrating arm, This is achieved by a vibrating reed, wherein a cut portion is formed in the base.

  According to this configuration, since the notch is formed in the base, even when vibration having a vertical component occurs when the vibrating arm vibrates, the vibration of the vibrating arm leaks to the base side. Can be alleviated by the cut portion. Therefore, it is possible to stabilize the variation of the CI value between the resonator element elements while reducing the size of the base.

  Preferably, the vibrating reed is characterized in that the vibrating arm is a substantially rectangular parallelepiped, and the width of the arm, which is the short side of the surface, is 50 μm or more and 150 μm or less.

  The vibrating arm has a substantially rectangular parallelepiped shape, and the width of the arm, which is a short side of the surface, is 50 μm or more and 150 μm or less. In such a vibrating reed as well, the provision of the notch allows the base to be reduced in size and the entire vibrating reed to be miniaturized. Variations between elements can be stabilized.

  Preferably, grooves are formed on the front surface portion and the back surface portion of the vibrating arm portion, and the depth of any of the groove portions provided on the front surface portion or the back surface portion is the depth of the vibrating arm portion. The resonator element is formed to have a depth of 30% or more and less than 50% of a thickness that is the entire length in the direction.

  The depth of any of the grooves provided on the front surface portion or the back surface portion is formed to a depth of 30% or more and less than 50% with respect to the thickness of the vibrating arm in the depth direction. Therefore, the CI value can be suppressed to 100 KΩ or less, which is the practical upper limit, even in a micro vibrating piece. Further, by providing the cut portions, it is possible to stabilize the variation of the CI value between the resonator element elements.

Preferably, the depth of any one of the groove portions provided on the front surface portion or the rear surface portion is set to a depth of 40% or more and less than 50% with respect to a thickness that is a total length in a depth direction of the vibrating arm portion. It is a vibrating reed characterized by being formed.
The depth of any of the groove portions provided on the front surface portion or the rear surface portion is formed to a depth of 40% or more and less than 50% with respect to the thickness that is the entire length in the depth direction of the vibrating arm portion. Therefore, even in a micro vibrating piece, the CI value can be accurately suppressed to 100 KΩ or less, which is the practical upper limit.

Preferably, the vibrating reed is characterized in that a groove width, which is a short side of the opening of the groove, is 40% or more of the arm width of the vibrating arm.
Since the groove width, which is the short side of the opening of the groove, is 40% or more of the arm width of the vibrating arm, the CI value can be suppressed to 100 KΩ or less, which is the practical upper limit. Further, by providing the cut portions, it is possible to stabilize the variation of the CI value between the resonator element elements.

Preferably, the vibrating reed is characterized in that the groove width is formed to be 70% or more and less than 100% of the arm width.
Since the groove width is formed to be 70% or more and less than 100% of the arm width, the provision of the cut portion can further stabilize the variation in the CI value between the resonator element elements.

  Preferably, the base has a fixing region for fixing the vibrating reed, and the notch is provided at a base between the fixing region and the vibrating arm. It is a characteristic resonator element.

  The notch is provided at a base between the fixed area and the vibrating arm. Therefore, the cut portion is arranged at a position where it does not hinder the vibration of the vibrating arm portion, and effectively prevents the vibration leakage from being transmitted to the fixed region and causing energy to escape. Therefore, the variation of the CI value between the resonator element elements is stabilized.

  Preferably, the vibrating reed is a tuning fork vibrating reed formed of quartz oscillating at about 30 KHz to about 40 KHz.

  By providing the notch in the tuning-fork type vibrating piece, in which the vibrating piece is formed of quartz oscillating at about 30 KHz to about 40 KHz, the base can be reduced in size, the entire tuning fork-type vibrating piece can be reduced in size, and the CI value can be reduced. Variations between the resonator element elements can be stabilized.

  The object is a vibrator, in which a vibrating reed having a base and a vibrating arm formed to protrude from the base is housed in a package, wherein a surface of the vibrating arm of the vibrating reed is provided. This is achieved by a vibrator characterized in that a groove is formed in a portion and / or a back surface, and a cut portion is formed in the base.

  Since the notch is formed in the base of the vibrating reed, when the vibrating arm vibrates, even if vibration having a vertical component occurs, the vibration of the vibrating arm leaks to the base side. These cuts can alleviate the problem. Therefore, a vibrator having a vibrating reed that can stabilize the variation of the CI value between the vibrating reed elements while reducing the size of the base portion.

  Preferably, the vibrator is characterized in that the vibrating arm of the vibrating reed is a substantially rectangular parallelepiped, and the width of the arm, which is the short side of the surface, is 50 μm or more and 150 μm or less.

  The vibrating arm of the vibrating reed has a substantially rectangular parallelepiped shape, and the width of the arm, which is a short side of the surface, is 50 μm or more and 150 μm or less. In such a vibrating reed as well, the provision of the notch allows the base to be reduced in size and the entire vibrating reed to be miniaturized. Variations between elements can be stabilized.

  Preferably, a groove is formed on a front surface portion and a back surface portion of the vibrating arm portion of the vibrating reed, and the depth of any one of the groove portions provided on the front surface portion or the back surface portion is equal to the vibration arm. A vibrator characterized in that the vibrator is formed at a depth of 30% or more and less than 50% with respect to the thickness that is the entire length of the portion in the depth direction.

