JP2004230688A - Manufacturing process for nozzle plate and manufacturing process for ink jet recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing process for a nozzle plate in which a nozzle hole having a stabilized shape can be formed with high machining precision on the nozzle outlet side, and to provide a manufacturing process for an ink jet recording head exhibiting a high ejection precision of ink drop and capable of recording a high quality image. <P>SOLUTION: The manufacturing process for the nozzle plate comprises a first step for providing an ablative auxiliary member 102 on the ink channel side surface of a nozzle plate material 101 so that A+B falls within a range of 75-150μm assuming the thickness of the nozzle plate material 101 is A and the thickness of the auxiliary member 102 is B, a second step for irradiating the nozzle plate material 101 with a laser beam from the auxiliary member 102 side to form a nozzle hole Pa through ablation, and a third step for removing the auxiliary member 102 from the nozzle plate material 101. An ink jet recording head is manufactured using a nozzle plate thus manufactured. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【００６５】
【発明の効果】
本発明によれば、ノズル出口側の加工精度が高く、安定した形状のノズル孔を形成することができるノズルプレートの製造方法を提供することができる。
【００６６】
また、本発明によれば、射出されるインク滴の着弾精度が高く、高品質の画像を記録することのできるインクジェット記録ヘッドの製造方法を提供することができる。
【図面の簡単な説明】
【図１】レーザー穿孔装置の一例を示す概略図
【図２】ノズルプレート材料と補助部材とからなる被加工物の構成図
【図３】被加工物に対するレーザー加工の様子を示す断面図
【図４】補助部材及び保護部材を剥離する状態を示す断面図
【図５】インクジェット記録ヘッドの一例を示す分解斜視図
【図６】貫通孔を形成した従来のノズルプレートの断面図
【図７】レーザー光による加工状況を示す模式図
【符号の説明】
１０：被加工物
１０１：ノズルプレート材料
１０２：補助部材
１０２ａ：タグ部
１０３：撥インク膜
１０４：保護部材
１０４ａ：タグ部
２００：インク流路部材
２０１：インク室
２０２：前端面
３００：インクジェット記録ヘッド
Ｐ：ノズルプレート
Ｐａ：ノズル孔
ｈ：貫通孔[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing a nozzle plate constituting a nozzle of an ink jet recording head and a method for manufacturing an ink jet recording head.
[0002]
[Prior art]
Recently, polymer materials have been used for nozzle plates of ink jet recording heads. As a method for forming a nozzle hole for ink ejection in the nozzle plate, ablation using a laser beam suitable for perforating a polymer material has been frequently studied.
[0003]
Ablation is also called polymer ablation, and non-thermal processing that directly cuts and scatters chemical bonds by irradiating an organic polymer with an ultraviolet laser with an energy density above a certain threshold value specific to the material. Say.
[0004]
Ablation by such a laser beam can form holes and grooves without thermal distortion and burrs at room temperature, normal pressure, and in a short time, with an accuracy of the order of submicron to micron. If an image is formed on a workpiece with a lens, the mask pattern can be reduced and transferred to a fraction of a few, and holes and grooves having an arbitrary shape can be collectively formed. That is, there is a feature that mask processing can be performed instead of focus processing.
[0005]
Patent Literature 1 discloses a technique in which an excimer laser is used as such laser light to process a nozzle hole in a nozzle plate having a thickness of 50 μm. However, in the excimer laser, the laser light is not always emitted in a fixed direction, and the direction slightly fluctuates with each pulse. Further, the emission intensity distribution fluctuates for each pulse. The present inventors have further studied the fluctuation of the excimer laser and found that the fluctuation has affected the processing accuracy on the nozzle outlet side in manufacturing the nozzle plate.
[0006]
In other words, it was found that, when manufacturing n nozzle holes at the same time by dividing m nozzle holes into m nozzle holes at the time of manufacturing the nozzle plate, the processing was such that the axis of the nozzle holes was slightly varied every n nozzle holes. . Strictly speaking, the accuracy is not constant among the n nozzles, and if an image is recorded by an ink jet recording head having such a nozzle plate, the image quality deteriorates.
