JP2004152861A - Semiconductor device - Google Patents

Semiconductor device Download PDF

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Publication number
JP2004152861A
JP2004152861A JP2002314303A JP2002314303A JP2004152861A JP 2004152861 A JP2004152861 A JP 2004152861A JP 2002314303 A JP2002314303 A JP 2002314303A JP 2002314303 A JP2002314303 A JP 2002314303A JP 2004152861 A JP2004152861 A JP 2004152861A
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JP
Japan
Prior art keywords
snubber
semiconductor device
circuit
capacity
connection terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002314303A
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Japanese (ja)
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JP2004152861A5 (en
Inventor
Toru Matsuoka
徹 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2002314303A priority Critical patent/JP2004152861A/en
Publication of JP2004152861A publication Critical patent/JP2004152861A/en
Publication of JP2004152861A5 publication Critical patent/JP2004152861A5/ja
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Semiconductor Integrated Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor device having sufficient serge inhibitable capacity by adopting a simple C snubber circuit or the like. <P>SOLUTION: In the case that the semiconductor device has large capacity, a plurality of numbers of chips (1) are often connected in parallel, and large capacity is realized. In the semiconductor device, snubber connection terminals (4, 5) are arranged to each of the chips (1), and individual snubber circuits are arranged to the snubber connection terminals (4, 5). <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
この発明は、半導体装置に関し、特にスナバ回路を具備した半導体装置に関するものである。
【0002】
【従来の技術】
電力用の半導体装置では、スイッチング時に発生するサージ電圧を抑制するためには、
▲1▼ ゲート抵抗を大きくしてスイッチング時間を短くする、
▲2▼ スナバ回路でサージ電圧を吸収する、などの方法が一般に取られている。
その半導体装置が大容量となるにつれ、サージ電圧も高くなるため、▲1▼▲2▼の手法を更に強化する必要がある。
【0003】
集積回路の入出力保護として、複数の外部端子に対して共通の入出力保護デバイスを接続している(例えば、特許文献1参照)。
【0004】
半導体集積回路の静電保護として、二つ以上のボンディングパッドが一つの静電保護回路を共用している(例えば、特許文献2参照)。
【0005】
スイッチング素子に用いるスナバ回路のコンデンサとして、MOSFETやバイポーラトランジスタのコレクタ・ベース間の接合容量を用いている(例えば、特許文献3参照)。
【0006】
【特許文献1】
特開平5−75023号「集積回路の入出力保護装置」(請求項1、図1)
【0007】
【特許文献2】
特開平2−151063号「半導体集積回路の静電保護回路」(請求項1、図1)
【0008】
【特許文献3】
特開平3−178214号「パワー半導体装置のスナバ回路」(請求の範囲1、第1図)
【0009】
【発明が解決しようとする課題】
上記▲1▼の手法は、大容量の場合、スイッチング損失が増大し冷却能力の増強が必要となる。また、▲2▼の手法及び特許文献2、3では、小容量素子では、コンデンサのみによるスナバ(Cスナバ)回路で十分効果が得られるのに対し、大容量素子では、コンデンサ、抵抗、ダイオードを組合せたスナバ(CRDスナバ)回路などの複雑な配線を講じたものでなければ効果が得られなかった。
【0010】
この発明は、単純なCスナバ回路などの採用で十分なサージ抑制能力を有する半導体装置を提供するものである。
【0011】
【課題を解決するための手段】
半導体装置が大容量の場合、チップを複数個並列接続して、大容量を達成していことが多い。本発明は、そのような半導体装置に対し、個々のチップにスナバ接続端子を設け、それらのスナバ接続端子に個別のスナバ回路を設ける。
【0012】
【発明の実施の形態】
実施の形態1.
図1に本発明の実施形態1に係わる大容量素子21を示している。この大容量素子21は、図示したように、絶縁基板上に設けた4個のチップ1を並列接続して、主端子2、3は共通にして一つの大容量素子を構成している。それらのチップ1に対して、スナバ接続端子4、5を設け、それぞれのチップ1に対して個別にスナバ回路を設ける。
【0013】
これらのスナバ接続端子4、5には周知のスナバ回路が接続されるが、このようにチップ毎にスナバ回路を接続する場合には、コンデンサのみによる簡単なCスナバ回路であってもサージ電圧を十分に抑制することができる。
【0014】
実施の形態2.
図2に本発明の実施形態2に係わる大容量素子22を示している。この大容量素子22は、絶縁基板上の単一のチップ11からなるが、そのチップ11を複数のセル11a単位に分割し、それぞれのセル11aにスナバ接続端子4、5を設け、個別にスナバ回路を設ける。この場合も実施形態1と同様に、Cスナバ回路だけでサージ電圧を十分に抑制することができる。
【0015】
実施の形態3.
図3に本発明の実施形態3に係わるトランジスタの構成図(左図)およびその等価回路(右図)を示している。配線パターン6を、エミッタ電極下にあるもの(6a)と、そうでないもの(6b)とに分割し、配線パターン6bを面全体のパターンとする。そして、その配線パターン6bをワイヤ7を用いてエミッタEに接続する。
【0016】
配線パターン6a、6bの下には、絶縁物8を挟んで別の配線パターン9が位置する。この場合、配線パターン6aと配線パターン9との間で絶縁物8によって、コンデンサCAP1が形成され、また、配線パターン6bと配線パターン9との間で絶縁物8によって、コンデンサCAP2が形成され、図3の右図に示すように、コレクタCとエミッタEとの間にコンデンサCAP1、CAP2が直列に接続されたことになる。
【0017】
このコンデンサがCスナバ回路のコンデンサとして機能する。この実施形態3では、チップの極めて近い個所にスナバ回路が形成され、また、利用されていなかった個所の基板パターン6bを活用できる。
【0018】
【発明の効果】
この発明は、半導体装置を構成するチップ毎にスナバ接続端子を設け、各スナバ接続端子にスナバ回路を接続するようにしたので、接続するスナバ回路としてはCスナバ回路のごとき単純なものでサージ抑制効果を十分に得ることができ、スナバ回路の接続も容易となる。
【図面の簡単な説明】
【図1】本発明の実施の形態1を示した半導体装置の斜視図
【図2】本発明の実施の形態2を示した半導体装置の斜視図
【図3】本発明の実施の形態3を示したトランジスタの断面図および等価回路図
【符号の説明】
1 半導体チップ、2 主端子、3 主端子、4 スナバ接続端子、5 スナバ接続端子、6 配線パターン、7 ワイヤ、8 絶縁物、9 基板パターン、21 大容量素子、22 大容量素子
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a semiconductor device, and more particularly to a semiconductor device having a snubber circuit.
[0002]
[Prior art]
In a power semiconductor device, in order to suppress a surge voltage generated during switching,
(1) Increase the gate resistance to shorten the switching time,
(2) A method of absorbing a surge voltage with a snubber circuit is generally employed.
As the semiconductor device becomes larger in capacity, the surge voltage becomes higher. Therefore, it is necessary to further strengthen the methods (1) and (2).
[0003]
As input / output protection of an integrated circuit, a common input / output protection device is connected to a plurality of external terminals (for example, see Patent Document 1).
[0004]
As electrostatic protection of a semiconductor integrated circuit, two or more bonding pads share one electrostatic protection circuit (for example, see Patent Document 2).
[0005]
