JP2004221330A - Electronic circuit board and its manufacturing method - Google Patents

Electronic circuit board and its manufacturing method Download PDF

Info

Publication number
JP2004221330A
JP2004221330A JP2003007013A JP2003007013A JP2004221330A JP 2004221330 A JP2004221330 A JP 2004221330A JP 2003007013 A JP2003007013 A JP 2003007013A JP 2003007013 A JP2003007013 A JP 2003007013A JP 2004221330 A JP2004221330 A JP 2004221330A
Authority
JP
Japan
Prior art keywords
electronic circuit
circuit board
wiring layer
thin film
circuit boards
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003007013A
Other languages
Japanese (ja)
Inventor
Yoichi Oya
洋一 大矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2003007013A priority Critical patent/JP2004221330A/en
Publication of JP2004221330A publication Critical patent/JP2004221330A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Combinations Of Printed Boards (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic circuit board that is highly dense, compact and small in thickness. <P>SOLUTION: The electronic circuit board 10 is provided with a plurality of small electronic circuit boards Pa an Pb having different electrical characteristics that are united on a fixing base 1, and a wiring layer such as a part mounting land 8 or the like is formed on the upper surface of their outermost layer. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、電子回路基板に関し、特に異種の複数枚の小型電子回路基板を一体化した構造の電子回路基板及びその製造方法に関するものである。
【0002】
【従来の技術】
先ず、従来の技術の電子回路基板の構造を説明する。
【0003】
従来、RF(無線周波数)、ベースバンド、電源などの電子回路が混載している電子機器の場合、それぞれの電子回路ブロック毎に電子回路基板を構成して、フレキシブル基板で接続するとか、ベースとなる回路基板上に、それらを実装するなどの手法で構成されていた。単一の基板上に構成する場合は、それぞれの電子回路ブロックに要求される基板の最適誘電率などが異なることから、基板設計のに当たって、絶縁層の厚みや配線幅を考慮して対応したり、要求される電気特性を補うために新たな部品を搭載したりしていた。
【0004】
【発明が解決しようとする課題】
しかし、従来技術の電子回路基板は、携帯型電子機器のように厚みや最外層表面上の部品搭載面積には限りがあり、近年、益々小型化、薄型化、軽量化される携帯型電子機器への要請を満足させることができなくなってきたという課題がある。
【0005】
本発明はこのような従来の問題点に鑑みて発明されたものであり、その目的は、複数の異種の小型電子回路基板を一体化した上で、同一の配線層を積み上げることにより、個々の小型電子回路基板或いは個々の電子回路ブロックの機能を高め、同時に、電子回路基板の小型、薄型化を実現することにある。
【0006】
また、半導体素子の製造工程で一般的に用いられているような薄膜形成技術を応用することにより、従来の電子回路基板には見受けられない微細配線、受動素子の内蔵を実現することにある。
【0007】
【課題を解決するための手段】
それ故、本発明の電子回路基板は、電気特性が異なる複数の小型電子回路基板を一体化した構造で、前記課題を解決している。これらの小型電子回路基板の上面に部品実装ランドなどの配線層を形成すること、その配線層は薄膜形成技術を用いて形成してもよく、更に、前記薄膜形成技術を用いて受動素子を組み込んでもによい。
【0008】
また、本発明の電子回路基板の製造方法は、要求の異なる電子回路毎に作製された小型電子回路基板を、それらの片面が同一平面になるように共通の固定ベースの平面上に配列する工程と、その配列された前記複数の小型電子回路基板の間及びそれらの周辺に電気絶縁樹脂を充填、硬化して一体化する工程と、その後、その一体化された前記複数の小型電子回路基板の上方に薄膜形成技術により配線層を形成する工程と、必要に応じて前記絶縁層に部品実装ランドを残して絶縁層を形成する工程を含めた製造工程を採って、前記課題を解決している。
【0009】
従って、本発明によれば、異なる電気特性の小型電子回路基板を一体化することができ、一定の厚み内でより一層高密度に実装することができ、電子機器の小型化、薄型化を実現することができる。
【0010】
また、一体化された小型電子回路基板の上方に薄膜形成技術で配線層を形成することにより、従来のプリント配線板にない微細な配線が可能になる。
【0011】
更に、受動素子を内蔵することにより、更なる小型化を実現することもできると共に配線長も短くなり、電気的特性をも向上させることができる。
【0012】
【発明の実施の形態】
以下、図を用いて、本発明の一実施形態の電子回路基板の構成、構造を説明する。
【0013】
図1は本発明の一実施形態の電子回路基板の半製品である一体化基板の製造工程を示す断面図、そして図2は図1に続く配線工程から本発明の電子回路基板を得る製造工程を示す断面図である。
【0014】
先ず、図1を用いて本発明の一実施形態の電子回路基板の製造方法を説明する。
【0015】
図1Aに示すように、固定ベース1の平面上に、異種の回路特性を持つ小型電子回路基板Pa(以下、単に「基板Pa」と記す)と小型電子回路基板Pb(以下、単に「基板Pb」と記す)を貼り付ける。この図示の例では、図面を簡略化するために、これらの基板Pa、Pbは3層基板で示したが、2層基板、4層基板などの一般的によく使用される多層基板であってもよいことを予め付言しておく。
【0016】
そしてここで異種の基板とは、誘電率等の電気特性の異なるものを想定しているが、有機基板に限らず、セラミック基板、金属基板、シリコン基板など、基板の材料は限定されるものではない。また、サイズに限らず、前記積層数、厚みの異なる基板であっても構わない。更に、RF回路、ベースバンド、電源などの電子回路の機能別電子回路基板であってもよい。
【0017】
図中では、2種の基板Pa、Pbのみで示したが、無論、2種以上の複数の小型電子回路基板を配列してもよい。
【0018】
また、固定ベース1の材質は、例えば、ガラス、シリコンなどで、表面が平面であることが肝要である。
【0019】
次に、同図Bに示したように、基板Paと基板Pbとの間及びそれらの周辺に、例えば、エポキシ樹脂のような電気絶縁樹脂(以下、単に「樹脂」と記す)2を印刷法などを用いて充填する。この場合、小型化する意味では、樹脂2はできるだけ少ない方が望ましいが、特に充填範囲は限定されるものではないし、後程、不要部分はカッティングして除去すればよい。
【0020】
次に、同図Cに示したように、樹脂2を硬化させて基板Pa、Pbを一体化した後、この一体化された基板Pa、Pbを固定ベース1から引き剥がす。剥離された面3は複数の基板Pa、Pbの片側が同一平面となっている。
【0021】
このようにして、複数の基板Pa、Pbの一体化基板4が得られる。なお、同図Cに示した一体化基板4の向きは剥離面3を上にして描かれていることを付言しておく。
【0022】
次に、図2を用いて一体化基板4の剥離面3(以下、「基板表面3」と記す)の上面に配線層を形成する工程を説明する。
【0023】
最初に、図2Aに示したように、同一平面となった基板表面3に、感光性の絶縁層5を形成する。この絶縁層5は、例えば、液状のベンゾシクロブテン(BCB)をスピンコート法で塗布した。しかし、絶縁層5の形成方法としては、スピンコート法に限定されるものではなく、ドライフィルム、カーテンコート、スピンコート印刷法などを用いることもできる。
【0024】
次に、同図Bに示したように、絶縁層5にバイアホール6を形成する。本発明では感光性のBCBを使用していることから、バイアホール6はマスクパターン(不図示)を用いて露光、現像することにより形成した。
【0025】
続いて同図Cに示したように、スパッタリング法及びメッキ法により絶縁層5及びバイアホール6の全面に、例えば、銅(Cu)の電極層7を形成し、この電極層7を同図Dに示した次工程で部品実装ランド、配線(以下、単に「部品実装ランド」と記す)などをパターニングし、部品実装ランド8を形成する。
【0026】
次に、同図Eの工程で、最外層に、その部品実装ランド8を除いて、ソレダーレジスト層9を形成して保護する。
【0027】