[0007]
This is considered for the following reasons. In other words, looking at the cross section of the hole processed by the excimer laser, if the energy density of the light is large, the diameter of the hole on the incident side (nozzle entrance) and the exit side (nozzle exit) of the laser light will be close, and in the opposite case, The diameter on the exit side is smaller than that on the entrance side, and the taper angle has a large value. At this time, if the direction or intensity distribution of the laser light fluctuates, the taper on the right side becomes smaller or vice versa for each processing. For example, if the taper on the right side is small, as shown in FIG. 6, the result is the same as that of the shaft tilting to the right, which lowers the processing accuracy on the nozzle outlet side and causes the ejected ink droplet to bend and land. Accuracy deteriorates.
[0008]
The excimer laser has a divergence angle of about 1 to 3 mrad (= 1 to 3 mm when traveling 1 m), and does not include only the parallel light component P as shown in FIG. The light derived from the diffused light component θ having a large divergence angle hits the nozzle plate material and then digs into the nozzle hole, which asymmetrically affects the right or left taper angle, and the fluctuation of the component immediately becomes substantial. Affects nozzle axis.
[0009]
Since the diffused light component θ includes a portion that passes through the periphery of the objective lens, the aberration is likely to be large and non-uniform. Furthermore, compared to the parallel light component P alone, the range of the laser light used is affected by a wider range from a to b in FIG. If the laser light is only the parallel light component P, the variation in the angle is small as long as the initial optical adjustment is firm, but as described above, the excimer laser also includes the diffuse light component θ having a large divergence angle, It is considered that this lowers the processing accuracy on the nozzle outlet side and lowers the quality of an image recorded and formed by the ink jet recording head having this nozzle plate.
[0010]
Such a problem is not limited to the excimer laser, and is a problem similarly observed when the nozzle hole is processed by ablation using a laser beam containing a diffused light component.
[0011]
[Patent Document 1] JP-A-11-277749
[Problems to be solved by the invention]
Therefore, an object of the present invention is to provide a method of manufacturing a nozzle plate that has high processing accuracy on the nozzle outlet side and can form a nozzle hole having a stable shape.
[0013]
It is another object of the present invention to provide a method of manufacturing an ink jet recording head which can print a high quality image with high landing accuracy of ejected ink droplets.
[0014]
[Means for Solving the Problems]
The above objects are solved by the following inventions.
[0015]
According to the first aspect of the present invention, when the thickness of the nozzle plate material is A and the thickness of the auxiliary member is B, A + B is 75 μm. A first step of providing a diameter of at least 150 μm or less, a second step of forming a nozzle hole by ablation in the nozzle plate material by irradiating a laser beam from the auxiliary member side, And a third step of removing from the plate material.
[0016]
The invention according to claim 2 is the method for manufacturing a nozzle plate according to claim 1, wherein A + B is 100 μm or more and 150 μm or less.
[0017]
The invention according to claim 3 is the method for manufacturing a nozzle plate according to claim 1 or 2, wherein the thickness of the nozzle plate material is less than 75 μm.
[0018]
According to a fourth aspect of the present invention, there is provided the nozzle plate manufacturing method according to the first, second or third aspect, wherein the laser beam is a laser beam generated by an excimer laser.
[0019]
The invention according to claim 5 is the method according to any one of claims 1 to 4, wherein the auxiliary member has a sheet shape.
[0020]
The invention according to claim 6 is characterized in that the auxiliary member has an adhesive, and in the first step, the auxiliary member is provided on the surface of the nozzle plate material on the ink flow path side with the adhesive. Item 6. A method for manufacturing a nozzle plate according to Item 5.
[0021]
The invention according to claim 7 is characterized in that, in the first step, the auxiliary member is provided on a surface of the nozzle plate material on the ink flow path side by bringing the auxiliary member and the nozzle plate material into close contact with each other in vacuum. A method for manufacturing a nozzle plate according to claim 5.
[0022]
The invention according to claim 8 is the method for manufacturing a nozzle plate according to any one of claims 1 to 4, wherein the auxiliary member is a coating film.
