JP2004154725A - All-fluororesin membrane module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance the waterproofness and low dusting characteristics of a separation membrane module used for ozone dissolution etc. <P>SOLUTION: The all-fluororesins membrane module 10 is constituted so that a membrane element 12 integrally formed by bundling the ends of a plurality of fluororesin separation members 11, and sealing the ends with a PTFE (Polytetrafluoroethylene) or hot meltable fluororesin, is contained in a housing 15 made of the PTFE or the hot meltable fluororesin which is provided with a cylindrical body 13 and a cap 14 for closing the openings of the cylindrical body 13. The sealing parts between bundling sections 16 and the caps 14 are provided with recessed parts 21 and projecting parts 20 continuous in a circumferential direction. In fixing the bundling sections 16 and the caps 14 by screwing, the projecting parts 20 are press fitted in a pressurized state into the recessed parts 21 to enhance sealability. Also, the caps are integrally projected with joints and the joints are connected to piping by providing the outer peripheral surfaces of the joints with external screw threads. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an all-fluorinated resin membrane module, and more specifically, is used for gas-liquid absorption, degassing, and filtration in semiconductors, foods, and other fields, and is particularly preferably used as an ozone-dissolving membrane module. In the container, a membrane element in which a plurality of hollow fiber-shaped porous separation membranes are bundled is accommodated, and the liquid is allowed to flow into the perforations of the separation membrane of the membrane element from the liquid inflow hole provided in the container. Ozone in the introduced gas is caused to permeate the separation membrane to generate ozone-dissolved water, and the ozone water is led out of an outlet hole provided in the container. This ensures chemical resistance such as sealing property and ozone resistance.
[0002]
[Prior art]
In a separation membrane module in which a membrane element in which a plurality of such hollow fiber-shaped porous separation membranes are bundled is housed in a container, a sealing material for the fluorine resin separation membrane and a housing (container) housing the fluorine resin separation membrane ), A resin material such as an epoxy resin or polysulfone is generally used.
[0003]
However, since the physical properties of these resin materials such as epoxy resins are limited, their use as separation membrane joules may be limited. In particular, it is difficult to use it for removing / recovering solids in extremely strong oxidizing chemicals such as concentrated nitric acid, or in solvents having strong dissolving power such as acetone, and dissolving ozone for precision cleaning of semiconductors and the like.
[0004]
In recent years, in semiconductor manufacturing processes and liquid crystal display manufacturing processes, etc., decomposition and removal of residual organic substances such as surfactants on silicon wafers, cleaning of glass substrates, cleaning after etching, cleaning after lapping, etc. Ozone-added ultrapure water is used, and the need for ozone-dissolved water is increasing. Therefore, a separation membrane module excellent in chemical resistance such as ozone resistance is particularly desired, and various proposals have been made.
[0005]
For example, Japanese Patent Application Laid-Open No. 6-296836 proposes an ozone-resistant membrane module provided with a hollow fiber membrane made of a fluorine resin, a housing made of stainless steel or the like, and an end sealing part made of a silicone resin.
[0006]
[Patent Document 1]
JP-A-6-296836
[Problems to be solved by the invention]
However, Japanese Patent Application Laid-Open No. 6-296836 has a problem that the sealing performance between the housing portion made of stainless steel or the like and an end sealing portion or the like is insufficient, and the fluid easily leaks from inside the housing to the outside.
[0008]
It is also conceivable to arrange an O-ring made of silicon rubber or the like between the members in order to enhance the sealing property between the members. However, when exposed to ozone gas during long-term use, cracks occur, and in particular, ozone, wet Since it is partially decomposed by ozone, the sealing property deteriorates. Therefore, the O-ring is also required to have chemical resistance. However, if the O-ring is made of fluororesin or the like like other members of the module, it may be difficult to obtain airtightness.