以上、説明した工程を経て最外層に部品実装ランド8や接続配線が施された、複数の異なる電気特性の基板Pa、Pbを一体化した構造の本発明の電子回路基板10を得ることができる。そして、その厚みはLCR(コイル、コンデンサ、抵抗器)を内蔵した従来の基板が1mm程度であるのに対して、本発明の薄膜基板であれば0.05mm程度とすることができる。
【0028】
前記図1に示した工程A〜工程C及び図2に示した工程A〜工程Eを必要に応じて繰り返し、層を積み重ねて行くことも自由であるし、今回、積み上げた面とは反対側に、層を積み重ねることもできる。また、前記の実施形態では作製プロセスで薄膜形成技術を使用したが、本発明はそのような薄膜形成技術の使用のみに限定するものではなく、従来の電子回路基板の製造プロセスを用いるものであっても構わない。
【0029】
更に、本発明においては、薄膜形成技術で形成する層、例えば、前記の実施形態では、部品実装ランド8には、受動素子(不図示)をも同時に形成し、そして絶縁層或いはソレダーレジスト層を形成して電子回路基板10内に内蔵してしまうこともできる。
【0030】
以上のように、異種の基板Pa、Pbを一体化し、より小型化した高密度実装が可能な電子回路基板10を作製することができる。
【0031】
【発明の効果】
以上の説明から明らかなように、本発明によれば、
1.異なる電気特性の小型電子回路基板を一体化基板とすることができること
2.一定の厚み内で、より一層高密度に実装することができること
3.受動素子を一体化基板である電子回路基板に内蔵することができること
4.その結果、より一層高密度の実装ができるようになり、電子機器の小型化、薄型化を実現することができること
5.薄膜形成技術を用いて配線層を形成することにより、従来のプリント配線板にない微細な配線が可能となること
6.配線長を短くすることができるようになり、電気的特性、特に高周波特性を向上させることができる
など、数々の優れた効果が得られる。
【図面の簡単な説明】
【図1】本発明の一実施形態の電子回路基板の半製品である一体化基板の製造工程を示す断面図である。
【図2】図1に続く配線工程から本発明の電子回路基板を得る製造工程を示す断面図である。
【符号の説明】
1…固定ベース、2…(電気絶縁性)樹脂、3…剥離面、4…一体化基板(半製品)、5…絶縁層、6…バイアホール、7…電極層、8…部品実装ランド、9…ソレダーレジスト層、10…本発明の一実施形態の電子回路基板、Pa,Pb…(小型電子回路)基板
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an electronic circuit board, and more particularly to an electronic circuit board having a structure in which a plurality of different kinds of small electronic circuit boards are integrated, and a method of manufacturing the same.
[0002]
[Prior art]
First, the structure of a conventional electronic circuit board will be described.
[0003]
2. Description of the Related Art Conventionally, in the case of an electronic device in which electronic circuits such as RF (radio frequency), baseband, and power supply are mixed, an electronic circuit board is configured for each electronic circuit block and connected with a flexible substrate or connected to a base. It is configured by a method such as mounting them on a circuit board. When configuring on a single board, the optimum permittivity of the board required for each electronic circuit block is different, so when designing the board, it is necessary to take into account the thickness of the insulating layer and the width of the wiring. In order to supplement the required electrical characteristics, new components were mounted.
[0004]
[Problems to be solved by the invention]
However, conventional electronic circuit boards are limited in thickness and component mounting area on the outermost layer surface like portable electronic devices, and in recent years, portable electronic devices have become increasingly smaller, thinner and lighter. Is no longer able to satisfy the requirements for
[0005]
The present invention has been made in view of such a conventional problem, and an object of the present invention is to integrate a plurality of different types of small electronic circuit boards and to stack the same wiring layer to achieve individual It is an object of the present invention to enhance the function of a small electronic circuit board or individual electronic circuit blocks, and at the same time, to realize a small and thin electronic circuit board.
[0006]
It is another object of the present invention to apply a thin film forming technique generally used in a semiconductor device manufacturing process to realize a fine wiring and a built-in passive element which cannot be found in a conventional electronic circuit board.
[0007]
[Means for Solving the Problems]
Therefore, the electronic circuit board of the present invention solves the above-mentioned problem by a structure in which a plurality of small electronic circuit boards having different electric characteristics are integrated. Forming a wiring layer such as a component mounting land on the upper surface of these small electronic circuit boards, the wiring layer may be formed using a thin film forming technique, and further, a passive element is incorporated using the thin film forming technique. But it is good.
[0008]
Further, the method of manufacturing an electronic circuit board according to the present invention is a step of arranging small electronic circuit boards manufactured for electronic circuits having different requirements on a plane of a common fixed base such that one side thereof is on the same plane. And filling and curing an electrically insulating resin between and around the arranged plurality of small electronic circuit boards to integrate them, and then forming the integrated plurality of small electronic circuit boards. The above problem has been solved by adopting a manufacturing process including a step of forming a wiring layer by a thin film forming technique and a step of forming an insulating layer by leaving a component mounting land on the insulating layer as necessary. .