[0023]
The invention according to claim 9 is the method for manufacturing a nozzle plate according to any one of claims 1 to 8, wherein the diameter of the nozzle hole on the nozzle outlet side is 30 µm or less.
[0024]
According to a tenth aspect of the present invention, there is provided an ink jet recording head having a step of joining a surface of a nozzle plate manufactured by the method according to any one of the first to ninth aspects on an ink flow path member to an ink flow path member. Is a manufacturing method.
[0025]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0026]
FIG. 1 is a schematic view showing an example of a laser perforation apparatus that can be preferably applied in the method of manufacturing a nozzle plate according to the present invention. In the figure, 1 is a laser oscillator, 2 is a first mirror, 3 is a second mirror, 4 is a third mirror, 5 is a CCD camera, 6 is an imaging lens for the CCD camera 5, 7 is a field lens, 8 is a mask, 9 is an objective lens, 10 is a workpiece including a nozzle plate material, 11 is X -Y table.
[0027]
The laser light L emitted from the laser oscillator 1 passes through the first mirror 2, the second mirror 3, and the third mirror 4, passes through the field lens 7 and the mask 8 that forms a desired opening, and is then covered by the objective lens 9. An image is formed on the perforated portion on the surface of the workpiece 10. Here, a telecentric optical system is constituted by a set of a field lens 7 and an objective lens 9 which are convex lenses, and a large number of holes can be formed at the same time. The perforated portion is a portion of the workpiece 10 where a through hole is formed by irradiation with the laser beam L. The perforated portion of the workpiece 10 is processed by the imaged laser light L.
[0028]
The third mirror 4 totally reflects the laser light L, but has a high transmittance for visible light, so that observation by the CCD camera 5 is possible. For this reason, the imaging position on the perforated portion is confirmed by the CCD camera 5 and the position is adjusted by moving and adjusting the XY table 11.
[0029]
In the present invention, a material that can be ablated by a laser beam is used as a nozzle plate material that is a material for forming a nozzle plate. For example, a resin sheet such as polyimide, polyethylene terephthalate, polyamide, or polysulfone is preferably used. Can be.
[0030]
Next, a method for manufacturing a nozzle plate and a method for manufacturing an inkjet recording head according to the present invention will be further described with reference to FIGS.
[0031]
First, in the first step, as shown in FIG. 2, the auxiliary member 102 is provided on the surface of the nozzle plate material 101 on the ink flow path side. The surface on the ink flow path side of the nozzle plate material 101 is the surface on the side joined to the ink flow path member 200 as shown in FIG. The surface opposite to the surface. By providing the auxiliary member 102 on the surface of the nozzle plate material 101 on the ink flow path side, the workpiece 10 to be subjected to laser processing in a later process is configured.
[0032]
The auxiliary member 102 is made of a material that can be ablated by a laser beam similarly to the nozzle plate material 101, and for example, a resin sheet such as polyimide or polyethylene terephthalate can be preferably used. In the illustrated example, a resin sheet is used as the auxiliary member 102. Since the auxiliary member 102 needs to be removed from the nozzle plate material 101 after the laser processing, the auxiliary member 102 is provided so as to be peelable from the nozzle plate material 101.
[0033]
In the case of the auxiliary member 102 made of a resin sheet, the nozzle plate material 101 and the auxiliary member 102 are adhered to each other via an adhesive to adhere to each other, and the auxiliary member 102 is peeled off from the surface of the nozzle plate material 101 on the ink flow path side. It can be provided as possible. The nozzle plate material 101 and the auxiliary member 102 may be bonded together after applying an adhesive on one of the surfaces. However, a resin sheet with an adhesive formed by applying an adhesive on one surface in advance may be used. It is preferable to use it as the member 102. For example, a rubber-based adhesive can be used as the adhesive.
