JP2004237548A - Method for manufacturing rubbery composite material - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a rubbery composite material, wherein a base material and a rubber are joined, excellent in the adhesiveness of the base material and the rubber, especially the initial adhesiveness of them, adhesion durability and storage stability. <P>SOLUTION: The rubbery composite material is manufactured by respectively providing first and second targets comprising mutually different metal components in first and second chambers communicating with each other by communication ports while supplying reactive gases mutually different in composition into the first and second chambers and performing sputtering while moving the base material toward the second target from the first target side through the communication ports in a sputtering atmosphere, which is formed by applying power to the first and second targets at the same time, to form an adhesive film. The adhesive film having a gradient in composition comprising the metal components and the components originating from the reactive gases in its thickness direction can be formed. Since the adhesive film is different in composition between the base material side and the rubber side, high adhesive power is imparted to the base material and the rubber and the rubbery composite material excellent in initial adhesiveness, adhesion durability and storage stability and strongly bonded can be manufactured. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

老化防止剤：大内新興化学工業（株）製 ノクラック６Ｃ
加硫防止剤：大内新興化学工業（株）製 ノクセラー ＮＳ−Ｐ
【００３３】
また、得られた接着膜の接着性を下記の方法で評価した結果を表２に示す。
接着性評価：剥離試験後にＰＥＴフィルム上にゴムが付着している面積の割合を１０段階で評価
初期接着性：接着膜を成膜後、すぐにゴムを加硫接着したもので評価
保存安定性：接着膜を成膜後、温度４０℃、湿度９５％の条件で３日間保持し、ゴムを加硫接着したもので評価
接着耐久性：接着膜を成膜後、ゴムを加硫接着し、温度４０℃、湿度９５％の条件で７日間保持したもので評価
【００３４】
［比較例１］
第２ターゲットには電力を投入せず、ＰＥＴフィルムを第１ターゲットの近傍に停止させて、スパッタリングガスとしてＡｒを１００ｃｃ／ｍｉｎ、プラズマ発光モニター制御を用いずにＮ_２を１５ｃｃ／ｍｉｎ導入してスパッタリングした以外は、実施例１と同様の方法でＰＥＴフィルム上に接着膜を形成（スパッタリング時間６０ｓｅｃ）し、同様にゴムとＰＥＴとの複合材料を得た。また、得られた接着膜の接着性を上記の方法で評価した結果を表２に示す。
【００３５】
【表２】

【００３６】
【発明の効果】
以上のように、本発明によれば、厚さ方向に金属成分及び反応性ガス由来の成分の組成の勾配を有する接着膜を形成することができ、この接着膜は、基材側とゴム側で組成が異なるため、基材とゴム各々に強い接着力を与え、初期接着性、接着耐久性及び保存安定性に優れ、強固に接着したゴム系複合材料を製造することができる。
【図面の簡単な説明】
【図１】本発明の一実施例に係るゴム系複合材料の製造方法における接着膜をスパッタリングにより形成するためのスパッタリング装置の概略平面図である。
【図２】実施例１において得られた接着膜の厚さ方向の組成分布を示す図である。
【符号の説明】
１ 第１ターゲット
２ 第２ターゲット
３ チャンバー
３１ 第１室
３２ 第２室
３３ 連通口
４ 基材[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for producing a rubber-based composite material in which a base material and rubber are joined, and in particular, an adhesive film is formed on a base material that is combined with rubber, and then a rubber composition is formed on the adhesive film. The present invention relates to a method for producing a rubber-based composite material by laminating and vulcanizing.
[0002]
[Prior art]
As a composite material in which a rubber and a base material such as metal, ceramics, and resin used for reinforcing materials such as tires and belts are bonded to a base material, the base material and the rubber are vulcanized and pressure-bonded to the base material. There are bonded materials, but in the case of such a material, the properties of the base material and the rubber, as well as the adhesion between the base material and the rubber, greatly affect the properties of the material. In particular, such a rubber-based composite material needs to exhibit a high adhesive strength immediately after the bonding and after a lapse of time.