[0009]
Therefore, according to the present invention, it is possible to integrate small electronic circuit boards having different electrical characteristics, to mount the electronic circuit boards at a higher density within a certain thickness, and to realize a smaller and thinner electronic device. can do.
[0010]
Further, by forming a wiring layer above the integrated small electronic circuit board by a thin film forming technique, fine wiring not available in the conventional printed wiring board can be realized.
[0011]
Further, by incorporating passive elements, further miniaturization can be realized, the wiring length can be shortened, and the electrical characteristics can be improved.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the configuration and structure of an electronic circuit board according to an embodiment of the present invention will be described with reference to the drawings.
[0013]
FIG. 1 is a sectional view showing a manufacturing process of an integrated substrate which is a semi-finished product of an electronic circuit board according to an embodiment of the present invention, and FIG. 2 is a manufacturing process of obtaining an electronic circuit board of the present invention from a wiring process following FIG. FIG.
[0014]
First, a method for manufacturing an electronic circuit board according to an embodiment of the present invention will be described with reference to FIG.
[0015]
As shown in FIG. 1A, a small electronic circuit board Pa (hereinafter simply referred to as “board Pa”) having different circuit characteristics and a small electronic circuit board Pb (hereinafter simply referred to as “board Pb”) having different circuit characteristics are provided on the plane of the fixed base 1. "). In the illustrated example, for simplification of the drawing, these substrates Pa and Pb are shown as three-layer substrates, but are generally used multilayer substrates such as a two-layer substrate and a four-layer substrate. It should be added in advance that this may be possible.
[0016]
And here, different types of substrates are assumed to have different electrical characteristics such as dielectric constant, but are not limited to organic substrates, and the materials of the substrates are not limited, such as ceramic substrates, metal substrates, and silicon substrates. Absent. Further, the present invention is not limited to the size, and the substrates may have different numbers of layers and different thicknesses. Further, it may be an electronic circuit board for each function of an electronic circuit such as an RF circuit, a baseband, and a power supply.
[0017]
Although only two types of substrates Pa and Pb are shown in the drawing, two or more types of a plurality of small electronic circuit substrates may of course be arranged.
[0018]
The material of the fixed base 1 is, for example, glass, silicon, or the like, and it is important that the surface be flat.
[0019]
Next, as shown in FIG. B, an electrically insulating resin (hereinafter, simply referred to as “resin”) 2 such as an epoxy resin is printed between and around the substrate Pa and the substrate Pb by a printing method. Filling using such as. In this case, in order to reduce the size, it is desirable that the amount of the resin 2 is as small as possible. However, the filling range is not particularly limited, and unnecessary portions may be removed by cutting later.
[0020]
Next, as shown in FIG. 7C, after the resin 2 is cured to integrate the substrates Pa and Pb, the integrated substrates Pa and Pb are peeled off from the fixed base 1. The peeled surface 3 has the same plane on one side of the plurality of substrates Pa and Pb.
[0021]
Thus, the integrated substrate 4 of the plurality of substrates Pa and Pb is obtained. It should be noted that the orientation of the integrated substrate 4 shown in FIG. C is drawn with the peeled surface 3 facing upward.
[0022]
Next, a process of forming a wiring layer on the upper surface of the peeled surface 3 (hereinafter, referred to as “substrate surface 3”) of the integrated substrate 4 will be described with reference to FIG.
