JP2004244300A - Piezoelectric ceramic composition, its production method, piezoelectric element, and dielectric element - Google Patents

Piezoelectric ceramic composition, its production method, piezoelectric element, and dielectric element Download PDF

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JP2004244300A
JP2004244300A JP2003274917A JP2003274917A JP2004244300A JP 2004244300 A JP2004244300 A JP 2004244300A JP 2003274917 A JP2003274917 A JP 2003274917A JP 2003274917 A JP2003274917 A JP 2003274917A JP 2004244300 A JP2004244300 A JP 2004244300A
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piezoelectric ceramic
ceramic composition
piezoelectric
compound
porosity
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Tatsuhiko Nonoyama
龍彦 野々山
Toshiatsu Nagaya
年厚 長屋
Yasuyoshi Saitou
康善 斎藤
Kazumasa Takatori
一雅 鷹取
Hisafumi Takao
尚史 高尾
Takahiko Honma
隆彦 本間
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Denso Corp
Toyota Central R&D Labs Inc
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Denso Corp
Toyota Central R&D Labs Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric ceramic composition which is lead-free and has a high apparent density, a low porosity, and a low open porosity, to provide its production method, and to provide a piezoelectric element and a dielectric element using the piezoelectric ceramic composition. <P>SOLUTION: The piezoelectric ceramic composition mainly consists of a compound represented by the formula: äLi<SB>x</SB>(K<SB>1-y</SB>Na<SB>y</SB>)<SB>1-x</SB>}(Nb<SB>1-z-w</SB>Ta<SB>z</SB>Sb<SB>w</SB>)O<SB>3</SB>(wherein x, y, z, and w are in the ranges: 0≤x≤0.2, 0≤y≤1, 0<z≤0.4, and 0<w≤0.2, respectively). This composition contains as an additive element at least one metallic element selected from specified elements. The total content of the additive is 0.0005 to 0.15 mol per mol of the compound represented by the formula. The open porosity is at most 0.4 vol.%. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

本発明は,組成物中に鉛を含有しない圧電磁器組成物及びその製造方法,並びに該圧電磁器組成物を材料とする圧電素子及び誘電素子に関する。   The present invention relates to a piezoelectric ceramic composition containing no lead in the composition, a method for producing the same, and a piezoelectric element and a dielectric element using the piezoelectric ceramic composition as a material.

従来より,圧電磁器組成物としては,鉛を含んだPZT(PbTiO3−PbZrO3)成分系磁器が用いられてきた。上記PZTは,大きな圧電性を示し,かつ高い機械的品質係数を有しており,センサ,アクチュエータ,フィルター等の各用途に要求されるさまざまな特性の材料を容易に作製できるからである。
また,上記PZTは高い比誘電率を有するためコンデンサ等としても利用することができる。
Conventionally, a PZT (PbTiO 3 -PbZrO 3 ) component-based ceramic containing lead has been used as a piezoelectric ceramic composition. This is because PZT exhibits large piezoelectricity and has a high mechanical quality factor, and can easily produce materials having various characteristics required for each application such as a sensor, an actuator, and a filter.
Further, since the PZT has a high relative dielectric constant, it can be used as a capacitor or the like.

ところが,上記PZTからなる圧電磁器組成物は,優れた特性を有する一方で,その構成元素に鉛を含んでいるため,PZTを含んだ製品の産業廃棄物から有害な鉛が溶出し,環境汚染を引き起こすおそれがあった。そして,近年の環境問題に対する意識の高まりは,PZTのように環境汚染の原因となりうる製品の製造を困難にしてきた。そのため,組成物中に鉛を含有しない圧電磁器組成物の開発が求められ,一般式(K1-xNax)NbO3(但し,0<x<1)で表される圧電磁器組成物(非特許文献1参照)が注目されてきた。 However, while the piezoelectric ceramic composition comprising PZT has excellent properties, it contains lead as a constituent element, so that harmful lead is eluted from industrial waste of products containing PZT, resulting in environmental pollution. Could be caused. And, increasing awareness of environmental issues in recent years has made it difficult to manufacture products that can cause environmental pollution, such as PZT. Therefore, development of a piezoelectric ceramic composition containing no lead in the composition has been demanded, and a piezoelectric ceramic composition represented by the general formula (K 1-x Na x ) NbO 3 (where 0 <x <1) (See Non-Patent Document 1).

しかしながら,上記一般式(K1-xNax)NbO3(但し,0<x<1)で表される圧電磁器組成物は難焼結であるという問題があった。そのため,焼成後の圧電磁器組成物は,みかけ密度が低くその表面や内部に多数の空孔を生じ易い。それ故,上記一般式(K1-xNax)NbO3で表される,従来の圧電磁器組成物は,その機械的強度が低下し易いという問題があった。
“Journal of the American Ceramic Society”,米国,1962,Vol.45,No.5,p.209
However, the piezoelectric ceramic composition represented by the above general formula (K 1-x Na x ) NbO 3 (where 0 <x <1) has a problem that it is difficult to sinter. Therefore, the piezoelectric ceramic composition after firing has a low apparent density and is likely to form a large number of pores on its surface and inside. Therefore, the conventional piezoelectric ceramic composition represented by the general formula (K 1-x Na x ) NbO 3 has a problem that its mechanical strength is apt to decrease.
"Journal of the American Ceramic Society", USA, 1962, Vol. 45, no. 5, p. 209

本発明は,かかる従来の問題点に鑑みてなされたもので,鉛を含まず,みかけ密度が高く,かつ空孔率及び開気孔率が低い圧電磁器組成物及びその製造方法,並びに該圧電磁器組成物を利用した圧電素子及び誘電素子を提供しようとするものである。   The present invention has been made in view of the above-mentioned conventional problems, and is directed to a piezoelectric ceramic composition containing no lead, having a high apparent density, low porosity and low open porosity, a method for producing the same, and the piezoelectric ceramic. An object of the present invention is to provide a piezoelectric element and a dielectric element using the composition.

第1の発明は,一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物を主成分とする圧電磁器組成物であって,
該圧電磁器組成物は,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を添加元素として含有してなり,
上記添加元素の含有量の合計は,上記一般式で表される化合物1molに対して,0.0005mol〜0.15molであり,
かつ,開気孔率が0.4Vol%以下であることを特徴とする圧電磁器組成物にある(請求項1)。
The first invention of the general formula represented by {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w, respectively 0 A piezoelectric ceramic composition mainly comprising a compound having a composition range of ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4, and 0 <w ≦ 0.2,
The piezoelectric ceramic composition comprises Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir. , La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr One or more metal elements selected from the group consisting of
The total content of the additional elements is 0.0005 mol to 0.15 mol with respect to 1 mol of the compound represented by the general formula.
The piezoelectric ceramic composition has an open porosity of 0.4% by volume or less (claim 1).

次に,本発明の作用効果につき説明する。
本発明の圧電磁器組成物は,その組成中に鉛を含有していない。
そのため,上記圧電磁器組成物は,その廃棄物等から有害な鉛が自然界に流出することがなく,安全である。
Next, the operation and effect of the present invention will be described.
The piezoelectric ceramic composition of the present invention does not contain lead in the composition.
Therefore, the piezoelectric ceramic composition is safe because harmful lead does not leak from the waste and the like to nature.

また,上記圧電磁器組成物は,上記一般式で表される化合物を含有してなり,上記添加元素を上記範囲内で含有している。
そのため,上記圧電磁器組成物は,その作製の際の焼成時に,上記添加元素が焼成助剤として働き緻密化を促進させ,焼結し易くなる。それ故,みかけ密度が高く,空孔の少ない良質な圧電磁器組成物となる。その結果,空孔率及び開気孔率が低く,機械的特性に優れたものとなる。なお,上記空孔率は,上記圧電磁器組成物の内部及び裏面に生じた空孔の量を体積%で示すものであり,上記開気孔率は,圧電磁器組成物の表面に生じたくぼみの量を体積%で示すものである。
Further, the piezoelectric ceramic composition contains a compound represented by the above general formula, and contains the additive element within the above range.
Therefore, when the piezoelectric ceramic composition is fired at the time of its production, the above-mentioned additional element acts as a firing aid to promote densification and facilitate sintering. Therefore, a high quality piezoelectric ceramic composition having a high apparent density and a small number of pores is obtained. As a result, the porosity and open porosity are low, and the mechanical properties are excellent. The porosity indicates the amount of porosity formed inside and on the back surface of the piezoelectric ceramic composition by volume%, and the open porosity indicates the amount of dents formed on the surface of the piezoelectric ceramic composition. The amounts are given in volume%.

さらに,本発明の圧電磁器組成物は,0.4Vol%以下という低い開気孔率を有している。そのため,上記圧電磁器組成物は,機械的強度に優れ,劣化し難く信頼性の高い圧電アクチュエータ素子,圧電振動子,表面波フィルター素子,圧電センサ素子,超音波モータ素子,圧電トランス素子等の圧電素子として利用することができる。   Further, the piezoelectric ceramic composition of the present invention has a low open porosity of 0.4 Vol% or less. Therefore, the piezoelectric ceramic composition has excellent mechanical strength and is hardly deteriorated and has high reliability. The piezoelectric actuator element, the piezoelectric vibrator, the surface wave filter element, the piezoelectric sensor element, the ultrasonic motor element, the piezoelectric transformer element, and the like. It can be used as an element.

また,本発明の圧電磁器組成物は,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物を主成分として含有している。そのため,上記圧電磁器組成物は,上記一般式で表される化合物が有する,優れた圧電d31定数,電気機械結合係数Kp,圧電g31定数,機械的品質係数Qm,比誘電率,誘電損失,及びキュリー温度等の圧電及び誘電特性を利用して,これらの特性に優れたものとなる。そのため,高性能な圧電素子及び誘電素子として利用することができる。
なお,上記添加元素を含有しておらず,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される組成を,以下適宜,「基本組成」という。
The piezoelectric ceramic composition of the present invention, as a main component the above general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) represented by O 3 compound Contains. Therefore, the piezoelectric ceramic composition has excellent piezoelectric d 31 constant, electromechanical coupling coefficient Kp, piezoelectric g 31 constant, mechanical quality factor Qm, relative permittivity, and dielectric loss, which the compound represented by the above general formula has. By utilizing the piezoelectric and dielectric properties such as the Curie temperature and the like, these properties are excellent. Therefore, it can be used as a high-performance piezoelectric element and dielectric element.
Note that does not contain the additive element, a composition represented by the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, less Where appropriate, referred to as the "basic composition".

