JP2004261945A5 - - Google Patents

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Publication number
JP2004261945A5
JP2004261945A5 JP2003057101A JP2003057101A JP2004261945A5 JP 2004261945 A5 JP2004261945 A5 JP 2004261945A5 JP 2003057101 A JP2003057101 A JP 2003057101A JP 2003057101 A JP2003057101 A JP 2003057101A JP 2004261945 A5 JP2004261945 A5 JP 2004261945A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2003057101A
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Japanese (ja)
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JP2004261945A (en
JP4301434B2 (en
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Publication date
Application filed filed Critical
Priority to JP2003057101A priority Critical patent/JP4301434B2/en
Priority claimed from JP2003057101A external-priority patent/JP4301434B2/en
Publication of JP2004261945A publication Critical patent/JP2004261945A/en
Publication of JP2004261945A5 publication Critical patent/JP2004261945A5/ja
Application granted granted Critical
Publication of JP4301434B2 publication Critical patent/JP4301434B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003057101A 2003-03-04 2003-03-04 Polishing abrasive grains and polishing tool Expired - Lifetime JP4301434B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003057101A JP4301434B2 (en) 2003-03-04 2003-03-04 Polishing abrasive grains and polishing tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003057101A JP4301434B2 (en) 2003-03-04 2003-03-04 Polishing abrasive grains and polishing tool

Publications (3)

Publication Number Publication Date
JP2004261945A JP2004261945A (en) 2004-09-24
JP2004261945A5 true JP2004261945A5 (en) 2005-10-27
JP4301434B2 JP4301434B2 (en) 2009-07-22

Family

ID=33120608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003057101A Expired - Lifetime JP4301434B2 (en) 2003-03-04 2003-03-04 Polishing abrasive grains and polishing tool

Country Status (1)

Country Link
JP (1) JP4301434B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4646638B2 (en) * 2005-01-14 2011-03-09 株式会社リコー Surface polishing processing method and processing apparatus
JP2008006559A (en) * 2006-06-30 2008-01-17 Hitachi Maxell Ltd Mirror-finishing method and machining body for mirror-finishing
JP5369597B2 (en) * 2008-02-14 2013-12-18 日立化成株式会社 CMP polishing liquid and polishing method
US20090278081A1 (en) * 2008-03-28 2009-11-12 Applied Materials, Inc. Pad properties using nanoparticle additives
JP6357536B2 (en) * 2014-07-31 2018-07-11 Hoya株式会社 Polishing slurry preparation method, glass substrate manufacturing method, and raw material abrasive lump
JP7074644B2 (en) * 2018-10-31 2022-05-24 信越化学工業株式会社 A method for manufacturing abrasive particles for polishing a synthetic quartz glass substrate, and a method for polishing a synthetic quartz glass substrate.

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