  The depth of any of the grooves provided on the front surface portion or the rear surface portion of the vibrating reed is 30% or more and less than 50% of the thickness of the vibrating arm portion, which is the total length in the depth direction. Therefore, the CI value can be suppressed to 100 KΩ or less, which is the practical upper limit, even in a micro vibrating piece. In addition, by providing the cut portion, the vibrator can stabilize the variation of the CI value between the resonator element elements.

Preferably, the depth of any one of the groove portions provided on the front surface portion or the rear surface portion of the vibrating reed is 40% or more and less than 50% with respect to the total thickness in the depth direction of the vibrating arm portion. The vibrator is formed at a depth of.
The depth of any of the groove portions provided on the front surface portion or the rear surface portion is formed to a depth of 40% or more and less than 50% with respect to the thickness that is the entire length in the depth direction of the vibrating arm portion. Therefore, even in a micro vibrating piece, the CI value can be accurately suppressed to 100 KΩ or less, which is the practical upper limit.

Preferably, the vibrator is characterized in that a groove width, which is a short side of the opening of the groove of the vibrating reed, is 40% or more of the arm width of the vibrating arm.
Since the groove width, which is the short side of the opening of the groove of the vibrating reed, is 40% or more of the arm width of the vibrating arm, the CI value is suppressed to 100 KΩ or less, which is the practical upper limit. A vibrator that can perform In addition, by providing the cut portion, the vibrator can stabilize the variation of the CI value between the resonator element elements.

  Preferably, the vibrator is characterized in that the groove width of the vibrating reed is formed to be 70% or more and less than 100% of the arm width.

  Since the groove width of the vibrating reed is formed to be 70% or more and less than 100% of the width of the arm portion, by providing the cut portion, the variation of the CI value between the vibrating reed elements can be stabilized. Vibrator.

  Preferably, the base of the vibrating reed is provided with a fixing region for fixing the vibrating reed, and the notch is provided on a base between the fixing region and the vibrating arm. A vibrator characterized in that:

  The notch of the vibrating reed is provided at a base between the fixed area and the vibrating arm. Therefore, the cut portion is arranged at a position where it does not hinder the vibration of the vibrating arm portion, and effectively prevents the vibration leakage from being transmitted to the fixed region and causing energy to escape. For this reason, the resonator has a stable CI value variation between the resonator element elements.

  Preferably, the vibrating piece is a tuning fork vibrating piece formed of quartz oscillating at about 30 KHz to about 40 KHz.

  By providing the notch in the tuning-fork type vibrating piece made of quartz oscillating at about 30 KHz to about 40 KHz, the base can be reduced in size, the tuning fork-type vibrating piece and the entire vibrator can be reduced in size, and the vibration of the CI value can be reduced. Variation between one element can also be stabilized.

  Preferably, the vibrator is characterized in that the package is formed in a box shape.

  The resonator in which the package is formed in a box shape can be reduced in size, and the variation of the CI value of the resonator element between the resonator element elements can be stabilized.

  Preferably, the vibrator is characterized in that the package is formed in a so-called cylinder type.

  It is possible to reduce the size of the vibrator or the vibrating reed in which the package is formed in a so-called cylinder type, and to stabilize the variation of the CI value of the vibrating reed between the vibrating reed elements.

  The object is an oscillator in which a vibrating reed having a base and a vibrating arm formed so as to protrude from the base and an integrated circuit are housed in a package. This is achieved by an oscillator characterized in that a groove is formed on a front surface portion and / or a rear surface portion, and a cut portion is formed in the base portion.

  Since the notch is formed in the base of the vibrating reed, when the vibrating arm vibrates, even if vibration having a vertical component occurs, the vibration of the vibrating arm leaks to the base side. These cuts can alleviate the problem. Therefore, the oscillator can stabilize the variation between the resonator element of the CI value while reducing the size of the base and the oscillator.

  The object is a vibrating reed having a base and a vibrating arm formed so as to protrude from the base. The vibrating reed is a vibrator housed in a package. An electronic device connected to the vibrating reed, wherein a groove is formed on a front surface portion and / or a back surface portion of the vibrating arm portion of the vibrating reed, and a cut portion is formed on the base portion. Achieved by the featured electronic equipment.

Since the notch is formed in the base of the vibrating reed, when the vibrating arm vibrates, even if vibration having a vertical component occurs, the vibration of the vibrating arm leaks to the base side. These cuts can alleviate the problem.
Therefore, it is possible to reduce the size of the electronic device while reducing the size of the base, and to stabilize the variation of the CI value between the resonator element elements.

  As described above, according to the present invention, even when the base portion is shortened, the variation of the CI value between the resonator element elements is stabilized, and the entire resonator element can be reduced in size, the resonator having the resonator, and the resonator And an electronic device including the same.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Note that the embodiments described below are preferred specific examples of the present invention, and therefore, various technically preferable limitations are given. However, the scope of the present invention particularly limits the present invention in the following description. It is not limited to these forms unless otherwise stated.

