JP2004226328A - Appearance inspection system, quality evaluation system using the same and quality evaluation information providing system - Google Patents

Appearance inspection system, quality evaluation system using the same and quality evaluation information providing system Download PDF

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Publication number
JP2004226328A
JP2004226328A JP2003016749A JP2003016749A JP2004226328A JP 2004226328 A JP2004226328 A JP 2004226328A JP 2003016749 A JP2003016749 A JP 2003016749A JP 2003016749 A JP2003016749 A JP 2003016749A JP 2004226328 A JP2004226328 A JP 2004226328A
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Japan
Prior art keywords
inspection
image
information
device
data
Prior art date
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Pending
Application number
JP2003016749A
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Japanese (ja)
Inventor
Takashi Hiroi
Akira Nakagaki
Yasuo Nakagawa
Yuji Takagi
亮 中垣
泰夫 中川
高志 広井
裕治 高木
Original Assignee
Hitachi Ltd
株式会社日立製作所
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Priority to JP2003016749A priority Critical patent/JP2004226328A/en
Publication of JP2004226328A publication Critical patent/JP2004226328A/en
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Abstract

An object of the present invention is to provide a technique for reducing the size of an inspection device installed at a production site and easily setting processing conditions for detection results.
An overview inspection system that obtains an image of an inspection target and performs an appearance inspection, comprising: an image detection device that detects an image of the inspection target; and an image that is detected by the image detection device. An information processing device 200 that determines whether there is an abnormality that appears in the image of the inspection target. The image detection device 100 and the information processing device 200 can be connected via a network 300. The image detecting apparatus 100 transmits at least one of the detected image and the processed data to the information processing apparatus with an identifier of the data. The information processing device 200 identifies the received image based on the identifier included in the received data, and determines whether or not the abnormality is present.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a technology for collecting inspection results from inspection sites for products or semi-finished products, processing the inspection results, generating information on the inspection results of the products, and providing the information to a request source. More particularly, the present invention relates to a technology for collecting and processing inspection results from an inspection device installed at a production site, and a technology for evaluating the quality of products using the inspection results.
[0002]
[Prior art]
In order to mass-produce some products in a production factory, it is necessary to inspect whether those products or semi-finished products (hereinafter simply referred to as “products including semi-finished products”) are produced according to specifications. This type of inspection has shifted from manual inspection to mechanical inspection using a sensor. In addition, the output of the sensor is electrically processed, the result is converted into digital information, and can be processed by a computer. In recent years, inspections have been required to have higher accuracy as products become more sophisticated. Therefore, there is a tendency for the inspection apparatus to have higher functions.
[0003]
For example, there is an appearance inspection as one of inspections generally performed on products such as semiconductors and printed circuit boards. Appearance inspections include, for example, a defect inspection that detects whether a product has a foreign substance or a scratch on the product production site, a workmanship that confirms whether the product is manufactured to the specified dimensions, etc. There are various inspections such as inspections. Also in this type of visual inspection, the visual inspection performed by the operator by visual inspection has been shifted to a visual inspection device automatically performed by using a machine. Mechanization of visual inspection has been further advanced with the demand for labor-saving, high-speed, and high-accuracy inspection.
[0004]
An appearance inspection apparatus used for such an appearance inspection performs an inspection by taking an image of a product to be inspected by some method and processing the obtained image. As a conventional technique relating to these visual inspection techniques, for example, Patent Literature 1 (Japanese Patent Application Laid-Open No. 8-181421) discloses a technique relating to a visual inspection apparatus for a printed wiring board. Patent Document 2 (Japanese Patent Application Laid-Open No. 9-203621) discloses a technique relating to a visual inspection apparatus for a semiconductor wafer.
[0005]
As can be seen from these disclosure examples, in the configuration of the visual inspection apparatus according to the related art, (1) means for capturing an image of an inspection target, and (2) processing means for processing the captured image are basic components. And a part such as a data input / output unit and an inspection result display unit is added to the configuration. Patent Document 3 (Japanese Patent Application Laid-Open No. 2000-77495) discloses a technique regarding an inspection system in which a plurality of the above-described appearance inspection apparatuses are connected to a network. On the network, there is a server that collectively stores the inspection results of each inspection device. Through this server, the inspection results of each inspection device are integrated and processed, and the degree of defect occurrence and its time Outputs information such as transitions.
[0006]
[Patent Document 1]
JP-A-8-181421
[Patent Document 2]
JP-A-9-203621
[Patent Document 3]
JP-A-2000-77495
[0007]
[Problems to be solved by the invention]
2. Description of the Related Art In recent years, products such as semiconductors and printed circuit boards have become smaller and have higher performance. Along with this, manufacturers of these products are required to perform appearance inspection with higher accuracy. In order to satisfy this demand, it is necessary to process a high-accuracy image obtained by imaging the target product at high speed. In addition, with the miniaturization of products, it is desired that the inspection device be as small as possible because of imaging via an optical device such as a microscope.
[0008]
As described above, in recent appearance inspection apparatuses, it is necessary to process a large amount of image data at high speed, and therefore, a large-scale dedicated image processing circuit is required as the image processing apparatus. This type of image processing circuit mounts a large number of large-scale LSIs, memory chips, and other electronic circuit elements for calculation processing on one or more substrates. For this reason, this kind of image processing circuit causes a problem of increasing the size of the inspection device. On the other hand, instead of the dedicated image processing circuit described above, image processing may be performed by software using a computer. In this case, a computer is built in the inspection device or externally attached. However, in any case, the size of the inspection apparatus is increased. Such an increase in the size of the inspection apparatus is not preferable because it requires a lot of space for installing the inspection apparatus at a production site. Further, there is also a problem that the price of the inspection apparatus is unavoidably increased due to the provision of the image processing circuit, the computer and the like.
[0009]
When the inspection apparatus is used for inspection, setting of an inspection target, image processing conditions, and the like are performed according to the inspection standard. When a plurality of inspection apparatuses are installed, this kind of condition setting needs to be individually performed for each inspection apparatus in consideration of a difference in an apparatus, an inspection environment, and the like. In addition, not only when the product is different, but also when the design of the same product is changed, the inspection standard, the appearance of the inspection target, and the like change accordingly. Therefore, it is necessary to set the processing conditions again. In recent years, this type of processing condition setting has to be frequently performed as products change in a short period of time.
[0010]
However, as described above, the conventional inspection apparatuses are individually equipped with image processing circuits. For this reason, it is necessary to individually set processing conditions for a plurality of installed inspection apparatuses. In the case of computer processing of images, it is not enough to simply reset the conditions, such as to respond to changes in inspection conditions and to meet the demands for higher accuracy of inspections. In some cases, this must be done. In such a case, it is necessary to re-install the processing program, replace the ROM, and replace the board on which the image processing circuit is mounted with respect to the individual device. Therefore, there is a problem that it is not easy to quickly change the setting of the processing condition in the inspection in accordance with the change of the product.
[0011]
All of the above-mentioned problems are caused by the appearance inspection apparatus performing image detection and processing of the detected image. This has not been solved even in the case of an inspection system that stores data in a server via a network as described in Patent Document 3.
[0012]
With the recent changes in the industrial structure, the form of the system can change in the business of producing products. For example, in the past, inspection, quality control, and production control of a product were generally performed at the production site. However, in order to meet the demands for advanced inspection and objective evaluation of quality, a large amount of capital investment is required for capital investment and maintenance of inspection work. Therefore, it is not always easy for a large company to do everything in one company. In particular, it is not easy for small and medium-sized enterprises to realize the burden. For this reason, it is desired to construct a new method for solving such a situation, for example, a technical method for performing operations for maintaining product quality, such as inspection, quality control, and production control, by outsourcing. .
[0013]
By the way, the inspection result obtained by the inspection apparatus can be used as quality evaluation data when quality control of a product is performed. Therefore, a quality evaluation system using an appearance inspection device will be considered.
[0014]
Manufacturers that manufacture and sell electronic components such as semiconductor chips, printed circuit boards, etc., manage the status and frequency of defects at production sites, and strive to improve quality and productivity. ing. For this reason, a plurality of visual inspection devices are introduced for each production site.
[0015]
On the other hand, consider purchase behavior of a purchaser of a product such as a semiconductor chip. In this case, when a product is manufactured by incorporating the purchased product as a part, it is reasonable to select and purchase a more reliable product. Many products produced can be expected to function according to their specifications when purchased. However, some of the many products that have been shipped may fail when used continuously. Therefore, when purchasing a product, it is necessary for the purchaser to consider not only the specifications such as its performance, but also the reliability of the product quality, the yield, and whether the product can be supplied stably. There is. For that purpose, it is preferable to refer to information on product quality.
[0016]
By the way, since information on product quality evaluation is internal information of each manufacturer, it is not disclosed to the public. For this reason, it is difficult for the purchaser to know the information on the quality evaluation of the product. Therefore, it is inevitable for the purchaser to empirically grasp the status of the quality evaluation of the products of each company with reference to the past transaction results and the like.
[0017]
However, in the case of a new product, use experience has not been accumulated for the product, and it is difficult to judge the quality based on the experience. From the buyer's point of view, it is desired that data that objectively evaluates the products of each company be made available. If such data becomes available, it can be used effectively as a decision material when purchasing a product.
[0018]
On the other hand, from the manufacturer's point of view, disclosing information on product quality evaluation to customers can show customers that their own production systems are sound and that quality control is highly reliable. There are advantages. For example, the company maintains its product quality, such as that the product inspection system is sufficiently established, that inspections are performed objectively in isolation from the production site, and that quality control is thoroughly implemented. And information indicating that we are working to improve it. Such information disclosure indicates that the company has high loyalty to customers, and can be an effective means for acquiring customers and retaining the acquired customers.
[0019]
Therefore, it is necessary to establish a technical mechanism that can disclose information on product quality evaluation on demand. However, at present, there is only technology for individual inspection devices.
[0020]
The foregoing is a discussion of an inspection apparatus that performs an inspection with image processing on inspections of products and various problems related to quality control performed using the inspection results. However, this type of problem is not so limited. A similar problem may occur in an inspection apparatus that must process a large amount of data at high speed, such as other types of data, for example, acoustic data.
[0021]
An object of the present invention is to provide a technique for reducing the size of an inspection apparatus installed at a production site and for easily setting processing conditions for detection results.
[0022]
It is another object of the present invention to provide a technique necessary for realizing a new technical method for performing inspection, quality evaluation, and the like on a plurality of production sites independently of the production sites.
[0023]
Still another object of the present invention is to provide a technical mechanism capable of disclosing information on product quality evaluation on demand.
[0024]
[Means for Solving the Problems]
According to the present invention,
In an overview inspection system that acquires an image of an inspection target and performs an appearance inspection,
An image detection device that detects an image to be inspected,
An image processing apparatus that processes an image detected by the image detection apparatus and determines whether there is an abnormality that appears in the image of the inspection target;
The image detection device and the information processing device can be connected via a network,
The image detection device transmits at least one of the detected image and the processed data to the information processing device with an identifier of the data,
The information processing device identifies a received image based on the identifier included in the received data, and determines whether or not the abnormality is present.
An appearance inspection system is provided.
[0025]
Here, the identifier added to the data output from the image detection device may include information on an examination characterizing the contents of the examination. The identifier includes, as information about the inspection, at least one of information on an inspection target whose image is detected, an inspection area in the inspection target, an imaging condition, an image detection device that has performed imaging, a production factory, and a production company. Can be included.
[0026]
Further, the image detection device has a pre-processing device that pre-processes an image obtained from an inspection target, and the information processing device determines the content of pre-processing performed in the pre-processing device, and It can be configured to send to a detection device.
[0027]
The information processing device may be configured to include a unit that generates information for controlling an imaging condition in each image detection device. Further, the image detection device may be configured to control imaging based on control information received from the information processing device.
[0028]
The information processing device may include a computer that processes the image detected by the image detection device and performs a process of determining whether an abnormality appears in the image of the inspection target. The configuration of the computer can be determined according to the content of the processing performed by the computer and the amount of image data transmitted from the image detection device.
[0029]
Further, the image detection device and the information processing device may be configured to include a unit for encrypting data to be transmitted and received and a unit for decrypting the encrypted information.
[0030]
According to another aspect of the present invention,
A quality evaluation system that provides information for evaluating quality based on product inspection information,
An inspection system for inspecting products,
And a quality evaluation base that evaluates product quality using information obtained from the inspection system.
The inspection system and the quality evaluation base can be connected by communication means,
The inspection system includes an inspection result of the product and at least one of information on the inspection object, the position of the inspection object inspected, the detection condition of the inspection image, the image detection device that detected the image, the production line, and the production company. Has the function of sending
The quality evaluation base has a function of acquiring information transmitted from one or more visual inspection systems, processing the information, and displaying the result.
A quality evaluation system is provided.
[0031]
According to another aspect of the present invention,
An inspection system having a function of revising a processing program used in an inspection system for inspecting a product,
An inspection system for inspecting products,
Having a program revision base for revising the processing program required for inspection processing in the inspection system,
The above inspection system and the program revision base can be connected via a network,
The inspection system has means for receiving and storing the processing program / processing condition information sent from the program revision base,
The program revision base receives a change input of the inspection image / processing condition information transmitted from the inspection system, and has means for revising the program based on the change input.
And a quality control system characterized by the following.
[0032]
According to yet another aspect of the present invention,
A system for providing information for evaluating the quality of a product produced in a production company to a customer terminal,
An inspection system for inspecting products,
A quality evaluation base that evaluates product quality information from information output by the inspection system,
The inspection system, the quality evaluation base, and the customer terminal can be connected via a network,
The quality evaluation base has means for storing quality evaluation information, means for searching for quality evaluation information in response to inquiries from customers, and means for sending the searched data to customers.
The customer terminal has a means for inputting an inquiry to the quality evaluation base and a means for displaying a transmission result from the quality evaluation base.
And a quality control system characterized by the following.