[0003]
As a method for producing such a rubber-based composite material, for example, in a composite material of rubber and plastic, a thin film of a metal or a metal compound is formed on the surface of a plastic substrate, and the thin film is used as an adhesive film to form a rubber composition. (See, for example, Japanese Patent Application Laid-Open No. 62-189117 and Japanese Patent Application Laid-Open No. 2002-172721). .
[0004]
[Patent Document 1]
JP-A-62-189117 [Patent Document 2]
JP-A-2002-172721
However, in the case of these methods, despite the fact that different materials are adhered, the adhesive film has a single composition, so that strong adhesion cannot be simultaneously given to the base material and the rubber, and the base material and the adhesive film cannot be simultaneously provided. And the adhesive strength between the adhesive film and the rubber, or both, was insufficient. Further, in order to solve such a problem, there has been proposed a method in which the adhesive film has two layers. However, in this case, there is a problem that the adhesiveness is also required between the adhesive films. Therefore, the initial adhesion, adhesion durability and storage stability of such a rubber-based composite material cannot be said to be sufficient.
[0006]
[Problems to be solved by the invention]
The present invention has been made in view of the above circumstances, and in a rubber-based composite material in which a substrate and rubber are bonded, the adhesiveness between the substrate and rubber, particularly, initial adhesion, adhesion durability, and storage stability. It is an object of the present invention to provide a method capable of producing a rubber-based composite material excellent in quality.
[0007]
Means for Solving the Problems and Embodiments of the Invention
The present inventor has conducted intensive studies to achieve the above object, and as a result, on a base material that is composited with rubber, a first chamber and a second chamber having a first chamber and a second chamber that communicate with each other through a communication port. A first target and a second target made of metal components different from each other are provided in the two chambers, and reactive gases having different compositions are supplied to the first chamber and the second chamber, respectively. An adhesive film is formed by sputtering while moving the substrate from the first target side to the second target side via the communication port in a sputtering atmosphere formed by simultaneously applying power to the target. Then, if a rubber-based composite material is manufactured by laminating and vulcanizing the rubber composition on the adhesive film, the composition gradient of the metal component and the component derived from the reactive gas in the thickness direction is obtained. It is possible to form an adhesive film having a different composition between the base material side and the rubber side, so that a strong adhesive force is applied to each of the base material and the rubber, and the rubber compounded through the adhesive film It has been found that the system composite material is firmly adhered with excellent initial adhesion, adhesion durability and storage stability.
[0008]
Further, in the above method, a plasma emission detector is provided in each of the first and second chambers, and the plasma emission detector is supplied to the first and second chambers so as to keep a light emission amount detected by the plasma emission detector constant. Plasma emission monitor control for controlling the supply amount of reactive gas to be supplied, supply of reactive gas to be supplied to the first chamber and the second chamber according to the voltage between the first target or the second target and the ground. If the sputtering is performed while controlling the amount of the reactive gas supplied to the first chamber and the second chamber by optimizing the impedance control for controlling the amount, or both, the sputtering atmosphere is stabilized, and the resulting adhesive is obtained. It is possible to obtain a uniform adhesive film having a stable gradient of the composition of the film, in particular, the gradient of the composition of the component derived from the reactive gas. In addition, the first chamber and the second chamber are each provided with an exhaust port. In addition, by sputtering while simultaneously evacuating from these exhaust ports, the reactive gas supplied to the first chamber and the second chamber is not mixed with each other more than necessary through the communication port, and the adhesive film having the composition gradient is formed. The present inventors have found that they can be manufactured stably, and have accomplished the present invention.