(First Embodiment)
FIG. 1 is a diagram showing a tuning-fork type quartz vibrating piece 100 which is a vibrating piece according to the first embodiment of the present invention.
The tuning-fork type crystal vibrating piece 100 is formed by cutting out a single crystal of quartz to form, for example, a so-called quartz Z plate. In addition, the tuning-fork type quartz vibrating piece 100 shown in FIG. 1 is a vibrating piece that transmits a signal at, for example, 32.768 KHz, and thus is a very small vibrating piece.
Such a tuning-fork type quartz vibrating piece 100 has a base 110 as shown in FIG. Two tuning fork arms 121 and 122 as vibrating arms are arranged so as to protrude upward from the base 110 in the figure.
Grooves 123 and 124 are formed on the front and back surfaces of the tuning fork arms 121 and 122 as shown in FIG. Since the grooves 123 and 124 are also formed on the back surfaces of the tuning fork arms 121 and 122 not shown in FIG. 1, the grooves 123 and 124 are substantially formed in the FF ′ cross-sectional view of FIG. 1 as shown in FIG. H-shaped.

By the way, the entire base 110 of the tuning-fork type quartz vibrating piece 100 is formed in a substantially plate shape. In the figure, the length in the vertical direction is formed to be, for example, 0.56 mm.
On the other hand, in the drawings of the tuning fork arms 121 and 122 protruding from the base portion 110, the length in the vertical direction is formed to be, for example, 1.644 mm.
Therefore, the length of the base 110 with respect to the tuning fork arms 121 and 122 is about 34%. On the other hand, the conventional tuning-fork type quartz vibrating piece 10 has a base 11 having a length of 0.7 mm and arms 12 and 13 having a length of 1.644 mm as shown in FIG. The height is about 42.6% of the length of the arms 12 and 13, which exceeds 40%.
By setting the length of the base portion 11 to be 40% or more of the length of the arm portions 12 and 13 as described above, vibration occurs due to vibration of the arm portions 12 and 13 as described above. This prevents the variation of the CI value between the resonator element elements from increasing.

On the other hand, the length of the base 110 of the tuning-fork type quartz vibrating piece 100 of the present embodiment is formed to be 34% of the length of the tuning fork arms 121 and 122 as described above. In a configuration similar to that of the conventional tuning-fork type quartz vibrating piece 10, vibration leakage occurs due to the vibration of the tuning fork arms 121 and 122, and the variation of the CI value between the vibrating piece elements increases.
However, in the present embodiment, two notches 125 are provided on both sides of the base 110 as shown in FIG.
FIG. 3 shows this state. FIG. 3 is a schematic perspective view showing an arrangement state of the cut portions 125 of the base 110 of FIG.
As shown in FIG. 3, the cut portion 125 is formed in a rectangular shape.
As shown in FIG. 1, such cuts 125 are formed from 0.113 mm below the upper end of the base 110 and downward.

FIG. 4 shows an arrangement condition of the cut portion 125 in the base portion 110. In FIG. 4, the length from the bottom surface of the base 110 to the upper end of the base 110, specifically, the crotch between the two tuning fork arms 121 and 122 is A1.
The length from the bottom surface of the base 110 to the upper end of the cutout 125 is defined as A2.
When the length from the bottom of the base 110 to the lower ends of the grooves 123 and 124 formed in the tuning fork arms 121 and 122 is A3, the notch is formed so that the length of A3 is longer than the length of A2. 125 is formed.
The length of A3 is the same as the length of A1, or the length of A3 is formed to be longer than the length of A1. Therefore, the grooves 123 and 124 are not formed on the bottom side of the base 110 from the bases of the tuning fork arms 121 and 122.

From the above relationship, the position of the notch 125 formed in the base 110 is always disposed below the lower ends of the grooves 123 and 124 of the tuning fork arms 121 and 122.
Therefore, the presence of the cut portion 125 does not hinder the vibration of the tuning fork arms 121 and 122.
The hatched portion in FIG. 4 is a fixing region 111 that is actually fixed when the tuning-fork type quartz vibrating piece 100 is fixed in a package. A4 indicates the length between the upper end of the fixing region 111 and the bottom of the base 110.
The positional relationship between the fixed region 111 and the cut portion 125 is such that the length of A2 is always longer than the length of A4.
Therefore, since the upper end of cut portion 125 is always arranged above fixing region 111 in FIG. 4, cut portion 125 does not affect fixing region 111 and fixing of tuning-fork type quartz vibrating piece 100 to the package is performed. Does not adversely affect the condition.

As described above, the cut portion 125 provided in the base 110 is provided at a position where the vibration of the tuning fork arms 121 and 122 of the tuning fork type quartz vibrating piece 100 is not adversely affected. Further, the cut portion 125 is also provided at a position where the fixing state of the tuning fork type quartz vibrating piece 100 to the package is not adversely affected.
The notch 125 provided at such a position is provided on the base 110 side below the positions of the grooves 123 and 124 of the tuning fork arms 121 and 122. For this reason, the leakage vibration leaked from the grooves 123 and 124 due to the vibration of the tuning fork arms 121 and 122 is less likely to be transmitted to the fixing region 111 of the base 110 by the notch 125.
Therefore, leakage vibration is transmitted to the fixed region 111, energy escape is unlikely to occur, and the variation between the conventional resonator elements of the CI value has occurred at a standard deviation of 10 KΩ or more. It has dropped dramatically.