第2の発明は,一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物と,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか一種以上の金属元素を含む添加物とを混合し,焼成することを特徴とする圧電磁器組成物の製造方法にある(請求項4)。 The second invention of the general formula represented by {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w, respectively 0 ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4, 0 <w ≦ 0.2, a compound having a composition range of Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn and Zr are mixed with an additive containing at least one metal element and fired. A method for producing a piezoelectric porcelain composition, characterized in that it is characterized by the following (claim 4).

上記一般式で表される化合物と上記添加物とを混合して得られる混合物は,常圧下にて焼結することができる。そのため,簡単かつ低コストにて焼成を行うことができる。
特に本発明においては,上記一般式で表される化合物に,上記金属元素を含む添加物を加えている。そのため,上記添加物が焼成助剤として機能し,上記圧電磁器組成物は上記焼成時に焼結し易くなる。その結果,焼成後の圧電磁器組成物のみかけ密度を向上させることができると共に,その表面や内部に大きな空孔が生じ難くなり,空孔率や開気孔率を低下させることができる。それ故,焼結後の圧電磁器組成物の機械的強度を向上させることができる。
A mixture obtained by mixing the compound represented by the general formula and the additive can be sintered under normal pressure. Therefore, sintering can be performed easily and at low cost.
In particular, in the present invention, an additive containing the above metal element is added to the compound represented by the above general formula. Therefore, the additive functions as a firing aid, and the piezoelectric ceramic composition is easily sintered during the firing. As a result, the apparent density of the piezoelectric ceramic composition after firing can be improved, and large pores are less likely to be generated on the surface and inside thereof, so that the porosity and the open porosity can be reduced. Therefore, the mechanical strength of the piezoelectric ceramic composition after sintering can be improved.

また,上記焼成後に得られる上記圧電磁器組成物においては,上記添加物が添加された結果,上記一般式で表される化合物のLi,K,Na,Nb,Ta,Sbのいずれか1種以上の少なくとも一部を,上記Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素が置換して含有されたり,上記金属元素又はこれを含む酸化物乃至はペロブスカイト構造化合物等の化合物として上記圧電磁器組成物中の粒内乃至は粒界に含有される。なお,本明細書における「添加物を含有する」は,すべて上記の意味である。   In addition, in the piezoelectric ceramic composition obtained after the firing, as a result of the addition of the additive, at least one of Li, K, Na, Nb, Ta, and Sb of the compound represented by the general formula is added. At least a portion of Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir , La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr And any one or more metal elements selected from the group consisting of a metal element or a compound containing the metal element or an oxide or a perovskite structure compound in the piezoelectric ceramic composition. It is contained in. In this specification, “containing an additive” has the same meaning as described above.

また,上記焼成後に得られる圧電磁器組成物は,鉛を含有せず,圧電d31定数,電気機械結合係数Kp,圧電g31定数,機械的品質係数Qm,比誘電率,誘電損失,及びキュリー温度等の圧電及び誘電特性に優れたものとなる。そのため,高性能な圧電素子又は誘電素子等の材料として利用することができる。 The piezoelectric ceramic composition obtained after the calcination does not contain lead, the piezoelectric d 31 constant, electromechanical coupling factor Kp, piezoelectric g 31 constant, the mechanical quality factor Qm, dielectric constant, dielectric loss, and Curie It has excellent piezoelectric and dielectric properties such as temperature. Therefore, it can be used as a material for a high-performance piezoelectric element or dielectric element.

第3の発明は,Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物とを,焼成後に一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物となるような化学量論比にて,又は下記の添加物に含有される金属元素による置換を考慮した化学量論比にて混合し,さらにAg,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を含む添加物を混合し,焼成することを特徴とする圧電磁器組成物の製造方法にある(請求項5)。 According to a third aspect of the present invention, a compound containing Li, a compound containing Na, a compound containing K, a compound containing Nb, a compound containing Ta, and a compound containing Sb are fired. after represented by the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w respectively 0 ≦ x ≦ 0. 2,0 ≦ y ≦ 1,0 <z ≦ 0.4,0 <w ≦ 0.2 at a stoichiometric ratio which results in a compound in the composition range, or a metal contained in the following additives Mixing at stoichiometric ratios taking into account substitution by elements, and furthermore Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, A piezoelectric element characterized in that an additive containing at least one metal element selected from the group consisting of i, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, and Zr is mixed and fired. A method for producing a porcelain composition is provided (claim 5).

上記第3の発明においては,上記のごとく,Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物と,さらにAg,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を含む添加物とを,上記化学量論比にて混合し,焼成する。
これにより,上記第1の発明の圧電磁器組成物を容易に得ることができる。
In the third invention, as described above, a compound containing Li, a compound containing Na, a compound containing K, a compound containing Nb, a compound containing Ta, and a compound containing Sb are contained. And Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La , Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr And an additive containing at least one metal element are mixed at the above stoichiometric ratio and fired.
Thereby, the piezoelectric ceramic composition of the first invention can be easily obtained.

また,上記焼成後に得られる上記圧電磁器組成物においては,上記添加物が添加された結果,上記第2の発明と同様に,上記一般式で表される化合物のLi,K,Na,Nb,Ta,Sbのいずれか1種以上の少なくとも一部を,上記Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素が置換して含有されたり,上記金属元素又はこれを含む酸化物乃至はペロブスカイト構造化合物等の化合物として上記圧電磁器組成物中の粒内乃至は粒界に含有される。   Further, in the piezoelectric ceramic composition obtained after the firing, as a result of the addition of the additives, the compounds represented by the general formulas Li, K, Na, Nb, At least a portion of any one or more of Ta and Sb is converted to Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, The piezoelectric ceramic composition contains one or more metal elements selected from V, Y, Yb, Zn, and Zr in a substituted manner, or as a compound such as the metal element or an oxide or a perovskite structure compound containing the metal element. Intragranular or in grain boundaries It is.

このとき,Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物と,上記添加物とを,該添加物に含有される金属元素による置換を考慮した化学量論比にて混合した場合には,上記一般式で表される化合物中のLi,Na,K,Nb,Ta,及びSbのいずれか1種以上の少なくとも一部を,上記添加物が含有する金属元素に積極的に置換させることができる。   At this time, the compound containing Li, the compound containing Na, the compound containing K, the compound containing Nb, the compound containing Ta, the compound containing Sb, and the above-mentioned additive are combined. When mixed at a stoichiometric ratio in consideration of substitution by a metal element contained in the additive, Li, Na, K, Nb, Ta, and Sb in the compound represented by the above general formula are mixed. At least a part of any one or more of them can be positively substituted by the metal element contained in the additive.

上記の「添加物に含有される金属元素による置換を考慮した化学量論比にて混合」は,例えば上記一般式で表される化合物のLiに,上記添加物の金属元素を置換させる場合には,Liを含む化合物の量を減らし,その減らした分だけ上記添加物を添加して混合すると共に,全体としては,焼成後に一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物が合成されるような化学量論比にて混合すること等により,実現することができる。上記一般式中の,K,Na,Nb,Ta,Sbという他の原子に置換させる場合にもこれらを含む化合物の量を減らし,その分だけ置換させたい金属元素を含む添加物を添加することにより実現することができる。 The above “mixing at a stoichiometric ratio in consideration of the substitution by the metal element contained in the additive” refers to, for example, a case where Li of the compound represented by the general formula is substituted for the metal element of the additive. Is to reduce the amount of the compound containing Li, add the above-mentioned additives by the reduced amount and mix, and as a whole, after firing, the general formula {Li x (K 1-y Na y ) 1-x } by such the compound represented by (Nb 1-zw Ta z Sb w) O 3 are mixed at a stoichiometric ratio as synthesized, can be realized. In the case of substituting other atoms such as K, Na, Nb, Ta and Sb in the above general formula, the amount of the compound containing these should be reduced and an additive containing the metal element to be substituted should be added accordingly. Can be realized.

一方,焼成後に上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物となるような化学量論比にて,Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物とを混合し,ここに上記添加物をさらに混合することにより,上記金属元素又はこれを含む酸化物乃至はペロブスカイト構造化合物等の化合物として,上記添加物を含有する圧電磁器組成物を積極的に作製することができる。 On the other hand, in the above general formula after firing {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) a compound represented by O 3 such stoichiometric ratio, A compound containing Li, a compound containing Na, a compound containing K, a compound containing Nb, a compound containing Ta, and a compound containing Sb are mixed, and the above additive is added thereto. Is further mixed, whereby a piezoelectric ceramic composition containing the above-mentioned additive can be positively produced as a compound such as the above-mentioned metal element or an oxide containing the same or a perovskite structure compound.

また,上記第3の発明において,上記焼成は,常圧下にて行うことができる。そのため,簡単かつ低コストにて上記圧電磁器組成物を製造することができる。そして,上記焼成後に得られる圧電磁器組成物は,鉛を含有せず,みかけ密度が高く,空孔率及び開気孔率が小さく,さらに上記した圧電及び誘電特性に優れたものとなる。そのため,機械的強度に優れ,高性能な圧電素子及び誘電素子等の材料として用いることができる。   In the third aspect, the firing can be performed under normal pressure. Therefore, the piezoelectric ceramic composition can be manufactured easily and at low cost. The piezoelectric ceramic composition obtained after the above-mentioned firing does not contain lead, has a high apparent density, a small porosity and a small open porosity, and has excellent piezoelectric and dielectric properties as described above. Therefore, it can be used as a material for a piezoelectric element, a dielectric element, or the like, which has excellent mechanical strength and high performance.

第4の発明は,上記第1の発明の圧電磁器組成物よりなる圧電体を有することを特徴とする圧電素子にある(請求項7)。   A fourth invention resides in a piezoelectric element having a piezoelectric body made of the piezoelectric ceramic composition of the first invention (claim 7).