[0009]
That is, the present invention provides a method for producing a rubber-based composite material by forming an adhesive film on a substrate to be composited with rubber by sputtering, and then laminating and vulcanizing a rubber composition on the adhesive film. A first target and a second target made of mutually different metal components are respectively provided in the first chamber and the second chamber of the chamber having the first chamber and the second chamber that communicate with each other through the communication port; In a sputtering atmosphere formed by supplying reactive gases having different compositions to the first chamber and the second chamber, respectively, and simultaneously applying power to the first target and the second target, the substrate is subjected to the above-described process. A rubber system, wherein the adhesive film is formed by sputtering while moving from the first target side to the second target side via the communication port. To provide a manufacturing method of the interleaf material.
[0010]
Hereinafter, the present invention will be described in more detail.
In the present invention, the rubber-based composite material is produced by forming an adhesive film on a substrate to be composited with rubber, and then laminating and vulcanizing a rubber composition on the adhesive film.
[0011]
In the method for producing a rubber-based composite material of the present invention, the type of the target substrate is not particularly limited, and metals, ceramics, resins, and the like can be applied. In this case, examples of the type of the metal substrate include steel, stainless steel, a titanium alloy, aluminum, an aluminum alloy, copper, a copper alloy, zinc, a zinc alloy, an amorphous alloy, and the like, but are not limited thereto. Absent. In addition, various types of ceramic bases and resin bases can be selected according to the purpose. Preferred examples of the ceramic base include quartz glass, and the preferred resin bases include polyamide and polyester. The shape, size, and the like of the substrate are appropriately selected according to the purpose.
[0012]
In the method for producing a rubber-based composite material according to the present invention, the adhesive film is formed of a first metal and a first metal made of different metal components in the first chamber and the second chamber of the chamber having the first chamber and the second chamber that communicate with each other through the communication port. Are provided by supplying reactive gases having different compositions to the first chamber and the second chamber, respectively, and simultaneously applying power to the first target and the second target. The substrate is formed by sputtering while moving the substrate from the first target side to the second target side via the communication port in the sputtering atmosphere. Thereby, it is possible to form an adhesive film having a composition gradient of the metal component and the component derived from the reactive gas in the thickness direction.
[0013]
As such a method, for example, as shown in FIG. 1, the first chamber 31 and the second chamber 32 of the chamber 3 having the first chamber 31 and the second chamber 32 communicating with each other through the communication port 33 include: A first target 1 and a second target 2 made of different metal components were disposed such that their sputtering surfaces were located on the same plane, and the first target and the second targets 1 and 2 were disposed respectively. Reactive gases having different compositions are supplied to the first chamber 31 and the second chamber 32 from the gas inlets 71 and 72, respectively, and are generated by simultaneously applying power to the first target and the second targets 1 and 2. In a sputtering atmosphere (mainly formed in a space from the sputtering surface of the first target and the second targets 1 and 2 toward the substrate 4 side), the substrate 4 on which the adhesive film is to be formed. While moving from the vicinity of the first target 1 to the vicinity of the second target 2 so that the surface on which the adhesive film is formed and the sputtering surfaces of the first target and the second targets 1 and 2 are parallel to each other. It can be formed by sputtering. In FIG. 1, 5 is a magnet, 6 is a target electrode, 81 and 82 are gas exhaust ports (decompression ports), 9 is a substrate jig, 10 is a power supply, 11 is a gas flow controller, 12 is a plasma emission detector, Reference numeral 13 denotes a voltmeter.
