JP2004261945A5 - - Google Patents
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- Publication number
- JP2004261945A5 JP2004261945A5 JP2003057101A JP2003057101A JP2004261945A5 JP 2004261945 A5 JP2004261945 A5 JP 2004261945A5 JP 2003057101 A JP2003057101 A JP 2003057101A JP 2003057101 A JP2003057101 A JP 2003057101A JP 2004261945 A5 JP2004261945 A5 JP 2004261945A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003057101A JP4301434B2 (en) | 2003-03-04 | 2003-03-04 | Polishing abrasive grains and polishing tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003057101A JP4301434B2 (en) | 2003-03-04 | 2003-03-04 | Polishing abrasive grains and polishing tool |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004261945A JP2004261945A (en) | 2004-09-24 |
JP2004261945A5 true JP2004261945A5 (en) | 2005-10-27 |
JP4301434B2 JP4301434B2 (en) | 2009-07-22 |
Family
ID=33120608
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003057101A Expired - Lifetime JP4301434B2 (en) | 2003-03-04 | 2003-03-04 | Polishing abrasive grains and polishing tool |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4301434B2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4646638B2 (en) * | 2005-01-14 | 2011-03-09 | 株式会社リコー | Surface polishing processing method and processing apparatus |
JP2008006559A (en) * | 2006-06-30 | 2008-01-17 | Hitachi Maxell Ltd | Mirror-finishing method and machining body for mirror-finishing |
JP5369597B2 (en) * | 2008-02-14 | 2013-12-18 | 日立化成株式会社 | CMP polishing liquid and polishing method |
US20090278081A1 (en) * | 2008-03-28 | 2009-11-12 | Applied Materials, Inc. | Pad properties using nanoparticle additives |
JP6357536B2 (en) * | 2014-07-31 | 2018-07-11 | Hoya株式会社 | Polishing slurry preparation method, glass substrate manufacturing method, and raw material abrasive lump |
JP7074644B2 (en) * | 2018-10-31 | 2022-05-24 | 信越化学工業株式会社 | A method for manufacturing abrasive particles for polishing a synthetic quartz glass substrate, and a method for polishing a synthetic quartz glass substrate. |
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2003
- 2003-03-04 JP JP2003057101A patent/JP4301434B2/en not_active Expired - Lifetime