[0034]
It is also preferable to provide the auxiliary member 102 made of a resin sheet on the surface of the nozzle plate material 101 on the ink flow path side by bringing the nozzle plate material 101 into close contact with the auxiliary member 102 in vacuum. As a method for bringing the nozzle plate material into close contact with a vacuum, the nozzle plate material 101 and the auxiliary member 102 can be overlapped and then passed between a pair of rollers provided with silicon rubber on the surface. By setting the pressure between the rollers to an appropriate pressure, the air in the gap between the nozzle plate material 101 and the auxiliary member 102 that has passed between the rollers is exhausted to be in a vacuum state. By using a heating roller for the roller, heating may be performed at the time of close contact with a vacuum. If the two members are brought into close contact with each other in a vacuum as described above, there is no fear that the surface of the nozzle plate material 101 is contaminated by the residual adhesive or the like when the auxiliary member 102 is peeled off from the nozzle plate material 101 in a later step.
[0035]
The auxiliary member 102 can be formed by a coating film in addition to the sheet shape. It is preferable to use a film having a relatively high viscosity as the coating film, and it is preferable to form a gel-like coating film on the surface of the nozzle plate material 101 on the ink flow path material side by using a known coating film forming means. If the auxiliary member 102 is formed of a coating film, it can be easily removed from the surface of the nozzle plate material 101 by wiping the coating film in a later step. As such a coating material, polypropylene glycol can be preferably used.
[0036]
In this step, the nozzle plate material 101 and the auxiliary member 102 are provided such that A + B is 75 μm or more and 150 μm or less, where A is the thickness of the nozzle plate material 101 and B is the thickness of the auxiliary member 102. Here, the thicknesses A and B are the thickness at the portion to be pierced, which is the portion where the through hole is pierced by the irradiation of the laser beam in a later step.
[0037]
As will be described in detail later, when A + B is less than 75 μm, the processing accuracy of the nozzle outlet is deteriorated, the bending of the ejected ink droplet is increased, and the quality of the image formed and recorded is also reduced. If the thickness exceeds 150 μm, there is a problem that the processing time becomes long, and since the focus when irradiating the laser beam is adjusted to the upper surface of the workpiece 10, the shape is deteriorated due to blurring in the thickness direction. However, neither is preferred. Preferably, it is provided that A + B is 100 μm or more and 150 μm or less.
[0038]
The auxiliary member 102 is not limited to a single layer, and may be provided in a plurality of layers as long as A + B is within the above range. Alternatively, a sheet-like auxiliary member and an auxiliary member made of a coating film may be laminated. Is also good.
[0039]
When the sheet-like auxiliary member 102 is attached to the nozzle plate material 101 using an adhesive, the thickness B of the auxiliary member 102 is the entire thickness including the thickness of the adhesive.
[0040]
Next, in the second step, the workpiece 10 having the auxiliary member 102 provided on the surface of the nozzle plate material 101 on the ink flow path side is irradiated with a laser beam from the auxiliary member 102 side, thereby providing an auxiliary member. A predetermined number of through holes h are formed by ablation penetrating the member 102 and the nozzle plate material 101 (FIG. 3). The holes formed in the nozzle plate material 101 by the through holes h become the nozzle holes. Accordingly, the number of the through holes h is the number of the nozzle holes provided in the nozzle plate to be formed. Here, only one through hole h is shown.
[0041]
When the through hole h is formed in the workpiece 10, the laser light L passes through the substantially central portion of the objective lens 9 and is incident substantially parallel to the perforated portion. The laser light L1 greatly contributes to the laser light L2, and on the other hand, the laser light L2, which is obliquely incident with an unstable light amount via a portion where the aberration of the objective lens 9 is large, has a thickness (A + B) of 75 μm. Because of the thickness described above, it is kicked in the vicinity of the entrance h1 of the through hole h and hardly reaches the vicinity of the exit h2, and the exit h2 portion at the tip of the through hole h, that is, the processing of the nozzle hole on the nozzle exit side. Accuracy is improved, and a nozzle hole having a stable shape can be formed. As a result, it is possible to improve the landing accuracy of the ink ejected from the ink jet recording head having the nozzle holes formed by the through holes h, and to thereby improve the quality of the image formed and formed.