[0014]
More specifically, the sputtering atmosphere formed by applying electric power to the first target and the second targets 1 and 2 moves from the sputtering surfaces of the first targets and the second targets 1 and 2 to the base 4 side. It is formed with a certain degree of spread over the width of each sputtering surface. In this case, in a sputtering atmosphere near the first target 1, the metal compound mainly including the metal component constituting the first target 1 and the component derived from the reactive gas supplied to the first chamber 31 is used. Is a metal compound having a metal component that mainly constitutes the second target 2 and a component derived from the reactive gas supplied to the second chamber 32 in a sputtering atmosphere in the vicinity of the sputtering target. A metal compound having a metal component constituting the target and a component derived from the reactive gas is sputtered. Therefore, when the substrate is moved from the first target side to the second target side in such a sputtering atmosphere, the metal compound component constituting the first target and the reaction supplied to the first chamber 31 along the thickness direction. The component derived from the reactive gas gradually decreases from the base material side to the side to which the rubber is bonded, and the metal compound component constituting the second target and the component derived from the reactive gas supplied to the second chamber 32 are reduced. An adhesive film is formed which gradually increases from the substrate side toward the side where the rubber is bonded, and the adhesive film has a composition gradient of the metal component and the component derived from the reactive gas in the thickness direction. .
[0015]
By forming the adhesive film with such a composition gradient, the composition of the surface in contact with the adhesive film on the base material side and the rubber side can be changed. If the adhesive film is formed so that the component with good adhesiveness and the component with good adhesiveness with rubber on the side that adheres to rubber increase, the adhesion between the adhesive film and the base material and between the adhesive film and rubber are simultaneously strong. In addition, the adhesive film itself has higher strength because there is no layer interface as compared with a case where a plurality of adhesive films having different compositions are laminated, so that the adhesive film can be formed in one step, thus simplifying the process. Thus, an adhesive film having high adhesiveness can be formed without lowering productivity.
[0016]
In the example shown in FIG. 1, the first target and the second target are arranged so that their sputtering surfaces are located on the same surface, and the surface of the base material on which the adhesive film is to be formed is connected to the first target. And an example in which the target is moved so as to be parallel to the sputtering surface of the second target, but the present invention is not limited to this, and the sputtering of the first target and the second target is performed. They may be arranged so that the surfaces are parallel to each other, or may be arranged so that the sputtering surface is inclined with respect to the surface on which the adhesive film is formed.
[0017]
In the method of the present invention, as shown in FIG. 1, the first chamber 31 and the second chamber 32 are provided with plasma emission detectors 12 and 12, respectively, and the light emission amount detected by the plasma emission detectors. Plasma emission monitor control in which the supply amount of the reactive gas supplied to the first chamber 31 and the second chamber 32 is controlled by the gas flow controllers 11 and 11 so as to keep the pressure constant, the first target 1 or the second target 2 and the ground. (Ground), and the supply gas of the reactive gas supplied to the first chamber 31 and the second chamber 32 according to those voltages is measured by the voltmeters 13, 13. The sputtering is performed while precisely controlling the amount of the reactive gas supplied to the first chamber 31 and the second chamber 32 by the impedance control controlled by the pressure control or both. It is preferred. By performing sputtering in this manner, a uniform atmosphere can be obtained in which the sputtering atmosphere is stable and the composition gradient of the obtained adhesive film, particularly the composition gradient of the component derived from the reactive gas, is stable. A system for performing such plasma emission monitor control includes, for example, a plasma emission control system of Ardennes of Germany, and a system for performing impedance control includes, for example, an impedance control system of the company.
[0018]
On the other hand, in the method of the present invention, as shown in FIG. 1, the first chamber 31 and the second chamber 32 are provided with exhaust ports 81 and 82, respectively, and sputtering is performed while simultaneously exhausting the exhaust ports 81 and 82. Are also suitable. Thereby, the reactive gas supplied to the first chamber 31 and the second chamber 32 are not mixed with each other more than necessary through the communication port 33, and an adhesive film having a composition gradient can be stably manufactured.
[0019]
In the formation of the adhesive film, the target is preferably aluminum, chromium, titanium, zinc, silicon, cobalt, nickel, copper, silver, tantalum, tungsten, or an alloy thereof. Note that the first target and the second target have different metal components.