As described above, it is possible to stabilize the variation of the CI value between the resonator element elements. Therefore, as in the case of the conventional tuning-fork type crystal resonator element 10, the length of the base part 11 is set to 40 times the length of the arm parts 12 and 13. It does not need to be more than%.
In the present embodiment, as shown in FIG. 1, the length of the base 110 of the tuning-fork type quartz vibrating piece 100 is formed to be 34% of the length of the tuning-fork arms 121 and 122 as described above. However, vibration leakage due to the vibration of the tuning fork arms 121 and 122 is unlikely to occur, and the variation between the resonator element elements of the CI value is stabilized. Thereby, the length of the base 110 can be shortened, and the size of the tuning-fork type quartz vibrating piece 100 can be reduced.
In the present embodiment, the length of the base 110 can be 0.56 mm as shown in FIG. 1, and the length of the base 11 of the conventional tuning-fork type quartz vibrating piece 10 shown in FIG. It is possible to make it significantly smaller.

The tuning fork arms 121, 122 shown in FIG.
Each of the tuning fork arms 121 and 122 has a width of 0.1 mm as shown in FIG. The reason why the arm widths of the tuning fork arms 121 and 122 are remarkably reduced in this way is that the length (L) of the tuning fork arms 121 and 122, as described in detail in the above-described equation (1), “f∝W / L2”. ) Was shortened.
That is, in order to shorten the length of the tuning fork arms 121 and 122 to 1.644 mm as shown in FIG. 1, the arm width needs to be 0.1 mm from the above equation 1, and therefore the arm width is 0.1 mm. It is what it was.
However, when the arm width of the tuning fork arms 121 and 122 is 0.1 mm, the CI value may increase.
Therefore, in the present embodiment, grooves 123 and 124 are provided on the front and back surfaces of tuning fork arms 121 and 122, as shown in FIG.

FIG. 5 is a diagram showing the relationship between the width of the tuning fork arms 121 and 122 and the CI value when the groove width is 70% of the arm width. As shown in FIG. 5, a tuning fork arm having no groove portion indicated by a two-dot chain line exceeds a practical CI value of 100 KΩ when the arm width is narrower than 0.15 mm, and has a tuning fork type crystal resonator that cannot withstand practical use. Become.
However, the tuning-fork type quartz vibrating piece 100 of the present embodiment has grooves 123 and 122 on the front and back surfaces of the tuning-fork arms 121 and 122 as shown in FIG. Even if the arm width of 123 and 124 is 0.1 mm, it falls within 100 KΩ which is a practical CI value, and it becomes a practical vibrating reed.
Further, in FIG. 5, if the depth of the groove is set within 45% with respect to the thickness direction of the tuning fork arms 121 and 122, the CI value of the resonator element is practical even if the arm width is 0.05 mm. It falls within the CI value of 100 KΩ.

By providing the grooves 123 and 124 on the front and back surfaces of the tuning fork arms 121 and 122, it is possible to suppress an increase in the CI value. However, the depth of the grooves 123 and 124 is It needs to be 30% or more and less than 50% of the thickness.
FIG. 6 is a diagram showing the relationship between the groove depth (one side surface) and the CI value when the groove width is 70% of the arm width. As shown in FIG. 6, if the depth of the grooves 123 and 124 is 30% or more and less than 50% of the thickness of the tuning fork arms 121 and 122, the CI value falls within a practical range of 100 KΩ.
On the other hand, when the depth of the grooves 123 and 124 is set to 50% or more, the grooves 123 and 124 are provided on the front and back surfaces of the tuning fork arms 121 and 122, so that the grooves 123 and 124 become through holes and oscillate at a frequency different from a desired frequency. Become.
By the way, as shown in FIG. 6, when the depth of the groove portions 123 and 124 is set to 40% or more and less than 50%, the CI value is not only within a practical 100 KΩ but also stabilized.
The groove portions 123 and 124 in the present embodiment are each set to 0.045 mm, which is 45% of the thickness direction of the tuning fork arms 121 and 122.

Further, in the present embodiment, the groove width of the groove portions 123 and 124 provided on the front and back surfaces of the tuning fork arms 121 and 122 is set to 0.07 mm. The groove width of 0.07 mm is 70% of the arm width of the tuning fork arms 121 and 122 of 0.1 mm.
FIG. 7 shows the relationship between the ratio of the groove width to the arm width and the CI value. As shown in FIG. 7, if the groove width is 40% or more of the arm width, it falls within a practical CI value of 100 KΩ.
Then, if the groove width is formed to be 70% or more of the arm width, as shown in FIG. 7, the variation in the CI value between the resonator element elements is stabilized.

In the tuning-fork type quartz vibrating piece 100 of the present embodiment configured as described above, electrodes and the like (not shown) are placed at predetermined positions, placed in a package or the like, and when a voltage is applied, the tuning-fork arm 121 , 122 vibrate, and at this time, the arm width and the thickness of the tuning fork arms 121, 122 are both set to 0.1 mm as described above.
Therefore, as shown in FIG. 13B, vibration of a vertical component is applied, and the tuning fork arms 121 and 122 vibrate. This vibration is reduced by the notch 125 of the base 110, and energy is removed from the fixed region 111 of the base 110. Escape, vibration leakage, and an increase in the CI value among the resonator element elements can be prevented from increasing.
Further, since the cut portion 125 is disposed in a portion of the base 110 which does not hinder the vibration of the tuning fork arms 121 and 122 and does not affect the fixing of the fixing region 111 of the base 110, the cut portions 125 of the tuning fork arms 121 and 122 are formed. The vibration and the fixing of the tuning-fork type quartz vibrating piece 100 to the package are not affected.