[0042]
When the thickness (A + B) of the entire workpiece 10 is less than 75 μm, the ratio of the obliquely incident laser light L2 being kicked at the entrance h1 of the through-hole h decreases and reaches the exit h2 side, so that the nozzle Machining accuracy on the outlet side deteriorates. Accordingly, the quality of an image recorded and formed is also reduced. If the thickness exceeds 150 μm, the processing time becomes longer as described above, and the shape is deteriorated due to defocusing in the thickness direction.
[0043]
Further, since the auxiliary member 102 is provided on the laser incident side, a by-product mainly composed of carbon generated during ablation processing is prevented from adhering to the surface of the nozzle plate material 101 on the laser incident side, and the nozzle plate material There is no worry about contamination of 101.
[0044]
As described above, in order to further reduce the influence of the laser light L2 obliquely incident on the workpiece 10, it is preferable to mix a laser light absorber into the auxiliary member 102. Examples of the laser light absorber include salicylic acid-based, phenyl salicylate-based, benzophenone-based, and benzotriazole-based ultraviolet absorbers, and one or more of these may be used in a resin constituting a resin sheet or in a coating film component. What is necessary is just to mix in the inside and to comprise the auxiliary member 102.
[0045]
It is particularly preferable that the laser beam for providing the through hole h by such ablation is a laser beam by an excimer laser. An excimer laser can output ultraviolet light with a short pulse (up to 20 ns) and high brightness (up to several tens of MW). Although the oscillation wavelength varies depending on the type of laser gas, XeCl (wavelength 308 nm) and KrF (wavelength 248 nm) are often used for ablation. Such an excimer laser generally has large fluctuations in laser light for each pulse and a fluctuation in emission intensity distribution for each pulse, which greatly affects the processing accuracy at the nozzle exit side of the nozzle hole. By using a laser beam generated by an excimer laser for the ablation process, the effect of the present invention for improving the processing accuracy on the nozzle exit side can be remarkably obtained.
[0046]
Prior to forming the through-hole h using laser light on the workpiece 10, as shown in FIG. 3, an ink-repellent film 103 is formed on the surface of the nozzle plate material 101 (the side from which ink is ejected). Preferably, the surface of the nozzle plate material 101 is provided with ink repellency.
[0047]
The ink-repellent film 103 is not particularly limited as long as it can impart ink repellency to the surface of the nozzle plate material 10 and can be easily removed by ablation with a laser beam as described above. , A method of coating a fluororesin dispersion, and then performing a heating and melting treatment. The thickness of the ink-repellent film 103 is preferably about 0.1 to 0.5 μm.
[0048]
It is preferable that a protective member 104 be further adhered to the surface side of the ink repellent film 103 from the viewpoint of preventing damage to the ink repellent film 103 when forming the through-hole h and performing good processing. As the protective member 104, an adhesive tape may be used, and a resin such as polyethylene terephthalate or polyimide may be used as a base material, and an adhesive material coated with, for example, a rubber-based adhesive material may be used.
[0049]
When the ink repellent film 103 and the protective member 104 are provided, the thickness of the ink repellent film 103 and the thickness of the protective member 104 are not included in the thickness (A) of the nozzle plate material 101.
[0050]
When the through-hole h is formed in the workpiece 10 having the ink-repellent film 103 and the protective member 104 in this manner, as shown in FIG. 3, the auxiliary member 102, the nozzle plate material 101, and the ink-repellent film 103 are penetrated. Then, a hole is formed so as not to penetrate the protection member 104.
[0051]
When the through-hole h is formed in the workpiece 10 in this manner, the shape of the transmission portion formed by the mask 8 arranged on the primary side of the objective lens 9 shown in FIG. And the same shape. Therefore, when the shape of the nozzle outlet is circular, a circular transmission portion is formed by the mask 8, but the shape of the nozzle outlet is not limited to a circular shape, but may be any shape such as a rectangular shape, a polygonal shape, or a star shape. .