[0033]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the invention will be described with reference to the drawings. The embodiment described below includes aspects related to various inventions related to a method for inspecting a product, a system for realizing the method, a program, data, and the like used in the system. In the following, a case will be described in which an image of an inspection site of a product to be inspected is acquired, and inspection is performed by performing processing on the obtained image. More specifically, a case where the present invention is applied to an inspection related to the appearance of a product will be described as an example. An embodiment regarding quality evaluation and the like which can be performed using the obtained inspection result will be described. Further, a description will be given of embodiments related to technologies related to those embodiments and technologies for providing a service for performing information processing related to product inspection, quality evaluation, and the like using the technologies.
[0034]
First, the products manufactured at the production site are inspected for defects such as foreign matter, scratches, dirt, etc., or are inspected to determine whether the products are manufactured to specifications. An appearance inspection system that performs inspection and measurement by processing a captured image, a program and data used for the system, and an inspection method using the system will be described. Then, as an application example, a system for performing production management and evaluation at a manufacturing site based on the results of the visual inspection will be described. These application examples also constitute the invention of the present application.
[0035]
(Appearance inspection system)
FIG. 1 shows a first embodiment of a visual inspection system which is a typical example of an inspection system according to the present invention. The visual inspection system according to the present embodiment processes a detection device group 100G including at least one or more types of image detection devices 100 and an inspection result output from the image detection devices 100 belonging to the detection device group 100G. The information processing device 200 is included as a basic component. The image detection device 100 and the information processing device 200 are connected by an information transmission system 300 for transmitting information between them. The appearance inspection system according to the present embodiment can function as a quality evaluation system by adding a process related to quality evaluation to the processing content of the information processing device 200 described above.
[0036]
The detection device group 100G can include a plurality of types of image detection devices 100 as described above. In the present embodiment, it is assumed that the inspection apparatus has a plurality of image detection apparatuses that capture an image of an inspection target and obtain image data. Note that the detection device group 100G may include a mixture of image detection devices having different inspection purposes such as a defect detection process and a work quality inspection. It is also possible to mix image detection apparatuses having the same inspection purpose but different performances. It is also possible to mix image detection apparatuses having the same performance and different detection conditions depending on the target. In the present embodiment, it is assumed that a plurality of types of image detection devices having different inspection purposes, such as an image detection device for defect detection processing and an image detection device for workmanship inspection, are arranged.
[0037]
The information processing device 200 performs image processing on a detected image sent from the detection device group 100G via the information transmission system 300. The information processing device 200 performs image processing on the detected image, for example, a defect detection process for inspecting dust, scratches, and the like attached to the product, a workmanship inspection for measuring the product size, and inspecting the workmanship of the product. I do.
[0038]
The information transmission system 300 is used for transmitting and receiving information between each image detection device 100 belonging to the detection device group 100G and the information processing device 200. For example, information such as image information is transmitted from the image detection device 100. On the other hand, the information processing device 200 transmits various information such as a detection start request and an information transmission request to each image detection device 100. For example, it can be configured by a local area network (LAN), a wide area network (WAN), the Internet, or the like. Considering that a large amount of information is transmitted at high speed, the information transmission system 300 is more preferably a network capable of transmitting information in broadband.
[0039]
(Image detection device 100)
FIG. 2 is a block diagram showing a functional configuration of the image detection device 100. The image detection apparatus includes an imaging apparatus system (150, 160, 180) having a function of imaging an inspection target, control of imaging, and control for sending an image obtained by the control to the information processing apparatus 200. It has a control device system (110, 120, 130, 140) having a function of performing, and a transmitting / receiving device 190 for performing transmission / reception.
[0040]
The overall control device 110 performs overall control of the operation of the image detection device 100. The general control device 110 is configured by, for example, a computer having a CPU, a ROM, a RAM, a hard disk device, and the like. The overall control device 110 is connected to the input device 120, the output device 130, the storage device 140, the inspection control device 150, and the transmission / reception device 190. The input device 120 includes, for example, a keyboard, a mouse, a barcode reader, and the like, and receives input data from the outside. The output device 130 includes a display, a printer, and the like that display and output data from the central control device 110. In the present embodiment, the output device is configured by a display. A printer can be further connected as an output device. Further, the printer may be connected to a LAN, and may be configured as a network printer used for print output via the LAN.
[0041]
The storage device 140 stores programs and data executed by the general control device 110. As the data, for example, information on an inspection as schematically shown in FIG. 18 is stored. Also, as needed, the program executed by the inspection control device 150 and data necessary for the processing thereof, and further, the program, data such as parameters required by the pre-processing device 180 are stored. The storage device 140 is configured by, for example, a hard disk device. This hard disk device may be either a built-in type or an external type. Further, the above-described various data may be stored in a distributed manner in a disk array or the like in which a plurality of hard disk devices are arranged.
[0042]
The information on the inspection stored in the storage device 140 is, for example, a self-identifier, an information processing device-encryption key correspondence table, inspection product information, inspection information, an inspection result, dummy inspection pattern information, and a data type identifier. In the present embodiment, each piece of information is stored in the corresponding file 141a to 147. The method of storing the information on the inspection is not limited to this.
[0043]
The self-identifier stored in the self-identifier file 142a is an identifier for identifying the self-image detection device from the others. The own identifier means, for example, the serial number of the image detecting device 100, the network address of the transmitting / receiving device 190, and the like, and functions as a unique identifier that can identify each image detecting device from another image detecting device. This also functions as an address for specifying the return destination of the information.
[0044]
The destination address stored in the destination address file 142b is the network address of the information processing apparatus 200 that processes the inspection image acquired by the image detection apparatus 100. Here, when there are a plurality of information processing apparatuses 200, it also functions as information for specifying which information processing apparatus to use.
[0045]
The information processing apparatus identifier-encryption key correspondence table stored in the information processing apparatus identifier-encryption key correspondence table file 142 includes an identifier 1421 of the information processing apparatus 200 and an encryption key number 1422 corresponding thereto.
[0046]
In the inspection item information file 143, as inspection item information, specifically, a record number, a type name indicating a target type, a process name indicating a process in which an inspection is performed, an inspection line name indicating a line in which the inspection is performed, The name of the production company indicating the production company of the product to be inspected, the dimensions of the target product, and other information on the inspection product are specified, and information indicating the production status is stored.
[0047]
In the inspection information file 144, as the inspection information, specifically, a record number, an inspection item ID for specifying an inspection target item, process information indicating a process to be inspected, a photographing condition for acquiring an image, image data And information indicating inspection specifications, such as a preprocessing condition, an inspection processing condition, an inspection area which is information for specifying an inspection area in an inspection target, an inspection method, and a processing result of an inspection result. Here, the imaging condition is information indicating an imaging condition for controlling the imaging condition such as the brightness of the illumination device 163, its position, and angle. The pre-processing condition is information that defines the content of processing to be performed by the pre-processing device 180 on the detected image and the processing condition. The inspection processing condition is information indicating a processing condition in the inspection processing device 251. The inspection area is, for example, information indicating an area to be inspected when the area to be inspected is limited to a part of the inspection target. The inspection method is information indicating the type of inspection to be performed. For example, the information indicates an inspection method to be performed, such as an inspection using primary reflected light by epi-illumination, an inspection using scattered light by oblique illumination, and the like. In the present embodiment, this information is not essential. When an inspection other than imaging is performed, the content of the inspection is shown. For example, the inspection contents such as electric resistance measurement are shown.
[0048]
In the inspection result file 145, as an inspection result, a record number, a product name, a process name, an inspection date and time, an inspection area, a defect number, a defect type, a position and a type of each defect point, and Stored for inspection.
[0049]
The dummy inspection pattern information file 146 includes, as dummy inspection pattern information, an inspection of a dummy having a specific material and a specific pattern arranged in advance on a stage 162 in a sample chamber 161 as an imaging target. The pattern type information indicating the type of the target pattern and the pattern position information indicating the position of the dummy inspection target on the stage 162 are stored in association with the record number.
[0050]
In the data type identifier file 147, as shown schematically in FIG. 11, a data type identifier 1471 composed of a symbol indicating the data type is associated with a data type 1472 of the transmitted / received data as a data type identifier. Multiple types are stored. The data type identifier 1471 is information indicating the content of data transmitted and received. That is, it is information for indicating which type of data such as detected image data, inspection information request data, and the like. As the data type identifier 1471, for example, an identifier indicating "request for inspection information" as the data type identifier A, "detected image data" as the data type identifier B, and "reply of inspection information" as the data type identifier C are stored. ing.
[0051]
The imaging device 160 includes a sample chamber 161 that accommodates an inspection target (sample) M, and a stage (sample table) 162 that is disposed in the sample chamber 161 and on which the inspection target M is mounted and displaced in the XYZ directions. And an illumination device 163 for illuminating the sample, and an image sensor 164 such as a CCD for acquiring an image of the sample by reflected light from the sample. The sample chamber 161 that captures an image of the inspection target W includes an illumination device 163 that illuminates the surface of the inspection target W with illumination light, an image sensor 164 that detects a signal from the inspection target W and converts the signal into image data, A stage 162 for moving the target W is provided. Although not shown, the illumination device 163 includes a light source that emits illumination light, and a first optical system that projects the illumination light onto an imaging target. The image sensor 164 has, in front of it, a second optical system (not shown) for guiding the reflected light from the object to the image sensor 164, and automatically forms an image of the imaging object on the detection surface of the image sensor 164. And a focusing mechanism (not shown) for performing the focusing. The image detected by the image sensor 164 is sent to the pre-processing device 180 and pre-processed.
[0052]
The inspection control device 150 performs control necessary for detecting an image of the inspection target W. Specifically, each operation of the stage 162, the illumination device 163, the transmission / reception device 190, and the preprocessing device 180 is controlled at the time of imaging by various control signals indicated by broken lines in the drawing. That is, the inspection control device 150 receives, from the overall control device 110, inspection information indicating what kind of inspection is to be performed. Further, in response to the instruction to start the imaging, for example, the illumination device 163 controls the illumination position and the illumination intensity (illuminance or luminance) based on the transmitted inspection information. Further, for the pre-processing device 180, the content of the pre-processing corresponding to the inspection content to be inspected is set. Further, it instructs the pre-processing device 180 to capture an image acquired by the image sensor 164. The inspection control device 150 controls the moving direction, the moving range, and the moving speed of the stage 162 based on the test information.
[0053]
In the case of this example, the position of the image sensor 164 is fixed and the stage 162 is moved to obtain an image of the entire detection area. However, the present invention is not limited to this. It suffices that the observation system such as the image sensor 164 and the illumination device 163 and the support system such as the stage 162 have a relative displacement relationship. For example, the image sensor 164 can be moved to acquire an image of only a part to be inspected.
[0054]
The preprocessing device 180 performs preprocessing for a process performed in the information processing device on the detection signal detected by the image sensor 164. As a function for performing the pre-processing, for example, a function shown in FIG. 6 is provided. That is, the pre-processing device 180 includes an A / D conversion unit 182, a filter unit 183, a compression unit 184, and a setting unit 181. Each of these functions can be configured by a corresponding processing circuit. The processing can also be performed using a DSP (Digital Signal Processor). Further, some or all of these may be implemented by a computer.
[0055]
The A / D converter 182 converts analog image data obtained from the image sensor 164 into digital data. The converted data is input to the filter unit 183.
[0056]
The filter unit 183 performs processing such as noise reduction and distortion correction on the input data. The filter unit 183 specifically performs, for example, various types of filter processing such as a high-pass filter and a low-pass filter, and performs an image filtering processing function of performing noise reduction, image edge enhancement, and the like, and corrects image distortion and the like. It has a correction filtering function of performing geometric correction. The filter coefficient is set by the setting unit 181. The inspection information transmitted by the overall control device 110 to the inspection control device 150 includes information on the filter coefficient. This information is given by a control signal (dotted line in the figure) from the inspection control device 150 and is set in the filter unit 183 via the setting unit 181 as a filter setting signal 181a.
[0057]
The compression unit 184 performs a compression process on the image data filtered by the filter unit 183. Parameters required for image compression, for example, parameters of the compression ratio are included in the inspection information, like the filter coefficients. This parameter is provided from the inspection control device 150 (dotted line in the figure), and is set in the compression unit 184 through the compression parameter setting signal 181b. The image data is sent to the transmission / reception device 190 after being compressed at the set compression ratio.
[0058]
The transmission / reception device 190 performs a process of transmitting / receiving data from the image detection device 100 through the information transmission system 300. FIG. 7 shows functions related to data transmission in the transmission / reception device 190, and FIG. 8 shows functions related to data reception.
[0059]
As shown in FIG. 7, the transmission / reception device 190 includes an identifier integration unit 191 that integrates the data input from the preprocessing device 180 and the identifier data, an encryption unit 192 that performs a process of encrypting the integrated data, And a transmission unit 193 for transmitting the encrypted data.
[0060]
The identifier integrating unit 191 integrates data input from the preprocessing device 180 and two pieces of identifier data obtained from the central control device 110. One of the two identifiers used in the identifier integration unit 191 is a data type identifier (first identifier) 1471 (refer to FIG. 11) stored in the data type identifier file 147 of the storage device 140, and One is information (second identifier) related to the inspection passed from the central control device 110. These identifiers are integrated by the identifier integration unit 191. Here, the second identifier is information on the inspection including information characterizing the content of the inspection, and is the inspection information stored in the inspection information file 143 and the inspection information stored in the inspection information file 144. In addition, the own identifier stored in the own identifier file 141a is included.
[0061]
As described above, by integrating the two types of identifiers, the first identifier and the second identifier, and the image data, information for identifying the inspection item such as the type name of the inspection item, the name of the inspection item, Information specifying the inspection specifications such as the inspection area, the imaging conditions, the contents of the preprocessing conditions, and the like, and the detected image data are treated as a set of data.
[0062]
When making a test information acquisition request, the identifier integration unit 191 refers to the data type identifier file 147 (FIGS. 18 and 11) in the storage device 140 and determines that the data is test information acquisition request data. Is integrated with the second identifier including the inspection item information stored in the storage device 140.
[0063]
The key information necessary for the encryption process in the encryption unit 192 is stored in the information processing device identifier-encryption key correspondence table file 142 of the storage device 140 shown in FIG. The key information is sent to the encryption unit 192 via the central control device 110. If encryption processing is not required by an application, encryption processing may not be performed according to an instruction using a control signal (dotted line in the figure) provided from the inspection control device 150.