上記第4の発明の圧電素子は,上記第1の発明(請求項1)の圧電磁器組成物よりなる圧電体を有している。
そのため,上記圧電素子は,鉛を含有せず,環境に対して安全である。
また,上記圧電素子は,みかけ密度が高く,空孔率及び開気孔率が低いという上記圧電磁器組成物の性質を利用して,機械的強度に優れたものとなる。
さらに,上記圧電素子は,上記圧電磁器組成物が有する,圧電特性に優れるという性質をそのまま利用することができる。そのため,上記圧電素子は,感度の高い圧電センサ素子,高い電気機械エネルギー変換効率を有する圧電振動子及びアクチュエータ素子等として利用することができる。
The piezoelectric element according to the fourth aspect has a piezoelectric body made of the piezoelectric ceramic composition according to the first aspect (claim 1).
Therefore, the piezoelectric element does not contain lead and is environmentally safe.
Further, the piezoelectric element has excellent mechanical strength by utilizing the properties of the piezoelectric ceramic composition having a high apparent density and a low porosity and low open porosity.
Further, the piezoelectric element can utilize the property of the piezoelectric ceramic composition having excellent piezoelectric characteristics as it is. Therefore, the piezoelectric element can be used as a piezoelectric sensor element having high sensitivity, a piezoelectric vibrator having high electromechanical energy conversion efficiency, an actuator element, and the like.

第5の発明は,上記第2又は第3の発明の製造方法により製造された圧電磁器組成物よりなる圧電体を有することを特徴とする圧電素子にある(請求項8)。   A fifth aspect of the present invention is a piezoelectric element having a piezoelectric body made of the piezoelectric ceramic composition manufactured by the manufacturing method of the second or third aspect (claim 8).

上記第5の発明の圧電素子は,上記した製造方法により得られる圧電磁器組成物よりなる圧電体を有している。そのため,上記圧電素子は,上記圧電磁器組成物の優れた特性をそのまま生かして,機械的強度に優れ,感度の高い圧電センサ素子,高い電気機械エネルギー変換効率を有する圧電振動子及びアクチュエータ素子等として利用することができる。   The piezoelectric element according to the fifth aspect of the present invention has a piezoelectric body made of the piezoelectric ceramic composition obtained by the above-described manufacturing method. Therefore, the piezoelectric element can be used as a piezoelectric sensor element with high mechanical strength and high sensitivity, a piezoelectric vibrator and an actuator element with high electromechanical energy conversion efficiency, etc., by taking advantage of the excellent characteristics of the piezoelectric ceramic composition as it is. Can be used.

第6の発明は,上記第1の発明の圧電磁器組成物よりなる誘電体を有することを特徴とする誘電素子にある(請求項9)。   A sixth invention resides in a dielectric element having a dielectric made of the piezoelectric ceramic composition of the first invention (claim 9).

上記第6の発明の誘電素子は,上記第1の発明(請求項1)の圧電磁器組成物よりなる誘電体を有している。そのため,上記誘電素子は,鉛を含有せず,環境に対して安全である。また,上記誘電素子は,上記圧電磁器組成物が有する特性をそのまま生かして,機械的強度に優れ,さらに比誘電率等の誘電特性に優れたものとなる。そのため,静電容量の大きいコンデンサ等として利用することができる。   The dielectric element according to the sixth aspect has a dielectric made of the piezoelectric ceramic composition according to the first aspect (claim 1). Therefore, the dielectric element does not contain lead and is environmentally safe. In addition, the dielectric element is excellent in mechanical strength and further excellent in dielectric properties such as relative dielectric constant, utilizing the characteristics of the piezoelectric ceramic composition as it is. Therefore, it can be used as a capacitor having a large capacitance.

第7の発明は,上記第2又は第3の発明の製造方法により製造された圧電磁器組成物よりなる誘電体を有することを特徴とする誘電素子にある(請求項10)。   A seventh aspect of the present invention resides in a dielectric element having a dielectric comprising a piezoelectric ceramic composition manufactured by the manufacturing method of the second or third aspect of the invention (claim 10).

上記第7の発明の誘電素子は,上記した製造方法により得られる圧電磁器組成物よりなる誘電体を有している。そのため,上記誘電素子は,上記圧電磁器組成物の優れた特性をそのまま生かして,機械的強度に優れ,静電容量の大きいコンデンサ等として利用することができる。   The dielectric element of the seventh invention has a dielectric made of the piezoelectric ceramic composition obtained by the above-described manufacturing method. Therefore, the dielectric element can be utilized as a capacitor or the like having excellent mechanical strength and a large capacitance by utilizing the excellent characteristics of the piezoelectric ceramic composition as it is.

本発明において,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物は,x,y,z,wの範囲がそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2にある。
ここで,x>0.2,z>0.4,w>0.2,z=0,又はw=0の場合には,圧電d31定数等の圧電特性及び誘電特性が低下し,実用に耐えうる特性の圧電磁器組成物を得ることができないおそれがある。
また,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物において、yの範囲は、0≦y≦0.85であることがより好ましく、0.05≦y≦0.75であることがさらに好ましい。これらの場合には,上記圧電磁器組成物の圧電d31定数及び電気機械結合係数Kpを一層向上させることができる。さらに一層好ましくは,0.05≦y<0.75がよく、さらには0.35≦y≦0.65がよく、さらには0.35≦y<0.65がより好ましい。また,最も好ましくは,0.42≦y≦0.60がよい。
In the present invention, the above general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) compound represented by the O 3 is, x, y, z, a range of w Are respectively in 0 ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4 and 0 <w ≦ 0.2.
Here, in the case of x> 0.2, z> 0.4, w> 0.2, z = 0, or w = 0, the piezoelectric characteristics and dielectric characteristics such as a piezoelectric d 31 constant is lowered, practically It may not be possible to obtain a piezoelectric ceramic composition having characteristics that can withstand high temperatures.
In the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) compound represented by O 3, the range of y is, 0 ≦ y ≦ 0. It is more preferably 85, and further preferably 0.05 ≦ y ≦ 0.75. In these cases, the piezoelectric d31 constant and the electromechanical coupling coefficient Kp of the piezoelectric ceramic composition can be further improved. Still more preferably, 0.05 ≦ y <0.75, more preferably 0.35 ≦ y ≦ 0.65, and even more preferably 0.35 ≦ y <0.65. Most preferably, 0.42 ≦ y ≦ 0.60 is good.

上記圧電磁器組成物は,上記のごとく,ペロブスカイト構造(ABO3)の化合物を主成分としている。本発明において,上記ペロブスカイト構造(ABO3)におけるAサイトの元素構成は,K,Na乃至はK,Na,Liに相当し,Bサイトの元素構成は,Nb,Ta,Sbに相当する。このペロブスカイト構造の組成式においては,Aサイトを構成する原子とBサイト構成する原子が1:1となる化学量論比のとき,完全なペロブスカイト構造となるが,上記圧電磁器組成物の場合には,特にK,Na,Li,Sbが焼成工程等で数%,具体的には3%程度揮発したり,また全構成元素が混合粉砕や造粒工程等にて数%,具体的には3%程度変動することがある。即ち,製法のバラツキにより,化学量論組成からの変動が起こる場合がある。 As described above, the piezoelectric ceramic composition contains a compound having a perovskite structure (ABO 3 ) as a main component. In the present invention, the element configuration of the A site in the perovskite structure (ABO 3 ) corresponds to K, Na or K, Na, and Li, and the element configuration of the B site corresponds to Nb, Ta, and Sb. In the composition formula of the perovskite structure, when the stoichiometric ratio of the atoms constituting the A site and the atoms constituting the B site is 1: 1, a complete perovskite structure is obtained. In particular, K, Na, Li, and Sb are volatilized by several%, specifically, about 3% in a firing step or the like, and all constituent elements are mixed by several% in a mixing pulverization or granulation step, and specifically, It may fluctuate by about 3%. That is, the stoichiometric composition may fluctuate due to variations in the manufacturing method.

このような製造工程上の組成変動への対応として,意図的に配合組成比を変えることにより,焼成後の圧電磁器組成物の組成比を,±数%,より具体的には±3〜5%程度変動させることができる。このことは,例えば従来のチタン酸ジルコン酸塩(PZT)の場合でも同様であり,焼成時の鉛の蒸発や,粉砕メディアであるジルコニアボールからのジルコニアの混入を考慮して配合比を調整することができる。   In order to cope with such compositional fluctuations in the manufacturing process, the compositional ratio of the piezoelectric ceramic composition after firing is increased by ± several%, more specifically ± 3 to 5 by intentionally changing the composition ratio. %. This is the same for, for example, the conventional zirconate titanate (PZT), and the mixing ratio is adjusted in consideration of the evaporation of lead during firing and the incorporation of zirconia from zirconia balls as grinding media. be able to.

本発明の圧電磁器組成物においては,上記のように意図的に配合組成比を変えても,圧電特性等の電気的特性は大きく変化しない。
したがって,本発明においては,上記一般式Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物は,これをペロブスカイト構造の組成式ABO3にあてはめたときに,Aサイト原子とBサイト原子の構成比を1:1に対してそれぞれ±5モル%程度までずれた構成比とすることができる。なお,構成される結晶中の格子欠陥をより少なくし,高い電気的特性を得るためには,好ましくは±3%程度までの組成がよい。
即ち,上記圧電磁器組成物の主成分としての上記一般式で表される化合物は,[Lix(K1-yNay1-xa{(Nb1-z-wTazSbw)}b3(0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2,0.95≦a,b≦1.05)となる範囲を含むものである。また,上述のごとく,上記の式において,a及びbの範囲は0.97≦a,b≦1.03であることが好ましい。
In the piezoelectric ceramic composition of the present invention, electrical characteristics such as piezoelectric characteristics do not significantly change even if the composition ratio is intentionally changed as described above.
Accordingly, in the present invention, the general formula Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) compound represented by O 3, this a perovskite structure formula When applied to ABO 3 , the composition ratio of A-site atoms and B-site atoms can be shifted to about ± 5 mol% with respect to 1: 1. In order to reduce lattice defects in the formed crystal and obtain high electrical characteristics, the composition is preferably up to about ± 3%.
That is, the general compound of formula as the main component of the piezoelectric ceramic composition, [Li x (K 1- y Na y) 1-x] a {(Nb 1-zw Ta z Sb w)} b O 3 (0 ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4, 0 <w ≦ 0.2, 0.95 ≦ a, b ≦ 1.05) Including. Further, as described above, in the above equation, the range of a and b is preferably 0.97 ≦ a, b ≦ 1.03.

また,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3におけるxの範囲は,0<x≦0.2であることが好ましい。
この場合には,Liが必須成分となるので,上記圧電磁器組成物は,その作製時の焼成を一層容易に行うことができると共に,圧電特性をより向上させ,キュリー温度を一層高くすることができる。これはLiを上記の範囲内において必須成分とすることにより,焼成温度が低下すると共に,Liが焼成助剤の役割を果たし,さらに空孔の少ない焼成を可能とするからである。
Similarly, the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) range of x of O 3 is preferably 0 <x ≦ 0.2 .
In this case, since Li is an essential component, the piezoelectric ceramic composition can be more easily fired at the time of its manufacture, and can further improve the piezoelectric characteristics and further increase the Curie temperature. it can. This is because by making Li an essential component within the above range, the firing temperature is lowered, and Li plays the role of a firing aid, and firing with fewer pores is possible.