[0009]
Further, when a combination of different types of members is used, the connection between the members becomes insufficient, and fine particles and the like may be mixed into the housing from gaps between the members, which may affect the purity of the liquid. Therefore, low dusting properties are also required. In addition, it is conceivable to fill gaps between members by welding or the like, but a load may be applied during use depending on a location where welding is performed, and the sealing property may be impaired depending on the degree of load. Therefore, in such a module as described above, it is required that foreign matter or the like does not enter or leave the housing.
[0010]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has as its first object to improve the sealing property between a separation membrane element constituting a module and a housing (container). The second problem is to prevent the entry of fine particles into the inside.
[0011]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention provides a separation membrane element comprising a plurality of separation membranes made of fluororesin, which are converged, sealed with PTFE or hot-melt fluororesin, and integrated. An all-fluorinated resin membrane module housed in a PTFE or hot-melt fluororesin housing provided with a cap that closes the opening of the above, and an end face of both ends converging portions of the separation membrane element; And a cylindrical member, a seal portion is provided, and one of the seal portions is provided with a circumferentially continuous convex portion on one of the seal surfaces, and the other of the seal surfaces is fitted with the convex portion on the other seal surface. A concave portion continuous in the direction, and
The separation membrane element and the housing are screwed together and fastened with screws, and the concave and convex portions of the seal portion are press-fitted and tightly fitted by pressure by the screw tightening. Is provided.
[0012]
As described above, when the converging portion of the separation membrane element and the seal portion between the cap and / or the cylindrical member of the housing are configured such that the concave portion and the convex portion that are continuous in the circumferential direction are closely fitted in a pressurized state, The sealing property is improved.
Furthermore, in the present invention, all of the components of the module, such as the membrane element and the housing, are made of a fluororesin. Since it is made of resin, it is possible to realize extremely excellent chemical resistance and heat resistance.
[0013]
The direction in which the concave portion and the convex portion of the seal portion are provided (the concave direction and the projecting direction) may be any direction such as the axial direction and the radial direction of the membrane module and the cylindrical portion of the housing.
In addition, the concave and convex portions of the seal portion are continuously provided in the circumferential direction on the surface serving as the seal surface of the focusing portion, the cylindrical portion, and the cap, but may be provided in a linear shape, a curved shape, a meandering shape, or the like. The shapes may be appropriately combined according to the shapes of members such as a focusing portion, a tube portion, and a cap.
Further, a plurality of seal portions for fitting the annular concave and convex portions are provided, for example, two or three times, or provided at different positions. Can also be increased.
[0014]
The concave portion and the convex portion are shaped such that the cross-sectional shape of the convex portion is larger than the cross-sectional shape of the concave portion, and the convex portion is pressed into the concave portion. For example, the cross-sectional shape of the concave portion and the convex portion is a triangular shape, the vertex angle of the triangular shape of the concave portion and the convex portion to be fitted to each other, the vertex angle of the convex portion is larger than the vertex angle of the concave portion. It is preferable that the angle is 60 ° and the protrusion is 90 °. By making the vertex angle of the convex portion larger than the vertex angle of the concave portion to be fitted into the concave and convex portions, it is possible to further increase the adhesion force by press-fitting the convex portion and the concave portion, and the concave and convex fitting does not come off. Can also be enhanced. The cross-sectional shapes of the concave portion and the convex portion may be various shapes such as a polygonal shape and a circular shape as long as they can be fitted into each other.
[0015]
Specifically, while the concave portion or the convex portion is provided annularly at the peripheral portion of the axial end surface of the converging portion of the separation membrane element, the convex portion or the concave portion is provided at the peripheral portion of the inner surface of the lid portion facing the cap. Provided annularly, and
Screws that are screwed together are provided on the outer peripheral surface of the converging portion of the separation membrane element and the inner peripheral surface of the peripheral wall of the cap, and the ring-shaped uneven portion is added when the separation membrane element and the cap are screwed and fixed. Closely fitted under pressure.