[0064]
The sending unit 193 sends the encrypted data to the information processing apparatus 200, which is the transmission destination, together with the identifier of the own image detection apparatus 100, which is the transmission source. The identifier of the self-image detection device 100 and the address of the transmission destination transmitted by the transmission unit 193 are provided by the self-identification file 141a and the transmission destination address file 141b of the storage device 140 via the central control device 110.
[0065]
As shown in FIG. 8, the transmission / reception device 190 includes, as reception functions, a reception unit 194 for receiving data, a decryption unit 195 for decrypting the received encryption, and an identifier for recognizing an identification included in the received data. And a recognition unit 196.
[0066]
The receiving unit 194 has a function of receiving data and passing the data to the decoding unit 195. If the data is not encrypted, the received data is passed to the identifier recognizing unit 196. The decryption unit 195 reads the encryption key information associated with the recognized identifier from the information processing device identifier-encryption key correspondence table file 142 of the storage device 140 via the central control device 110, and decrypts the decryption unit 195. . The identifier recognizing unit 196 recognizes the identifier of the information processing device 200 that is the transmission source. The data type identifier obtained from the received data is compared with the information stored in the data type identifier storage file 147 shown in FIG. When recognizing the type of data corresponding to the received identifier, the identifier recognizing unit 196 sends the data to a file in the storage device 140 corresponding to the type of data. For example, when the type of data is identified as, for example, an inspection result, the transmitted data (inspection result) and the inspection information are both stored in the inspection result storage file 145 (FIG. 18) in the storage device 140. .
[0067]
The transmitting / receiving device 190 described here is configured as an independent device. However, a part of the transmission / reception device 190 may be configured by a function realized by the central control device 110. For example, the integrated control unit 110 may be configured to realize the identifier integrating unit 191 and the identifier recognizing unit 196, and further, the encryption unit 192 and the decrypting unit 195.
[0068]
(Information processing device 200)
FIG. 3 is a diagram illustrating the system configuration of the information processing apparatus 200 more specifically. As shown in FIG. 3, the information processing apparatus 200 controls the overall operation, and performs an information processing. The general control apparatus 210 performs various types of information processing. The input apparatus 220 receives external input operations such as a keyboard and a mouse. An output device 230 that outputs to the outside, a general control storage device 240 that stores a program executed by the general control device 210 and stores various information used for processing in the information processing device, and a CD-ROM or the like. A recording medium reader 201 for reading data such as a program from a recording medium on which data is recorded. Here, the general control storage device 240 is connected to the general control device 210 via a bus 209 together with other devices described later. The general control storage device 240 may be connected to the general control device 210 via a dedicated bus (not shown) separately from other devices.
[0069]
Further, the information processing device 200 includes a transmitting / receiving device 290, an inspection processing device 251, an inspection condition generating device 255, an image storage device 260, an image storage device 260, and an inspection process information storage device 270. And an inspection result storage device 280. Here, the transmission / reception device 290 is a device for the information processing device 200 to transmit / receive data via the information transmission system 300. The inspection processing device 251 is a device that performs arithmetic processing on inspection results such as defect inspection and workmanship inspection. The inspection condition generation device 255 is a device for generating conditions for imaging in the image detection device 100 and for generating parameters to be given to the preprocessing device 180. The image storage storage device 260 is a storage device that stores an image transferred from the image detection device 100. The inspection processing information storage storage device 270 is a storage device that stores a program used for processing in the inspection processing device 251, processing conditions, and the like. The inspection result storage device 280 is a storage device that stores the processing result of the inspection processing device 251.
[0070]
The image storage storage device 260, the inspection processing information storage storage device 270, the inspection result storage storage device 280, and the overall control storage device 240 are each configured by an independent storage device, for example, a hard disk device. However, these may be stored in different areas of a single hard disk drive. Further, the configuration may be such that the data is distributed and stored in a disk array or the like where a plurality of hard disk devices are arranged. Further, the central control storage device 240 may be a hard disk device built in the information processing device 200.
[0071]
The contents stored in the storage device 260 for storing images, the storage device 270 for storing inspection processing information, the storage device 280 for storing inspection results, and the storage device 240 for overall control are respectively shown in FIGS. 19, 15, 22, and 21. Each data is stored by a data structure schematically shown in FIG.
[0072]
As schematically shown in FIG. 21, the general control storage device 240 includes a self-identifier file 241 for storing the self-identifier for identifying the information processing device 200, an identifier of the image detection device, and an encryption code therefrom. As shown schematically in FIG. 21, the combination data of the encryption key for decrypting the data, the identifier of the image detection device and the encryption key number are recorded in the image detection device identifier-correspondence table file 242. . Also, the data type identifier file 243 for storing the content 1472 of data to be transmitted and received and the data type identifier 1471 corresponding to the content 1472 is stored in the central control storage device 240, as shown in FIG. I have.
[0073]
As schematically shown in FIG. 19, the image storing storage device 260 stores an inspection image file 261 for storing an inspection image captured for inspection by each image detection device 100 and an imaging condition for setting imaging conditions. An imaging condition setting image file 262 for storing the captured image. The inspection image file 261 includes a record number, product information indicating an inspection item ID for identifying each inspection target item, process information indicating a process of an inspection target to be inspected, imaging date and time, and an inspection corresponding to the record number. And an image detection device ID for specifying an image detection device to be performed, and information indicating specifications for inspection and processing for processing the inspection result, which specify under what conditions the imaging should be performed. Is stored. Here, the information relating to the specification relating to the inspection and the use relating to the processing of the inspection result include, for example, a photographing condition for acquiring an image, a pre-processing condition applied to image data, and the like. The same data as the inspection image file 261 described above is stored in the imaging condition setting image file 262. However, the image file 262 for setting the imaging condition does not store the image acquired for the inspection target, but stores the image for comparison for setting the inspection condition.
[0074]
As shown in FIG. 15, the inspection processing information storage storage device 270 stores an inspection information file 271 for storing inspection information, an inspection program file 272 for storing processing programs and the like, a reference data file 273 for storing reference data, and image quality evaluation. An image quality evaluation item file 274 storing items, an image quality evaluation item-imaging condition file 275 storing data of “image quality evaluation item-imaging condition” indicating a correspondence relationship between the image quality evaluation item and the imaging condition, and a dummy pattern A dummy data-inspection result reference file 276 for storing "dummy data-inspection result reference" indicating an inspection result reference for dummy data as an inspection result.
[0075]
In the inspection information file 271, as the inspection information, a record number, product information indicating an inspection item ID for identifying each inspection target item corresponding to the record number, process information indicating a process of the inspection target to be inspected, Information indicating an image detection device ID for specifying an image detection device to be inspected, and a specification relating to the inspection and a specification for processing the inspection result, which specify under what conditions the imaging should be performed correspondingly. Are stored. Here, as information indicating specifications regarding inspection and use regarding processing of inspection results, for example, imaging conditions when acquiring an image, preprocessing conditions to be applied to image data, inspection processing conditions, and an inspection area in an inspection target are specified. An inspection area, which is information, is included. Here, the inspection method is not shown. This is because the information processing apparatus 200 according to the present embodiment specifies the inspection method by specifying the image detection apparatus.
[0076]
In the inspection program file 272, product information indicating an inspection item ID to be inspected, process information indicating a step in which the inspection is performed, and a processing program corresponding to these, which is required for processing in the inspection processing device 251 are included. Is stored. The processing performed by the inspection processing device 251 includes, for example, processing such as defect determination processing and image quality inspection processing.
[0077]
The reference data file 273 includes product information indicating an inspection item ID to be inspected, process information indicating a process in which an inspection is performed, and corresponding reference data referred to during processing in the inspection processing device 251. Is stored. The reference data includes condition information at the time of processing. This type of information includes, for example, processing parameters such as threshold values for binarization processing often performed in image processing, as well as design data and non-defective image data used as comparison data when determining defects. It is.
[0078]
Specifically, the reference data file 273 stores, for example, information specifying a data type such as design CAD data, non-defective image data, and processing parameters, and specific data corresponding to the data type. For example, in the case of design data, information stored in advance on a storage medium such as a CD-R can be read through the storage medium reading device 201 and stored in the reference data file 273. Further, the design data may be distributed from another site, for example, a product design site via the information transmission system 300, and may be stored in the reference data file 273. Further, as a method for acquiring good-quality image data, the image data is acquired by the image data image detection device 100 of a product that is known in advance to have no defect, and the result is received via the transmission / reception device 290, and the reference data file is acquired. 273 may be stored.
[0079]
The image quality evaluation item file 274 includes a record number, an image quality evaluation item having various evaluation values for evaluating image quality corresponding to each record, data of a permissible area of those values, and calculation of those evaluation items. An evaluation program for adjusting imaging conditions (hereinafter referred to as an evaluation program) is stored. As the image quality evaluation items, for example, a gradation average value, a gradation dispersion value, and the like are stored. As the allowable range, ± 5 corresponding to the gradation average value and ± 10 corresponding to the gradation dispersion value are stored. As the evaluation program, an average calculation program is stored for an item for obtaining an average value such as a gradation average value, and a variance calculation program is stored for an item for obtaining a variance value such as a gradation variance value.
[0080]
The image quality evaluation item-imaging condition file 275 includes a record number, an image quality evaluation item ID for specifying the image quality evaluation item corresponding to the record number, an imaging condition corresponding to the ID, and an image quality evaluation corresponding to a change in the imaging condition. The change of the imaging condition indicating the change of the item and the priority of each image quality evaluation item are stored.
[0081]
The dummy data-inspection result reference file 276 stores a plurality of types of dummy data used for inspection for testing the image detection performance of each image detection apparatus 100. The dummy data stores, for example, a dummy data ID for identifying a plurality of types of dummy data, and the number of defects, a defect type, a defect position, and a defect size corresponding to a processing result.
[0082]
The test result storage device 280 has a test result file 281 for storing test result information as schematically shown in FIG. In the inspection result file 281, a record number, a product name for identifying a product, a process name, an inspection date and time, an inspection area, the number of defects, a defect type, and a position of each defect point corresponding to the record number are stored as the inspection results. And information indicating the type are stored.
[0083]
The inspection processing device 251 performs an inspection process such as a defect determination process or a work quality determination process according to an instruction from the overall control device 210, for example. The processing performed here is, for example, processing for obtaining position information on where the dust or flaw is located on the inspection target, and what type of defect is detected (for example, bright colored dust, deep Process, etc.), and, at a predetermined position, for example, by measuring the dimensions of the inspection target site such as wiring width, how far it is from the reference value, This is a process of determining whether or not the difference is a degree that should be regarded as defective.
[0084]
The inspection processing device 251 is configured by a processor suitable for calculation processing and executes information processing such as various calculations according to a processing program stored in an inspection program file 272. Specifically, the inspection processing device 251 performs an inspection process such as a defect determination process and a workability determination process in accordance with an instruction from the overall control device 210. The processing performed here is, for example, processing for obtaining position information on where the dust or flaw is located on the inspection target, and what type of defect is detected (for example, bright colored dust, deep Process, etc.), and, at a predetermined position, for example, by measuring the dimensions of the inspection target site such as wiring width, how far it is from the reference value, This is a process of determining whether or not the difference is a degree that should be regarded as defective.
[0085]
When the inspection processing is completed, the inspection processing device 251 sends the result to the inspection result storage storage device 280 (FIG. 22) via the bus 209 and stores the result. Further, it notifies the general control device 210 of the end.
[0086]
The inspection condition generator 255 calculates the value of each evaluation item for each image using an evaluation program, and generates an inspection condition based on the result. That is, each image acquired from each image detection device 100 is evaluated, and based on the evaluation result, control conditions relating to, for example, an imaging condition, a preprocessing condition, and the like are set as inspection conditions in the corresponding image detection device. Then, the image is acquired again and evaluated, and the control condition is reset based on the result. This process is repeated until the evaluation result of the acquired image reaches a predetermined allowable range. In this way, when the performances of a plurality of image detection devices are different, it is possible to keep the quality of the images acquired by each device within a certain allowable range. Further, even with the same type of image inspection apparatus, the quality of an image that can be obtained due to machine differences may be different. Also in this case, it is possible to absorb the machine difference and to keep the quality of the image obtained from each image detection device within a predetermined allowable range. As a result, even when a variety of image detection devices are present, it is possible to evaluate the product for a product in a unified, objective, and accurate manner. For this reason, since the obtained inspection result has universality, it is possible to perform quality control and the like in a unified manner using the inspection result. Further, it is possible to objectively evaluate the quality level of the product of the production company.
[0087]
Here, the inspection condition generating device 255 calculates, for example, a gradation average value, a gradation variance value, and the like of the entire screen for evaluating the image. These pieces of information may be output to the user as shown in FIG. Then, the evaluation item values of the images from the respective image detection devices 100 are compared, and the contents for setting the imaging conditions in the direction in which they are the same are described in the image quality evaluation item-imaging conditions of the storage device 270 for storing inspection processing information. It is obtained from the correspondence between the image quality evaluation item and the imaging condition stored in the file 275. In a normal case, there are a plurality of control conditions to be set for imaging for one evaluation item. In this case, the control condition to be set is selected in accordance with the priority stored in the image quality evaluation item-imaging condition file 275 in advance, and a new value is set for the condition.
[0088]
The inspection condition generation device 255 sends the new control condition value and the identifier of the image detection device that transmits the control condition to the overall control device 210, and the overall control device 210 sends the new imaging condition to the corresponding image detection device. Submit the value. Further, the inspection condition generating device 255 has a function of repeating the above-described image evaluation and setting of the inspection condition until the quality of an image obtained from the image detecting device falls within a predetermined allowable range. When the control condition is finally determined, the inspection condition generation device 255 stores the control condition in the inspection processing information storage storage device 270 in the information processing device 200 as an imaging condition based on the control condition, and captures the image on the screen of the output device 230. A message to the effect that the condition setting has been completed is displayed.
