JP2004221285A5 - - Google Patents

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Publication number
JP2004221285A5
JP2004221285A5 JP2003006370A JP2003006370A JP2004221285A5 JP 2004221285 A5 JP2004221285 A5 JP 2004221285A5 JP 2003006370 A JP2003006370 A JP 2003006370A JP 2003006370 A JP2003006370 A JP 2003006370A JP 2004221285 A5 JP2004221285 A5 JP 2004221285A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003006370A
Other versions
JP4434592B2 (ja
JP2004221285A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003006370A priority Critical patent/JP4434592B2/ja
Priority claimed from JP2003006370A external-priority patent/JP4434592B2/ja
Priority to US10/748,807 priority patent/US20040152276A1/en
Publication of JP2004221285A publication Critical patent/JP2004221285A/ja
Publication of JP2004221285A5 publication Critical patent/JP2004221285A5/ja
Application granted granted Critical
Publication of JP4434592B2 publication Critical patent/JP4434592B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003006370A 2003-01-14 2003-01-14 デバイス Expired - Fee Related JP4434592B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003006370A JP4434592B2 (ja) 2003-01-14 2003-01-14 デバイス
US10/748,807 US20040152276A1 (en) 2003-01-14 2003-12-30 Device, and substrate on which circuit and antenna are formed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003006370A JP4434592B2 (ja) 2003-01-14 2003-01-14 デバイス

Publications (3)

Publication Number Publication Date
JP2004221285A JP2004221285A (ja) 2004-08-05
JP2004221285A5 true JP2004221285A5 (ja) 2006-01-19
JP4434592B2 JP4434592B2 (ja) 2010-03-17

Family

ID=32896772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003006370A Expired - Fee Related JP4434592B2 (ja) 2003-01-14 2003-01-14 デバイス

Country Status (1)

Country Link
JP (1) JP4434592B2 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4571488B2 (ja) * 2004-12-22 2010-10-27 日本電信電話株式会社 微細構造体
JP2006269127A (ja) * 2005-03-22 2006-10-05 Toshiba Corp マイクロマシンスイッチ及び電子機器
JP2006346787A (ja) * 2005-06-14 2006-12-28 Sony Corp 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP4552768B2 (ja) * 2005-06-14 2010-09-29 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP4586642B2 (ja) * 2005-06-14 2010-11-24 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP4580826B2 (ja) 2005-06-17 2010-11-17 株式会社東芝 マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ
JP2007000961A (ja) 2005-06-23 2007-01-11 Sony Corp 半導体複合装置およびその製造方法
CN101218654B (zh) * 2005-07-08 2012-08-08 模拟设备公司 Mems开关装置保护
JP4893112B2 (ja) * 2006-06-03 2012-03-07 株式会社ニコン 高周波回路コンポーネント
US10033179B2 (en) 2014-07-02 2018-07-24 Analog Devices Global Unlimited Company Method of and apparatus for protecting a switch, such as a MEMS switch, and to a MEMS switch including such a protection apparatus
FR3024587B1 (fr) * 2014-08-01 2018-01-26 Soitec Procede de fabrication d'une structure hautement resistive

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