[0016]
In addition, a convex portion that is circumferentially continuous is provided on one of the sealing surfaces of the cylindrical member and the cap of the housing, and the convex portion is fitted on the other sealing surface in the circumferential direction. Providing a continuous recess, and
A screw is provided on the peripheral wall of the cylindrical member and the peripheral wall of the cap or the cap link externally fitted to the cap, and the screw is fixed. The concave portion and the convex portion of the seal portion are press-fitted by pressurizing the screw. It is configured to be closely fitted.
With the above configuration, in addition to the sealing performance between the converging portion of the separation membrane element and the cylindrical portion or the cap, the sealing performance between the cylindrical portion of the housing and the cap can be enhanced.
[0017]
Further, it is preferable that the joint surface between the converging portion of the separation membrane element and the cap, the cylindrical member and the cap or the cap ring externally fitted to the cap be welded using PFA which is a fluororesin after being fixed by screwing. .
In addition, the sealability can be improved by fitting the concave and convex, and the sealability can be further improved by using PFA welding using PFA which is a fluororesin. The PFA welding is preferably performed continuously in the circumferential direction at the end of the sealing surface between the focusing portion and the cylindrical portion or the cap.
[0018]
The above-mentioned fluororesin separation membrane is composed of an aggregate of a plurality of hollow fibers made of PTFE, and the separation membranes are further bundled in number and both ends in the axial direction are integrally fixed with PTFE or hot-melt fluororesin, The separation membrane element is formed.
By constituting the plurality of separation membranes from an aggregate of hollow fibers, it is possible to more efficiently perform a process such as filtration or separation. The hollow fiber of PTFE has a fine fibrous structure in which flexible fibers are connected in a three-dimensional network, and has a large number of pores surrounded by a fibrous skeleton. The pores surrounded by the fibrous skeleton have various shapes such as a slit shape, and the performance of the hollow fiber can be defined by the average pore diameter and the porosity of the pores.
[0019]
Examples of the fluororesin used for the fluororesin separation membrane include polytetrafluoroethylene (PTFE), tetrafluoroethylene / perfluoroalkylvinyl ether copolymer (PFA), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), One or a variety of fluororesins such as ethylene / tetrafluoroethylene copolymer (ETFE), polychlorotrifluoroethylene (PCTFE), ethylene / chlorotrifluoroethylene copolymer (ECTFE), and polyvinylidene fluoride (PVDF) It can be used in combination of a plurality of types. PTFE is particularly preferred from the viewpoint of excellent moldability and mechanical strength.
[0020]
Further, the present invention provides a separation membrane element in which ends of a plurality of fluororesin separation membranes are bundled, sealed with a fluororesin, and integrated to form a cylindrical member and a cap for closing both axial openings of the cylindrical member. In an all-fluorine resin module housed in a fluororesin housing provided with
A fluid inflow path into the housing and a fluid inflow path into the separation membrane element are provided in the cap attached to one end of the cylindrical member, and a fluid outflow path into the housing and the separation membrane element in the other end cap. A fluid outflow channel in
The joint portion is formed by projecting the pipe connection side of the fluid inflow passage and the fluid outflow passage of the caps at both ends to integrally form a joint portion, forming an external thread on the outer peripheral surface of the joint portion, and projecting from the outer surface of the cap. The present invention provides an all-fluorinated resin module characterized in that a pipe tip is externally fitted to and connected with screws.
[0021]
According to the above configuration, the joint with the pipe is not joined to the cap by welding or the like, but the joint is provided so as to protrude from the outer surface of the cap. In addition, it is possible to prevent the entry of fine particles into the housing, and to reduce dust generation.
As described above, when the particles are low in dust generation, they are suitably used as a microfiltration filter or the like mainly used for refining semiconductor chemicals, and are particularly suitably used for dissolving ozone for precision cleaning.
[0022]
It is preferable that the above-mentioned joint part is provided to project perpendicularly from the outer surface of the cap, so that the workability at the time of connecting the pipe is excellent and the fluid easily flows. The fluid inflow passage and the outflow passage into the cylindrical portion of the housing may be provided in the radial direction.