[0020]
In the present invention, it is preferable to use a gas containing one or more elements selected from oxygen, nitrogen and carbon, such as methane gas, as the reactive gas. In the present invention, sputtering is so-called reactive sputtering, and a metal compound adhesive film such as a metal oxide, a metal nitride, or a metal carbide of a metal component constituting the first target and the second target is formed. In this case, the reactive gas is preferably used together with an inert gas such as helium and argon. In particular, the reactive gas is composed of a metal compound containing oxygen and nitrogen using oxygen gas and nitrogen gas as the reactive gas and argon as the inert gas. It is preferable to form an adhesive film. In this case, the first target and the second target (that is, the first chamber and the second chamber) use reactive gases having different compositions, preferably reactive gases having different components.
[0021]
In the formation of the adhesive film of the present invention, the method of applying power to the target is not particularly limited, and is selected according to the type of the adhesive film to be formed. However, it is preferable to use a DC power supply.
[0022]
Although the thickness of the adhesive film is appropriately selected, it is preferably 1 nm to 100 μm, particularly preferably 5 nm to 1 μm.
[0023]
On the other hand, as the rubber component in the rubber composition laminated and vulcanized on the base material, a rubber component selected from natural rubber (NR) and a synthetic rubber having a carbon-carbon double bond in the structural formula is used. They can be used alone or as a blend of two or more. Examples of the synthetic rubber include polyisoprene rubber (IR), polybutadiene rubber (BR), and polychloroprene rubber, which are homopolymers of conjugated diene compounds such as isoprene, butadiene, and chloroprene. Styrene butadiene copolymer rubber (SBR) which is a copolymer with vinyl compounds such as pyridine, acrylic acid, methacrylic acid, alkyl acrylates and alkyl methacrylates, vinyl pyridine butadiene styrene copolymer rubber, acrylonitrile butadiene copolymer rubber, acrylic Acid butadiene copolymer rubber, methacrylate butadiene copolymer rubber, methyl acrylate butadiene copolymer rubber, methyl methacrylate butadiene copolymer rubber, etc., and ethylene such as ethylene, propylene and isobutylene Copolymers of olefins and diene compounds [e.g., isobutylene isoprene copolymer rubber (IIR)], copolymers of olefins and non-conjugated dienes (EPDM) [e.g., ethylene-propylene-cyclopentadiene terpolymer, Ethylene-propylene-5-ethylidene-2-norbornene terpolymer, ethylene-propylene-1,4-hexadiene terpolymer, polyalkenamers obtained by ring-opening polymerization of cycloolefins (eg, polypentenamers), oxiranes Rubbers obtained by ring-opening polymerization of a ring (for example, polyepichlorohydrin rubber capable of sulfur vulcanization), polypropylene oxide rubber, and the like are included. Further, halides of the various rubbers, for example, chlorinated isobutylene isoprene copolymer rubber (Cl-IIR), brominated isobutylene isoprene copolymer rubber (Br-IIR), and the like are also included. Further, a ring-opened polymer of norbornene may be used. Furthermore, a saturated elastic material such as epichlorohydrin rubber, polypropylene oxide rubber, or chlorosulfonated polyethylene can be blended with the above rubber to be used.
[0024]
Further, the rubber composition may further contain 0.01 to 10 parts by weight, particularly 0.1 to 6 parts by weight of sulfur, an organic sulfur compound and other crosslinking agents based on 100 parts by weight of the rubber component. Preferably, the vulcanization accelerator is added in an amount of 0.01 to 10 parts by weight, particularly 0.1 to 5 parts by weight, based on 100 parts by weight of the rubber component.
[0025]
Further, the rubber composition may include, for example, paraffinic, naphthenic, aromatic process oils, cooligomers of ethylene-α-olefins, paraffin wax, mineral oils such as liquid paraffin, castor oil, cottonseed oil, linseed oil, and rapeseed oil. And oils such as vegetable oils such as soybean oil, palm oil, coconut oil, peanut oil and the like. The compounding amount of the oil is preferably 3 to 50 parts by weight, particularly preferably 4 to 10 parts by weight based on 100 parts by weight of the rubber component.