[0023]
First, as shown in FIG. 2A, a photosensitive insulating layer 5 is formed on the coplanar substrate surface 3. The insulating layer 5 was formed by applying, for example, liquid benzocyclobutene (BCB) by spin coating. However, the method for forming the insulating layer 5 is not limited to the spin coating method, and a dry film, curtain coating, spin coating printing, or the like can also be used.
[0024]
Next, a via hole 6 is formed in the insulating layer 5 as shown in FIG. In the present invention, since the photosensitive BCB is used, the via hole 6 is formed by exposing and developing using a mask pattern (not shown).
[0025]
Subsequently, as shown in FIG. 5C, an electrode layer 7 of, for example, copper (Cu) is formed on the entire surface of the insulating layer 5 and the via hole 6 by a sputtering method and a plating method, and this electrode layer 7 is In the next step shown in (1), component mounting lands, wiring (hereinafter simply referred to as “component mounting lands”) and the like are patterned to form component mounting lands 8.
[0026]
Next, in the step of FIG. E, a solder resist layer 9 is formed and protected on the outermost layer except for the component mounting lands 8.
[0027]
As described above, it is possible to obtain the electronic circuit board 10 of the present invention having a structure in which a plurality of boards Pa and Pb having different electrical characteristics, in which the component mounting lands 8 and the connection wiring are provided on the outermost layer through the steps described above, are integrated. . The thickness of a conventional substrate having a built-in LCR (coil, capacitor, resistor) is about 1 mm, whereas that of the thin film substrate of the present invention is about 0.05 mm.
[0028]
The steps A to C shown in FIG. 1 and the steps A to E shown in FIG. 2 can be repeated as necessary, and the layers can be freely stacked. Alternatively, layers can be stacked. In the above embodiment, the thin film forming technique is used in the manufacturing process. However, the present invention is not limited to the use of such a thin film forming technique, but uses a conventional electronic circuit board manufacturing process. It does not matter.
[0029]
Further, in the present invention, a passive element (not shown) is simultaneously formed on the layer formed by the thin film forming technique, for example, in the component mounting land 8 in the above embodiment, and an insulating layer or a solder resist layer is formed. May be formed and embedded in the electronic circuit board 10.
[0030]
As described above, the different types of substrates Pa and Pb are integrated, and a more miniaturized electronic circuit board 10 capable of high-density mounting can be manufactured.
[0031]
【The invention's effect】
As is clear from the above description, according to the present invention,
1. 1. Small electronic circuit boards having different electrical characteristics can be integrated. 2. It can be mounted at a higher density within a certain thickness. 3. Passive elements can be built into an electronic circuit board which is an integrated board. As a result, higher-density mounting can be performed, and downsizing and thinning of electronic devices can be realized. 5. By forming a wiring layer using a thin film forming technique, it becomes possible to make fine wiring that is not present in conventional printed wiring boards. The wiring length can be shortened, and various excellent effects can be obtained, such as improvement in electrical characteristics, particularly, high-frequency characteristics.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating a process of manufacturing an integrated substrate which is a semi-finished product of an electronic circuit board according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view showing a manufacturing process for obtaining the electronic circuit board of the present invention from the wiring process following FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Fixed base, 2 ... (electric insulation) resin, 3 ... Release surface, 4 ... Integrated board (semi-finished product), 5 ... Insulation layer, 6 ... Via hole, 7 ... Electrode layer, 8 ... Component mounting land, 9: solder resist layer, 10: electronic circuit board of one embodiment of the present invention, Pa, Pb (small electronic circuit) board