The external thread on the outer peripheral surface of the joint is provided by cutting.
[0023]
On the inner surface of the cap having the joint portion protruding from the outer surface, a sealing surface comprising the concave portion or the convex portion is provided on the inner surface, and on the end surface of the separation membrane element, a sealing surface comprising the convex portion or the concave portion is provided. The female screw formed on the outer peripheral surface of the separation membrane element is screwed with the female screw formed on the outer surface of the separation membrane element.
With the above configuration, it is possible to obtain an all-fluorine resin module having excellent sealing properties and low dust generation.
[0024]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 3 show an ozone-dissolving all-fluorine resin membrane module 10 according to a first embodiment of the present invention.
The all-fluorinated resin membrane module 10 has a plurality of longitudinally elongated fluororesin separation membranes 11 arranged in a direction substantially parallel to each other at intervals in the figure, and the upper and lower ends 11a of both ends in the axial direction are converged. Membrane element 12 integrated with a sealing material made of PTFE, a cylindrical tubular member 13 and a flanged cap 14 (14A, 14B) for closing both end openings 13a of the tubular member 13. A pressure-resistant housing 15 is provided.
[0025]
The plurality of fluororesin separation membranes 11 whose both ends are bundled are each formed of an aggregate of hollow fibers made of PTFE. As shown in FIG. 2, a large number of fluororesin separation membranes 11 are bundled with a gap therebetween, and at both ends in the axial direction, a gap is filled with a sealing material 160 made of PTFE to be integrated and bundled. The end opening of the hollow fiber is exposed at the end face 16a of the converging section 16, so that fluid can flow from one end opening to the other end opening of each hollow fiber.
[0026]
As shown in FIGS. 1 and 3, the upper and lower caps 14 have a peripheral wall 14 b protruding from the outer periphery of the closing portion 14 a, and the two end focusing portions 16 of the separation membrane element 12 are provided in an internal space surrounded by the closing portion 14 a and the peripheral wall 14 b. Is fitted.
An annular recess 21 for sealing with the separation membrane element 12 is provided in the periphery of the inner surface 14a-1 of the closing portion 14a of the cap 14, and a female screw for attaching the separation membrane element is provided on the inner periphery of the peripheral wall 14b. 50 are provided.
Further, a convex portion 23 for sealing with the cylindrical member 13 is provided in an annular shape on the inner surface of the lower end of the peripheral wall 14b.
[0027]
A cap ring 17 is externally fitted to the cap 14 and assembled, and a female screw 60 is provided on the inner peripheral surface of the cap ring 17, and is screwed with a male screw 61 formed on the outer peripheral surface of the upper and lower ends of the cylindrical member 13. The upper and lower openings 13a of the cylindrical member 13 are closed by the closing portions 14a of the upper and lower caps 14.
[0028]
A projection 20 for sealing is annularly protruded from a peripheral edge of the front end face 16 a of the converging portion 16 at both ends of the separation membrane element 12, and is fitted to a recess 21 for sealing of the cap 14, and is connected to the outer peripheral surface. The male screw 51 of the cap 14 is screwed with the female screw 50 of the cap 14.
[0029]
As shown in FIG. 4, the cross-sectional shapes of the concave portion 21 and the convex portion 20 are each triangular, and the vertex angle of the triangular shape of the concave portion 21 and the convex portion 20 to be fitted to each other is larger than the vertex angle of the concave portion 21. The vertex angle is increased. Specifically, the vertex angle of the concave portion 21 is 60 °, and the vertex angle of the convex portion 20 is 90 °.
Therefore, when the convex portion 20 of the converging portion 16 and the concave portion 21 of the cap 14 are fitted into the concave and convex portions, the male screw 51 of the converging portion 16 is screwed into the female screw 50 of the cap 14 and tightened. The separation membrane element 12 and the upper and lower caps 14 are connected in a state where the portion 20 is forcibly pressed into the concave portion 21 and the convex portion 20 is tightly attached to the concave portion 21 with a strong force.