また,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3のxの値は,x=0とすることができる。
この場合には,上記一般式は(K1-yNay)(Nb1-z-wTazSbw)O3で表される。そしてこの場合には,上記圧電磁器組成物を作製する際に,その原料中に例えばLiCO3のように,最も軽量なLiを含有してなる化合物を含まないので,原料を混合し上記圧電磁器組成物を作製するときに原料粉の偏析による特性のばらつきを小さくすることができる。また,この場合には,高い比誘電率と比較的大きな圧電g定数を実現できる。
The value of the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3 of x may be a x = 0.
In this case, the general formula is represented by (K 1-y Na y) (Nb 1-zw Ta z Sb w) O 3. In this case, when preparing the piezoelectric ceramic composition, since the raw material does not include a compound containing the lightest Li such as LiCO 3 , the raw materials are mixed and the piezoelectric ceramic is mixed. Variations in characteristics due to segregation of the raw material powder when producing the composition can be reduced. In this case, a high relative dielectric constant and a relatively large piezoelectric g constant can be realized.

また,上記第1の発明において,上記圧電磁器組成物は,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を添加元素として含有してなり,上記添加物の含有量の合計は,上記一般式で表される化合物1molに対して,0.0005mol〜0.15molである。   Further, in the first invention, the piezoelectric ceramic composition comprises Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, Any one or more metal elements selected from V, Y, Yb, Zn, and Zr are contained as additive elements, and the total content of the additives is based on 1 mol of the compound represented by the general formula. 0.0005 mol to 0.15 mol.

上記添加元素の含有量の合計が0.0005mol未満の場合には,みかけ密度が高く,空孔率及び開気孔率が低くなるという効果を充分に得ることができないおそれがある。一方,上記含有量の合計が0.15molを超える場合には,上記圧電磁器組成物の作製の際に焼結が困難になる。また,焼結後に,基となる組成物がもつ結晶構造とは異なる結晶相が出現し,焼結後の上記圧電磁器組成物のみかけ密度が低下するおそれがある。また,上記圧電磁器組成物の表面や内部に空孔が生じて,空孔率や開気孔率が高くなり,圧電磁器組成物の機械的強度が低下するおそれがある。
なお,上記添加元素の含有量は,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrの各金属元素のモル数である。
If the total content of the additional elements is less than 0.0005 mol, the effect of high apparent density and low porosity and open porosity may not be sufficiently obtained. On the other hand, when the sum of the contents exceeds 0.15 mol, sintering becomes difficult when producing the piezoelectric ceramic composition. Further, after sintering, a crystal phase different from the crystal structure of the base composition may appear, and the apparent density of the piezoelectric ceramic composition after sintering may decrease. In addition, voids may be generated on the surface or inside of the piezoelectric ceramic composition, resulting in an increase in porosity and open porosity, and a decrease in mechanical strength of the piezoelectric ceramic composition.
The contents of the above-mentioned additional elements are Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, It is the number of moles of each metal element of Zn and Zr.

また,上記添加元素は,上記一般式で表される化合物のLi,K,Na,Nb,Ta,Sbのいずれか1種以上の少なくとも一部を,上記Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素に置換して配置する形態や,上記金属元素又はこれを含む酸化物乃至はペロブスカイト構造化合物等の化合物として上記圧電磁器組成物中の粒内乃至は粒界に存在する形態をとることができる。   In addition, the additive element may include at least a part of any one or more of Li, K, Na, Nb, Ta, and Sb of the compound represented by the general formula, and may include the Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr It can be in the form of a metal element or a compound containing the same, such as an oxide or a perovskite structure compound, which exists in a grain or a grain boundary in the piezoelectric ceramic composition.

本発明の圧電磁器組成物においては,上記添加物が上述した2つの形態のうちいずれの形態で含有されていても,同等に優れたみかけ密度,開気孔率,及び空孔率を示すことができる。   In the piezoelectric ceramic composition of the present invention, even if the above-mentioned additive is contained in any of the two forms described above, the additive exhibits the same excellent apparent density, open porosity, and porosity. it can.

また,上記圧電磁器組成物の開気孔率は0.4Vol%以下である。
上記圧電磁器組成物の開気孔率が0.4Vol%を超える場合には,上記圧電磁器組成物の機械的強度が不十分となり,圧電素子や誘電素子への適用が困難になるおそれがある。
The open porosity of the piezoelectric ceramic composition is 0.4 Vol% or less.
When the open porosity of the piezoelectric ceramic composition exceeds 0.4 Vol%, the mechanical strength of the piezoelectric ceramic composition becomes insufficient, and it may be difficult to apply the piezoelectric ceramic composition to a piezoelectric element or a dielectric element.

次に,上記圧電磁器組成物のみかけ密度は,上記一般式で表され,上記添加元素を含有していない圧電磁器組成物のみかけ密度よりも,大きいことが好ましい(請求項2)。
上記圧電磁器組成物のみかけ密度が,上記一般式で表され,上記添加元素を含有していない圧電磁器組成物(以下適宜基本圧電磁器組成物という)のみかけ密度よりも小さい場合には,上記添加物の効果を充分に得ることができないだけでなく,上記圧電磁器組成物の機械的強度が不十分となるおそれがある。
Next, it is preferable that the apparent density of the piezoelectric ceramic composition is represented by the general formula and is higher than the apparent density of the piezoelectric ceramic composition not containing the additional element.
When the apparent density of the piezoelectric ceramic composition is smaller than the apparent density of the piezoelectric ceramic composition represented by the general formula and not containing the additional element (hereinafter, referred to as a basic piezoelectric ceramic composition as appropriate), Not only can the effect of the additive not be sufficiently obtained, but also the mechanical strength of the piezoelectric ceramic composition may be insufficient.

上述の「上記一般式で表され,上記添加元素を含有していない圧電磁器組成物のみかけ密度よりも,大きい」とは,上記添加元素を含有する圧電磁器組成物のみかけ密度が,この圧電磁器組成物の基本組成を有し上記添加元素を含有していない基本圧電磁器組成物に比べて,大きいことを意味するものである。   As described above, the expression “larger than the apparent density of the piezoelectric ceramic composition not containing the additive element represented by the general formula” means that the apparent density of the piezoelectric ceramic composition containing the additive element is the This means that it is larger than the basic piezoelectric ceramic composition having the basic composition of the porcelain composition and not containing the additional element.

次に,上記圧電磁器組成物の空孔率或いは開気孔率の少なくとも一方は,上記一般式で表され,上記添加元素を含有していない圧電磁器組成物の空孔率或いは開気孔率よりも,小さいことが好ましい(請求項3)。
上記一般式で表され,上記添加元素を含有していない圧電磁器組成物(基本圧電磁器組成物)の空孔率或いは開気孔率よりも小さい場合には,上記添加元素の効果を充分に得ることができないだけでなく,上記圧電磁器組成物の機械的強度が不十分となるおそれがある。
Next, at least one of the porosity and the open porosity of the piezoelectric ceramic composition is represented by the general formula, and is smaller than the porosity or the open porosity of the piezoelectric ceramic composition containing no additional element. , Preferably smaller (claim 3).
If the porosity or open porosity of the piezoelectric ceramic composition (basic piezoelectric ceramic composition) which is represented by the above general formula and does not contain the above-mentioned additive element is smaller than the above, the effect of the above-mentioned additional element is sufficiently obtained. In addition to this, the mechanical strength of the piezoelectric ceramic composition may be insufficient.

上述の「上記一般式で表され,上記添加元素を含有していない圧電磁器組成物の空孔率或いは開気孔率よりも,小さい」とは,上記添加元素を含有する圧電磁器組成物の空孔率或いは開気孔率が,この圧電磁器組成物の基本組成を有し上記添加元素を含有していない基本圧電磁器組成物に比べて,小さいことを意味するものである。   The above-mentioned “smaller than the porosity or open porosity of the piezoelectric ceramic composition not represented by the general formula and containing the additive element” means that the piezoelectric ceramic composition containing the additive element does not This means that the porosity or open porosity is smaller than that of the basic piezoelectric ceramic composition having the basic composition of the piezoelectric ceramic composition and not containing the above-mentioned additional element.

また,上記第2(請求項4)又は第3の発明(請求項5)において,上記添加物としては,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素又はこれらの金属元素を含む化合物等がある。   In the second (claim 4) or the third invention (claim 5), the additives include Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Examples include any one or more metal elements selected from Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, and Zr, and compounds containing these metal elements.

上記添加物を添加した結果,その添加物に含まれる上記金属元素は添加元素として,上記焼成後に一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表される化合物のLi,K,Na,Nb,Ta,Srの少なくとも一部に置換して,上記圧電磁器組成物中に含有される場合がある。また,上記金属元素又は該金属元素を含む酸化物乃至はペロブスカイト構造化合物等の化合物として,上記圧電磁器組成物中の粒内乃至は粒界等に含有される場合もある。 As a result of adding the additives, as the metal element additive element contained in the additive formula after the burning {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w ) Li, K, Na, Nb, Ta, and Sr of the compound represented by O 3 may be substituted for at least a part of the compound and contained in the piezoelectric ceramic composition. In addition, the metal element or a compound containing the metal element, such as an oxide or a perovskite structure compound, may be contained in the piezoelectric ceramic composition in a grain or a grain boundary.

次に,上記第3の発明(請求項5)において,上記リチウムを含有する化合物としては,例えばLi2CO3,Li2O,LiNO3,LiOH等がある。また,上記ナトリウムを含有する化合物としては,Na2CO3,NaHCO3,NaNO3等がある。 Next, in the third invention (claim 5), the compound containing lithium includes, for example, Li 2 CO 3 , Li 2 O, LiNO 3 , and LiOH. The sodium-containing compounds include Na 2 CO 3 , NaHCO 3 and NaNO 3 .