Claims (7)

電気特性が異なる複数の小型電子回路基板を一体化した構造の電子回路基板。An electronic circuit board having a structure in which a plurality of small electronic circuit boards having different electrical characteristics are integrated. 前記複数の小型電子回路基板の上面に配線層が形成されていることを特徴とする請求項1に記載の電子回路基板。The electronic circuit board according to claim 1, wherein a wiring layer is formed on an upper surface of the plurality of small electronic circuit boards. 前記配線層が薄膜形成技術を用いて形成されていることを特徴とする請求項2に記載の電子回路基板。3. The electronic circuit board according to claim 2, wherein the wiring layer is formed by using a thin film forming technique. 前記薄膜形成技術を用いて受動素子が組み込まれていることを特徴とする請求項3に記載の電子回路基板。4. The electronic circuit board according to claim 3, wherein a passive element is incorporated by using the thin film forming technique. 要求の異なる電子回路毎に作製された小型電子回路基板を、それらの片面が同一平面になるように共通の固定ベースの平面上に配列する工程と、
該配列された前記複数の小型電子回路基板の間及びそれらの周辺に電気絶縁樹脂を充填、硬化して一体化する工程と、
その後、該一体化された前記複数の小型電子回路基板の上方に薄膜形成技術により配線層を形成する工程と
を含む電子回路基板の製造方法。
A step of arranging the small electronic circuit boards manufactured for each of the electronic circuits with different requirements on a plane of a common fixed base such that one side thereof is on the same plane,
A step of filling an electric insulating resin between and around the plurality of arranged small electronic circuit boards, and curing and integrating them,
Forming a wiring layer on the integrated plurality of small electronic circuit boards by a thin film forming technique.
前記配線層を、その部品実装ランドを残して絶縁層を形成する工程を含むことを特徴とする請求項5に記載の電子回路基板の製造方法。6. The method for manufacturing an electronic circuit board according to claim 5, comprising a step of forming an insulating layer on the wiring layer while leaving the component mounting lands. 前記配線層を薄膜形成技術により形成する場合に、内部に受動素子を形成することを特徴とする請求項5に記載の電子回路基板の製造方法。6. The method according to claim 5, wherein when the wiring layer is formed by a thin film forming technique, a passive element is formed inside the wiring layer.
JP2003007013A 2003-01-15 2003-01-15 Electronic circuit board and its manufacturing method Pending JP2004221330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003007013A JP2004221330A (en) 2003-01-15 2003-01-15 Electronic circuit board and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003007013A JP2004221330A (en) 2003-01-15 2003-01-15 Electronic circuit board and its manufacturing method