As shown in FIGS. 4A and 4B, the concave portion 21 'and the convex portion 20' may have a trapezoidal cross section or an arc shape.
[0030]
At the upper and lower ends of the cylindrical member 13, small-diameter cylindrical portions 13 c protruding from the outer peripheral wall 14 b of the cap 14 are projected, and a concave portion 24 for sealing is provided at the distal end surface, and a male screw 61 is formed on the outer peripheral surface. I have.
The concave portion 24 of the cylindrical member 13 is fitted to the convex portion 23 of the cap 14 in an uneven manner, and the cross-sectional shape of the concave and convex portions 24, 23 has the same relationship as the concave and convex portions 21, 20 shown in FIG. Therefore, when the female screw 60 of the cap link 17 is screwed into the male screw 61 of the cylindrical member 13 and tightened, the convex portion 24 is forcibly pressed into the concave portion 23, and the convex portion 23 adheres to the concave portion 24 with a strong force. In this state, the tubular member 13 and the cap 14 are connected.
[0031]
Further, after the converging portion 16 of the separation membrane element 12 and the cap 14, which are connected by screwing as described above, the cap 14, the cap link 17 externally fitted to the cap 14, and the cylindrical member 13 are fixed by screwing, the peripheral wall 14 b of the cap 14 is fixed. In the boundary between the lower end and the outer peripheral surface of the converging portion 16, the lower end of the cap link 17 and the outer peripheral surface of the cylindrical member 13, and the boundary between the cap 14 and the cap link 17, the entire periphery of the portion indicated by a black circle P in the drawing is shown. Are PFA-welded.
[0032]
Further, an inflow path 31 through which ozone gas flows into the housing 15 and an inflow path 32 through which pure water flows into the hollow fibers of the separation membrane element 12 are provided in the closing portion 14a of the lower cap 14B. An outflow passage 33 for discharging the exhausted ozone gas into the housing 15 and an outflow passage 34 for discharging the ozone-dissolved pure water from the hollow fiber of the separation membrane element 12 are provided in the closed portion 14a of the upper cap 14A.
On the pipe connection side of the inflow path and the outflow path of the caps 14A and 14B, joints 35 to 38 each having a cylindrical shape are integrally protruded from the outer surface of the closing part 14a.
Male threads 35a to 38a are engraved on the outer peripheral surfaces of the joints 35 to 38, and a pipe (not shown) is externally fitted to the joints 35 to 38 projecting from the cap 14 at the time of connecting the pipes, and connected by screwing. are doing.
[0033]
When assembling the all-fluorinated resin membrane module 10 having the above configuration, the upper and lower caps 14 are connected to both ends of the separation membrane element 12 by screws, and the sealing concave and convex portions 21 and 20 are fitted in a pressurized state. Next, with the separation membrane element 12 passed through the cylindrical member 13, the lower cap link 17 is externally fitted to the lower cap 14 </ b> A, and screwed to the lower cap link and the lower end of the cylindrical member 13. Next, the upper cap link 17 is externally fitted to the upper cap 14B, and the upper cap link 17 is connected to the upper end of the tubular member 13 by screwing.
[0034]
In the all-fluorine resin membrane module 10 assembled in this manner, the sealing portion between the converging portion 16 and the cap 14 of the separation membrane element 12 and the sealing portion between the cap link 17 and the cylindrical material 13 are all annular sealing protrusions. Since the portion is tightly fitted into the sealing recess by being screwed into the recess, the sealing performance can be extremely high. As a result, leakage of fluid from inside the housing 15 to the outside can be prevented.
[0035]
Also, instead of the joint with the pipe projecting from the cap 14 by welding, the joints 35 to 38 are provided by integrally projecting from the outer surface of the cap 14, and the joints 35 to 38 are connected to the pipe. The connection surely prevents foreign matters such as fine particles generated at the time of screw tightening rotation from entering the housing. As described above, it can be made to have low dust generation, so that it is particularly suitably used for dissolving ozone for precision cleaning.
