JP2004223695A5 - - Google Patents

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Publication number
JP2004223695A5
JP2004223695A5 JP2003031015A JP2003031015A JP2004223695A5 JP 2004223695 A5 JP2004223695 A5 JP 2004223695A5 JP 2003031015 A JP2003031015 A JP 2003031015A JP 2003031015 A JP2003031015 A JP 2003031015A JP 2004223695 A5 JP2004223695 A5 JP 2004223695A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003031015A
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Japanese (ja)
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JP4035453B2 (ja
JP2004223695A (ja
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Publication date
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Priority to JP2003031015A priority Critical patent/JP4035453B2/ja
Priority claimed from JP2003031015A external-priority patent/JP4035453B2/ja
Publication of JP2004223695A publication Critical patent/JP2004223695A/ja
Publication of JP2004223695A5 publication Critical patent/JP2004223695A5/ja
Application granted granted Critical
Publication of JP4035453B2 publication Critical patent/JP4035453B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003031015A 2002-02-12 2003-02-07 構造体、構造体の製造方法、及び該構造体を用いたデバイス Expired - Fee Related JP4035453B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003031015A JP4035453B2 (ja) 2002-02-12 2003-02-07 構造体、構造体の製造方法、及び該構造体を用いたデバイス

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002034006 2002-02-12
JP2002340944 2002-11-25
JP2003031015A JP4035453B2 (ja) 2002-02-12 2003-02-07 構造体、構造体の製造方法、及び該構造体を用いたデバイス

Publications (3)

Publication Number Publication Date
JP2004223695A JP2004223695A (ja) 2004-08-12
JP2004223695A5 true JP2004223695A5 (enrdf_load_stackoverflow) 2006-03-23
JP4035453B2 JP4035453B2 (ja) 2008-01-23

Family

ID=32912775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003031015A Expired - Fee Related JP4035453B2 (ja) 2002-02-12 2003-02-07 構造体、構造体の製造方法、及び該構造体を用いたデバイス

Country Status (1)

Country Link
JP (1) JP4035453B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4865200B2 (ja) * 2003-08-07 2012-02-01 キヤノン株式会社 ナノ構造体及びその製造方法
JP4965835B2 (ja) * 2005-03-25 2012-07-04 キヤノン株式会社 構造体、その製造方法、及び該構造体を用いたデバイス
JP2007146214A (ja) * 2005-11-25 2007-06-14 Canon Inc 相分離膜及び構造体の製造方法
JP5016957B2 (ja) * 2006-03-17 2012-09-05 キヤノン株式会社 凹凸構造を有する型及び光学素子用型の製造方法並びに光学素子
JP5964744B2 (ja) * 2012-12-26 2016-08-03 富士フイルム株式会社 半導体膜の製造方法
EP3105362B1 (en) 2014-02-13 2018-04-11 Mimsi Materials AB Method of coating a substrate so as to provide a controlled in-plane compositional modulation

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