JP2004150988A - Support structure of piezoelectric vibration type inertia sensor element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a support structure of a piezoelectric vibration type inertia sensor element providing favorable characteristics in the support structure of the piezoelectric vibration type inertia sensor element using a tuning fork type vibrator, at least, having two leg parts projecting in parallel to a Y axis from a base part. <P>SOLUTION: This support structure of the piezoelectric vibration type inertia sensor element uses the tuning fork type vibrator, at least, having two leg parts projecting in parallel to the Y axis from the base part. This support structure is characterized in that the piezoelectric vibration type inertia sensor element is supported to the approximately U-shaped support base in the Z-axial side and Y-axial bottom of the piezoelectric vibration type inertia sensor element in their fitted thereto. The support base is composed of an insulating body including dielectric. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a support structure for a piezoelectric vibration type inertial sensor element using a tuning fork vibrator.
[0002]
[Prior art]
A method of holding a piezoelectric vibrating inertial sensor element using a tuning fork vibrator processed by a conventional wet etching method is shown in FIG. 1-a of Patent Document 1 (Japanese Patent Publication No. 49-10691). As shown in the perspective view of FIG. 5, with the piezoelectric vibrating inertial sensor element cantilevered on a plate-like support made of ceramic or the like, the one principal surface of the piezoelectric vibrating inertial sensor element is On a plate-like support base via an adhesive.
[0003]
However, in the above method, since one main surface of the base of the piezoelectric vibration type inertial sensor element is fixed on the plate-shaped support base via an adhesive, each leg of the tuning fork type vibrator is used. There is a problem that the vibration is suppressed.
[0004]
In a method in which the main surface of the base occupying a large area in the piezoelectric vibration type inertial sensor element is fixed on a plate-like support with an adhesive, the temperature characteristic of the base of the piezoelectric vibration type inertial sensor element made of quartz is used. There is a problem that the influence of the distortion is directly transmitted to the vibrating part of the leg.
[0005]
In addition, the distortion due to the temperature change of the base of the piezoelectric vibration type inertial sensor element in the stationary state of the piezoelectric vibration type inertial sensor element described in Patent Document 2 (Japanese Patent Laid-Open No. 11-325911) propagates to the vibration part of the leg. There has been a problem that a deviation in the vibration direction of the leg, that is, leakage of vibration occurs, and as a result, an error occurs in the rotational angular velocity detected from the piezoelectric vibration type inertial sensor element.
[Patent Document 1]
JP-A-8-10691 [Patent Document 2]
JP-A-11-325911
The distance between the two legs in the piezoelectric vibration type inertial sensor element is very narrow, for example, about 0.5 mm as shown in the schematic side view of FIG. As shown in the schematic side view in FIG. 6 above, the operation of fixing the piezoelectric vibrating inertial sensor element so that the rotation axis is exactly parallel to the vertical direction using an adhesive on the table is extremely fine. It is a complicated work, and at the same time, there is a problem that a lot of man-hours are spent.
[Problems to be solved by the invention]
[0007]
SUMMARY OF THE INVENTION The present invention has been made in view of the above technical background, and an object thereof is to use a tuning fork type vibrator having at least two legs projecting from a base parallel to the Y axis. In the supporting structure of the piezoelectric vibrating inertial sensor element, the piezoelectric vibrating inertial sensor element is provided at the base thereof and at the bottom surface parallel to the Z-axis side surface and the Y-axis direction of the piezoelectric vibrating inertial sensor element. An object of the present invention is to provide a support structure for a piezoelectric vibration type inertial sensor element, wherein the inertial sensor element is supported in a state of being fitted to a substantially U-shaped support base.
[0008]
It is another object of the present invention to provide a piezoelectric vibratory inertial sensor element support structure, wherein the substantially U-shaped piezoelectric vibratory inertial sensor element support base is made of an insulator including a dielectric. I do.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a piezoelectric vibrating inertial sensor element support structure using a tuning fork vibrator having at least two legs protruding from a base parallel to the Y axis. At the base of the inertial sensor element, and at the bottom side parallel to the Z-axis direction and the Y-axis direction of the piezoelectric vibration-type inertial sensor element, the above-described piezoelectric vibration-type inertial sensor element is fitted to a substantially U-shaped support base. It is characterized by being supported by.
[0010]