[0036]
Furthermore, since all the components of the module such as the membrane element 12 and the housing 15 are made of fluororesin and all of the contact portions with the processing fluid are made of fluororesin, extremely excellent chemical resistance and heat resistance are achieved. Can be realized.
[0037]
The present invention is not limited to the above embodiment, and the concave portion and the convex portion may be exchanged in the seal portion between the focusing portion and the cap, and in the seal portion between the cap link and the cylindrical member.
Further, the cap and the cap link may be provided integrally.
Further, the converging portion of the membrane element may be sealed using a heat-meltable fluororesin. Various fluororesins other than PTFE can be used as the fluororesin separation membrane. Further, a heat-meltable fluororesin may be used for the housing.
Further, the terminal converging portion of the separation membrane element is internally fitted to both ends of the cylindrical member, and a cap is externally fitted and attached to the cylindrical member, and the concave and convex fitting for sealing is provided between the separation membrane element and the cylindrical member. It is good also as composition provided with a joint part.
Further, although the membrane module of the above embodiment is for dissolving ozone, it can be suitably used for gas-liquid absorption, degassing, filtration and the like in semiconductors, foods, and other fields.
[0038]
【The invention's effect】
As is apparent from the above description, according to the present invention, the separation membrane element is provided with a concavo-convex portion which fits into the sealing portion between the converging portion and the cap, and the sealing portion between the cap link and the cylindrical member, respectively. When the screw portion provided on the cylindrical member is screwed together with the cap, the cap link, and the cap link, the concavo-convex fitting portion is fitted in a pressurized state to enhance the sealing property, thus constituting a module. The sealing property between the members can be improved. As a result, it is possible to prevent the fluid from flowing out of the housing to the outside.
[0039]
Also, the joint is not joined to the cap by welding or the like, but the joint is provided integrally with the cap and protrudes outward, and the external thread is formed on the outer peripheral surface, so that the inside of the housing is Particles can be prevented from being mixed in, and low dust generation can be achieved. It is suitably used as a microfiltration filter or the like mainly used for semiconductor chemical liquid purification, and is particularly suitably used for dissolving ozone for precision cleaning.
[0040]
Furthermore, since all the components of the module consisting of the separation membrane element, the cylinder, the cap, and the cap link are made of fluororesin, and all the contact parts with the processing fluid are made of fluororesin, very excellent ozone properties, etc. Chemical resistance and heat resistance can be realized.
Therefore, when the all-fluorinated resin film module of the present invention is used for dissolving ozone, in a semiconductor manufacturing process, a liquid crystal display manufacturing process, and the like, decomposition and removal of residual organic substances such as a surfactant on a silicon wafer and cleaning of a glass substrate are performed. Ozone-added ultrapure water used for cleaning after etching, cleaning after lapping, and the like can be obtained.
[Brief description of the drawings]
FIG. 1 is a sectional view of an all-fluorine resin module according to a first embodiment.
FIG. 2 is a drawing showing an end face of a converging portion of a separation membrane element.
3A is an enlarged view of a main part of FIG. 1, and FIG. 3B is an exploded view.
FIG. 4 is a drawing showing a concave portion and a convex portion for sealing.
FIGS. 5A and 5B are diagrams showing another embodiment of the fitting of the unevenness.