As a capacitor of a snubber circuit used for a switching element, a junction capacitance between a collector and a base of a MOSFET or a bipolar transistor is used (for example, see Patent Document 3).
[0006]
[Patent Document 1]
JP-A-5-75023 "I / O protection device for integrated circuit" (Claim 1, FIG. 1)
[0007]
[Patent Document 2]
Japanese Patent Application Laid-Open No. 2-151630, "Electrostatic protection circuit for semiconductor integrated circuit"
[0008]
[Patent Document 3]
JP-A-3-178214, "Snubber circuit of power semiconductor device" (Claim 1, FIG. 1)
[0009]
[Problems to be solved by the invention]
In the above method (1), in the case of a large capacity, switching loss increases and cooling capacity needs to be increased. According to the method (2) and Patent Documents 2 and 3, a snubber (C snubber) circuit using only a capacitor can sufficiently obtain an effect with a small capacitance element, whereas a capacitor, a resistor, and a diode can be obtained with a large capacitance element. The effect was not obtained unless complicated wiring such as a combined snubber (CRD snubber) circuit was taken.
[0010]
The present invention provides a semiconductor device having a sufficient surge suppression capability by employing a simple C snubber circuit or the like.
[0011]
[Means for Solving the Problems]
When a semiconductor device has a large capacity, a large capacity is often achieved by connecting a plurality of chips in parallel. According to the present invention, a snubber connection terminal is provided for each chip in such a semiconductor device, and an individual snubber circuit is provided for each of the snubber connection terminals.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiment 1 FIG.
FIG. 1 shows a large capacity element 21 according to the first embodiment of the present invention. As shown in the figure, this large-capacity element 21 connects four chips 1 provided on an insulating substrate in parallel, and the main terminals 2 and 3 are commonly used to constitute one large-capacity element. Snubber connection terminals 4 and 5 are provided for these chips 1, and snubber circuits are individually provided for each chip 1.
[0013]
A well-known snubber circuit is connected to the snubber connection terminals 4 and 5. When a snubber circuit is connected to each chip as described above, even if a simple C snubber circuit using only a capacitor is used, the surge voltage can be reduced. It can be suppressed sufficiently.
[0014]
Embodiment 2 FIG.
FIG. 2 shows a large-capacity element 22 according to the second embodiment of the present invention. The large-capacity element 22 is composed of a single chip 11 on an insulating substrate. The chip 11 is divided into a plurality of cells 11a, and snubber connection terminals 4 and 5 are provided in each cell 11a. Provide a circuit. In this case, similarly to the first embodiment, the surge voltage can be sufficiently suppressed only by the C snubber circuit.
[0015]
Embodiment 3 FIG.
FIG. 3 shows a configuration diagram (left diagram) of a transistor according to Embodiment 3 of the present invention and an equivalent circuit (right diagram) thereof. The wiring pattern 6 is divided into a pattern under the emitter electrode (6a) and a pattern under the emitter electrode (6b), and the wiring pattern 6b is used as a pattern of the entire surface. Then, the wiring pattern 6b is connected to the emitter E using the wire 7.
[0016]
Another wiring pattern 9 is located below the wiring patterns 6a and 6b with the insulator 8 interposed therebetween. In this case, a capacitor CAP1 is formed between the wiring pattern 6a and the wiring pattern 9 by the insulator 8, and a capacitor CAP2 is formed between the wiring pattern 6b and the wiring pattern 9 by the insulator 8. 3, the capacitors CAP1 and CAP2 are connected in series between the collector C and the emitter E.
[0017]
This capacitor functions as a capacitor of the C snubber circuit. In the third embodiment, a snubber circuit is formed at a location very close to the chip, and the unused substrate pattern 6b can be used.
[0018]
【The invention's effect】
According to the present invention, a snubber connection terminal is provided for each chip constituting the semiconductor device, and a snubber circuit is connected to each snubber connection terminal. The effect can be sufficiently obtained, and the connection of the snubber circuit is facilitated.
[Brief description of the drawings]
FIG. 1 is a perspective view of a semiconductor device according to a first embodiment of the present invention; FIG. 2 is a perspective view of a semiconductor device according to a second embodiment of the present invention; FIG. Cross-sectional view and equivalent circuit diagram of the transistor shown.
DESCRIPTION OF SYMBOLS 1 Semiconductor chip, 2 main terminals, 3 main terminals, 4 snubber connection terminals, 5 snubber connection terminals, 6 wiring patterns, 7 wires, 8 insulators, 9 board patterns, 21 large capacity elements, 22 large capacity elements