Further, since the length of the base 110 can be made shorter than that of the conventional vibrating reed, the tuning fork type quartz vibrating reed 100 can be downsized, and the vibrator or the like on which such a vibrating reed is mounted can be downsized. Is what makes it possible.
The downsized tuning-fork type quartz vibrating piece 100 is not only within the practical CI value of 100 KΩ but also has grooves 123 and 124 so that the variation of the CI value between the vibrating piece elements is stabilized. By adjusting the depth and groove width, a more precise micro-resonator element can be obtained.

(Second embodiment)
FIG. 8 is a view showing a ceramic package tuning-fork vibrator 200 which is a vibrator according to the second embodiment of the present invention.
The ceramic package tuning-fork vibrator 200 uses the tuning-fork type quartz vibrating piece 100 of the above-described first embodiment. Therefore, the configuration, operation, and the like of the tuning-fork type quartz vibrating piece 100 are denoted by the same reference numerals, and description thereof is omitted.
FIG. 8 is a schematic cross-sectional view showing the configuration of the ceramic package tuning fork vibrator 200. As shown in FIG. 8, the ceramic package tuning-fork vibrator 200 has a box-shaped package 210 having a space inside.
The package 210 has a base portion 211 at the bottom. The base portion 211 is formed of, for example, ceramics such as alumina.

A sealing portion 212 is provided on the base portion 211, and the sealing portion 212 is formed of the same material as the base portion 211. A lid 213 is placed on the upper end of the sealing portion 212, and the base portion 211, the sealing portion 212, and the lid 213 form a hollow box.
The package-side electrode 214 is provided on the base portion 211 of the package 210 thus formed. The fixed region 111 of the base 110 of the tuning-fork type quartz vibrating piece 100 is fixed on the package-side electrode 214 via a conductive adhesive or the like.
Since the tuning-fork type quartz vibrating piece 100 is configured as shown in FIG. 1, the variation between the vibrating piece elements having a small CI value is stable because of the small size. The vibrator 200 is also a small-sized, high-performance vibrator in which the variation of the CI value between the vibrating element elements is stable.

(Third embodiment)
FIG. 9 is a schematic diagram showing a digital mobile phone 300 which is a mobile phone device which is an electronic apparatus according to the third embodiment of the present invention.
The digital mobile phone 300 uses the tuning fork type vibrator 200 and the tuning fork type crystal vibrating piece 100 of the above-described second embodiment.
Therefore, the configuration and operation of the ceramic package tuning fork type vibrator 200 and the tuning fork type crystal vibrating piece 100 are denoted by the same reference numerals, and the description thereof is omitted.
FIG. 9 shows a circuit block of the digital mobile phone 300. As shown in FIG. 9, when transmitting by the digital mobile phone 300, when the user inputs his / her voice into the microphone, the signal has a pulse width. The signal is transmitted from the transmitting antenna and the antenna switch through the modulation / coding block and the modulator / demodulator block.

On the other hand, a signal transmitted from another person's telephone is received by an antenna, passes through an antenna switch and a reception filter, and is input from a receiver to a modulator / demodulator block. Then, the modulated or demodulated signal is output as a voice to a speaker via a pulse width modulation / encoding block.
Among them, a controller for controlling an antenna switch, a modulator / demodulator block, and the like is provided.
In addition to the above, the controller also controls an LCD as a display unit, a key as an input unit for numbers and the like, and a RAM, a ROM, and the like. There is also a demand for downsizing the digital mobile phone 300.
The ceramic package tuning fork vibrator 200 described above is used to meet such requirements.

  Since the ceramic package tuning-fork vibrator 200 has the tuning-fork type crystal vibrating piece 100 shown in FIG. 1, the variation in the CI value between the vibrating piece elements is stabilized, the accuracy is high, and the size is small. Therefore, the digital mobile phone 300 equipped with the ceramic package tuning fork vibrator 200 is also a small, high-performance digital mobile phone in which the variation between the resonator element elements having the CI value is stable.

(Fourth embodiment)
FIG. 10 is a diagram showing a tuning fork crystal oscillator 400 which is an oscillator according to the fourth embodiment of the present invention.
This digital tuning fork crystal oscillator 400 has many parts in common with the ceramic package tuning fork vibrator 200 of the second embodiment described above. Accordingly, the same reference numerals are used for the configurations, operations, and the like of the ceramic package tuning-fork vibrator 200 and the tuning-fork type quartz vibrating piece 100, and description thereof is omitted.