[0089]
Note that the above example shows an example in which image quality is evaluated using values of some evaluation items. However, the index for evaluating the difference between the image detection devices may be the result of the defect inspection or the workmanship inspection itself. For example, with respect to a dummy inspection object used for imaging, expected inspection results and measurement results can be obtained. Therefore, these data are stored in advance in the dummy data-inspection result reference file 276 of the storage device 270 for storing the inspection processing information of the information processing apparatus 200, and this data and the processing result of the image data from each image detecting apparatus 100 are processed. By comparing with the above, the difference in the quality of the images obtained from the respective image detection devices 100 can be grasped.
[0090]
(Appearance inspection processing procedure)
Next, a procedure for performing a visual inspection of a product in the visual inspection system according to the present invention will be described. Next, the outline of the inspection procedure, the operation of the system, and the inspection method will be described. At the time of description, regarding the display accompanying the visual inspection, the display performed by the image detection device 100 and the display performed by the information processing device 200 will be described with reference to FIGS. 5, 12, 14, 16, and 17. explain.
[0091]
The general control device 110 performs a process of outputting the acquired information, for example, the acquired image, the image quality evaluation result of the image, the inspection result of the target, and the like, by using the output device 130. When the output device 130 is a display, for example, a screen as shown in FIGS. 5 and 12 is displayed on the screen. To this end, although not shown, a menu frame may be provided on the screen of the output device 130 so as to receive an instruction for displaying inspection information and other information. A print instruction can be accepted, and a printout can be made by a printer.
[0092]
Similarly, the overall control device 210 performs a process of outputting the acquired information, for example, the acquired image, the image quality evaluation result of the image, the inspection result of the target, and the like, by using the output device 230. When the output device 230 is a display, for example, a screen as shown in FIGS. 14, 16 and 17 is displayed on the screen. For this purpose, although not shown, a menu frame can be provided on the screen of the output device 230 so as to receive an instruction for displaying inspection information and other information. A print instruction can be accepted, and a printout can be made by a printer.
[0093]
Next, the operation of the inspection system of the present invention will be described. First, an outline of the procedure will be described with reference to FIG. Next, a more detailed description will be given with reference to other drawings.
[0094]
4, the processing procedure in the image detection device 100 is shown on the left, and the processing procedure in the information processing device 200 is shown on the right.
[0095]
First, the image detection apparatus 100 displays on the screen of the output device 130 a message prompting the user to place the inspection target W on the stage 162 of the imaging device 160 (S1111). In addition, an input of designation of inspection product information such as the name of a product to be inspected and the name of the manufacturing process of the product when the manufacturing process of the product includes a large number of processes is received through the input device 120 ( S1112). This inspection item information does not necessarily need to be input via the input device 120. For example, when information on the inspection item is displayed on the product itself, a result of imaging the corresponding part is obtained from the image sensor 164. The information may be obtained by analyzing the image. Whether inspection item information is received from the input device 120 or read from the inspection target W is set in advance. When reading from an image, a program for that purpose, for example, a character recognition processing program is prepared in advance.
[0096]
Further, the overall control device 110 stores the inspection item information specifying the product to be inspected received from the input device 120 in the inspection item information file 143 of the storage device 140 (see FIG. 18). Thereafter, in order to obtain “inspection information” required for performing image detection, an inspection information request is made to the information processing device 200 through the transmission / reception device 190 (S1113). When making a test information request, the transmission / reception device 190 refers to the data type identifier table (FIG. 11) in the storage device 140 and a first identifier (FIG. 11) indicating that the data is test information request data. In the example shown in (1), the data type identifier A) is integrated with the second identifier including the inspection item information stored in the storage device 140. The transmission / reception device 190 transmits the integrated data. As described above, the second identifier includes an identifier (own identifier in FIG. 18) for identifying the self-image detection device from the other, in addition to the above-described inspection item information of the inspection target. The data to be transmitted can be encrypted if necessary. The specific operation of the transmitting / receiving device 190 including the encryption processing when transmitting data will be described later with reference to FIG.
[0097]
After transmitting the test information acquisition request, the image detection device 100 enters a state of waiting for reception from the information processing device 200. If a signal from the information processing device 200 cannot be received within a certain period of time, the central control device 110 displays a message on the screen of the output device 130.
[0098]
In the information processing device 200, the transmission / reception device 290 receives data. The overall control device 210 acquires the data received by the transmission / reception device 290, analyzes the first identifier in the data, and recognizes that it is a test information acquisition request (S2111). Also, by analyzing the second identifier, the inspection item information (inspection item name, process name, etc.) necessary for searching the inspection information is obtained. Thereafter, the inspection processing information storage storage device 270 (see FIG. 15) is searched using the inspection item information as a key to acquire necessary inspection information (S2112). The result is transmitted to the requesting image detection apparatus 100 through the transmission / reception apparatus 290.
[0099]
The transmission / reception device 290 includes inspection information to be transmitted, a first identifier that defines that the data is a reply to the inspection information request, and a second identifier that identifies the information processing device 200 that is the transmission source of the data. Are transmitted together (S2113). It should be noted that data to be transmitted and received can be encrypted as necessary, and the specific operation of data transmission and reception in the transmitting and receiving device 290 including that will be described later with reference to FIGS.
[0100]
The image detection apparatus 100 receives the inspection information sent from the information processing apparatus 200 by the transmission / reception apparatus 190 (S1114). The specific operation of data reception in transmitting / receiving apparatus 190 will be described later with reference to FIG.
[0101]
Recognizing that this data is returned inspection information from the first identifier of the received data, and storing the received inspection information in the inspection information file 145 of the storage device 140 (FIG. 18), And, if necessary, display it on the screen of the output device 130 (S1115). FIG. 5 shows an example of the display.
[0102]
FIG. 5 shows an example in which, in the image detection device 100, the inspection information received via the transmission / reception device 190 is displayed on the screen of the output device 130 by the central control device 110.
[0103]
The inspection product display section 1320 displays an external view 1321 of the inspection product. Inspection area information 132 obtained from the acquired inspection information is shown in the inspection area display unit 1322 (displayed in a thick frame in the drawing). That is, in this case, it is meant that the entire surface of the inspection product is not inspected, but only the area in the inspection area display unit 1322 is inspected. The inspection information display unit 1330 displays the content included in the inspection information, for example, the processing content 1331, the position 1332 of the illumination device 163, the power value 1333 of the illumination device 163, and the like.
[0104]
Thereafter, the overall control device 110 transmits the inspection information indicating the inspection area, the imaging condition, and the like as described above regarding the inspection target in the storage device 140 to the inspection control device 150. In addition, the general control device 110 transmits, to the inspection control device 150, information on filter coefficients, parameters (for example, a compression ratio) necessary for image compression, and the like as inspection information. As the compression ratio, for example, a parameter such as 20% is transmitted as shown in FIG.
[0105]
The inspection control device 150 sets the position of the illumination device 163, the intensity of the illumination device 163, and the contents of the preprocessing device 180 based on the transmitted inspection information, and starts imaging. For example, in the example shown in FIG. 5, the lighting power of the light source is set to 20 W as the intensity of the lighting device 163. Further, the illumination position is designated by the coordinates (X, Y, Z). Further, the inspection control device 150 controls the direction, the moving range, the moving speed, and the like of the stage movement based on the inspection information.
[0106]
Next, the overall control device 110 instructs the inspection control device 150 and the pre-processing device 180 to start an inspection, that is, to start imaging (S1116). This instruction is performed at the timing when the information indicating that the preparation by the inspection control device 150 is completed is received.
[0107]
The inspection control device 150 starts imaging of the inspection target W by the imaging device 160. That is, the inspection control device 150 uses the image sensor 164 to detect the inspection image in the area indicated by the inspection area display unit 1322. In the case of this example, the position of the image sensor 164 is fixed and the stage 162 is moved to obtain an image of the entire detection area. On the other hand, the image sensor 164 receives reflected light from the inspection target W and detects an image. The detected image is sent to the pre-processing device 180 and pre-processed.
[0108]
In the preprocessing device 180, after the image data is filtered in the filter unit 183, the image is compressed in the compression unit 184 according to the transmitted compression parameter. The compressed image data is sent to the transmission / reception device 190. The transmission / reception device 190 sends the image data to the information processing device 200 via the information communication system 300 (S1117).
[0109]
The transmission / reception device 290 of the information processing device 200 receives the data transmitted from the transmission / reception device 190 of the image detection device 100 via the information communication system 300. The central control device 210 stores the data in the inspection image file 261 (FIG. 19) in the image storage memory 260 (S2114).
[0110]
After completing the data acquisition, the central control device 210 executes an inspection process (S2115). Specifically, from the inspection information included in the second identifier of the received image data, the product name and the process name of the inspection target item are recognized, and the processing program and the condition information required for the processing are used as keys. The data is read from the inspection processing information storage device 270 (FIG. 15) and transferred to the inspection processing device 251. The processing condition information includes conditions necessary for processing, for example, processing parameters such as a threshold value of binarization processing often performed in image processing, and a design used as comparison data at the time of defect determination. Data and non-defective image data are also included. Thereafter, the overall control device 210 calls the image to be inspected from the image storage memory device 260, transfers the image to the inspection processing device 251 and instructs the image processing to start.
[0111]
The inspection processing device 251 performs an inspection process such as a defect determination process and a work quality determination process according to an instruction from the general control device 210. That is, a process of obtaining positional information on where the dust or flaw is located in the inspection target, and what kind of defect (for example, bright colored dust, deep scratch, etc.) the detected defect is. Classification processing, at a predetermined position, for example, measuring the dimensions of the inspection target site such as wiring width, and determining how far it is from the reference value, and determining that it is defective A determination process is performed to determine whether the difference is a degree to be considered.
[0112]
Upon completion of the inspection processing, the inspection processing device 251 performs processing for storing the result in the inspection result storage storage device 280 (FIG. 22). The completion is notified to the general control device 210. Upon receiving the notification of the inspection process, the overall control device 210 returns the inspection result to the image detection device 100 that has transmitted the inspection image via the transmission / reception device 290 (S2116).
[0113]
The image detection device 100 receives data transmitted via the information communication system by the transmission / reception device 190. The central control device 100 stores the sent inspection result and the inspection information together in the inspection result storage file 145 (FIG. 18) in the storage device 140. Further, the supervisory control device 110 displays the inspection result on the screen of the output device 130 as necessary (S1119).
[0114]
FIG. 12 shows an example of the display of the inspection result. A processing condition display section 1340 and a processing result display section 1350 are additionally displayed on the inspection information display screen shown in FIG. The processing condition display unit 1340 displays the parameter values used for the inspection process obtained from the inspection information, and the processing result display unit 1350 displays a defect map indicating the position of the detected defect obtained from the inspection result. A part 1351 and a defect data display part 1352 for displaying the number and type of defects are displayed. In the defect map display unit 1351, different patterns (for example, circles and diamonds in FIG. 12 are illustrated in FIG. 12) for each defect type to indicate which defect exists at which position in the inspected area. ) Indicates the position where each defect exists. The defect data display unit 1352 displays the type of detected defect, the number of defects (for example, the number of defects or the total number of defects).
[0115]
Next, transmission and reception of data performed between the image detection device 100 and the information processing device 200 will be further described.
[0116]
First, a data transmission process of the transmission / reception device 190 will be described with reference to FIG. The identifier integrating unit 191 integrates data input from the preprocessing device 180 with two pieces of identifier data obtained from the central control device 110. That is, the data type information (FIG. 11) stored in the storage device 140, which is the first identifier data, and the inspection item information and the inspection information stored in the storage device 140, which are the second identifiers. Integrate. The data type information is stored in the storage device 140 in a table format as shown in FIG. In this way, by integrating the two types of identifiers and the image data, the name of the inspection product, the inspection area, the imaging conditions, the contents of the preprocessing conditions, and the like, and the detected image data are treated as a group of data. Become.
[0117]
Next, the encryption unit 192 performs encryption processing on the image data. The key information required for performing the encryption process is stored in the information processing device identifier-encryption correspondence table file 142 of the storage device 140 shown in FIG. The encryption unit 192 acquires the key information via the central control device 110. If encryption processing is not required by the application, the encryption processing may not be performed according to an instruction by a control signal (dotted line in the figure) given from the inspection control device 150.
[0118]
Next, the transmission section 193 transmits the encrypted data to the information processing apparatus, which is the transmission destination, together with the identifier of the own image detection apparatus, which is the transmission source. The identifier of the self-image detection device and the address of the transmission destination are provided from the storage device 140 via the central control device 110. Note that in the test information request procedure from the image detection device 100 performed before imaging, the test information passed from the general control device 110 is used as the second identifier with the data type identifier shown in FIG. The identifier is integrated by the identifier identifier integrating unit 191, then encrypted by the encryption unit 192, and transmitted from the transmission unit 193 to the information processing device 200 together with the identifier of the self-image detection device that is the transmission source.
[0119]
In the example described so far, the inspection process is started after all the images detected by the image detection device 100 are acquired by the information processing device 200. However, the present invention is not limited to this. For example, when the number of detected images is large, or when it takes time to acquire image data, the detection data is divided into a plurality of partial data, and the image data is transmitted from the image detection apparatus 100 to the information processing apparatus 200 for each of the partial data. May be transmitted and the partial data may be processed as a unit. At that time, data identifying the number of each partial data in the entire data is added to the identifier used in the data transfer.
[0120]
FIG. 9 is a diagram illustrating a configuration and a function of a portion related to data reception of the transmission / reception device 290 of the information processing device 200. The data is received by the reception unit 291 of the transmission / reception device 290, and the transmission source of the data is specified from the identifier of the data. Next, the decoding unit 292 performs data decoding processing. It sends the data transmission source identifier to the overall control device 210, and requests acquisition of key information necessary for decryption. Upon receiving the request, the general control device 210 searches the general control storage device 240, obtains information on the encryption key, and replies to the decryption unit 292. The decryption unit 292 decrypts the encrypted data using the received encryption key and transmits the decrypted data to the identifier recognition unit 293. The identifier recognizing unit 293 recognizes that the data is inspection image data from the first identifier included in the decrypted data. The list of data identifiers shown in FIG. 11 is also stored in the general control storage device 240 (FIG. 21) of the information processing apparatus 200. By comparing this data with the received data type identifier, the data type is listed. Can be recognized. In this example, the data type identifier is “B” in the table of FIG. 11, and it is recognized that the data type identifier is a detection image detected by the image detection device. Thereafter, information indicating that the data is inspection image data and data (second identifier and image data) are transferred to the overall control device 210.