[0026]
The rubber composition further according to a conventional method, depending on the purpose, use, etc., fillers such as carbon black, silica, calcium carbonate, calcium sulfate, clay, mica, vulcanization accelerators such as zinc white, stearic acid, etc. And the like can be added to prepare a rubber composition.
[0027]
The rubber-based composite material of the present invention is manufactured by heat-pressing and vulcanizing the rubber composition on a substrate on which an adhesive film is formed. In addition, organic sulfur vulcanization using an organic sulfur compound such as dithiomorpholine or thiuram vulcanization is employed, and vulcanization can be performed according to a conventional method. Among these, the method using sulfur vulcanization is particularly preferred. In this case, the compounding amount of sulfur in the sulfur or the organic sulfur compound is preferably 0.5 to 7 parts by weight, particularly preferably 1 to 6 parts by weight based on 100 parts by weight of the rubber component. The vulcanization conditions are appropriately selected and are not particularly limited. For example, it can be performed at 145 ° C. for about 30 minutes.
[0028]
Further, in the production method of the present invention, the rubber composition containing a large amount of the sulfur, for example, 5 to 6 parts by weight with respect to 100 parts by weight of the rubber component, can be used even when vulcanization bonding is performed for a long time. Therefore, the production method of the present invention uses a fibrous metal such as a tire, a power transmission belt, a conveyor belt, and a hose, which requires a bonding strength between a base material such as a metal and rubber, as a core material. It can be widely applied to the manufacture of various rubber products and parts such as rubber-based composite materials, vibration-isolated rubber, vibration-isolating materials, rubber crawlers, rubber screens, and rubber rolls.
[0029]
【Example】
Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples.
[0030]
[Example 1]
Using a sputtering apparatus as shown in FIG. 1, using Cu as a first target and Al as a second target, and emitting 100 cc / min of Ar and plasma on the first target side (first chamber) as a sputtering gas. While controlling the flow rate by plasma emission monitor control for detecting and controlling the flow rate so as to keep the light emission amount constant, N ₂ was set to about 15 cc / min (average value) while Ar was applied to the second target side (second chamber). the 100 cc / min and about 45 cc / min (mean value) of O ₂ while controlling the flow rate by the plasma emission monitor controller for controlling the flow rate so as to maintain the light emission amount constant by detecting the emission of the plasma is introduced, Power (first target: 2.0 kW, second target: 1.0 kW) is simultaneously applied to each target by a DC power source, The pressure is set to 0.7 Pa by simultaneously evacuating from the exhaust ports provided in the chamber and the second chamber, and the PET film is formed into an adhesive film of the PET film in a sputtering atmosphere formed by the first target and the second target. Sputtering is performed while moving through the communication port from the first target side to the second target side at a speed of 0.5 m / min from the first target side to the second target side so that the distance between the surface and the sputtering surface becomes 110 mm. Thus, an adhesive film was formed on the PET film. FIG. 2 shows the result of measuring the composition distribution in the thickness direction of the adhesive film by XPS (Quantum 2000, manufactured by ULVAC-PHI, Inc.).
[0031]
Next, a rubber composition having the composition shown in Table 1 was laminated on the PET film on which the adhesive film was formed, vulcanized (145 ° C. × 30 minutes), and pressed to obtain a composite material of rubber and PET.
[0032]
[Table 1]

Anti-aging agent: Nouchikku 6C manufactured by Ouchi Shinko Chemical Industry Co., Ltd.
Vulcanization inhibitor: Noxeller NS-P manufactured by Ouchi Shinko Chemical Industry Co., Ltd.
[0033]
Table 2 shows the results of evaluating the adhesiveness of the obtained adhesive film by the following method.