また,上記カリウムを含有する化合物としては,K2CO3,KNO3,KNbO3,KTaO3等がある。また,上記ニオブを含有する化合物としては,例えばNb25,Nb23,NbO2等がある。また,上記タンタルを含有する化合物としては,Ta25等がある。また,上記アンチモンを含有する化合物としては,例えばSb25,Sb23,Sb24等がある。 Examples of the potassium-containing compound include K 2 CO 3 , KNO 3 , KNbO 3 , and KTaO 3 . Examples of the compound containing the above-mentioned niobium, for example Nb 2 O 5, Nb 2 O 3, there is NbO 2 and the like. Examples of the tantalum-containing compound include Ta 2 O 5 . Examples of the compound containing the above antimony, for example, a Sb 2 O 5, Sb 2 O 3, Sb 2 O 4 or the like.

次に,上記Liを含有する化合物はLi2CO3,上記Naを含有する化合物はNa2CO3,上記Kを含有する化合物はK2CO3,Nbを含有する化合物はNb25,上記Taを含有する化合物はTa25,上記Sbを含有する化合物はSb25又はSb23,上記添加物はAg2O,Al23,Au,Au23,B23,H3BO3,BaO,BaO2,BaCO3,Bi23,CaO,CaCO3,CeO2,Ce2(CO33,CoO,Co34,CoCO3,Cs2CO3,CuO,Cu2O,Dy23,Er23,Eu23,Fe23,Ga23,Gd23,GeO2,HfO2,Ho23,In23,IrO2,Ir23,La23,Lu23,MgO,MgC24,MnO,MnO2,Mn23,Mn34,Nd23,Nd2CO3,NiO,NiCO3,PdO,Pr23,Pr611,Pr2(CO33,PtO2,Rb2O,Rb2CO3,Re27,RuO2,Sc23,SiO2,SiO,SiC,Sm23,SnO,SnO2,SrO,SrCO3,Tb47,TiO,Ti23,TiO2,Tm23,V23,V24,V25,Y23,Y2(CO33,Yb23,ZnO,ZrO2から選ばれるいずれか1種以上であることが好ましい(請求項6)。
この場合には,上記圧電磁器組成物を容易に作製することができる。
Next, the compound containing Li is Li 2 CO 3 , the compound containing Na is Na 2 CO 3 , the compound containing K is K 2 CO 3 , the compound containing Nb is Nb 2 O 5 , The Ta-containing compound is Ta 2 O 5 , the Sb-containing compound is Sb 2 O 5 or Sb 2 O 3 , and the additive is Ag 2 O, Al 2 O 3 , Au, Au 2 O 3 , B 2 O 3 , H 3 BO 3 , BaO, BaO 2 , BaCO 3 , Bi 2 O 3 , CaO, CaCO 3 , CeO 2 , Ce 2 (CO 3 ) 3 , CoO, Co 3 O 4 , CoCO 3 , Cs 2 CO 3, CuO, Cu 2 O , Dy 2 O 3, Er 2 O 3, Eu 2 O 3, Fe 2 O 3, Ga 2 O 3, Gd 2 O 3, GeO 2, HfO 2, Ho 2 O 3, In 2 O 3, IrO 2, Ir 2 O 3, La 2 O 3, Lu 2 O 3, MgO, MgC 2 O 4, MnO MnO 2, Mn 2 O 3, Mn 3 O 4, Nd 2 O 3, Nd 2 CO 3, NiO, NiCO 3, PdO, Pr 2 O 3, Pr 6 O 11, Pr 2 (CO 3) 3, PtO 2 , Rb 2 O, Rb 2 CO 3, Re 2 O 7, RuO 2, Sc 2 O 3, SiO 2, SiO, SiC, Sm 2 O 3, SnO, SnO 2, SrO, SrCO 3, Tb 4 O 7, TiO, Ti 2 O 3, TiO 2, Tm 2 O 3, V 2 O 3, V 2 O 4, V 2 O 5, Y 2 O 3, Y 2 (CO 3) 3, Yb 2 O 3, ZnO, It is preferably at least one selected from ZrO 2 (claim 6).
In this case, the piezoelectric ceramic composition can be easily produced.

次に,上記第4(請求項7)又は第5の発明(請求項8)において,上記圧電素子としては,例えば圧電アクチュエータ,圧電フィルター,圧電振動子,圧電トランス,圧電超音波モータ,圧電ジャイロセンサ,ノックセンサ,ヨーレートセンサ,エアバッグセンサ,バックソナー,コーナーソナー,圧電ブザー,圧電スピーカー,圧電着火器等がある。   Next, in the fourth (claim 7) or the fifth invention (claim 8), the piezoelectric element includes, for example, a piezoelectric actuator, a piezoelectric filter, a piezoelectric vibrator, a piezoelectric transformer, a piezoelectric ultrasonic motor, a piezoelectric gyro. There are sensors, knock sensors, yaw rate sensors, airbag sensors, back sonars, corner sonars, piezoelectric buzzers, piezoelectric speakers, and piezoelectric igniters.

次に,上記第6(請求項9)又は第7の発明(請求項10)において,上記誘電素子としては,例えばコンデンサ,積層コンデンサ等がある。   Next, in the sixth (invention 9) or the seventh invention (invention 10), examples of the dielectric element include a capacitor and a multilayer capacitor.

(実施例1)
次に,本発明の実施例にかかる圧電磁器組成物につき説明する。
本例では,上記圧電磁器組成物を作製し,その特性を評価する。
本例の圧電磁器組成物は,一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物を主成分とする圧電磁器組成物である。該圧電磁器組成物は,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種の金属元素を添加元素として含有してなる。上記添加元素の含有量は,上記一般式で表される化合物1molに対して,0.01molである。また,上記圧電磁器組成物の開気孔率は0.4Vol%以下である。
(Example 1)
Next, a piezoelectric ceramic composition according to an example of the present invention will be described.
In this example, the piezoelectric ceramic composition was prepared and its characteristics were evaluated.
The piezoelectric ceramic composition of this example is represented by the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w Are piezoelectric ceramic compositions containing, as main components, compounds having composition ranges of 0 ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4, and 0 <w ≦ 0.2, respectively. The piezoelectric ceramic composition comprises Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir. , La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr Any one of metal elements selected from the group consisting of: The content of the additional element is 0.01 mol based on 1 mol of the compound represented by the general formula. The open porosity of the piezoelectric ceramic composition is 0.4 Vol% or less.

本例の圧電磁器組成物の製造方法は,Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物とを,焼成後に一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物となるような化学量論比にて混合し,さらにAg,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種の金属元素を含む添加物を混合し,焼成する。 The method for producing the piezoelectric ceramic composition of the present example comprises a compound containing Li, a compound containing Na, a compound containing K, a compound containing Nb, a compound containing Ta, and a compound containing Sb. with a compound of the general formula after calcination {Li x (K 1-y Na y) 1-x} is represented by (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w, respectively The compounds are mixed at a stoichiometric ratio such that the compounds fall within the composition ranges of 0 ≦ x ≦ 0.2, 0 ≦ y ≦ 1, 0 <z ≦ 0.4, and 0 <w ≦ 0.2. , Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn , Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Y , Zn, a mixture of additives comprising any one metal element selected from Zr, calcined.

以下,本例の圧電磁器組成物の製造方法につき,詳細に説明する。
まず,圧電磁器組成物の基本組成の原料として,純度99%以上の高純度のLi2CO3,Na2CO3,K2CO3,Nb25,Ta25,及びSb25を準備した。
Hereinafter, the method for producing the piezoelectric ceramic composition of the present example will be described in detail.
First, high-purity Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , and Sb 2 O having a purity of 99% or more were used as raw materials for the basic composition of the piezoelectric ceramic composition. Prepared 5 .

次に,これらの原料と,上記添加物としてのAg2O,Al23,Au,Au23,B23,H3BO3,BaO,BaO2,BaCO3,Bi23,CaO,CaCO3,CeO2,Ce2(CO33,CoO,Co34,CoCO3,Cs2CO3,CuO,Cu2O,Dy23,Er23,Eu23,Fe23,Ga23,Gd23,GeO2,HfO2,Ho23,In23,IrO2,Ir23,La23,Lu23,MgO,MgC24,MnO,MnO2,Mn23,Mn34,Nd23,Nd2CO3,NiO,NiCO3,PdO,Pr23,Pr611,Pr2(CO33,PtO2,Rb2O,Rb2CO3,Re27,RuO2,Sc23,SiO2,SiO,SiC,Sm23,SnO,SnO2,SrO,SrCO3,Tb47,TiO,Ti23,TiO2,Tm23,V23,V24,V25,Y23,Y2(CO33,Yb23,ZnO,ZrO2のいずれか1組成とを,化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3に上記の各添加物に含まれる金属元素が圧電磁器組成物中に含まれるような組成で配合して,47種類の配合物を得た。添加した元素の存在形態としては,圧電磁器組成物の結晶粒内にあっても,結晶粒界にあってもよい。 Next, these raw materials and Ag 2 O, Al 2 O 3 , Au, Au 2 O 3 , B 2 O 3 , H 3 BO 3 , BaO, BaO 2 , BaCO 3 , and Bi 2 O as the above additives are added. 3, CaO, CaCO 3, CeO 2, Ce 2 (CO 3) 3, CoO, Co 3 O 4, CoCO 3, Cs 2 CO 3, CuO, Cu 2 O, Dy 2 O 3, Er 2 O 3, Eu 2 O 3 , Fe 2 O 3 , Ga 2 O 3 , Gd 2 O 3 , GeO 2 , HfO 2 , Ho 2 O 3 , In 2 O 3 , IrO 2 , Ir 2 O 3 , La 2 O 3 , Lu 2 O 3, MgO, MgC 2 O 4, MnO, MnO 2, Mn 2 O 3, Mn 3 O 4, Nd 2 O 3, Nd 2 CO 3, NiO, NiCO 3, PdO, Pr 2 O 3, Pr 6 O 11 , Pr 2 (CO 3 ) 3 , PtO 2 , Rb 2 O, Rb 2 CO 3 , Re 2 O 7 , RuO 2 , Sc 2 O 3 , SiO 2 , SiO , SiC, Sm 2 O 3, SnO, SnO 2, SrO, SrCO 3, Tb 4 O 7, TiO, Ti 2 O 3, TiO 2, Tm 2 O 3, V 2 O 3, V 2 O 4, V 2 Any one of the compositions of O 5 , Y 2 O 3 , Y 2 (CO 3 ) 3 , Yb 2 O 3 , ZnO, and ZrO 2 was converted to a compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 was blended with a composition such that the metal element contained in each of the above-mentioned additives was contained in the piezoelectric ceramic composition to obtain 47 kinds of blends. The added element may be present in the crystal grains of the piezoelectric ceramic composition or at the grain boundaries.