Publications (1)

Publication Number Publication Date
JP2004221330A true JP2004221330A (en) 2004-08-05

Family

ID=32897232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003007013A Pending JP2004221330A (en) 2003-01-15 2003-01-15 Electronic circuit board and its manufacturing method

Country Status (1)

Country Link
JP (1) JP2004221330A (en)

Similar Documents

Publication Publication Date Title
US6828224B2 (en) Method of fabricating substrate utilizing an electrophoretic deposition process
US8345438B2 (en) Electronic part module and method of making the same
US6967138B2 (en) Process for manufacturing a substrate with embedded capacitor
US20030049885A1 (en) Semiconductor package, method of manufacturing the same, and semiconductor device
US8236690B2 (en) Method for fabricating semiconductor package substrate having different thicknesses between wire bonding pad and ball pad
KR20020021366A (en) High frequency module device and method for its preparation
JP7074409B2 (en) Built-in element type printed circuit board
US8642898B2 (en) Circuit board structure with capacitors embedded therein
JP2009267310A (en) Capacitor component, its manufacturing method and semiconductor package
KR100770874B1 (en) Printed circuit board with embedded integrated circuit
US20090288873A1 (en) Wiring board and method of manufacturing the same
JP3941416B2 (en) High frequency module device and manufacturing method thereof
US20040187297A1 (en) Method of fabricating a polymer resistor in an interconnection via
JP2010283056A (en) Wiring board
JP2001223329A (en) Module having thin film circuit, method for manufacturing module having thin film circuit and thin film circuit
US20060017133A1 (en) Electronic part-containing elements, electronic devices and production methods
JP2008159973A (en) Electronic component module and circuit board with built-in components incorporating the module
US20080290507A1 (en) Chip embedded printed circuit board and fabricating method thereof
JP2004064052A (en) Noise shielding type laminated substrate and its manufacturing method
US20090077799A1 (en) Circuit board structure with capacitor embedded therein and method for fabricating the same
JP2004079736A (en) Substrate device with built-in chip and manufacturing method therefor
TW200845843A (en) Method for manufacturing printed circuit board with built-in capacitor
KR20120120789A (en) Method for manufacturing printed circuit board
KR20090079448A (en) Method for manufacturing printed circuit board having embedded chip and printed circuit board having an embedded chip using the same
US7958626B1 (en) Embedded passive component network substrate fabrication method