[0121]
FIG. 10 is a diagram illustrating the configuration and function of a part related to data transmission of the transmission / reception device 290. The overall control device 210 transmits the inspection result to be returned to the identifier integrating unit 294. The identifier integrating unit 294 sets the data type identifier (FIG. 11) in the integrated control storage device 240 as the first identifier for the received inspection result, and stores the inspection information for the inspected image data as inspection processing information. The data is read from the storage device 270, integrated as a second identifier, and the integrated data is transmitted to the encryption unit 295. The encryption unit 295 obtains encryption key information associated with the image detection device that is the transmission partner from the integrated control storage device 240 through the integrated control device 210, and encrypts the data. The sending unit 296 adds the identifier information (FIG. 21) of the information processing apparatus to the encrypted information, and transmits the information to the image detection apparatus of the transmission partner.
[0122]
In the process of returning the inspection information requested by the image detecting device 100 from the information processing device 200, which is performed before the image detecting process, the identifier integrating unit 294 transmits the general control storage device 240 to the general control device 210 in the identifier integrating unit 294. The data type identifier shown in FIG. 11 and the inspection information obtained from the inspection processing information storage device 270 are integrated. Thereafter, the encrypted information is encrypted by the encryption unit 295, and the transmission unit 296 adds the identifier of the transmission partner and the identifier of the information processing apparatus 200 to the encrypted information and transmits the information to the image detection device of the transmission partner.
[0123]
FIG. 8 is a diagram illustrating the configuration and function of a part related to data reception of the transmission / reception device 190 of the image detection device 100. The data transmitted from the transmission unit 296 is received by the reception unit 194, and the identifier of the information processing apparatus 200 that is the transmission source is recognized. Then, the encryption key information associated with the identifier is read from the storage device 140 through the central control device 110 and decrypted by the decryption unit 195. After that, the identifier recognizing unit 196 compares the data type identifier obtained from the data with the table information shown in FIG. 11 obtained from the storage device 140 through the central control device 110 to determine the type of data (in this case, the inspection result). The specified and transmitted inspection result and inspection information are stored together in the inspection result storage file 145 (FIG. 18) in the storage device 140.
[0124]
When the result of the request for the inspection information, which is performed before the image detection processing, is received, the identifier recognizing unit 196 recognizes that the data is the reply data to the request for the inspection information, and Data is stored at a predetermined position in 140.
[0125]
In the appearance inspection system shown in FIG. 1 in which a plurality of image detection devices 100 are connected to the information transmission system 300, image detection according to the above-described sequence is performed independently for each image detection device 100. For this reason, the inspection can be performed by arranging the image detection devices 100 having the required performance at each location at various locations in the production site and performing image detection at each location. On the other hand, the information processing device 200 is installed in an office other than the production site. As a result, it is not necessary to arrange a large-sized device in which an image detection device and a processing unit for performing defect detection are integrated as in a conventional visual inspection device at a production site, and space can be saved.
[0126]
(Other examples of the image detection device)
In the image detecting apparatus shown in FIG. 2, a case where an image is optically captured is described, but the image detecting apparatus is not limited to the optical detecting means. An electron beam can be used for imaging.
[0127]
FIG. 20 shows an example. The image detection device shown in FIG. 20 is an electron beam type image detection device. This electron beam type image detection apparatus has an imaging apparatus system (150, 170, 180) having a function of imaging an object to be inspected, controls imaging, and sends an image obtained by the control to the information processing apparatus 200. A control system (110, 120, 130, 140) having a function of performing the above control, and a transmitting / receiving device 190 for performing transmission / reception. Here, this embodiment differs from the embodiment described above in that the imaging device 170 is of an electronic type. In addition, it goes without saying that there are differences between the optical type and the electronic type in the inspection conditions, the processing of the acquired images, and the like. Therefore, there are differences due to the configuration of the inspection control device 150, the pre-processing device 180, the general control device 150, and the like. Note that the other configurations are basically the same.
[0128]
The electronic imaging device 170 includes a sample chamber 171 that accommodates an inspection target (sample) M, and a stage (sample stage) that is disposed in the sample chamber 171 and on which the inspection target M is mounted and displaced in the XYZ directions. ) 172, an electron gun 173 as a radiation source for illuminating the sample with an electron beam, an objective lens 174 for converging the electron beam from the sample, and a two-dimensional deflection of the electron beam on the inspection object W. It has a deflection lens 175 for scanning and a sensor 176 for detecting secondary electrons and reflected electrons generated from the sample.
[0129]
In the electron beam type image detection device, the electron beam emitted from the electron gun 173 is converged by the objective lens 174 and irradiated on the inspection target W. The irradiation position is two-dimensionally scanned by the deflection lens 175, so that the electron beam is irradiated two-dimensionally. The sensor 176 detects secondary electrons, reflected electrons, and the like generated from the sample. The image detected by the sensor 176 is sent to the pre-processing device 180 and pre-processed.
[0130]
In all of the embodiments described below, it is possible to replace the optical image detecting device with an electron beam type image detecting device.
[0131]
Further, controlling the position of illumination and the intensity of illumination in the optical image detection device corresponds to controlling the acceleration voltage and beam current of the electron beam in the electron beam image detection device.
[0132]
(Setting of imaging conditions for visual inspection system)
Next, an example of the imaging condition setting in the visual inspection system shown in FIG. 1 will be described. One of the problems when performing an appearance inspection using a plurality of image detection devices is machine-to-machine variation. This means a variation in inspection results when the same inspection target is inspected using a plurality of image detection devices. If the inspection performance is changed by the image detection device, there is a possibility that stable inspection performance cannot be obtained. In a conventional visual inspection system, a plurality of inspection devices have a configuration in which an image detection device and a processing unit are integrated. Therefore, it is necessary to set processing conditions such as an imaging condition and a processing parameter in each inspection device, and the setting requires labor. As described above, the present invention includes a plurality of image detection devices that detect images and an information processing device that acquires and processes inspection results from them. That is, image detection and processing of the detected image are separated. As a result, in the information processing apparatus, it is possible to provide an appearance inspection system in which the images obtained from the respective image detection apparatuses are compared with each other and the quality thereof is made uniform to reduce variation in instrumental error.
[0133]
FIG. 13 shows a flow of a control signal generation processing operation of the information processing device 200 and the image detection device 100. When the operator of the information processing apparatus performs the imaging condition control, that is, when an imaging condition adjustment request is input to the general control device 210 via the input device 220 (S2211), the general control device 210 executes the information transmission system. A request is made to each of the image detection devices 100 connected via 300 to transmit an image signal for imaging control (S2212). Specifically, the transmission / reception device 290 is informed of the fact, and the identifier integration unit 294 stores a data type identifier for requesting an image signal for imaging control in a table shown in FIG. , And transmits the image to each image detection device. In the following description, a detailed description of the encryption processing and the like in the encryption unit 295 will be omitted, but the same procedure as in the case where the encryption processing is performed at the time of transfer of the inspection image may be performed.
[0134]
When each of the image detection devices 100 receives the data (S1211), it interprets that an image request for imaging control has been received by analyzing the data type identifier, and the overall control device 110 sets the inspection control device 150 An instruction to capture an image is issued (S1212). As an imaging target, there is a method of using a dummy inspection target (not shown in FIG. 2) on which a predetermined material or pattern is arranged, which is arranged on the stage 162 in each sample chamber 161 in advance. . In this case, the position information of the dummy inspection target on the stage 162 is stored in the dummy inspection pattern information file 146 of the storage device 140 (see FIG. 18). At the time of imaging, the general control device 110 reads out the position information and the current imaging conditions, and transmits the read information to the inspection control device 150, thereby imaging the dummy part. The detected image data is sent to the transmission / reception device 190 via the preprocessing device 180. After the imaging condition data and the data type identifier for returning the imaging condition setting image are integrated with the image data in the identifier identifier integration unit 191 of the transmission / reception unit 190, the encryption is performed in the encryption unit 192, and the image data is transmitted. In the unit 193, the identifier of the self-image detection device is added and transmitted to the information processing device 200 (S1213).
[0135]
When the transmission / reception device 290 of the information processing device 200 receives the data (S2213), the data and the effect that the data is for setting imaging conditions are transmitted to the general control device 210, and the general control device 210 The data is stored in the storage device 260 for storing images. When the replies from all the image detection devices that have requested the imaging setting image are obtained, the overall control device 210 confirms that the data storage position in the image storage device 260 and the imaging condition setting are to be performed. 255.
[0136]
The inspection condition generating device 255 takes out the image from each image detecting device stored in the image storage device 260 and sets the imaging condition (S2214). The inspection condition generation device 255 calls up a program for adjusting imaging conditions stored in the storage device 270 for storing inspection process information to perform image evaluation processing, or reads out a processing program and processing parameters, and deletes a defect from each image. A detection process and a work quality determination process are performed.
[0137]
FIG. 14 shows, on a screen of the output device 230, a detection image display unit 2320 which is an area for displaying a detection image from the image detection device, and an image gradation display showing a graph of image gradation values for the detection image. 23 shows a screen display example in which a section 2330 and an image evaluation display section 2340 showing an evaluation of a detected image are displayed.
[0138]
In the example shown in FIG. 14, images 2321 and 2322 from the two image detection devices 100 # 1 and 100 # 2 for the same wiring pattern are displayed on the detected image display unit 2320. Further, an example is shown in which the image gradation value in one line cross section of the detected image is displayed in a waveform on the image gradation display unit 2330. An evaluation value 2342 for the evaluation item 2341 is displayed on the image evaluation display unit 2340. In FIG. 14, a gradation average value and a gradation dispersion value are displayed as evaluation items 2341. The evaluation value 2342 displays the evaluation values corresponding to the images 2321 and 2322 from the two image detection devices 100 # 1 and 100 # 2 described above.
[0139]
As shown in FIG. 15, an image quality evaluation item and data of a permissible area of the value and an evaluation program for adjusting imaging conditions for calculating the evaluation item are stored in the storage device 270 for storing the inspection process information of the information processing device 200. (Hereinafter referred to as an evaluation program) and data indicating the relationship between each imaging condition and an image evaluation item when its value is changed. The inspection condition generator 255 calculates the value of each evaluation item using an evaluation program for each image. For example, a gradation average value and a gradation dispersion value of the entire screen are calculated. These pieces of information may be output to the user as shown in FIG. Then, the evaluation item values of the images from the respective image detection devices are compared, and the contents to be controlled in the direction in which they are the same are obtained from the correspondence between the image quality evaluation items of the inspection processing information storage storage device 270 and the imaging conditions. Usually, there are a plurality of control conditions for one evaluation item. However, a condition to be controlled is selected according to a priority stored in advance, and a new value is set for the condition. The inspection condition generation device 255 sends the new control condition value and the identifier of the image detection device that transmits the control condition to the general control device 210, and the general control device 210 sends a new image to the corresponding image detection device 100. The condition value is transmitted, and the transmission of the image acquired under the condition is requested (S2215).
[0140]
Upon receiving the information (S1214), the image detection device 100 performs imaging again under the given conditions (S1215), and returns the image to the information processing device 200 (S1216).
[0141]
Upon receiving the image (S2216), the information processing device 200 sends the received image data to the inspection condition generating device 255. The inspection condition generator 255 calculates the evaluation items of the image quality in the same manner as in the above-described case. Then, it is evaluated whether or not the evaluation item of each image captured by each image detection device is within the allowable area (S2217). The above operation is repeated until this reaches the allowable region. When the control condition is finally determined in the inspection condition generation device 255, the imaging condition is stored in the inspection processing information storage storage device 270 in the information processing device 200, and is displayed on the screen of the output device 230. The end of the imaging condition setting is displayed (S2218).
[0142]
In the above example, an example in which the image quality is evaluated using the values of some evaluation items has been described. However, as described above, the index for evaluating the difference between the image detection devices may be a result of a defect inspection or a workmanship inspection. For example, with respect to a dummy inspection target used for imaging, expected inspection results and measurement results can be obtained, and those data are stored in advance in the inspection processing information storage storage device 270 of the information processing device 200. By comparing this data with the processing result of the image data from each image detection device, it is also possible to grasp the difference in image quality obtained from each image detection device.
[0143]
Next, a procedure for setting processing parameters required in the preprocessing device 180 will be described. By using the same procedure as that for generating the imaging control condition in the information processing device 200 described above, it is also possible to generate the processing parameters in the preprocessing device 180. Here, an example in which a noise removal filter coefficient, a geometric correction filter coefficient, and a compression ratio are set as processing parameters in the preprocessing device 180 will be described.
[0144]
FIG. 16 is a diagram showing an image acquired from each image detection device 100 in the same sequence as the image collection in each image detection device 100 for generating the above-described imaging control signal. This figure shows an example in which the noise intensity of the image (2) captured by the image detection device 100 # 2 is stronger than the image (1) detected by the image detection device 100 # 1.
[0145]
In such a case, the quality of the images can be made uniform by adjusting the processing parameters in the pre-processing device 180 in the image detection device 100 for each image detection device 100. For example, a frequency spectrum is obtained by performing a Fourier transform on an image, a noise component in the image is examined by a method of quantitatively expressing a signal intensity in a high frequency region, and a filter coefficient of a noise reduction filter is detected so that the noise component is the same. Calculate for each device. When the filter coefficient is determined, the value is stored in the inspection processing information storage storage device 270 through the general control device 210, transmitted to the image detection device 100, and stored in the storage device 140.
[0146]
FIG. 17 shows an example in which the degree of distortion generated when an image of a lattice pattern is generated, which is caused by aberration of a lens used for imaging, differs for each image detection apparatus. Compared with the pattern (3) having no distortion, the distortion of the image is larger in the result (2) captured by the image detection device 100 # 2 than in the result (1) captured by the image detection device 100 # 1. It shows the situation.