[0052]
After the through-hole h is formed as described above, in the third step, the auxiliary member 102 is separated as shown in FIG. 4, and if the protective member 104 is further provided, the auxiliary member 102 and the protective member 104 are separated and removed. . In order to facilitate the operation at the time of peeling, the auxiliary member 102 and the protection member 104 have tag portions 102a and 104a protruding to one side or both sides of the nozzle plate material 101 as shown in FIGS. Preferably. At the time of peeling, the gripping of the tag portions 102a and 104a facilitates the peeling operation. When the auxiliary member 102 is formed of a coating film, the auxiliary member 102 may be removed from the surface of the nozzle plate material 101 by wiping the coating film here.
[0053]
When the auxiliary member 102 and the protection member 104 are removed from the nozzle plate material 101 in this manner, a nozzle plate P in which the nozzle holes Pa are formed by the through holes h is created.
[0054]
The processing accuracy of the nozzle plate P thus created on the nozzle outlet side of the nozzle hole Pa is enhanced as described above. Such an effect is achieved when the total thickness (A + B) of the nozzle plate material 101 and the auxiliary member 102 is 75 μm to 150 μm, and preferably 100 μm to 150 μm. Is provided on the nozzle plate material 101, by appropriately adjusting the thickness (B) of the auxiliary member 102 so that the thickness (A + B) between the nozzle plate material 101 and the auxiliary member 102 is within the above range, The thickness (A) of the nozzle plate material 101 used as the nozzle plate P can be arbitrarily set.
[0055]
In general, as the thickness of the nozzle plate P increases, the flow path resistance of the nozzle holes Pa increases, and the driving voltage during ink ejection increases. If the nozzle outlet P is formed to have a thickness in the above range in order to increase the processing accuracy of the nozzle outlet, there is a problem that the flow path resistance increases. However, the thickness (B) of the auxiliary member 102 is appropriately adjusted to adjust the nozzle resistance. By setting the thickness (A + B) with the plate material 101 within the above range, when the thickness of only the nozzle plate P is thin, specifically, when the thickness (A) of the nozzle plate material 101 is less than 75 μm. Even in some cases, a remarkable effect that the processing accuracy on the nozzle outlet side can be increased without any problem is obtained.
[0056]
Further, when the diameter of the nozzle hole Pa on the nozzle outlet side is as small as 30 μm or less, when the thickness of the nozzle plate P is large, the flow path resistance becomes extremely large. However, according to the present invention, by appropriately adjusting the thickness (B) of the auxiliary member 102, the present invention can be applied to the production of a thin nozzle plate P using the nozzle plate material 101 having a small thickness. The effect is remarkably exhibited when the diameter is as small as 30 μm or less. In addition, the diameter on the nozzle outlet side is a diameter in a case where the cross section of the nozzle hole Pa is not a circle, which is considered as a circle.
[0057]
The nozzle plate P has its surface on the ink flow path side bonded to the front end surface 202 of the ink flow path member 200 in which a plurality of ink chambers 201 corresponding to the nozzle holes Pa are formed, via an adhesive, whereby ink jet recording is performed. The head 300 is created (FIG. 5). According to the ink jet recording head 300, since the nozzle plate P has high processing accuracy on the nozzle outlet side and the nozzle holes Pa having a stable shape are formed, the landing accuracy of the ejected ink droplets is high, and Images can be recorded.
[0058]
Here, the ink flow path member 200 changes the volume inside the ink chamber 201 by shearing and deforming the side wall of the ink chamber 201, and the pressure generated at that time causes the ink inside the ink chamber 201 to become ink droplets from the nozzle holes Pa through the nozzle holes Pa. Although the ejection type is illustrated, any structure may be used as long as the ink in the ink chamber 201 can be ejected from the nozzle holes Pa as ink droplets.
[0059]
【Example】
As a nozzle plate material, seven polyimide resin sheets having a thickness (A) of 50 μm as shown in Table 1, and as an auxiliary member, a thickness (B) of 0 (no auxiliary member) as shown in Table 1, Seven sheets with an adhesive material of 15 μm, 25 μm, 50 μm, 75 μm, 100 μm, and 125 μm (manufactured by Nitto Denko Corporation: 31D75) are prepared, and the above auxiliary members are attached to the surface of the nozzle plate material on the ink flow path side. Then, a workpiece was prepared.