[Explanation of symbols]
Reference Signs List 10 All fluororesin membrane module 11 Fluororesin separation membrane 12 Separation membrane element 13 Cylindrical material 14 Cap 15 Housing 16 Converging parts 20, 23 Convex parts 21, 24 Concave parts 35-38 Joint parts 35a-38a Male screw

Claims (9)

A separation membrane element formed by consolidating both ends of a plurality of fluororesin separation membranes, sealing them with PTFE or a heat-meltable fluororesin, and integrating the separation membrane element with a PTFE or heat pipe provided with a cylindrical member and a cap for closing an opening of the cylindrical member. In an all-fluorinated resin membrane module housed in a housing made of fusible fluororesin,
A seal portion is provided between the end surfaces of both ends of the separation membrane element and the cap or / and the cylindrical member of the housing, and a circumferentially continuous convex portion is provided on one of the seal surfaces of the seal portion. In addition, a concave portion that is circumferentially continuous with the convex portion is provided on one of the other sealing surfaces, and
The separation membrane element and the housing are screwed together and fastened with screws, and the concave and convex portions of the seal portion are press-fitted and tightly fitted by pressure by the screw tightening. All-fluorine resin membrane module. While the concave portion or the convex portion is provided in the peripheral portion of the axial end surface of the converging portion of the separation membrane element in an annular shape, the convex portion or the concave portion is provided in the peripheral portion of the inner surface of the cap portion facing the annular portion, and ,
Screws that are screwed together are provided on the outer peripheral surface of the converging portion of the separation membrane element and the inner peripheral surface of the peripheral wall of the cap, and the ring-shaped uneven portion is added when the separation membrane element and the cap are screwed and fixed. 2. The all-fluorinated resin membrane module according to claim 1, which is tightly fitted in a pressure state. A circumferentially continuous convex portion is provided on one of the sealing surfaces of the cylindrical member and the cap of the housing, and the circumferentially continuous convex portion is fitted on one of the other sealing surfaces. Providing a recess, and
A screw is provided on the peripheral wall of the cylindrical member and the peripheral wall of the cap or the cap link externally fitted to the cap, and the screw is fixed. The concave portion and the convex portion of the seal portion are press-fitted by pressurizing the screw. The all-fluorinated resin membrane module according to claim 1 or 2, wherein the module is closely fitted. The concave portion and the convex portion of the seal portion have a cross-sectional shape of the convex portion larger than a cross-sectional shape of the concave portion, and have a shape in which the convex portion is pressed into the concave portion. All-fluorine resin membrane module. 2. A joint surface between the converging portion of the separation membrane element and the cap, the cylindrical member and the cap or a cap ring externally fitted to the cap, and are welded using PFA which is a fluororesin after being fixed by screwing. The all-fluorinated resin film module according to claim 1. The all-fluorine resin membrane module according to any one of claims 1 to 5, wherein the fluororesin separation membrane comprises an aggregate of hollow fibers made of PTFE. The cap has a fluid inflow passage into the housing and a fluid inflow passage in the separation membrane element, while the other end has a fluid outflow passage into the housing and a fluid outflow passage in the separation membrane element,
The joints are provided integrally by projecting the pipe connection sides of the fluid inflow passage and the fluid outflow passage of the caps at both ends, and the outer peripheral surface of the joint is formed with an external thread, and the joint is projected from the outer surface of the cap. 7. The all-fluorinated resin membrane module according to any one of claims 1 to 6, wherein a pipe tip is externally fitted to and connected with screws. Separation membrane elements which are formed by concentrating the ends of a plurality of fluororesin separation membranes, sealing them with fluororesin, and integrating them, are made of a fluororesin provided with a cylindrical member and caps for closing both axial openings of the cylindrical member. In the all-fluorine resin membrane module housed in the housing,
The cap attached to one end of the cylindrical portion has a fluid inflow path into the housing and a fluid inflow path in the separation membrane element, while the cap at the other end has a fluid outflow path into the housing and the separation membrane element. A fluid outflow channel in
The joints are provided integrally by projecting the pipe connection sides of the fluid inflow passage and the fluid outflow passage of the caps at both ends, and the outer peripheral surface of the joint is formed with an external thread, and the joint is projected from the outer surface of the cap. An all-fluorinated resin membrane module, characterized in that the tip of the pipe is externally fitted and connected by screwing. The all-fluorine resin membrane module according to any one of claims 1 to 8, wherein the module is an ozone dissolving module for precision cleaning.

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