[0147]
Also in this case, for example, how much each image is distorted with respect to the pattern (3) is quantitatively obtained, a processing coefficient for correcting them is calculated, and the processing coefficient is subjected to the inspection processing through the overall control device 210. The information is stored in the information storage device 270 and transmitted to the image detection device 100. In the image detection device 100, the filter unit of the preprocessing device 180 performs geometric correction on the image data using the filter coefficient. As for the sample having the lattice pattern shape to be imaged, a dummy sample may be set in the sample chamber 161 in advance as in the case of controlling the imaging conditions.
[0148]
As another parameter given to the preprocessing device 180, the compression ratio can be increased. In image compression, an important parameter is a compression ratio, that is, a ratio of a capacity of data before compression to a capacity of data after compression. If the compression ratio is increased, the capacity of the image data is reduced, but some information in the image is discarded by the compression process, which may affect the result of the defect determination and the workability determination process. On the other hand, when the compression ratio is low, the meaning of compressing the data is reduced. For this reason, the inspection condition generation device 255 creates an image obtained by compressing the image transmitted from the image detection device at several compression ratios, and collects the results of the defect determination / work quality determination process performed by the inspection processing device 251 for each image. Then, it is compared with a reference result previously stored in the inspection processing information storage storage device 270. Therefore, a compression ratio within a range in which the comparison result is acceptable is obtained and stored in the inspection processing information storage storage device 270 through the general control device 210, and is also transmitted to the image detection device 100 to be used for preprocessing in the image detection device 100. Used. In this way, it is possible to define an appropriate compression ratio according to the content of the processing, and to reduce the amount of image data transferred from the image detection device.
[0149]
What has been described so far is the operation method of the present visual inspection system for the purpose of performing inspection with the same inspection performance when the inspection target of the same product and process is inspected using a plurality of image detection devices. It is. However, the present invention is not limited to this. For example, by using the mechanism of the present appearance inspection system, it is possible to construct an appearance inspection system capable of achieving high inspection performance for many inspection targets in various products and processes.
[0150]
In a certain production line, as the types and processes of products to be produced increase, the number of variations of the inspection target increases. However, the optimum imaging conditions for inspecting the defects and workmanship of each inspection object are not all the same. For example, for inspection of certain varieties, it may be advantageous to use illumination passed through a particular color (eg, red) filter. In some cases, illuminating light from a specific direction is more advantageous for revealing defects. For this reason, it is necessary to change the imaging conditions according to each inspection product and its process to capture an image. In such a case, the parameters used in the preprocessing device 180 for the detected image data and the inspection processing program itself may need to be changed due to a change in the imaging conditions.
[0151]
In such a case, the appearance inspection system according to the present invention sets conditions as follows. First, an inspection target is mounted on any one of the image detection devices 100. The general control device 210 of the information processing device 200 receives a condition setting request from a user input from the input device 220 of the information processing device 200 or the input device 120 of the image detection device 100, and sends the request to the inspection condition generating device 255. Tell The inspection condition generation device 255 requests the image detection device 100 on which the inspection target is mounted to acquire an image in the same procedure as when setting the control information described above, and obtains a captured image of the inspection target from the image detection device. For the image, conditions for imaging conditions, preprocessing parameters, and parameters (binary thresholds and the like) used for inspection processing are set.
[0152]
The condition setting here is usually difficult to automate, and requires the assistance of the operator from the input / output unit. That is, the operator adjusts various parameters through trial and error so as to obtain an optimum inspection result. Then, once the condition is determined, the condition is transferred to another image detection device 100 connected by the information transmission system 300, and each image detection device requests an image of a dummy target. Each image detection device captures an image of the dummy object under the designated imaging conditions, and transmits the image to the inspection condition generation device 255. In the inspection condition generation device 255, the imaging condition of each image detection device 100 is set by the same method as that described in the condition setting method for reducing the machine-to-machine variation. The set conditions are stored in the inspection processing information storage storage device 270. According to this method, conditions are set so that inspection can be stably performed on inspection targets of various products and processes.
[0153]
(Configuration of computer used in information processing device)
Next, the computer configuration of the information processing device 200 in the visual inspection system according to the present invention will be described. The basic system configuration of the information processing device 200 is as shown in FIG. Here, the processing capacity is examined.
[0154]
In the information processing device 200, high-speed processing is required to process image data sent from the plurality of image detection devices 100. On the other hand, the speed to be inspected is determined by the data of the image to be inspected and the processing time. An inspection processing device 251 is provided as a device for processing image data detected in the inspection. It is not economical to arrange an unnecessarily high-speed computer in the information processing device 200 as the inspection processing device 251. Therefore, it is necessary to consider an optimal configuration of a computer to be arranged, for example, whether to arrange a difficult computer.
[0155]
Here, as the frequency of the appearance inspection, the inspection frequency of a certain period (for example, 1 minute) obtained by taking into account the type and amount of products manufactured at the manufacturing site, the number of processes to be inspected, and the like. Let M be the average value. Also, V is the average number of images to be processed in one appearance inspection. In this case, it is necessary to process data of M × V [pixel] on average per minute. Here, it is assumed that the computer constituting the inspection processing apparatus used for the determination processing and the like in the information processing apparatus 200 can change its calculation power stepwise like a parallel computer, and the minimum one calculation unit of the computer (for example, 1), the average of the processing time required for processing one pixel is P [sec]. At this time, in order to process the data of M × V [pixel] in one minute, at least (M × V × P) / 60 calculation units are required. In this estimation, the overhead due to the increase in the number of parallels is not considered, and it is assumed that the processing performance is doubled when the computer configuration is changed from the number of parallels 1 to the number of parallels 2. In this case, by using a parallel computer equipped with (M × V × P) / 60 or more calculation units for the information processing device 200, a computer required for the high-speed operation required by the information processing device 200 is provided. Means that it can be configured.
[0156]
The number of calculation units obtained by the above trial calculation is a trial calculation based on the average inspection frequency and image amount. For this reason, the inspection frequency and the amount of the detected image greatly vary depending on the time, the product type, and the like. For example, when the amount of image data to be processed is concentrated at a certain point, the calculation power may be insufficient. In this case, by making the storage device 260 for image storage provided in the information processing apparatus 200 or the like have a sufficiently large capacity, all the image data to be processed are stored, and the inspection processing is performed sequentially from the image data. As a result, some time lag occurs between the image detection and the result output. In a situation where the time lag is severely limited, a computer having the power calculated from the average data amount as described above is not sufficient, and the computer is large enough to perform the processing at the time when the data processing requests are concentrated most. Need to power. In such a situation, as described above, the information processing apparatus 200 may be configured with a sufficient number of computer powers to process an average amount of data.
[0157]
(Quality evaluation system)
Next, a quality evaluation system that is connected to a production factory via a large-scale network and performs quality control on products produced in the production factory will be described. As for the inspection of products which is a premise of quality control, it is assumed that a predetermined inspection device or the like is installed in each production factory. As the inspection device, for example, the same device as the above-described visual inspection system can be used. When the above-described appearance inspection system is installed, the inspection result of the appearance inspection system can be used.
[0158]
FIG. 23 shows a group of production factories to which one embodiment of the quality evaluation system is applied and a determination program development base. In FIG. 23, a production factory 400 that produces products such as printed circuit boards and semiconductor wafers and a determination program development base 500 are connected via a large-scale network 390. FIG. 24 shows the configuration of the determination program development base 500.
[0159]
As shown in FIG. 24, the determination program development base 500 includes a transmission / reception device 590 for data transmission / reception, a determination program, a program revision processing device 530 for calculating parameters and the like required for executing the determination program, and a keyboard. , A mouse, a display, etc., for inputting / outputting data to / from the determination program development base 500, a general controller 510 for controlling the operation at the determination program development base, and a storage for storing input / output data Device 540. These devices 510, 520, 530 and 540 are connected by a bus 550.
[0160]
As shown in FIG. 38, the storage device 540 stores a self-identifier file 541 that stores a self-identifier that specifies the judgment program development base 500, and a program that stores a judgment program and the like used in each information processing device 200. A storage file 542 and a program revision request list file 543 in which a program revision request sent from each production factory 400 is stored as a list are stored. The program storage file 542 stores a program ID, a product name, a process name, image data, a program before revision (conventional program), and a new program after revision. The program revision request list file 543 stores a program ID indicating a program that is a target of the program revision request, and the date and time of the revision request.
[0161]
FIG. 25 shows a configuration example of the production factory 400. The production line 410 is a site where products are produced. A manufacturing apparatus used for manufacturing, an inspection apparatus for inspecting a product, and the like are provided. They are connected to the information processing device 200 by a network 300 such as a LAN or other internal communication means. The gateway 350 is a device for connecting the large-scale network 390 outside the production factory and the network 300.
[0162]
If a plurality of types of products are manufactured in the production factory 400, a plurality of production lines 410 may be provided according to the types of products, or if there is one or more types of products, A plurality of production lines 410 may be provided for each process. When the production volume is small, one production line may be used. Each production line 410 is equipped with an inspection device for performing an inspection in a manufacturing process. As an example, it is assumed that one or more image detection apparatuses 100 of the appearance inspection system described above according to the present invention are installed in each production line 410.
[0163]
As the information processing device 200, for example, a device having the same configuration as the information processing device 200 illustrated in FIG. 3 can be used. Various inspection images detected in each production line 410, a program for processing the inspection images, processing conditions such as processing parameters, inspection results, and the like are stored. Further, it has a communication function with the determination program development base 500. The processing of adding an identifier and the encryption processing in the transmission and reception of data with the determination program development base 500 are performed in the same manner as the processing of data transmission and reception between the image detection apparatus 100 and the information processing apparatus 200.
[0164]
(Revision of processing program)
Next, a process of revising a processing program in the quality evaluation system of the present embodiment will be described. FIG. 26 shows the flow.
[0165]
First, an input of a program revision instruction by an operator is received through the input device 220 in the information processing device 200 (S2311). When receiving the program revision request, the general control device 210 in the information processing device 200 displays the inspection product name, the process name, and an image actually captured of the inspection product name and the process name on the screen of the output device 230 in order to specify the program to be revised. Prompts the operator to specify the program to be revised. The designation of any one of the programs by the operator is received (S2312). When the program is specified, the overall control device 210 specifies the specified program stored in the inspection processing information storage device 270, the processing conditions required for the process, and the image storage device 260. The selected images of the inspection process are selected and transmitted to the determination program development base 500 (S2313). At this time, the data type identifier for requesting the program revision is integrated in the identifier integrating unit 294 of the transmitting / receiving device 290.
[0166]
The processing program development site 500 receives the data from the information processing device 200, and adds the received program revision request to the list of the program revision request list file 543 stored in the storage device 540 (S5111). In the reception process, the transmission / reception device 590 recognizes the data type identifier, recognizes that a program revision request has been received, and decodes the transmitted data including the image data of the detection result. The data is stored in the storage device 540. Further, the request is stored in the program revision request list file 543 in the storage device 540, and the fact that the program revision request has been made is displayed on the display screen of the input / output device 520. Thus, the programmer at the program development site 500 can know that a program revision request has been made by referring to the display screen of the input / output device 520.
[0167]
Thereafter, the program revision processing device 530 receives an arbitrary selection from the program revision request list stored in the storage device 540, and reads the program corresponding to the program ID indicated by the request from the program storage file 542. Then, a process of revising the program is performed (S5112). In this revision work, an instruction to select an image sent from the information processing device 200 from the storage device 540 is received. Then, for a defect (for example, overlooked or false report) included in the detection result processed by the program sent by the information processing device, input of information for specifying the defect such as the position or mode is accepted. . The program revision processing device 530 develops a new program in order to improve those problems. For example, a process for changing a criterion, a parameter, and the like for determination to find a condition for eliminating a defect is performed. At this time, for example, as shown in FIG. 39, the input / output device 520 easily stores the processing result of the program before the revision, the processing result of the new program after the revision, the processed image 5220, etc. 5230 is displayed. In this figure, the inspection image 5221, the result image 5222 processed by the program before the revision, the result image 5223 processed by the new program, and the inspection result display unit 5230 by each algorithm are displayed on the same screen. Have been.
[0168]
The program revision processing device 530 receives an instruction by the programmer to terminate the program revision from the input / output device 520, stores the revised new program in the program storage file 542 of the storage device 540, and stores it in the general control device 510. In response, a program return instruction is sent. In response to the instruction, the general control device 510 returns the revised program read from the storage device 540 to the information processing device 200 that has issued the request to the information processing device 200 that has issued the revision request (S5113). At this time, the transmission / reception device 590 integrates a data type identifier indicating that the data is a program return, performs encryption processing, and transmits the data.
[0169]
The information processing device 200 performs the data type identifier recognition process and the decryption process on the received data, and stores the transmitted program at a predetermined position in the inspection process information storage storage device 270 (S2314).
[0170]
As described above, by updating the processing program via the large-scale network connecting the manufacturing factory 400 and the program development base 500, the time for the program update can be reduced. In addition, for security measures against data leakage, falsification, and the like, programs and image data transmitted over a network are encrypted.
[0171]
In this example, the procedure for revising the program has been described. However, it is also possible to set not only the program but also processing parameters and the like necessary for processing at the program development site and transfer the information to the information processing apparatus. For example, processing of changing conditions such as an imaging condition, a pre-processing condition, and an inspection processing condition stored in the inspection information file 143 is performed.
[0172]
The configuration of the production factory shown in FIG. 25 may be, for example, a configuration in which a plurality of production lines 410 are provided in a production site as shown in FIG. . In this case, in each of the plurality of information processing apparatuses 200, the program is revised according to the procedure described above.
[0173]
Further, as another configuration for realizing the quality evaluation system shown in FIG. 23, as shown in FIG. 28, a mode in which the information processing apparatus 200 is connected not to the production site but to a large-scale network 390 is also mentioned. In this embodiment, the information processing apparatus 200 performs an inspection process such as a defect determination, a work quality determination, and a control condition generation process on image data detected at a plurality of production factories.