In the tuning fork type crystal oscillator 400 shown in FIG. 10, an integrated circuit 410 is arranged as shown in FIG. 10 on the base portion 211 below the tuning fork type crystal vibrating piece 100 of the ceramic package tuning fork vibrator 200 shown in FIG. It was done.
That is, in the tuning-fork crystal oscillator 400, when the tuning-fork type crystal vibrating piece 100 disposed therein vibrates, the vibration is input to the integrated circuit 410, and thereafter, a predetermined frequency signal is taken out to function as an oscillator. Will be.
That is, since the tuning-fork type crystal resonator element 100 housed in the tuning-fork crystal oscillator 400 is configured as shown in FIG. 1, the size thereof is small and the variation between the resonator element elements having the CI value is stable. The digital tuning fork crystal oscillator 400 equipped with the resonator element is also a small-sized, high-performance oscillator in which the variation between the resonator element elements of the CI value is stable.

(Fifth embodiment)
FIG. 11 is a view showing a cylinder type tuning fork vibrator 500 which is a vibrator according to the fifth embodiment of the present invention.
This cylinder-type tuning fork vibrator 500 uses the tuning-fork type quartz vibrating piece 100 of the first embodiment described above. Therefore, the same reference numerals are used for the configuration, operation, and the like of the tuning-fork type quartz vibrating piece 100, and description thereof is omitted.
FIG. 11 is a schematic diagram showing a configuration of a cylinder type tuning fork vibrator 500.
As shown in FIG. 11, the cylinder type tuning fork vibrator 500 has a metal cap 530 for accommodating the tuning fork type quartz vibrating piece 100 therein. The cap 530 is press-fitted into the stem 520, and the inside thereof is kept in a vacuum state.

Further, two leads 510 for holding the substantially H-shaped tuning-fork type quartz vibrating piece 100 housed in the cap 530 are arranged.
When a current or the like is externally applied to such a cylinder type tuning fork vibrator 500, the tuning fork arms 121 and 122 of the tuning fork type crystal vibrating piece 100 vibrate, and function as a vibrator.
At this time, since the tuning-fork type quartz vibrating piece 100 is configured as shown in FIG. 1, the variation between the vibrating piece elements having a small CI value is stable, and therefore, the cylinder-type tuning fork equipped with this vibrating piece is used. The vibrator 500 is also a small, high-performance vibrator in which the variation between the vibrating element elements having the CI value is stable.

Further, in each of the above-described embodiments, the tuning fork type crystal resonator of 32.738 KH has been described as an example. However, it is apparent that the present invention can be applied to a tuning fork type crystal resonator of 15 KH to 155 KH.
The tuning-fork type quartz vibrating piece 100 according to the above-described embodiment is not limited to the above-described example, but may include other electronic devices, portable information terminals, and televisions, video devices, so-called radio-cassettes, and personal computer built-in clocks. Obviously, it is also used for equipment and watches.

The tuning-fork type crystal vibrating piece 100 according to the present embodiment is configured as described above. Hereinafter, a manufacturing method thereof and the like will be described.
First, the quartz substrate is etched or the like to form the tuning-fork type quartz vibrating reed in FIG. 14 where the electrodes are not formed. Thereafter, electrodes are formed on the tuning-fork type quartz vibrating piece.
Hereinafter, the process of forming the electrodes will be described focusing on the tuning fork arms 120 and 130. Further, since the tuning fork arm 130 is similar to the tuning fork arm 120, the following description will be made only for the tuning fork arm 120. FIG. 16 is a schematic flowchart showing the electrode forming process. FIG. 17 is a schematic view showing a process of forming an electrode on the tuning fork arm 120.

First, FIG. 17A is a schematic cross-sectional view of the tuning-fork arm 120 of the tuning-fork type quartz vibrating reed in a state where the outer shape is formed by the above-mentioned etching, taken along the line BB ′ of FIG.
As shown in FIG. 17A, grooves 120a and 130a are formed on the front surface 120e and the back surface 20f of the tuning fork arm 120 (groove forming step).
An electrode film 150, which is a metal film, is formed on the entire resonator element including the tuning fork arm 120 and the like by sputtering or the like (metal film forming step, ST1 in FIG. 15).
FIG. 17B shows this state. The electrode film 150 shown in FIG. 17 has a lower layer of Cr and a thickness of, for example, 100 to 1000 degrees. The upper layer is made of Au and has a thickness of, for example, 500 ° to 1000 °.

After forming the electrode film 150 on the entire surface as described above, a photoresist is sprayed in a mist state and applied on the entire surface of the electrode film 150 as shown in ST2 of FIG. That is, a photoresist film 151 is formed as shown in FIG. 17C (photoresist layer forming step).
This photoresist is a compound based on a resin having sensitivity to ultraviolet light and has fluidity, so that it is applied, for example, by spraying in the form of a mist.
The thickness of the photoresist film 151 is, for example, 1 μm to 6 μm.

Next, a photoresist pattern is formed as shown in ST3 of FIG. That is, the photoresist film 151 is irradiated with ultraviolet rays (exposure) through a mask (not shown) that covers a portion excluding the electrode forming portion (hatched portion) in FIG. The resist film 151 is solidified.
Thus, a photoresist pattern 152 having a shape corresponding to the electrode forming portion (hatched portion) in FIG. 14 is formed.