Claims (4)

半導体装置を構成するチップ毎にスナバ接続端子を設けたことを特徴とする半導体装置。A semiconductor device, wherein a snubber connection terminal is provided for each chip constituting the semiconductor device. 単一の大容量チップをいくつかのセル単位で分割し、分割したそれぞれに対してスナバ接続端子を設けたことを特徴とする半導体装置。A semiconductor device, wherein a single large-capacity chip is divided into several cell units, and a snubber connection terminal is provided for each of the divided cells. 上記スナバ接続端子個々にCスナバ回路を接続する請求項1または2記載の半導体装置。3. The semiconductor device according to claim 1, wherein a C snubber circuit is connected to each of said snubber connection terminals. 基板上にある浮遊容量をスナバ回路のコンデンサとして用いた請求項1〜3のいずれかに記載の半導体装置。4. The semiconductor device according to claim 1, wherein a stray capacitance on the substrate is used as a capacitor of the snubber circuit.
JP2002314303A 2002-10-29 2002-10-29 Semiconductor device Pending JP2004152861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002314303A JP2004152861A (en) 2002-10-29 2002-10-29 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002314303A JP2004152861A (en) 2002-10-29 2002-10-29 Semiconductor device

Publications (2)

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JP2004152861A true JP2004152861A (en) 2004-05-27
JP2004152861A5 JP2004152861A5 (en) 2005-08-04

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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9231466B2 (en) 2011-09-20 2016-01-05 Rohm Co., Ltd. Electronic circuit
CN113748509A (en) * 2019-04-24 2021-12-03 罗姆股份有限公司 Semiconductor device with a plurality of semiconductor chips
DE112020002540T5 (en) 2019-04-24 2022-02-17 Rohm Co., Ltd. SEMICONDUCTOR COMPONENT

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9231466B2 (en) 2011-09-20 2016-01-05 Rohm Co., Ltd. Electronic circuit
CN113748509A (en) * 2019-04-24 2021-12-03 罗姆股份有限公司 Semiconductor device with a plurality of semiconductor chips
DE112020002540T5 (en) 2019-04-24 2022-02-17 Rohm Co., Ltd. SEMICONDUCTOR COMPONENT
CN113748509B (en) * 2019-04-24 2024-04-30 罗姆股份有限公司 Semiconductor device with a semiconductor device having a plurality of semiconductor chips
US12002794B2 (en) 2019-04-24 2024-06-04 Rohm Co., Ltd. Semiconductor device

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