[0174]
As described above, when connecting a production factory to a large-scale network, the production factory does not need to be limited to the same country, nor is it limited to the same company. However, when data of a plurality of production companies are managed collectively in one information processing apparatus, it is necessary to increase security so that image data and inspection data do not leak to other companies. For example, for all data in the information processing device, holding access information indicating whether or not to permit access from each company, when there is a data access request, refer to the access information, Only when the permission for the access source is set, measures such as permitting data access are performed.
[0175]
Further, the above-described program revision by the program-defined base 500 can be performed for a fee. That is, the program can be revised as a program revision business. In this case, a billing process is added. The charge can be calculated, for example, by counting the amount of work for each revised item of the program, and adding a product obtained by multiplying the counted amount of revised work by a unit price predetermined for each item. The amount to be collected can be determined by adding a basic fee and the like as necessary. The billing information is sent via the network 390 based on the program revision request.
[0176]
(Other Embodiments of Quality Evaluation System)
Next, another embodiment of the quality evaluation system according to the present invention will be described with reference to FIG. In this embodiment, a plurality of production factories 400 for mass-producing products such as printed circuit boards and semiconductor wafers and a quality evaluation base 600 for centrally performing quality evaluation are connected via a large-scale network 390.
[0177]
The production factory 400 includes, as shown in FIGS. 25 and 27, a production line 410 on which an image detection device for detecting an inspection image is arranged, an information processing device 200 for processing the inspection image and performing defect determination and workability determination, and the like. It shall be configured.
[0178]
In the present embodiment, the image detection device and the information processing device need not always be separated from each other as shown in FIGS. 25 and 27. For example, as shown in FIG. 30, the configuration may be such that the visual inspection device 900 is connected to the internal network 300 and the inspection results of those inspection devices 900 are stored in the inspection server 700.
[0179]
Further, the inspection results stored in the inspection server 700 are not limited to the results obtained by the visual inspection device as described above. For example, it may be an electrical test result. One example is an electrical test result in a semiconductor chip (LSI) manufacturing process. In other words, in this process, after the product is completed, it is checked whether the relationship between the electrical signals flowing through the input pins and the output pins of the chip satisfies the specifications, and based on the result, whether the chip is a good or defective product is determined. A determination electrical test is performed. The inspection results described above may include the results of such an electrical test device.
[0180]
FIG. 31 shows the internal configuration of the quality evaluation base 600. The quality evaluation base 600 is used to input / output data to / from the quality evaluation base 600 such as a transmission / reception device 690 for data transmission / reception, an evaluation processing device 630 for performing quality evaluation using various inspection results, a keyboard, a mouse, a display, and the like. An input / output device 620, an overall control device 610 for controlling operations, and a storage device 640 for storing input / output data. The devices 610, 620, 630, and 640 are connected by the network 300.
[0181]
The role of the quality evaluation base 600 shown in FIG. 31 is to collect inspection results at each production factory connected to the large-scale network through the large-scale network 390, analyze those data, and analyze the production factory, the production line, The purpose is to make the quality management status of each production company numerical and display it. FIG. 32 shows this processing procedure.
[0182]
First, the quality evaluation base 600 receives, from the operator via the input / output device 620, an instruction to issue a request to start collection of inspection results in each production factory (S6111). At this time, items specified by the operator include filter conditions for narrowing down the requested inspection result data, such as a product name, a process name, and an inspection date. In the quality evaluation base 600, in the storage device 640, filter item data such as a product name, a process name, a production factory name, a production company name, and an identifier of an information processing device holding the data as shown in FIG. Are stored in advance, for example, as a filter item list file 642. The overall control device 610 displays this filter item list on the screen of the input / output device 620. Therefore, it is easy for the operator to instruct a filter condition for narrowing down the acquired data from the input / output device 620 using these items. In addition, in the storage device 640, a self-identifier file 641 for storing the self-identifier, and a quality evaluation item file 643 for storing the quality evaluation items are placed.
[0183]
Upon receiving the test result collection start request, the overall control device 610 specifies the information processing device 200 to which the test result is requested from the contents of the filtering, sends the filter condition to the information processing device 200, and checks the test result. A request is made (S6113). In transmitting the request signal, the transmission / reception device 690 adds a necessary data identifier and performs encryption.
[0184]
Upon receiving the inspection result request signal, the information processing apparatus 200 recognizes and decodes the data type identifier (S2411). Thereafter, the filtering condition for returning the inspection result is recognized, and the inspection result is taken out from the storage device 290 for storing the determined inspection result in accordance with the content of the filtering condition (S2412). It is returned to the requesting quality evaluation base 600 (S2413).
[0185]
Upon receiving the returned inspection result (S6114), the quality evaluation base 600 stores it in the storage device 640 and displays on the input / output device 620 that the returned data has been received (S6115). At this time, the received data itself may be displayed.
[0186]
In this example, the quality evaluation base 600 collects data necessary for quality evaluation from each information processing base. However, it is not limited to this. The start of the data collection does not need to be instructed by the operator as described above. For example, a schedule for data collection may be stored in advance in the storage device 640 in the quality evaluation base 600 in units of date, day of the week, time, and the like, and data may be automatically collected according to the schedule. is there. Further, the data collection can be sent from the information processing apparatus side instead of starting from the request from the quality evaluation base side. For example, in the information processing device 2903, after the inspection process of one product or one process is completed, the inspection result is stored in the inspection result storage device 280, and the data is transmitted from the information processing device 200 to the quality evaluation base 600. It is also possible to send to. Further, this transmission processing may be performed according to a predetermined schedule.
[0187]
The quality evaluation base 600 calculates the quality evaluation information using the inspection results at each production site collected as described above. When receiving an instruction to calculate the quality evaluation information from the operator via the input / output device 620, the general control device 610 receives the instruction, reads out necessary inspection data from the storage device 640, and outputs the necessary inspection data to the evaluation processing device 630. Pass to.
[0188]
The evaluation processing device 630 calculates a quality evaluation item predetermined in the storage device 640. The items include items stored in the quality evaluation item file 643 shown in FIG. 40, that is, the inspection frequency, the number of defects on the product, the defect density (the number of defects per unit area of the inspection target), and the like. Further, as other items, items relating to data that is not directly included in the inspection result, such as the degree of cleanliness of the production line and the product production amount, may be used. Such data obtained from each production site and other than inspection results need to be included in the data collected from each information processing device or calculated from the obtained data. There is.
[0189]
A quality evaluation value is calculated for each production company, each production site, and each production line based on the collected data. The obtained quality evaluation value is recorded. Further, by comparing the results, the product quality is ranked for each production company, production site, and production line. For example, data such as the number of defects, the defect density, the yield, and the number of non-defective products are calculated and ranked. These data are stored in the storage device 640. The data to be stored is divided and stored, for example, as schematically shown in FIG. That is, files such as a production company list file, an inspection result list file, and a rank by product are stored.
[0190]
FIG. 33 is an example in which the calculated quality evaluation result is shown on the display screen of the input / output device 620. The production company list 6210 is data managed by the quality evaluation site 600, and includes company name, production site name, product name produced at each production site, monthly production amount of the product, and introduction. The number of inspection devices is displayed in a list. In the inspection result list 6220, the results of the inspection performed at each production site, for example, the number of defects and the defect density (the number of defects per unit area value) are displayed together with the production site name and the production company. The product rank 6230 displays, for each product, the product name as an index, the company name, the production base, and the number of non-defective products produced in descending order. The yield is a value obtained from the result of an electrical inspection performed after the product is completed, and represents the number of non-defective products with respect to the number of started products. Here, as an example, the order of each production base is shown using the yield. Of course, the items to be ranked are not limited to those.
[0191]
FIG. 41 shows a screen example in which the items on the inspection result list are displayed in detail. The inspection result information display 6240 displays a list of inspection result information 6240 such as a product name, a process name, and the number of defects of the data. In addition, the product appearance diagram 6250 displays the position information (×) of the detected defect and the number of the defect together with the appearance of the inspection product. In each case, defect images 6261 and 6262 are displayed as defect images 6260. The defect image 6250 is data included in the inspection result sent from each information processing device.
[0192]
The quality evaluation information including the examples shown in FIGS. 33 and 41 can be notified to a user who purchases a product in addition to being displayed on the input / output device 620.
[0193]
FIG. 34 shows an outline of another embodiment to which the quality evaluation system according to the present invention is applied. In this example, in the quality evaluation system shown in FIG. 29, a customer terminal 800 is connected to the large-scale network.
[0194]
FIG. 35 shows an example of the system configuration of the customer terminal. The customer terminal 800 includes a transmission / reception device 890 for data transmission / reception, an input / output device 820 for inputting / outputting data to / from the customer terminal 800 such as a keyboard, a mouse, and a display, a general control device 810 for controlling operations, and And a storage device 840 for storing data.
[0195]
FIG. 37 shows a processing flow between the customer terminal 800 and the quality evaluation base 600 in the present quality evaluation system. According to the present quality evaluation system, a customer who intends to receive the provision of the quality management service obtains the quality evaluation information of each production base stored in the quality evaluation base 600 at the customer terminal 800. Therefore, it is necessary to make a contract with the quality evaluation base 600 in advance, obtain the authority to access the quality evaluation base 600, and obtain a password for that.
[0196]
The customer terminal 800 transmits a success request for data reference from the input / output device 820 to the quality evaluation base 600 via the large-scale network 390 to notify the quality evaluation base 600 that the user wants to obtain the quality evaluation information (S8111).
[0197]
Upon receiving the access request (S5211), the quality evaluation base 600 sends a password input screen to the input / output device 820, and sends information for prompting the input of a password to the requesting customer terminal 800 (S6212).
[0198]
Upon receiving the information for prompting the input of the password, the requesting customer terminal 800 causes the display screen of the input / output device 820 to perform a display for prompting the input of the password based on the information (S8112). Upon receiving the input of the password via the input / output device 820, the customer terminal 800 sends the password to the quality evaluation base 600 (S8113).
[0199]
The quality evaluation base 600 receives the password sent from the customer terminal 800 (S6213), and performs a matching process for rejecting the password. If the password is recognized, a verification result indicating that the password has been recognized is transmitted to the customer terminal 800. If not, a verification result indicating that the password cannot be recognized is transmitted to the customer terminal 800 (S6214).
[0200]
Upon receiving the password verification result, the customer terminal 800 determines the result (S8114). If a collation result indicating that the password cannot be recognized is received, the process returns to step S8113 to display a password input screen. When it is indicated that the password is recognized, a display to accept the request from the operator is displayed on the display screen of the input / output device 820, and the input of the request is received via the input / output device 820 ( S8115). After that, the contents requested by the operator are transmitted to the quality evaluation base 600 (S8116).
[0201]
The quality evaluation base 600 receives the request content (S6215). The quality evaluation base 600 searches for data according to the received request content (S6216). The search result is transmitted to the requesting customer terminal 800 (S6217).
[0202]
The customer terminal 800 receives the search result (S8117). Then, the customer terminal 800 displays the received search result on the display screen of the input / output device 820 (S8118). For example, screens as shown in FIGS. 33 and 41 are displayed. The displayed content can be stored in the storage device 840 at the customer terminal 800.
[0203]
The customer who is provided with such quality evaluation information can select a product to purchase with reference to the production amount and the yield at each production company and each production factory. On the other hand, even if the production company provides data for a fee, it can secure the resources to reduce product costs and can objectively show the quality of its own company, You can move ahead.
[0204]
FIG. 36 shows an overall image of the quality evaluation system according to the present invention. As described above, in this configuration, (1) a production company having the production factory 400, (2) a customer having the customer terminal 800 to purchase a product, and (3) an image detection device used in the production factory 400 , Providing an information processing device for processing the detection data, and an inspection system providing company that operates a processing program development base 500 for revising the processing program, and (4) calculating quality evaluation data using the inspection results, Are connected to the large-scale network 390. The following data is exchanged between these companies as follows.
[0205]
Product producers earn their money by producing products at production plants and selling them to customers. The inspection system provider develops image detection devices and information processing devices and sells them to product manufacturers, and obtains compensation for them by revising the processing programs and the like at the judgment program revision base. Then, the quality evaluation company pays for having the data format disclosed so that the inspection result output from the inspection system provided by each inspection system provider can be input. On the other hand, the company pays the production company that provides the inspection results. The customer who purchases the product receives quality evaluation information from the quality evaluation company to pay attention to the quality management status of each product production company.
[0206]
(Other Embodiment of Visual Inspection System)
Next, an example in which the above-described visual inspection system is more specifically applied to a production line will be described with reference to FIGS. The example shown in FIG. 42 is a system of a type in which image detection devices are distributed and arranged for each process of a production line, and inspection results are collected and processed in an information processing device. On the other hand, the example shown in FIG. 43 is a system of a type in which the image detection devices are centrally deployed at the inspection station and the inspection is performed intensively at the inspection station. These can be appropriately selected according to the nature and scale of each step in the production line. Further, in the example shown in FIGS. 42 and 43, a plurality of optical systems are prepared in the imaging apparatus, and one of the optical systems is selected and inspected according to the inspection condition. However, except that there is a difference in the control device, it has basically the same configuration as the above-described image detection device. Here, the difference will be mainly described.
[0207]
In the appearance inspection system shown in FIG. 42, an inspection unit 100U is arranged in each of a plurality of processes such as film formation 411, development 412, and etching 413 on a production line 410. Each inspection unit 100U is connected to an information processing device 200 functioning as a host via a network 300. In addition, the inspection unit 100U includes a control device 115, a storage device 140, an imaging device 160, and a transmission / reception device 190.
[0208]
The imaging device 160 includes a stage (not shown) for placing the inspection target and displacing in the XYZ directions, a lighting device (not shown), optical systems 1651, 1652,..., 165n, and an optical system. And a displacement mechanism (not shown) for selecting and arranging them at a predetermined position, and an image sensor (not shown). The optical systems 1651, 1652,..., 165n are prepared in plurals that are variously different in magnification, viewing angle, spectral characteristics, illumination light guide and the like. These are selected by a selection signal from the control device 115, and the corresponding ones are arranged at the imaging position by the displacement mechanism.