At this time, the photoresist pattern 152 has a portion where the photorest film 151 is not formed with the short-circuit prevention interval W1 of FIGS. 14 and 15, specifically, for example, a width of 15 μm.
Incidentally, the photoresist is applied on the electrode film 150 as described above, but needs to be applied so as to cover the edge portion (arrow E in the figure) which is the corner of the tuning fork arm 120 in FIG. There is. At this time, if the photoresist to be applied is in the form of particles, the cover of the edge portion E is better.
However, if the photoresist is applied in such a state including the particulate matter, the outer shape of the photoresist pattern 152 after the photoresist is developed is not an accurate substantially straight line but a substantially wavy line along the outer shape of the particles. I will.
As described above, if the outline of the photoresist pattern 152 is not uniform, if the short-circuit prevention interval W1 forms a fine interval of 15 μm, the interval may not be partially maintained.
Since the portion where the interval is not maintained is a portion that is not etched, there is a possibility that the electrodes may be short-circuited.

Therefore, in the present embodiment, laser irradiation is performed as shown in ST4 of FIG. 16 (pattern shape adjustment step). More specifically, the process is performed for the short-circuit prevention interval W1 of the arm surface 120e of the tuning fork arm 120 in FIG. 14, which is a part of the photoresist pattern 152.
That is, as shown in FIG. 18A, the outer shape of the photoresist pattern 152 becomes non-uniform, and when etching is performed using this photoresist pattern as a mask, a short-circuit or the like occurs between the formed groove electrode 120b and the side surface electrode 120d. In order not to cause the short circuit, the outer shape of the photoresist pattern 152 is adjusted by the laser so that the short-circuit prevention interval W1 can be secured, for example, 15 μm.

As this laser, for example, a YAG laser or the like is used. In particular, when a third harmonic of the YAG laser is used, the outer shape of the photoresist pattern 152 can be more accurately adjusted.
Since laser irradiation is performed after the formation of the photoresist pattern 152 in this manner, it is not necessary to irradiate the laser in a yellow room for preventing the exposure of the photoresist, so that the manufacturing cost can be reduced.
Also, as shown in FIGS. 18A and 18B, the laser irradiation is performed such that the short-circuit preventing interval W1 on the arm surface 120e of the tuning fork arm 120 and the short-circuit preventing interval W1 on the back surface 120f of the arm are specially performed.

However, the present invention is not limited to this, and as shown in FIG. 18C, both the arm surface 120e and the arm back surface 120f can be simultaneously processed by laser.
In this case, since the number of production steps can be reduced, the production cost can also be reduced.

After the photoresist pattern 152 is accurately formed by the laser in this manner, the etching step of ST5 in FIG. 16 is performed (electrode film forming step).
Specifically, the electrode film 150 is removed by etching using the above-described photoresist pattern 152 as a mask.
FIG. 19A is a diagram showing a state in which the electrode film 150 has been removed by etching. According to the manufacturing method of the present embodiment, as shown in FIG. 19A, the short-circuit prevention interval W1 can be accurately secured.

Next, if the photoresist pattern 152 is removed in the resist stripping step of ST6 in FIG. 16, the groove electrode 120b and the side surface electrode 120d are accurately formed as shown in FIG. 19B (photoresist pattern Peeling step).
At this time, a part of the electrode film 150 is melted by the laser irradiation shown in FIG. 17 in the above-described laser irradiation step (ST3), and a part of the melted electrode film 150 is removed together with the resist pattern 152. , A short-circuit prevention interval W1 can be formed.
At this time, for the entire tuning-fork type quartz vibrating piece 100, the base electrode 140a and the like are formed in a predetermined shape as shown in FIG. 14, and the electrode arrangement of the tuning-fork type quartz vibrating piece 100 ends.
In the tuning-fork type quartz vibrating piece 100 manufactured in this manner, the short-circuit preventing interval W1 between the arm surfaces 120e and 130e and the arm back surfaces 120f and 130f of the tuning fork arms 120 and 130 is accurately held at, for example, 15 μm, and the groove electrodes 120b and Short-circuiting between 130b and side electrodes 120d and 130d can be effectively prevented, and a tuning-fork type crystal vibrating piece that is unlikely to cause a defect is obtained.

  As described above, according to the present invention, even when the base portion is shortened, the variation of the CI value between the resonator element elements is stabilized, and the entire resonator element can be reduced in size, the resonator having the resonator, and the resonator And an electronic device having the same.

FIG. 1 is a schematic view of a tuning-fork type quartz vibrating piece according to a first embodiment of the present invention. FIG. 2 is a sectional view taken along line F-F ′ of FIG. 1. It is a schematic perspective view which shows the structure of the cut part of the base of FIG. FIG. 2 is an explanatory diagram of the tuning-fork type crystal resonator of FIG. 1. It is a figure showing the relation between a tuning fork arm width and CI value. FIG. 4 is a diagram illustrating a relationship between a groove depth and a CI value. It is a figure which shows the relationship between the ratio of groove width with respect to a tuning fork arm width, and CI value. It is a schematic sectional view showing composition of a ceramic package tuning fork type vibrator concerning a 2nd embodiment of the present invention. FIG. 11 is a schematic diagram illustrating circuit blocks of a digital mobile phone according to a third embodiment of the present invention. It is a schematic sectional view showing the composition of the tuning fork crystal oscillator concerning a 4th embodiment of the present invention. It is a schematic sectional view showing the composition of the cylinder type tuning fork vibrator concerning a 5th embodiment of the present invention. It is the schematic which shows the conventional tuning fork type crystal vibrating piece. (A) It is explanatory drawing of the vibration of an arm part. (B) It is another explanatory drawing of the vibration of an arm part. FIG. 2 is a schematic view showing a tuning-fork type quartz vibrating piece 100 manufactured by the method for manufacturing a vibrating piece according to the first embodiment of the present invention. FIG. 13 is a schematic sectional view taken along line B-B ′ of FIG. 12. 4 is a schematic flowchart showing an electrode forming step. It is the schematic which shows the process of forming an electrode in a tuning fork arm. It is the schematic which shows the other process of forming an electrode in a tuning fork arm. It is the schematic which shows the other process of forming an electrode in a tuning fork arm.