上記添加物の配合量については,上記化学量論比にて配合して焼成後に得られると予想される化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O31molに対して,後述する表1及び表2に示す添加量にて配合した。このとき,各添加物の含有量は,どの添加物を含有させた場合においても,上記添加物が含有する金属元素の量が0.01molとなるようにした。 Regarding the compounding amount of the above-mentioned additive, 1 mol of compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3, which is expected to be obtained after baking with the above stoichiometric ratio , With the addition amounts shown in Tables 1 and 2 described below. At this time, the content of each additive was such that the amount of the metal element contained in the additive was 0.01 mol regardless of which additive was contained.

続いて,各配合物をそれぞれボールミルによりアセトン中で24時間混合して混合物を作製した。
次に,各混合物をそれぞれ温度750℃にて5時間仮焼し,続いてこの仮焼後の各混合物をそれぞれボールミルにて24時間粉砕した。続いて,バインダーとしてポリビニルブチラールを添加し,造粒した。
Subsequently, each compound was mixed in acetone by a ball mill for 24 hours to prepare a mixture.
Next, each mixture was calcined at a temperature of 750 ° C. for 5 hours, and then each of the calcined mixtures was pulverized by a ball mill for 24 hours. Subsequently, polyvinyl butyral was added as a binder and granulated.

造粒後の各粉体を圧力2ton/cm2にて,直径13mm,厚さ2mmの円盤状に加圧成形し,得られる成形体を温度1000〜1300℃にて1時間焼成し,焼成体を作製した。なお,この時の具体的な焼成温度は,上記の1000℃〜1300℃という温度範囲のうち1時間の焼成によって最大密度の焼成体が得られる温度を選定した。そしてこの時,上記焼成体は,すべて相対密度98%以上に緻密化されていた。 Each of the granulated powders is pressed at a pressure of 2 ton / cm 2 into a disc having a diameter of 13 mm and a thickness of 2 mm, and the obtained compact is fired at a temperature of 1000 to 1300 ° C. for 1 hour. Was prepared. The specific firing temperature at this time was selected from the above-mentioned temperature range of 1000 ° C. to 1300 ° C. at which a fired body having the maximum density can be obtained by firing for one hour. At this time, all of the fired bodies were densified to a relative density of 98% or more.

次に,各焼成体の両面を平行研磨し,円形研磨した後,この円盤試料の両面にスパッタ法により金電極を設けた。そして,100℃のシリコーンオイル中にて1〜5kV/mmの直流電圧を10分間電極層間に印可し,厚み方向に分極を施して圧電磁器組成物とした。
このようにして,47種類の圧電磁器組成物(試料E1〜試料E47)を作製した。各試料における添加物の種類及び配合量を,後述の表1及び表2に示す。
Next, both sides of each fired body were polished in parallel and circularly polished, and then gold electrodes were provided on both sides of the disk sample by sputtering. Then, a DC voltage of 1 to 5 kV / mm was applied between the electrode layers in a silicone oil at 100 ° C. for 10 minutes, and polarization was performed in the thickness direction to obtain a piezoelectric ceramic composition.
Thus, 47 types of piezoelectric ceramic compositions (samples E1 to E47) were prepared. The types and amounts of additives in each sample are shown in Tables 1 and 2 below.

また,本例の製造方法と異なる方法として,上記{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3で表される化合物を焼成により作製し,これを粉砕して上記添加物と混合し,その後本例の製造方法と同様に,仮焼,造粒,成形,焼成を行っても,上記試料E1〜E47と同様の圧電磁器組成物を作製することができる。 Further, as a method different from the production method of this example, a compound represented by the above {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 is produced by firing, and this is pulverized. Even if the mixture is mixed with the above additives, and then calcined, granulated, molded and fired in the same manner as in the production method of this example, a piezoelectric ceramic composition similar to the above-mentioned samples E1 to E47 can be produced.

次に,本例では,上記圧電磁器組成物(試料E1〜E47)の優れた特性を明らかにするため,以下のようにして,3種類の比較品(試料C1〜試料C3)を作製した。
まず,比較品の原料として,純度99%以上の高純度のLi2CO3,Na2CO3,K2CO3,Nb25,Ta25,Sb25,MoO3,WO3を準備した。
Next, in this example, in order to clarify the excellent characteristics of the piezoelectric ceramic composition (samples E1 to E47), three types of comparative products (samples C1 to C3) were prepared as follows.
First, high-purity Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , Sb 2 O 5 , MoO 3 , WO with a purity of 99% or more are used as raw materials for comparative products. Prepared 3 .

これらの原料のうち,Li2CO3,Na2CO3,K2CO3,Nb25,Ta25,及びSb25を,焼成後に化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3となるような化学量論比にて配合して,配合物を得た。
この配合物をボールミルによりアセトン中で24時間混合し,さらに上記試料E1〜E47と同様にして,仮焼,造粒,成形,焼成し,分極を施して,比較品としての圧電磁器組成物(試料C1)を作製した。この試料C1は,上記添加元素を含有していない圧電磁器組成物である。
Among these raw materials, Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , and Sb 2 O 5 are converted into a compound {Li 0.04 (K 0.5 Na 0.5 ) after firing. It was blended at a stoichiometric ratio such that 0.966 (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 to obtain a blend.
This composition was mixed in acetone using a ball mill for 24 hours, and calcined, granulated, molded, fired, and polarized in the same manner as in Samples E1 to E47. Sample C1) was produced. This sample C1 is a piezoelectric ceramic composition containing no additional element.

また,上記の{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3となるような化学量論比にて配合した配合物に,添加物としてMoO3又はWO3をそれぞれ添加して,2種類の配合物を作製した。このときの添加物の添加量は,後述する表2に示すとおりである。 In addition, MoO 3 or WO 3 was added as an additive to the above-mentioned composition blended at a stoichiometric ratio such that {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3. Each was added to make two formulations. At this time, the additive amount of the additive is as shown in Table 2 described later.

続いて,各配合物をボールミルによりアセトン中で24時間混合し,さらに上記試料E1〜E47と同様にして,仮焼,造粒,成形,焼成し,分極を施して,比較品としての圧電磁器組成物(試料C2及び試料C3)を作製した。試料C2及び試料C3は,それぞれ,化合物Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O31molに対して,添加物としてのMoO3又はWO3を,金属元素の量で,それぞれ0.01molずつ含有してなるものである。 Subsequently, each composition was mixed in acetone by a ball mill for 24 hours, and calcined, granulated, molded, fired, and polarized in the same manner as in Samples E1 to E47. Compositions (Sample C2 and Sample C3) were prepared. Sample C2 and Sample C3 were prepared by adding MoO 3 or WO 3 as an additive to the compound Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 , , Each containing 0.01 mol.

次に,上記試料E1〜E47及び試料C1〜C3のみかけ密度及び開気孔率を測定した。その結果を表1及び表2に示す。
なお,開気孔率は,下記の方法により測定した。
Next, the apparent densities and open porosity of the samples E1 to E47 and the samples C1 to C3 were measured. The results are shown in Tables 1 and 2.
The open porosity was measured by the following method.

(開気孔率)
まず,試料の重さを量り,これを乾燥重量とする。続いて,この試料を水の中に完全に浸し,真空脱泡を施し,試料に水を充分に吸収させる。この試料をアルキメデス法にて試料を水中に没した状態で重さを量り,これを水中重量とする。その後,この試料を水から引き上げ,余分な水を除去し,再び試料の重さを量る。これを含水重量とする。
次に,上記にて得られら乾燥重量,水中重量及び含水重量から,下記の式(1)を用いて,試料の開気孔率(Vol%)を算出した。
開気孔率(Vol%)=(含水重量−乾燥重量)/(含水重量−水中重量)・・・(式1)
(Open porosity)
First, weigh the sample and use it as the dry weight. Subsequently, the sample is completely immersed in water, subjected to vacuum degassing, and the sample is sufficiently absorbed with water. This sample is weighed by the Archimedes method in a state where the sample is submerged in water, and this is defined as the weight in water. The sample is then withdrawn from the water, excess water is removed and the sample is weighed again. This is defined as the wet weight.
Next, the open porosity (Vol%) of the sample was calculated from the dry weight, the weight in water, and the weight containing water obtained above using the following equation (1).
Open porosity (Vol%) = (Wet weight−Dry weight) / (Wet weight−Water weight) (Formula 1)

Figure 2004244300
Figure 2004244300

Figure 2004244300
Figure 2004244300

表1及び表2より知られるごとく,上記試料E1〜E47の圧電磁器組成物は比較品としての試料C1〜試料C3に比べて,同等以上にみかけ密度が高く,また開気孔率においても0.4Vol%以下という低い値を示した。
このように,試料E1〜E47の圧電磁器組成物は,機械的強度に優れるものであることがわかる。
As is known from Tables 1 and 2, the piezoelectric ceramic compositions of Samples E1 to E47 have an apparent density higher than or equal to that of Samples C1 to C3 as comparative products, and also have an open porosity of 0. The value was as low as 4 Vol% or less.
Thus, it can be seen that the piezoelectric ceramic compositions of Samples E1 to E47 have excellent mechanical strength.

また,表1及び表2には示していないが,上記試料E1〜E47の圧電特性及び誘電特性をインピーダンスアナライザーを用いて共振−反共振法により測定したところ,試料E1〜試料E47の圧電磁器組成物は,圧電d31定数,電気機械結合係数Kp,圧電g31定数,機械的品質係数Qm,比誘電率,誘電損失,及びキュリー温度等の圧電特性及び誘電特性にも優れていた。
したがって,本例の圧電磁器組成物は,機械的強度に優れ,かつ高性能な圧電素子及び誘電素子として利用することができる。
Although not shown in Tables 1 and 2, the piezoelectric and dielectric properties of the samples E1 to E47 were measured by a resonance-anti-resonance method using an impedance analyzer, and the piezoelectric ceramic compositions of the samples E1 to E47 were measured. things, the piezoelectric d 31 constant, electromechanical coupling factor Kp, piezoelectric g 31 constant, the mechanical quality factor Qm, dielectric constant, dielectric loss, and was excellent in piezoelectric characteristics and dielectric characteristics of the Curie temperature.
Therefore, the piezoelectric ceramic composition of this example can be used as a piezoelectric element and a dielectric element having excellent mechanical strength and high performance.