[0060]
Using an excimer laser (λ = 248 nm), 256 through-holes were formed so that the nozzle outlet side had a diameter of 23 μm, and the auxiliary members were peeled off to form nozzle plates. The processing conditions for each workpiece were the same except for the thickness.
[0061]
The obtained nozzle plate was adhered to the front end surface of an actuator substrate (ink flow path member) made of PZT having 256 ink chambers by using an adhesive to form seven ink jet recording heads.
[0062]
(Evaluation method)
Using each of the recording heads (Examples 1 to 4 and Comparative Examples 1 to 3), a solid image was formed on a recording medium (“KP paper” manufactured by Konica Corporation) under the same driving conditions. It was visually evaluated based on the criteria. Table 1 shows the results.
[0063]
A: No density unevenness is observed at all. O: Almost no density unevenness is observed. A: There is slight density unevenness, but there is no problem in image quality. X: Density unevenness is conspicuous.
[Table 1]

[0065]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the manufacturing accuracy of a nozzle exit side is high, and the manufacturing method of the nozzle plate which can form the nozzle hole of a stable shape can be provided.
[0066]
Further, according to the present invention, it is possible to provide a method of manufacturing an ink jet recording head capable of recording a high quality image with high landing accuracy of ejected ink droplets.
[Brief description of the drawings]
FIG. 1 is a schematic view showing an example of a laser drilling device. FIG. 2 is a configuration diagram of a workpiece formed of a nozzle plate material and an auxiliary member. FIG. 3 is a cross-sectional view showing a state of laser processing on the workpiece. 4 is a sectional view showing a state in which the auxiliary member and the protective member are peeled off. FIG. 5 is an exploded perspective view showing an example of an ink jet recording head. FIG. 6 is a sectional view of a conventional nozzle plate having a through hole formed. Schematic diagram showing the processing status by light [Explanation of reference numerals]
10: Workpiece 101: Nozzle plate material 102: Auxiliary member 102a: Tag part 103: Ink repellent film 104: Protective member 104a: Tag part 200: Ink channel member 201: Ink chamber 202: Front end face 300: Ink jet recording head P: Nozzle plate Pa: Nozzle hole h: Through hole

Claims (10)

An ablation-assisting auxiliary member is provided on the surface of the nozzle plate material on the ink flow path side such that when the thickness of the nozzle plate material is A and the thickness of the auxiliary member is B, A + B is 75 μm or more and 150 μm or less. A first step, a second step of forming a nozzle hole by ablation in the nozzle plate material by irradiating a laser beam from the auxiliary member side, and a third step of removing the auxiliary member from the nozzle plate material And a method of manufacturing a nozzle plate. 2. The method according to claim 1, wherein A + B is not less than 100 μm and not more than 150 μm. 3. The method according to claim 1, wherein the thickness of the nozzle plate material is less than 75 [mu] m. 4. The method according to claim 1, wherein the laser beam is a laser beam generated by an excimer laser. The method for manufacturing a nozzle plate according to any one of claims 1 to 4, wherein the auxiliary member has a sheet shape. 6. The nozzle plate according to claim 5, wherein the auxiliary member has an adhesive, and in the first step, the auxiliary member is provided on the surface of the nozzle plate material on the ink flow path side by the adhesive. Method. 6. The nozzle plate according to claim 5, wherein in the first step, the auxiliary member is provided on a surface of the nozzle plate material on the ink flow path side by bringing the auxiliary member into close contact with the nozzle plate material in vacuum. Manufacturing method. The method according to claim 1, wherein the auxiliary member is a coating film. The method for manufacturing a nozzle plate according to any one of claims 1 to 8, wherein the diameter of the nozzle hole on the nozzle outlet side is 30 m or less. 10. A method for manufacturing an ink jet recording head, comprising a step of joining an ink flow path side surface of a nozzle plate manufactured by the method according to claim 1 to an ink flow path member.

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