Explanation of reference numerals

100: tuning-fork type crystal vibrating piece 110: base 111: fixed area 121, 122: tuning fork arm 123, 124: groove 125: cut-out 200: ceramic package tuning fork vibrator 210: Package 211: Base 212: Side 213: Lid 214: Package side electrode 300: Digital mobile phone 400: Tuning fork crystal oscillator 410: Integrated circuit 500: cylinder type tuning fork vibrator 510: lead 520: stem 530: cap

Claims (20)

  A vibrating reed having a base portion and a vibrating arm portion protruding from the base portion, wherein a groove is formed on a front surface portion and / or a back surface portion of the vibrating arm portion, and a cut is formed in the base portion. A vibrating reed, wherein a portion is formed.   The vibrating reed according to claim 1, wherein the vibrating arm is a substantially rectangular parallelepiped, and the width of the arm, which is the short side of the surface, is 50 m or more and 150 m or less.   Groove portions are formed on the front surface portion and the back surface portion of the vibrating arm portion, and the depth of any of the groove portions provided on the front surface portion or the back surface portion is the total length in the depth direction of the vibrating arm portion. The resonator element according to claim 1, wherein the resonator element is formed at a depth of 30% or more and less than 50% of the thickness.   The depth of any of the groove portions provided on the front surface portion or the rear surface portion is formed to a depth of 40% or more and less than 50% with respect to the thickness that is the entire length in the depth direction of the vibrating arm portion. The resonator element according to claim 1, wherein the resonator element is provided.   The resonator element according to claim 3, wherein a groove width, which is a short side of the opening of the groove part, is 40% or more of the arm part width of the vibrating arm part.   The resonator element according to claim 5, wherein the groove width is formed to be 70% or more and less than 100% of the arm width.   The base has a fixing area for fixing the vibrating reed, and the cutout is provided at a base between the fixing area and the vibrating arm. The resonator element according to claim 1.   The vibrating reed according to any one of claims 1 to 7, wherein the vibrating reed is a tuning-fork type vibrating reed formed of quartz oscillating at about 30 KHz to about 40 KHz.   A vibrating reed having a base and a vibrating arm protruding from the base is a vibrator housed in a package, and a surface portion of the vibrating arm of the vibrating reed and / or A vibrator, wherein a groove is formed on a back surface and a cut portion is formed on the base.   The vibrator according to claim 9, wherein the vibrating arm of the vibrating reed is a substantially rectangular parallelepiped, and a width of an arm, which is a short side of the surface, is 50 μm or more and 150 μm or less.   Grooves are formed on the front surface and the back surface of the vibrating arm of the vibrating reed, and the depth of any one of the grooves provided on the front surface or the back is the depth of the vibrating arm. The vibrator according to claim 9, wherein the vibrator is formed to have a depth of 30% or more and less than 50% of a thickness which is a total length in a vertical direction.   The depth of any one of the groove portions provided on the front surface portion or the rear surface portion of the vibrating reed is 40% or more and less than 50% of the total thickness in the depth direction of the vibrating arm portion. The vibrator according to claim 9, wherein the vibrator is formed as follows.   The vibrator according to claim 11, wherein a groove width, which is a short side of the opening of the groove of the vibrating reed, is 40% or more of the arm width of the vibrating arm.   The vibrator according to claim 13, wherein the groove width of the vibrating reed is formed to be 70% or more and less than 100% of the arm width.   The base of the vibrating reed is provided with a fixing area for fixing the vibrating reed, and the notch is provided on a base between the fixing area and the vibrating arm. The vibrator according to claim 9, wherein:   The vibrator according to any one of claims 9 to 15, wherein the vibrating reed is a tuning fork vibrating reed formed of quartz oscillating at about 30 KHz to about 40 KHz.   The vibrator according to any one of claims 9 to 16, wherein the package is formed in a box shape.   17. The vibrator according to claim 9, wherein the package is formed in a so-called cylinder type.   An oscillator in which a vibrating reed having a base portion and a vibrating arm portion protruding from the base portion and an integrated circuit are housed in a package, wherein a surface portion of the vibrating arm portion of the vibrating reed and / or Alternatively, the oscillator has a groove formed on the back surface and a cutout formed on the base.   A vibrating reed having a base and a vibrating arm formed to protrude from the base, the vibrating reed being a vibrator housed in a package, and connecting the vibrator to a control unit. An electronic device used, wherein a groove is formed on a front surface portion and / or a back surface portion of the vibrating arm portion of the vibrating reed, and a cut portion is formed on the base portion. machine.

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