(実施例2)
本例では,上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3(但し,0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2)で表される化合物のLi,K,Na,Nb,Ta,Sbの少なくとも一部に,上記添加物中の各金属元素を置換した状態で添加物を含有させた試料(以下,適宜置換添加させた試料という)と,上記添加物を外添加して含有させた試料(以下,適宜外添加した試料という)とを準備し,その特性を比較する。
(Example 2)
In this example, the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3 ( where, 0 ≦ x ≦ 0.2,0 ≦ y ≦ 1 , 0 <z ≦ 0.4, 0 <w ≦ 0.2), at least a portion of Li, K, Na, Nb, Ta, and Sb of each of the compounds represented by the above-mentioned additives are substituted. In this state, a sample containing an additive (hereinafter referred to as a sample appropriately substituted and added) and a sample containing the above additive and added (hereinafter referred to as a sample appropriately added) are prepared. Compare their properties.

まず,上記の外添加した試料として,実施例1にて作製した試料E1,試料E5,試料E7,試料E10,試料E25,試料E32,及び試料E39とを準備した。これらの試料E1,試料E5,試料E7,試料E10,試料E25,試料E32,及び試料E39は,化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3に,上記添加物としてのAg2O,BaO,CaCO3,Cs2CO3,MgO,Rb2O,又はSrCO3を外添加し,合成したものである。 First, samples E1, E5, E7, E10, E25, E32, and E39 prepared in Example 1 were prepared as the above-mentioned externally added samples. These samples E1, E5, E7, E10, E25, E32, and E39 were prepared by adding the compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 Ag 2 O, BaO, CaCO 3 , Cs 2 CO 3 , MgO, Rb 2 O, or SrCO 3 were added as additives and synthesized.

次に,以下のようにして,上記添加物を置換添加させた試料を作製する。
まず,圧電磁器組成物の基本組成の原料として,純度99%以上の高純度のLi2CO3,Na2CO3,K2CO3,Nb25,Ta25,Sb25,及び上記添加物としてAg2O,BaO,CaCO3,Cs2CO3,MgO,Rb2O,又はSrCO3を準備した。
Next, a sample to which the above-mentioned additives are added is prepared as follows.
First, as raw materials of the basic composition of the piezoelectric ceramic composition, high-purity Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , Sb 2 O 5 with a purity of 99% or more. And Ag 2 O, BaO, CaCO 3 , Cs 2 CO 3 , MgO, Rb 2 O, or SrCO 3 as the additive.

次に,上記基本組成の原料と,上記した各添加物のうちの1種とを,化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O3に上記添加物中の各金属元素が焼成後に置換固溶されるような化学量論比にて配合し,7種類の配合物を作製した。具体的には,それぞれ{Li0.04(K0.5Na0.50.95Ag0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.94Ba0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.94Ca0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.95Cs0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.94Mg0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.95Rb0.01}(Nb0.86Ta0.10Sb0.04)O3,{Li0.04(K0.5Na0.50.94Sr0.01}(Nb0.86Ta0.10Sb0.04)O3となるようにした。
続いて,各配合物をそれぞれボールミルによりアセトン中で24時間混合して混合物を得た。
Next, the raw material having the above basic composition and one of the above-mentioned additives are added to the compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 in the above-mentioned additive. Were blended at a stoichiometric ratio such that each of the metal elements was replaced and solid-dissolved after firing, thereby preparing seven types of blends. Specifically, {Li 0.04 (K 0.5 Na 0.5 ) 0.95 Ag 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 and {Li 0.04 (K 0.5 Na 0.5 ) 0.94 Ba 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 , {Li 0.04 (K 0.5 Na 0.5 ) 0.94 Ca 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 , {Li 0.04 (K 0.5 Na 0.5 ) 0.95 Cs 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 , {Li 0.04 (K 0.5 Na 0.5 ) 0.94 Mg 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 , {Li 0.04 (K 0.5 Na 0.5 ) 0.95 Rb 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 , {Li 0.04 (K 0.5 Na 0.5 ) 0.94 Sr 0.01 } (Nb 0.86 Ta 0.10 Sb 0.04 ) O 3 .
Subsequently, each compound was mixed in acetone by a ball mill for 24 hours to obtain a mixture.

次に,この混合物を実施例1の試料E1〜E47と同様にして,仮焼,造粒,成形,焼成し,分極を施した。
このようにして,上記添加物として,Ag2O,BaO,CaCO3,Cs2CO3,MgO,Rb2O,又はSrCO3をそれぞれ置換添加した圧電磁器組成物を作製し,これらをそれぞれ試料E1a,E5a,E7a,E10a,E25a,E32a,E39aとした。
Next, this mixture was calcined, granulated, molded, fired, and polarized in the same manner as the samples E1 to E47 of Example 1.
In this way, piezoelectric ceramic compositions were prepared by substituting Ag 2 O, BaO, CaCO 3 , Cs 2 CO 3 , MgO, Rb 2 O, or SrCO 3 as the above additives, and these were used as samples. E1a, E5a, E7a, E10a, E25a, E32a, and E39a.

上記試料E1と試料E1a,試料E5と試料E5a,試料E7と試料E7a,試料E10と試料E10a,試料E25と試料E25a,試料E32と試料E32a,及び試料E39と試料E39aは,それぞれ互いに同じ金属元素を含む添加物を含有してなる圧電磁器組成物であり,前者は外添加した試料,後者は置換添加した試料である。   The sample E1 and the sample E1a, the sample E5 and the sample E5a, the sample E7 and the sample E7a, the sample E10 and the sample E10a, the sample E25 and the sample E25a, the sample E32 and the sample E32a, and the sample E39 and the sample E39a are the same metal elements. This is a piezoelectric ceramic composition containing an additive containing, and the former is an externally added sample, and the latter is a replacement-added sample.

次に,上記の各試料について,みかけ密度及び開気孔率を測定した。その結果を表3に示す。表3には,比較のため上記実施例1にて作製した試料C1のみかけ密度及び開気孔率も併記した。   Next, the apparent density and open porosity of each of the above samples were measured. Table 3 shows the results. Table 3 also shows the apparent density and the open porosity of the sample C1 produced in Example 1 for comparison.

Figure 2004244300
Figure 2004244300

表3より知られるごとく,上記試料E1と試料E1a,試料E5と試料E5a,試料E7と試料E7a,試料E10と試料E10a,試料E25と試料E25a,及び試料E32と試料E32aは,試料C1と比較して同等以上のみかけ密度,及び試料C1よりも低い開気孔率を示した。
このことから,本例の圧電磁器組成物においては,上記添加物を外添加して含有させても置換添加させて含有させても,みかけ密度及び開気孔率に優れたものとなることがわかる。
また,Srを含む試料41及び試料41aの場合には,置換組成の試料41aにおいて,高いみかけ密度,低い開気孔率が得られた。
As can be seen from Table 3, Samples E1 and E1a, Samples E5 and E5a, Samples E7 and E7a, Samples E10 and E10a, Samples E25 and E25a, and Samples E32 and E32a were compared with Sample C1. As a result, the apparent density was equal to or more than that, and the open porosity was lower than that of the sample C1.
This indicates that the piezoelectric ceramic composition of this example has excellent apparent density and open porosity regardless of whether the above additives are externally added or replaced and added. .
Further, in the case of the sample 41 and the sample 41a containing Sr, a high apparent density and a low open porosity were obtained in the sample 41a having the substitution composition.

(実施例3)
本例は,上記添加物の添加量を変化させて圧電磁器組成物に含有させた例である。
まず,圧電磁器組成物の基本組成の原料として,純度99%以上の高純度のLi2CO3,Na2CO3,K2CO3,Nb25,Ta25,Sb25,及び上記添加物としてのBi23を準備した。
(Example 3)
This example is an example in which the amount of the above-mentioned additive was changed and contained in the piezoelectric ceramic composition.
First, as raw materials of the basic composition of the piezoelectric ceramic composition, high-purity Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , Sb 2 O 5 with a purity of 99% or more. , And Bi 2 O 3 as the above additive were prepared.

これらの原料のうち,Li2CO3,Na2CO3,K2CO3,Nb25,Ta25,及びSb25を,焼成後に上記一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3において,x,y,z,wがそれぞれx=0.04,y=0.5,z=0.1,w=0.04となるような化学量論比にて配合し,さらに上記添加物としてのBi23を配合して配合物を得た。 Of these raw materials, Li 2 CO 3 , Na 2 CO 3 , K 2 CO 3 , Nb 2 O 5 , Ta 2 O 5 , and Sb 2 O 5 are fired, and after firing, the above general formula {Li x (K 1− y Na y) 1-x} (Nb 1-zw Ta z Sb w) at O 3, x, y, z , w , respectively x = 0.04, y = 0.5, z = 0.1, w = 0.04, and Bi 2 O 3 as the above additive was further blended to obtain a blend.

このとき,上記添加物としてのBi23は,上記化学量論比にて配合して得られると予想される化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O31molに対して,0.0025,0.0005,又は0.00025mol添加した。即ち,上記添加物中の金属元素(Bi)がそれぞれ0.005,0.001,又は0.0005mol配合されるようにした。
そして,各配合物をそれぞれボールミルによりアセトン中で24時間混合して混合物を作製した。
At this time, Bi 2 O 3 as the additive is a compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) which is expected to be obtained by blending at the above stoichiometric ratio. 0.0025, 0.0005, or 0.00025 mol was added to 1 mol of O 3 . That is, 0.005, 0.001, or 0.0005 mol of the metal element (Bi) in the additive was blended.
Then, each composition was mixed in acetone by a ball mill for 24 hours to prepare a mixture.

この混合物を上記試料E1〜E47と同様にして,仮焼,造粒,成形,焼成し,分極を施して,3種類の圧電磁器組成物(試料E6x,試料E6y,試料E6z)を得た。各試料における添加物の種類及び配合量を表4に示す。
次に,上記試料E6x,試料E6y,試料E6zのみかけ密度及び開気孔率を実施例1と同様の方法にて測定した。その結果を表4に示す。
なお,表4においては,比較のため,上記添加元素としてのBiを0.01mol含有してなる,実施例1で作製した試料E6,及び添加元素を含有していない試料C1の結果を併記した。
This mixture was calcined, granulated, molded, fired, and polarized in the same manner as in Samples E1 to E47 to obtain three types of piezoelectric ceramic compositions (Sample E6x, Sample E6y, and Sample E6z). Table 4 shows the types and amounts of additives in each sample.
Next, the apparent densities and open porosity of the samples E6x, E6y, and E6z were measured in the same manner as in Example 1. Table 4 shows the results.
In Table 4, for comparison, the results of the sample E6 prepared in Example 1 containing 0.01 mol of Bi as the additional element and the sample C1 containing no additional element are also shown. .