Adhesion evaluation: Evaluate the ratio of the area where rubber is adhered on the PET film after the peeling test in 10 steps Initial adhesion: Evaluate the rubber immediately after vulcanization bonding after forming the adhesive film, storage stability : After forming an adhesive film, holding at a temperature of 40 ° C. and a humidity of 95% for 3 days, and vulcanizing and bonding the rubber. Evaluation adhesion durability: After forming the adhesive film, the rubber was vulcanized and bonded. Evaluated by holding for 7 days at a temperature of 40 ° C. and a humidity of 95%.
[Comparative Example 1]
No power is supplied to the second target, the PET film is stopped near the first target, Ar is supplied at 100 cc / min as a sputtering gas, and N ₂ is introduced at 15 cc / min without using plasma emission monitor control. Except for sputtering, an adhesive film was formed on the PET film in the same manner as in Example 1 (sputtering time: 60 sec), and a composite material of rubber and PET was obtained in the same manner. Table 2 shows the results of evaluating the adhesiveness of the obtained adhesive film by the above method.
[0035]
[Table 2]

[0036]
【The invention's effect】
As described above, according to the present invention, an adhesive film having a composition gradient of a metal component and a component derived from a reactive gas in the thickness direction can be formed. Since the composition is different, a strong adhesive force is given to each of the base material and the rubber, the initial adhesiveness, the adhesive durability and the storage stability are excellent, and a rubber-based composite material which is strongly bonded can be produced.
[Brief description of the drawings]
FIG. 1 is a schematic plan view of a sputtering apparatus for forming an adhesive film by sputtering in a method for producing a rubber-based composite material according to one embodiment of the present invention.
FIG. 2 is a view showing a composition distribution in a thickness direction of an adhesive film obtained in Example 1.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st target 2 2nd target 3 Chamber 31 1st chamber 32 2nd chamber 33 Communication port 4 Base material

Claims (8)

A method of producing a rubber-based composite material by forming an adhesive film on a substrate to be composited with rubber by sputtering, and then laminating and vulcanizing a rubber composition on the adhesive film, and using a communication port. A first target and a second target made of different metal components are provided in the first chamber and the second chamber of the chamber having the first chamber and the second chamber communicating with each other. In a sputtering atmosphere formed by supplying reactive gases having different compositions to each of the chambers and simultaneously applying power to the first target and the second target, the substrate is removed from the first target side. A method of manufacturing a rubber-based composite material, wherein the adhesive film is formed by sputtering while moving to a second target side via the communication port. . A plasma emission detector is provided in each of the first and second chambers, and a reactive gas is supplied to the first and second chambers so as to keep the amount of light detected by the plasma emission detector constant. 2. The method for producing a rubber-based composite material according to claim 1, wherein the sputtering is performed while controlling the amount of the reactive gas supplied to the first chamber and the second chamber by plasma emission monitor control for controlling the amount. . The impedance of the first chamber and the second chamber is controlled by controlling the supply amount of the reactive gas to be supplied to the first chamber and the second chamber according to the voltage between the first target or the second target and the ground. 3. The method for producing a rubber-based composite material according to claim 1, wherein sputtering is performed while controlling the amount of the reactive gas supplied to the chamber. The method for producing a rubber-based composite material according to any one of claims 1 to 3, wherein an exhaust port is provided in each of the first chamber and the second chamber, and sputtering is performed while simultaneously exhausting from the exhaust ports. The method for producing a rubber-based composite material according to any one of claims 1 to 4, wherein the substrate is a metal, a ceramic, or a resin. The rubber composite according to any one of claims 1 to 5, wherein the target is aluminum, chromium, titanium, zinc, silicon, cobalt, nickel, copper, silver, tantalum or tungsten, or an alloy thereof. Material manufacturing method. The method for producing a rubber-based composite material according to any one of claims 1 to 6, wherein the reactive gas is a gas containing at least one element selected from oxygen, nitrogen, and carbon. The method for producing a rubber-based composite material according to any one of claims 1 to 7, wherein the thickness of the adhesive film is 1 nm to 100 µm.

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