[0209]
The control device 115 has a function of integrating the overall control device 110, the inspection control device 150, and the pre-processing device 180 included in the image detection device 100 described above. Further, the control device 115 generates and outputs an instruction to select a plurality of optical systems according to the inspection conditions. This is the point having the imaging control device 115. The imaging control device 115 implements the functions of the overall control device 110, the inspection control device 150, and the preprocessing device 180 described above.
[0210]
The information processing apparatus 200 includes an overall control device 210, an overall control storage device 240, an inspection processing device 251, an image storage device 260, an inspection process information storage device 270, and an inspection result storage device. 280 and a transmitting / receiving device 290. In this example, the inspection condition generator 255 is not provided. This is because, in this example, it is assumed that the inspection conditions are generated by the general control device. However, a configuration may be adopted in which the inspection conditions are taken in from an external system.
[0211]
The selection of the optical system can be easily performed, for example, by including in advance the information specifying which optical system to use in accordance with the inspection condition in the item of the inspection condition. For example, an optical system having performance according to the inspection purpose, such as an optical system equipped with a specific filter such as a polarizing filter and a color filter, an optical system having a different magnification, and an optical system having a function of guiding illumination light, is designated. Have the information ready. The control device 115 drives the displacement mechanism and arranges the supported optical system at the inspection position based on the information specifying the optical system included in the given inspection condition. This operation is the same in the case of FIG.
[0212]
The inspection operation by this system is basically the same as the above-described embodiment, except for the operation of selecting an optical system. Therefore, the description is omitted here.
[0213]
In the appearance inspection system shown in FIG. 43, an inspection station 100S for inspecting a plurality of processes such as film formation 411, development 412, and etching 413 in a production line 410 is arranged. The inspection station 100S is connected to the information processing device 200 functioning as a host via the network 300. The inspection station 100S is connected to the information processing device 200 functioning as a host via the network 300. Further, the inspection unit 100S includes a control device 115, a storage device 140, an imaging device 160, and a transmission / reception device 190. That is, the inspection station S has basically the same configuration as the inspection unit 100U. The difference is that the inspection is performed for a plurality of processes, and that the inspection conditions are assumed to be different for each process. Therefore, the control device 115 holds the inspection conditions for the plurality of processes.
[0214]
The inspection operation by this system is basically the same as the above-described embodiment, except for the operation of selecting an optical system. Therefore, the description is omitted here.
[0215]
According to the embodiment shown in FIGS. 42 and 43, the selection of the optical system can be performed, so that various inspection conditions can be handled. Therefore, it is possible to respond to a wide range of inspection conditions with a small number of inspection apparatuses without preparing different inspection apparatuses according to the contents of the inspection. As a result, it can be said that the inspection apparatus is excellent in terms of space merit and improvement in use efficiency. In particular, it is suitable as an inspection device in a production plant for low-volume, high-mix production.
[0216]
(Effects of Embodiment)
The effects that can be expected from each of the above embodiments are as follows.
[0219]
First, the effect on the manufacturing site of products such as printed wiring boards and semiconductor wafers is to reduce the space occupied by the inspection device in the production site. The part to be installed in the manufacturing site is only the detection part of the image, and does not occupy the area for the image processing unit.
[0218]
The usability of the inspection device is improved because the uniformity of the sensitivity of each image detection device is easily achieved. Even if the imaging conditions are adjusted and set for each individual image detection device, the quality of the actual inspection image varies from device to device, and it is necessary to adjust the processing parameters for each inspection device. By unifying, the elimination of the machine difference is easily achieved.
[0219]
Manufacturers with multiple manufacturing bases can centrally manage the inspection result information at each production base at a quality evaluation base connected via a network, allowing them to compare product workmanship at each production base, Adjustment and quality control status of each production site can be centrally managed.
[0220]
On the other hand, as an effect given to an inspection apparatus maker providing the inspection apparatus, it is possible to produce the inspection apparatus at low cost. This is because the image processing unit and the information processing apparatus can be manufactured and developed separately, and the development efficiency can be improved. In other words, when the generation of the product is replaced, when it becomes necessary to find a finer defect, or when it is necessary to perform inspection with a different specification from before, an imaging method in the image detection device, for example, Since the part relating to image detection such as the change of the type and the illumination system of the image sensor and the part relating to processing such as improvement of the processing program can be advanced independently, there is an advantage that development costs can be reduced.
[0221]
Further, it becomes possible to transfer an image processing parameter and an image processing program to be given at the time of the defect detection processing from the inspection apparatus maker side to the information processing apparatus via the network. In addition, since the image data itself required for setting the parameters can be transmitted from the production base to the inspection device maker side via the network, the period for improving the algorithm such as the determination program is shortened.
[0222]
In addition, the product buyer integrates the inspection results at each production site across multiple production sites and multiple manufacturers and provides quality evaluation information for each manufacturer. It can be obtained and used as a comparative study material when purchasing products. Such quality evaluation information can be used as an index for the manufacturer to improve product competitiveness.
[0223]
According to the present invention, when information such as image data, a processing program, inspection data, and quality evaluation information is transferred over a network, necessary encryption processing can be performed. Can be held.
[0224]
【The invention's effect】
According to the present invention, it is possible to provide a technique for reducing the size of an inspection apparatus installed at a production site and for easily setting processing conditions for detection results.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a visual inspection system and a quality evaluation system according to the present invention.
FIG. 2 is a block diagram illustrating a configuration of an image detection device according to the present invention.
FIG. 3 is a block diagram illustrating a configuration of an information processing apparatus according to the present invention.
FIG. 4 is a flowchart showing a flow of a visual inspection in the visual inspection system according to the present invention.
FIG. 5 is an explanatory diagram showing an example of a display screen of the image detection device according to the present invention.
FIG. 6 is a block diagram illustrating a configuration example of a preprocessing device of the image detection device according to the present invention.
FIG. 7 is a configuration diagram relating to a transmission function of the transmission / reception device of the image detection device according to the present invention.
FIG. 8 is a configuration diagram relating to a reception function of the transmission / reception device of the image detection device according to the present invention.
FIG. 9 is a configuration diagram relating to a reception function of the transmission / reception device of the information processing apparatus according to the present invention.
FIG. 10 is a configuration diagram relating to a transmission function of the transmission / reception device of the information processing apparatus according to the present invention.
FIG. 11 is an explanatory diagram showing the contents of a data type identification table according to the present invention.
FIG. 12 is an explanatory diagram showing an example of a display screen of the image detection device according to the present invention.
FIG. 13 is a flowchart illustrating an imaging condition setting processing flow according to the present invention.
FIG. 14 is an explanatory diagram illustrating an example of a display screen of an imaging condition setting process according to the present invention.
FIG. 15 is an explanatory diagram showing contents of a processing storage device of the information storage device according to the present invention.
FIG. 16 is an explanatory diagram showing a display screen example of the imaging condition setting processing according to the present invention.
FIG. 17 is an explanatory diagram illustrating an imaging condition setting process according to the present invention.
FIG. 18 is an explanatory diagram showing contents of a storage device of the image detection device according to the present invention.
FIG. 19 is an explanatory diagram showing the contents of an image storage device of the information processing device according to the present invention.
FIG. 20 is a block diagram showing a configuration of an electron beam type image detection device according to the present invention.
FIG. 21 is an explanatory diagram showing contents of a storage device of the information processing apparatus according to the present invention.
FIG. 22 is an explanatory diagram showing the contents of an inspection result storage device of the information processing apparatus according to the present invention.
FIG. 23 is a block diagram showing a configuration of a quality evaluation system according to the present invention.
FIG. 24 is a block diagram showing a configuration of a judgment program development base of the quality evaluation system according to the present invention.
FIG. 25 is a block diagram showing a configuration of a production factory of the quality evaluation system according to the present invention.
FIG. 26 is a flowchart showing a program revision flow in the quality evaluation system according to the present invention.
FIG. 27 is a block diagram showing a configuration of a production factory of the quality evaluation system according to the present invention.
FIG. 28 is a block diagram showing a configuration of a quality evaluation system according to the present invention.
FIG. 29 is a diagram showing a configuration of a quality evaluation system according to the present invention.
FIG. 30 is a block diagram showing a configuration of a production factory according to the present invention.
FIG. 31 is a block diagram showing a configuration of a quality evaluation base of the quality evaluation system according to the present invention.
FIG. 32 is a flowchart showing a flow of inspection result collection processing in the quality evaluation system according to the present invention.
FIG. 33 is an explanatory diagram showing a screen display example at a quality evaluation base of the quality evaluation system according to the present invention.
FIG. 34 is a block diagram showing a configuration of a quality evaluation system according to the present invention.
FIG. 35 is a block diagram showing a configuration of a customer terminal of the quality evaluation system according to the present invention.
FIG. 36 is a block diagram showing a configuration of a quality evaluation system according to the present invention.
FIG. 37 is a flowchart showing a flow of quality evaluation information transfer of the quality evaluation system according to the present invention.
FIG. 38 is an explanatory diagram showing contents of a storage device of a program development base in the quality evaluation system according to the present invention.
FIG. 39 is an explanatory diagram showing an example of a screen displayed at the program development site of the quality evaluation system according to the present invention.
FIG. 40 is an explanatory diagram showing contents of a storage device of a quality management information base in the quality evaluation system according to the present invention.
FIG. 41 is an explanatory diagram showing a screen display example at a quality evaluation site of the quality evaluation system according to the present invention.
FIG. 42 is a block diagram showing another embodiment of the present invention.
FIG. 43 is a block diagram showing another embodiment of the present invention.
[Explanation of symbols]
Reference Signs List 100: image detection device, 100G: detection device group, 110: general control device, 120: input device, 130: output device, 140: storage device, 150: inspection control device, 160: imaging device, 161: sample chamber, 164 ... Image sensor, 163 ... Illumination device, M ... Inspection object (sample), 162 ... Stage, 170 ... Electron beam imaging device, 180 ... Pre-processing device, 190 ... Transceiving device, 200 ... Information processing device, 209 ... Internal bus 210, general control, 220, input device, 230, output device, 240, general control storage device, 251, inspection processing device, 255, inspection condition generation device, 260, image storage device, 270, inspection process Storage device, 280: Storage device for storing inspection results, 300: Network, 400: Production factory, 500: Base for revising judgment programs, 600: Quality evaluation Point, 800 ... customer terminal.

Claims (10)

  1. In an overview inspection system that acquires an image of an inspection target and performs an appearance inspection,
    An image detection device that detects an image to be inspected,
    An image processing apparatus that processes an image detected by the image detection apparatus and determines whether there is an abnormality that appears in the image of the inspection target;
    The image detection device and the information processing device can be connected via a network,
    The image detection device transmits at least one of the detected image and the processed data to the information processing device with an identifier of the data,
    An appearance inspection system, wherein the information processing device identifies a received image based on the identifier included in received data and determines whether or not the abnormality is present.
  2. The visual inspection system according to claim 1,
    An appearance inspection system, wherein the identifier added to the data output from the image detection device includes information on an inspection characterizing the content of the inspection.
  3. The visual inspection system according to claim 2,
    The identifier includes, as information about the inspection, at least one of information on an inspection target whose image is detected, an inspection area in the inspection target, an imaging condition, an image detection device that has performed imaging, a production factory, and a production company. A visual inspection system characterized by including:
  4. The visual inspection system according to any one of claims 1, 2, and 3,
    The image detection device has a preprocessing device that performs preprocessing on an image obtained from the inspection target,
    The information processing apparatus determines the contents of preprocessing performed in the preprocessing apparatus and sends the contents to the image detection apparatus.
  5. The visual inspection system according to any one of claims 1, 2, 3, and 4,
    The information processing device has a unit that generates information for controlling an imaging condition in each image detection device,
    In the above image detection apparatus, an appearance inspection system is characterized in that imaging control is performed based on control information received from an information processing apparatus.
  6. The visual inspection system according to any one of claims 1 to 5,
    The information processing device includes a computer that processes an image detected by the image detection device and performs a process of determining whether an abnormality appears in the image of the inspection target.
    The visual inspection system is characterized in that the configuration of the computer is determined according to the content of processing performed by the computer and the amount of image data sent from the image detection device.
  7. The appearance inspection system according to any one of claims 1 to 6,
    An appearance inspection system, comprising: a means for encrypting data to be transmitted and received; and a means for decrypting encrypted information in the image detection device and the information processing device.
  8. A quality evaluation system that provides information for evaluating quality based on product inspection information,
    An inspection system for inspecting products,
    And a quality evaluation base that evaluates product quality using information obtained from the inspection system.
    The inspection system and the quality evaluation base can be connected by communication means,
    The inspection system includes an inspection result of the product and at least one of information on the inspection object, the position of the inspection object inspected, the detection condition of the inspection image, the image detection device that detected the image, the production line, and the production company. Has the function of sending
    The quality evaluation system has a function of acquiring information transmitted from one or more visual inspection systems, processing the information, and displaying the result.
  9. An inspection system having a function of revising a processing program used in an inspection system for inspecting a product,
    An inspection system for inspecting products,
    Having a program revision base for revising the processing program required for inspection processing in the inspection system,
    The above inspection system and the program revision base can be connected via a network,
    The inspection system has means for receiving and storing the processing program / processing condition information sent from the program revision base,
    The program revision base receives a change input of the inspection image / processing condition information transmitted from the inspection system, and has means for revising the program based on the change input.
    Quality control system characterized by the following.
  10. A system for providing information for evaluating the quality of a product produced in a production company to a customer terminal,
    An inspection system for inspecting products,
    A quality evaluation base that evaluates product quality information from information output by the inspection system,
    The inspection system, the quality evaluation base, and the customer terminal can be connected via a network,
    The quality evaluation base has means for storing quality evaluation information, means for searching for quality evaluation information in response to inquiries from customers, and means for sending the searched data to customers.
    A quality management system comprising: a means for inputting an inquiry to the quality evaluation base; and a means for displaying a transmission result from the quality evaluation base in the customer terminal.
JP2003016749A 2003-01-24 2003-01-24 Appearance inspection system, quality evaluation system using the same and quality evaluation information providing system Pending JP2004226328A (en)

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