Figure 2004244300
Figure 2004244300

表4より知られるごとく,上記試料E6,試料E6x,試料E6y,及び試料E6zは,試料C1に比べて高いみかけ密度,低い開気孔率を示した。即ち,本例の圧電磁器組成物においては,化合物{Li0.04(K0.5Na0.50.96}(Nb0.86Ta0.1Sb0.04)O31molに対して,上記添加物を,該添加物中の金属元素の含有量で,0.0005mol〜0.01mol含有させることにより,圧電磁器組成物のみかけ密度及び開気孔率を向上させることができる。 As can be seen from Table 4, Sample E6, Sample E6x, Sample E6y, and Sample E6z exhibited higher apparent density and lower open porosity than Sample C1. That is, in the piezoelectric ceramic composition of this example, the above additive was added to 1 mol of the compound {Li 0.04 (K 0.5 Na 0.5 ) 0.96 } (Nb 0.86 Ta 0.1 Sb 0.04 ) O 3 , and the metal in the additive was added. By containing 0.0005 mol to 0.01 mol of the element, the apparent density and open porosity of the piezoelectric ceramic composition can be improved.

また,一般に,開気孔率が大きいと空孔率が大きくなる。そのため,本発明のように,添加物を添加することにより,開気孔率を小さくすることができたということは,空孔率も小さくなっているといえる。
In general, the porosity increases as the open porosity increases. Therefore, the fact that the open porosity can be reduced by adding the additive as in the present invention means that the porosity is also reduced.

Claims (10)

一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物を主成分とする圧電磁器組成物であって,
該圧電磁器組成物は,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を添加元素として含有してなり,
上記添加元素の含有量の合計は,上記一般式で表される化合物1molに対して,0.0005mol〜0.15molであり,
かつ,開気孔率が0.4Vol%以下であることを特徴とする圧電磁器組成物。
It is represented by the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w respectively 0 ≦ x ≦ 0.2 , 0 ≦ y ≦ 1, 0 <z ≦ 0.4, 0 <w ≦ 0.2, a piezoelectric ceramic composition mainly comprising a compound in the composition range,
The piezoelectric ceramic composition comprises Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir. , La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr One or more metal elements selected from the group consisting of
The total content of the additional elements is 0.0005 mol to 0.15 mol with respect to 1 mol of the compound represented by the general formula.
A piezoelectric ceramic composition having an open porosity of 0.4 Vol% or less.
請求項1において,上記圧電磁器組成物のみかけ密度は,上記一般式で表され,上記添加元素を含有していない圧電磁器組成物のみかけ密度よりも,大きいことを特徴とする圧電磁器組成物。   2. The piezoelectric ceramic composition according to claim 1, wherein the apparent density of the piezoelectric ceramic composition is represented by the general formula and is larger than the apparent density of the piezoelectric ceramic composition containing no additional element. . 請求項1又は2において,上記圧電磁器組成物の空孔率或いは開気孔率の少なくとも一方は,上記一般式で表され,上記添加元素を含有していない圧電磁器組成物の空孔率或いは開気孔率よりも,小さいことを特徴とする圧電磁器組成物。   3. The porosity or open porosity of the piezoelectric ceramic composition according to claim 1 or 2, wherein at least one of the porosity and the open porosity of the piezoelectric ceramic composition is represented by the general formula, and the porosity or the open porosity of the piezoelectric ceramic composition not containing the additional element. A piezoelectric ceramic composition characterized by having a porosity smaller than the porosity. 一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物と,Ag,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか一種以上の金属元素を含む添加物とを混合し,焼成することを特徴とする圧電磁器組成物の製造方法。 It is represented by the general formula {Li x (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w respectively 0 ≦ x ≦ 0.2 , 0 ≦ y ≦ 1, 0 <z ≦ 0.4, 0 <w ≦ 0.2, a compound having a composition range of Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, A piezoelectric element characterized by mixing with an additive containing at least one metal element selected from Si, Sm, Sn, Sr, Tb, Ti, Tm, V, Y, Yb, Zn, and Zr, followed by firing. A method for producing a porcelain composition. Liを含有する化合物と,Naを含有する化合物と,Kを含有する化合物と,Nbを含有する化合物と,Taを含有する化合物と,Sbを含有する化合物とを,焼成後に一般式{Lix(K1-yNay1-x}(Nb1-z-wTazSbw)O3で表され,かつx,y,z,wがそれぞれ0≦x≦0.2,0≦y≦1,0<z≦0.4,0<w≦0.2の組成範囲にある化合物となるような化学量論比にて,又は下記の添加物に含有される金属元素による置換を考慮した化学量論比にて混合し,さらにAg,Al,Au,B,Ba,Bi,Ca,Ce,Co,Cs,Cu,Dy,Er,Eu,Fe,Ga,Gd,Ge,Hf,Ho,In,Ir,La,Lu,Mg,Mn,Nd,Ni,Pd,Pr,Pt,Rb,Re,Ru,Sc,Si,Sm,Sn,Sr,Tb,Ti,Tm,V,Y,Yb,Zn,Zrから選ばれるいずれか1種以上の金属元素を含む添加物を混合し,焼成することを特徴とする圧電磁器組成物の製造方法。 A compound containing Li, a compound containing Na, a compound containing K, a compound containing Nb, a compound containing Ta, and a compound containing Sb are fired to obtain a compound of the general formula {Li x It is represented by (K 1-y Na y) 1-x} (Nb 1-zw Ta z Sb w) O 3, and x, y, z, w respectively 0 ≦ x ≦ 0.2,0 ≦ y ≦ Considering substitution at a stoichiometric ratio so as to be a compound in the composition range of 1,0 <z ≦ 0.4 and 0 <w ≦ 0.2, or with a metal element contained in the following additives: Ag, Al, Au, B, Ba, Bi, Ca, Ce, Co, Cs, Cu, Dy, Er, Eu, Fe, Ga, Gd, Ge, Hf, Ho, In, Ir, La, Lu, Mg, Mn, Nd, Ni, Pd, Pr, Pt, Rb, Re, Ru, Sc, Si, Sm, S , Sr, Tb, Ti, Tm, V, Y, Yb, Zn, Zr, and an additive containing at least one metal element selected from the mixture, and baked. Method. 請求項5において,上記Liを含有する化合物はLi2CO3,上記Naを含有する化合物はNa2CO3,上記Kを含有する化合物はK2CO3,Nbを含有する化合物はNb25,上記Taを含有する化合物はTa25,上記Sbを含有する化合物はSb25又はSb23,上記添加物はAg2O,Al23,Au,Au23,B23,H3BO3,BaO,BaO2,BaCO3,Bi23,CaO,CaCO3,CeO2,Ce2(CO33,CoO,Co34,CoCO3,Cs2CO3,CuO,Cu2O,Dy23,Er23,Eu23,Fe23,Ga23,Gd23,GeO2,HfO2,Ho23,In23,IrO2,Ir23,La23,Lu23,MgO,MgC24,MnO,MnO2,Mn23,Mn34,Nd23,Nd2CO3,NiO,NiCO3,PdO,Pr23,Pr611,Pr2(CO33,PtO2,Rb2O,Rb2CO3,Re27,RuO2,Sc23,SiO2,SiO,SiC,Sm23,SnO,SnO2,SrO,SrCO3,Tb47,TiO,Ti23,TiO2,Tm23,V23,V24,V25,Y23,Y2(CO33,Yb23,ZnO,ZrO2から選ばれるいずれか1種以上であることを特徴とする圧電磁器組成物の製造方法。 The compound containing Li is Li 2 CO 3 , the compound containing Na is Na 2 CO 3 , the compound containing K is K 2 CO 3 , and the compound containing Nb is Nb 2 O. 5 , the Ta-containing compound is Ta 2 O 5 , the Sb-containing compound is Sb 2 O 5 or Sb 2 O 3 , and the additive is Ag 2 O, Al 2 O 3 , Au, Au 2 O 3 , B 2 O 3, H 3 BO 3, BaO, BaO 2, BaCO 3, Bi 2 O 3, CaO, CaCO 3, CeO 2, Ce 2 (CO 3) 3, CoO, Co 3 O 4, CoCO 3, Cs 2 CO 3 , CuO, Cu 2 O, Dy 2 O 3 , Er 2 O 3 , Eu 2 O 3 , Fe 2 O 3 , Ga 2 O 3 , Gd 2 O 3 , GeO 2 , HfO 2 , Ho 2 O 3, In 2 O 3, IrO 2, Ir 2 O 3, La 2 O 3, Lu 2 O 3, MgO, MgC 2 4, MnO, MnO 2, Mn 2 O 3, Mn 3 O 4, Nd 2 O 3, Nd 2 CO 3, NiO, NiCO 3, PdO, Pr 2 O 3, Pr 6 O 11, Pr 2 (CO 3) 3 , PtO 2 , Rb 2 O, Rb 2 CO 3 , Re 2 O 7 , RuO 2 , Sc 2 O 3 , SiO 2 , SiO, SiC, Sm 2 O 3 , SnO, SnO 2 , SrO, SrCO 3 , Tb 4 O 7, TiO, Ti 2 O 3, TiO 2, Tm 2 O 3, V 2 O 3, V 2 O 4, V 2 O 5, Y 2 O 3, Y 2 (CO 3) 3, Yb 2 O 3 , a method for producing a piezoelectric ceramic composition, which is at least one selected from ZnO and ZrO 2 . 請求項1〜3のいずれか一項に記載の圧電磁器組成物よりなる圧電体を有することを特徴とする圧電素子。   A piezoelectric element comprising a piezoelectric body made of the piezoelectric ceramic composition according to claim 1. 請求項4〜6のいずれか一項に記載の製造方法により製造された圧電磁器組成物よりなる圧電体を有することを特徴とする圧電素子。   A piezoelectric element comprising a piezoelectric body made of the piezoelectric ceramic composition manufactured by the manufacturing method according to claim 4. 請求項1〜3のいずれか一項に記載の圧電磁器組成物よりなる誘電体を有することを特徴とする誘電素子。   A dielectric element comprising a dielectric comprising the piezoelectric ceramic composition according to claim 1. 請求項4〜6のいずれか一項に記載の製造方法により製造された圧電磁器組成物よりなる誘電体を有することを特徴とする誘電素子。   A dielectric element comprising a dielectric made of the piezoelectric ceramic composition manufactured by the manufacturing method according to claim 4.
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