At the same time, the above-mentioned substantially U-shaped support base of the piezoelectric vibration type inertial sensor element is made of an insulator including a dielectric.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the same reference numerals in each drawing indicate the same objects.
[0012]
FIG. 1 is a schematic side view of a support base 7 of a substantially U-shaped piezoelectric vibration type inertial sensor element 3 of the present invention viewed from the Z axis (thickness of the piezoelectric vibration type inertial sensor element 3). Since the support 7 of the present invention has a substantially U-shape, the main surface 4 of the piezoelectric vibration type inertial sensor element 3 does not contact the support 7. The piezoelectric vibration type inertial sensor element 3 is supported so as to be fitted on a substantially U-shaped support base 7 through an adhesive 8, and therefore, only the side surface 5 and the bottom surface 6 of the piezoelectric vibration type inertial sensor element 3 except for the main surface 4. Faces the surface inside the substantially U-shaped support base 7 via the adhesive 8.
[0013]
Since the piezoelectric vibration type inertial sensor element 3 is supported so as to be fitted into a substantially U-shaped support base 7 as shown in FIG. 2, the piezoelectric vibration type inertial sensor element 3 is mounted on a conventional plate-like support base. As shown in the schematic side view of FIG. 6 supported by an adhesive in a cantilevered state, the direction of the arrow as shown in FIG. It is not mounted diagonally.
[0014]
Note that the support 7 of the present invention has a substantially U-shape, and the shape of the substantially U-shaped support 7 in the direction of the side surface 5 or the bottom surface 6 of the piezoelectric vibration type inertial sensor element 3 is, for example, a conventional plate-like shape. It is needless to say that the case where the support 9 has a stepped shape as shown in FIGS. 3 and 4 showing examples of the support 9 is also included in the technical scope of the present invention.
[0015]
In the embodiment, an example using a two-leg tuning fork vibrator has been described. However, the same effects can be obtained not only for two legs but also for three or four legs, or when the legs are not parallel.
[0016]
【The invention's effect】
According to the present invention, the influence of distortion due to the temperature characteristics of the base of the piezoelectric vibrating inertial sensor element made of quartz is prevented from being propagated to the vibrating portion of the leg.
[0017]
Further, according to the present invention, the characteristics of the piezoelectric vibration type inertial sensor element can be improved, and the production yield can be significantly increased.
[Brief description of the drawings]
FIG. 1 is a schematic side view of the present invention as viewed from a Z-axis direction.
FIG. 2 is a schematic perspective view showing a pattern in which the piezoelectric vibration type inertial sensor element is fitted to the support base of the substantially U-shaped piezoelectric vibration type inertial sensor element of the present invention.
FIG. 3 is a schematic perspective view showing a pattern in which a piezoelectric vibration type inertial sensor element is fitted to a support base of a conventional piezoelectric vibration type inertial sensor element.
FIG. 4 is a schematic perspective view showing a pattern in which a piezoelectric vibration type inertial sensor element is held on a support base of a conventional piezoelectric vibration type inertial sensor element.
FIG. 5 is a schematic perspective view showing a pattern in which a piezoelectric vibrating inertial sensor element is cantilevered and held via an adhesive on a support plate of a conventional plate-shaped piezoelectric vibrating inertial sensor element.
FIG. 6 shows a Z-axis pattern of a conventional piezoelectric vibrating inertial sensor element which is held in a cantilever manner by an adhesive on a support of the conventional plate-shaped piezoelectric vibrating inertial sensor element. FIG. 3 is a schematic side view as viewed from a (thickness) direction.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base part 2 Leg part 3 Piezoelectric vibration type inertial sensor element 4 Main surface 5 Side surface 6 Bottom 7 Substantially U-shaped support stand 8 Adhesive 9 Plate-shaped support stand

Claims (2)

In a support structure of a piezoelectric vibration type inertial sensor element using a tuning fork vibrator having at least two legs protruding from a base parallel to the Y axis,
At the base of the piezoelectric vibrating inertial sensor element, and at the bottom surface parallel to the Z-axis direction and the Y-axis direction of the piezoelectric vibrating inertial sensor element, the piezoelectric vibrating inertial sensor element forms a substantially U-shaped support base. A support structure for a piezoelectric vibration type inertial sensor element, wherein the support structure is supported in a fitted state. 2. A support structure for a piezoelectric vibratory inertial sensor element according to claim 1, wherein the support of the substantially U-shaped piezoelectric vibratory inertial sensor element is made of an insulator including a dielectric.

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